CN110221499B - LCoS micro-display with low fringe field crosstalk - Google Patents

LCoS micro-display with low fringe field crosstalk Download PDF

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Publication number
CN110221499B
CN110221499B CN201910444584.4A CN201910444584A CN110221499B CN 110221499 B CN110221499 B CN 110221499B CN 201910444584 A CN201910444584 A CN 201910444584A CN 110221499 B CN110221499 B CN 110221499B
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China
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liquid crystal
transparent
substrate
pixel electrode
fringe field
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CN110221499A (en
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王琼华
顾小情
窦虎
储繁
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Sichuan University
Beihang University
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Sichuan University
Beihang University
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13363—Birefringent elements, e.g. for optical compensation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/13706—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering the liquid crystal having positive dielectric anisotropy

Abstract

The invention provides an LCoS micro-display with low fringe field crosstalk. The micro display comprises an upper substrate, a liquid crystal layer and a lower substrate; the upper substrate and the lower substrate are arranged in parallel, and the liquid crystal layer is made of positive nematic liquid crystal material; the upper substrate comprises a polaroid, a glass substrate and a transparent plane common electrode; the lower substrate comprises a polymer bulge, a transparent square pixel electrode, an insulating layer, a metal diffuse reflection film and a monocrystalline silicon substrate; the transparent common plane electrode is coated under the glass substrate, the transparent square pixel electrode is square, and the gaps among the pixel electrodes are equal; the polymer protrusions are filled between the transparent square pixel electrode gaps. The special polymer bulge introduced by the invention can effectively eliminate crosstalk between the fringe field of the LCoS to the adjacent pixels.

Description

LCoS micro-display with low fringe field crosstalk
Technical Field
The invention relates to the field of liquid Crystal display, in particular to an LCoS (liquid Crystal on silicon) micro display with low fringe field crosstalk.
Background
The LCoS uses a semiconductor CMOS (complementary Metal Oxide semiconductor) integrated circuit chip as a back substrate of a reflective lcd (liquid Crystal display), the CMOS chip is covered with a thin layer of liquid Crystal, and after packaging and setting a driving circuit, the liquid Crystal device can be made into a miniaturized reflective active matrix driving liquid Crystal device. The LCoS can integrate a liquid crystal device and a large-scale integrated circuit, and has great advantages in manufacturing a small-pixel, high-resolution, and high-integration imaging device.
For the conventional transmission type TFT-LCD, since the signal wiring of the gate driving chip and the TFT (thin Film transistor) itself need to occupy a part of the area, the light passing through these areas cannot be completely transmitted, and is not controlled by the voltage, so that the correct gray scale cannot be displayed, and therefore, the black matrix is required to be used for shielding. And the circuit and the transistor for driving the pixel of the LCoS micro-display are integrated on the single crystal silicon substrate, so that the area of an optical modulation dead zone is reduced, and the aperture opening ratio is improved.
Due to the characteristics of high integration, high aperture ratio and the like of the LCoS micro-display, the influence between pixels is very large, and the depth and the precision of the phase and amplitude modulation quantity of the LCoS micro-display are deteriorated by a fringe field between the pixels, so that the performance of the device is deteriorated.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provides an LCoS micro-display with low fringe field crosstalk, and the polymer bulge in the display can effectively eliminate the crosstalk of the fringe field to adjacent pixels in the common LCoS display.
The invention is realized by the following technical scheme:
the liquid crystal display panel comprises an upper substrate 10, a liquid crystal layer 4 and a lower substrate 11; the upper substrate 10 and the lower substrate 11 are arranged in parallel, and the liquid crystal layer 4 uses a positive nematic liquid crystal material; the upper substrate 10 comprises a polaroid 1, a glass substrate 2 and a transparent plane common electrode 3; the lower substrate 11 includes a polymer bump 5, a transparent square pixel electrode 6, an insulating layer 7, a metal diffuse reflection film 8, and a single crystal silicon substrate 9.
The liquid crystal layer 4 adopts positive nematic liquid crystal, and the display presents a good bright state when no voltage is applied; when voltage is applied, the director of the liquid crystal molecules changes, incident light generates double refraction in the liquid crystal layer, the angle of the incident light changes, the polarization direction of part of emergent light is orthogonal to the polarization axis of the polaroid, and the gray scale of the display changes.
The polymer bulges 5 are made of low dielectric materials and filled in gaps of the transparent square pixel electrodes 6, liquid crystal molecules in the liquid crystal layer rotate in a pixel area applied with voltage under the insulation effect of an electric field of the polymer bulges 5, and the liquid crystal molecules in the pixel area not applied with voltage are basically not influenced by adjacent pixels and are not disturbed.
The transparent plane common electrode 3 and the transparent square pixel electrode 6 are made of transparent conductive materials Indium Tin Oxide (ITO) or Indium Zinc Oxide (IZO), the transparent plane common electrode 3 is coated under the glass substrate 2, the transparent square pixel electrode 6 is square, and gaps between the pixel electrodes are equal.
The insulating layer 7 is made of oxide and used for the voltage shielding effect of the metal diffuse reflection film. The metal diffuse reflection film 8 is arranged on the surface of the monocrystalline silicon substrate 9, is made of metal with high reflectivity, and is uneven in surface depression and used for reflecting incident light.
The single crystal silicon substrate 11 is a single crystal silicon substrate with a CMOS integrated circuit.
Drawings
Fig. 1 is a schematic structural diagram of an LCoS microdisplay with low fringe field crosstalk according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of an LCoS microdisplay with low fringe field crosstalk according to an embodiment of the present invention.
Fig. 3 is a reflectivity diagram of an LCoS microdisplay without the introduction of bumps.
Fig. 4 is a reflectivity diagram of an LCoS microdisplay with special protrusions introduced to eliminate fringe field crosstalk between adjacent pixels according to an embodiment of the present invention.
Fig. 5 is a voltage-reflectance curve circled in dashed lines in fig. 3 and 4.
The reference numbers in the figures are:
the liquid crystal display panel comprises a polarizing plate 1, a glass substrate 2, a transparent planar common electrode 3, a liquid crystal layer 4, a polymer bump 5, a transparent square pixel electrode 6, an insulating layer 7, a metal diffuse reflection film 8, a monocrystalline silicon substrate 9, an upper substrate 10 and a lower substrate 11.
Detailed Description
In order that those skilled in the art will be able to more fully understand the present invention, a detailed description of the embodiments of the present invention will be given below with reference to the accompanying drawings. It should be noted that the drawings are for illustrative purposes only and are not drawn according to original dimensions.
Fig. 1 is a schematic structural diagram of an LCoS microdisplay with low fringe field crosstalk according to an embodiment of the present invention, where the microdisplay includes an upper substrate 10, a liquid crystal layer 4, and a lower substrate 11. The upper substrate 10 comprises a polaroid 1, a glass substrate 2 and a transparent plane common electrode 3; the lower substrate 11 comprises a polymer bulge 5, a transparent square pixel electrode 6, an insulating layer 7, a metal diffuse reflection film 8 and a monocrystalline silicon substrate 9; the liquid crystal layer 4 adopts positive nematic liquid crystal, when no voltage is applied, the azimuth angle of liquid crystal molecules is set to be 90 degrees, the polar angle is set to be 0 degree, and the included angle between the optical axis direction and the upper substrate polaroid is set to be 0 degree, at the moment, the display presents a good bright state; the transparent plane common electrode 3 and the transparent square pixel electrode 6 are made of transparent conductive material ITO, when one pixel electrode is driven, the director of liquid crystal molecules changes, incident light generates double refraction in a liquid crystal layer, the angle of the incident light changes, the polarization direction of part of emergent light is orthogonal to the polarization axis of a polaroid, and the gray scale of the display changes; the transparent plane common electrode 3 is coated under the glass substrate 2, the transparent square pixel electrode 6 is square, and the gaps between the pixel electrodes are equal; the polymer bumps 5 are filled between the gaps of the transparent square pixel electrodes 6, and when one pixel electrode is driven, the polymer bumps 5 can eliminate crosstalk of a fringe field to an adjacent pixel; the metal diffuse reflection film 8 is made of metal aluminum, the surface of the reflection film is rough, and the metal diffuse reflection film is attached to the monocrystalline silicon substrate 9, so that incident light is reflected and then exits the liquid crystal box.
Fig. 2 is a cross-sectional view of an LCoS microdisplay with low fringe field crosstalk according to an embodiment of the present invention.
The analyzer 1 is set to have a transmission axis of 90 °.
The characteristic parameters of the liquid crystal material used in this example were: the positive nematic liquid crystal material has a refractive index ne＝1.741，no1.517, dielectric coefficient⊥＝5.3，‖At a wavelength λ of 550nm, the maximum birefringence is 0.224, 16.7.
In this example, the liquid crystal layer thickness d is 4 μm, the transparent square pixel electrode width w is 7 μm, the gap g is 1 μm, and the protrusion height h is 1 μm.
Fig. 3 is a reflectivity diagram of an LCoS microdisplay without the introduction of bumps. The horizontal and vertical axes represent the length and width of a single pixel, respectively. As can be seen from fig. 3, when the pixel electrode in the middle is driven, the brightness of the adjacent pixels is affected, as shown by the dotted circle. This shows that there is a lateral electric field generated between the driving pixel electrode and the non-driving pixel electrode adjacent to the driving pixel electrode, and mainly the disturbance of the azimuth angle of the liquid crystal molecules has a bad influence on the optical imaging quality of the microdisplay.
Fig. 4 is a reflectivity diagram of an LCoS microdisplay with special protrusions introduced to eliminate fringe field crosstalk between adjacent pixels according to an embodiment of the present invention. As can be seen from fig. 4, when the pixel electrode in the middle is driven, the brightness above the adjacent pixel electrode is hardly affected, as shown by the dotted circle, which indicates that the polymer protrusion 5 can effectively suppress the deflection of the liquid crystal molecules above the adjacent pixel electrode of the driven pixel electrode, thereby eliminating the crosstalk between the adjacent pixels.
Fig. 5 is a voltage-reflectance curve circled in dashed lines in fig. 3 and 4. When no voltage is applied (i.e. 0V in FIG. 5)rms) LCoS microdisplays incorporating protrusions have low reflectivity because the liquid crystal molecules in their vicinity are not aligned horizontally after rubbing alignment due to the presence of the protrusions. As can be seen from fig. 5, when one of the pixel electrodes is driven, for the LCoS microdisplay structure without the protrusion, the reflectivity of the adjacent pixel changes with the voltage, which illustrates that the driven pixel electrode generates strong interference to the adjacent pixel; for the LCoS micro-display structure with the introduced bulges, the reflectivity of adjacent pixels of the LCoS micro-display structure is hardly changed along with the change of voltage, which shows that the driven pixel electrode hardly interferes with the adjacent pixels of the driven pixel electrode, and the introduced polymer bulges 5 can effectively eliminate the crosstalk between the adjacent pixels.
The above description is only a preferred embodiment of the present invention, but the present invention is not limited to this embodiment. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims.

Claims (2)

1. The LCoS micro-display with low fringe field crosstalk is characterized by comprising an upper substrate, a liquid crystal layer and a lower substrate; the upper substrate and the lower substrate are arranged in parallel, and the liquid crystal layer is made of positive nematic liquid crystal material; the upper substrate comprises a polaroid, a glass substrate and a transparent plane common electrode; the lower substrate comprises a polymer bulge, a transparent square pixel electrode, an insulating layer, a metal diffuse reflection film and a monocrystalline silicon substrate; the polymer bumps are low-dielectric-layer polymers, the transparent square pixel electrodes are made of transparent conductive materials ITO/IZO, and the polymer bumps are filled between the gaps of the transparent square pixel electrodes; the polymer bumps are made of low dielectric layer materials so as to eliminate a transverse electric field between the driving pixel electrode and the non-driving pixel electrode adjacent to the driving pixel electrode, so that liquid crystal molecules in a pixel region without voltage application are not affected by the voltage application of adjacent pixels and do not generate the disturbance of an azimuth angle, and the crosstalk of a fringe field to adjacent pixels is eliminated; the metal diffuse reflection film is made of metal aluminum, the monocrystalline silicon substrate is a monocrystalline silicon substrate with a CMOS integrated circuit, and the metal diffuse reflection film is attached to the monocrystalline silicon substrate.
2. An LCoS microdisplay with low fringe field crosstalk according to claim 1 in which the transparent planar common electrode is coated under a glass substrate, the transparent square pixel electrodes are square and the gaps between pixel electrodes are equal.
CN201910444584.4A 2019-05-27 2019-05-27 LCoS micro-display with low fringe field crosstalk Active CN110221499B (en)

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Publication number Priority date Publication date Assignee Title
CN110568674A (en) * 2019-09-27 2019-12-13 深圳慧新辰技术有限公司 LCOS chip
CN112965308B (en) * 2021-02-04 2022-07-29 豪威半导体（上海）有限责任公司 LCOS structure and forming method thereof
CN113791509A (en) * 2021-08-27 2021-12-14 昆明理工大学 Vertical electrode for inhibiting edge effect of micro-pixel LCOS

Citations (5)

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Publication number Priority date Publication date Assignee Title
CN103081074A (en) * 2010-08-27 2013-05-01 东京毅力科创株式会社 Etching method, substrate processing method, pattern forming method, method for manufacturing semiconductor element, and semiconductor element
CN104965359B (en) * 2015-07-20 2017-12-29 深圳市华星光电技术有限公司 Multiple stability liquid crystal display panel
WO2018142815A1 (en) * 2017-02-02 2018-08-09 住友化学株式会社 Adhesive composition
CN109164651A (en) * 2018-09-30 2019-01-08 上海交通大学 A kind of liquid crystal modulator that can inhibit ripple effect and stray light simultaneously
CN109212843A (en) * 2018-09-30 2019-01-15 北京航空航天大学 A kind of LCoS micro-display based on bilateral IPS electrode structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103081074A (en) * 2010-08-27 2013-05-01 东京毅力科创株式会社 Etching method, substrate processing method, pattern forming method, method for manufacturing semiconductor element, and semiconductor element
CN104965359B (en) * 2015-07-20 2017-12-29 深圳市华星光电技术有限公司 Multiple stability liquid crystal display panel
WO2018142815A1 (en) * 2017-02-02 2018-08-09 住友化学株式会社 Adhesive composition
CN109164651A (en) * 2018-09-30 2019-01-08 上海交通大学 A kind of liquid crystal modulator that can inhibit ripple effect and stray light simultaneously
CN109212843A (en) * 2018-09-30 2019-01-15 北京航空航天大学 A kind of LCoS micro-display based on bilateral IPS electrode structure

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