CN110227968B - Method and device for eliminating parasitic stripes of magneto-rheological removal function based on wavelet transformation - Google Patents
Method and device for eliminating parasitic stripes of magneto-rheological removal function based on wavelet transformation Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention discloses a method and a device for eliminating parasitic stripes of a magneto-rheological removal function based on wavelet transformation, wherein the method can accurately remove the parasitic stripes, achieves the accurate extraction of the magneto-rheological removal function, has wide application range, is still applicable to the situation that the parasitic stripes and the original data frequency spectrum are seriously mixed and can not be solved by the traditional frequency domain band-stop filtering, is a better parasitic stripe removal method, can be effectively applied to the elimination of the parasitic stripes of the magneto-rheological removal function, and realizes the accurate extraction of the magneto-rheological removal function. Meanwhile, the method can be better used for eliminating function parasitic stripes in other ultra-precision machining modes, such as air bag polishing, ion beam polishing and the like, and is convenient to popularize and apply.
Description
Technical Field
The invention relates to the field of optical processing, in particular to a method and a device for eliminating parasitic stripes of a magneto-rheological removal function based on wavelet transformation.
Background
As a novel advanced optical manufacturing technology, the magnetorheological polishing technology has the incomparable advantages of a series of traditional processing methods, such as high efficiency, high precision, high surface quality, small subsurface damage, small surface residual stress and the like, and has good application prospect. The accuracy of extracting the magnetorheological removal function is a key factor for determining the precision and the efficiency of magnetorheological processing. At present, the magneto-rheological removal function manufacturing process generally comprises the steps of firstly adopting a flat small substrate to carry out spot collection on a magneto-rheological fluid machine tool, then detecting the reflection or transmission surface shape of the spot collection substrate by using an optical interferometer, then extracting the removal function in detection data, and finally generating the removal function for magneto-rheological polishing.
Because the small substrate used for collecting the spots is a flat-plate optical element, when an interferometer is used for surface shape detection, parasitic stripes are easily introduced, the extraction precision of a removal function is reduced after the parasitic stripes are introduced, the removal efficiency of the removal function volume is changed, the certainty of magnetorheological processing is influenced, meanwhile, the removal function of the parasitic stripes contains a complex medium-high frequency structure, the evaluation of the function shape modification capability is seriously influenced, and therefore the parasitic stripes in the function need to be removed in order to realize the accurate extraction of the magnetorheological removal function.
The traditional method for inhibiting the parasitic fringes in interference detection is to uniformly coat vaseline on the back surface of an element during reflection measurement, so that the parasitic fringes are difficult to eliminate; during transmission measurement, a certain wedge angle is formed between the rear standard mirror and an element to be measured, but because the aperture of the spot-making substrate is small, generally phi 50mm, the allowable wedge angle is small, and parasitic stripes are difficult to inhibit; the method of short coherence interferometry is adopted to eliminate parasitic fringes, for example, a 4D PhaseCam2000 type interferometer is adopted, but because the contrast ratio is low during dynamic measurement, the contrast ratio is too small to measure due to magnification, so that only low magnification can be adopted during substrate measurement, the effective data points of the detected surface shape are few, and the function is difficult to accurately extract and remove.
The magneto-rheological removal function is usually 2-15 mm in geometric dimension width and 3-25 mm in height, a small-caliber flat substrate is usually adopted as a speckle-picking substrate, the fact that the frequency spectrum of a parasitic fringe and the frequency spectrum of the magneto-rheological removal function are often subjected to obvious aliasing is found when an interferometer is used for wave-front detection, and the form of the removal function is often obviously changed when the parasitic fringe is removed by adopting the traditional frequency domain band-stop filtering, so that the finally obtained removal function is distorted.
Therefore, how to eliminate parasitic stripes in the magnetorheological removal function and improve the extraction precision of the magnetorheological removal function and the shape modification capability of the removal function is a problem to be solved urgently by practitioners of the same industry.
Disclosure of Invention
In view of the above problems, the present invention aims to solve the problems of introducing parasitic fringes in the detection of the magnetorheological removal function interferometer, reducing the extraction precision of the removal function and interfering the evaluation of the shape modification capability of the removal function.
The embodiment of the invention provides a method for eliminating parasitic stripes of a magneto-rheological removal function based on wavelet transformation, which comprises the following steps:
obtaining interferometer spot-collecting measuring surface shape data matrix f containing parasitic fringe1(x,y)；
Extracting the surface shape data matrix f1Local data in (x, y), the local data being: the method comprises the steps of (1) containing parasitic stripes and removing function shapes; calculating the space period T of the parasitic stripe;
using sym5 wavelet to pair the surface shape data matrix f1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, and obtaining 3N +1 coefficient matrix data; the N is obtained by calculation according to the space period T;
analyzing the data of 3N +1 coefficient matrixes, and recording the coefficient matrix containing parasitic stripes as Sj(ii) a Wherein j is 1 to K, K is the number of coefficient matrixes containing parasitic stripes, and K is less than or equal to 3N + 1;
for coefficient matrix S containing parasitic stripesjAnd processing to eliminate the parasitic stripe feature.
In one embodiment, further comprising:
for the processed coefficient matrix SjReconstructing, wherein the wavelet basis function is sym5 and the number of decomposition layers is N when reconstructing, and obtaining a surface-shaped data matrix f for eliminating parasitic stripes2(x,y)。
In one embodiment, the N is obtained from the spatial period T calculation, and includes:
calculating the number N of the layers of the multi-level wavelet decomposition, wherein the calculation formula is as follows:
where N is the smallest integer satisfying the condition, T represents the spatial period of the parasitic stripe, and pix represents the pixel size.
In one embodiment, for coefficient matrix S containing parasitic stripesjProcessing to eliminate the parasitic stripe feature, including:
determining the value range of the parasitic stripe feature by adopting histogram-based statistics according to the intensity difference of the discontinuous and existing values of the parasitic stripe feature and the removal function feature;
matrix S of the coefficientsjAnd setting the data of the median value in the value range to zero to eliminate the parasitic stripe characteristics.
In a second aspect, the present invention further provides a device for removing parasitic fringes of a magnetorheological removal function based on wavelet transformation, including:
an acquisition module for acquiring interferometer speckle collection measurement surface shape data matrix f containing parasitic fringes1(x,y)；
A calculation module for extracting the surface shape data matrix f1Local data in (x, y), the local data being: the method comprises the steps of (1) containing parasitic stripes and removing function shapes; calculating the space period T of the parasitic stripe;
a decomposition module for pair of the surface data matrix f using sym5 wavelet1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, and obtaining 3N +1 coefficient matrix data; the N is obtained by calculation according to the space period T;
a recording module for analyzing the data of 3N +1 coefficient matrixes and recording the coefficient matrix containing parasitic stripes as Sj(ii) a Where j is 1 to K, K is the number of coefficient matrices containing parasitic stripes,and K is less than or equal to 3N + 1;
a cancellation module for cancelling the coefficient matrix S containing the parasitic fringesjAnd processing to eliminate the parasitic stripe feature.
In one embodiment, the apparatus further comprises:
a reconstruction module for reconstructing the coefficient matrix S processed by the elimination modulejReconstructing, wherein the wavelet basis function is sym5 and the number of decomposition layers is N when reconstructing, and obtaining a surface-shaped data matrix f for eliminating parasitic stripes2(x,y)。
In an embodiment, the calculating module is specifically configured to calculate the number N of layers of the multi-level wavelet decomposition, and the calculating formula is as follows:
where N is the smallest integer satisfying the condition, T represents the spatial period of the parasitic stripe, and pix represents the pixel size.
In one embodiment, the cancellation module includes:
the determining submodule is used for determining the value range of the parasitic stripe feature by adopting histogram-based statistics according to the intensity difference existing and the discontinuity of the parasitic stripe feature and the removal function feature value;
a cancellation submodule for inverting the coefficient matrix SjAnd setting the data of the median value in the value range to zero to eliminate the parasitic stripe characteristics.
The technical scheme provided by the embodiment of the invention has the beneficial effects that at least:
the method for eliminating the parasitic stripes of the magneto-rheological removal function based on the wavelet transform can accurately remove the parasitic stripes, achieves the accurate extraction of the magneto-rheological removal function, is wide in application range, is still applicable to the situation that the parasitic stripes and the original data frequency spectrum are seriously aliased, which cannot be solved by the traditional frequency domain band-stop filtering, is a better parasitic stripe removal method, can be effectively applied to eliminating the parasitic stripes of the magneto-rheological removal function, and realizes the accurate extraction of the magneto-rheological removal function. Meanwhile, the method can be better used for eliminating function parasitic stripes of other ultra-precision machining modes (such as air bag polishing, ion beam polishing and the like), and is convenient to popularize and apply.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
fig. 1 is a flowchart of a method for removing parasitic fringes based on wavelet transform according to an embodiment of the present invention;
fig. 2 is a flowchart of step S105 according to an embodiment of the present invention;
fig. 3 is a specific flowchart of a method for removing parasitic fringes based on wavelet transform according to embodiment 1 of the present invention;
FIG. 4 is an image of MR-derogation function inspection data containing parasitic fringes;
FIG. 5 is a diagram of 13 coefficient matrix images obtained using sym5 wavelet 4-level decomposition;
FIG. 6 is a schematic diagram of a process of eliminating parasitic stripes by using an S2 coefficient matrix;
FIG. 7 is the data of the removal function after the parasitic stripes are filtered out;
fig. 8 is a block diagram of a parasitic streak cancellation apparatus based on wavelet transform according to an embodiment of the present invention;
fig. 9 is a block diagram of the pre-cancellation module 85 according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Referring to fig. 1, a method for removing parasitic fringes of a magnetorheological removal function based on wavelet transformation according to an embodiment of the present invention includes: s101 to S105;
s101, acquiring interferometer speckle collection measurement surface shape data matrix f containing parasitic fringes1(x,y)；
S102, extracting the surface shape data matrix f1Local data in (x, y), the local data being: the method comprises the steps of (1) containing parasitic stripes and removing function shapes; calculating the space period T of the parasitic stripe;
s103, adopting sym5 wavelet to pair the surface shape data matrix f1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, and obtaining 3N +1 coefficient matrix data; the N is obtained by calculation according to the space period T;
s104, analyzing the data of the 3N +1 coefficient matrixes, and recording the coefficient matrix containing the parasitic stripe as Sj(ii) a Wherein j is 1 to K, K is the number of coefficient matrixes containing parasitic stripes, and K is less than or equal to 3N + 1;
s105, for coefficient matrix S containing parasitic stripesjAnd processing to eliminate the parasitic stripe feature.
In the embodiment, the parasitic stripes can be accurately removed, the requirement of extracting the magnetorheological removal function for accurate extraction is met, the application range is wide, the method can be effectively applied to the removal of the magnetorheological removal function parasitic stripes, and meanwhile, the method can also be better applied to the removal of the function parasitic stripes in other ultraprecise processing modes (such as air bag polishing, ion beam polishing and the like), and is convenient to popularize and apply.
Further, referring to fig. 1, the method further includes:
s106, processing the coefficient matrix SjPerforming reconstruction, wavelet when reconstructingThe basis function is sym5, the number of decomposition layers is N, and a surface-shaped data matrix f for eliminating parasitic stripes is obtained2(x,y)。
In one embodiment, referring to fig. 2, in step S105, the coefficient matrix S containing the parasitic stripes is processedjProcessing to eliminate the parasitic stripe feature, including:
s1051, determining the value range of the parasitic stripe feature by histogram-based statistics according to the intensity difference of the discontinuous and existing values of the parasitic stripe feature and the removal function feature;
s1052, matrix the coefficient SjAnd setting the data of the median value in the value range to zero to eliminate the parasitic stripe characteristics.
In this embodiment, the coefficient matrix S containing parasitic stripes is obtained byjThe processing is carried out, so that the effective separation of parasitic stripes and removal function characteristics in the coefficient matrix is realized, the parasitic stripes are eliminated, the self form of the removal function is not changed, and the data processing precision is improved.
Specifically, the method for eliminating the parasitic stripes of the magneto-rheological removal function based on the wavelet transformation comprises the following steps:
1. obtaining interferometer spot-collecting measuring surface shape data matrix f containing parasitic fringe1(x, y) wherein the number of data width pixels is m, the number of data height pixels is n, and the pixel size is pix mm;
2. extracting a surface shape data matrix f1(x, y) not containing the local data of the removal function shape but containing the parasitic stripe, observing the positive section profile structure of the parasitic stripe, and calculating the space period T of the parasitic stripe;
3. calculating the number N of the layers of the multi-level wavelet decomposition by the following formula
Wherein N is the nearest integer satisfying the condition;
4. according to the characteristic that the magnetorheological removal function contains large gradient structure surface shape, Symlets is adoptedThe wavelet, Symlets wavelet, is usually expressed as symN (where N is 2-10), and sym5 is selected as the wavelet basis function according to the structural characteristics of the elimination function. Face shape data matrix f using sym5 wavelet1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, each stage has three coefficient matrixes named as hi(horizontal direction), vi(vertical direction), di(diagonal direction), wherein i is 1 to N, and the low frequency coefficient matrix is named AN at the last stage, wherein N represents the number of decomposition layers, and 3N +1 coefficient matrix data are obtained in total. The Symlets wavelet is an orthogonal tightly-supported wavelet function proposed by Inrid Daubechies, is discrete sequence wavelet transform established on the basis of multi-resolution analysis and multi-sampling rate filter theory, has better symmetry compared with the classical db wavelet, has the characteristics of orthogonality and tight support, and is more superior in detail extraction.
5. Analysis coefficient matrix hi，vi，di(wherein i is 1 to N), and recording a coefficient matrix containing parasitic stripes as SjWhere j is 1 to K, and K is the number of coefficient matrices containing parasitic stripes.
6. For coefficient matrix S containing parasitic stripesj(wherein j is 1-K), removing parasitic stripe features, determining the value range of the parasitic stripe features by a histogram statistics-based method according to the characteristics of the parasitic stripe features and the characteristics of discontinuous values and intensity difference of the removed function features, and then setting all data of the values in the coefficient matrix in the value range of the parasitic stripe features to zero, wherein the specific implementation process is as follows:
first, a coefficient matrix S is analyzedj(where j is 1 to K), searching for a region where the feature distribution of the removal function is located, and taking R as the regionp(p is 1 to H, and H represents a coefficient matrix SjNumber of middle removal functions), for the region RpDrawing a curve by adopting a histogram statistical method, wherein the abscissa is the numerical value of the data points, and the ordinate is the number of the data points;
then, for coefficient matrix SjMiddle region RpGenerally, the data points of the removed function features have large values and few data pointsAnd concentrating the data in the center of the histogram curve, and calculating the abscissa value corresponding to 90% reduction of the ordinate value of the highest point in the center of the histogram to obtain the distribution range [ V ] of the removed function characteristic data pointsmin，Vmax]In which V isminDenotes the minimum value, VmaxDenotes the maximum value]Represents a closed interval;
finally, the coefficient matrix SjMiddle region RpThe numerical value of the data point does not belong to [ V ]min，Vmax]Zero the corresponding data point; simultaneous pair coefficient matrix SjDo not belong to the region RpZero all data points of (1), i.e. remove the characteristic of parasitic stripes;
7. for the processed coefficient matrix Sj(where j is 1-K), reconstructing, wherein the wavelet basis function is sym5, the number of decomposition layers is N, and finally obtaining the surface-shaped data matrix f of the parasitic stripe2(x,y)。
Compared with the prior art, the invention has the advantages that:
the sym5 wavelet is adopted to carry out multi-level wavelet decomposition on the surface shape data matrix containing the parasitic stripes, so that the sufficient decomposition of the parasitic stripes is realized, the method is still suitable for the severe aliasing of the frequency spectrum of the magneto-rheological removal function and the frequency spectrum of the parasitic stripes, and the traditional frequency domain filtering method has wider application range because the frequency spectrum failure of the severe aliasing cannot be distinguished;
by adopting the method of removing the function characteristic region matching and the histogram statistics, the method realizes the effective separation of the parasitic stripe in the coefficient matrix and the function characteristic removal, ensures that the parasitic stripe is eliminated without changing the self form of the removal function, and improves the data processing precision.
The method for eliminating the parasitic fringes of the magneto-rheological removal function based on the wavelet transform is described in the following by a complete embodiment.
Example 1:
for example, the magnetorheological removal function is measured by a ZYGO static interferometer, the spot-collecting substrate is phi 50mm, the aperture of the detected data light-transmitting is phi 48mm, the material is fused quartz, and a relatively obvious parasitic stripe is introduced in the interference detection process.
Parasitic stripes are filtered out by the following steps:
the parasitic stripes are filtered out by using the test platform, and the flow is shown in fig. 3.
1. Acquiring an interferometer speckle collection measurement surface shape data matrix containing parasitic fringes, wherein the number of data width pixels m is 916, the number of data height pixels n is 916, and the pixel size pix is 0.052mm, as shown in fig. 4;
2. extracting local data which does not contain the removal function shape but contains parasitic stripes in the surface shape data, and calculating the space period T of the parasitic stripes to be 0.48 mm;
3. calculating the number N of the layers of the multi-level wavelet decomposition, wherein the calculation formula is as follows:
4. according to the structural characteristics of the elimination function, sym5 is selected as a wavelet basis function. Face shape data matrix f using sym5 wavelet1(x, y) performing a multi-stage decomposition with N-4 decomposition stages, each stage having three coefficient matrices named hi(horizontal direction), vi(vertical direction), di(diagonal direction), wherein i is 1-4, and the last stage also has a low-frequency coefficient matrix named as a4, so as to obtain 13 coefficient matrix data, as shown in fig. 5;
5. analysis coefficient matrix hi，vi，di(where i is 1-4), coefficient matrices containing parasitic stripes are recorded, and as can be seen from fig. 5, coefficient matrix v3And v4Contains parasitic fringe features, thus Sj＝{v3,v4J is 1-2, K is 2, and K is the number of coefficient matrixes containing parasitic stripes;
6. for coefficient matrix S containing parasitic stripesj(wherein j is 1-2), removing parasitic stripe features, determining the value range of the parasitic stripe features by a histogram statistics-based method according to the characteristics of the parasitic stripe features and the characteristics of discontinuous numerical values and intensity difference of removal function features, and then tying the system to the standardThe data in the number matrix with the value in the range is set to zero by S2＝v4The implementation processes i to iii are illustrated by way of example:
i analysis coefficient matrix S2Viewing FIG. 5, v4The coefficient matrix contains 4 removing functions, so H is 4, and R is R when searching the region where the characteristic distribution of the removing function is locatedp(p is 1-4), as shown in fig. 6(a), a curve is drawn by adopting a histogram statistical method, the abscissa is the numerical value of the data points, and the ordinate is the number of the data points, as shown in fig. 6 (b);
ii with R1The calculation process is explained by taking the area as an example, the abscissa value corresponding to 90% reduction of the ordinate value of the highest point in the center of the histogram is calculated, and the distribution range [ V ] of the feature data point of the removal function is obtainedmin，Vmax]V is shown in FIG. 6(b)min＝-0.08，Vmax＝0.07；
iii pair coefficient matrix S2The middle R1 region data point value does not belong to [ V ]min，Vmax]Zero out the corresponding data point as shown in fig. 6 (c); same method for R2、R3、R4Processing the region, and finally processing the coefficient matrix S2In R1、R2、R3、R4All data points outside the region are zeroed out as shown in FIG. 6 (d);
7. in-pair coefficient matrix S1、S2After processing, performing wavelet reconstruction of the coefficient matrix, wherein the wavelet basis function is sym5 and the number of decomposition layers is 4 during reconstruction, and finally obtaining a surface-shaped data matrix f of the parasitic stripe2(x, y) as shown in FIG. 7. The elimination of the parasitic stripes of the magneto-rheological removal function is completed.
Based on the same inventive concept, the embodiment of the invention also provides a device for eliminating the parasitic stripes of the magneto-rheological removal function based on the wavelet transformation, and as the principle of the problem solved by the device is similar to the method for eliminating the parasitic stripes of the magneto-rheological removal function based on the wavelet transformation, the implementation of the device can refer to the implementation of the method, and repeated parts are not repeated.
The device for eliminating the parasitic stripes of the magneto-rheological removal function based on the wavelet transform, which is provided by the embodiment of the invention and is shown in fig. 8, comprises:
an obtaining module 81 for obtaining the interferometer speckle collection measurement surface shape data matrix f containing parasitic fringes1(x,y)；
A calculation module 82 for extracting the surface data matrix f1Local data in (x, y), the local data being: the method comprises the steps of (1) containing parasitic stripes and removing function shapes; calculating the space period T of the parasitic stripe;
a decomposition module 83 for pair of the surface data matrix f using sym5 wavelets1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, and obtaining 3N +1 coefficient matrix data; the N is obtained by calculation according to the space period T;
a recording module 84, configured to analyze the data of the 3N +1 coefficient matrices, and record a coefficient matrix containing parasitic stripes as Sj(ii) a Wherein j is 1 to K, K is the number of coefficient matrixes containing parasitic stripes, and K is less than or equal to 3N + 1;
a cancellation block 85 for the coefficient matrix S containing the parasitic stripesjAnd processing to eliminate the parasitic stripe feature.
In one embodiment, the device for removing parasitic fringes of magneto-rheological removal function based on wavelet transform further comprises:
a reconstruction module 86, configured to reconstruct the coefficient matrix S processed by the cancellation module 85jReconstructing, wherein the wavelet basis function is sym5 and the number of decomposition layers is N when reconstructing, and obtaining a surface-shaped data matrix f for eliminating parasitic stripes2(x,y)。
In an embodiment, the calculating module 82 is specifically configured to calculate the number N of layers of the multi-level wavelet decomposition, and the calculation formula is as follows:
where N is the smallest integer satisfying the condition, T represents the spatial period of the parasitic stripe, and pix represents the pixel size.
In one embodiment, the elimination module 85 includes:
the determining submodule 851 is configured to determine, according to the parasitic stripe feature and the intensity difference existing and the discontinuity of the removal function feature value, a value range in which the parasitic stripe feature is located by using histogram-based statistics;
a zero setting submodule 852 for setting the coefficient matrix SjAnd setting the data of the median value in the value range to zero to eliminate the parasitic stripe characteristics.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (6)
1. The method for eliminating the parasitic stripes of the magneto-rheological removal function based on wavelet transformation is characterized by comprising the following steps of:
obtaining interferometer spot-collecting measuring surface shape data matrix f containing parasitic fringe1(x,y)；
Extracting the surface shape data matrix f1Local data in (x, y), the local data being: the method comprises the steps of (1) containing parasitic stripes and removing function shapes; calculating the space period T of the parasitic stripe;
using sym5 wavelet to pair the surface shape data matrix f1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, and obtaining 3N +1 coefficient matrix data; the N is obtained by calculation according to the space period T;
analyzing the data of 3N +1 coefficient matrixes, and recording the coefficient matrix containing parasitic stripes as Sj(ii) a Wherein j is 1 to K, K is the number of coefficient matrixes containing parasitic stripes, and K is less than or equal to 3N + 1;
for coefficient matrix S containing parasitic stripesjProcessing to eliminate parasitic stripe characteristics;
wherein, for coefficient matrix S containing parasitic stripesjProcessing to eliminate the parasitic stripe feature, including:
determining the value range of the parasitic stripe feature by adopting histogram-based statistics according to the intensity difference of the discontinuous and existing values of the parasitic stripe feature and the removal function feature;
matrix S of the coefficientsjAnd setting the data of the median value in the value range to zero to eliminate the parasitic stripe characteristics.
2. The cancellation method of claim 1, further comprising:
for the processed coefficient matrix SjReconstructing, wherein the wavelet basis function is sym5 and the number of decomposition layers is N when reconstructing, and obtaining a surface-shaped data matrix f for eliminating parasitic stripes2(x,y)。
3. The cancellation method of claim 1, wherein said N is obtained from said spatial period T calculation, and comprises:
calculating the number N of the layers of the multi-level wavelet decomposition, wherein the calculation formula is as follows:
where N is the smallest integer satisfying the condition, T represents the spatial period of the parasitic stripe, and pix represents the pixel size.
4. The magneto-rheological removing function parasitic stripe eliminating device based on wavelet transformation is characterized by comprising the following components:
an acquisition module for acquiring interferometer speckle collection measurement surface shape data matrix f containing parasitic fringes1(x,y)；
A calculation module for extracting the surface shape data matrix f1Local data in (x, y), the local data being: the method comprises the steps of (1) containing parasitic stripes and removing function shapes; calculating the space period T of the parasitic stripe;
a decomposition module for pair of the surface data matrix f using sym5 wavelet1(x, y) performing multi-stage decomposition, wherein the decomposition stage number is N, and obtaining 3N +1 coefficient matrix data; the N is according to the spaceCalculating and obtaining a period T;
a recording module for analyzing the data of 3N +1 coefficient matrixes and recording the coefficient matrix containing parasitic stripes as Sj(ii) a Wherein j is 1 to K, K is the number of coefficient matrixes containing parasitic stripes, and K is less than or equal to 3N + 1;
a cancellation module for cancelling the coefficient matrix S containing the parasitic fringesjProcessing to eliminate parasitic stripe characteristics;
wherein the cancellation module comprises:
the determining submodule is used for determining the value range of the parasitic stripe feature by adopting histogram-based statistics according to the intensity difference existing and the discontinuity of the parasitic stripe feature and the removal function feature value;
a cancellation submodule for inverting the coefficient matrix SjAnd setting the data of the median value in the value range to zero to eliminate the parasitic stripe characteristics.
5. The cancellation apparatus of claim 4, wherein the apparatus further comprises:
a reconstruction module for reconstructing the coefficient matrix S processed by the elimination modulejReconstructing, wherein the wavelet basis function is sym5 and the number of decomposition layers is N when reconstructing, and obtaining a surface-shaped data matrix f for eliminating parasitic stripes2(x,y)。
6. The removing device according to claim 4, wherein the calculating module is specifically configured to calculate the number N of layers of the multi-level wavelet decomposition, and the calculation formula is as follows:
where N is the smallest integer satisfying the condition, T represents the spatial period of the parasitic stripe, and pix represents the pixel size.
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