CN110161620B - Backlight module, manufacturing method thereof and display device - Google Patents
Backlight module, manufacturing method thereof and display device Download PDFInfo
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- CN110161620B CN110161620B CN201910614835.9A CN201910614835A CN110161620B CN 110161620 B CN110161620 B CN 110161620B CN 201910614835 A CN201910614835 A CN 201910614835A CN 110161620 B CN110161620 B CN 110161620B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/005—Means for improving the coupling-out of light from the light guide provided by one optical element, or plurality thereof, placed on the light output side of the light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
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Abstract
The invention provides a backlight module, a manufacturing method thereof and a display device, and belongs to the technical field of display. The manufacturing method of the backlight module comprises the following steps: forming a light-taking grating material layer on the light-emitting surface of the light guide plate; forming an imprinting glue pattern on the light-taking grating material layer through a nano imprinting process; forming a photoresist pattern covering the imprinting photoresist pattern in an area where the light-extracting grating is to be formed; removing the imprint resist pattern which is not covered by the photoresist pattern; and removing the photoresist pattern, and etching the light-taking grating material layer by taking the residual imprint resist pattern as a mask to form the light-taking grating. The technical scheme of the invention can improve the contrast of the display device.
Description
Technical Field
The present invention relates to the field of display technologies, and in particular, to a backlight module, a method for manufacturing the backlight module, and a display device.
Background
The backlight module in the related art comprises a light guide plate and a light taking grating positioned on the light emitting side of the light guide plate, wherein the light taking grating can take out large-angle light rays which are transmitted in the light guide plate in a total reflection manner at a collimation angle, so that a high-transmittance collimated light source is realized. However, when the light-extraction grating is fabricated on the light-emitting side of the light guide plate, the light-emitting surface of the light guide plate is damaged, the roughness of the light-emitting surface of the light guide plate is increased, and the light leakage phenomenon occurs on the interface of the optical waveguide, thereby reducing the display contrast.
Disclosure of Invention
The invention provides a backlight module, a manufacturing method thereof and a display device, which can improve the contrast of the display device.
To solve the above technical problem, embodiments of the present invention provide the following technical solutions:
in one aspect, a method for manufacturing a backlight module is provided, including:
forming a light-taking grating material layer on the light-emitting surface of the light guide plate;
forming an imprinting glue pattern on the light-taking grating material layer through a nano imprinting process;
forming a photoresist pattern covering the imprinting photoresist pattern in an area where the light-extracting grating is to be formed;
removing the imprint resist pattern which is not covered by the photoresist pattern;
and removing the photoresist pattern, and etching the light-taking grating material layer by taking the residual imprint resist pattern as a mask to form the light-taking grating.
Optionally, the removing the imprint resist pattern not covered by the photoresist pattern includes:
and cleaning the imprint resist pattern not covered by the photoresist pattern by using a solution capable of dissolving the imprint resist pattern or degrading and removing the imprint resist pattern not covered by the photoresist pattern.
Alternatively, the imprint resist pattern uses a mixture of 1-methoxy-2-propyl acetate and an acrylate monomer.
Optionally, in the imprint resist pattern, the weight percentage of the 1-methoxy-2-propyl acetate is 70% to 80%, and the weight percentage of the acrylate monomer is 15% to 25%.
Alternatively, the solution is an N-methylpyrrolidone solution.
Optionally, the light extraction grating material layer is made of a transparent inorganic material with a refractive index greater than 1.8.
Optionally, after the light extraction grating is formed, the manufacturing method further includes:
and forming a flat layer covering the light extraction grating.
Optionally, the planarization layer is made of a transparent material with a refractive index lower than 1.3.
The embodiment of the invention also provides a backlight module which is manufactured by the manufacturing method.
The embodiment of the invention also provides a display device which comprises the backlight module.
The embodiment of the invention has the following beneficial effects:
in the above scheme, when the light-extracting grating is formed, the whole light-extracting grating material layer is etched by using the residual impressing glue pattern as a mask, the light-extracting grating is formed, the light-emitting surface of the light guide plate under the light-extracting grating material layer cannot be damaged, the formation of a grating structure on the light-emitting surface of the light guide plate under the light-extracting grating material layer can be avoided, the smoothness of the light-emitting surface of the light guide plate is ensured, light leakage phenomenon cannot occur on the upper interface and the lower interface when light is transmitted in the light guide plate through total reflection, the light-extracting collimation degree of the light-extracting grating is ensured, and the contrast.
Drawings
FIG. 1 is a schematic view of a related art backlight module;
FIGS. 2-6 are schematic diagrams illustrating a related art backlight module;
fig. 7-12 are schematic views illustrating the fabrication of a backlight module according to an embodiment of the invention.
Reference numerals
1 Lamp strip
2 light source
3-coupled grating
4 light guide plate
5 reflective sheet
6 light-taking grating
61 light-extracting grating material layer
62 light-taking grating transition pattern
7 filling layer
8 embossing glue pattern
9 Photoresist
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
In the related art liquid crystal display device, as shown in fig. 1, the backlight module includes a light bar 1 and a light guide plate 4, the light bar 1 includes a light source 2, a coupling grating 3 and a reflector 5, lambertian light of the light source 2 is collected to a large angle and coupled into the light guide plate 4 through the coupling grating 3, a large angle light which is transmitted by total reflection in the light guide plate 4 is taken out at a collimation angle by a light taking grating 6 positioned at a light-out side of the light guide plate 4, a collimation light source with high transmittance is realized, in order to improve the light taking-out efficiency, a filling layer 7 is further arranged at the light-out side of the light guide plate 4, and the filling layer 7 is made of a transparent material. The liquid crystal display panel comprises a light shielding layer and a liquid crystal layer which are positioned on the light emitting side of the light taking grating 6, outgoing collimated light is absorbed by the light shielding layer to realize a dark state, when a bright state is displayed, a voltage signal is applied to liquid crystal, the liquid crystal is oriented to form the liquid crystal grating, the liquid crystal grating is emitted after being diffracted by the liquid crystal grating, different diffraction efficiencies of the liquid crystal grating to incident light can be realized by applying different voltage signals to the liquid crystal, multi-gray-scale display is realized, and the aim of collimating transparent display is fulfilled.
In the related art, when the backlight module is manufactured, as shown in fig. 2, a light-extraction grating material layer 61 is formed on the light guide plate 4, and an imprint glue pattern 8 is formed on the light-extraction grating material layer 61, specifically, a layer of imprint glue may be formed on the light-extraction grating material layer 61, and then the nano-imprint template is pressed on the imprint glue to form the imprint glue pattern 8; as shown in fig. 3, the imprint resist pattern 8 is used as a mask to etch the light extraction grating material layer 61, so as to form a light extraction grating transition pattern 62; as shown in fig. 4, in the region where the light extraction grating is to be formed, a photoresist 9 is used to protect a light extraction grating transition pattern 62; as shown in fig. 5, etching away the light extraction grating transition pattern 62 in other regions, and removing the photoresist 9 to form the light extraction grating 6; as shown in fig. 6, a filling layer 7 is formed to cover the light extraction grating 6.
When the light extraction grating transition patterns 62 in other regions are etched, the light extraction grating transition patterns 62 have formed grating structures in other regions, and a part of the light exit surface of the light guide plate 4 is not protected by the light extraction grating material layer 61, so that the light exit surface of the light guide plate in the part of the regions is easily damaged in the process of etching the light extraction grating transition patterns 62, and the light exit surface of the light guide plate forms a grating-shaped structure, the etching depth is about 4-40nm, which increases the roughness of the light exit surface of the light guide plate 4 in the non-light extraction grating region, and causes a light leakage phenomenon at the light guide interface, thereby reducing the display contrast. With the increase of the etching depth of the light-emitting surface of the light guide plate 4 in the non-light-extraction grating area, the display contrast value of the display device changes obviously, and when the etching depth exceeds 5nm, the display contrast value of the display device is reduced from 12.62 to about-1, so that human eyes cannot recognize the display brightness.
Embodiments of the present invention provide a backlight module, a method for manufacturing the same, and a display device, which can improve contrast of the display device.
The embodiment of the invention provides a method for manufacturing a backlight module, which comprises the following steps:
forming a light-taking grating material layer on the light-emitting surface of the light guide plate;
forming an imprinting glue pattern on the light-taking grating material layer through a nano imprinting process;
forming a photoresist pattern covering the imprinting photoresist pattern in an area where the light-extracting grating is to be formed;
removing the imprint resist pattern which is not covered by the photoresist pattern;
and removing the photoresist pattern, and etching the light-taking grating material layer by taking the residual imprint resist pattern as a mask to form the light-taking grating.
In this embodiment, when forming the grating of getting light, use remaining impression glue figure as the mask to etch the grating material layer of getting light of whole layer, form the grating of getting light, can not cause the damage to the light guide plate play plain noodles under the grating material layer of getting light, can avoid forming the grating structure on the light guide plate play plain noodles under the grating material layer of getting light, the smoothness of the light guide plate play plain noodles has been guaranteed, when making light when the transmission of light guide plate internal total reflection, the light leak phenomenon can not appear at upper and lower interface, guarantee the collimation degree that the grating of getting light got light, improve display device's contrast.
The imprint resist pattern may be made of the same material as the imprint resist pattern in the related art, or may be made of a different material from the imprint resist pattern in the related art, for example, a material that can be dissolved or degraded by a specific solution is used to make the imprint resist pattern.
When the imprint resist pattern is made of a material that can be dissolved or degraded by a specific solution, the removing the imprint resist pattern that is not covered by the photoresist pattern includes:
and cleaning the imprint resist pattern not covered by the photoresist pattern by using a solution capable of dissolving the imprint resist pattern or degrading and removing the imprint resist pattern not covered by the photoresist pattern. Therefore, the damage to the film layer under the imprint glue pattern can be avoided when the imprint glue pattern is removed by adopting a plasma process, and the formation of a grating structure in a non-light-extracting grating area by the light-extracting grating material layer under the imprint glue pattern can be avoided. If the light-extraction grating material layer under the imprinted glue pattern forms a grating structure in the non-light-extraction grating area, the light-emitting surface of the light guide plate under the grating structure is easily damaged when the light-extraction grating material layer is subsequently etched, and the smoothness of the light-emitting surface of the light guide plate is affected.
In a specific embodiment, the imprinting paste pattern may be formed using a mixture of 1-methoxy-2-propyl acetate and acrylate monomers, such that the imprinting paste pattern is washed away by a specific solution. Specifically, in the imprinting adhesive pattern, the weight percentage of the 1-methoxy-2-propyl acetate may be 70% to 80%, and the weight percentage of the acrylate monomer may be 15% to 25%.
Specifically, the solution may be an N-methylpyrrolidone solution.
In order to ensure the light extraction efficiency of the light extraction grating, the light extraction grating material layer is preferably made of a transparent inorganic material with a refractive index greater than 1.8, including but not limited to silicon nitride and silicon oxynitride.
Further, after the light extraction grating is formed, the manufacturing method further includes:
and forming a flat layer covering the light extraction grating, wherein the flat layer is made of a transparent material with the refractive index lower than 1.3, and the flat layer can provide a flat surface for subsequent processes and can be matched with the light extraction grating to improve the light extraction efficiency of the high-angle light rays totally reflected and transmitted in the light guide plate 4.
In one embodiment, the method for manufacturing the backlight module comprises the following steps:
step 1, as shown in fig. 7, providing a light guide plate 4, and forming a light-extracting grating material layer 61 on the light guide plate 4;
the light guide plate 4 may be a glass substrate having a thickness of 0.5 mm.
Specifically, a layer of SiNx may be deposited on the light guide plate 4 as the light extraction grating material layer 61 by using PECVD (Plasma Enhanced Chemical Vapor Deposition), the thickness of the light extraction grating material layer 61 is 300nm, the Deposition temperature is 210 ℃, and the refractive index of the light extraction grating material layer 61 is 1.9.
specifically, coating a layer of impression glue on the light-extraction grating material layer 61, wherein the thickness is 150-200 nm, and the impression glue comprises the following components: 70-80% of acetic acid-1-methoxyl-2-propyl ester and 15-25% of acrylate monomer, and curing the impression adhesive with the curing energy of 4900mj/cm2And then, an imprint glue pattern 8 with a grating structure is formed on the light-extraction grating material layer 61 through a nano-imprint process.
thus, when the imprint resist pattern 8 is subsequently washed with an NMP (N-methylpyrrolidone) solution, the imprint resist pattern 8 of the region where the light extraction grating is to be formed can be retained.
the imprint resist pattern 8 is washed with an NMP (N-methylpyrrolidone) solution, and the imprint resist pattern 8 not covered with the photoresist 9 is washed away. It should be noted that, the imprint resist pattern 8 and the photoresist 9 are made of different materials, and the NMP (N-methylpyrrolidone) solution can dissolve the imprint resist pattern 8 without affecting the photoresist 9.
In this embodiment, because the imprint resist pattern 8 is not removed by using the plasma etching process, the light-extraction grating material layer 61 under the imprint resist pattern 8 is not damaged in the process of cleaning the imprint resist pattern 8, and the flatness of the surface of the light-extraction grating material layer 61 can be ensured.
Step 5, as shown in fig. 11, removing the photoresist 9;
after the photoresist 9 is removed, the imprint resist pattern 8 of the region where the light extraction grating is to be formed is exposed.
Step 6, as shown in fig. 12, etching the light-extraction grating material layer 61 by using the residual imprint glue pattern 8 as a mask to form a light-extraction grating 6;
specifically, the light-extraction grating material layer 61 may be etched by a dry etching process such as ICP (Inductively Coupled Plasma), the nano-imprint structure is transferred to the light-extraction grating material layer 61, the preparation of the light-extraction grating 6 is completed, and then the residual imprint resist pattern 8 is removed.
In this embodiment, since the whole light-extracting grating material layer 61 with a flat surface is etched, and the light-emitting surface of the light guide plate 4 is covered with the light-extracting grating material layer 61, the light-emitting surface of the light guide plate 4 is not damaged in the etching process, so that the roughness of the light-emitting surface of the light guide plate can be greatly reduced, and thus, the surface smoothness of the optical waveguide interface can be ensured, and the collimation degree of grating light extraction and the contrast degree of the display device can be improved.
Specifically, the filling layer 7 may be formed of an organic material through a coating process, and the filling layer 7 may have a refractive index of 1.25 and a thickness of 900 nm.
The filling layer 7 can be used as a flat layer to provide a flat surface for subsequent processes, and can be matched with the light extraction grating 6 to improve the light extraction efficiency of the high-angle light rays totally reflected and propagated in the light guide plate 4.
The embodiment of the invention also provides a backlight module which is manufactured by the manufacturing method.
The backlight module of this embodiment has guaranteed the smoothness of light guide plate play plain noodles for light can not appear the light leak phenomenon at upper and lower interface when the transmission of light guide plate internal total reflection, guarantees the collimation degree that gets light grating and gets light, improves display device's contrast.
The embodiment of the invention also provides a display device which comprises the backlight module. The display device includes but is not limited to: radio frequency unit, network module, audio output unit, input unit, sensor, display unit, user input unit, interface unit, memory, processor, and power supply. It will be appreciated by those skilled in the art that the above described configuration of the display device does not constitute a limitation of the display device, and that the display device may comprise more or less of the components described above, or some components may be combined, or a different arrangement of components. In the embodiment of the present invention, the display device includes, but is not limited to, a display, a mobile phone, a tablet computer, a television, a wearable electronic device, a navigation display device, and the like.
The display device may be: the display device comprises any product or component with a display function, such as a liquid crystal television, a liquid crystal display, a digital photo frame, a mobile phone, a tablet personal computer and the like, wherein the display device further comprises a flexible circuit board, a printed circuit board and a back plate.
It should be noted that, in the present specification, all the embodiments are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the embodiments, since they are substantially similar to the product embodiments, the description is simple, and the relevant points can be referred to the partial description of the product embodiments.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (9)
1. A method for manufacturing a backlight module is characterized by comprising the following steps:
forming a light-taking grating material layer on the light-emitting surface of the light guide plate;
forming an imprinting glue pattern on the light-taking grating material layer through a nano imprinting process;
forming a photoresist pattern covering the imprinting photoresist pattern in an area where the light-extracting grating is to be formed;
removing the imprint resist pattern which is not covered by the photoresist pattern;
removing the photoresist pattern, and etching the light-extracting grating material layer by taking the residual imprint resist pattern as a mask to form a light-extracting grating;
the removing the imprint resist pattern not covered by the photoresist pattern includes:
and cleaning the imprint resist pattern not covered by the photoresist pattern by using a solution capable of dissolving the imprint resist pattern or degrading and removing the imprint resist pattern not covered by the photoresist pattern.
2. The method of claim 1, wherein the imprinting adhesive pattern comprises a mixture of 1-methoxy-2-propyl acetate and acrylate monomers.
3. The method of claim 2, wherein the weight percentage of 1-methoxy-2-propyl acetate in the imprint resist pattern is 70-80%, and the weight percentage of the acrylate monomer is 15-25%.
4. The method as claimed in claim 2, wherein the solution is N-methylpyrrolidone solution.
5. The method of claim 1, wherein the light extraction grating material layer is made of a transparent inorganic material with a refractive index greater than 1.8.
6. The method of claim 1, wherein after forming the light extraction grating, the method further comprises:
and forming a flat layer covering the light extraction grating.
7. The method as claimed in claim 6, wherein the planarization layer is made of a transparent material with a refractive index lower than 1.3.
8. A backlight module manufactured by the method according to any one of claims 1 to 7.
9. A display device comprising the backlight module according to claim 8.
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| CN110161620B true CN110161620B (en) | 2021-01-29 |
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| WO2021042265A1 (en) * | 2019-09-03 | 2021-03-11 | 京东方科技集团股份有限公司 | Light guide substrate and manufacturing method thereof, opposing substrate, and liquid crystal display device |
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| US6312870B1 (en) * | 2000-07-19 | 2001-11-06 | Arch Specialty Chemicals, Inc. | t-butyl cinnamate polymers and their use in photoresist compositions |
| CN101609255A (en) * | 2008-06-18 | 2009-12-23 | 富士胶片株式会社 | Curing combination for nanometer stamping, pattern formation method |
| CN109683230A (en) * | 2019-02-18 | 2019-04-26 | 京东方科技集团股份有限公司 | The manufacturing method of light guide structure, transparent display, light guide structure |
| CN109917503A (en) * | 2019-03-18 | 2019-06-21 | 京东方科技集团股份有限公司 | A kind of grating device and its manufacturing method, display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6913871B2 (en) * | 2002-07-23 | 2005-07-05 | Intel Corporation | Fabricating sub-resolution structures in planar lightwave devices |
| CN103995435B (en) * | 2014-05-22 | 2017-06-06 | 西安交通大学 | Nano-patterning Sapphire Substrate and preparation method thereof |
| CN107561857A (en) * | 2017-09-20 | 2018-01-09 | 南方科技大学 | A kind of method that the super structure surface of optics is prepared based on nano impression |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6312870B1 (en) * | 2000-07-19 | 2001-11-06 | Arch Specialty Chemicals, Inc. | t-butyl cinnamate polymers and their use in photoresist compositions |
| CN101609255A (en) * | 2008-06-18 | 2009-12-23 | 富士胶片株式会社 | Curing combination for nanometer stamping, pattern formation method |
| CN109683230A (en) * | 2019-02-18 | 2019-04-26 | 京东方科技集团股份有限公司 | The manufacturing method of light guide structure, transparent display, light guide structure |
| CN109917503A (en) * | 2019-03-18 | 2019-06-21 | 京东方科技集团股份有限公司 | A kind of grating device and its manufacturing method, display device |
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