CN110224628B - Phase change control device and control method for variable capacitance linear electrostatic motor - Google Patents
Phase change control device and control method for variable capacitance linear electrostatic motor Download PDFInfo
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- CN110224628B CN110224628B CN201910467711.2A CN201910467711A CN110224628B CN 110224628 B CN110224628 B CN 110224628B CN 201910467711 A CN201910467711 A CN 201910467711A CN 110224628 B CN110224628 B CN 110224628B
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- 230000005611 electricity Effects 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 3
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
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Abstract
The invention discloses a phase change control device of a variable capacitance linear electrostatic motor, which comprises a driving power supply, a current detection circuit, an integrator and a single chip microcomputer, wherein the driving power supply is connected with the electrostatic motor and used for outputting a three-phase driving signal to drive a rotor to slide; the current detection circuit is used for detecting current data flowing through the electrostatic motor and transmitting the current data to the integrator; the integrator integrates the current data to obtain electric quantity, the electric quantity is transmitted to the single chip microcomputer, and the single chip microcomputer judges that the motor is controlled to change phases when the absolute value of the electric quantity reaches the maximum value. The invention also discloses a phase change control method of the variable capacitance linear electrostatic motor, which comprises the steps of firstly obtaining current data flowing through the electrostatic motor and obtaining electric quantity according to the current data; and then controlling the electrostatic motor to change the phase at the position where the absolute value of the electric quantity is maximum. The technical scheme can shorten the power-on time of the variable capacitance linear electrostatic motor during phase change, accelerate the phase change frequency and the movement speed and ensure that the electrostatic motor keeps long-term stable operation.
Description
Technical Field
The invention relates to a device and a method for controlling the phase change of an electrostatic motor and detecting the position of a rotor by using a current detector and an integrator.
Background
The linear electrostatic motor is a synchronous motor, which consists of a single slide block and a single stator and generates linear motion. Electrostatic motors can produce more power and force than electromagnetic motors of the same size, an advantage that makes them applicable in many leading-edge high-performance electromechanical systems. The oily medium and the micron beads filled in order to reduce the friction force between the sliding block and the stator enable the phase stability allowance of the control loop to be very low, and the motor is easy to lose step. When open-loop control is adopted, a control circuit is simple, but in order to ensure that the motor reaches a balanced state, the power-on time is long, the phase change frequency of the motor is low, the movement speed is slow, the step-out phenomenon is easy to occur, and the efficient operation and the long-term stable operation of the motor are difficult.
Disclosure of Invention
The invention aims to provide a phase change control device and a phase change control method for a variable capacitance linear electrostatic motor, which can shorten the power-on time of the variable capacitance linear electrostatic motor during phase change, accelerate the phase change frequency and the motion speed and keep the electrostatic motor to operate stably for a long time.
In order to achieve the above purpose, the solution of the invention is:
a phase change control device of a variable capacitance linear electrostatic motor comprises a rotor and a stator, wherein the stator is fixed in a bottom plate groove with the same width as the rotor, and comprises a lower plate, a film adhered on the lower plate and stator electrodes arranged on the surface of the film, and the stator electrodes are connected with three-phase driving voltage; the rotor slides on the lower plate and comprises an upper plate, a film adhered on the upper plate and rotor electrodes arranged on the surface of the film, and the rotor electrodes are respectively connected with positive driving voltage and negative driving voltage; the phase change control device comprises a driving power supply, a current detection circuit, an integrator and a single chip microcomputer, wherein the driving power supply is connected with the electrostatic motor and used for outputting a three-phase driving signal to drive the rotor to slide; the current detection circuit is used for detecting current data flowing through the electrostatic motor and transmitting the current data to the integrator; the integrator integrates the current data to obtain electric quantity, the electric quantity is transmitted to the single chip microcomputer, and the single chip microcomputer judges that the motor is controlled to change phases when the absolute value of the electric quantity reaches the maximum value.
The single chip microcomputer further comprises a rotor position detection unit used for comparing the current electric quantity value with the maximum electric quantity value so as to judge the position of the rotor at the moment.
The current detection circuit comprises a voltage measurement device, a calculation device and a resistor with known resistance value, wherein the resistor is connected between the electrostatic motor and the ground, the voltage measurement device is used for measuring the terminal voltage of the resistor and sending the terminal voltage to the calculation device, and the calculation device divides the terminal voltage and the resistance value to obtain current data flowing through the electrostatic motor.
And a lubricating medium is filled between the rotor and the stator.
A phase change control method of a variable capacitance linear electrostatic motor comprises the following steps:
step 1, acquiring current data flowing through an electrostatic motor, and accordingly obtaining electric quantity;
and 2, controlling the electrostatic motor to change the phase at the position with the maximum absolute value of the electric quantity.
In the step 2, the method for judging the maximum absolute value of the electric quantity is as follows: let the electric quantity at time t be QtThen the corresponding current is
It is compared with the current of the last sampling period
Making a comparison, where Δ t is the sampling period, when It·It-1When the absolute value is less than or equal to 0, the absolute value of the electric quantity at the moment t is taken as a maximum value | Qmax|。
In the step 2, the specific content of controlling the electrostatic motor to change the phase at the position with the maximum absolute value of the electric quantity is as follows: when the absolute value of the electric quantity reaches the maximum value | Q in sequence during the operation of the motormaxAnd in the case of | driving the phase change in sequence according to the sequence of B phase-A phase-C phase.
Further comprising comparing the current quantity of electricity Q with a maximum value of absolute value of quantity of electricity | QmaxObtaining the position of the current mover, wherein the specific method comprises the following steps: when Q reaches | QmaxWhen the rotor is in the neutral position, the motor is in the neutral position, and the rotor is positioned at the position where the relative area of the upper and lower polar plates reaches the maximum; when Q does not reach | QmaxAnd in the process of I, the motor is in an unbalanced position, and the rotor is between two balanced positions.
After the scheme is adopted, analysis shows that when the sliding block slides on the stator, the upper electrode and the lower electrode are equivalent to the capacitance which is constantly changed due to the change of the relative area. The closed-loop control greatly shortens the power-on time of the motor, the phase-change frequency of the motor is high, the movement speed is high, the step-out phenomenon cannot occur, and the high-efficiency operation and the long-term stable operation of the motor can be realized.
Meanwhile, after the scheme is adopted, the current in the motor loop is only needed to be acquired, the current value is obtained through integration, the current position of the rotor can be judged, the static motor is controlled to stably and synchronously operate, the problem that the variable capacitance linear static motor is too slow in operation speed and out of step when the variable capacitance linear static motor is operated quickly is solved, and the static motor can stably operate for a long time.
Drawings
Fig. 1 is an exploded view of a variable capacitance linear electrostatic motor to which the present invention is applied;
fig. 2 is an exploded structural view of a stator and a mover of a variable capacitance type linear electrostatic motor to which the present invention is applied;
FIG. 3 is a schematic structural diagram of a commutation control device of a variable capacitance linear electrostatic motor according to the present invention;
FIG. 4 is a circuit diagram for measuring current using the SENSE resistance technique;
FIG. 5 is a circuit diagram of integration using a summing integration circuit;
fig. 6 is a control timing chart for performing commutation control according to the present invention.
Detailed Description
The technical solution and the advantages of the present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, the variable capacitance linear electrostatic motor applied to the present invention is composed of a pair of flexible films 11 and 12, which are respectively used as a mover and a stator, and electrodes 13 are arranged in order on the respective films to accumulate electric charges. The potential difference of the upper and lower polar plates causes electrostatic repulsion between the upper and lower films, the normal component of the electrostatic repulsion plays the role of reducing the friction force between the stator and the rotor, and the tangential component of the electrostatic repulsion pushes the sliding block along the surface of the stator. Micrometer-level gaps are reserved between the stator and the rotor and between the electrodes.
As shown in fig. 2, in order to operate the electrostatic motor, the films 12 and 11 with electrodes are respectively adhered to plastic plates 21 and 22, the lower plate (plastic plate 22) is fixed in the groove of the bottom plate with the same width as the plastic plate to be used as a stator, and the electrode on the lower plate is a stator electrode 24; the upper plate (plastic plate 21) slides on the lower plate to serve as a mover, and the electrodes thereon are mover electrodes 23. The mover electrodes 23 are sequentially connected to a positive polarity driving voltage and a negative polarity driving voltage, respectively, and the stator electrodes 24 are connected to a three-phase driving voltage. In order to reduce the friction between the mover and the stator, a lubricating medium 25 is filled therebetween.
As shown in fig. 3, the commutation control device provided by the present invention includes a driving power supply, a current detection circuit, an integrator, and a single chip, wherein the driving power supply is connected to the electrostatic motor and is configured to output a three-phase driving signal to drive the mover to slide; the current detection circuit is connected with the electrostatic motor in series and is used for detecting current data I flowing through the electrostatic motor and transmitting the current data I to the integrator; the integrator integrates the current data I to obtain electric quantity Q, the electric quantity Q is transmitted to the singlechip, and the singlechip judges the absolute value of the electric quantityWhen the maximum value is reached, the motor is controlled to change the phase, and the position of the rotor at the moment can be judged by comparing the current electric quantity value with the maximum value of the electric quantity; in this embodiment, the method for the single chip to determine that the absolute value of the electric quantity reaches the maximum is as follows: the single chip microcomputer finishes data acquisition of the electric quantity transmitted by the integrator through the AD/DA module according to a certain sampling frequency, and records the electric quantity at the current moment as Q by taking a sampling period as an exampletThen the current at the present moment is
It is compared with the current of the last sampling period
Making a comparison, where Δ t is the sampling period, when It·It-1When the absolute value of the electric quantity at the t-1 moment is less than or equal to 0, the absolute value of the electric quantity at the t-1 moment is judged to be maximum, but the singlechip does not send a control instruction at the moment in consideration of actual operation, so that the absolute value of the electric quantity at the t moment is taken as the maximum value | QmaxIf the sampling frequency of the single-chip microcomputer is high enough, QtAnd Qt-1Very close, the error is negligible.
Referring to fig. 3, the single chip microcomputer includes a mover position detecting unit and a motor phase changing unit, and the energy W of the variable capacitance linear electrostatic motor during linear motioneThe method comprises the following steps:
wherein C represents an equivalent capacitance of the electrostatic motor, U represents a voltage value applied to the electrostatic motor, Q represents an electric quantity between upper and lower electrode plates of the electrostatic motor, epsilon represents a dielectric constant, S represents a relative area of the upper and lower electrode plates, and d represents a distance between the upper and lower electrode plates.
At WeWhen the maximum value is reached, the motor reaches the balance position, namely when the Q reaches the maximum value, the motor reaches the balance position, the motor is in phase change, and the motor phase change unit is used for changing the phase of the motor when the Q is equal to the maximum valuemaxAnd controlling the motor to change the phase. Q reaches a maximum value QmaxWhen the electrodes are in contact with each other, the relative area S of the upper and lower electrodes is maximized, i.e., the upper and lower electrodes are in direct contact with each otherDetecting mover position element for comparing current Q and QmaxThe value of (A) determines the current position of the mover when Q reaches QmaxWhen the motor is in a balance position, the rotor is positioned at the position where the relative area of the upper and lower polar plates reaches the maximum; when Q does not reach QmaxWhen the rotor is in the neutral position, the motor is in the neutral position, and the rotor is in the neutral position.
The invention provides a phase change control method of a variable capacitance linear electrostatic motor, which comprises the following steps:
s1: obtaining the current in the loop by a current detection circuit, and transmitting the obtained current data I to an integrator;
s2: integrating the obtained current by an integrator to obtain an electric quantity value Q, and transmitting the result to a single chip microcomputer;
s3: the single chip microcomputer controls the electrostatic motor to change the phase at the position where the absolute value of the obtained electric quantity is maximum;
s4: the single chip microcomputer compares the current acquired electric quantity value Q with the maximum electric quantity value QmaxThe current mover position may be obtained.
The circuit shown in fig. 4 is used to obtain the current in the loop where the electrostatic motor is located, and a resistor with a known resistance value is placed at the end of the circuit, that is, connected between the electrostatic motor and the ground, so that the current flowing through the inductor can be indirectly detected by the current detection circuit by detecting the voltage at the two ends of the resistor; the resistance value of the resistor should not be too large in order to reduce the influence on the circuit.
Fig. 5 shows the use of a summing and integrating circuit for integrating the acquired current to obtain the electrical quantity Q.
Fig. 6 is a timing chart of a phase change control of the variable capacitance linear electrostatic motor and a variation curve of the electric quantity Q. At t1The electric quantity Q reaches-Q at the momentmaxThe drive circuit B commutates phase at t2The electric quantity Q reaches Q at the momentmaxThe drive circuit A commutates phase at t3At that time, the electric quantity Q reaches-QmaxThe drive circuit C is phase-switched at t4At that time, the quantity of electricity Q reaches QmaxThe drive circuit B commutates phase at t5At that time, the electric quantity Q reaches-QmaxThe drive circuit A commutates phase at t6At that time, the quantity of electricity Q reaches QmaxAnd the driving circuit C is used for phase conversion. And circulating according to the phase change mode to complete the phase change control of the variable capacitance type electrostatic motor.
The above embodiments are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modifications made on the basis of the technical scheme according to the technical idea of the present invention fall within the protection scope of the present invention.
Claims (8)
1. A phase change control device of a variable capacitance linear electrostatic motor comprises a rotor and a stator, wherein the stator is fixed in a bottom plate groove with the same width as the rotor, and comprises a lower plate, a film adhered on the lower plate and stator electrodes arranged on the surface of the film, and the stator electrodes are connected with three-phase driving voltage; the rotor slides on the lower plate and comprises an upper plate, a film adhered on the upper plate and rotor electrodes arranged on the surface of the film, and the rotor electrodes are respectively connected with positive driving voltage and negative driving voltage; the method is characterized in that: the phase change control device comprises a driving power supply, a current detection circuit, an integrator and a single chip microcomputer, wherein the driving power supply is connected with the electrostatic motor and used for outputting a three-phase driving signal to drive the rotor to slide; the current detection circuit is used for detecting current data flowing through the electrostatic motor and transmitting the current data to the integrator; the integrator integrates the current data to obtain electric quantity, the electric quantity is transmitted to the single chip microcomputer, and the single chip microcomputer judges that the motor is controlled to change phases when the absolute value of the electric quantity reaches the maximum value.
2. The commutation control apparatus of a variable-capacitance linear electrostatic motor according to claim 1, wherein: the single chip microcomputer further comprises a rotor position detection unit used for comparing the current electric quantity value with the maximum electric quantity value so as to judge the position of the rotor at the moment.
3. The commutation control apparatus of a variable-capacitance linear electrostatic motor according to claim 1, wherein: the current detection circuit comprises a voltage measurement device, a calculation device and a resistor with known resistance value, wherein the resistor is connected between the electrostatic motor and the ground, the voltage measurement device is used for measuring the terminal voltage of the resistor and sending the terminal voltage to the calculation device, and the calculation device divides the terminal voltage and the resistance value to obtain current data flowing through the electrostatic motor.
4. The commutation control apparatus of a variable-capacitance linear electrostatic motor according to claim 1, wherein: and a lubricating medium is filled between the rotor and the stator.
5. A commutation control method based on the commutation control apparatus for a variable capacitance linear electrostatic motor according to claim 1, characterized by comprising the steps of:
step 1, a current detection circuit acquires current data flowing through an electrostatic motor and transmits the current data to an integrator, and the integrator integrates the current data to obtain electric quantity and transmits the electric quantity to a single chip microcomputer;
and 2, the singlechip judges that the electrostatic motor is controlled to change the phase at the position with the maximum absolute value of the electric quantity.
6. The commutation control method of claim 5, wherein: in the step 2, the method for judging the position with the maximum absolute value of the electric quantity is as follows: let the electric quantity at time t be QtThen the corresponding current is
It is compared with the current of the last sampling period
A comparison is made, where Δ t is the sampling period, Qt-1、Qt-2The electric quantities at t-1 and t-2 are respectively, when It·It-1When the absolute value is less than or equal to 0, the absolute value of the electric quantity at the moment t is taken as a maximum value | Qmax|。
7. The commutation control method of claim 5, wherein: in the step 2, the specific content of controlling the electrostatic motor to change the phase at the position with the maximum absolute value of the electric quantity is as follows: in the electricityWhen the absolute value of the electric quantity reaches the maximum value | Q in sequence in the running process of the machinemaxAnd in the case of | driving the phase change in sequence according to the sequence of B phase-A phase-C phase.
8. The commutation control method of claim 5, wherein: further comprising comparing the current quantity of electricity Q with a maximum value of absolute value of quantity of electricity | QmaxObtaining the position of the current mover, wherein the specific method comprises the following steps: when Q reaches | QmaxWhen the rotor is in the neutral position, the motor is in the neutral position, and the rotor is positioned at the position where the relative area of the upper and lower polar plates reaches the maximum; when Q does not reach | QmaxAnd in the process of I, the motor is in an unbalanced position, and the rotor is between two balanced positions.
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| CN100460983C (en) * | 2003-08-21 | 2009-02-11 | 奥林巴斯株式会社 | Electrostatic actuator, shutter device, imaging module, and camera |
| JP4621577B2 (en) * | 2005-10-27 | 2011-01-26 | アルプス電気株式会社 | Electrostatic actuator and driving method thereof |
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