CN110164797A - Wafer dehydration device and equipment - Google Patents
Wafer dehydration device and equipment Download PDFInfo
- Publication number
- CN110164797A CN110164797A CN201910448549.XA CN201910448549A CN110164797A CN 110164797 A CN110164797 A CN 110164797A CN 201910448549 A CN201910448549 A CN 201910448549A CN 110164797 A CN110164797 A CN 110164797A
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- Prior art keywords
- shield
- driving
- wafer
- guide rail
- sliding
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Abstract
A kind of wafer dehydration device and equipment provided by the embodiments of the present application, it is related to semiconductor processing technology field, wafer dehydration device includes: cabinet, driving device, carriage and gaily decorated basket carrier, driving device is arranged in cabinet, driving device is connect with the carriage, and the gaily decorated basket carrier is connect with the carriage；The driving device is for driving the gaily decorated basket carrier to slide on the carriage, to be dehydrated in sliding process to wafer by the gaily decorated basket carrier, driving device in wafer dehydration device drives carriage to be slided, gaily decorated basket carrier is connect with carriage, to which carriage can drive gaily decorated basket carrier to slide together, and then gaily decorated basket carrier is in sliding process, the surface tension of water makes the water of crystal column surface fall off from crystal column surface, to reduce the ejected wash water of crystal column surface attachment, and then guarantee the cleaning of the crystal column surface after processing.
Description
Technical field
This application involves semiconductor processing technology fields, in particular to a kind of wafer dehydration device and equipment.
Background technique
In field of semiconductor processing, to semiconductor crystal wafer be worked into polishing after the completion of, need to carry out wafer clear
It washes, to wash the pollutant of crystal column surface, the wafer by pure water cleaning carries out subsequent drying operation, it will be able to complete whole
The process of a wafer, but in the prior art, the wafer after pure water is cleared up is in drying, due to brilliant after cleaning process
Circular surfaces may be attached with a large amount of ejected wash water, and therefore, the crystal column surface after drying is easy to remain stains or washmarking, cause
There are sordid problems for the wafer of processing.
Summary of the invention
In view of this, the embodiment of the present application is designed to provide a kind of wafer dehydration device and equipment, it is existing to improve
There is the problem of stains to wafer handling ease in technology.
In a first aspect, the embodiment of the present application provides a kind of wafer dehydration device, the wafer dehydration device includes: case
Body, driving device, carriage and gaily decorated basket carrier, the driving device are arranged in the cabinet, the driving device with
The carriage connection, the gaily decorated basket carrier are connect with the carriage；The driving device is for driving the flower
Basket carrier slides on the carriage, to be dehydrated in sliding process to wafer by the gaily decorated basket carrier.
During above-mentioned realization, the driving device in wafer dehydration device drives carriage to be slided, and the gaily decorated basket is held
Carrier is connect with carriage, so that carriage can drive gaily decorated basket carrier to slide together, and then gaily decorated basket carrier is in cunning
During dynamic, the surface tension of water splits away off the water of crystal column surface from crystal column surface, to reduce crystal column surface attachment
Ejected wash water, and then guarantee processing after crystal column surface cleaning.
Optionally, the carriage includes the first guide rail, the second guide rail and sliding panel, the sliding panel and the gaily decorated basket
Carrier connection, first guide rail and second guide rail are arranged in parallel on the cabinet, the sliding panel sliding setting
On first guide rail and second guide rail；The sliding panel is used under the driving of the driving device described first
It is slided on guide rail and second guide rail, to drive the gaily decorated basket carrier to slide.
During above-mentioned realization, the first guide rail and the second guide rail are arranged in parallel on cabinet, and sliding panel is slidably arranged in
On first guide rail and the second guide rail, sliding panel can under the drive of the drive on the first guide rail and the second guide rail smoothly
Sliding drives wafer in sliding to can smoothly slide together with sliding panel with the gaily decorated basket carrier of sliding panel connection
In the process, water can fall off from crystal column surface, and then realize the dehydration to wafer.
Optionally, the carriage further includes the first optoelectronic switch and the second optoelectronic switch, first optoelectronic switch
One end of first guide rail is set, and the other end of first guide rail is arranged in second optoelectronic switch；Described first
Optoelectronic switch is used for when the sliding panel slides to one end of first guide rail, is controlled the driving device and is stopped driving work
Make；Second optoelectronic switch is used for when the sliding panel slides to the other end of first guide rail, controls the driving dress
Set stopping driving work.
During above-mentioned realization, the first optoelectronic switch and the second optoelectronic switch in carriage are separately positioned on first
The both ends of guide rail, when sliding panel slides to any end of the first guide rail, that is, the sliding panel is the range that will exceed sliding
When, the first optoelectronic switch or the second optoelectronic switch can control driving device and stop driving work, thus stop sliding panel after
Continuous sliding, so that the gaily decorated basket carrier connecting with sliding panel can drive wafer to be slided.
Optionally, the driving device includes motor, driving pulley, toothed belt and transmission device, the motor with it is described
Driving pulley connection, the driving pulley connect by the toothed belt with the transmission device, the transmission device with it is described
Sliding panel connection；The motor is for driving the driving pulley to rotate, and the driving pulley is for passing through the toothed belt band
The transmission device is moved be driven and then the sliding panel is driven to slide on first guide rail and second guide rail.
During above-mentioned realization, motor can drive driving pulley to be rotated, and then driving pulley passes through toothed belt
The sliding panel for driving transmission device to be driven, therefore connect with transmission device can be under the drive of transmission device, first
It is smoothly slided on guide rail and the second guide rail, to guarantee that gaily decorated basket carrier can smoothly slide together with sliding panel, in turn
Drive wafer under water can fall off from crystal column surface during sliding, to realize the dehydration to wafer.
Optionally, the driving device further includes electric machine support, and the electric machine support is fixed on the cabinet, institute
Motor is stated to be fixedly mounted on the electric machine support.
During above-mentioned realization, motor is mounted on the electric machine support being fixedly installed on cabinet, to guarantee motor
Carry out power output that can be stable, thus guarantee that gaily decorated basket carrier is smoothly slided driven by the motor, Jin Erhua
Basket carrier can drive wafer smoothly to be slided, under water can fall off from crystal column surface during sliding, with reality
Now wafer is dehydrated.
Optionally, the transmission device includes that drive pulley, screw mechanism and transmission connection plate, the drive pulley pass through
The toothed belt is connect with the driving pulley, and the drive pulley is connect with the screw mechanism, the screw mechanism and institute
Transmission connection plate connection is stated, the transmission connection plate is fixedly connected with the sliding panel；The drive pulley is used in the drive
It is rotated under the drive of movable belt pulley and the toothed belt, to drive the screw mechanism to be driven；The screw mechanism is used
In driving the transmission connection plate movement, so that the transmission connection strip moves the sliding panel sliding.
During above-mentioned realization, drive pulley may be rotated under the drive of driving pulley, drive pulley and silk
The connection of thick stick mechanism, drive pulley can drive screw mechanism to be rotated, and the transmission connection plate connecting with screw mechanism is with lead screw
The rotation of mechanism carries out operation up and down, so that sliding panel can be slided smoothly under the drive of transmission connection plate.
Optionally, the screw mechanism includes lead screw, nut frame and nut, one end of the lead screw and the drive pulley
It is fixedly connected, the lead screw passes through the nut, and the nut frame is fixedly connected with the nut, the nut frame and the biography
Dynamic connecting plate is fixedly connected；The lead screw is rotated under the drive of the drive pulley；The nut is in the lead screw
It is moved on the lead screw under rotation, to drive the transmission connection plate movement by the nut frame.
During above-mentioned realization, lead screw may be rotated under the drive of drive pulley, the nut on lead screw with
The rotation of lead screw can move up and down on lead screw, and nut frame is fixedly connected with nut, so that nut frame can drive biography
The gaily decorated basket carrier that dynamic connecting plate moves up and down with nut, and then connect with sliding panel can under the drive of transmission connection plate
With smoothly sliding up and down.
Optionally, it is provided with shield mounting plate on the outside of the cabinet, it is anti-that first is provided in the shield mounting plate
Shield and the second shield, one end of first shield is fixedly connected with the first plate of the shield mounting plate, described
The other end of first shield is connect by fixing piece with the sliding panel, one end of second shield and the shield
Second plate opposite with first plate of mounting plate is fixedly connected, and the other end of second shield passes through the fixing piece
It is connect with the sliding panel.
During above-mentioned realization, the first shield and the second shield that are arranged in shield mounting plate by with protection
The connection of cover mounting plate and connection with fixing piece, it is ensured that substance outside the enclosure will not destroy the sliding of box house
The structure of device and driving device, to guarantee the normal work of wafer dehydration device.
Optionally, the first shield sliding rail, the shield installation are provided at the third plate of the shield mounting plate
The second shield sliding rail is provided at the 4th plate opposite with third plate of plate；First shield is slidably mounted on described
Between one shield sliding rail and the second shield sliding rail；It is sliding that first shield is slidably mounted on first shield
Between rail and the second shield sliding rail.
During above-mentioned realization, the first shield sliding rail, shield peace are provided at the third plate of shield mounting plate
It is provided with the second shield sliding rail at the 4th plate opposite with third plate of loading board, the first shield and the second shield can be
It is slided between first shield sliding rail and the second shield sliding rail, is not influenced the sliding of fixing piece, to guarantee that the gaily decorated basket is held
The smooth sliding of carrier.
Optionally, first shield and second shield are organ page shield.
During above-mentioned realization, the first shield and the second shield are organ page shield, it is ensured that first is anti-
The telescopicing performance of shield and the second shield greatly promotes, to will not have an impact to the sliding of fixing piece, and then ensure that
The smooth sliding of gaily decorated basket carrier.
Second aspect, the embodiment of the present application provide a kind of wafer dehydration equipment, including sink and above-mentioned wafer dehydration dress
It sets, the sink and the cabinet of the wafer dehydration device are detachably connected.
During above-mentioned realization, sink and the cabinet of wafer dehydration device are detachably connected, and the water in sink can be with
For cleaning to wafer, the gaily decorated basket carrier of wafer dehydration device can drive the wafer after cleaning smoothly out of sink
Out, while to wafer it is dehydrated.
Other feature and advantage of the application will be illustrated in subsequent specification, also, partly be become from specification
It is clear that by implementing the embodiment of the present application understanding.The purpose of the application and other advantages can be by written theorys
Specifically noted structure is achieved and obtained in bright book, claims and attached drawing.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is a kind of structural schematic diagram of wafer dehydration device provided by the embodiments of the present application；
Fig. 2 is a kind of structural schematic diagram of carriage provided by the embodiments of the present application；
Fig. 3 is a kind of structural schematic diagram of driving device provided by the embodiments of the present application；
Fig. 4 is a kind of structural schematic diagram of transmission device provided by the embodiments of the present application；
Fig. 5 is a kind of structural schematic diagram of screw mechanism provided by the embodiments of the present application；
Fig. 6 is the structural schematic diagram of another wafer dehydration device provided by the embodiments of the present application；
Fig. 7 is a kind of structural schematic diagram of wafer dehydration equipment provided by the embodiments of the present application.
Icon: 10- wafer dehydration device；100- cabinet；110- shield mounting plate；The first shield of 120-；130-
Two shields；200- driving device；210- motor；220- driving pulley；230- toothed belt；240- transmission device；2410- transmission
Belt wheel；2420- screw mechanism；2422- lead screw；2424- nut frame；2426- nut；2430- transmission connection plate；300- sliding dress
It sets；The first guide rail of 310-；The second guide rail of 320-；330- sliding panel；The first optoelectronic switch of 340-；The second optoelectronic switch of 350-；
400- gaily decorated basket carrier；20- sink；30- wafer dehydration equipment.
Specific embodiment
Below in conjunction with attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Ground description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.Usually exist
The component of the embodiment of the present application described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, is not intended to limit claimed the application's to the detailed description of the embodiments herein provided in the accompanying drawings below
Range, but it is merely representative of the selected embodiment of the application.Based on embodiments herein, those skilled in the art are not being done
Every other embodiment obtained under the premise of creative work out, shall fall in the protection scope of this application.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.Meanwhile the application's
In description, term " first ", " second " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
Fig. 1 is please referred to, Fig. 1 is a kind of structural schematic diagram of wafer dehydration device 10 provided by the embodiments of the present application.The crystalline substance
Circle dehydration device 10 includes: cabinet 100, driving device 200, carriage 300 and gaily decorated basket carrier 400, the driving device
200 are arranged in the cabinet 100, and the driving device 200 is connect with the carriage 300, the gaily decorated basket carrier 400
It is connect with the carriage 300；The driving device 200 is for driving the gaily decorated basket carrier 400 in the carriage
It is slided on 300, to be dehydrated in sliding process to wafer by the gaily decorated basket carrier 400.
Wherein, substance present in 10 working environment of wafer dehydration device can have an impact the work of driving device 200,
So that driving device 200 can not be slided normally on carriage 300 in driving gaily decorated basket carrier 400, cabinet 100 herein can
To play the role of protection to the driving device 200 inside cabinet 100, so that the substance in 10 working environment of wafer dehydration device
Driving device 200 in cabinet 100 will not be had an impact, to guarantee that wafer dehydration device 10 can drive wafer to carry out just
Normal dehydrating operations.
In addition, driving device 200 is connect with carriage 300, driving device 200 can drive carriage 300 to carry out
It smoothly slides, gaily decorated basket carrier 400 is connect with the carriage 300, so driving device 200 can drive the gaily decorated basket to carry
Frame 400 smoothly slides on carriage 300, makes the water of crystal column surface from wafer so as to the surface tension using water
Surface is split away off, and to achieve the purpose that be dehydrated wafer, and then reduces the residual volume of crystal column surface water after dehydration.
During above-mentioned realization, the driving device 200 in wafer dehydration device 10 drives carriage 300 to be slided
Dynamic, gaily decorated basket carrier 400 is connect with carriage 300, so that carriage 300 can drive gaily decorated basket carrier 400 to slide together
It is dynamic, and then gaily decorated basket carrier 400 makes the water of crystal column surface de- from crystal column surface in sliding process by the surface tension of water
It falls, to realize that wafer dehydration device 10 drives wafer to be dehydrated.
It please check that Fig. 2, Fig. 2 are a kind of structural schematic diagram of carriage 300 provided by the embodiments of the present application, sliding dress
It sets 300 and includes the first guide rail 310, the second guide rail 320 and sliding panel 330, the sliding panel 330 and the gaily decorated basket carrier 400
Connection, first guide rail 310 and second guide rail 320 are arranged in parallel on the cabinet 100, and the sliding panel 330 is sliding
It is dynamic to be arranged on first guide rail 310 and second guide rail 320；The sliding panel 330 is used in the driving device 200
Driving under slided on first guide rail 310 and second guide rail 320, to drive the gaily decorated basket carrier 400 to slide.
First guide rail 310 and the second guide rail 320 are arranged in parallel on cabinet, it is ensured that sliding panel 330 is in the first guide rail
310 and second are smoothly slided on guide rail 320, and sliding panel 330 is connect with gaily decorated basket carrier 400, and gaily decorated basket carrier 400 can
Smoothly to be slided under the drive of sliding panel 330.
Furthermore, it is possible to as seen from Figure 2, there are two gaps for setting between the first guide rail 310 and the second guide rail 320, so that
The gaily decorated basket carrier 400 being arranged outside cabinet 100 can be attached by the sliding panel 330 being arranged in gap and cabinet 100, be
It slides the gaily decorated basket carrier 400 connecting with sliding panel 330 smoothly, the gap and the first guide rail 310 is set
It is parallel with the second guide rail 320, it is possible to understand that, the item number in the gap is configured according to the actual situation, for example, gaily decorated basket carrier
400 are connect by a connector with sliding panel 330, then a gap can be set, if gaily decorated basket carrier 400 passes through two companies
Fitting is connect with sliding panel 330, then two gaps can be set.
During above-mentioned realization, the first guide rail 310 and the second guide rail 320 are arranged in parallel on cabinet 100, sliding panel
330 are slidably arranged on the first guide rail 310 and the second guide rail 320, sliding panel 330 can under the driving of driving device 200
It is smoothly slided on first guide rail 310 and the second guide rail 320, so that the gaily decorated basket carrier 400 connecting with sliding panel 330 can be with
The smoothly sliding together of sliding panel 330, drives wafer during sliding, under water can fall off from crystal column surface, to realize
Dehydration to wafer.
As an implementation, the carriage 300 further includes the first optoelectronic switch 340 and the second optoelectronic switch
350, one end of first guide rail 310 is arranged in first optoelectronic switch 340, and the setting of the second optoelectronic switch 350 exists
The other end of first guide rail 310；First optoelectronic switch 340 is used to lead when the sliding panel 330 slides to described first
When one end of rail 310, controls the driving device 200 and stop driving work；Second optoelectronic switch 350 is used to work as the cunning
When movable plate 330 slides to the other end of first guide rail 310, controls the driving device 200 and stop driving work.
For example, the sliding panel 330 connecting with gaily decorated basket carrier 400 exists when wafer dehydration device 10 is being worked
It under the driving of driving device 200, is smoothly slided on the first guide rail 310 and the second guide rail 320, when sliding panel 330 slides to
When one end of one guide rail 310 and the second guide rail 320, according to actual work, it is possible to understand that ground can be and slide to the first guide rail
310 and second guide rail 320 top either bottom end, sliding panel 330 slides into the first optoelectronic switch 340 or the second optoelectronic switch
At 350, triggers the first optoelectronic switch 340 or the second optoelectronic switch 350 control driving device stops driving, at this point, sliding panel 330
Stop sliding, prevent the sliding panel 330 from skidding off the sliding scale of the first guide rail 310 and the second guide rail 320, leads to wafer dehydration dress
Set 10 damages and cisco unity malfunction.
The first optoelectronic switch 340 and the second optoelectronic switch 350 difference during above-mentioned realization, in carriage 300
The both ends of first guide rail 310 are set, when sliding panel 330 slides to any end of the first guide rail 310, that is, the sliding panel
330 be when will exceed the range of sliding, and the first optoelectronic switch 340 or the second optoelectronic switch 350 can control driving device 200
Stop driving work, continues to slide to stop sliding panel 330, so that the gaily decorated basket carrier 400 connecting with sliding panel 330
Wafer can be driven to be slided.
Fig. 3 is please referred to, Fig. 3 is a kind of structural schematic diagram of driving device 200 provided by the embodiments of the present application, driving device
200 include motor 210, driving pulley 220, toothed belt 230 and transmission device 240, the motor 210 and the driving pulley
220 connections, the driving pulley 220 are connect by the toothed belt 230 with the transmission device 240, the transmission device 240
It is connect with the sliding panel 330；The motor 210 for driving the driving pulley 220 to rotate, use by the driving pulley 220
In driving the transmission device 240 be driven and drive the sliding panel 330 described first by the toothed belt 230
It is slided on guide rail 310 and second guide rail 320.
Motor 210 in driving device 200 is used to provide power, motor 210 and driving pulley 220 for driving device 200
Connection, motor 210 can drive driving pulley 220 to be rotated, and driving pulley 220 passes through toothed belt 230 and transmission device 240
Connection, transmission device 240 are driven under the drive of driving pulley 220.
During above-mentioned realization, motor 210 can drive driving pulley 220 to be rotated, and then driving pulley 220 is logical
Crossing the sliding panel 330 that toothed belt 230 drives transmission device 240 to be driven, therefore connect with transmission device 240 can be driven
Under the drive of device 240, smoothly slided on the first guide rail 310 and the second guide rail 320, to guarantee gaily decorated basket carrier 400
It can smoothly be slided together with sliding panel 330, and then drive wafer water during sliding that can fall off from crystal column surface
Under, to realize the dehydration to wafer.
Particularly, the driving device 200 further includes electric machine support, and the electric machine support is fixed at the cabinet
On 100, the motor 210 is fixedly mounted on the electric machine support.Motor 210 is fixed on cabinet 100 by electric machine support,
Stable power can be provided for driving device 200, guarantee that gaily decorated basket carrier 400 is smoothly slided.
During above-mentioned realization, motor 210 is mounted on the electric machine support being fixedly installed on cabinet 100, to protect
The carry out power output that motor 210 can be stable is demonstrate,proved, so that it is flat to guarantee that gaily decorated basket carrier 400 carries out under the drive of motor 210
Steady sliding, and then gaily decorated basket carrier 400 can drive wafer smoothly to be slided, water can be from crystalline substance during sliding
Under circular surfaces fall off, wafer is dehydrated with realizing.
Fig. 4 is please referred to, Fig. 4 is a kind of structural schematic diagram of transmission device 240 provided by the embodiments of the present application, the transmission
Device 240 includes that drive pulley 2410, screw mechanism 2420 and transmission connection plate 2430, the drive pulley 2410 pass through described
Toothed belt 230 is connect with the driving pulley 220, and the drive pulley 2410 is connect with the screw mechanism 2420, the silk
Thick stick mechanism 2420 is connect with the transmission connection plate 2430, and the transmission connection plate 2430 is fixedly connected with the sliding panel 330；
The drive pulley 2410 under the drive of the driving pulley 220 and the toothed belt 230 for being rotated, to drive
Screw mechanism 2420 is stated to be driven；The screw mechanism 2420 is for driving the transmission connection plate 2430 to move, so that institute
Stating transmission connection plate 2430 drives the sliding panel 330 to slide.
Drive pulley 2410 is connect by toothed belt 230 with driving pulley 220, drive of the driving pulley 220 in motor 210
The driving pulley 220 of lower rotation, rotation is connect by toothed belt 230 with drive pulley 2410, to drive 2410 turns of drive pulley
Dynamic, under the rotation of drive pulley 2410, screw mechanism 2420 be may be rotated, since screw mechanism 2420 can will turn round
Conversion of motion is linear motion, and therefore, screw mechanism 2420 can convert transmission connection plate for the rotation of drive pulley 2410
2430 stable linear motions, thus with the sliding panel 330 that connect of transmission connection plate 2430 be sequentially connected plate 2430 simultaneously into
Row movement, that is to say, that sliding panel 330 can smoothly be slided on the first guide rail 310 and the second guide rail 320.
During above-mentioned realization, drive pulley 2410 may be rotated under the drive of driving pulley 220, transmission belt
Wheel 2410 is connect with screw mechanism 2420, and drive pulley 2410 can drive screw mechanism 2420 to be rotated, with screw mechanism
The transmission connection plate 2430 of 2420 connections carries out operation up and down with the rotation of screw mechanism 2420, so that sliding panel 330 is being driven
It can smoothly be slided under the drive of connecting plate 2430.
Fig. 5 is please referred to, Fig. 5 is a kind of structural schematic diagram of screw mechanism 2420 provided by the embodiments of the present application.Lead screw machine
Structure 2420 includes lead screw 2422, nut frame 2424 and nut 2426, one end of the lead screw 2422 and the drive pulley 2410
It is fixedly connected, the lead screw 2422 passes through the nut 2426, and the nut frame 2424 is fixedly connected with the nut 2426, institute
Nut frame 2424 is stated to be fixedly connected with the transmission connection plate 2430；Drive of the lead screw 2422 in the drive pulley 2410
Under rotated；The nut 2426 moves on the lead screw 2422 under the rotation of the lead screw 2422, by described
Nut frame 2424 drives the transmission connection plate 2430 to move.
Screw mechanism 2420 can convert rotational motion to linear movement, and detailed process can be screw mechanism 2420
In one end of lead screw 2422 be fixedly connected with drive pulley 2410, wherein one end of lead screw 2422 and drive pulley 2410
Center is fixedly connected, and the rotation of drive pulley 2410 can drive lead screw 2422 to carry out axial rotation motion, is through lead screw 2422
On nut 2426 follow the rotation of lead screw 2422 to start to move along a straight line on lead screw 2422, nut frame 2424 and nut
2426 move together, so that the transmission connection plate 2430 connecting with nut frame 2424 can carry out straight line with nut frame 2424 together
Movement.
During above-mentioned realization, lead screw 2422 may be rotated under the drive of drive pulley 2410, lead screw 2422
On nut 2426 can move up and down on lead screw 2422 with the rotation of lead screw 2422, nut frame 2424 and nut
2426 are fixedly connected, so that nut frame 2424 can drive transmission connection plate 2430 to move up and down with nut 2426, in turn
The gaily decorated basket carrier 400 connecting with sliding panel 330 can be slided smoothly up and down under the drive of transmission connection plate 2430.
Fig. 6 is please referred to, Fig. 6 is the structural schematic diagram of another wafer dehydration device 10 provided by the embodiments of the present application, case
It is provided with shield mounting plate 110 on the outside of body 100, the first shield 120 and second is provided in the shield mounting plate 110
Shield 130, one end of first shield 120 are fixedly connected with the first plate of the shield mounting plate 110, and described
The other end of one shield 120 is connect by fixing piece 410 with the sliding panel 330, one end of second shield 130 and
Second plate opposite with first plate of the shield mounting plate 110 is fixedly connected, second shield 130 it is another
End is connect by the fixing piece 410 with the sliding panel 330.
The first shield 120 and the second shield 130, the first shield 120 and are provided in shield mounting plate 110
Two shields 130 can prevent wafer dehydration device 10 in work by connecting with shield mounting plate 110 and sliding panel 330
When making, working environment has an impact the driving device 200 inside cabinet 100, to guarantee wafer dehydration device 10 just
Often steadily work.
During above-mentioned realization, the first shield 120 and the second shield 130 that are arranged in shield mounting plate 110
Pass through the connection with shield mounting plate 110 and the connection with fixing piece 410, it is ensured that the substance outside cabinet 100 is not
The structure that the carriage 300 and driving device 200 inside cabinet 100 can be destroyed, to guarantee wafer dehydration device 10
It works normally.
Illustratively, the first shield sliding rail, the shield are provided at the third plate of the shield mounting plate 110
The second shield sliding rail is provided at the 4th plate opposite with third plate of mounting plate 110；The sliding of first shield 120 peace
Between the first shield sliding rail and the second shield sliding rail；First shield 120 is slidably mounted on institute
It states between the first shield sliding rail and the second shield sliding rail.
Pass through the first shield sliding rail of setting and the second shield sliding rail, the first shield 120 and the second shield
130 can smoothly be slided on the first shield sliding rail and the second shield sliding rail, will not influence gaily decorated basket carrying
The smooth sliding of frame 400, to guarantee that wafer carries out normal dewatering work, during above-mentioned realization, shield mounting plate
It is provided with the first shield sliding rail at 110 third plate, is arranged at the 4th plate opposite with third plate of shield mounting plate 110
There is the second shield sliding rail, the first shield 120 and the second shield 130 can be in the first shield sliding rail and the second shields
It is slided between sliding rail, is not influenced the sliding of fixing piece 410, to guarantee the smooth sliding of gaily decorated basket carrier 400.
Particularly, first shield 120 and second shield 130 are organ page shield.The protection of organ page
Cover have the characteristics that good retractility and it is corrosion-resistant act charitably, therefore, organ page shield can prevent outside cabinet 100
Substance while enter 100 inside of cabinet, do not influence the sliding of gaily decorated basket carrier 400, guarantee can drive wafer smoothly
It is dehydrated.
During above-mentioned realization, the first shield 120 and the second shield 130 are organ page shield, it is ensured that
The telescopicing performance of first shield 120 and the second shield 130 greatly promotes, to will not generate to the sliding of fixing piece 410
It influences, and then ensure that the smooth sliding of gaily decorated basket carrier 400.
Fig. 7 is please referred to, Fig. 7 is a kind of structural schematic diagram of wafer dehydration equipment 30 provided by the embodiments of the present application, the crystalline substance
Circle dehydration equipment 30 includes sink 20 and above-mentioned wafer dehydration device 10, the sink 20 and the wafer dehydration device 10
Cabinet 100 is detachably connected.
It is held after wafer is cleaned by the pure water in sink 20 by the gaily decorated basket in sink 20 equipped with the pure water for cleaning wafer
Carrier 400, which drives, slowly to be come out from the water in sink 20, meanwhile, using the surface tension of water to achieve the purpose that dehydration,
Can guarantee reduce crystal column surface remnants water, prevent wafer after subsequent drying process, crystal column surface there are
It is water stain.
Particularly, sink 20 can be detachably connected with the cabinet 100 of wafer dehydration device 10, can also be with cabinet
100 are fixedly connected, and specific connection type is herein with no restriction.In addition, sink 20 can by the bottom of sink 20 be arranged into
Mouth of a river water inlet, more thoroughly cleans wafer with reaching, and the water inlet water inlet of the bottom setting of sink 20, water is flowing, leads to
Cross flowing water, it is easier to avoid leading to that ejected wash water is not clean due to cleaning considerable wafer and wafer can not being carried out thoroughly
Cleaning.
During above-mentioned realization, sink 20 and the cabinet 100 of wafer dehydration device 10 are detachably connected, in sink 20
Water can be used for cleaning wafer, the gaily decorated basket carrier 400 of wafer dehydration device 10 can drive cleaning after wafer
It is smoothly come out out of sink 20, while wafer is dehydrated.
In conclusion the embodiment of the present application provides a kind of wafer dehydration device and equipment, in wafer dehydration device 10
Driving device 200 drives carriage 300 to be slided, and gaily decorated basket carrier 400 is connect with carriage 300, to slide dress
Setting 300 can drive gaily decorated basket carrier 400 to slide together, and then gaily decorated basket carrier 400 is in sliding process, the surface tension of water
So that the water of crystal column surface falls off from crystal column surface, to reduce the ejected wash water of crystal column surface attachment, and then guarantee after processing
The cleaning of crystal column surface.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (10)
1. a kind of wafer dehydration device, which is characterized in that the wafer dehydration device includes: cabinet, driving device, carriage
With gaily decorated basket carrier, the driving device is arranged in the cabinet, and the driving device is connect with the carriage, described
Gaily decorated basket carrier is connect with the carriage；
The driving device is for driving the gaily decorated basket carrier to slide on the carriage, to be carried by the gaily decorated basket
Frame is dehydrated wafer in sliding process.
2. wafer dehydration device according to claim 1, which is characterized in that the carriage includes the first guide rail, the
Two guide rails and sliding panel, the sliding panel are connect with the gaily decorated basket carrier, and first guide rail is parallel with second guide rail
It is arranged on the cabinet, the sliding panel is slidably arranged on first guide rail and second guide rail；
The sliding panel is used to slide on first guide rail and second guide rail under the driving of the driving device, with
The gaily decorated basket carrier is driven to slide.
3. wafer dehydration device according to claim 2, which is characterized in that the carriage further includes that the first photoelectricity is opened
It closes and one end of first guide rail is arranged in the second optoelectronic switch, first optoelectronic switch, second optoelectronic switch is set
Set the other end in first guide rail；
First optoelectronic switch is used for when the sliding panel slides to one end of first guide rail, controls the driving device
Stop driving work；
Second optoelectronic switch is used for when the sliding panel slides to the other end of first guide rail, controls the driving dress
Set stopping driving work.
4. wafer dehydration device according to claim 2, which is characterized in that the driving device includes motor, driving band
Wheel, toothed belt and transmission device, the motor are connect with the driving pulley, and the driving pulley passes through the toothed belt and institute
Transmission device connection is stated, the transmission device is connect with the sliding panel；
For driving the driving pulley to rotate, the driving pulley is used to drive the biography by the toothed belt motor
Dynamic device be driven and then the sliding panel is driven to slide on first guide rail and second guide rail.
5. wafer dehydration device according to claim 4, which is characterized in that the transmission device includes drive pulley, silk
Thick stick mechanism and transmission connection plate, the drive pulley are connect by the toothed belt with the driving pulley, the drive pulley
It is connect with the screw mechanism, the screw mechanism is connect with the transmission connection plate, the transmission connection plate and the sliding
Plate is fixedly connected；
The drive pulley under the drive of the driving pulley and the toothed belt for being rotated, to drive the lead screw
Mechanism is driven；
The screw mechanism is slided for driving the transmission connection plate to move so that the transmission connection strip moves the sliding panel
It is dynamic.
6. wafer dehydration device according to claim 5, which is characterized in that the screw mechanism includes lead screw, nut frame
And nut, one end of the lead screw are fixedly connected with the drive pulley, the lead screw pass through the nut, the nut frame with
The nut is fixedly connected, and the nut frame is fixedly connected with the transmission connection plate；
The lead screw is rotated under the drive of the drive pulley；
The nut moves on the lead screw under the rotation of the lead screw, to drive the transmission to connect by the nut frame
Fishplate bar movement.
7. wafer dehydration device according to claim 2, which is characterized in that be provided with shield installation on the outside of the cabinet
Plate, is provided with the first shield and the second shield in the shield mounting plate, one end of first shield with it is described
First plate of shield mounting plate is fixedly connected, and the other end of first shield is connected by fixing piece and the sliding panel
It connecing, one end of second shield is fixedly connected with second plate opposite with first plate of the shield mounting plate,
The other end of second shield is connect by the fixing piece with the sliding panel.
8. wafer dehydration device according to claim 7, which is characterized in that set at the third plate of the shield mounting plate
It is equipped with the first shield sliding rail, it is sliding that the second shield is provided at the 4th plate opposite with third plate of the shield mounting plate
Rail；
First shield is slidably mounted between the first shield sliding rail and the second shield sliding rail；
First shield is slidably mounted between the first shield sliding rail and the second shield sliding rail.
9. wafer dehydration device according to claim 8, which is characterized in that first shield and second protection
Cover is organ page shield.
10. a kind of wafer dehydration equipment, which is characterized in that including sink and wafer described in any one of claim 1-9
Dehydration device, the sink and the cabinet of the wafer dehydration device are detachably connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910448549.XA CN110164797A (en) | 2019-05-27 | 2019-05-27 | Wafer dehydration device and equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910448549.XA CN110164797A (en) | 2019-05-27 | 2019-05-27 | Wafer dehydration device and equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110164797A true CN110164797A (en) | 2019-08-23 |
Family
ID=67629173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910448549.XA Pending CN110164797A (en) | 2019-05-27 | 2019-05-27 | Wafer dehydration device and equipment |
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| CN (1) | CN110164797A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110657636A (en) * | 2019-09-27 | 2020-01-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Drying device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103046097A (en) * | 2012-12-31 | 2013-04-17 | 上海新阳半导体材料股份有限公司 | Wafer processing device |
| CN204550745U (en) * | 2014-12-31 | 2015-08-12 | 上海新阳半导体材料股份有限公司 | Wafer pre-electroplating treatment device |
| CN107086201A (en) * | 2016-02-12 | 2017-08-22 | 株式会社斯库林集团 | Substrate board treatment |
| CN207845027U (en) * | 2017-12-28 | 2018-09-11 | 江苏浠吉尔装备科技有限公司 | A kind of slow drawing hoisting mechanism |
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2019
- 2019-05-27 CN CN201910448549.XA patent/CN110164797A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103046097A (en) * | 2012-12-31 | 2013-04-17 | 上海新阳半导体材料股份有限公司 | Wafer processing device |
| CN204550745U (en) * | 2014-12-31 | 2015-08-12 | 上海新阳半导体材料股份有限公司 | Wafer pre-electroplating treatment device |
| CN107086201A (en) * | 2016-02-12 | 2017-08-22 | 株式会社斯库林集团 | Substrate board treatment |
| CN207845027U (en) * | 2017-12-28 | 2018-09-11 | 江苏浠吉尔装备科技有限公司 | A kind of slow drawing hoisting mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110657636A (en) * | 2019-09-27 | 2020-01-07 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Drying device |
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Application publication date: 20190823 |
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