CN110196546A - Nonreciprocity asymmetric transmission wavefront modification method based on the super clever surface of multilayer - Google Patents

Nonreciprocity asymmetric transmission wavefront modification method based on the super clever surface of multilayer Download PDF

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CN110196546A
CN110196546A CN201910357416.1A CN201910357416A CN110196546A CN 110196546 A CN110196546 A CN 110196546A CN 201910357416 A CN201910357416 A CN 201910357416A CN 110196546 A CN110196546 A CN 110196546A
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antenna
multilayer
nonreciprocity
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metal
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CN110196546B (en
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黄玲玲
魏群烁
王涌天
丹尼尔弗里斯
托马斯赞特格拉夫
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Beijing Institute of Technology BIT
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22Processes or apparatus for obtaining an optical image from holograms

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Abstract

Nonreciprocity asymmetric transmission wavefront modification method disclosed by the invention based on the super clever surface of multilayer belongs to micronano optical, holographic display, polarization optics applied technical field.Using cascade metal L shape nano-antenna and metal coupling pole sub-antenna as basic structural unit, the spatial symmetry on light wave propagation direction is broken, the phase-modulation of gamut is realized while obtaining nonreciprocal asymmetric transmission characteristic, the corresponding phase information of computer-generated hologram can be encoded in the super clever surface optical system, it be observed reproduction image can only in specific polarization state and the corresponding encrypted tunnel of incident direction, realize the polarization encryption of nonreciprocity asymmetric transmission.Accordingly, it can be achieved that the polarization to image encrypts, it is applied to holographic display, the fields such as information encryption.Holographic display methods the present invention provides a kind of sub-wavelength pixel of infrared band, with nonreciprocity asymmetric nature, encryption can be polarized.

Description

Nonreciprocity asymmetric transmission wavefront modification method based on the super clever surface of multilayer
Technical field
The present invention relates to a kind of wavefront modification methods of nonreciprocity more particularly to a kind of based on the non-of the super clever surface of multilayer Reciprocity asymmetric transmission wavefront modification method belongs to micronano optical, holographic display, polarization optics applied technical field.
Background technique
Super clever surface is usually the metal or medium nano-antenna by the period of sub-wavelength dimensions, paracycle or random alignment Array is constituted, and wavefront regulatory mechanism is not relying on the communication process of light, but well-designed each cellular construction, right using its The strong response of incident field changes the amplitude and phase of local light field, with sub-wavelength dimensions to the amplitude of light field and phase into The modulation of row high-resolution, and then realize the regulation near field and far field, generate special optical effect.Therefore, super clever surface exists With high freedom degree when cutting and regulating and controlling optical characteristics, stored in data, information processing, beam shaping, micro-nano is holographic, partially The fields such as vibration control all have very big potentiality.Wherein, principle of holography is combined with super clever surface, complicated in hologram Amplitude and phase distribution are a forward position focus fields with the micro-nano holography that the sub-wavelength structure of two dimension arrangement is encoded, should Technology can promote the micromation of holographic element, increase information capacity, eliminate high order diffraction level, increase field angle etc..In order to The excellent wavefront ability of regulation and control for making full use of super clever surface to have and high design freedom, various different geometries and The super clever atom of material is devised as the basic component units on super clever surface, and realizes holographic display based on super clever surface All kinds of schemes, such as palarization multiplexing hologram, pure reflection hologram, vector holographic show and also proposed successively.On the other hand, Since super clever surface has strong this important feature of light-matter interaction, and can be by appropriately designed each to different Property the super clever atom of resonance or nano-antenna introduce strong birefringent phenomenon so that its also have in polarization optics it is wide Prospect.
However, asymmetry of the super clever surface on light wave propagation direction is lower, usually as a kind of two-dimension plane structure Reciprocity theorem is followed, is often identical as forward direction backwards to transmissivity when propagating in super clever surface optical system therefore 's.Destroy symmetry along the direction of propagation be for many photonic devices in communication system it is essential, for Protecting laser system, other many fields are also extremely important from destruction of back-reflection etc..Traditional non-reciprocal device, i.e., Optical isolator is to be worked using Magnetized Material based on Faraday effect, but in modern integrated optics, this A little Magnetized Materials receive obstruction due to its excessive size.In recent years, specific in order to improve polarization conversion efficiency or realization Asymmetric transmission characteristic under polarization state, the super clever surface system of the cascade of multilayer be proposed out ([1] Ji R, Wang S W, Liu X,et al.Giant and broadband circular asymmetric transmission based on two cascading polarization conversion cavities[J].Nanoscale,2016,8(15):8189-8194. [2]Zhao Y,Belkin M A,Alù A.Twisted optical metamaterials for planarized ultrathin broadband circular polarizers[J].Nature communications,2012,3:870. [3]Pfeiffer C,Zhang C,Ray V,et al.High performance bianisotropic metasurfaces:asymmetric transmission of light[J].Physical review letters, 2014,113(2):023902.).But a kind of unique basic component units are usually used only in the reported super clever surface of multilayer, Entire super clever surface is covered by periodically repeating to arrange this basic component units;Or only consider polarization conversion efficiency And the raising of asymmetric transmission performance, it is indifferent to the phase-modulation situation of outgoing light wave.This makes the super clever surface of these multilayers It is only able to achieve the asymmetric transmission of transmitance, reflectivity or absorptivity, but required phase distribution can not be modulated simultaneously, significantly Limit the actual application prospect on the super clever surface of these multilayers.Currently, almost without the phase about nonreciprocity asymmetric transmission The research of position modulation.
Summary of the invention
The present invention provides a kind of nonreciprocity asymmetric transmission wavefront modification method based on the super clever surface of multilayer, this method The spatial symmetry on light wave propagation direction can be broken, it is special that different wavefront regulations is shown in positive and propagation backwards Property, and while obtaining nonreciprocity asymmetric transmission characteristic realize gamut phase-modulation.Hologram is encoded to institute In the super clever surface of the multilayer stated, then the reproduction image of hologram can only be in specific polarization encrypted tunnel corresponding with transmission direction It observes, can be realized the holographic display of the polarization encryption of nonreciprocity asymmetric transmission.
The purpose of the present invention is what is be achieved through the following technical solutions:
In order to break the spatial symmetry on light wave propagation direction, show optical system in positive and propagation backwards Different wavefront modulating properties, it is necessary first to choose suitable super clever atom to form the super clever surface of multilayer.It is disclosed by the invention Modulator approach before nonreciprocity asymmetrical wave based on the super clever surface of multilayer, by super clever surface holography and nonreciprocity light propagation Concept establish metal L shape nano-antenna and metal coupling pole sub-antenna structure basis on.Hereafter, extensive by phase The calculating of double calculation method is resulting, and computer-generated hologram corresponding to target image is encoded into each picture on the super clever surface of multilayer In element, phase-modulation is realized by double-level-metal L shape nano-antenna-coupling pole sub-antenna of different shape size.Channel of polarization Cascade that is selective then being attributed to metal coupling pole sub-antenna.Finally, using layer-by-layer preparation process, i.e. the electron beam lithography of gradation The super clever surface of cascade multilayer is processed with stripping technology, is led between metal L shape nano-antenna and metal coupling pole sub-antenna Overheat vapor deposition layer of silicon dioxide wall, and the alignment based on global mark and write-in field mark etc. not isolabeling Cheng Shixian is more accurately aligned.
The super clever surface of multilayer can be realized nonreciprocity asymmetric transmission, including basal layer, metal are coupled extremely sub- day Line layer, wall and metal nano antenna stack;The metal coupling pole sub-antenna layer array arrangement is on the base layer;It is spaced stratification It is coupled between pole sub-antenna layer and metal nano antenna stack in metal;The shape and size of the metal nano antenna stack, can The phase distribution according to needed for hologram is selected;
The coupling pole sub-antenna and a metal nano antenna constitute basic component units;
The metal nano antenna is L shape metal nano antenna;
Using the method that the super clever surface of above-mentioned multilayer carries out wavefront modification: by adjusting the metal on the super clever surface of the multilayer The shape and size of nano-antenna, the nondiagonal element of the transmission matrix of basic component units where can be realized metal nano antenna Modulation, and then realize cross-polarization transmission channel 0 to 2 π all phase modulation range.According to the phase distribution of hologram, The shape and size of all metal nano antennas are determined one by one, the phase information of hologram can be encoded in the multilayer and surpassed Clever surface;Making the reproduction image of hologram can only observe in specific polarization encrypted tunnel corresponding with transmission direction, realize The holographic display of the polarization encryption of nonreciprocity asymmetric transmission.
The phase distribution of the hologram is obtained by Phase Retrieve Algorithm;
The corresponding relationship of the phase distribution of the shape and size and hologram of the L shape metal nano antenna passes through tight Lattice Coupled Wave Analysis method (RCWA) or Finite-Difference Time-Domain Method (FDTD) determine;
The method for preparing the super clever surface of the multilayer: metal is coupled by pole sub-antenna using electron beam lithography and stripping technology It is worked on basal layer;The depositing spacer on metal coupling pole sub-antenna;Use electron beam lithography and stripping technology will again Metal nano antenna is worked on wall, need to guarantee the positional relationship of metal coupling pole sub-antenna and metal nano antenna;
The utility model has the advantages that
1, the nonreciprocity asymmetric transmission wavefront modification method disclosed by the invention based on the super clever surface of multilayer, uses grade Metal L shape nano-antenna and metal the coupling pole sub-antenna of connection have been broken on light wave propagation direction as basic structural unit Spatial symmetry obtains nonreciprocity not available for the super clever surface of single layer, and optical system can be made in forward direction and backwards to biography Sowing time shows different the Wavefront Modulation Characteristics according to different orthogonal polarized channels.
2, the nonreciprocity asymmetric transmission wavefront modification method disclosed by the invention based on the super clever surface of multilayer, Neng Goutong The size of adjustment metal L shape nano-antenna is crossed to realize all phase modulation of 0 to 2 π, therefore can be used in encoded holographic figure.By institute The hologram of coding is combined with the nonreciprocity asymmetric transmission characteristic on the super clever surface of the cascade multilayer, makes reproduction image can only be It is observed in specific polarization state and the corresponding encrypted tunnel of incident direction, can realize and be combined with the direction of propagation Polarization encrypts holographic display function, can be applied to holographic display, the fields such as information encryption.
3, in the nonreciprocity asymmetric transmission wavefront modification method disclosed by the invention based on the super clever surface of multilayer, by not The double-level-metal L shape nano-antenna of similar shape size-coupling pole sub-antenna realizes phase regulation.The selectivity of channel of polarization is then returned Because in the cascade of metal coupling pole sub-antenna.Two kinds of structures and respective function are relatively independent, therefore in process The alignment error tolerance of layer-by-layer preparation process is higher.
Detailed description of the invention
Fig. 1 is the stream of the nonreciprocity asymmetric transmission wavefront modification method disclosed by the invention based on the super clever surface of multilayer Cheng Tu;
Fig. 2 is the nonreciprocity asymmetric transmission polarization encryption wavefront modification disclosed by the invention based on the super clever surface of multilayer The working method schematic diagram of method;The incident linear polarization for scheming vertical direction when (a) is forward-propagating is converted into horizontal direction and goes out The wavefront modulating properties of the cross-polarization transmission channel of ray polarization state;Scheming (b) is the incident ray backwards to vertical direction when propagating Polarization state is converted into the wavefront modulating properties of the cross-polarization transmission channel of horizontal direction outgoing linear polarization;
Fig. 3 is that metal L shape nano-antenna selected by the super clever surface of multilayer disclosed by the invention and metal are coupled extremely sub- day The electron scanning micrograph for the sample that the geomery ratio schematic diagram and embodiment of line are processed;Scheming (a) is metal It is coupled the geomery ratio schematic diagram of pole sub-antenna;Scheming (b) is the electron scanning micrograph that metal is coupled pole sub-antenna; Scheme the geomery ratio schematic diagram that (c) is metal L shape nano-antenna;It is aobvious to scheme the scanning electron that (d) is metal L shape nano-antenna Micro mirror photo;Scheme the geomery ratio schematic diagram for the basic component units that (e) is the super clever surface of multilayer;It is super for multilayer to scheme (f) The electron scanning micrograph of the basic component units on clever surface;
Fig. 4 is 8 kinds of different basic component units selected by the super clever surface of multilayer disclosed by the invention for each inclined The amplitude and phase-modulation effect of vibration channel;Figure (a) is that the phase-modulation effect of each polarization channels is;It is each inclined for scheming (b) The amplitude modulation effect of vibration channel;
Fig. 5 is the hologram of experimental provision and the super clever surface actual reproduction of multilayer disclosed by the invention used in embodiment Picture;Scheming (a) is experimental provision schematic diagram used in embodiment;Scheme the reality that (b) is used the super clever surface of multilayer by embodiment The hologram image of reproduction.
Specific embodiment
Objects and advantages in order to better illustrate the present invention with reference to the accompanying drawing do further summary of the invention with example Explanation.
Embodiment 1
Nonreciprocity asymmetric transmission polarization encryption wavefront modification method based on the super clever surface of multilayer.
As shown in Figure 1, the present embodiment includes the following steps:
Step 1: two kinds of pole sub-antenna are coupled using metal L shape nano-antenna and metal and is respectively provided with different function not The super clever surface of cascade multilayer is collectively constituted with micro-nano structure, combines both the space symmetr introduced on optical propagation direction The destruction of property, to introduce nonreciprocity.It is disclosed by the invention non-mutual based on the super clever surface of multilayer as shown in Fig. 2 (a), (b) Easy property asymmetric transmission wavefront modification method can be such that incident light passes in positive and propagation backwards for same group of cross-polarization Defeated channel shows different wavefront modulating properties, to realize the asymmetric transmission of nonreciprocity.
The nonreciprocity function on the super clever surface of multilayer disclosed by the invention can be illustrated by way of Jones matrix. One layer of top is made of metal L shape nano-antenna in cascade two layers super clever surface, these metals L shape nano-antenna can incite somebody to action Incident ray polarized light is converted into the two parts being in incident light with polarization state and orthogonal polarisation state.Therefore, when positive transmission, gold Belong to the transmission matrix of L shape nano-antennaIt will include simultaneously diagonal element and nondiagonal element, and can be write as the form of formula (1):
Nondiagonal element in the transmission matrixWithThe orthogonal of metal L shape nano-antenna is described when being forward-propagating The complex transmission coefficient of optical rotation rate.The incident ray polarized light of vertical direction is converted into horizontal direction when corresponding positive transmission It is emitted the conversion ratio of linearly polarized light,The incident ray polarized light of horizontal direction is converted into vertical direction and goes out when then for positive transmission The conversion ratio of ray polarised light.Diagonal elementWithMetal L shape nano-antenna is horizontal and vertical inclined when being then forward-propagating The respective complex transmission coefficient of polarization state.Meanwhile considering transmission when with according to forward-propagating backwards to the coordinate transform occurred when propagating Matrix writes out transmission matrix of metal L shape nano-antenna when backwards to transmittingAs shown in formula (2):
Nondiagonal element in the transmission matrixWithIt is metal L shape nano-antenna is described when propagating backwards orthogonal The complex transmission coefficient of optical rotation rate.The corresponding incident ray polarized light backwards to vertical direction when transmitting is converted into horizontal direction It is emitted the conversion ratio of linearly polarized light,Then for backwards to transmit when horizontal direction incident ray polarized light be converted into vertical direction and go out The conversion ratio of ray polarised light.Diagonal elementWithMetal L shape nano-antenna is horizontal and vertical inclined when then for backwards to propagation The respective complex transmission coefficient of polarization state.It the case where by formula (2) it is found that when compared to forward direction transmission, is received backwards to metal L shape when transmitting The diagonal element of rice antenna transmission matrix remains unchanged, and sign modification also only has occurred in nondiagonal element.As it can be seen that the super clever table of single layer Face usually has symmetry on optical propagation direction, cannot achieve the asymmetric transmission of linearly polarized light.It therefore, need to be in metal L shape Addition second layer metal coupling pole sub-antenna constitutes the super clever surface system of multilayer below nano-antenna, destroys on optical propagation direction Symmetry is to realize optics nonreciprocity.If ignoring the absorption loss of material, this metal is coupled the super clever superficial layer of pole sub-antenna Play a part of polarizer, the linearly polarized light of vertical direction can be reflected ideally, transmit the linear polarization of horizontal direction Light.Therefore, transmission matrixIt can be written as the form of formula (3):
Nondiagonal element in the transmission matrixWithThe orthogonal of metal coupling pole sub-antenna is described when being forward-propagating The complex transmission coefficient of optical rotation rate.The incident ray polarized light of vertical direction is converted into horizontal direction when corresponding positive transmission It is emitted the conversion ratio of linearly polarized light,The incident ray polarized light of horizontal direction is converted into vertical direction and goes out when then for positive transmission The conversion ratio of ray polarised light.Diagonal elementWithMetal is coupled the horizontal and vertical of pole sub-antenna when being then forward-propagating The respective complex transmission coefficient of polarization state.
According to the computing rule of Jones matrix, total transmission matrix that entire multilayer cascades super clever surface system can pass through letter Single matrix multiplication is calculated, and the sequence of matrix multiplication is determined by the transmission direction of light in calculating process, is become from forward entrance When for backwards to incidence, the sequence of matrix multiplication can change.The multilayer cascades super clever surface and vertical direction is utilized Incident linear polarization | V>be converted into horizontal direction outgoing linear polarization<H | cross-polarization transmission channel.In the ideal case, Super clever surface system cascaded for above-mentioned multilayer, the total transmittance such as formula (4) when the cross-polarization transmission channel forward-propagating It is shown:
Analogy is it is found that the cross-polarization transmission channel is shown backwards to the total transmittance such as formula (5) when propagating:
By formula (5), it can be seen that encountering gold again when the linearly polarized light of vertical direction is first irradiated to metal L shape nano-antenna When belonging to coupling pole sub-antenna, i.e. positive transmission, the transmissivity of selected orthogonal polarized channels is by metal L shape nano-antenna pair Answer the nondiagonal element transmission coefficient of Jones matrixIt determines.But as shown in formula (6), if the super clever surface of the multilayer System is reversed, then the linearly polarized light of vertical direction is first irradiated to metal coupling pole sub-antenna, i.e., when transmitting backwards, vertical direction Linearly polarized light can by metal be coupled pole sub-antenna stop, ideally transmissivity be 0.
Meanwhile changing target orthogonal polarized channels by the way that incoming polarization state and target polarization state to be rotated by 90 ° simultaneously, i.e., Be changed to the incident linear polarization using horizontal direction | H>be converted into vertical direction outgoing linear polarization<V | cross-polarization transmit After channel, total transmittance such as formula (6) and formula (7) when the super clever surface system forward direction of multilayer proposed by the present invention and back-propagating It is shown:
<V|tII·tL| H >=0 (6)
In conclusion the nonreciprocity asymmetric transmission wavefront modification side disclosed by the invention based on the super clever surface of multilayer Method chooses metal L shape nano-antenna and metal coupling pole sub-antenna as basic component units, passes through the super clever table of cascade multilayer Plane system has broken the spatial symmetry on light wave propagation direction, makes incident light in positive and propagation backwards for same orthogonal Polarisation transfer channel shows different wavefront modulating properties, to realize the asymmetric transmission of nonreciprocity.
Step 2: being proposed in step 1, the multilayer being made of metal L shape nano-antenna and metal coupling pole sub-antenna On the basis of the super clever surface of plasma, by adjusting the shape of metal L shape nano-antenna in each basic component units and several The nondiagonal element of its transmission matrix of what size modulation realizes that, for cross-polarization transmission channel, all phase of 0 to 2 π modulates model It encloses, so as to will be by the phase distribution information coding of the counted hologram of Phase Retrieve Algorithm in the super clever surface system of above-mentioned multilayer On, it observe it can only in specific polarization encrypted tunnel corresponding with direction, realize nonreciprocity asymmetric transmission Polarization encryption holographic display.
The phase recovery, also known as PR (phase retrieval), phase recovery need the diffraction mould using light field Type carries out Diffraction Calculation to input light field, the intensity distribution of output face light field is obtained, then, by the output face being calculated Distribution of light intensity is compared with target field strength data, and the error being subject between the distribution of light intensity and target field strength of output face is minimum Then, the phase distribution for being best suitable for target field strength data is found by way of search or iteration.When calculating phase hologram, Iterative method is generally used, wherein GS (Gerchberg-Saxton) algorithm is the most commonly used one kind, and this method is spread out with passing through It is different to penetrate the analytic method that formula directly calculates Object light wave diffraction propagation to plane where hologram, is in holographic plan and object An iterative cycles are constructed between body plane, and hologram is continued to optimize by amplitude replacement in the circulating cycle, and final obtain can Meet the computer-generated hologram of design requirement.I.e. use GS algorithm carrys out calculation code to the super clever surface of multilayer to the present invention Computer-generated hologram in optical system.
In order to which the corresponding phase distribution information coding of hologram on the super clever surface system of above-mentioned multilayer, is needed to pass through Various sizes of metal L shape nano-antenna modulates the corresponding transmission phase of each pixel.For this reason, it may be necessary to utilize rigorous coupled wave Analytic approach (RCWA) simulates the optical characteristics of the metal L shape nano-antenna of various geometries and size, finds out with required phase The counter structure of position modulation, and it is combined with metal coupling pole sub-antenna, constituting has nonreciprocity asymmetric transmission function Can super clever surface composition unit, so as to ensure the super clever surface of above-mentioned multilayer can polarization encoder on the basis of, realization it is higher The all phase of transfer efficiency is modulated, and realizes polarization encryption function.It can be easily more gold for the operation wavelength of 1150nm Belonging to L shape nano-antenna finds 8 groups of structural parameters linearly to cover 0 phase range for arriving π, and the covering of all phase of 0 to 2 π then can 8 kinds of enough selected by 90 ° of rotations metal L shape nano-antennas introduce the additional phase delay that size is π to obtain.Therefore, most It can be realized 16 different phase orders in total eventually, linearly to cover all phase range of 0 to 2 π, GS algorithm meter will be used Resulting fourier hologram is calculated to be encoded in the super clever surface of the multilayer.Meanwhile the case where being transmitted for forward direction, in order to again Reveal high quality and the holographic reconstructed image with polarization selectivity, the super clever surface composition unit of selected 8 kinds is selected orthogonal inclined The transmission amplitude to shake under channelIt needs to keep relatively uniform, and noticeably greater than another orthogonal polarized channels
As shown in figure 3, in the design of specific structure and optimization process, in order to increase design freedom, metal L shape nanometer The size of antenna two arms scans respectively, and the length of the two can be different, but width be set to always 100nm (such as Fig. 3 (c), (d) shown in).By such design, metal L shape nano-antenna can by incident linearly polarized light polarization conversion at different proportion, The horizontal component and vertical component of out of phase modulation are divided into 100nm, long and wide respectively 450nm and 160nm by again later Metal coupling pole sub-antenna (such as Fig. 3 (a), (b) shown in) complete the selection of polarization state and pass through function.In rigorous couple-wave analysis (RCWA) in, the accuracy of two layers of cascade micro-nano antenna unit (such as Fig. 3 (e), (f) shown in) as a whole is to have passed through to test Card, therefore, potential coupling effect is considered in the design.For the super clever table of multilayer plasma body disclosed by the invention 8 kinds of different basic component units selected by face for each polarization channels phase and amplitude modulation effect respectively such as Fig. 4 (a), shown in (b), in forward-propagating, horizontal direction outgoing linear polarization is converted into for the incident linear polarization of vertical direction Cross-polarization transmission channel, the super clever surface optical system can ensure linearly cover 0 to 2 π all phase modulation range On the basis of, guarantee higher and more uniform amplitude modulation.In addition, two layers the space layer between super clever surface is decided to be 50nm, to ensure that metal L shape nano-antenna and metal coupling pole sub-antenna can be realized more accurate during fabricating Alignment, while ensuring enough amplitude/phase modulation ranges.
Step 3: using layer-by-layer preparation process, i.e. the electron beam lithography and stripping technology of gradation process cascade multilayer Super clever surface, by between hot evaporation deposition layer of silicon dioxide between metal L shape nano-antenna and metal coupling pole sub-antenna Interlayer, and the alignment procedures based on global mark and write-in field mark etc. not isolabeling realize more accurate alignment.
Step 3 concrete methods of realizing includes the following steps:
Step 3.1: being made using e-beam lithography with the chromium of 3nm thickness in the region of one 200 × 200 μm of size of construction For bonding coat, the metal coupling pole sub-antenna of 50nm thickness described above is attached on substrate.
Step 3.2: by depositing one layer on metal coupling pole sub-antenna using thermal evaporation deposition after lift-off processing The silica of 50nm thickness, as the wall between metal L shape nano-antenna and metal coupling pole sub-antenna.
Step 3.3: identical electron beam lithography and stripping technology process when using with processing metal coupling pole sub-antenna Metal L shape nano-antenna, and gradually using the different alignment marks such as global mark and write-in field mark in entire sample area The alignment precision of interior realization ± 50nm.This higher alignment precision ensures the positioning side between two layers of cascade super clever surface Formula is identical as expected design.
After processing is completed, the configuration of optical path shown in Fig. 5 (a) clever surface super to multilayer proposed by the present invention can be used to carry out real Verifying.Use tunable optical parametric oscillator (OPO) as light source, and set λ=1050nm for wavelength, required enters Ray polarization state can be obtained by the half-wave plate in front of rotation sample, then the polarizing film for being emitted side be rotated to inclined with incidence The orthogonal position in vibration direction can be obtained orthogonal polarized channels.The optical path passes through the microcobjective (numerical aperture of 40 times of magnifying powers 0.6) to capture the emergent light from the super clever surface of multilayer, and k-space hologram is imaged on a CMOS camera.Fig. 5 (b) The experiment reconstruction results of the different incident directions and orthogonal polarized channels that illustrate.Turn for the incident linear polarization of vertical direction The cross-polarization transmission channel of horizontal direction outgoing linear polarization is turned to, hologram is only capable of the successful reconstitution in forward-propagating, and It can be hidden in propagating;And vertical direction outgoing linear polarization is converted into for the incident linear polarization of horizontal direction Cross-polarization transmission channel, hologram are only capable of successful reconstitution when backwards to propagating, and due to the overturning of sample, image is also had occurred 180 ° of overturning.Actual reproduction result is consistent substantially with expected results, and the super clever surface of multilayer disclosed by the invention can be realized non- The function of reciprocity asymmetric transmission polarization encryption wavefront modification.
In conclusion the disclosed asymmetric transmission polarization with nonreciprocity based on the super clever surface of multilayer of the present embodiment The holographic display methods of encryption uses cascade metal L shape nano-antenna and metal to be coupled pole sub-antenna as basic structure list Member has broken the spatial symmetry on light wave propagation direction, realization while obtaining nonreciprocal asymmetric transmission characteristic The corresponding phase information of computer-generated hologram, can be encoded to the super clever surface optical system by the phase-modulation of gamut In system, it be observed reproduction image can only in specific polarization state and the corresponding encrypted tunnel of incident direction, realize non- The polarization encryption of reciprocity asymmetric transmission.Accordingly, it can be achieved that the polarization to image encrypts, it is applied to holographic display, information encryption Equal fields.
Above-described specific descriptions have carried out further specifically the purpose of invention, technical scheme and beneficial effects It is bright, it should be understood that the above is only a specific embodiment of the present invention, the protection model being not intended to limit the present invention It encloses, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention Protection scope within.

Claims (7)

1. the nonreciprocity asymmetric transmission wavefront modification method based on the super clever surface of multilayer, it is characterised in that: by adjusting institute The shape and size for stating the metal nano antenna on the super clever surface of multilayer can be realized basic component units where metal nano antenna Transmission matrix nondiagonal element modulation, and then realize cross-polarization transmission channel 0 to 2 π all phase modulation range;Root According to the phase distribution of hologram, the shape and size of all metal nano antennas are determined one by one, it can be by the phase of hologram Information coding is in the super clever surface of the multilayer;Add corresponding with transmission direction can only be polarized specific by making the reproduction image of hologram It is observed in close channel, realizes the holographic display of the polarization encryption of nonreciprocity asymmetric transmission.
2. special as described in claim 1 based on the nonreciprocity asymmetric transmission wavefront modification method on the super clever surface of multilayer Sign is: the super clever surface of multilayer, can be realized nonreciprocity asymmetric transmission, including basal layer, metal are coupled extremely sub- day Line layer, wall and metal nano antenna stack;The metal coupling pole sub-antenna layer array arrangement is on the base layer;It is spaced stratification It is coupled between pole sub-antenna layer and metal nano antenna stack in metal;The shape and size of the metal nano antenna stack, can The phase distribution according to needed for hologram is selected.
3. special as claimed in claim 2 based on the nonreciprocity asymmetric transmission wavefront modification method on the super clever surface of multilayer Sign is: the coupling pole sub-antenna and a metal nano antenna constitute basic component units.
4. as claimed in claim 2 or claim 3 based on the nonreciprocity asymmetric transmission wavefront modification method on the super clever surface of multilayer, Be characterized in that: the metal nano antenna is L shape metal nano antenna.
5. special as described in claim 1 based on the nonreciprocity asymmetric transmission wavefront modification method on the super clever surface of multilayer Sign is: the phase distribution of the hologram is obtained by Phase Retrieve Algorithm.
6. special as described in claim 1 based on the nonreciprocity asymmetric transmission wavefront modification method on the super clever surface of multilayer Sign is: the corresponding relationship of the phase distribution of the shape and size and hologram of the L shape metal nano antenna passes through tight Lattice Coupled Wave Analysis method or Finite-Difference Time-Domain Method determine.
7. as claimed in claim 1 or 2 based on the nonreciprocity asymmetric transmission wavefront modification method on the super clever surface of multilayer, It is characterized in that: metal the method for preparing the super clever surface of the multilayer: being coupled by extremely sub- day using electron beam lithography and stripping technology Line is worked on basal layer;The depositing spacer on metal coupling pole sub-antenna;Using electron beam lithography and stripping technology Metal nano antenna is worked on wall, need to guarantee the positional relationship of metal coupling pole sub-antenna and metal nano antenna.
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