CN110223941B - Automatic air exhaust device - Google Patents
Automatic air exhaust device Download PDFInfo
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- CN110223941B CN110223941B CN201910490495.3A CN201910490495A CN110223941B CN 110223941 B CN110223941 B CN 110223941B CN 201910490495 A CN201910490495 A CN 201910490495A CN 110223941 B CN110223941 B CN 110223941B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
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Abstract
The invention provides an automatic air exhaust device, which relates to the technical field of air exhaust devices and comprises the following components: the air exhaust pipeline and the first adjusting module; wherein, first regulation module includes: the device comprises a rotary cylinder, a cylinder mounting frame, a first baffle and a first rotating shaft; install first pivot in the exhaust duct, and the top of first pivot is connected with the revolving cylinder who installs outside the exhaust duct, and the cylinder mounting bracket is installed on the exhaust duct for fixed revolving cylinder is fixed with first separation blade in first pivot, and the rotation of ventilating through revolving cylinder drives the rotation of first pivot and first separation blade, with the switch action of control exhaust. According to the invention, the air exhaust device can control the opening and closing actions of the air exhaust in a mode that the ventilation rotation of the rotary air cylinder drives the first rotating shaft and the first baffle plate to rotate, thereby realizing the technical effect of automatic air exhaust of the air exhaust device.
Description
Technical Field
The invention relates to the technical field of air exhaust devices, in particular to an automatic air exhaust device.
Background
In the semiconductor single chip process, strong corrosive gases such as HF, H2SO4, HNO3, KOH and the like are often used in the cleaning process of the wafer, and the strong corrosive gases are heated and then volatilized in an equipment space, SO that the health of a human body is seriously harmed. Due to different requirements of the process and the environment, technicians often need to control the air exhaust amount, the liquid medicine sprayed on the surface of the wafer is easily sucked away when the air exhaust amount is too large, and harmful gases can be remained in the single-chip cleaning cavity when the air exhaust amount is too small, so that the health of the body is damaged. The traditional exhaust device is usually led out in a straight-through pipeline mode, does not have the function of adjusting air volume, and even needs to be manually opened or closed.
Disclosure of Invention
The invention aims to provide an automatic air exhaust device to realize the automatic control of the opening and closing actions of air exhaust.
The invention provides an automatic air exhaust device, which comprises: the air exhaust pipeline and the first adjusting module; wherein the first adjusting module comprises: the device comprises a rotary cylinder, a cylinder mounting frame, a first baffle and a first rotating shaft;
install in the exhaust duct first pivot, just the top of first pivot with install in outside the exhaust duct rotatory cylinder is connected, the cylinder mounting bracket is installed on the exhaust duct for it is fixed rotatory cylinder be fixed with in the first pivot first separation blade, through the rotation of ventilating of rotatory cylinder drives first pivot with the rotation of first separation blade to the switch action of control exhaust.
Further, the automatic air exhaust device further comprises: a second conditioning module, the second conditioning module comprising: rotating handle, second pivot, butterfly nut and second baffle:
install in the exhaust duct the second pivot, just the top of second pivot with install in outside the exhaust duct the turning handle is connected, the bottom of second pivot with butterfly nut connects be fixed with in the second pivot the second separation blade, wherein, through rotating the turning handle with butterfly nut, drive the second pivot with the rotation of second separation blade to adjust the volume of airing exhaust.
Further, the exhaust duct includes: the exhaust pipe comprises a 90-degree elbow and an exhaust pipe, wherein one side of the 90-degree elbow and the exhaust pipe are welded into a whole.
Furthermore, the 90-degree elbow and the exhaust pipe are made of stainless steel mirror tubes.
Furthermore, first regulation module with the second regulation module is all installed on the exhaust pipe, just the second regulation module set up in first regulation module with between the elbow of 90 degrees.
Furthermore, the automatic exhaust device comprises a flange, the flange is welded with the other side of the 90-degree elbow into a whole, and the 90-degree elbow is connected with the cavity to be ventilated through the flange.
Further, the first adjusting module further comprises: welding is planted the nail, welding is planted the nail and is used for with the cylinder mounting bracket is fixed on the exhaust pipe.
Further, the first adjusting module further comprises: the gasket is arranged at the relative movement position of the first rotating shaft and the exhaust pipe, and waste gas leakage is prevented at the relative movement position.
Further, the first adjusting module further comprises: the first rotating shaft limiting pad is arranged between the first rotating shaft and the outer surface of the exhaust pipe, and the bottom of the first rotating shaft is fixed on the exhaust pipe.
Further, the second adjusting module further comprises: and the second rotating shaft washer is arranged between the butterfly nut and the outer surface of the exhaust pipe to protect the butterfly nut and the outer surface of the exhaust pipe from being abraded.
The invention provides an automatic air exhaust device, which comprises: the air exhaust pipeline and the first adjusting module; wherein, first regulation module includes: the device comprises a rotary cylinder, a cylinder mounting frame, a first baffle and a first rotating shaft; install first pivot in the exhaust duct, and the top of first pivot is connected with the revolving cylinder who installs outside the exhaust duct, and the cylinder mounting bracket is installed on the exhaust duct for fixed revolving cylinder is fixed with first separation blade in first pivot, and the rotation of ventilating through revolving cylinder drives the rotation of first pivot and first separation blade, with the switch action of control exhaust. According to the invention, the air exhaust device can control the opening and closing actions of the air exhaust in a mode that the ventilation rotation of the rotary air cylinder drives the first rotating shaft and the first baffle plate to rotate, thereby realizing the technical effect of automatic air exhaust of the air exhaust device.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a front view of an automatic air discharging device according to an embodiment of the present invention;
fig. 2 is a side view of an automatic air discharging device according to an embodiment of the present invention;
fig. 3 is a sectional view of an automatic air discharging device according to an embodiment of the present invention;
fig. 4 is an isometric view of an automatic air exhaust device provided by an embodiment of the present invention;
fig. 5 is a connection diagram of the automatic air exhaust device and the cavity to be ventilated according to the embodiment of the invention.
Icon:
1-a flange; a 2-90 degree elbow; 3-an exhaust pipe; 4-welding and planting nails; 6-rotating the cylinder; 7-a second baffle plate; 8-a gasket; 9-a cylinder mounting; 10-a first baffle plate; 11-a first shaft; 12-a first spindle stop pad; 13-turning the handle; 14-a second shaft; 15-a second spindle washer; 16-wing nut.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
At present, the traditional exhaust device is usually led out in a straight-through pipeline mode, does not have the function of adjusting air volume, and even needs to be manually opened or closed. Based on this, the embodiment of the present invention provides an automatic air exhaust device, which can control the opening and closing actions of air exhaust in a manner that the ventilation rotation of the rotary air cylinder drives the first rotating shaft and the first blocking piece to rotate, thereby achieving the technical effect of automatic air exhaust of the air exhaust device.
For the convenience of understanding the present embodiment, a detailed description will be given to an automatic air discharging device disclosed in the present embodiment.
The first embodiment is as follows:
referring to fig. 1 to 5, an embodiment of the present invention provides an automatic air exhaust device, where the automatic air exhaust device includes: the air exhaust pipeline and the first adjusting module; wherein, first regulation module includes: the rotary air cylinder 6, the air cylinder mounting frame 9, the first baffle plate 10 and the first rotating shaft 11.
Install first pivot 11 in the exhaust duct, and the top of first pivot 11 is connected with the revolving cylinder 6 of installing outside the exhaust duct, and cylinder mounting bracket 9 is installed on the exhaust duct for fixed revolving cylinder 6 is fixed with first separation blade 10 in first pivot 11, and the rotation of ventilating through revolving cylinder 6 drives the rotation of first pivot 11 and first separation blade 10, with the switch action of control exhaust.
In the embodiment of the present invention, the rotary cylinder 6 is a type of cylinder which itself can perform reciprocating rotation within an angle range of less than 360 degrees. The rotary cylinder 6 is a device for converting pressure energy of compressed air into mechanical energy, and a pneumatic actuator for driving the first rotary shaft 11 to perform reciprocating rotational motion within 0 to 90 degrees by using the compressed air. The rotary cylinder 6 can be used to drive the first rotating shaft 11 and the first blocking piece 10 to rotate, which corresponds to the opening and closing of the valve. The first rotating shaft 11 may be a straight-line-shaped rotating shaft or a rotating shaft with other structures.
It should be noted that the swing angle of the rotary cylinder 6 is 90 degrees, which can control and drive the first blocking piece 10 to rotate 90 degrees, thereby realizing the opening and closing of the exhaust. The first blocking piece 10 is a circular blocking piece, the outer diameter of the first blocking piece 10 is slightly smaller than the inner diameter of the exhaust pipe 3, and the embodiment of the invention does not make any requirement on the thickness of the first blocking piece 10. If the rotating cylinder 6 drives the first baffle 10 to rotate 90 degrees and then is vertical to the cross section of the exhaust pipe 3, the opening action is performed; if the rotating cylinder 6 drives the first blocking piece 10 to rotate 90 degrees and then to be parallel to the cross section of the exhaust duct 3, the closing action is performed. It should be noted that the rotary cylinder 6 cannot be fixed directly to the exhaust duct 3, but a cylinder mounting 9 is required to fix the rotary cylinder 6 to the exhaust duct.
The embodiment of the invention provides an automatic air exhaust device, which comprises: the air exhaust pipeline and the first adjusting module; wherein, first regulation module includes: the rotary air cylinder 6, the air cylinder mounting frame 9, the first baffle 10 and the first rotating shaft 11; install first pivot 11 in the exhaust duct, and the top of first pivot 11 is connected with the revolving cylinder 6 of installing outside the exhaust duct, and cylinder mounting bracket 9 is installed on the exhaust duct for fixed revolving cylinder 6 is fixed with first separation blade 10 in first pivot 11, and the rotation of ventilating through revolving cylinder 6 drives the rotation of first pivot 11 and first separation blade 10, with the switch action of control exhaust. The invention can control the opening and closing action of the air exhaust by the way that the ventilation rotation of the rotary air cylinder 6 drives the first rotating shaft 11 and the first baffle plate 10 to rotate, thereby realizing the technical effect of automatic air exhaust of the air exhaust device.
Further, automatic exhaust device still includes: a second conditioning module, the second conditioning module comprising: the handle 13, the second rotating shaft 14, the butterfly nut 16 and the second stop 7 are rotated.
The second rotating shaft 14 is installed in the exhaust pipeline, the top end of the second rotating shaft 14 is connected with a rotating handle 13 installed outside the exhaust pipeline, the bottom of the second rotating shaft 14 is connected with a butterfly nut 16, a second baffle 7 is fixed on the second rotating shaft 14, and the second rotating shaft 14 and the second baffle 7 are driven to rotate by rotating the rotating handle 13 and the butterfly nut 16 so as to adjust the exhaust volume.
In the embodiment of the invention, the second rotating shaft 14 is adjusted by rotating the rotating handle 13, so that an operator can conveniently operate the machine. In practical application, the wing nut 16 needs to be used with the second rotating shaft 14, and no requirements are made on the process, shape, material and the like of the wing nut 16. The second rotating shaft 14 is a manual rotating shaft, and the structure of the second shutter 7 may be the same as or different from that of the first shutter 10. The embodiment of the invention can realize the adjustment of any air exhaust amount through the second adjusting module.
Further, the exhaust duct includes: the 90-degree elbow 2 and the exhaust pipe 3, and one side of the 90-degree elbow 2 and the exhaust pipe 3 are welded into a whole.
In the embodiment of the invention, the exhaust pipeline is divided into the 90-degree elbow 2 and the exhaust pipe 3, and the 90-degree elbow 2 is changed into the elbow parallel to the cavity to be ventilated for transversely exhausting air, so that the secondary pollution caused by condensation of waste gas is avoided.
Furthermore, the 90-degree elbow 2 and the exhaust pipe 3 are made of stainless steel mirror tubes.
In the embodiment of the invention, the liquid for cleaning the single-chip cleaning cavity is generally corrosive, so that the stainless mirror surface pipe with strong corrosion resistance is adopted as the material of the 90-degree elbow 2 and the exhaust pipe 3. In addition, the stainless steel mirror surface pipe is non-toxic, firm, good in ductility, suitable for various drinking water chemical components, small in maintenance amount, low in life cycle cost, easy to form and weld, and suitable for various connection methods and different types of elbows.
Further, first adjusting module and second adjusting module all install on exhaust pipe 3, and the second adjusting module sets up between first adjusting module and 90 degrees elbows 2.
Further, automatic exhaust device includes flange 1, and flange 1 is as an organic whole with the opposite side welding of 90 degrees elbows 2, is connected 90 degrees elbows 2 with the cavity of treating the ventilation through flange 1.
In the embodiment of the invention, the cavity to be ventilated comprises any single-chip cleaning cavity which can be connected with any single-chip cleaning cavity through the flange 1, and the connecting structure is simple and small, the installation is simple, and the disassembly is convenient.
Further, the first adjusting module further comprises: the welding is planted nail 4, and the welding is planted nail 4 and is used for fixing cylinder mounting bracket 9 on exhaust pipe 3.
Further, the first adjusting module further comprises: and the gasket 8 is installed at the relative movement position of the first rotating shaft 11 and the exhaust pipe 3, and the exhaust gas leakage at the relative movement position is prevented.
Further, the first adjusting module further comprises: first pivot limit pad 12, first pivot limit pad 12 set up between first pivot 11 and exhaust pipe 3 surface, fix the bottom of first pivot 11 on exhaust pipe 3.
In the embodiment of the present invention, the first shaft limiting pad may be further used for limiting the rotation angle of the first shaft 11. The limiting angle can be 90 degrees or 180 degrees.
Further, the second adjusting module further comprises: and the second rotating shaft washer 15 is arranged between the butterfly nut 16 and the outer surface of the exhaust pipe 3, so that the butterfly nut 16 and the outer surface of the exhaust pipe 3 are protected from being abraded.
In the embodiment of the present invention, the second shaft washer 15 can increase the area between the wing nut 16 and the outer surface of the exhaust duct 3, so as to protect the wing nut 16 and the outer surface of the exhaust duct 3 from abrasion.
Example two:
referring to fig. 1 to 4, the overall structure of the automatic air discharging device is described in detail:
the flange 1 is welded with the 90-degree elbow 2 and the exhaust pipe 3 into a whole, wherein the 90-degree elbow 2 and the exhaust pipe 3 are stainless steel mirror tubes with the outer diameter of 50 cm. In addition, welding is planted nail 4 on exhaust pipe 3, and cylinder mounting bracket 9 plants nail 4 through the welding and installs on exhaust pipe 3, and revolving cylinder 6 installs on cylinder mounting bracket 9. The rotary cylinder 6 is connected with one end of a first rotating shaft 11 through a key and a jackscrew, and a first baffle 10 is installed on the first rotating shaft 11. The other end of the first rotating shaft 11 is provided with a first rotating shaft limiting pad 12, and the bottom of the first rotating shaft 11 is fixed on the exhaust pipe 3 by the first rotating shaft limiting pad 12. When the rotary cylinder 6 is ventilated and rotated, the first baffle 10 mounted on the first rotating shaft 11 is driven to rotate by 90 degrees, and then the opening and closing actions of the exhaust duct are realized. In order to prevent the exhaust gas from leaking at the relative movement position of the first rotating shaft 11 and the exhaust pipe 3, a corrosion-resistant plastic gasket 8 is arranged at the relative movement position of the first rotating shaft 11 and the exhaust pipe 3. An installation hole is formed between the 90-degree elbow 2 and the rotary cylinder 6, a second rotating shaft 14 is installed at the installation hole, a second blocking piece 7 is fixed on the second rotating shaft 14, a rotary handle 13 is installed on one section of the second rotating shaft 14, and the second blocking piece 7 fixed on the second rotating shaft 14 is driven to rotate through rotation of the rotary handle 13, so that the purpose of randomly adjusting the air exhaust amount is achieved.
When the second baffle 7 is vertical to the cross section of the exhaust pipe 3, the exhaust amount is controlled to be maximum, and the waste gas can smoothly pass through the exhaust pipe 3; the angle between the second baffle 7 and the cross section of the exhaust pipe 3 is adjusted by rotating the handle 13, so that the smaller the angle between the second baffle 7 and the cross section of the exhaust pipe 3 is, the smaller the exhaust amount is.
Referring to fig. 5, fig. 5 is a schematic view illustrating the automatic air exhausting device installed on the cavity to be ventilated. In order to avoid the situation that the traditional exhaust cylinder directly exhausts air at the upper part of the cavity to be ventilated and liquid drops drop into the single cavity again to pollute the cavity after waste gas is condensed, the automatic exhaust device provided by the embodiment of the invention is led out from the side surface of the cavity to be ventilated and is changed into a state that the air is parallel to the cavity to be ventilated through the 90-degree elbow 2 to transversely exhaust air, so that secondary pollution caused by waste gas condensation is avoided. Therefore, the direction of the outlet of the automatic air exhaust device provided by the invention can be designed according to actual needs.
The embodiment of the invention provides an automatic air exhaust device, which comprises: the air exhaust pipeline and the first adjusting module; wherein, first regulation module includes: the rotary air cylinder 6, the air cylinder mounting frame 9, the first baffle 10 and the first rotating shaft 11; install first pivot 11 in the exhaust duct, and the top of first pivot 11 is connected with the revolving cylinder 6 of installing outside the exhaust duct, and cylinder mounting bracket 9 is installed on the exhaust duct for fixed revolving cylinder 6 is fixed with first separation blade 10 in first pivot 11, and the rotation of ventilating through revolving cylinder 6 drives the rotation of first pivot 11 and first separation blade 10, with the switch action of control exhaust. According to the embodiment of the invention, the first rotating shaft 11 and the first baffle 10 can be driven to rotate through the ventilation rotation of the rotating cylinder 6, the automatic opening or closing action is controlled, and the automatic air exhaust can be realized.
The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of articles of manufacture according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
In the embodiments provided in the present invention, it should be understood that the disclosed apparatus may be implemented in other manners. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one logical division, and there may be other divisions when actually implemented, and for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of devices or units through some communication interfaces, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit.
In addition, in the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. An automatic air exhaust device, comprising: the air exhaust pipeline and the first adjusting module; wherein the first adjusting module comprises: the device comprises a rotary cylinder, a cylinder mounting frame, a first baffle and a first rotating shaft; the first rotating shaft makes reciprocating rotary motion at 0-90 degrees;
the first rotating shaft is installed in the exhaust pipeline, the top end of the first rotating shaft is connected with the rotating cylinder installed outside the exhaust pipeline, the cylinder installation frame is installed on the exhaust pipeline and used for fixing the rotating cylinder, the first blocking piece is fixed on the first rotating shaft, and the first rotating shaft and the first blocking piece are driven to rotate through ventilation rotation of the rotating cylinder so as to control opening and closing actions of exhaust;
automatic exhaust device still includes: a second conditioning module, the second conditioning module comprising: rotating handle, second pivot, butterfly nut and second baffle:
the second rotating shaft is installed in the exhaust pipeline, the top end of the second rotating shaft is connected with the rotating handle installed outside the exhaust pipeline, the bottom of the second rotating shaft is connected with the butterfly nut, and the second blocking piece is fixed on the second rotating shaft, wherein the second rotating shaft and the second blocking piece are driven to rotate by rotating the rotating handle and the butterfly nut so as to adjust the exhaust volume;
the exhaust duct includes: the exhaust pipe comprises a 90-degree elbow and an exhaust pipe, wherein one side of the 90-degree elbow and the exhaust pipe are welded into a whole.
2. The automatic air exhaust device according to claim 1, wherein the 90 degree elbow and the exhaust duct are made of stainless steel mirror tubes.
3. The automatic exhaust device according to claim 2, wherein the first and second conditioning modules are both mounted on an exhaust duct, and the second conditioning module is disposed between the first conditioning module and the 90 degree elbow.
4. The automatic air exhaust device according to claim 3, characterized in that the automatic air exhaust device comprises a flange, the flange is welded with the other side of the 90-degree elbow into a whole, and the 90-degree elbow is connected with the cavity to be ventilated through the flange.
5. The automatic exhaust device according to claim 4, wherein the first conditioning module further comprises: welding is planted the nail, welding is planted the nail and is used for with the cylinder mounting bracket is fixed on the exhaust pipe.
6. The automatic exhaust device according to claim 4, wherein the first conditioning module further comprises: the gasket is arranged at the relative movement position of the first rotating shaft and the exhaust pipe, and waste gas leakage is prevented at the relative movement position.
7. The automatic exhaust device according to claim 4, wherein the first conditioning module further comprises: the first rotating shaft limiting pad is arranged between the first rotating shaft and the outer surface of the exhaust pipe, and the bottom of the first rotating shaft is fixed on the exhaust pipe.
8. The automatic exhaust device according to claim 4, wherein the second conditioning module further comprises: and the second rotating shaft washer is arranged between the butterfly nut and the outer surface of the exhaust pipe to protect the butterfly nut and the outer surface of the exhaust pipe from being abraded.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910490495.3A CN110223941B (en) | 2019-06-06 | 2019-06-06 | Automatic air exhaust device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910490495.3A CN110223941B (en) | 2019-06-06 | 2019-06-06 | Automatic air exhaust device |
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| CN110223941A CN110223941A (en) | 2019-09-10 |
| CN110223941B true CN110223941B (en) | 2021-06-15 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106979342A (en) * | 2017-04-25 | 2017-07-25 | 广东环葆嘉节能科技有限公司 | Manual air volume control valve |
| CN207246442U (en) * | 2017-09-11 | 2018-04-17 | 昆山浦元真空技术工程有限公司 | A kind of car lamp vacuum coating equipment pipeline throttle valve structure |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170102086A1 (en) * | 2015-10-13 | 2017-04-13 | Belimo Holding Ag | Butterfly valve |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106979342A (en) * | 2017-04-25 | 2017-07-25 | 广东环葆嘉节能科技有限公司 | Manual air volume control valve |
| CN207246442U (en) * | 2017-09-11 | 2018-04-17 | 昆山浦元真空技术工程有限公司 | A kind of car lamp vacuum coating equipment pipeline throttle valve structure |
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