CN110166020A - Filter and duplexer - Google Patents

Filter and duplexer Download PDF

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Publication number
CN110166020A
CN110166020A CN201910471259.7A CN201910471259A CN110166020A CN 110166020 A CN110166020 A CN 110166020A CN 201910471259 A CN201910471259 A CN 201910471259A CN 110166020 A CN110166020 A CN 110166020A
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CN
China
Prior art keywords
filter
group
inductance
controllable impedance
resonator
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Granted
Application number
CN201910471259.7A
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Chinese (zh)
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CN110166020B (en
Inventor
罗捷
蔡文必
谢祥政
尤建发
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Integrated Circuit Co Ltd Is Pacified By Xiamen City Three
Xiamen Sanan Integrated Circuit Co Ltd
Original Assignee
Integrated Circuit Co Ltd Is Pacified By Xiamen City Three
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Application filed by Integrated Circuit Co Ltd Is Pacified By Xiamen City Three filed Critical Integrated Circuit Co Ltd Is Pacified By Xiamen City Three
Priority to CN201910471259.7A priority Critical patent/CN110166020B/en
Publication of CN110166020A publication Critical patent/CN110166020A/en
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H11/00Networks using active elements
    • H03H11/02Multiple-port networks
    • H03H11/34Networks for connecting several sources or loads working on different frequencies or frequency bands, to a common load or source
    • H03H11/344Duplexers

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Abstract

It includes: resonator group that the application, which provides a kind of filter and duplexer, the filter, is arranged on wafer;Controllable impedance group, setting in the dielectric layer, and connect resonator group, adjustment point are provided in controllable impedance group, and the inductance value of controllable impedance group is adjusted for the disconnection by changing adjustment point, and filter is made to have corresponding electrical matching degree.The application realizes by adjusting the inductance value of controllable impedance group, so that filter is had corresponding electrical matching degree, to improve the running parameter stability of filter.

Description

Filter and duplexer
Technical field
This application involves technical field of semiconductors, in particular to a kind of filter and duplexer.
Background technique
Duplexer is two-way three end filter.Duplexer include the different bandpass filter of two centre frequencies and Impedance matching network.
In the different bandpass filter of two centre frequencies, the lower bandpass filter of centre frequency is transmission channel filter Wave device (Tx), the higher bandpass filter of another centre frequency are receiving channel filter (Rx).Rx filter connects from antenna The collection of letters number, and the signal of special frequency band is filtered.Tx filter is only to the spy in the signal generated within a communication device The signal for determining frequency band is filtered, and filtered signal is supplied to antenna.Duplexer is using transmitting signal and receives signal Frequency difference both signals are filtered, thus realize transmitting signal and receive signal separation.Constitute this high property The resonator of the acoustic wave filter of energy mainly includes thin film bulk acoustic wave resonator and SAW resonator.
The impedance matching network main function of duplexer is that suitable impedance match is provided for filter, so that duplexer Steady operation.
The parameter of the impedance matching network of current specific filter generally immobilizes.The filter constituted with body wave resonator For wave device, its craft precision of body wave resonator is high, under identical technological parameter, the opering characteristic of electric apparatus for the different filters produced With different, therefore, it is necessary to arrange in pairs or groups different impedance matching networks (such as matching inductance) for filter, make itself and duplex Device has suitable matching degree.And under existing technique, the parameter of matching inductance be usually it is fixed, can not adaptability adjustment with The matching degree of filter causes the running parameter stability of filter bad.
Summary of the invention
The embodiment of the present application is designed to provide a kind of filter and duplexer, to realize by adjusting controllable impedance The inductance value of group makes filter have corresponding working band.
The embodiment of the present application first aspect provides a kind of filter, comprising: resonator group is arranged on wafer;It is adjustable Inductance group, setting in the dielectric layer, and connect resonator group, adjustment point are provided in controllable impedance group, for being adjusted by changing The inductance value of the disconnection adjustment controllable impedance group of integral point, makes filter have corresponding electrical matching degree.
Further, controllable impedance group includes at least two inductance, the series connection of at least two inductance and/or parallel connection.
Further, at least two inductance, each inductance is provided with adjustment point.
Further, at least two inductance, the adjustment point of each inductance is drawn in dielectric layer surface.
Further, controllable impedance group includes the conducting route in dielectric layer neutral body complications.
Further, controllable impedance group is formed with the first tie point in dielectric layer surface.
Further, resonator group is formed with the second tie point in dielectric layer surface.
Further, resonator group includes multiple bulk acoustic wave resonators.
Further, adjustment point is laser disconnection point.
The embodiment of the present application second aspect provides a kind of duplexer, comprising: such as the filter of the embodiment of the present application first aspect Wave device, wherein
First filter, including the first resonator group and the first controllable impedance group;
Second filter, including the second resonator group and the second controllable impedance group, second filter and second filter are folded Layer setting, and connected inside lamination;
Antenna is separately connected second filter and second filter.
Filter and duplexer provided by the present application, by the way that resonator group and controllable impedance group are integrated in same filtering In device, controllable impedance group is provided with adjustment point, realizes the inductance value that controllable impedance group is adjusted by the disconnection for changing adjustment point, Make filter that there is corresponding electrical matching degree.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application will make below to required in the embodiment of the present application Attached drawing is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore should not be seen Work is the restriction to range, for those of ordinary skill in the art, without creative efforts, can be with Other relevant attached drawings are obtained according to these attached drawings.
Fig. 1 is the schematic diagram of the duplexer of one embodiment of the application;
Fig. 2 is the structural schematic diagram of the first filter of one embodiment of the application;
Fig. 3 is the schematic diagram of the section structure of the first filter of one embodiment of the application;
Fig. 4 is the schematic equivalent circuit of the first filter of one embodiment of the application;
Fig. 5 is the schematic equivalent circuit of the first filter of one embodiment of the application.
Appended drawing reference:
10- duplexer, 100a- first filter, 100b- second filter, 200- antenna, 110a- the first resonator group, 110b- the second resonator group, 120a- the first controllable impedance group, 120b- the second controllable impedance group, 130- dielectric layer, 140- are brilliant Circle, 121- adjust point, and route, the second tie point of 111-, the first tie point of 123- is connected in 122-.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application is described.? In the description of the present application, term " first ", " second " etc. are only used for distinguishing description, are not understood to indicate or imply relatively heavy The property wanted.
Fig. 1 is please referred to, is the schematic diagram of the duplexer 10 of one embodiment of the application, the duplexer 10 of the present embodiment wraps It includes: first filter 100a, second filter 100b and antenna 200.First filter 100a includes the first resonator group 110a With the first controllable impedance group 120a.Second filter 100b includes the second resonator group 110b and the second controllable impedance group 120b, (being the schematic diagram that two panels filter lamination separates in Fig. 1) is arranged with second filter 100b lamination in first filter 100a, and It is connected inside lamination.
Antenna 200 is separately connected first filter 100a and second filter 100b.The filter of first filter 100a and second The parameter of wave device 100b is different, and, as transmitting terminal, another is used cooperatively as receiving end with antenna 200 for one of them.Each The inductance value of the controllable impedance group of filter is adjustable so that different filters have different working bands, make its with Duplexer 10 has suitable matching degree.
As shown in Fig. 2, its structural schematic diagram for the first filter 100a of one embodiment of the application, comprising: first is humorous Shake device group 110a, is arranged on wafer 140.First controllable impedance group 120a is arranged in dielectric layer 130 (refering to Fig. 3), and even It meets the first resonator group 110a, the first resonator group 110a and the first controllable impedance group 120a is integrated in same chips.The It is provided with adjustment point 121 on one controllable impedance group 120a, adjusts the first controllable impedance for the disconnection by changing adjustment point 121 The inductance value of group 120a makes first filter 100a have corresponding electrical matching degree, avoids first caused by fixed inductance value The bad problem of the running parameter stability of filter 100a.
As shown in figure 3, its perspective cross section structural schematic diagram for the first filter 100a of one embodiment of the application, first Controllable impedance group 120a includes at least two inductance, the series connection of at least two inductance and/or parallel connection.First controllable impedance group 120a packet Include the conducting route 122 in dielectric layer 130 neutral body complications.First controllable impedance group 120a is by inductance L1, inductance L2, inductance L3 It forms with inductance L4, is formed respectively by the conducting route 122 in dielectric layer 130 neutral body complications.
In inductance L1, inductance L2, inductance L3 and inductance L4, each inductance is provided with adjustment point 121.Adjusting point 121 is Laser disconnection point, for being disconnected adjustment point 121 by laser technology.The adjustment point 121 of each inductance can be led by metal Line is drawn on 130 surface of dielectric layer, and forms laser disconnection point as adjustment point 121 on 130 surface of dielectric layer.
In first controllable impedance group 120a, according to preset connection relationship by inductance L1, inductance L2, inductance L3 and inductance After L4 connection, connecting pin can be drawn on 130 surface of dielectric layer, and form the first tie point 123 (refering to Fig. 4).First is humorous Shake device group 110a, is arranged on wafer 140, for example can form the first resonator group 110a in the one side of wafer 140, in wafer 140 another side forms the first controllable impedance group 120a.The electrode of first resonator group 110a can be drawn by plain conductor On 130 surface of dielectric layer, and form the second tie point 111.First tie point 123 is connect with the second tie point 111, so that first Resonator group 110a is connect with the first controllable impedance group 120a.
As shown in figure 4, its schematic equivalent circuit for the first filter 100a of one embodiment of the application, first is adjustable Inductance L1, inductance L2, inductance L3 in inductance group 120a are connected with inductance L4 equivalent circuit, wherein inductance L1 and inductance L3 are simultaneously Connection, inductance L2 and inductance L4 are in parallel, and the inductive circuit after parallel connection is connected, and the first tie point is drawn in one end of series connection node 123, the other end ground connection of series connection node.Laser disconnection is set at the both ends of inductance L1, inductance L2, inductance L3 and inductance L4 respectively Point a, wherein adjustable point can be shared between two adjacent inductance.For example inductance L1 and inductance L2 have shared an adjustment Point 121.It is formed between first tie point 123 on 130 surface of dielectric layer and the second tie point 111 and is led by metal wire connection It is logical, and then it connect the first resonator group 110a with the first controllable impedance group 120a.
As shown in figure 5, another schematic equivalent circuit of the first filter 100a for one embodiment of the application, first Resonator group 110a includes multiple bulk acoustic wave resonators.By taking the first resonator group 110a of ladder pattern distribution as an example, it is assumed that first Resonator group 110a is made of resonator Y1, resonator Y2, resonator Y3, resonator Y4 resonator Y5.
The one end resonator Y4 is connected to the node of resonator Y1 resonator Y2, and the other end draws second tie point 111.The one end resonator Y5 is connected to the node of resonator Y2 resonator Y3, and the other end draws another the second tie point 111.
First controllable impedance group 120a has two groups, respectively inductance group 1201 and inductance group 1202, the group of inductance group 1201 At identical as the connection relationship of inductance L1 in Fig. 4, inductance L2, inductance L3 and inductance L4, the above-mentioned description to Fig. 4 is please referred to.String Draw one first tie point 123a, the first tie point 123a and the second tie point drawn through resonator Y5 in one end of interlink point 11a connection.
Inductance group 1202 is made of inductance L5, inductance L6, inductance L7 and inductance L8, wherein and inductance L5 is in parallel with inductance L7, Inductance L6 and inductance L8 are in parallel, and the inductive circuit after parallel connection is connected, and first tie point is drawn in one end of series connection node 123b, the first tie point 123b are connect with the second tie point 11b drawn through resonator Y4, another termination of series connection node Ground.
The above is only preferred embodiment of the present application, are not intended to limit this application.It is all in spirit herein and Within principle, any modification, equivalent replacement, improvement and so on be should be included within the scope of protection of this application.

Claims (10)

1. a kind of filter characterized by comprising
Resonator group is arranged on wafer;
Controllable impedance group, setting in the dielectric layer, and connect the resonator group, are provided with adjustment in the controllable impedance group Point adjusts the inductance value of the controllable impedance group for the disconnection by changing the adjustment point, the filter is made to have phase The electrical matching degree answered.
2. filter according to claim 1, which is characterized in that the controllable impedance group includes at least two inductance, institute State the series connection of at least two inductance and/or parallel connection.
3. filter according to claim 2, which is characterized in that at least two inductance, each inductance is equal It is provided with adjustment point.
4. filter according to claim 3, which is characterized in that at least two inductance, each inductance Adjustment point is drawn in the dielectric layer surface.
5. filter according to claim 1, which is characterized in that it is neutral that the controllable impedance group is included in the dielectric layer The conducting route of body complications.
6. filter according to claim 1, which is characterized in that the controllable impedance group is formed in the dielectric layer surface There is the first tie point.
7. filter according to claim 1, which is characterized in that the resonator group is formed in the dielectric layer surface Second tie point.
8. filter according to claim 1, which is characterized in that the resonator group includes multiple bulk acoustic wave resonators.
9. filter according to claim 1, which is characterized in that the adjustment point is laser disconnection point.
10. a kind of duplexer characterized by comprising two such as filters according to any one of claims 1 to 9, Wherein,
First filter, including the first resonator group and the first controllable impedance group;
Second filter, including the second resonator group and the second controllable impedance group, the second filter and second filtering The setting of device lamination, and connected inside lamination;
Antenna is separately connected the second filter and the second filter.
CN201910471259.7A 2019-05-31 2019-05-31 Filter and duplexer Active CN110166020B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910471259.7A CN110166020B (en) 2019-05-31 2019-05-31 Filter and duplexer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910471259.7A CN110166020B (en) 2019-05-31 2019-05-31 Filter and duplexer

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CN110166020A true CN110166020A (en) 2019-08-23
CN110166020B CN110166020B (en) 2020-04-24

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103888095A (en) * 2014-02-21 2014-06-25 广东风华高新科技股份有限公司 Diplexer and multiplexer
CN105577200A (en) * 2014-10-29 2016-05-11 联发科技(新加坡)私人有限公司 Integrated circuit, wireless communication unit, and method for antenna matching
CN105659380A (en) * 2013-10-16 2016-06-08 瑞典爱立信有限公司 Tunable inductor arrangement, transceiver, method and computer program
CN106571788A (en) * 2016-11-03 2017-04-19 青岛海信移动通信技术股份有限公司 Multiband matching circuit, radio frequency circuit, antenna system and mobile terminal
US20180358947A1 (en) * 2017-06-08 2018-12-13 Qorvo Us, Inc. Filter circuits having acoustic wave resonators in a transversal configuration

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105659380A (en) * 2013-10-16 2016-06-08 瑞典爱立信有限公司 Tunable inductor arrangement, transceiver, method and computer program
CN103888095A (en) * 2014-02-21 2014-06-25 广东风华高新科技股份有限公司 Diplexer and multiplexer
CN105577200A (en) * 2014-10-29 2016-05-11 联发科技(新加坡)私人有限公司 Integrated circuit, wireless communication unit, and method for antenna matching
CN106571788A (en) * 2016-11-03 2017-04-19 青岛海信移动通信技术股份有限公司 Multiband matching circuit, radio frequency circuit, antenna system and mobile terminal
US20180358947A1 (en) * 2017-06-08 2018-12-13 Qorvo Us, Inc. Filter circuits having acoustic wave resonators in a transversal configuration

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