CN110243658A - A kind of calibration method of interflow formula aerosol diluter - Google Patents
A kind of calibration method of interflow formula aerosol diluter Download PDFInfo
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- CN110243658A CN110243658A CN201910452458.3A CN201910452458A CN110243658A CN 110243658 A CN110243658 A CN 110243658A CN 201910452458 A CN201910452458 A CN 201910452458A CN 110243658 A CN110243658 A CN 110243658A
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- 239000000443 aerosol Substances 0.000 title claims abstract description 109
- 238000000034 method Methods 0.000 title claims abstract description 38
- 239000002245 particle Substances 0.000 claims abstract description 93
- 238000005259 measurement Methods 0.000 claims abstract description 38
- 239000012895 dilution Substances 0.000 claims abstract description 21
- 238000010790 dilution Methods 0.000 claims abstract description 21
- 239000000126 substance Substances 0.000 claims description 20
- 238000002156 mixing Methods 0.000 claims description 16
- 150000001336 alkenes Chemical class 0.000 claims description 6
- 229920006389 polyphenyl polymer Polymers 0.000 claims description 4
- 239000012925 reference material Substances 0.000 claims description 4
- 238000005070 sampling Methods 0.000 claims description 4
- 239000003085 diluting agent Substances 0.000 claims description 2
- 239000008187 granular material Substances 0.000 claims description 2
- 239000002105 nanoparticle Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 21
- 239000000243 solution Substances 0.000 description 11
- 239000013618 particulate matter Substances 0.000 description 5
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000012086 standard solution Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 241001411320 Eriogonum inflatum Species 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
- G01N2001/386—Other diluting or mixing processes
- G01N2001/387—Other diluting or mixing processes mixing by blowing a gas, bubbling
-
- G01N2015/1024—
Abstract
The invention belongs to nano particle metering field more particularly to a kind of calibration methods of interflow formula aerosol diluter.Through calibrated corpuscular counter before and after using aerosol diluter, particle concentration value is measured, calculates the dilution ratio of diluter, and the comparison with nominal value, completes the calibration to diluter.Calibration system includes: aerosol generator, uniform vortex mixer, standard particle counter.The present invention uses scientific and reasonable calibration method, guarantees the accurate and reliable of its measurement result.Calibration method of the invention can effectively pairing streaming aerosol diluter calibrated, improve the measurement accuracy of the analysis instruments such as corpuscular counter, establish technical support is provided for the traceability system of amounts of particles concentration.
Description
Technical field
The invention belongs to nano particle metering field more particularly to a kind of calibration methods of interflow formula aerosol diluter.
Background technique
For measuring instrument when carrying out granularmetric analysis, excessive concentration can make phenomena such as the condensing that collide, reunite between particle, shadow
Ring the accuracy of measurement result.The main function of aerosol diluter is, molten by being diluted to reduce gas to aerosol
The concentration of glue solves the problems, such as to be unable to test high concentration or flow mismatch etc. when grading analysis.
Such as in nano particle counted fields, since the traceability system of low strength range endoparticle number concentration is not yet established,
The good enriched sample of traceability need to be subjected to accurate dilutions, low concentration sample known to amounts of particles concentration be obtained, thus real
Now to the calibration etc. of particle collector, aerosol partial size spectrometer.JJF1562-2016 nuclei of condensation corpuscular counter calibrating standard,
Online airborne particle counter calibrating standard, ISO 21501-4-2007 international standard (grain size analysis individual particle optical measuring method
4th part), in ISO27891-2015 (calibration of aerosol particle number concentration-nuclei of condensation corpuscular counter), be required to adopt
Accurate dilutions are carried out to particulate matter with aerosol diluter.In above-mentioned measurement and calibration, aerosol diluter metering performance
Quality directly affects the reliability of measurement result.
The principle of interflow formula aerosol diluter it is as follows: as shown in Figure 1, original aerosol and cleaning compressed gas press
Certain proportion enters dilution cavity, and two kinds of gases after mixing, acquire the matching analysis instrument institute by thief hatch in the cavity
Aerosol flow value is needed, excessive gas passes through other mouthfuls of emptyings.
Therefore, the accuracy of aerosol diluter thinner ratio is most important, but currently there has been no aerosol diluters
Vertification regulation and calibrating standard and relevant Standard andRegulation.It is general select aerosol photometer method, optical particle counter method,
Hydrometry calibrates the thinner ratio of aerosol diluter.But there are still following at present for above-mentioned three kinds of calibration methods
Defect:
(1) aerosol diluter thinner ratio is calibrated using aerosol photometer method
The measurement range of aerosol photometer be (0.0001~120) μ g/L, the limits of error be no more than ± 5%, and
Aerosol diluter, which aims at, solves this problem of high concentration for being unable to test of airborne particle counter and specially designed, grain
The general optimum measurement range of sub-count is to calculate its mass concentration in (3000~30000)/28.3L and be much smaller than 0.1 μ g/L, because
This aerosol diluter using magnitude be aerosol light bead metering journey measurement lower limit, the error of indication of measurement is larger, measurement
It is uncertain big.
(2) aerosol diluter thinner ratio is directly calibrated using the limited range of optical particle counter
According to " JJF1190-2008 airborne particle counter calibrating standard " in regulation corpuscular counter particle concentration
The repeatability of measured value is not more than 10%FS, and the error of indication of particle concentration is less than ± 30%.Made using particle counter measuring
When making the concentration of the aerosol generator before and after diluter, can make corpuscular counter work at the same time in high concentration and low concentration two
On a gear, and particle counting makes to measure diluter if the uncertainty of the error of indication in two gears is all excessive
The error of indication of thinner ratio be much larger than ± 30%, and general diluter thinner ratio show the error of title value be usually no more than ±
10%, the data that measurement obtains so just lose meaning." the laser particle counter (the OPC)-nuclei of condensation generally acknowledged in the world at present
In the chain of tracing to the source step by step of corpuscular counter (CPC)-aerosol electrostatic meter (FCE) ", that is, pass through nuclei of condensation corpuscular counter (CPC)
Realize the calibration of the measurement result of laser particle counter, the laser particle counter measurement result after calibration can trace to the source to country
Current standard, aerosol diluter as in chain of tracing to the source to it is lower and on an important ring, if diluter is allowed to trace to the source to particle again
Counter will result in chain confusion of tracing to the source.
(3) aerosol diluter thinner ratio is calibrated using hydrometry
The flow for only measuring the flow of predecessor counter and the clean compressed gas of supplement, then calculates its dilution
Than can not really measure the changing value situation in diluter of particle concentration at all, the substance for having ignored aerosol particle is special
Property, i.e., aerosol particle whether there is the factors such as cohesion, attachment in diluter.
Therefore, the calibration method of the reliable aerosol diluter of and result small there is an urgent need for a kind of measurement error at present.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of calibration method of interflow formula aerosol diluter, use
Scientific and reasonable calibration method guarantees the accurate and reliable of its measurement result.
The present invention is implemented as follows:
A kind of calibration method of interflow formula aerosol diluter of the invention, specifically comprises the following steps:
(1) calibration sample is prepared: the monodisperse particle certified reference material that calibration is 0.5 μm of partial size using standard substance,
Spot measurement is carried out for the diluter of fixed dilution ratio；For the diluter of dynamic dilution ratio, in maximum dilution than in range
Select 3 points of upper, middle and lower as measurement point.
Standard substance sample is diluted, obtains 2 samples, wherein the concentration of 2# sample should be the f of 1# sample concentration
Times, then the required measurement point when f is the fixed extension rate of diluter or calibration carries out school according to remaining steps
It is quasi-.
(2) calibration system includes sequentially connected aerosol generator, uniform mixing tank, standard particle counter, is used
When, 1# sample is atomized in the aerosol generator, and adjust aerosol flow and be less than standard particle counter
Flow is connected to uniform mixing tank, and into standard particle counter, gas flow needed for standard particle counter is in addition to aerosol
Except generator supply, insufficient gas is inhaled into uniform mixing tank by HEPA or ulpa filter, flows into standard particle meter
Number device makes the two flow matches.
(3) when using 1# sample, the setting parameter of aerosol generator is adjusted, the particle of standard particle counter measures is made
Concentration is within the scope of (3000~30000)/28.3L, and duplicate measurements 3 times, the average value of the concentration of record standard corpuscular counter,
That is C1；
(4) when using 2# sample, interflow formula aerosol diluter to be calibrated is replaced to the connection of uniform mixing tank, even if
The gas outlet of the input port connection aerosol generator of diluter, the delivery outlet of diluter connect the defeated of standard particle counter
Entrance, while the dilution mouth for collaborating formula aerosol diluter is passed through clean gas, setting system parameter ensures aerosol generator
Flow and the flow of clean gas be greater than the flow of standard particle counter, extra gas and is measured by bypass emptying
Measured value of the 2# sample in standard particle counter, duplicate measurements 3 times, i.e. the average value C of particle concentration2, it is generally the case that mark
The sampling time of quasi particle counter setting is 1 minute, i.e. C1、C2It is collected within standard particle counter one minute
Aerosol total particle number.
(5) it is remained in particulate matter aerosol generator pipeline in order to prevent, influences the accuracy of measurement, under normal circumstances,
Standard substance C first low using concentration1, using highly concentrated standard substance C2, and when replacement particulate matter, occur to aerosol
Its concentration of device stabilization is measuring.
(6) the thinner ratio f of the interflow formula aerosol diluter is finally calculated as follows0.5, such as formula (1) institute
Show, and compared with nominal value f, calculates its error of indication Δ δf,0.5, the calibration of pairing streaming aerosol diluter is completed, such as
Shown in formula (2):
Further:
In step (1), the monodisperse particle certified reference material is monodisperse polyphenyl alkene (PSL) particles levels object
Matter, partial size is 0.5 μm, or selects the standard substance of other partial sizes according to actual needs.
In step (2), the aerosol generator includes gas mass flow meter, aerosol atomizing with micromanipulator
Device and drier.Wherein drier guarantees the humidity for the sol particles that it is generated lower than 30%.
In step (3), the uniform mixing tank is equipped with an aerosol entrance, a clean diluent air entrance and one
A aerosol outlet, the aerosol entrance connect the aerosol generator, and the aerosol outlet connects the standard grain
Sub-count device.
In step (4), the requirement of the aerosol generator are as follows: Standard Gases of partial size in the range of 0.1 μm~5 μm are molten
Glue particle can be atomized.
In step (5), the requirement of the uniform mixing tank are as follows: the stability of the aerosol concentration in 10 minutes should be better than
1%.
In step (6), the requirement of the standard particle counter are as follows: should have 0.3 μm, 0.5 μm, 1.0 μm, 5.0 μm
Partial size gear, and the amounts of particles concentration being capable of measuring within the scope of (3000~30000)/28.3L, repeatability are better than 3%.
The present invention has the advantage that calibration method of the invention can effectively pairing streaming aerosol diluter carry out school
Standard improves the measurement accuracy of the analysis instruments such as corpuscular counter, provides technology branch for the traceability system foundation of amounts of particles concentration
Support.
Detailed description of the invention
The present invention is further illustrated in conjunction with the embodiments with reference to the accompanying drawings.
Fig. 1 is the schematic diagram of interflow formula aerosol diluter.
Fig. 2 is the composition schematic diagram of calibration system.
Fig. 3 is the calibration process schematic diagram of calibration system.
Specific embodiment
Embodiment 1
Alkene (PSL) particles levels solution, the volume of solution are the monodisperse polyphenyl of two kinds of various concentrations of preparation first
100mL, 1# sample are the dilution of the high concentration polystyrene that partial size is 0.5 μm and pure water, the polyphenyl second of 2# sample preparation
The concentration of alkene solution is f times of 1#, the i.e. extension rate of diluter, as shown in table 1.
Table 1. calibrates the standard substance of required concentration ratio
* the concentration ratio of monodisperse particle dilution can also separately be prepared according to actual spot of measurement.
The preparation method of monodisperse particle dilution is as follows:
(1) the polystyrene stoste 100uL of high concentration is directly dripped in clean volumetric flask, to avoid stoste pollution.
(2) 1# sample is prepared, pure water is injected into volumetric flask, when close to 100mL groove, covers tightly capacity bottle stopper, back and forth instead
Turn 3 times, be sufficiently mixed solution, then pure water is injected, until reaching at 100mL groove.
(3) according to method (1) and (2), 2# sample is prepared, f times of the sample concentration 1# sample concentration of 2# sample is made,
Middle f is the extension rate of diluter.
Calibration method is, through calibrated corpuscular counter before and after using aerosol diluter, measures particle concentration
Value calculates the dilution ratio of diluter, and the comparison with nominal value, completes the calibration to diluter.It is specific as follows: to standard
Material sample is diluted, and obtains 2 samples.Wherein the concentration of sample 2 should be f times of 1 concentration of sample.And when generation sample 1
When, the granule density of standard particle counter should be within the scope of (3000~30000)/28.3L.
(1) select 1# sample first, be added aerosol generator (by the gas mass flow meter with micromanipulator and
Aerosol atomizing device forms stable particulate to control flow and particle generation rate.Guarantee its generation by drier
Sol particles humidity lower than in solution bottle 30%), open generator power, clean by high efficiency particulate air filter filtering is pressed
After contracting air enters aerosol generator, the standard solution in device is atomized, it is appropriate that adjusting aerosol occurrence quantity obtains concentration
And the molten particle of gas that concentration is stable, and its flow is less than corpuscular counter rated flow, by uniform mixing tank, accesses particle meter
Device is counted, for flow needed for corpuscular counter other than generator supply, insufficient flow is autonomous by HEPA or ulpa filter
Uniform mixing tank is sucked, the two flow matches are made, working principle is as shown in Figure 2.According to the connection type of Fig. 2, particle meter is opened
Number devices, allow its preheating, self-cleaning, zeroing, and corpuscular counter was arranged to suitable particle size range and sampling time.Duplicate measurements
3 times, i.e. the average value of particle concentration is denoted as C1。
(2) it is remained in particulate matter aerosol generator pipeline in order to prevent, influences the accuracy of measurement, under normal circumstances,
Standard substance C first low using concentration1, using highly concentrated standard substance C2, and when replacement particulate matter, occur to aerosol
Its concentration of device stabilization is measuring.
(3) as shown in figure 3, by the input port of the gas outlet access interflow formula aerosol diluter of aerosol generator, together
When clean compressed gas supplemented according to setting dilution ratio, aerosol diluter delivery outlet connects corpuscular counter input port,
The sum of flow of clean gas needed for ensuring the molten flow of the gas of diluter entrance and dilution is greater than the stream of corpuscular counter work
Amount, extra gas are replaced with 2# sample, aerosol hair by bypass emptying, by the solution in the molten measuring bottle of aerosol generator
Other settings of raw device are constant, and duplicate measurements 3 times, i.e. the average value of particle concentration is denoted as C2。
Under normal conditions, the sampling time of standard particle counter setting is 1 minute, is averaged for duplicate measurements 3 times, i.e.,
C1、C2Within standard particle counter one minute, the aerosol total particle number that is collected into respectively.
So calculate the thinner ratio f of aerosol diluter are as follows:
Wherein:
C1The concentration of -1# solution, standard particle counter measures value；
C2The concentration of -2# solution, standard particle counter measures value；
C1#The concentration of PSL particle in -1# solution；
C2#The concentration of PSL particle in -2# solution.
The technical requirements of calibration system of the present invention are as follows:
1) aerosol generator
Standard particle of the partial size in (0.1~5) μ m can be atomized.
2) uniform mixing tank
The stability of aerosol concentration in 10 minutes should be better than 1%.
3) corpuscular counter
Should have 0.3 μm, 0.5 μm, 1 μm, 5 μm of partial size gears, and be capable of measuring within the scope of (3000~30000)/28.3L
Amounts of particles concentration, repeatability are better than 3%, and the flow of aerosol diluter is not necessarily to match with the flow of corpuscular counter.
Calibration method and result:
1, select certain brand (III 110) corpuscular counter standard, have from 0.1 μm to 5.0 μm
8 partial size channels, flow be 1.0CFM flow, uncertainty of measurement MPEG: ± 10%, repeatability be 0.4%.Choosing
With certain brand (XSQ-01) dynamic aerosol diluter, arranging its diluter ratio is 10.
2, using the standard particle of 500nm and atomizing generator, its flow and constant concentration are controlled, stability is better than
2%/h.
3, two kinds of PSL particle solutions are prepared, wherein 2# concentration of standard solution is 10 times of 1# concentration of standard solution.
Conventional calibration methods directly select 2# standard substance to be calibrated (method 1), and the gas for adjusting particle generator is dense
Degree, and controlling its aerosol concentration is 36288 (stability is better than 2%/h), measurement standard corpuscular counter concentration value and dilution
Than as shown in table 2.
The present invention is calibrated (method 2) using 1# and 2# standard substance respectively, and aerosol occurs when replacing standard substance
The setting of device is constant, when using 1# standard substance, is directly measured with standard particle counter, when using 2# standard substance, in grain
Before sub-count device plus diluter measures, as shown in table 3.
Table 2. measures the thinner ratio of diluter using 2# standard substance
Table 3. uses 1# standard substance and 2# standard substance respectively, measures the thinner ratio of aerosol diluter
From table 2 and table 3 it will be seen that method 2 with the measurement result of method 1 compared with the nominal value of diluter, side
The relative error of method 2 is smaller.And since the uncertainty of measurement of standard particle counter is MPEG: ± 10%, repeatability is
0.4%, method 1 measure it is uncertain be greater than 10, method 2 measure it is uncertain be then better than 3, because of 2 measurement result of the method can
It is far longer than the reliability of 1 measurement result of method by property.
Although specific embodiments of the present invention have been described above, those familiar with the art should be managed
Solution, we are merely exemplary described specific embodiment, rather than for the restriction to the scope of the present invention, it is familiar with this
The technical staff in field should be covered of the invention according to modification and variation equivalent made by spirit of the invention
In scope of the claimed protection.
Claims (7)
1. a kind of calibration method of interflow formula aerosol diluter, characterized by the following steps:
(1) calibration sample is prepared: the monodisperse particle certified reference material that calibration is 0.5 μm of partial size using standard substance, for
The diluter of fixed dilution ratio carries out spot measurement；For the diluter of dynamic dilution ratio, in maximum dilution than being selected in range
3 points of upper, middle and lower are used as measurement point；
Standard substance sample is diluted, 2 samples are obtained, wherein the concentration of 2# sample should be f times of 1# sample concentration, institute
Measurement point when f is the fixed extension rate of diluter or calibration is stated, is then calibrated according to remaining steps；
(2) calibration system includes sequentially connected aerosol generator, uniform mixing tank, standard particle counter, in use, will
1# sample is atomized in the aerosol generator, and adjusts the flow that aerosol flow is less than standard particle counter,
It is connected to uniform mixing tank, into standard particle counter, gas flow needed for standard particle counter occurs in addition to aerosol
Except device supply, insufficient gas is inhaled into uniform mixing tank by HEPA or ulpa filter, flows into standard particle counter,
Make the two flow matches；
(3) when using 1# sample, the setting parameter of aerosol generator is adjusted, the granule density of standard particle counter measures is made
Within the scope of (3000~30000)/28.3L, duplicate measurements 3 times, the average value of the concentration of record standard corpuscular counter, i.e.,
C1；
(4) when using 2# sample, interflow formula aerosol diluter to be calibrated is replaced to the connection of uniform mixing tank, even if dilution
The gas outlet of the input port connection aerosol generator of device, the input of the delivery outlet connection standard particle counter of diluter
Mouthful, while the dilution mouth for collaborating formula aerosol diluter is passed through clean gas, setting system parameter ensures aerosol generator
The flow of flow and clean gas is greater than the flow of standard particle counter, and extra gas measures 2# by bypass emptying
Measured value of the sample in standard particle counter, duplicate measurements 3 times, i.e. the average value C of particle concentration2, it is generally the case that standard
The sampling time of corpuscular counter setting is 1 minute, i.e. C1、C2Within standard particle counter one minute, collected gas
Colloidal sol total particle number；
(5) the thinner ratio f of the interflow formula aerosol diluter is finally calculated as follows0.5, as shown in formula (1), and
It is compared with nominal value f, calculates its error of indication Δ δf,0.5, complete the calibration of pairing streaming aerosol diluter, such as formula
(2) shown in:
2. the calibration method of formula aerosol diluter in interflow according to claim 1, it is characterised in that: in step (1), institute
Stating monodisperse particle certified reference material is monodisperse polyphenyl alkene particles levels substance.
3. the calibration method of formula aerosol diluter in interflow according to claim 1, it is characterised in that: in step (2), institute
Stating aerosol generator includes the gas mass flow meter with micromanipulator, aerosol atomizing device and drier, described dry
Dry device guarantees the humidity for the sol particles that it is generated lower than 30%.
4. the calibration method of formula aerosol diluter in interflow according to claim 1, it is characterised in that: in step (3), institute
Uniform mixing tank is stated equipped with an aerosol entrance, a clean diluent air entrance and an aerosol outlet, the gas
Colloidal sol entrance connects the aerosol generator, and the aerosol outlet connects the standard particle counter.
5. the calibration method of formula aerosol diluter in interflow according to claim 1, it is characterised in that: in step (4), institute
State the requirement of aerosol generator are as follows: standard aerosol particle of partial size in the range of 0.1 μm~5 μm can be atomized.
6. the calibration method of formula aerosol diluter in interflow according to claim 1, it is characterised in that: in step (5), institute
State the requirement of uniform mixing tank are as follows: the stability of aerosol concentration should be better than 1% in 10 minutes.
7. the calibration method of formula aerosol diluter in interflow according to claim 1, it is characterised in that: in step (6), institute
State the requirement of standard particle counter are as follows: should have 0.3 μm, 0.5 μm, 1.0 μm, 5.0 μm of partial size gear, and be capable of measuring 3000
Amounts of particles concentration within the scope of~30000/28.3L, repeatability are better than 3%.
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| CN113252372A (en) * | 2021-03-30 | 2021-08-13 | 湘潭市计量测试检定所 | Calibration method of medical compression atomizer |
| CN114428042A (en) * | 2022-01-21 | 2022-05-03 | 青岛众瑞智能仪器股份有限公司 | Online raise dust calibration system and method |
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