CN110190012B - Heating equipment - Google Patents

Heating equipment Download PDF

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Publication number
CN110190012B
CN110190012B CN201910430779.3A CN201910430779A CN110190012B CN 110190012 B CN110190012 B CN 110190012B CN 201910430779 A CN201910430779 A CN 201910430779A CN 110190012 B CN110190012 B CN 110190012B
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China
Prior art keywords
heat insulation
heat
plate
heating
box body
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CN110190012A (en
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马明冬
陆煜帆
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Kunshan Govisionox Optoelectronics Co Ltd
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Kunshan Govisionox Optoelectronics Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67103Apparatus for thermal treatment mainly by conduction

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Details (AREA)
  • Electric Stoves And Ranges (AREA)

Abstract

The invention discloses heating equipment, and relates to the technical field of heat treatment equipment. The heating equipment comprises a box body and a heat insulation assembly, wherein a cavity is arranged in the box body; the heat insulation assembly comprises a plurality of first heat insulation plates, the first heat insulation plates are movably connected with the box body, and the plurality of first heat insulation plates are spliced and then paved on the inner wall of at least one side of the cavity. Among this firing equipment, thermal-insulated subassembly forms through the concatenation of a plurality of first heat insulating boards, only need change the first heat insulating board of damage can, need not the monoblock and change, reduced the replacement cost.

Description

Heating equipment
Technical Field
The invention relates to the technical field of heat treatment equipment, in particular to heating equipment.
Background
With the continuous development of display technology, the application of display panels is becoming more and more widespread. An Active Matrix Organic Light Emitting Diode (AMOLED) panel is used, and 4-6 baking steps are required in the whole processing stage, so as to perform corresponding processes such as curing, dehydrogenation, annealing, and the like.
Among the present baking equipment, be provided with thermal-insulated ceramic plate in the cavity, need change monoblock ceramic plate when changing the ceramic plate, it is with high costs.
Disclosure of Invention
The invention aims to provide heating equipment, which is low in cost and avoids the whole replacement of a heat insulation assembly without disassembling the whole machine when the heat insulation assembly is replaced.
In order to achieve the purpose, the invention adopts the following technical scheme:
a heating apparatus comprising:
the refrigerator comprises a box body, a door and a door, wherein a cavity is arranged in the box body;
an insulation assembly, the insulation assembly comprising:
the first heat insulation plates are movably connected with the box body, and the first heat insulation plates are spliced and then paved on the inner wall of at least one side of the chamber.
The heat insulation assembly is formed by splicing a plurality of first heat insulation plates, and only the damaged first heat insulation plates can be replaced, so that the replacement cost is reduced.
The first heat insulation plate is movably connected with the box body, so that the whole machine can be prevented from being disassembled and assembled during replacement, and the efficiency is improved.
The box body is provided with a first channel communicated with the cavity, and the first heat insulation plate is connected with the first channel in a sliding mode.
The first heat insulation plate can be inserted and drawn out through the first channel, and the assembly and disassembly are convenient.
The first heat insulation plate is provided with a first boss or a first groove, and the accommodating space of the first channel is matched with the first heat insulation plate.
Through the sliding fit of first boss and first recess, the slip direction of restriction first heat insulating board guarantees the position accuracy of first heat insulating board.
Wherein the opening of the first groove is constricted.
The opening of first recess shrink can block rather than the first boss of sliding fit, avoids first boss roll-off to improve the fixed effect of first heat insulating board.
Wherein the heating apparatus further comprises:
the shielding plate is arranged on the box body and used for shielding the first channel.
The shielding plate can prevent heat in the cavity from being dissipated out of the box body through the first channel, and the heat preservation effect is favorably improved.
Wherein the first heat shield comprises:
a support; and
the heat insulation blocks are arranged on the support, and the heat insulation blocks are arranged along the length direction of the support.
The plurality of heat insulation blocks can further reduce the size of the unit plate surface on the first heat insulation plate, and further reduce the replacement cost.
Wherein the heating apparatus further comprises:
the heat insulation structure comprises a plurality of heating elements and mounting holes, wherein the mounting holes are formed between two adjacent heat insulation blocks in the arrangement direction of the plurality of first heat insulation plates, and two ends of each heating element penetrate through the mounting holes respectively to be connected with the inner wall of the cavity.
The mounting holes are positioned between adjacent heat insulation blocks, so that the heat insulation assembly can be prevented from interfering the installation of the heating element.
Wherein the insulation assembly further comprises:
the box body is movably connected with the box body, the extending direction of the second heat insulation boards is perpendicular to the extending direction of the first heat insulation boards, and a space for containing the second heat insulation boards is arranged between every two adjacent heat insulation blocks on the first heat insulation boards.
The first heat insulation plate and the second heat insulation plate are spliced, so that the size of the plate surface of each heat insulation block is reduced, and the replacement cost is further reduced; the size of the heat insulation blocks along the length direction of the support is reduced, the size of the formed mounting holes can be reduced, the second heat insulation plate is placed at the interval between the heat insulation blocks on the same first heat insulation plate, the tiling area of the heat insulation assembly can be increased, the space for penetrating the heating element is reserved on the inner wall of the corresponding cavity, and the heat insulation effect is improved. Because the sliding directions of the first heat insulation plate and the second heat insulation plate do not pass through the mounting hole, when the heat insulation assembly is replaced, the heating element does not need to be detached, the heating element can be prevented from being damaged, and the efficiency is high.
The box body is provided with a second channel communicated with the cavity, and the second heat insulation plate is connected with the second channel in a sliding mode.
The second heat insulation plate can be inserted and drawn out through the second channel, and the disassembly and the assembly are convenient.
The second heat insulation plate is provided with a second convex block or a second groove, and the accommodating space of the support is matched with the second heat insulation plate.
Through the sliding fit of the second boss and the second groove, the sliding direction of the second heat insulation plate is limited, and the position precision of the second heat insulation plate is ensured.
Has the advantages that: the invention provides a heating device. In the heating equipment, the first heat insulation plate is movably connected with the box body, so that the first heat insulation plate is convenient to disassemble; the heat insulation assembly is formed by splicing a plurality of first heat insulation plates, and only the damaged first heat insulation plate needs to be replaced without replacing the whole plate, so that the replacement cost is reduced.
Drawings
FIG. 1 is a schematic structural diagram of a heating apparatus (when a shielding plate is not assembled) according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a first insulation board when being spliced according to an embodiment of the present invention;
FIG. 3 is a schematic view of a portion of the construction of the first heat shield of FIG. 2;
FIG. 4 is a front view of the first heat shield of FIG. 3;
FIG. 5 is a schematic structural diagram of another first insulation board provided by the first embodiment of the invention when being spliced;
FIG. 6 is a schematic structural diagram of another first insulation board provided by the first embodiment of the present invention during splicing;
FIG. 7 is a schematic structural diagram of a heating apparatus according to an embodiment of the present invention;
FIG. 8 is a rear view of a second embodiment of the present invention showing the first and second heat shields being joined together;
FIG. 9 is a first schematic structural diagram illustrating a first heat insulation board and a second heat insulation board when the first heat insulation board and the second heat insulation board are spliced according to a second embodiment of the invention;
FIG. 10 is a second schematic structural view of the first heat insulation board and the second heat insulation board provided by the second embodiment of the invention when being spliced;
FIG. 11 is a front view of a second embodiment of the present invention showing the first and second heat shields being joined together;
FIG. 12 is a third schematic structural view of the second embodiment of the present invention when the first and second heat-insulating boards are joined together;
FIG. 13 is a schematic structural view of a thermal insulation assembly provided in accordance with a second embodiment of the present invention;
FIG. 14 is a schematic structural view of a heating apparatus (when a shielding plate is not mounted) according to a second embodiment of the present invention;
fig. 15 is a schematic structural diagram of a heating apparatus according to a second embodiment of the present invention.
Wherein:
1. a box body; 11. a chamber; 12. a first channel;
2. a heating element;
3. an insulating assembly; 31. a first heat insulation plate; 311. a thermal insulation layer; 312. a substrate; 313. a first boss; 314. a support; 3141. a second groove; 315. a heat insulation block; 32. a second heat insulation plate; 321. a second bump; 33. mounting holes;
4. a shielding plate.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "secured" are to be construed broadly and encompass, for example, both fixed and removable connections; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in direct contact with the second feature but being in contact with the second feature by another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Example one
The present embodiment provides a heating apparatus for heating a workpiece, for example, for a baking step in a display panel production process, so as to perform corresponding curing, dehydrogenation, and annealing processes.
As shown in fig. 1, the heating apparatus includes a case 1, a chamber 11 is provided in the case 1, and a workpiece is placed in the chamber 11. Optionally, at least one end of the chamber 11 is provided with an opening to facilitate the entry and exit of the workpiece. In this embodiment, taking the direction shown by the arrow in fig. 1 as an example, the front end and the rear end of the cavity 11 are both provided with openings, which facilitates the sequential connection of the heating device and other processes in the workpiece processing process. Alternatively, the open end of the chamber 11 may be provided with a door, which may open or close the opening.
A plurality of heating elements 2 are provided in the housing 1, and the heating elements 2 can increase the temperature in the chamber 11 to heat the workpiece. Alternatively, the heating elements 2 may be heating rods, a plurality of which are arranged in layers in the vertical direction, and each layer of heating rods may carry a workpiece thereon. Through setting up heating element 2 layering, can improve the quantity of the disposable heating work piece of firing equipment, and except the work piece that the top layer bore, the upper and lower two surfaces of all the other work pieces all have heating element 2, and the heating effect is more even. Alternatively, the heating rod may include a quartz heating tube, or may have other structures as long as the heating rod has a heating function and meets the process requirements.
In this embodiment, wear to establish respectively on the left and right sides lateral wall of box 1 at the both ends of heating rod, the heating rod can be dismantled with box 1 through the mode of pull and be connected to convenient the change when the heating rod damages.
In order to ensure that the heat preservation performance of the box body 1 is good, the heat insulation assembly 3 is further arranged in the box body 1, the heat insulation assembly 3 is arranged in the cavity 11, heat in the cavity 11 can be prevented from being transferred to the outside of the box body 1, the temperature in the cavity 11 is ensured, the heat loss is reduced, and the heating efficiency is improved.
Alternatively, the insulation assembly 3 may include insulation panels that may be secured to the inner walls of the chamber 11 to block heat loss. The heat shield may be made of a ceramic material.
The heat insulating board is a consumable, is fragile and complex to install, and is easy to crack and even break due to frequent temperature rise and temperature reduction in the cavity 11, so that the heat insulating board needs to be frequently disassembled and assembled. In the prior art, the size of the surface of the heat insulation plate in the cavity 11 is large, and when the heat insulation plate is broken, the size of fragments is large, so that the fragments are easy to impact a quartz structure in heating equipment; the cost of replacing the insulation board is high.
To solve the above problem, as shown in fig. 2, the thermal insulation assembly 3 in this embodiment includes a plurality of first thermal insulation boards 31, the first thermal insulation boards 31 are movably connected to the box body 1, and the plurality of thermal insulation boards are arranged in parallel and tiled on the inner wall of the chamber 11 after being spliced. Compared with the prior art, the heat insulation plates corresponding to the inner walls of each side of the cavity 11 are formed by splicing a plurality of first heat insulation plates 31, so that the size of a single heat insulation plate is reduced. When the heat insulation board is damaged, only the first heat insulation board 31 at the damaged position needs to be replaced, which is beneficial to reducing the replacement cost and avoiding the waste of materials.
In this embodiment, the heat insulation plates disposed on the upper, lower, left and right inner walls of the chamber 11 may be formed by splicing a plurality of first heat insulation plates 31. In other embodiments, the number of sidewalls of the chamber 11 provided with the spliced insulation panels may also be one, two, or three.
As shown in fig. 1, a plurality of first passages 12 communicating with the chamber 11 are provided on a front side end surface of the case 1, and the first insulation board 31 is slid into the chamber 11 through the first passages 12. The first heat insulation plate 31 is connected with the box body 1 in a sliding mode, and is convenient to disassemble and assemble.
In the prior art, the whole heating equipment needs to be disassembled when the thermal insulation board is disassembled and assembled due to the large board surface of the thermal insulation board, particularly, the heating element 2 in the heating equipment needs to be replaced after being integrally disassembled, the working time is long, the work is complicated, and the damage of a quartz structure in the heating equipment is easily caused in the whole disassembling process.
In this embodiment, the front end port of each first duct 12 is located on the surface of the cabinet 1, and the first insulation board 31 may be inserted into the chamber 11 through the front end port of the first duct 12. When the first heat insulation board 31 needs to be replaced, the first heat insulation board 31 can be drawn out or inserted from the front end port, and the assembly and disassembly are convenient.
Alternatively, the first passage 12 may extend through the entire casing 1, i.e. the front end port of the first passage 12 is located on the outer surface of the front side plate of the casing 1, and the rear end port of the first passage 12 is located on the outer surface of the rear side plate of the casing 1. When the first heat insulation board 31 is installed, the two ends of the first heat insulation board 31 are respectively embedded into the front side board and the rear side board of the box body 1, so that the fixing effect of the first heat insulation board 31 can be improved, and the first heat insulation board 31 is prevented from falling.
As shown in fig. 3 and 4, the first heat insulation board 31 includes a substrate 312 and a heat insulation layer 311 disposed on the substrate 312, and the heat insulation layer 311 may be made of a heat insulation material such as ceramic. Optionally, the heat insulation layer 311 may be connected to the substrate 312 by a fastener such as a screw or by an adhesive fixation, and when the heat insulation layer 311 is fixedly connected to the substrate 312 by the adhesive fixation, the cracked heat insulation layer 311 may be prevented from falling off, which is convenient for cleaning.
In this embodiment, the heat insulating layer 311 is connected to the substrate 312 by screws, so that the heat insulating layer 311 and the substrate 312 are detachable. When the heat insulation layer 311 on the first heat insulation plate 31 is cracked or broken, only the heat insulation layer 311 thereon can be replaced, which is beneficial to further reducing the replacement cost.
In order to further improve the positioning accuracy of the first heat shield 31 and the inner wall of the chamber 11, a first groove may be disposed on the first channel 12 and the inner wall of the chamber 11 along the insertion direction of the first heat shield 31, correspondingly, a first boss 313 is convexly disposed on the base plate 312, the first boss 313 is slidably connected with the first groove, and the receiving space of the first channel 12 is adapted to the first heat shield 31. By the guide action of the first bosses 313 and the first grooves, the sliding direction of the first heat insulation plate 31 can be ensured, thereby ensuring the positional accuracy of the first heat insulation plate 31. After the first heat insulation board 31 is inserted into the first channel 12, the empty space in the first channel 12 is small, so that the first heat insulation board 31 is prevented from shaking, and the positioning effect of the first heat insulation board 31 is improved.
Alternatively, as shown in fig. 4, the first bosses 313 may have a trapezoidal cross-sectional shape, and an upper base of the trapezoidal shape is connected to the substrate 312. The cross-sectional shape of the first groove is the same as the shape of the first boss 313. When the first heat shield plate 31 is inserted into the cavity 11 through the first passage 12, the first bosses 313 may be caught in the first grooves to prevent the first bosses 313 from being separated from the first grooves, thereby fixing the first heat shield plate 31 to the inner wall of the cavity 11.
In other embodiments, the cross-sectional shape of the first protrusion 313 may also be T-shaped or partially circular, as long as the dimension of the free end of the first protrusion 313 away from the end of the substrate 312 is larger than the dimension of the fixed end of the first protrusion connected to the substrate 312, and accordingly, the opening of the first groove is shrunk, so as to prevent the first protrusion 313 from separating from the first groove. Wherein, the opening of the first groove is contracted, that is, the cross-sectional area of the first groove is gradually reduced along the direction close to the substrate 312, so that the shape of the first groove is matched with the shape of the first boss 313.
In other embodiments, the first bosses 313 may be disposed on the inner walls of the first duct 12 and the chamber 11, and correspondingly, the first grooves may be disposed on the first heat insulation plate 31, which may also improve the position accuracy and the fixing effect of the first heat insulation plate 31.
In order to facilitate the detachment of the heating rod, a mounting hole 33 allowing the heating rod to pass through is further provided between the adjacent two first heat insulation plates 31. In this embodiment, the size of the first channel 12 on the box body 1 is substantially the same as that of the first heat insulation board 31, and the plurality of first channels 12 are arranged at intervals, so that when the plurality of first heat insulation boards 31 are spliced, a certain gap is formed between the adjacent first heat insulation boards 31. By properly setting the interval between the adjacent first passages 12, the installation holes 33 may be formed in the gap between the adjacent first insulation boards 31, thereby facilitating the installation of the heating rod.
In order to improve the heat preservation effect, the heat insulation assembly 3 is paved on the inner wall of the chamber 11 as much as possible. In order to avoid increasing the gap between the adjacent first heat insulation plates 31, alternatively, as shown in fig. 5, the side of the first heat insulation plates 31 extending in the insertion direction thereof may be provided with a plurality of notches. When the plurality of first heat insulation plates 31 are spliced, the notches of the plurality of first heat insulation plates 31 corresponding to the inner wall of the same chamber 11 are oriented in the same direction, so that the installation hole 33 is formed between each notch and the adjacent first heat insulation plate 31. The mounting hole 33 is formed by the gap fit between the notch and the two adjacent first heat insulation plates 31, so that the size of the notch is favorably reduced, the laying area of the first heat insulation plates 31 is increased, and the heat insulation effect is improved.
Alternatively, as shown in fig. 6, both sides of the first heat insulation plates 31 extending in the insertion direction thereof may be provided with notches, and the mounting holes 33 are formed between two opposite notches in two adjacent first heat insulation plates 31.
In other embodiments, in order to reduce the gap between the adjacent first heat insulation boards 31, the plurality of first passages 12 on the same side edge of the box body 1 may be communicated such that the adjacent first heat insulation boards 31 may abut, further increasing the laying area of the first heat insulation boards 31.
In other embodiments, the mounting hole 33 may be directly formed on the first heat insulation plate 31 as long as the mounting requirement of the heating rod is satisfied.
As shown in fig. 7, in order to avoid heat from being dissipated from the port of the first passage 12, the housing 1 further includes a shielding plate 4, and the shielding plate 4 is disposed on the surface of the housing 1 and shields the port of the first passage 12. Alternatively, the shielding plate 4 may be made of a heat insulating material, such as a ceramic material. The shielding plate 4 can be detachably connected with the box body 1 through a fastener such as a screw.
In this embodiment, the shielding plate 4 is annular and is disposed on the front side plate of the box body 1 to shield the first channel 12 at the peripheral edge of the front side plate.
When assembling the heating apparatus, the plurality of first heat insulating plates 31 are first inserted into the chamber 11 through the corresponding first passages 12, and then the plurality of heating rods are installed. When the first heat-insulating board 31 needs to be replaced, the heating rod interfering with the corresponding first heat-insulating board 31 is detached, then the damaged first heat-insulating board 31 is detached, and after the first heat-insulating board 31 is installed, the heating rod at the corresponding position is assembled.
Example two
The present embodiment provides a heating apparatus which is different from the first embodiment in that, as shown in fig. 8 to 10, the heat insulation assembly 3 includes a first heat insulation plate 31 and a second heat insulation plate 32, the second heat insulation plate 32 is movably connected to the cabinet 1, and preferably, the first heat insulation plate 31 extends in a direction perpendicular to the second heat insulation plate 32, and is cross-spliced and laid on the inner wall of the chamber 11.
Optionally, the extending directions of the first heat insulating plate 31 and the second heat insulating plate 32 are not perpendicular, and may be crossed, and the first heat insulating plate and the second heat insulating plate are spliced and laid on the inner wall of the chamber 11, and may be set according to actual requirements.
As shown in fig. 8, the first heat shield plate 31 includes a long bracket 314 and a plurality of heat insulating blocks 315 disposed on the bracket 314, the plurality of heat insulating blocks 315 are arranged at intervals along a length direction of the bracket 314, and the heat insulating blocks 315 extend along a width direction of the bracket 314. Along the arrangement direction of the first heat insulation boards 31, the heat insulation blocks 315 on two adjacent first heat insulation boards 31 are arranged opposite to each other. The second insulation board 32 is inserted into the chamber 11 and then inserted between two adjacent insulation blocks 315 on the same first insulation board 31. The second heat insulation plate 32 has a long bar shape such that the second heat insulation plate 32 is sequentially embedded in the arranged plurality of first heat insulation plates 31 along the length direction. The inner wall of the corresponding one side of the chamber 11 is filled up by the cross-coupling of the plurality of first heat insulation plates 31 and the plurality of second heat insulation plates 32. Wherein, in two adjacent first heat insulation plates 31, a mounting hole 33 for allowing the heating rod to pass through is formed between two opposite heat insulation blocks 315.
In this embodiment, the extending directions of the first insulation board 31 and the second insulation board 32 are perpendicular, a space for accommodating the second insulation board 32 is provided between two adjacent insulation blocks 315 on the first insulation board 31, and the spaces at corresponding positions on a plurality of first insulation boards 31 are opposite and can accommodate one second insulation board 32. The second heat insulating board 32 is accommodated in the corresponding space, so that the first heat insulating board 31 and the second heat insulating board 32 are arranged in a crossed manner, the heating rod can be prevented from interfering the dismounting and mounting of any one of the first heat insulating board 31 and the second heat insulating board 32, the heating rod does not need to be dismounted when the heat insulating assembly 3 is replaced, the replacement efficiency is higher, and the heating rod can be prevented from being damaged.
In addition, in the embodiment, the sizes of the plate surfaces of the single first heat insulation plate 31 and the single second heat insulation plate 32 are further reduced, which is beneficial to further reducing the replacement cost. Correspondingly, the broken slag generated when the heat insulation plate is broken is small, and the impact of the broken slag on the heating rod is reduced, so that the heating rod is prevented from being damaged.
Optionally, the bracket 314 and the thermal insulation block 315 each include a substrate 312 and a thermal insulation layer 311 disposed on the substrate 312, the first bump being disposed on the substrate 312. The base plate 312 of the thermal insulating block 315 and the base plate 312 of the bracket 314 may be integrally formed, and the thermal insulating layer 311 on the thermal insulating block 315 and the thermal insulating layer 311 on the bracket 314 may be integrally formed.
In this embodiment, the coverage area of the plurality of first heat insulation plates 31 and the plurality of second heat insulation plates 32 is large, so that only the empty mounting holes 33 are left on the corresponding chamber 11, and heat insulation plates are arranged at the rest positions, thereby further improving the heat insulation effect.
As shown in fig. 9 and 10, in the present embodiment, the surfaces of the heat insulation blocks 315 and the second heat insulation plate 32 facing the inside of the chamber 11 are flush and have the same thickness, so that the uniformity of the heat insulation effect in the chamber 11 can be improved, and the temperature in the chamber 11 can be ensured to be uniform.
Alternatively, the insulation blocks 315 of the plurality of first insulation panels 31 may have different lengths, and the plurality of second insulation panels 32 may have different widths. The dimensions of the first and second heat shields 31, 32 may be adjusted according to particular needs.
In order to facilitate the positioning of the first and second heat insulation plates 31 and 32, as shown in fig. 10 to 12, a second protrusion 321 is provided on the second heat insulation plate 32, and a second sliding groove extending in the width direction thereof is provided on the bracket 314. When the second heat shield 32 is inserted, the second protrusion 321 slides along the second sliding groove until the second heat shield 32 is mounted in place. The insertion direction of the second heat insulating board 32 can be restricted by the cooperation of the second protrusion 321 and the second sliding groove, thereby ensuring the position accuracy of the second heat insulating board 32.
In order to improve the fixing effect of the second heat insulation board 32 and the first heat insulation board 31, the second groove 3141 may also be an open and contracted structure to prevent the second protrusion 321 from being separated from the second groove 3141. Alternatively, the cross-sectional shape of the second groove 3141 may be T-shaped, trapezoidal, or partially circular.
Since the heating rods are connected only to the inner walls of the left and right chambers 11, in this embodiment, as shown in fig. 13, a plurality of second heat-insulating plates 32 may be flatly laid on the inner walls of the upper and lower sides of the chambers 11, and the first and second heat-insulating plates 31 and 32 arranged to cross each other are flatly laid on the inner walls of the left and right sides of the chambers 11 so as to avoid the installation positions of the heating rods.
As shown in fig. 14, in order to facilitate the detachment of the second heat insulation plate 32, the cabinet 1 is provided with a second passage communicating with the chamber 11, and the second heat insulation plate 32 is inserted into the chamber 11 through the second passage. Specifically, the left and right side edges of the upper side plate of the box body 1 are provided with the second channels, the left and right side edges of the front side plate of the box body 1 are provided with the first channels 12, and the upper and lower side edges of the front side plate are provided with the second channels, so that the heat insulation plates are laid on the inner walls of the upper, lower, left and right sides of the chamber 11.
In this embodiment, the structure of the second channel may be the same as that of the first channel 12, and is not described herein again.
As shown in fig. 15, in order to avoid heat transfer from the first passage 12 and the second passage to the outside of the case 1, the ports of both the first passage 12 and the second passage are shielded by the shielding plate 4.
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.

Claims (8)

1. A heating apparatus, comprising:
the refrigerator comprises a refrigerator body (1), wherein a cavity (11) is arranged in the refrigerator body (1);
an insulation assembly (3), the insulation assembly (3) comprising:
the first heat insulation plates (31) are movably connected with the box body (1), and the first heat insulation plates (31) are spliced and then are flatly paved on the inner wall of at least one side of the chamber (11);
the first heat shield plate (31) includes:
a bracket (314); and
a plurality of heat insulating blocks (315), the heat insulating blocks (315) being disposed on the support (314), the plurality of heat insulating blocks (315) being arranged along a length direction of the support (314);
the insulation assembly (3) further comprises:
the heat insulation structure comprises a plurality of second heat insulation plates (32), wherein the second heat insulation plates (32) are movably connected with the box body (1), the extending direction of the second heat insulation plates (32) is vertical to the extending direction of the first heat insulation plates (31), and a space for accommodating the second heat insulation plates (32) is arranged between every two adjacent heat insulation blocks (315) on the first heat insulation plates (31).
2. A heating device according to claim 1, wherein said cabinet (1) is provided with a first channel (12) communicating with said chamber (11), said first heat-insulating plate (31) being slidingly associated with said first channel (12).
3. A heating device according to claim 2, characterized in that the first heat shield (31) is provided with a first projection (313) or a first recess, the accommodation space of the first channel (12) being adapted to the first heat shield (31).
4. A heating apparatus as claimed in claim 3, wherein the opening of the first recess is constricted.
5. The heating apparatus as claimed in claim 2, wherein the heating apparatus further comprises:
the shielding plate (4) is arranged on the box body (1) and used for shielding the first channel (12).
6. The heating apparatus according to claim 1, further comprising a plurality of heating elements (2) and mounting holes (33), wherein the mounting holes (33) are located between two adjacent insulation blocks (315) in the arrangement direction of the plurality of first insulation boards (31), and both ends of the heating elements (2) are connected to the inner wall of the chamber (11) through the mounting holes (33), respectively.
7. A heating device according to claim 1, wherein a second channel is provided in said cabinet (1) communicating with said chamber (11), said second heat-insulating plate (32) being slidingly associated with said second channel.
8. A heating device according to claim 1, characterized in that the second heat shield (32) is provided with a second protrusion (321) or a second recess (3141), and the receiving space of the holder (314) is adapted to the second heat shield (32).
CN201910430779.3A 2019-05-22 2019-05-22 Heating equipment Active CN110190012B (en)

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CN113543585B (en) * 2021-06-15 2022-07-15 湖南诺方斯新材料有限公司 Electromechanical equipment heat insulation plate with high temperature resistance and good heat resistance

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CN202755102U (en) * 2012-08-01 2013-02-27 大连隆田科技有限公司 Multi-layer heat-insulation barrel device
CN203923440U (en) * 2014-06-17 2014-11-05 西安隆基硅材料股份有限公司 Single crystal growing furnace heat-preservation cylinder
CN105556651A (en) * 2013-09-10 2016-05-04 泰拉半导体株式会社 Heat treatment device and heat treatment system comprising same
JP2016171076A (en) * 2015-03-12 2016-09-23 テラセミコン コーポレイション Substrate processing device

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Publication number Priority date Publication date Assignee Title
CN202755102U (en) * 2012-08-01 2013-02-27 大连隆田科技有限公司 Multi-layer heat-insulation barrel device
CN105556651A (en) * 2013-09-10 2016-05-04 泰拉半导体株式会社 Heat treatment device and heat treatment system comprising same
CN203923440U (en) * 2014-06-17 2014-11-05 西安隆基硅材料股份有限公司 Single crystal growing furnace heat-preservation cylinder
JP2016171076A (en) * 2015-03-12 2016-09-23 テラセミコン コーポレイション Substrate processing device

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