CN110164796A - Rubber head moisturizing device and automatic double surface gluer - Google Patents
Rubber head moisturizing device and automatic double surface gluer Download PDFInfo
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- CN110164796A CN110164796A CN201910445613.9A CN201910445613A CN110164796A CN 110164796 A CN110164796 A CN 110164796A CN 201910445613 A CN201910445613 A CN 201910445613A CN 110164796 A CN110164796 A CN 110164796A
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- moisturizing
- preservation box
- moisture preservation
- sealing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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Abstract
This application provides a kind of rubber head moisturizing device and automatic double surface gluers, comprising: moisture preservation box, inside are formed with the cavity that can be sealed, are formed with the opening portion that can be closed, and drop rubber head can enter in cavity via opening portion；Sealing baffle, including fixed part and the sealing extended downwardly from fixed part, sealing baffle is fixedly installed in the inside of the moisture preservation box by fixed part, sealing extends to the inside of moisture preservation box, form the first moisturizing channel and the second moisturizing channel to communicate with each other, second moisturizing channel is formed by the inner sidewall of moisture preservation box and the lateral wall of sealing, and the moisture retention liquid submergence that the lower end of sealing can be supplied from liquid feeding pipeline makes the inside of moisture preservation box form seal cavity；Liquid feeding pipeline is connected to the inside of moisture preservation box.The application makes the seal cavity of the first moisturizing channel formation isolation air, when the drop rubber head of automatic double surface gluer being made to be in work loitering phase, the moisturizing under the vapor action of moisture retention liquid by moisture retention liquid liquid level the first moisturizing of fluid-tight channel.
Description
Technical field
This application involves semiconductor lithography process fields, more particularly, to a kind of rubber head moisturizing device and automatic double surface gluer.
Background technique
Photoetching process is one of step essential in semiconductor production process, and photoetching process mainly includes gluing, exposes
Light and development.Wherein, coat uniform photoresist layer in semiconductor wafer surface, to photoresist spit glue amount precision and viscosity is
There is very high requirement.When the drop rubber head of automatic glue painting device is in work loitering phase, since the solvent in photoresist is easy
Volatilization can to drip rubber head and drip the condensation of rubber head inner wall photoresist that the viscosity of the precision for spitting glue amount and photoresist is caused to become
Change, influences the thickness and the thickness uniformity of semiconductor wafer surface photoresist layer.If photoresist condensation accumulation is excessive, obstruction
Rubber head is dripped, will affect the normal work of automatic double surface gluer；
In the prior art, moisturizing is realized using will drip rubber head and be immersed directly in moisture retention liquid, or glue is dripped into moisture retention liquid sucking
A part in head forms moisture retention liquid-air layer in the lower end of drop rubber head to realize moisturizing；
Just because of this, in the prior art, enter moisture retention liquid inside drop rubber head, be easy to make to drip rubber head
Internal photoresist is diluted, so that the performance to photoresist has an impact.
Summary of the invention
In view of this, the application's is designed to provide a kind of rubber head moisturizing device and automatic double surface gluer, to solve existing skill
Drop rubber head moisturizing device in art makes moisture retention liquid enter the problem of dilution photoresist is inside drop rubber head to influence photoresist performance.
In a first aspect, the embodiment of the present application provides a kind of rubber head moisturizing device, comprising:
Moisture preservation box, inside are formed with the cavity that can be sealed, the moisture preservation box is formed with the opening portion that can be closed,
Drop rubber head can enter in the cavity of the moisture preservation box via the opening portion；
Sealing baffle, including fixed part and the sealing extended downwardly from the fixed part, the sealing baffle passes through institute
The inside that fixed part is fixedly installed in the moisture preservation box is stated, the sealing of the sealing baffle extends to the interior of the moisture preservation box
Portion, to form the first moisturizing channel and the second moisturizing channel that communicate with each other, second moisturizing channel is by the moisture preservation box
The lateral wall of inner sidewall and the sealing is formed, the moisture retention liquid leaching that the lower end of the sealing can be supplied from liquid feeding pipeline
Not yet, so that the inside of the moisture preservation box be made to form the cavity sealed；And the liquid feeding pipeline, connect with the inside of the moisture preservation box
It is logical.
Preferably, the moisture preservation box is internally provided with the overflow component being fixedly connected with the bottom of the moisture preservation box, institute
The inside for stating overflow component is capable of forming overflow ducts, and the height of the upper end of the overflow ducts is higher than the lower end of the sealing
Height；
First moisturizing channel is formed by the inner sidewall of the sealing and the lateral wall of the overflow component；
In the state that the lower end of the sealing is submerged by moisture retention liquid, the liquid feeding pipeline, first moisturizing channel,
Second moisturizing channel and the overflow ducts are in fluid communication, and the cavity of the moisture preservation box is sealed.
Preferably, the overflow ducts are formed by cylindrical body or the overflow ducts are by semi-barrel shape body and the moisturizing
The part of the inner sidewall of box formed or the overflow ducts by two the first board members and the inner sidewall of the moisture preservation box portion
Divide and is formed.
Preferably, in the case where the overflow ducts are formed by cylindrical body, first moisturizing channel is by the tubular bodily form
It is formed at perhaps first moisturizing channel by the part of semi-barrel shape body and the inner sidewall of the moisture preservation box or described first
Moisturizing channel is formed by the part of two the second board members and the inner sidewall of the moisture preservation box；
In the case where the overflow ducts are formed by the part of semi-barrel shape body and the inner sidewall of the moisture preservation box, described
One moisturizing channel is formed by the part of semi-barrel shape body and the inner sidewall of the moisture preservation box or first moisturizing channel is by two
The part of the inner sidewall of second board member and the moisture preservation box is formed；
In the case where the overflow ducts are formed by the part of two the first board members and the inner sidewall of the moisture preservation box,
First moisturizing channel is formed by the part of two the second board members and the inner sidewall of the moisture preservation box.
Preferably, the side wall of the moisture preservation box offers overflow ducts, and the height of the overflow ducts is higher than the sealing
The height of the lower end in portion.
Preferably, the moisture preservation box includes moisturizing box main body and moisturizing box cover, and the opening portion is formed in the moisture preservation box
The upper end of main body, the moisturizing box main body and the moisturizing box cover can be fitted to each other to form the cavity that can be sealed, institute
Fixed part is stated between the moisturizing box main body and the moisturizing box cover or the fixed part is fully mounted to the moisturizing
The inner sidewall of box main body.
It preferably, further include waste discharge pipeline and waste collecting device, the first end of the waste discharge pipeline and the overflow are logical
Road connection, the second end of the waste discharge pipeline are connected with the waste collecting device, and the waste pipe routing hose is formed, described
The middle bent of hose forms U-shaped portion, the U-shaped portion can store waste liquid so that the moisture preservation box inside and air exclusion.
It preferably, further include feed flow on-off valve, the first end of the liquid feeding pipeline is connected to the moisture preservation box, the feed flow
The second end of pipeline is connected by the feed flow on-off valve with feed flow source, and the feed flow on-off valve uses normally closed be arranged and can be
It opens, close under the control of control system, to be supplied into the liquid feeding pipeline, stop supplying the moisture retention liquid.
It preferably, further include sealing ring, the upper surface of the moisturizing box main body or the upper surface of the fixed part are provided with
Seal groove, the sealing ring are fixedly installed in the lower end surface of the moisturizing box cover, and the sealing ring can be embedded in the seal groove,
To make the moisturizing box cover and the moisture preservation box body seal cooperate.It is set according to the rubber head moisturizing device and gluing of the application
It is standby, the seal cavity of isolation air is formed by moisturizing channel, moisture retention liquid liquid level and moisturizing box cover three, makes the drop of automatic double surface gluer
When rubber head is in work loitering phase, the moisturizing under the vapor action of moisture retention liquid.
Second aspect, the embodiment of the present application provide a kind of automatic double surface gluer, including rubber head moisturizing device as above.
The application makes the sealing of the first moisturizing channel formation isolation air by moisture retention liquid liquid level the first moisturizing of fluid-tight channel
Cavity, when the drop rubber head of automatic double surface gluer being made to be in work loitering phase, the moisturizing under the vapor action of moisture retention liquid.
To enable the above objects, features, and advantages of the application to be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate
Appended attached drawing, is described in detail below.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 shows the schematic diagram of rubber head moisturizing device provided by the embodiment of the present application.
Appended drawing reference:
1- moisture preservation box, 11- moisturizing box main body, 12- moisturizing box cover, 121- sealing ring, 2- sealing baffle, 21- fixed part,
212- seal groove, 22- sealing, the first moisturizing of 221- channel, the second moisturizing of 222- channel, 3- overflow component, 31- overflow are logical
Road, 4- liquid feeding pipeline, 41- feed flow on-off valve, 5- waste discharge pipeline, 51-U shape portion, 6- drop rubber head.
Specific embodiment
It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation
Example is some embodiments of the present application, instead of all the embodiments.Based on the embodiment in the application, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall in the protection scope of this application.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for describe the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present application, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in application.
It in addition, the technical solution between each embodiment can be combined with each other, but must be with ordinary skill
Based on personnel can be realized, this technical side will be understood that when the combination of technical solution appearance is conflicting or cannot achieve
The combination of case is not present, also not this application claims protection scope within.
Embodiment one
Rubber head moisturizing device provided in this embodiment, comprising: moisture preservation box, sealing baffle, liquid feeding pipeline, feed flow source are (in figure
It is not shown) and control system (not shown).The connection relationship of the above-mentioned component of rubber head moisturizing device will be described in detail below
And movement.
In an embodiment of the present invention, the inside of moisture preservation box could be formed with the cavity that can be sealed, and end face on it
It is provided with opening portion, is connected to cavity with external environment, while dripping rubber head to enter the cavity of moisture preservation box via opening portion
It is interior；Moisture preservation box is internally provided with sealing baffle, and sealing baffle can use the integral structure of Flange-shaped Parts, including fixed part and close
Envelope portion.In the present embodiment, moisture preservation box may include moisturizing box main body and moisturizing box cover, and opening portion is formed in moisturizing box main body
Upper end, moisturizing box main body and moisturizing box cover can be fitted to each other to form the cavity that can be sealed, the fixed part of sealing baffle
It is fixedly mounted on the upper surface of moisturizing box main body in the vertical direction by screw, also, in the upper of the fixed part of sealing baffle
End face is provided with seal groove, however, it is without being limited thereto, it can also be installed in moisturizing box main body in the horizontal direction by screw
Side wall is completely in the fixed part of sealing baffle in the cavity of moisturizing box main body, and sealing is arranged in the upper surface of moisture preservation box
Slot；In addition, the sealing of sealing baffle extends to the inside of the moisturizing box main body, communicate with each other first is formed to be formed
Moisturizing channel and the second moisturizing channel, the second moisturizing channel can be formed by the inner sidewall of moisture preservation box and the lateral wall of sealing,
The interior zone that first moisturizing channel can be surrounded by sealing is formed, in the case where described in the following examples, moisture preservation box
Inside overflow component is installed in the case where, the first moisturizing channel can be by the inner sidewall of sealing and the outside of overflow component
Wall is formed, and there are certain distances for the lower end for making sealing and the inner bottom surface of moisturizing box main body.In addition, in embodiment, it is close
The sealing of block plate can use cylindrical body, semi-barrel shape body or two board members and be formed, in the present embodiment, sealing baffle
Sealing formed using tubular, the hollow portion of tubular is moisturizing channel；When the sealing of sealing baffle utilizes semi-barrel shape body
When formation, the sealing of sealing baffle matches logical to form the moisturizing of opposing seal with the sections inner side wall of moisturizing box main body
Road, and the sections inner side wall is different from side wall locating for the liquid feeding pipeline of moisturizing box main body；When the sealing of sealing baffle
When being formed using two the second board members, opposite two inner sidewalls of two the second board members respectively with two moisture preservation boxes cooperate with shape
At the moisturizing channel of opposing seal, and described two inner sidewalls are different from side wall locating for the liquid feeding pipeline of moisturizing box main body.
In addition, in embodiment, moisturizing box cover and drop rubber head are fixedly installed in mechanical arm, can be carried out with mechanical arm flat
It moves, lifting, specific mounting means are as follows: drop rubber head is perpendicularly through in moisturizing box cover and mechanical arm is fixedly installed in, in this implementation
In example, the installation site for dripping rubber head is in axle center (center) position of moisture preservation box lid；The lower end surface of moisturizing box cover is fixedly installed with
Sealing ring, such as seal groove can be set and pasted using binder in the lower end surface of moisturizing box cover and the sealing ring is installed, work as moisturizing
When box cover, drop synchronous with the mechanical arm decline of rubber head, the sealing of the upper surface of the sealing ring and moisture preservation box of the lower end surface of moisturizing box cover
Slot matches, so that the cavity of the inside of moisture preservation box seals, and is completely in drop rubber head in the cavity, and logical in moisturizing
In road.
It should be noted that in the present embodiment, the lower end surface of moisturizing box cover, the fixed part of sealing baffle upper end
Face, lower end surface are identical with shape, the size of the profile of the upper surface of moisturizing box main body, and this can set in parallel to each other
It sets；However, it is without being limited thereto, in the present embodiment, guarantee that the fixed part of sealing baffle is completely covered in the lower end surface of moisturizing box cover
Upper surface, sealing baffle the lower end surface of fixed part the upper surface of moisturizing box main body is completely covered, when consolidating for sealing baffle
Determine portion by screw be installed on the inner sidewall of moisturizing box main body in the horizontal direction when, i.e., guarantee moisturizing box cover lower end surface it is complete
Cover the upper surface of moisturizing box main body.In addition, in the present embodiment, drip rubber head installation site be in the axle center of moisture preservation box lid (in
The heart) position, it is therefore intended that moisturizing box cover, sealing baffle and the moisturizing box main body in cooperation the present embodiment based on above-mentioned setting,
Assembling is improved, as long as in fact, drop rubber head is installed perpendicular to moisturizing box cover, and guarantee is worked as moisturizing box cover and is matched with moisturizing box main body
When closing the cavity sealing for making the inside of moisture preservation box, drop rubber head is completely in the inside cavity, and in the first moisturizing channel i.e.
Can, therefore the not specific specific installation site for limiting drop rubber head.
The side wall of moisturizing box main body is additionally provided with liquid feeding pipeline, the inside of the first end and moisturizing box main body of liquid feeding pipeline
The second end of cavity connection, liquid feeding pipeline is connected by feed flow on-off valve with feed flow source.In the present embodiment, feed flow on-off valve is adopted
With bi-bit bi-pass pneumatic diaphragm valve, which is normal closed gate, and control system can control the unlatching of feed flow on-off valve, while feed flow
Source conveys moisture retention liquid to the inside cavity of moisture preservation box by liquid feeding pipeline, however, without being limited thereto, feed flow on-off valve also be can choose
Other valves as long as it possesses normally closed characteristic, and can be controlled by control system and be opened, closed, and it is specific that it is not particularly limited
Type.
When control system control feed flow on-off valve is opened, feed flow source is defeated by the inside cavity of liquid feeding pipeline to moisture preservation box
Moisture retention liquid is sent, moisture retention liquid flows into the first moisturizing channel via the second moisturizing channel, and moisture retention liquid submerges the lower end in the first moisturizing channel
When part is to the first moisturizing of fluid-tight channel, control system controls feed flow on-off valve and closes the conveying for stopping moisture retention liquid, drips at this time
Rubber head lowers into opening portion under the drive of mechanical arm, so that the sealing ring of the lower end surface of moisturizing box cover and sealing baffle are consolidated
The seal groove for determining the upper surface in portion matches, and seals the cavity of the inside of moisturizing box main body, drips rubber head at this time and is in the first guarantor
In wet channel, and moisturizing channel is sealed via the first moisturizing channel, moisture retention liquid liquid level and moisturizing box cover, is connecing drop rubber head not
In the case where touching moisture retention liquid, drop rubber head is set to reach moistening effect by moisture retention liquid steam of the moisture retention liquid in the first moisturizing channel.
Embodiment two
Further, Fig. 1 is please referred on the basis of example 1, and rubber head moisturizing device provided in this embodiment includes:
Moisture preservation box 1, overflow component 3, sealing baffle 2, liquid feeding pipeline 4, waste discharge pipeline 5, waste collecting device (not shown), feed flow
Source (not shown) and control system (not shown).The company of the above-mentioned component of rubber head moisturizing device will be described in detail below
Connect relationship and movement.
In embodiment, moisture preservation box 1 may include moisturizing box main body 11 and moisturizing box cover 12, the wherein fixation of sealing baffle 2
Portion 21 is between moisturizing box main body 11 and moisturizing box cover 12.In addition, the lower end surface of moisturizing box cover 12 is fixedly installed with sealing ring
121, such as can be pasted in the lower end surface of moisturizing box cover 12 using binder and the sealing ring 121, the fixed part of sealing baffle 2 are installed
Seal groove 212 is arranged in 21 upper surfaces, is so fitted to each other when assembling in moisturizing box main body 11 and moisturizing box cover 12, so that moisture preservation box
The cavity of 1 inside is sealed.
In addition, in embodiment, the inner bottom surface of moisturizing box main body 11 is provided with overflow component 3, for guaranteeing moisture preservation box master
The moisture retention liquid liquid level of the inside of body 11 is stablized, and the shape of overflow component 3 can utilize cylindrical body, semi-barrel shape body and two first
Board member is formed, and when using the overflow component 3 formed using cylindrical body, the sealing 22 of sealing baffle 2 can use tubular
Body, semi-barrel shape body or two the second board members are formed, when using the overflow component 3 formed using semi-barrel shape body, sealing gear
The sealing 22 of plate 2 can use semi-barrel shape body or two the second board members are formed, and utilize two the first board members when using
When the overflow component 3 of formation, the sealing 22 of sealing baffle 2 can use two the second board members and be formed, in the present embodiment,
Using columnar overflow component 3, columnar hollow space is overflow ducts 31, in addition, utilizing semi-barrel shape body, two plates
The mode that component forms overflow ducts 31 forms the mode phase in the first moisturizing channel 221 with the sealing 22 of above-mentioned sealing baffle 2
Together, details are not described herein.
In addition, in the embodiment shown in fig. 1, the first moisturizing channel 221 can be by the inside of the sealing 22 of sealing baffle 2
The lateral wall of wall and overflow component 3 is formed, and the second moisturizing channel 222 can by the sealing 22 of sealing baffle 2 lateral wall and
The inner sidewall of the moisturizing box main body 11 of moisture preservation box 1 is formed.
It should be noted that in the present embodiment, overflow component 3 can with moisturizing box main body 11 using Shooting Technique one at
Type can also be arranged card slot identical with the cross-sectional shape of overflow component 3 using the inner bottom surface in moisturizing box main body 11, pass through
Overflow component 3 is fixedly installed in the inner bottom surface of moisturizing box main body 11 by the clamping of interference fit；Also, the upper end of overflow component 3
Height be higher than the first moisturizing channel 221 lower end height；In Fig. 1, overflow ducts 31 have been protruded into the lower end of drop rubber head 6,
This is because overflow component 3 is arranged such, the position for dripping the lower end of rubber head 6 may be at fluid-tight liquid level hereinafter, provided of course that energy
It is enough to realize that drop rubber head 6 and outside air completely cut off, do not limit the specific location of the lower end of drop rubber head 6；Overflow ducts 31 and first are protected
The part that wet channel 221 is overlapped should ensure that overflow ducts 31 are contained in completely in the first moisturizing channel 221, so in sealing
In the state that 22 lower end is submerged by moisture retention liquid, liquid feeding pipeline 4, the first moisturizing channel 221, the second moisturizing channel 222 and overflow
Channel 31 is in fluid communication, and the cavity of moisture preservation box 1 is sealed.
The first end of waste discharge pipeline 5 is connected with overflow ducts 31, and second end is connected with waste collecting device.In this implementation
In example, waste discharge pipeline 5 uses hose, by the middle part shape for making waste discharge pipeline 5 to the fixation carried out at different height in the middle part of hose
U-shaped portion 51, U-shaped portion 51 can store waste liquid, further completely cut off air；
In the present embodiment, when rubber head moisturizing device works for the first time, process must be exhausted, i.e. discharge waste discharge pipeline 5
U-shaped portion 51 in air, specific work process are as follows:
When control system control feed flow on-off valve 41 is opened, feed flow source is by liquid feeding pipeline 4 into the cavity of moisture preservation box 1
Portion conveys moisture retention liquid, and the moisture retention liquid of the inside of moisture preservation box 1 first submerges the first moisturizing channel 221 via the second moisturizing channel 222
Lower end continues to rise to the upper end of overflow component 3, and then moisture retention liquid starts successively to pass through overflow ducts 31 and waste discharge pipeline 5 overflows
Stream is gradually filled with the U-shaped portion 51 of waste discharge pipeline 5, realizes exhaust process, and the feed flow on-off valve 41 of control system control at this time is closed,
The liquid level of moisture retention liquid inside moisture preservation box 1 is maintained at the height of the upper end of overflow component 3；
It should be noted that first conveying moisture retention liquid compared to embodiment one to moisturizing box main body 11 and again falling into drop rubber head 6
Different in moisturizing box main body 11, in the present embodiment, particular provisions drop rubber head 6 does not fall into the specific time of moisturizing box main body 11
Point, because in example 1, not set overflow component 3 is inevitable if first dropping to drop rubber head 6 inside moisturizing box main body 11
It will cause the raising of 1 air pressure inside of moisture preservation box, so that the sealing effect of moisture preservation box 1 can be destroyed and influence the conveying of moisture retention liquid, furthermore
Due to being not provided with overflow component 3, the liquid level of the moisture retention liquid inside moisture preservation box 1 can only artificially be controlled by operator, if
First drop rubber head 6, which is dropped to inside moisturizing box main body 11, just can not check whether the liquid level of moisture retention liquid meets the requirements.
Therefore the present embodiment can be realized the automatic liquid level guaranteed inside moisture preservation box 1, discharge compared to embodiment one
The function of waste liquid.
Embodiment three
On the basis of example 2, rubber head moisturizing device provided in this embodiment include: moisture preservation box, it is overflow ducts, close
Block plate, liquid feeding pipeline, waste discharge pipeline, waste collecting device (not shown), feed flow source (not shown) and control system
System (not shown).The connection relationship and movement of the above-mentioned component of rubber head moisturizing device will be described in detail below.
In the present embodiment, overflow ducts are directly arranged at moisture preservation box side wall, eliminate the design of overflow component, wherein
The height of overflow ducts is identical as the overflow component upper end level in embodiment two, overflow ducts still with waste discharge pipeline first
End is connected, when the moisture retention liquid liquid level when the inside of moisture preservation box reaches the height of overflow ducts, moisture retention liquid overflow.
Compared to embodiment two, the present embodiment passes through the position for changing overflow ducts, in the feelings for guaranteeing same flushing effect
Under condition, overflow element structure is eliminated, keeps the assembly of rubber head moisturizing device more convenient.
Example IV
The present embodiment provides a kind of automatic double surface gluers, including the glue in such as above-described embodiment one, embodiment two and embodiment three
Head moisturizing device, in addition to this, rest part structure and the common automatic double surface gluer of the automatic double surface gluer are not had any different, herein no longer
It repeats.
The foregoing is merely preferred embodiment of the present application, are not intended to limit the protection scope of the application, all at this
Under the innovation thinking of application, using equivalent structure transformation made by present specification and accompanying drawing content, or directly/use indirectly
In the protection scope that other related technical areas are included in the application.
Claims (10)
1. a kind of rubber head moisturizing device characterized by comprising
Moisture preservation box, inside are formed with the cavity that can be sealed, the moisture preservation box is formed with the opening portion that can be closed, and drip glue
Head can enter in the cavity of the moisture preservation box via the opening portion；
Sealing baffle, including fixed part and the sealing extended downwardly from the fixed part, the sealing baffle passes through described solid
Determine the inside that portion is fixedly installed in the moisture preservation box, the sealing of the sealing baffle extends to the inside of the moisture preservation box, with
Form the first moisturizing channel and the second moisturizing channel that communicate with each other, second moisturizing channel by the moisture preservation box inner sidewall
It is formed with the lateral wall of the sealing, the moisture retention liquid submergence that the lower end of the sealing can be supplied from liquid feeding pipeline, from
And the inside of the moisture preservation box is made to form the cavity sealed；And
The liquid feeding pipeline is connected to the inside of the moisture preservation box.
2. rubber head moisturizing device according to claim 1, which is characterized in that the moisture preservation box be internally provided with it is described
The overflow component that the bottom of moisture preservation box is fixedly connected, the inside of the overflow component are capable of forming overflow ducts, and the overflow is logical
The height of the upper end in road is higher than the height of the lower end of the sealing；
First moisturizing channel is formed by the inner sidewall of the sealing and the lateral wall of the overflow component；
It is the liquid feeding pipeline, first moisturizing channel, described in the state that the lower end of the sealing is submerged by moisture retention liquid
Second moisturizing channel and the overflow ducts are in fluid communication, and the cavity of the moisture preservation box is sealed.
3. rubber head moisturizing device according to claim 2, which is characterized in that the overflow ducts are formed by cylindrical body, or
Overflow ducts described in person are formed by the part of semi-barrel shape body and the inner sidewall of the moisture preservation box or the overflow ducts are by two
The part of the inner sidewall of first board member and the moisture preservation box is formed.
4. rubber head moisturizing device according to claim 3, which is characterized in that formed in the overflow ducts by cylindrical body
In the case of, first moisturizing channel is formed by cylindrical body or first moisturizing channel is by semi-barrel shape body and the moisturizing
The part of the inner sidewall of box formed or first moisturizing channel by two the second board members and the moisture preservation box inner sidewall
Part formed；
In the case where the overflow ducts are formed by the part of semi-barrel shape body and the inner sidewall of the moisture preservation box, described first is protected
Wet channel is formed by the part of semi-barrel shape body and the inner sidewall of the moisture preservation box or first moisturizing channel is by two second
The part of the inner sidewall of board member and the moisture preservation box is formed；
It is described in the case where the overflow ducts are formed by the part of two the first board members and the inner sidewall of the moisture preservation box
First moisturizing channel is formed by the part of two the second board members and the inner sidewall of the moisture preservation box.
5. rubber head moisturizing device according to claim 1, which is characterized in that it is logical that the side wall of the moisture preservation box offers overflow
Road, the height of the overflow ducts are higher than the height of the lower end of the sealing.
6. rubber head moisturizing device according to any one of claim 1 to 5, which is characterized in that the moisture preservation box includes protecting
Wet box main body and moisturizing box cover, the opening portion are formed in the upper end of the moisturizing box main body, the moisturizing box main body and described
Moisturizing box cover can be fitted to each other to form the cavity that can be sealed, the fixed part between the moisturizing box main body with it is described
Between moisturizing box cover or the fixed part is fully mounted to the inner sidewall of the moisturizing box main body.
7. the rubber head moisturizing device according to any one of claim 2 to 5, which is characterized in that the rubber head moisturizing device
It further include waste discharge pipeline and waste collecting device, the first end of the waste discharge pipeline is connected to the overflow ducts, the waste discharge
The second end of pipeline is connected with the waste collecting device, and the waste pipe routing hose is formed, the middle bent of the hose
Formed U-shaped portion, the U-shaped portion can store waste liquid so that the moisture preservation box inside and air exclusion.
8. rubber head moisturizing device according to any one of claim 1 to 5, which is characterized in that the rubber head moisturizing device
It further include feed flow on-off valve, the first end of the liquid feeding pipeline is connected to the moisture preservation box, and the second end of the liquid feeding pipeline is logical
It crosses the feed flow on-off valve to be connected with feed flow source, the feed flow on-off valve uses normally closed setting and can be in the control of control system
Lower opening, closing, to be supplied into the liquid feeding pipeline, stop supplying the moisture retention liquid.
9. rubber head moisturizing device according to claim 6, which is characterized in that the rubber head moisturizing device further includes sealing
Circle, the upper surface of the moisturizing box main body or the upper surface of the fixed part are provided with seal groove, and the sealing ring is fixedly mounted
In the lower end surface of the moisturizing box cover, the sealing ring can be embedded in the seal groove, thus make the moisturizing box cover with it is described
The cooperation of moisture preservation box body seal.
10. a kind of automatic double surface gluer, which is characterized in that including rubber head moisturizing device as claimed in any one of claims 1-9 wherein.
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| CN201910445613.9A CN110164796B (en) | 2019-05-27 | 2019-05-27 | Glue head moisturizing device and gluing equipment |
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| CN201910445613.9A CN110164796B (en) | 2019-05-27 | 2019-05-27 | Glue head moisturizing device and gluing equipment |
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| CN110164796A true CN110164796A (en) | 2019-08-23 |
| CN110164796B CN110164796B (en) | 2021-09-24 |
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Cited By (1)
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| CN114602872A (en) * | 2022-05-16 | 2022-06-10 | 宁波润华全芯微电子设备有限公司 | Nozzle test moisturizing box |
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| CN110164796B (en) | 2021-09-24 |
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