CN110210791A - A kind of system and prioritization method - Google Patents
A kind of system and prioritization method Download PDFInfo
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- CN110210791A CN110210791A CN201910550895.9A CN201910550895A CN110210791A CN 110210791 A CN110210791 A CN 110210791A CN 201910550895 A CN201910550895 A CN 201910550895A CN 110210791 A CN110210791 A CN 110210791A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B15/00—Systems controlled by a computer
- G05B15/02—Systems controlled by a computer electric
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F9/00—Arrangements for program control, e.g. control units
- G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
- G06F9/44—Arrangements for executing specific programs
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- G—PHYSICS
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- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
- G06Q10/06316—Sequencing of tasks or work
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Abstract
The present invention relates to a kind of system and prioritization methods.The system comprises: have the function of operator control panel, EAP system and the controller of setting and display function；Wherein the setting function is suitable for being arranged the precedence information item of sequence；The display function is suitable for showing the output of the controller.The present invention is capable of the sequence of the better row's of control goods, reduce it is artificial misprint goods, to guarantee deliver goods duration and product index.
Description
Technical field
The present invention relates to semiconductor field, in particular to a kind of system and prioritization method.
Background technique
In the manufacturing of integrated circuit, each wafer from raw material ultimately form product require by hundred or even
Thousands of procedures, all process steps that wafer is passed through constitute process flow.Under normal circumstances, chip is according to pre-set
Process flow, execute each procedure in the equipment of corresponding technique step by step, that is to say, that pre-set work
The content of each procedure in skill process, the content of each procedure further include specific technological parameter, and process flow driving is drawn
It holds up according to pre-set process flow, controls chip and successively execute each procedure.
With the development of semiconductor technology, Semiconductor enterprises all can make semiconductor production using software control system to reach
The maximized purpose of equipment capacity.A series of core of this control system is manufacturing execution system (Manufacturing
Execution System, MES) and EAP system therein (Equipment Automation Programming, EAP).
Manufacturing execution system (MES) is at least with the following functions and feature:
1, entire factory is covered using powerful data capture engine, integral data acquisition channel and manufactures scene, guarantee field data
Real-time, accurate, comprehensive acquisition；
2, when equipment has handled a upper procedure for product, product information of the real-time record product of MES in current site；At equipment
The process for having managed the current website of product, the product information of the lower website of the real-time record product of MES；
3, MES is (to include at least item of information: when name of product, product designation, website code name, Grade numbers, waiting by item of information
Between, product current state etc.) arrangement and corresponding product information in real time, comprehensively and accurately monitor to all products.
EAP system is at least with the following functions and feature:
1, it is integrated with MES system, automatic Verification production information does account automatically.
2, EAP system encapsulates the communication between equipment, supports multiple kinds in advance, has good extension
Property.
In the manufacturing process flow of semiconductor, product is divided into two kinds: handling the product of (processing of artificial or equipment)
With etc. product (product to be processed) to be processed.Row's goods, which refers to, presets processing order to product to be processed.And it determines wait locate
There are many item of information for managing product priority, include name of product, product designation, website code name, Grade numbers, waiting time etc.
Deng.Under normal circumstances, the product to be processed of the first priority (i.e. priority is high) needs to handle at first, preferential followed by second
Grade (i.e. preferential level is high) needs to handle, and finally handles the product to be processed of third priority (i.e. priority is low).Otherwise,
It will affect the delivery duration of product, or cause the other indexs of product unqualified, cause damages.
Existing way is that operator logs in MES system or report, manually checks product information according to item of information, presses
It is successively manually sorted to product to be processed according to the precedence information item of superior instructions, arranges to handle further according to ranking results
Sequentially.But the time that this artificial row's goods expends is long, increases the probability of maloperation, is easy to miss the production for needing priority processing
Product reduce accuracy and efficiency, influence product delivery duration and product index.
Summary of the invention
The purpose of technical solution of the present invention be in order to solve the above-mentioned technical problem and a kind of system and the priority row that design
Sequence method.
In order to achieve the goal above, technical solution of the present invention provides a kind of system, it is suitable for obtaining product information, treats place
Reason product is ranked up, output ranking results to operator control panel, which includes: to have the function of the operation of setting and display function
Screen, EAP system and controller；Wherein the setting function is suitable for being arranged the precedence information item of sequence；The display function is suitable
In the output for showing the controller.
Optionally, after the precedence information item of the setting of the operator control panel is confirmed, the controller, which is suitable for removing, to be deposited
The upper setting value being stored in the controller, the current setpoint value that the operator control panel is written store in the controller.
Optionally, in MES system refresh data, the EAP system is suitable for removing the upper of storage from the controller
The current all product informations recorded in MES system are written in the controller and are stored by one product information.
Optionally, the controller is suitable for removing in the controller at the end of product information is written in the EAP system
A upper ranking results, the product information to be processed of write-in is arranged according to the priority setting value stored in the controller
Sequence；Export ranking results.
Optionally, the controller is integrated in the EAP system；The operator control panel is integrated in equipment.
In order to achieve the goal above, technical solution of the present invention provides a kind of prioritization method, comprising:
If the information product information to be handled being written from MES system, reads the product information to be processed, sets according to priority
It sets value to sort to the product information to be processed, exports ranking results.
The beneficial effect of technical solution of the present invention includes at least:
The operator control panel that technical solution of the present invention provides has interactive capability, can be by the precedence information of product treatment to be processed
Item writing controller ensure that supervisory priority instruction is able to strict implement.
Technical solution of the present invention utilizes the interaction capabilities of EAP system and MES system, and current production information is written and is controlled
Device, make acquisition product information more rapidly, it is comprehensive and accurate.
Technical solution of the present invention carries out unified planning sequence to product to be processed according to setting value, and further goods is arranged in control
Accuracy improves production efficiency.
The operator control panel that technical solution of the present invention provides shows ranking results, so that operator arranges according to display result
Goods, reduces the probability of maloperation, and then ensure that delivery duration and product index.
Detailed description of the invention
Fig. 1 is the system structure diagram that a kind of and MES system that technical solution of the present invention provides interacts；
Fig. 2 is a kind of structural schematic diagram for system that technical solution of the present invention provides；
Fig. 3 is the structural schematic diagram for another system that technical solution of the present invention provides；
Fig. 4 is the structural schematic diagram for another system that technical solution of the present invention provides；
Fig. 5 is a kind of flow diagram for prioritization method that technical solution of the present invention provides；
Fig. 6 is the flow diagram for another prioritization method that technical solution of the present invention provides；
Fig. 7 is the flow diagram for another prioritization method that technical solution of the present invention provides.
Specific embodiment 1
In order to keep the purpose of the present invention, feature and effect more obvious and easy to understand, with reference to the accompanying drawing to of the invention specific
Embodiment elaborates.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, but the present invention can be with
Implemented using other than the one described here mode, therefore the present invention is not limited by the specific embodiments disclosed below.
Wafer load is in wafer cassette, and according to pre-set process flow, the equipment for passing sequentially through corresponding technique is held
The each procedure of row.MES system has recorded current all product (i.e. wafer) information in real time, the product letter recorded in MES system
Breath be according to item of information (be not limited to following item of information: name of product, product designation, website code name, Grade numbers, the waiting time,
Product current state etc.) arranged, each item of information has corresponded to the particular content of product, i.e. product information.
As shown in Figure 1, being a kind of system interacted with MES system described in the present embodiment, comprising: have the function of setting
With the operator control panel 10, EAP system 12 and controller 11 of display function；Wherein the setting function of the operator control panel 10 is suitable for setting row
The precedence information item of sequence；The display function of the operator control panel 10 is suitable for showing the output of the controller 11.
After the precedence information item that operator control panel 10 is arranged is confirmed, controller 11 reads and stores the setting value.Control
Device 11 establishes data connection by EAP system 12 and MES system 13, when EAP system 12 has information writing controller 11, control
Device 11 stores the information that EAP system 12 is written.Controller 11 has ranking function, when the information for detecting that EAP system 12 is written
When comprising product information to be processed, controller 11 reads the product information to be processed and according to the setting value stored in controller 11
It is ranked up, and ranking results is output to operator control panel 10 and are shown.
Based on above system, the application provides firstly a kind of system 1, as shown in Figure 2, comprising: have the function of setting and
Operator control panel 20, EAP system 22 and the controller 21 of display function；The wherein precedence information of the settable sequence of the operator control panel 20
, it can show the output of the controller 21.
The precedence information item of the settable sequence of operator control panel 20:
Specifically, precedence information item is the foundation being ranked up to product to be processed, the first precedence information item, can be divided into
Two precedence information items and third priority item of information.When sequence, first, in accordance with parameter corresponding to the first precedence information item,
Product to be processed is ranked up；Secondly according to parameter corresponding to the second precedence information item, to product to be processed into
Row sequence；Finally according to parameter corresponding to third priority item of information, product to be processed is ranked up.
The precedence information item of above-mentioned input can be any item of information recorded in MES system, the priority letter of selection
Cease item can be all different with three, can also part it is identical, can be all the same with three.
The precedence information item of above-mentioned input can only select one or two priority to input, non-selected input
Priority is recorded as null value when controller 21 is read, and is Stochastic Conditions when executing sequence.For example, the first priority, second
Priority, third priority select respectively: item of information A, non-selected, item of information B, then the correspondence recorded when controller 21 is read
Setting value is respectively as follows: A, null value, B, when controller 21 is executed and sorted, first sorts by the first priority A, then randomly ordered, most
It sorts afterwards by third priority B.Other situations, and so on.
The precedence information item of above-mentioned input, when by confirmation (pressing acknowledgement key), the removing of controller 21 is stored in interior
A upper priority setting value, and read current setpoint value and be stored in controller 21, for being read when sequence.
Alternatively, it is also possible to not input priority item of information, at this point, the setting value that controller 21 is read is null value or is storage
A upper setting value.When the setting value that controller 21 is read is null value, if controller 21 sorts, random sequence knot is exported
Fruit.
Operator control panel 20 can display controller 21 output:
Specifically, controller 21 to EAP system 22 be written information judge, no product to be processed for sequence when do not sort,
Controller 21 resets a upper display for operator control panel 20 at this time, but retains and export a upper item of information for selecting when priority input
It selects.
Judge specifically, information is written to EAP system 22 in controller 21, when product to be handled is for sequence,
Sequence finishes, and trigger controller 21 resets a upper display for operator control panel 20, and ranking results are exported.
Controller 21 is based on EAP system 22 and MES system establishes connection:
Specifically, EAP system 22 is removed upper one stored in controller 21 and is produced when EAP system 22 detects that MES system has refreshing
Product information, for storing current production information, EAP system 22 reads current all product informations from MES system and control is written
It is stored in device.
It should be noted that EAP system 22 is read from MES system and the information of writing controller 21, it is on production line
All product informations, if so, then including: the product information (artificial treatment or equipment processing) and product to be processed letter handled
Breath.
When the write-in of EAP system 22 is from the end of message that MES system is read, 21 pairs of trigger controller product informations being written
Judged:
Specifically, if the information of write-in without product information to be processed, or without any product information, then the not row of execution of controller 21
Sequence process, and controller 21 resets a upper display for a upper ranking results and operator control panel 20, but retains and export the last time
Item of information to operator control panel 20 show, for input priority.
Specifically, if the information product information to be handled of write-in, controller 21 resets a upper ranking results, and control
Device 21 reads the product information to be processed that EAP system 22 is written and is stored in the priority setting value of controller 21, to product into
Row sequence.Model sequencing finishes, and trigger controller 21 resets a upper display for operator control panel 20, and exports ranking results to operation
20 display of screen.
It should be noted that the above-mentioned sequence to product, also includes: controller 21 judges, when the information of write-in contains only one
When a product information to be processed, it can directly export the product information and be shown to operator control panel 20, it is defeated after can also sorting by setting value
It shows out.
The above-mentioned sequence to product also includes: when priority setting value of the controller 21 without reading is for sequence, control
Device 21 is randomly ordered to product information to be processed.
Based on system 1, controller 21 can also be integrated in EAP system 22, constitute system 2 as shown in Figure 3.
Based on system 2, operator control panel 20 can also be integrated in equipment, constitute system 3 as shown in Figure 4.
Based on above system, present invention also provides a kind of prioritization methods, as shown in figure 5, comprising:
Step S10, button operation select the first priority, the second priority, third priority item of information respectively, and controller is sentenced
It is disconnected whether to confirm by acknowledgement key, if executing step S11.
Step S11, controller remove the priority setting value of a upper storage, read and store the current setting of operator control panel
Value.
It should be noted that the above-mentioned input mode of the application, makes the priority for arranging goods instruction be able to accurate recording, instructs
Obtain strict implement.
Based on above system, present invention also provides a kind of prioritization methods, as shown in fig. 6, comprising:
Step S20, when MES system refresh, EAP system removes the upper product information stored in controller, and from MES
System reads in current all product information writing controllers and stores, and controller judges whether product to be handled, if holding
Row step S21 executes step S22 and S24 if not.
Step S21, controller reset a upper ranking results, and controller reads the product to be processed letter of EAP system write-in
The priority setting value for ceasing and being stored in controller, is ranked up product, if the setting value without reading, randomly ordered.If
Controller sequence terminates, and thens follow the steps S23 and S24.
Step S22, controller do not sort, and controller resets a upper ranking results, and controller is shown upper the one of operator control panel
Show clearing, retains and export a upper item of information.
Step S23, if the controller finishes model sequencing, the controller is clear by a upper display for the operator control panel
Zero, the controller exports ranking results.
Step S24, the output of operator control panel display controller.
In step S22, priority is arranged for operator control panel in the item of information for retaining output.In step S24, operator control panel display control
The output of device may include the ranking results for having item of information, can also only include item of information.
Based on above system, present invention also provides a kind of prioritization methods, as shown in fig. 7, comprising:
Step S30, what the product information and being stored in that controller reads the write-in of EAP system inputted in the operator control panel in controller sets
Value is set, product is ranked up according to setting value, it is randomly ordered if without priority setting value.Controller compares the first priority
It is whether identical, if so then execute step S31, S32 is thened follow the steps if not.
Step S31, the identical product of the first priority, continues by the second priority ranking.It is preferential that controller compares second
Whether grade is identical, if so then execute step S33, thens follow the steps S34 if not.
Step S32, the different product of the first priority press the first priority ranking.
Step S33, the first priority and all identical product of the second priority, continue to sort by third priority.Control
Whether device compares third priority identical, if so then execute step S35, thens follow the steps S36 if not.
Step S34, the product that the first priority is identical and the second priority is different, on the basis of the first priority ranking
On, then press the second priority ranking
Step S35, the first priority, the second priority and third priority are all identical, randomly ordered
Step S36, the first priority and the second priority are all identical, and the product that third priority is different, in the first priority
On the basis of the second priority ranking, continue to sort by third priority
In step S30, the setting value inputted in the operator control panel being stored in controller that controller is read can have setting value,
It can be without setting value.When arbitrary priority is without input, the setting value that controller is read is null value, when sequence by null value press with
Machine executes.
First system and the concrete application process of prioritization method are as follows:
Controller has the first module, the second module and third module, and when MES refresh, EAP system removes the first module
A upper product information for middle storage reads current all product informations from MES system, and the first module is written by EAP system
Middle storage, if the second module judges to contain product information to be handled in the first module, the second module reads in the first module and stores
Product information and third module to be processed in the priority setting value that stores, product information to be processed is ranked up, and will
As a result operator control panel is output to show, and after input of the third module in operator control panel is confirmed, it is stored in removing third module
A upper setting value, and current setpoint value storage is read, for the reading of the second module.
Operator control panel suitable for the application example includes key 1, key 2, key 3, key 4, key 5, key 6.Key 1
Suitable for recycling the item of information of selection product, and using the item of information currently selected as the first priority, key 2 is suitable for circulation choosing
The item of information of product is selected, and using the item of information currently selected as the second priority, key 3 is suitable for recycling the letter of selection product
Item is ceased, and using the item of information currently selected as third priority, and key 4 is acknowledgement key, it can be to the priority currently set
Confirmed, triggering third module removes a upper setting value and reads current setpoint value storage and presses for the reading of the second module
Key 5 and key 6 are suitable for carrying out page turn over operation to the display information of the operator control panel.
Although the invention has been described by way of example and in terms of the preferred embodiments, but it is not for limiting the present invention, any this field
Technical staff without departing from the spirit and scope of the present invention, may be by the methods and technical content of the disclosure above to this hair
Bright technical solution makes possible variation and modification, therefore, anything that does not depart from the technical scheme of the invention, and according to the present invention
Technical spirit any simple modifications, equivalents, and modifications to the above embodiments, belong to technical solution of the present invention
Protection scope.
Claims (10)
1. a kind of system is suitable for obtaining product information, be ranked up to product to be processed, output ranking results to operator control panel,
It is characterized in that, comprising: have the function of operator control panel, EAP system and the controller of setting and display function；The wherein setting function
Suitable for the precedence information item of sequence is arranged；The display function is suitable for showing the output of the controller.
2. the system as claimed in claim 1, which is characterized in that confirmed in the precedence information item of the setting of the operator control panel
Afterwards, the controller is suitable for removing the upper setting value being stored in the controller, and the current setting of the operator control panel is written
It is worth and is stored in the controller.
3. the system as claimed in claim 1, which is characterized in that in MES system refresh data, the EAP system be suitable for from
Institute is written in the current all product informations recorded in MES system by the upper product information that storage is removed in the controller
It states in controller and stores.
4. the system as claimed in claim 1, which is characterized in that the controller is suitable in EAP system write-in product letter
At the end of breath, the upper ranking results in the controller are removed, to the product information to be processed of write-in according to the controller
The priority setting value of middle storage is ranked up；Export ranking results.
5. the system as claimed in claim 1, which is characterized in that the controller is integrated in the EAP system；The operator control panel
It is integrated in equipment.
6. a kind of prioritization method characterized by comprising
If the information product information to be handled being written from MES system, reads the product information to be processed, sets according to priority
It sets value to sort to the product information to be processed, exports ranking results.
7. method as claimed in claim 6, which is characterized in that the information of write-in at least has a product information to be processed.
8. method as claimed in claim 6, which is characterized in that it is described from MES system be written information include:
In MES system refresh, EAP system removes the upper product information in writing controller, Xiang Suoshu controller
The product information of MES system is written.
9. method as claimed in claim 6, which is characterized in that further include:
If judging, the information being written from MES system has product information to be processed, a upper ranking results is removed, according to priority
Setting value sorts to the product information to be processed.
10. method as claimed in claim 6, which is characterized in that the priority setting value includes:
If the precedence information item being arranged in the operator control panel is confirmed, the priority setting value of a upper storage is removed, storage is worked as
Preceding setting value for sequence when read.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910550895.9A CN110210791A (en) | 2019-06-24 | 2019-06-24 | A kind of system and prioritization method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910550895.9A CN110210791A (en) | 2019-06-24 | 2019-06-24 | A kind of system and prioritization method |
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| CN110210791A true CN110210791A (en) | 2019-09-06 |
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| CN201910550895.9A Withdrawn CN110210791A (en) | 2019-06-24 | 2019-06-24 | A kind of system and prioritization method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104423331A (en) * | 2013-08-20 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | Wafer fabrication scheduling method and wafer fabrication scheduling system for semiconductor integrated circuit production |
| CN106600446A (en) * | 2016-11-07 | 2017-04-26 | 中国科学院自动化研究所 | Dynamic-priority-based real-time processing system and method of product field event |
| CN109118170A (en) * | 2018-07-30 | 2019-01-01 | 万翼科技有限公司 | Display methods, device and the computer readable storage medium of house property maintenance task |
| CN109754133A (en) * | 2017-11-02 | 2019-05-14 | 华润微电子（重庆）有限公司 | Semiconductor processing equipment and row's pallet piling up method and system in each area FAB |
-
2019
- 2019-06-24 CN CN201910550895.9A patent/CN110210791A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104423331A (en) * | 2013-08-20 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | Wafer fabrication scheduling method and wafer fabrication scheduling system for semiconductor integrated circuit production |
| CN106600446A (en) * | 2016-11-07 | 2017-04-26 | 中国科学院自动化研究所 | Dynamic-priority-based real-time processing system and method of product field event |
| CN109754133A (en) * | 2017-11-02 | 2019-05-14 | 华润微电子（重庆）有限公司 | Semiconductor processing equipment and row's pallet piling up method and system in each area FAB |
| CN109118170A (en) * | 2018-07-30 | 2019-01-01 | 万翼科技有限公司 | Display methods, device and the computer readable storage medium of house property maintenance task |
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Application publication date: 20190906 |