CN110230027A - Wear-resistant workpiece and surface treatment method thereof - Google Patents
Wear-resistant workpiece and surface treatment method thereof Download PDFInfo
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- CN110230027A CN110230027A CN201910588271.6A CN201910588271A CN110230027A CN 110230027 A CN110230027 A CN 110230027A CN 201910588271 A CN201910588271 A CN 201910588271A CN 110230027 A CN110230027 A CN 110230027A
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- 238000000034 method Methods 0.000 title claims description 17
- 238000004381 surface treatment Methods 0.000 title claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 36
- 239000010937 tungsten Substances 0.000 claims abstract description 36
- 239000010410 layer Substances 0.000 claims description 181
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 33
- 229910052799 carbon Inorganic materials 0.000 claims description 31
- 239000011159 matrix material Substances 0.000 claims description 22
- 239000007888 film coating Substances 0.000 claims description 17
- 238000009501 film coating Methods 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 206010040844 Skin exfoliation Diseases 0.000 abstract description 9
- 230000008859 change Effects 0.000 abstract description 5
- 230000002349 favourable effect Effects 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 3
- 238000012986 modification Methods 0.000 abstract description 3
- 230000001737 promoting effect Effects 0.000 abstract description 2
- 239000003575 carbonaceous material Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 description 10
- 230000008021 deposition Effects 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000001947 vapour-phase growth Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- -1 carbon ion Chemical class 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 240000000254 Agrostemma githago Species 0.000 description 1
- 235000009899 Agrostemma githago Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of surface modification of workpieces, and a wear-resistant workpiece comprises a substrate, wherein a tungsten buffer layer, a first DLC layer and a second DLC layer are sequentially deposited on the surface of the substrate, and the content of SP3 bonds of the first DLC layer is less than that of the second DLC layer. On one hand, the first DLC layer is favorable for reducing the risk of peeling off the second DLC layer, and on the other hand, because the first DLC layer and the second DLC layer are made of single carbon materials, the first DLC layer and the second DLC layer have better bondability, the second DLC layer is more favorable for good adhesion, and the risk of peeling off the second DLC layer is favorably reduced; in addition, the first DLC layer also has higher hardness and better antifriction performance, even the second DLC layer peels off, exposes the first DLC layer, can not cause too big influence to tubular product processing to the antifriction performance of wear-resisting work piece can not obviously change yet, further is favorable to promoting the reliability of wear-resisting work piece, further is favorable to guaranteeing the good surface property of wear-resisting work piece.
Description
Technical field
The present invention relates to the field of surface modification of workpiece, it is specifically related to a kind of wear-resisting workpiece and its surface treatment method.
Background technique
Diamond-like carbon film-coating (Diamond-like carbon, DLC) is that one kind is made of carbon, is in nature and golden
Hard rock is similar, while again with the substance of graphite atom composed structure, low since DLC layer has high rigidity and high elastic modulus
Friction factor, wear-resistant and good vacuum tribological property, is well suited for as wear-resistant coating.
Existing wear-resisting workpiece surface using the bottoming of tungsten (chemical formula W) buffer layer and deposits class on the basis of tungsten buffer layer
Diamond coated layer (DLC layer), being provided with for tungsten buffer layer are preferably adhered to conducive to DLC layer, advantageously reduce DLC layer peeling
Possibility improves the crocking resistance of wear-resisting workpiece.
However, some wear-resisting workpieces are higher to the hardness requirement of DLC layer, this makes the difference of hardness of tungsten buffer layer and DLC layer
It is different larger, cause DLC layer and the combinableness of tungsten buffer layer to decline, wear-resisting workpiece is caused to be easy by larger stress
There is the case where DLC layer is peeled off.
Summary of the invention
An object of the present invention is to provide that a kind of scratch-resistant performance is good and the not flaky wear-resisting workpiece of coating.
To achieve the goals above, wear-resisting workpiece provided by the invention includes matrix, has been sequentially depositing on the surface of matrix
Tungsten buffer layer, the first diamond-like carbon film-coating layer (the first DLC layer) and the second diamond-like carbon film-coating layer (the second DLC layer), the first DLC
The SP3 linkage content of layer is less than the second DLC layer.
Therefore the present invention is designed by the structure to wear-resisting workpiece, for the friction more demanding to surface hardness
For workpiece, surface use higher second DLC layer of SP3 linkage content, on the one hand, make in this way the hardness of the first DLC layer between
Between tungsten buffer layer and the second DLC layer, the first DLC layer and the combinableness of tungsten buffer layer are more preferable, and the first DLC layer and second
The combinableness of DLC layer is good, and the risk of the second DLC layer peeling is advantageously reduced using the first DLC layer, on the other hand, due to the
One DLC layer and the second DLC layer are carbon simple substance material, thus compared to for the other materials of the first DLC layer similar stiffness,
There is better combinableness using the first DLC layer and the second DLC layer in the present invention, be more advantageous to the attachment of the second DLC layer well,
Advantageously reduce the risk of the second DLC layer peeling；Also, due to the setting of the first DLC layer, convenient for by the hardness of the second DLC layer
Setting is higher, not only improves the surface hardness for improving wear-resisting workpiece, and advantageously reduces a possibility that DLC layer is peeled off；In addition, the
One DLC layer also hardness with higher and preferable crocking resistance, therefore, even if the second DLC layer is peeled off, by the first DLC
Layer exposes, although the surface hardness of wear-resisting workpiece is declined at this time, since the effect of the first DLC layer is so that resistance to grinder
Part surface hardness will not decline excessive, and excessive influence, and the crocking resistance of wear-resisting workpiece will not be caused on tubular object extruding
Will not significant change or even coefficient of friction may be reduced, be further conducive to the reliability for promoting wear-resisting workpiece, further
Advantageously ensure that the good surface property of wear-resisting workpiece.
One Preferable scheme is that, tungsten buffer layer with a thickness of 0.2 micron to 0.8 micron.
Further embodiment is, tungsten buffer layer with a thickness of 0.5 micron.
Therefore when the optimum thickness of tungsten buffer layer is 0.5 micron, friction workpiece surface shows optimal friction
Performance
Another Preferable scheme is that, the first DLC layer with a thickness of 1.4 microns to 1.6 microns.
Another Preferable scheme is that, the second DLC layer with a thickness of 0.9 micron to 1.1 microns.
Another Preferable scheme is that, the SP3 linkage content of the first DLC layer is 45% to 55%, the SP3 key of the second DLC layer
Content is 45% to 75%.
Further embodiment is that the SP3 linkage content of the first DLC layer is 50% to 55%.
Further embodiment is that the SP3 linkage content of the second DLC layer is 65% to 70%.
The second object of the present invention is to provide a kind of surface treatment method of foregoing wear workpiece.
To achieve the goals above, surface treatment method provided by the invention, step include: to deposit on the surface of matrix
Tungsten buffer layer；The first DLC layer is deposited on tungsten buffer layer；The second DLC layer is deposited in the first DLC layer.
One Preferable scheme is that, before deposits tungsten buffer layer to matrix surface carry out before processing；Pre-treatment step packet
It includes: body surface sanding and polishing cleans up matrix surface, matrix is dried up under inert gas or nitrogen environment.
Detailed description of the invention
Fig. 1 is wear-resisting workpiece embodiment usage state diagram of the present invention；
Fig. 2 is the surface texture figure of wear-resisting workpiece embodiment of the present invention.
The invention will be further described with reference to the accompanying drawings and embodiments.
Specific embodiment
Wear-resisting workpiece and its surface treatment method embodiment:
Carbon simple substance have variform, such as layer structure graphite and reticular structure diamond, wherein in graphite
It is SP2 key between each carbon atom, is SP3 key, diamond-like carbon film-coating (Diamond-like between each carbon atom in diamond
Carbon, DLC) it is that one kind is made of carbon, is similar with diamond in nature, while having graphite atom composed structure again
Substance.
DLC is provided simultaneously with SP2 key and SP3 key, and the content of SP3 key is higher in DLC, and the hardness of DLC is higher, the property of DLC
Closer to diamond；On the contrary, the content of SP3 key is lower in DLC, the hardness of DLC is lower, and the property of DLC is closer to graphite.
There are many type of antifriction workpiece, and antifriction workpiece of the invention can be any components to be rubbed, the present embodiment
Friction workpiece by taking core bar 100 as an example, Fig. 1 is please referred to, during tubing 200 bends molding at present, for the folding for avoiding tubing 200
There is curved flat, cockle and other issues in crook, it will usually molding is bent using the auxiliary tubing 200 of core bar 100, in tubing 200
Core bar 100 is inserted into the lumen of tubing 200 first when bending process, then using clamping 300 and Tuo Mo 400 to tubing 200
It is bent, the qualification rate of product can be effectively improved in this way.
In tubing 200 during bending, larger extruding force can be generated between 200 inner wall of core bar 100 and tubing, and with
The deformation of tubing 200, also there is between 200 inner wall of core bar 100 and tubing larger friction；Especially tubing 200 bending place
Curved interior and curved outside deformation are larger and also larger with the friction of core bar 100, be easy to cause the core bar 100 of the position
Surface abrasion influences the Forming Quality of tubing 200.
Since core bar 100 needs to bear larger extruding force in use, it is therefore desirable to which 100 surface of core bar has higher
Hardness, while the Forming Quality in order to guarantee tubing 200 reduces the abrasion of core bar 100, needs core bar 100 to have preferable
Frictional behaviour.
Existing core bar 100 reduces the friction between core bar 100 and tubing 200 by way of coating lubricating oil, mentions
The frictional behaviour of core bar 100 is risen, this mode causes tubing 200 to bend complex procedures, and influence tubing 200 bends production effect
Rate.
DLC has good crocking resistance, and the present invention is that 100 surface of core bar deposits DLC layer, to promote core bar 100
Crocking resistance, and since core bar 100 needs to bear biggish extruding force, it is therefore desirable to the surface hardness of core bar 100 is improved,
In this implementation can be realized by way of improving the SP3 linkage content of DLC layer, however due to the SP3 linkage content of DLC layer compared with
Height, DLC layer and the nonhomogeneous hardness of tungsten buffer layer 2 are larger, cause DLC layer and the combinableness of tungsten buffer layer 2 weaker, if directly
The higher DLC layer of SP3 linkage content is deposited on tungsten buffer layer 2, DLC layer peeling when by larger stress is easy to cause.This is just
If causing the SP3 linkage content setting by DLC layer excessively high, the increased risk that DLC layer will be made to peel off；If by the SP3 of DLC layer
Linkage content setting is too low, and is not able to satisfy the hardness requirement of core bar 100.
In order to reduce the risk of DLC layer peeling, also for making the hardness of 100 surface DLC layer of core bar meet requirement, originally
Embodiment is sequentially depositing tungsten buffer layer 2, the first DLC layer 3 and the second DLC layer 4 that hardness gradually rises on 1 surface of matrix, wherein
The SP3 linkage content of first DLC layer less than the second DLC layer SP3 linkage content, using the first DLC layer 3 and the of hardness gradient variation
Two DLC layers 4 replace single DLC layer；The hardness of first DLC layer 3 is lower than the hardness of the second DLC layer 4, and the first DLC layer 3 and tungsten are slow
The nonhomogeneous hardness for rushing layer 2 is smaller, and such first DLC layer 3 and the combinableness of tungsten buffer layer 2 are more preferable, is conducive to the second DLC layer 4
Preferably adhere to, reduce the risk that the second DLC layer 4 is peeled off, be also beneficial to the setting of the hardness of the second DLC layer 4 is higher, more favorably
In meeting requirement of the core bar 100 to surface hardness.Specifically, matrix 1 is made of 40Cr material.
Certainly, in order to further decrease the risk that DLC layer is peeled off, also for further promotion 100 surface DLC layer of core bar
Hardness can increase the quantity of DLC layer, be conducive to keep the nonhomogeneous hardness of each DLC layer smaller in this way, be more advantageous to reduction DLC layer
The risk of peeling is more favorable to promote the hardness of 100 surface DLC layer of core bar；More, core bar is arranged in the quantity of certain DLC layer
100 surface treatment process is more complicated.
Wherein, the SP3 linkage content of the first DLC layer 3 is 50%, and the SP3 linkage content of the first DLC layer 3 refers to the first DLC layer 3
Middle SP3 key accounts for the ratio of the sum of SP3 key and SP2 key, and the SP3 linkage content of the second DLC layer 4 refers to that SP3 key accounts in the second DLC layer 4
The ratio of the sum of SP3 key and SP2 key, the SP3 linkage content of the second DLC layer 4 are 65%, tungsten buffer layer 2 with a thickness of 0.5 micron,
First DLC layer 3 with a thickness of 1.5 microns, the second DLC layer 4 with a thickness of 1 micron.
The introducing of tungsten buffer layer 2 plays certain effect, but excessively high buffer layer to 100 friction, lubrication performance of core bar
Thickness is unfavorable for the performance of frictional behaviour；When the optimum thickness of tungsten buffer layer 2 is 0.5 micron, 100 surface exhibits of core bar go out
Optimal frictional behaviour；Selectively, the thickness range of tungsten buffer layer 2 can be 0.2 micron to 0.8 micron.
Selectively, the SP3 linkage content of the first DLC layer 3 can be 45% to 55%, and the linkage content of the second DLC layer 4 can be with
It is 45% to 75%, the SP3 linkage content of the first DLC layer 3 is greater than the linkage content of the second DLC layer 4.
It should be noted that in the first DLC layer 3 and the second DLC layer 4, the predominantly carbon structure of SP2 key and SP3 key, SP1 carbon
The content very little of structure, can be ignored.
It should be noted why using lower first DLC layer of SP3 linkage content between W layers and the second DLC layer 4
3, on the one hand, make the hardness of the first DLC layer 3 between tungsten buffer layer 2 and the second DLC layer 4 in this way, therefore use first
DLC layer 3 advantageously reduces the risk of the second DLC layer 4 peeling, on the other hand, since the first DLC layer 3 and the second DLC layer 4 are
Carbon simple substance material uses the first DLC layer 3 compared to for the other materials of 3 similar stiffness of the first DLC layer in the present embodiment
There is better combinableness with the second DLC layer 4, be more advantageous to the second DLC layer 4 and adhere to well, advantageously reduce the second DLC layer
4 risks peeled off；In addition, the first DLC layer 3 also hardness with higher and preferable crocking resistance, therefore, even if second
DLC layer 4 is peeled off, and the first DLC layer 3 is exposed, although the surface hardness of core bar 100 is declined at this time, due to first
The effect of DLC layer 3 will not process tubing 200 and cause a devastating effect so that 100 surface hardness of core bar will not decline excessive,
The reliability for being further conducive to be promoted core bar 100, further advantageously ensures that the superperformance of core bar 100.
When being surface-treated to core bar, pre-treatment carried out to matrix 1 first, the step of 1 pre-treatment of matrix includes: the
One step: polishing to 1 surface of matrix, bruting process successively use 180#, 360#, 600#, 800#, 1000#, 1200#,
The abrasive paper for metallograph of 1500# and 2000# is polished, and the coefficient of friction on 100 surface of core bar is gradually reduced；Step 2: to 1 surface of matrix
It is processed by shot blasting；Step 3: matrix 1 is placed in 5 minutes progress oil removal treatments of ultrasonic environment；Step 4: using triple pure
Water rinses matrix 1；Step 5: the air dried basis body 1 under N2 environment, avoids matrix 1 from getting rusty.
After the completion of processing before matrix 1, tungsten buffer layer 2, the first DLC layer 3 and the 2nd DLC are sequentially depositing for 1 surface of matrix
Layer 4.
Using magnetron sputtering deposits tungsten buffer layer 2: the core bar 100 after cleaning being put into settling chamber, is evacuated to (8-9)
×10- 4Pa or less；Then it is passed through Ar gas to the controlled sputtering source equipped with W target (99.9%), utilizes Ar ion sputtering W target, preparation
Tungsten buffer layer 2.
The mode of deposition DLC layer has very much, such as vacuum evaporation, sputtering, plasma auxiliary chemical vapor deposition, ion
Injection etc., wherein the mode being evaporated in vacuo is easy to cause the poor bonding strength of DLC layer Yu tungsten buffer layer 2, the mode of ion implanting
The DLC layer thickness of deposition is too thin, is only capable of reaching hundreds of nanometers.Therefore using sputtering and plasma auxiliary chemical in the present embodiment
The method of vapor deposition deposits DLC layer.
First DLC layer 3 is deposited using sputtering mode: being prepared using Ar ion sputtering C target, target current 160A, substrate is inclined
Pressure is -30V, and depositing temperature is 200 DEG C.
Using plasma assistant chemical vapor phase deposition mode deposits the second DLC layer 4: being passed through C to ion beam source2H2, generate
Containing carbon ion, the second DLC layer 4, electric current 2A are deposited, substrate bias is -60V, and depositing temperature is 70 DEG C.
In the above deposition process, corresponding DLC layer can be adjusted by the way of adjustment deposition current, voltage and temperature
SP3 linkage content, certainly, the adjusting of above-mentioned parameter also will affect the adhesion condition of corresponding DLC layer, especially depositing temperature should be first
First meet DLC layer attachment good, adjusts SP3 linkage content by adjusting deposition current.
Selectively, the first DLC layer 3 can also deposit to obtain with the second DLC layer 4 using method of the same race, and it is heavy only to change
Electric current, voltage and the temperature parameter of product process can reach deposition and require, but the first DLC layer 3 needs to distinguish with the second DLC layer 4
Deposition avoids carbon ion in settling chamber from uncontrollable situation occur；In addition, carbon source used in different preparation methods and carbon from
Sub- energy is different, and there are very big differences for the structure and performance of the DLC layer of deposition, and tribological property is not also identical, compared to use
For the mode of gas ions assistant chemical vapor phase deposition, the SP3 linkage content that DLC layer is obtained by the way of sputtering sedimentation is dropped
It is low, therefore the present embodiment is used and is deposited respectively using sputtering sedimentation and the two different modes of gas ions assistant chemical vapor phase deposition
First DLC layer 3 and the second DLC layer 4 are conducive to the deposition requirement for adapting to corresponding DLC layer.
Finally it is emphasized that the above description is only a preferred embodiment of the present invention, it is not intended to restrict the invention, it is right
For those skilled in the art, the present invention can have various change and change, all within the spirits and principles of the present invention,
Any modification, equivalent substitution, improvement and etc. done, should all be included in the protection scope of the present invention.
Claims (10)
1. wear-resisting workpiece, including matrix, it is characterised in that:
Tungsten buffer layer, the first diamond-like carbon film-coating layer and the second diamond-like carbon film-coating have been sequentially depositing on the surface of described matrix
Layer, the SP3 linkage content of the first diamond-like carbon film-coating layer are less than the SP3 linkage content of the second diamond-like carbon film-coating layer.
2. wear-resisting workpiece according to claim 1, it is characterised in that:
The tungsten buffer layer with a thickness of 0.2 micron to 0.8 micron.
3. wear-resisting workpiece according to claim 1, it is characterised in that:
The tungsten buffer layer with a thickness of 0.5 micron.
4. wear-resisting workpiece according to claim 1, it is characterised in that:
The first diamond-like carbon film-coating layer with a thickness of 1.4 microns to 1.6 microns.
5. wear-resisting workpiece according to claim 1, it is characterised in that:
The second diamond-like carbon film-coating layer with a thickness of 0.9 micron to 1.1 microns.
6. wear-resisting workpiece according to any one of claims 1 to 5, it is characterised in that:
The SP3 linkage content of the first diamond-like carbon film-coating layer is 45% to 55%, the SP3 of the second diamond-like carbon film-coating layer
Linkage content is 45% to 75%.
7. wear-resisting workpiece according to claim 6, it is characterised in that:
The SP3 linkage content of the first diamond-like carbon film-coating layer is 50% to 55%.
8. wear-resisting workpiece according to claim 6, it is characterised in that: the SP3 key of the second diamond-like carbon film-coating layer contains
Amount is 65% to 70%.
9. the surface treatment method of wear-resisting workpiece as described in any one of claim 1 to 8, which is characterized in that step includes:
The tungsten buffer layer is deposited on the surface of described matrix；
The first diamond-like carbon film-coating layer is deposited on the tungsten buffer layer；
The second diamond-like carbon film-coating layer is deposited on the first diamond-like carbon film-coating layer.
10. surface treatment method according to claim 9, it is characterised in that:
Processing before being carried out before depositing the tungsten buffer layer to described matrix surface；
The pre-treatment step include: by the body surface sanding and polishing, described matrix surface clean is clean, by the base
Body dries up under inert gas or nitrogen environment.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114075667A (en) * | 2020-08-17 | 2022-02-22 | 翔名科技股份有限公司 | High hardness low friction coefficient protective coating |
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| CN104630708A (en) * | 2015-03-06 | 2015-05-20 | 重庆大学 | Diamond-like thick film, preparation method of diamond-like thick film and work-piece |
| CN109415797A (en) * | 2016-07-29 | 2019-03-01 | 马勒金属立夫有限公司 | Sliding members for internal combustion engine |
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Application publication date: 20190913 |