CN110177950A - Multistage turbine molecular pump with entrance between grade - Google Patents
Multistage turbine molecular pump with entrance between grade Download PDFInfo
- Publication number
- CN110177950A CN110177950A CN201880007722.6A CN201880007722A CN110177950A CN 110177950 A CN110177950 A CN 110177950A CN 201880007722 A CN201880007722 A CN 201880007722A CN 110177950 A CN110177950 A CN 110177950A
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- China
- Prior art keywords
- grade
- row
- blade
- rotor blade
- stator
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/545—Ducts
- F04D29/547—Ducts having a special shape in order to influence fluid flow
Abstract
Disclose a kind of multistage turbine molecular pump.Pump includes: high vacuum grade comprising multiple rotor blade rows；Lower vacuum level comprising the big multiple rotor blades row of the rotor blade row of the relatively high vacuum level of diameter；Entrance between grade, it is used between high vacuum grade and lower vacuum level for gas being input in turbomolecular pump, the entrance extends to the radial position in larger diameter from the excircle of pump, and including for guiding gas to enter the gas guide structure of pump in the axial direction.
Description
Technical field
The field of the invention is related to turbomolecular pump, and particularly to the multistage turbine molecule with entrance between grade
Pump.
Background technique
It is known that the turbomolecular pump of high vacuum and ultrahigh vacuum is provided.These pumps are momentum transmitting pumps, wherein entering pump
Gas molecule gives momentum by the rotor blade rotated.Pump includes the row couple of multiple angled rotor blades and stator vane,
Rotor blade row blade be it is angled, with towards the outlet side of pump push gas molecule.In some cases, ratio may be present
Rotor blade row more than stator, so that one or more rotor blade rows do not match with corresponding stator.
Developed the pump of multiport or shunting, with can be realized several different chambers at various pressures pass through it is single
The pumping of pump.The first order receives gas from the high-vacuum chamber of low-down pressure, and subsequent grade from elevated pressures compared with
Low vacuum chamber receives gas.Traditionally, gas is via the hole on the circumference between the two-stage in the grade for being located at pump in diameter
Pump is upwardly into side.Such hole needs reasonable distance between two-stage, to provide space for gas input.Figure
1 shows such conventional turbine molecular pump.
It is desirable that, providing the compact multistage turbine molecular pump with entrance between grade, effective pump not at the same level is provided
It send.
Summary of the invention
The first aspect of the present invention provides a kind of multistage turbine molecular pump, comprising: high vacuum grade comprising multiple rotors
Blade row；Lower vacuum level comprising multiple turn bigger than the diameter that the rotor blade of the high vacuum grade is arranged of diameter
Blades row；Entrance between grade is used between the high vacuum grade and the lower vacuum level for gas being input to described
In turbomolecular pump, the entrance extends to the radial position in the larger diameter from the excircle of the pump, and including
For leading into the gas guide structure of the gas of the pump in the axial direction.
Present inventors have realized that the difference for the multistage turbine molecular pump for allowing gas in radial directions to input
Gap between the rotor blade row of grade causes pump not compact.They are also to be recognized that the pump stage in turbomolecular pump can have
The rotor blade row being gradually increased towards downstream direction diameter.The root diameter of highest vacuum level in turbomolecular pump is attached by its
The outlet size for the chamber being connected to dominates, and this can be by standard setting.Subsequent rotor blade row is less constrained, and
There can be biggish diameter.Size difference between the rotor blade row of adjacent level is can be in the axial direction and towards larger
The gas access of the excircle guidance gas of the rotor blade row of diameter provides chance.This not only mitigates sizable between two-stage
The demand in gap, and it also provides the gas flowing guided towards rotor tip, and the rotor tip is the most effective of pump
Delivery position, there, rotor blade have highest speed.Thus, it provides a kind of with the compact of improved pumping efficiency
Pump.
In some embodiments, the entrance includes the gas guide structure and at least one hole, and described at least one
A hole is between the diameter of at least one rotor of the larger diameter and the high vacuum grade towards the radial direction of the pump
External position positioning.
In some embodiments, at least one described hole is in plane substantially vertical with the axis of the pump.
The position in larger diameter is arranged in the hole of entrance in plane substantially vertical with pump shaft line, allows gas
Body flows vertically through the hole, to enter in the axial direction in pump and on the outer tip of the larger-diameter rotor.Substantially
Plane perpendicular to the axis is considered as the plane with axis at the angle between 70 ° and 110 °.
In some embodiments, the pump includes the multiple holes for being located around the different location of circumference of the pump.
Although can there was only single hole, in some embodiments, there are multiple holes, and they are located around the circle of pump
The different location in week so as to improve flow uniformity and improves the validity and efficiency of pump.
In some embodiments, described at least part of the gas guide structure includes the table of substantially axial orientation
Face.
In some embodiments, the gas guide structure includes from being generally radially oriented at the excircle in the pump
Surface become the substantially axial orientation at the radially innermost point of the gas guide structure surface surface.
Although gas guide structure can have many forms, at least part of construction includes for making in radial direction
The surface of the substantially axial orientation of the gas deflection of upper movement.The surface of substantially axial orientation is considered as the axis with pump at small
In the surface of 20 ° of angle.In some embodiments, gas guide structure includes taking pump to substantially from gas source from by gas
What radial oriented surface (with the radius of pump at the surface of the angle less than 20 °) became when gas enters pump substantially axial takes
To surface surface.In this way, gas flowing is conveyed from radial direction towards pump, and flow direction is practical defeated at it
Axial direction is changed to before entering pump.In other embodiments, gas can convey in the axial direction, and gas guide structure
There is no radial oriented surface.
In some embodiments, a part of at least part of the gas guide structure adjacent to the high vacuum grade
Excircle or formed by it.
It is neighbouring that the different sizes not at the same level of pump allow at least some of gas guide structure gas guide structure to be located at
The excircle of grade with small diameter is formed by it.In this way, the energy of flow of gas is by along with smaller straight
The construction guidance of the grade positioning of diameter, and entry pore and biggish overlapping diameters so that entrance do not need it is any between grade
Significant gap, to allow the more compact design pumped.
In some embodiments, it is described pump include for bridge the stator of the small diameter in the high vacuum grade and
Stator bridge component between the larger-diameter stator in the lower vacuum level, the stator bridge component be included in substantially with
Ring in the vertical plane of pump shaft line, the ring include multiple holes.
Stator bridge component is used in multistage pump, to bridge between the stator not at the same level that can have different-diameter.At this
In the embodiment of invention, stator bridge includes ring substantially vertical with pump shaft line.Ring includes the rotor blade close to lower vacuum level
Multiple holes.Multiple holes of ring surround the circumference of ring, and form the hole of gas access.
In some embodiments, the internal diameter of the ring includes the diameter of the stator of the high vacuum grade, and the ring
Outer diameter include the stator in the lower vacuum level diameter.
In order to utilize the available space for being used for input, if the ring of stator bridge is extended to from the diameter of the stator of high vacuum grade
The larger diameter of stator in lower vacuum level, is advantageous.Except in sagittal plane (plane vertical with the axis of pump)
Except ring, stator bridge has axial component, and the axial component has the distance between the rotor blade row by two adjacent levels
The height of setting.
In embodiment, stator bridge have be equal to or more than grade in two adjacent rotor blades row the distance between and
Equal to or less than non-conterminous but arrange by a rotor blade height of the distance between two rotor blades separated from each other row.By
In the arrangement of entrance, it is no longer necessary to the gap of gas input is exclusively used between grade, thus the rotor blade for setting adjacent level arranges it
Between the stator bridge height of distance may make that rotor blade row can be close as them in grade, or be at least no more than them
Twice of distance in grade.
In some embodiments, at least some of rotor blade row in high vacuum grade rotor blade row
With different diameters, the diameter towards at least one rotor blade row of the lower vacuum level is less than from described compared with low vacuum
The diameter of the farther rotor blade row of grade.
Rotor blade row in not at the same level can have it is uniform, arranged from the rotor blade in other grades it is different straight
Diameter, but in some embodiments, the rotor blade row in high vacuum grade itself can have different diameters, rotor blade row's
Diameter is as it is towards before entrance and then becoming smaller.Small diameter towards entrance provides biggish space for the entrance.
In some embodiments, the rotor blade row in high vacuum grade has towards the lower vacuum level into cone
The diameter of shape.
Although the variation of the diameter of rotor blade row can take many forms, variation sometimes can be continuous, rotor
The diameter of blade row is tapered towards lower vacuum level.
In some embodiments, each rotor blade in the rotor blade row, which is arranged, has multiple blades, between the grade
The blade of inlet rotor blade row has the blade for being suitable for pumping the received gas in inlet between the grade
Outer portion angle and suitable for pump the received gas in the inlet of the high vacuum grade inner part angle,
Inlet rotor blade row is the rotor blade row of the lower vacuum level of entrance between the grade between the grade.
Due to pump construction and in particular due to the construction of entrance between grade, the gas pumped by high vacuum grade is in
Between enter lower vacuum level and leave this grade rotor blade row edge, and between grade inlet gas input will be guided
The outer portion arranged to the rotor blade of this grade.Thus, two strands of gases flow to few early part in the pump stage and are mainly pumping
Different zones in.It was recognized by the inventor that this of these streams, which substantially separates, means that the different piece of rotor blade mainly pumps
Send different gas stream.Thus, adjustable blade, so that main pumping is from the inner part of the received gas of high vacuum grade to fit
It is angled together in the mode of the gas stream, and it is suitable for pumping received gas in inlet between grade in the blade of outer portion.
In some embodiments, the blade of inlet rotor connects suitable for pumping the inlet between the grade between the grade
Receive the gas the part be suitable for pumping in the portion of the received gas in high vacuum grade inlet
/ with geometry localized variation, the localized variation of the geometry appear in the rotor blade be less than institute
It states in 10% length of the radius of rotor blade.
In some embodiments, the length of the localized variation including the geometry is located at the rotor blade
Extend described turn from the radial point at the 5% of the pore length described on the inside of the entry pore towards the center of the pump
In 20% region of the radius of blades.
So that blade is suitable for gas with various stream means them in a kind of main part for pumping gas stream of blade and master
Pump the localized variation in the region between the part of another gas stream with geometry or tilt angle.Geometry or
The localized variation of angle occurs across relatively small region.That is, it is located at 10% length less than rotor blade radius
It is interior, the length appear in from a radial position extend internally rotor blade radius 20% region in somewhere, and open
Start from the 5% of the length of the radius of rotor blade than the inward flange of entry pore more towards the excircle point it is outer
Point.
In some embodiments, the angle of the outer portion of the blade is suitable for the inlet reception between the grade
The gas increased rate of pumping, and the angle of inner part be suitable in the inlet of the high vacuum grade it is received
The compression of the enhancing of the gas.
Rotor blade row on blade angle may depend on gas rate of pumping still compress be it is most important because
Element and across the length of blade change.In some cases, the outer portion of blade may be adapted to increased rate of pumping, and inner part
It may be adapted to the pumping compression of enhancing.In this regard, the excircle pumping gas that inlet inputs between grade, and this may be needed
A certain acceleration, and inner part pumps the gas from upstream entrance, and this may need to accelerate with greater need for compression than it.
In some embodiments, as the plane vertical with the axis of the pump sagittal plane and the blade it is outer
Angle between part is greater than the angle between the sagittal plane and the inner part of the blade.
As previously mentioned, blade is arranged for increased rate of pumping in the angle of outer portion, and thus usually more
Inclination --- that is, the angle between sagittal plane and blade is than for providing the blade angle in inner portion thereof of the compression enhanced
It spends bigger.This is different from traditional blades, in the case where traditional blades, if there is the change of any angle along the length of blade
Change, then the relatively flat area to increase in outer edge covering of the outer portion of usual blade.
In some embodiments, each rotor blade in the rotor blade row, which is arranged, has multiple blades, between the grade
The blade of inlet rotor blade row has the blade of diameter at least some of smaller than the larger diameter, described
Inlet rotor blade row is the rotor blade row of the lower vacuum level of entrance between the grade between grade.
In addition to the blade of the different pumping performances needed for differently distort to allow gas with various or alternatively,
The length of the rotor blade at the rotor blade row of neighboring entry also can be changed.That is, some of which is some
In the case of can remove their rotor tip so that these blades shortened may not extend between grade except entrance, with allow compared with
Big inlet area.
In some embodiments, pump includes multiple row of stator, the blade that inlet stator vanes are arranged between the grade
With suitable for the angle of the outer portion of the blade of the pumping of the received gas in inlet between the grade and suitable for described
The angle of the inner part of the pumping of the received gas in the inlet of high vacuum grade, inlet stator vanes row is neighbouring between the grade
The row of stator of the lower vacuum level of entrance between the grade.
In addition to being suitable for the rotor blade of different pumpings of two kinds of gases or alternatively, it can adjust in this way
Stator vane.In this regard, since stator does not rotate, so the localized variation for providing geometry to stator may be simpler,
It thus in some embodiments can be prior to the geometry of change rotor.
In some embodiments, between the grade entrance stator the blade be suitable between the grade inlet it is received
The part of the gas and suitable between the part of the gas received at the upstream entrance have geometry
The localized variation of shape, the localized variation of the geometry appear in be less than the stator vane half of the stator vane
In 10% length of diameter, the length is in the stator vane from the pore length on the inside of the entry pore
Radial point at 5% extend internally the stator vane the radius 20% region in.
In some embodiments, the angle of the outer portion of the blade is suitable for the inlet reception between the grade
The gas increased rate of pumping, and the angle of inner part be suitable in the inlet of the high vacuum grade it is received
The compression of the enhancing of the gas.
It, may for the gas that inlet inputs between grade although blade can be adjusted in many ways in some cases
Desirably there is increased rate of pumping, and the gas from high vacuum grade may need stronger compression.
In some embodiments, each row of stator in the row of stator has multiple blades, between the grade
The blade of inlet stator vanes row has quantity compared with the blade quantity for the inner radius arranged in the blade at outer diameter
Increased blade, inlet stator vanes row is the stator of the lower vacuum level of entrance between the neighbouring grade between the grade
Blade row.
In addition to the stator vane of distortion or alternatively, towards outer peripheral blade quantity can with towards center
Quantity it is different, quantity increases towards outer edge.
As described above, inlet rotor blade row and/or row of stator may be desired between adjustment grade, and some
In embodiment, other rotor blade and/or row of stator can be adjusted in a manner of this, are allowed to the entrance between grade and are turned
Sub and/or similar or identical row of stator mode adjusts next stator and/or rotor blade row on downstream direction.
Although between grade entrance can pump it is several it is not at the same level in any grade between, and actually it is several it is not at the same level it
Between can have entrance between multiple grades, but in some embodiments, between grade between at least one in entrance grade entrance in the first high of pump
Between vacuum level and the second lower vacuum level of pump.The first order of pump has the diameter depending on its chamber being attached to, and
This is usually dominated by standard.The rotor blade row of subsequent grade is less restricted, and can have the diameter bigger than the first order.
Other special and preferred aspect is elaborated in subsidiary independence and dependent claims.Dependent claims
Feature can be optionally in conjunction with the feature of independent claims, and other than being expressly recited in the claims, can
With in combination.
In the case where device characteristic, which is described as, to be operated to provide function, it should be understood that this includes providing the function
It can or be applicable in or be configured to provide the device characteristic of the function.
Detailed description of the invention
Embodiments of the present invention will now be further described with reference to the accompanying drawings, in which:
Fig. 1 is shown through the section according to prior art with the turbomolecular pump shunted；
Fig. 2 shows pass through the section according to the embodiment with the turbomolecular pump shunted；
Fig. 3 a shows the cross section of the entrance by turbomolecular pump according to the embodiment；
Fig. 3 b schematically shows the side view of the rotor blade in interstage rotor blade row；
Fig. 4 schematically shows the top view of rotor blade row；
Fig. 5 shows stator bridge；
Fig. 6 shows the view of turbomolecular pump according to the embodiment；With
Fig. 7 is shown by multiple chambers of turbo-molecular pump depletion according to the embodiment.
Specific embodiment
Before discussing embodiment in more detail, offer general introduction first.
Disclose a kind of pump including multiple pump stages.One pump stage includes in the rotor leaf for having larger root diameter
The rotor blade row of the small diameter of the pump stage upstream of piece row.The difference of diameter allows to pump " facing " pumping entrance between grade
Locate the gas entered.Gas is pumped into the grade with larger-diameter rotor blade row, and is axially directed to and is turned
On the outer edge of the exposure of blades.Special " adapter bridge " can be used between the stator stage for gas access.Due to
For the gas between this grade on axis identical with rotor rather than with more conventional radial method entrance, shunted so pump has
The benefit of pump, to provide the access to turbine portion to gas while reducing the height of pump.
Embodiment improves potential pump-conveying property while using reduced occupied space.This passes through using in rotor
The lesser turbine disk and the following biggish turbine disk are realized in upper part.Such arrangement arranges phase with more conventional shunt rotor
Seemingly.Difference is, gas approximately along the axis of rotor, in some embodiments by making following larger-diameter stage of turbine
Customization " stator bridge " component of vane tip exposure, between grade.Since leaf-level need not be spaced apart can be realized gas
Radially into so the length of rotor can reduce.
Fig. 2 shows the rotor blade of turbomolecular pump according to the embodiment rows.Fig. 1 shows traditional turbomolecular pump
Similar view.In Fig. 1, gas access 10 is the radial entrance with radial gas flows between the grade between two-stage, because
This needs sizable gap between the rotor blade row of two-stage, to provide sufficiently large entrance.
In the pump of Fig. 2, the gas inputted at entrance 10 between grade reaches in radial directions, and by gas deflection device
(not shown) is diverted to axial direction, so that it enters pump as axial stream above the upper rotor part 22a of the second level.Entry pore
Between the diameter of the rotor blade row 22 of the diameter and second level of the rotor blade row 20 of the first order.As can see, when with
When the traditional design of Fig. 1 compares, the rotor blade with small diameter is arranged in the embodiment of fig. 2 the first order and the second level
The distance between it is much smaller.In this regard, the typical range between the grade of embodiment is equal to or greater than the adjacent rotor in grade
The distance of the distance between blade row but the distance between the two rotor blades row being no more than in grade.
It is required that biggish distance is between the grade of conventional turbine molecular pump shown in FIG. 1 so as to the gas to enter pump at this grade
Body provides the enough entrances of size.Gas in the pump of Fig. 1 via the radial direction at the top of the upper rotor part across the second level input into
Enter, and the rotor blade by pumping is arranged from radial flow and is diverted to axial stream.In the embodiment of fig. 2, the gas of input exists
Input is turned to by gas deflection device, and is in axial direction input on the outer tip of rotor blade row of the second level.
Although entrance is small than the entrance of Fig. 1, this to a certain extent by by be directed into rotor blade more than these blades
The pumping effect compensation improved caused by input gas on the outer edge that the part at center rotates fastly.
In this regard, the difference for the diameter dimension that the size of the hole of the embodiment of Fig. 2 is arranged by rotor blade not at the same level
Limitation.In Fig. 1, pore-size depends on the distance between two-stage, thus the pore-size in the pump of increase Fig. 1 will increase pump
Length.
Fig. 3 a shows the cross section of entrance 10 between the grade by turbomolecular pump.Entrance 10 has flowing deflector 12
With hole 14.As can see, flowing deflector is using the axial orientation surface for deflecting the molecule radially reached
Form.Hole 14 is located in the sagittal plane vertical with the axis of pump, and the diameter that its size is arranged by two rotor blades
Difference constraint.Flow the outer circle for the pump stage that deflector surface 12 and axis are arranged in parallel, adjacent to the rotor blade including small diameter
Zhou Yanshen.In this embodiment, hole 14 is formed in stator bridge.
Fig. 3 b shows the side view of the rotor blade 24 of interstage rotor blade row 22a.The rotor blade of turbomolecular pump is arranged
With angled multiple blades, to drive the molecule for the gas for being pumped downward through pump.The angle of blade is bigger or blade
Inclination it is bigger, then it is more by the gas of capture, and it is higher by the speed given, to improve rate of pumping.Angle
More flat, then the compression provided by pump is stronger.
Since gas not at the same level is input to the mode of pump: be input to the gas of upstream stage across small diameter grade it is straight
Diameter input, while the outer edge of the gas that input inputs between grade towards larger-diameter grade inputs, so from each defeated
The gas entered has different flowings.Thus, between grade after entrance, two kinds of gases flow to few initially as almost separated
Prevalence is into the gas newly increased flows downward along the outer edge of pump, and inner radial of the gas from grade earlier above towards pump
Position pumping.This allows the blade of rotor or stator or both to be designed to tilt in such a, so that for not
Required pumping effect is given and the different piece arranged by rotor blade pumps with gas stream.
Fig. 3 b shows the side view of such rotor blade 24, wider part indicate in this case with compared with
The outer portion of big tilt angle.As the central axis C of pump, further it is shown that the position of entry pore 14.As can see,
The localized variation of geometry appears in region RLOn.In embodiment, radius R of the length limitation in the region to blade
10% or less, and it is located at region RaInterior somewhere, the region RaFrom the interior side point than entry pore with the 5% of radius length
More towards the more outer peripheral extension of blade, and towards 20% or smaller length of the length of the center extended blade of blade
Degree.In this way, the localized variation of geometry appear in two strands of gas streams from different entrances it is adjacent to each other/be overlapped
In region.
The inner part between grade after entrance of blade mainly pumps the gas pumped from grade earlier above, meanwhile, outside
The main pumping received gas in inlet between grade in part.
In the embodiment of Fig. 3 b, design is such, so that the blade for the gas that inlet inputs between grade
Pumping performance is absorbed in capture and acceleration, and has steeper blade angle.Blade towards inner part is relatively flat, to provide to next
From the good compression of the gas compared with prime, to avoid any reflux of gas.Thus, blade, which has, to be had towards outside
The distortion property of steeper angle and the more flat angle towards inside.
The variation of blade angle will lead to the localized variation for changing the geometry of point of leading position around two plumes.It should
Point is close to the excircle of the rotor of lesser upstream stage, and with moving inward from the point, the gas mainly pumped is to come to be somebody's turn to do
Upstream stage, meanwhile, on outer edge is the gas inputted by entrance between grade.In fact, the radius along blade has
The geometry-variable of the localized variation of geometry.
Although Fig. 3 b shows the angle change of rotor blade, in some embodiments, geometry is provided by stator vane
The localized variation of shape, in this case, the variation of angle are designed to be responsible for the pumping performance as needed for leading gas stream.
Alternatively and/or additionally, the increased quantity of the quantity of rotor blade and stator vane can becomes towards outer diameter
Change.In other embodiments, root diameter and/or stator diameter can change towards entrance between grade, to provide the diameter of taper, make
They arrange with blade and gradually shorten close to entrance between grade.
Fig. 4 shows the view about interstage rotor blade row 22a, and which illustrates the changes of the form of leaf curling and angle
Change, so that in this embodiment, the outer portion of blade is more tilted than the inner part of blade.
Fig. 5 shows stator bridge 30 according to the embodiment in cross-section.Stator bridge 30 includes ring, and the ring, which has, to be had
The annular inner portion 32 of internal diameter corresponding with the diameter of lesser blade 20 and with being configured about larger-diameter rotor blade
The outer ring portion 34 of 32 diameter.Connector 33 keeps together two rings, the gap between these connectors be used as into
Oral pore gap 14.
Fig. 6 shows the view of the turbomolecular pump 5 of the stator bridge 30 between the two-stage shown in Fig. 5.
Fig. 7 is shown by multiple chambers of turbo-molecular pump depletion according to the embodiment.Multiple chambers 40,42 and 44 have
Higher and higher vacuum.Chamber 40 is evacuated by initial pump (not shown), and chamber 42 and 44 is not by the at the same level of turbomolecular pump 5
It evacuates.Highest vacuum level 44 is with the entrance for being connected to the upper end with standard-sized turbomolecular pump 5.Chamber 42 has
Be connected to pump 5 grade between entrance 10 entrance.Entrance 10 includes hole 14 in the transverse plane of pump and in the radius with pump
Flow deflection 12 in vertical axial plane, so that flow deflection is substantially parallel with pump shaft line.
Although having referred to attached drawing herein is disclosed in detail illustrative embodiments of the invention, it will be appreciated that, this hair
It is bright to be not limited to exact embodiment, and without departing from as of the invention as defined by appended claims and they equivalent
Various change and modification can be realized by those skilled in the art wherein in the case where range.
Appended drawing reference
5 turbomolecular pumps
Entrance between 10 grades
12 flow deflections
14 entry pores
The rotor blade of 20 first order is arranged
The rotor blade of 22 second level is arranged
The rotor blade row of the second level of entrance between 22a adjacent levels
The rotor blade of 24 rotor blades row 22a
30 stator bridges
The inner ring of 32 stator bridges
The outer ring of 34 stator bridges
Connector between 33 outer rings and inner ring
40 low vacuum chambers
42 intergrade vacuum chambers
44 high-vacuum chambers
Claims (24)
1. a kind of multistage turbine molecular pump, comprising:
High vacuum grade comprising multiple rotor blade rows；
Lower vacuum level comprising the diameter multiple rotor leaves bigger than the diameter that the rotor blade of the high vacuum grade is arranged
Piece row；
Entrance between grade, is used between the high vacuum grade and the lower vacuum level gas inputting the turbo-molecular
Pump, the entrance extend to the radial position on the inside of the larger diameter from the excircle of the pump, and including in axis
The gas guide structure that the gas enters the pump is booted up to side.
2. multistage turbine molecular pump according to claim 1, wherein the entrance includes the gas guide structure and extremely
A few hole, diameter of at least one the described hole in the larger diameter and at least one rotor of the high vacuum grade
Between be located at the pump radially external position.
3. multistage turbine molecular pump according to claim 2, wherein at least one described hole substantially with the pump
In the vertical plane of axis.
4. multistage turbine molecular pump according to claim 2 or 3, wherein the pump includes the circle for being located around the pump
Multiple holes of the different location in week.
5. multistage turbine molecular pump according to any preceding claims, wherein at least the one of the gas guide structure
Part includes the surface of substantially axial orientation.
6. multistage turbine molecular pump according to claim 5, wherein the gas guide structure includes from the pump
The surface being generally radially oriented at excircle becomes the substantially axis at the radially innermost point of the gas guide structure
To the surface on the surface of orientation.
7. multistage turbine molecular pump according to any preceding claims, wherein at least the one of the gas guide structure
The excircle of a part of the neighbouring high vacuum grade in part or the outer circumferential of a part by the high vacuum grade
At.
8. multistage turbine molecular pump according to any preceding claims, the pump includes for bridging described compared with Gao Zhen
Stator bridge component between larger-diameter stator in the stator of small diameter in vacant level and the lower vacuum level, it is described
Stator bridge component includes the ring in plane substantially vertical with the axis of the pump, and the ring includes multiple holes.
9. multistage turbine molecular pump according to claim 8, wherein the internal diameter of the ring includes the high vacuum grade
The diameter of stator, and the outer diameter of the ring includes the larger diameter of the stator in the lower vacuum level.
10. multistage turbine molecular pump according to claim 8 or claim 9, wherein the stator bridge includes being equal to or more than two
The distance between adjacent rotor blades row and it is equal to or less than non-conterminous but by rotor blade row two separated from each other
The height of the distance between rotor blade row.
11. multistage turbine molecular pump according to any preceding claims, wherein described turn in the high vacuum grade
At least some of blades row rotor blade row has different diameters, towards at least one rotor of the lower vacuum level
Diameter be less than diameter from the lower farther rotor of vacuum level.
12. multistage turbine molecular pump according to claim 11, wherein the rotor blade in the high vacuum grade
Row has the diameter tapered towards the lower vacuum level.
13. multistage turbine molecular pump according to any preceding claims, wherein each of described rotor blade row turns
Blades row has multiple blades, and the blade that inlet rotor blade is arranged between the grade has to be entered between the grade suitable for pumping
Mouthful locate the received gas the blade outer portion angle and suitable for pumping in the inlet of the high vacuum grade
The angle of the inner part of the received gas, between the grade inlet rotor blade row be entrance between the neighbouring grade it is described compared with
The rotor blade of low vacuum grade is arranged.
14. multistage turbine molecular pump according to claim 13, wherein the blade of inlet rotor is suitable between the grade
In pumping between the grade part of the received gas in inlet be suitable for pumping in the high vacuum grade entrance
Locate the localized variation between the part of the received gas with geometry, the localized variation of the geometry goes out
In 10% length of the radius less than the rotor blade of the present rotor blade.
15. multistage turbine molecular pump according to claim 14, the length of the rotor is in the rotor blade
It extends internally the radius of the rotor blade from the radial point at the 5% of the pore length described on the inside of the entry pore
20% region in.
16. multistage turbine molecular pump described in any one of 3 to 15 according to claim 1, wherein the blade it is described outer
The partial angle is suitable for the increased rate of pumping of the received gas in inlet between the grade, and the inside
The angle divided is suitable for the compression in the enhancing of the received gas in the inlet of the high vacuum grade.
17. multistage turbine molecular pump according to claim 16, wherein in sagittal plane, that is with the pump
Angle between the vertical plane of the axis and the outer portion of the blade is greater than in the sagittal plane and the leaf
Angle between the inner part of piece.
18. multistage turbine molecular pump according to any preceding claims, wherein each of described rotor blade row turns
Blades row has multiple blades, and the blade that inlet rotor blade is arranged between the grade has smaller than the larger diameter straight
At least some of described blade of diameter, inlet rotor blade row is the described lower true of entrance between the neighbouring grade between the grade
The rotor blade of vacant level is arranged.
19. multistage turbine molecular pump according to any preceding claims, including multiple row of stator, enter between the grade
The blade of mouthful row of stator, which has, is suitable for the outer of between the grade blade of the pumping of the received gas in inlet
The angle of the inner part of partial angle and the pumping suitable for the received gas in inlet in the high vacuum grade, the grade
Between inlet stator vanes row be the lower vacuum level of entrance between the neighbouring grade the row of stator.
20. multistage turbine molecular pump according to claim 19, wherein the blade of entrance stator is suitable between the grade
In between the grade part of the received gas in inlet be suitable in high vacuum grade inlet it is received
With the localized variation of geometry between the part of the gas, the localized variation of the geometry appears in described
In 10% length of the radius less than the stator vane of stator vane.
21. multistage turbine molecular pump according to claim 20, the length the stator vane from it is described enter
Radial point on the inside of oral pore gap at the 5% of the pore length extend internally the stator vane the radius 20% region
It is interior.
22. multistage turbine molecular pump described in any one of 9 to 21 according to claim 1, wherein the blade it is described outer
Increased rate of pumping of the partial angle suitable for the received gas in inlet between the grade, and inner part
Angle is suitable for the compression in the enhancing of the received gas in the inlet of the high vacuum grade.
23. multistage turbine molecular pump according to any preceding claims, wherein each of described row of stator is fixed
Blades row has multiple blades, the blade that inlet stator vanes are arranged between the grade and the inner radius in blade row
Blade quantity is compared has the increased blade of quantity at outer diameter, and inlet stator vanes row is entered between the grade between the grade
The row of stator of the lower vacuum level of mouth.
24. multistage turbine molecular pump according to any preceding claims, wherein the high vacuum grade is the pump
The first order, and the lower vacuum level is the second level of the pump, and the first order includes across described in the first order
The entrance that the diameter of rotor blade row extends.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1700992.9 | 2017-01-20 | ||
| GB1700992.9A GB2558921B (en) | 2017-01-20 | 2017-01-20 | A multiple stage turbomolecular pump with inter-stage inlet |
| PCT/GB2018/050074 WO2018134566A1 (en) | 2017-01-20 | 2018-01-11 | A multiple stage turbomolecular pump with inter-stage inlet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110177950A true CN110177950A (en) | 2019-08-27 |
| CN110177950B CN110177950B (en) | 2021-12-28 |
Family
ID=58463032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880007722.6A Active CN110177950B (en) | 2017-01-20 | 2018-01-11 | Multistage turbomolecular pump with interstage inlet |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20190345948A1 (en) |
| EP (1) | EP3571414A1 (en) |
| JP (1) | JP2020505546A (en) |
| CN (1) | CN110177950B (en) |
| GB (1) | GB2558921B (en) |
| WO (1) | WO2018134566A1 (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11230085A (en) * | 1997-11-27 | 1999-08-24 | Boc Group Plc:The | Improvement of vacuum pump |
| US20020076317A1 (en) * | 2000-12-18 | 2002-06-20 | Applied Materials, Inc. | Turbo-molecular pump having enhanced pumping capacity |
| US6412173B1 (en) * | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
| EP1302667A1 (en) * | 2001-10-15 | 2003-04-16 | The BOC Group plc | Vacuum pumps |
| CN1878962A (en) * | 2003-11-13 | 2006-12-13 | 莱博尔德真空技术有限责任公司 | Multi-stage friction vacuum pump |
| US20110311348A1 (en) * | 2009-02-28 | 2011-12-22 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
| US9670931B2 (en) * | 2013-01-22 | 2017-06-06 | Agilent Technologies Inc. | Rotary vacuum pump |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2229724B2 (en) * | 1972-06-19 | 1980-06-04 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbo molecular pump |
| DE102007027354A1 (en) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Turbo molecular pump |
| JP5786639B2 (en) * | 2011-10-24 | 2015-09-30 | 株式会社島津製作所 | Turbo molecular pump |
-
2017
- 2017-01-20 GB GB1700992.9A patent/GB2558921B/en active Active
-
2018
- 2018-01-11 US US16/478,741 patent/US20190345948A1/en not_active Abandoned
- 2018-01-11 CN CN201880007722.6A patent/CN110177950B/en active Active
- 2018-01-11 JP JP2019538604A patent/JP2020505546A/en active Pending
- 2018-01-11 EP EP18700813.1A patent/EP3571414A1/en active Pending
- 2018-01-11 WO PCT/GB2018/050074 patent/WO2018134566A1/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11230085A (en) * | 1997-11-27 | 1999-08-24 | Boc Group Plc:The | Improvement of vacuum pump |
| US6412173B1 (en) * | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
| US20020076317A1 (en) * | 2000-12-18 | 2002-06-20 | Applied Materials, Inc. | Turbo-molecular pump having enhanced pumping capacity |
| EP1302667A1 (en) * | 2001-10-15 | 2003-04-16 | The BOC Group plc | Vacuum pumps |
| CN1878962A (en) * | 2003-11-13 | 2006-12-13 | 莱博尔德真空技术有限责任公司 | Multi-stage friction vacuum pump |
| US20110311348A1 (en) * | 2009-02-28 | 2011-12-22 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
| US9670931B2 (en) * | 2013-01-22 | 2017-06-06 | Agilent Technologies Inc. | Rotary vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018134566A1 (en) | 2018-07-26 |
| GB201700992D0 (en) | 2017-03-08 |
| EP3571414A1 (en) | 2019-11-27 |
| US20190345948A1 (en) | 2019-11-14 |
| CN110177950B (en) | 2021-12-28 |
| GB2558921A (en) | 2018-07-25 |
| GB2558921B (en) | 2020-06-17 |
| JP2020505546A (en) | 2020-02-20 |
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