CN110133962A - A kind of nano impression mould group and its method for stamping - Google Patents
A kind of nano impression mould group and its method for stamping Download PDFInfo
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- CN110133962A CN110133962A CN201910549453.2A CN201910549453A CN110133962A CN 110133962 A CN110133962 A CN 110133962A CN 201910549453 A CN201910549453 A CN 201910549453A CN 110133962 A CN110133962 A CN 110133962A
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- nano impression
- glue
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- template
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a kind of nano impression mould group and its method for stamping, in the nano impression structure and the nano impression glue-line contact printing of substrate side of template side, voltage is applied to electrode structure, by changing the voltage between nano impression glue-line drop and nano impression structure, to change wetability of the nano impression glue-line drop in nano impression structure, change the contact angle between drop and nano impression structure, drop can be sprawled in nano impression body structure surface, there is expansion trend in solid-liquid contact face, i.e. drop is greater than its cohesive force to the adhesive force of nano impression body structure surface, make the nano impression glue-line drop contacted with nano impression structure that there is wetability, nano impression glue-line drop can be made abundant to nano impression structure filling.Therefore nano impression mould group of the invention solves causes template and the contact angle of nano impression glue-line drop to become larger because carrying out anti-stick processing to template in the prior art, and nano impression glue is caused to fill insufficient problem to the nanostructure of template.
Description
Technical field
The present invention relates to field of display technology, in particular to a kind of nano impression mould group and its method for stamping.
Background technique
Nano impression is a kind of completely new pattern transfer technology different from conventional lithographic techniques, can nano graph from
Template is " replicated " on substrate, having the advantages that yield is high, at low cost and simple process.
As depicted in figs. 1 and 2, Fig. 1 is one group of nano impression mould group, including the template 1 being oppositely arranged and substrate 2, template 1
With nano impression structure 3, substrate 2 has nano impression glue-line 4, and nanometer embossing is sought to nano impression structure 3
On graph copying to nano impression glue-line 4, by by Fig. 1 nano impression structure 3 and nano impression glue-line 4 contact,
Then apply certain pressure, be printed on nano impression structure 3 in nano impression glue-line 4, then pass through laser curing nano impression
Template 1 with nano impression structure 3 is finally carried out demoulding processing, forms structure shown in Fig. 2, it can be seen that receive by glue-line 4
The figure of rice stamping structure 3 has been printed on nano impression glue-line 4.
In nanometer embossing, key link is the preparation of high-precision template and the recycling of template.In order to improve
The service life of template need to carry out anti-stick processing to template, carry out tackified finish to substrate, and keep appropriate force of impression.So
And after template carries out anti-stick processing, template gap and the contact angle of UV coining glue drop become larger, and cause UV coining glue to template
Nanostructure filling it is insufficient.With the recycling of template, template gradually becomes smaller the contact angle of UV coining glue drop, fills out
It fills and makes moderate progress, but demoulding is easily caused to fail.
Summary of the invention
The embodiment of the present invention provides a kind of nano impression mould group and its method for stamping, to solve asking in background technique
Topic.
Therefore, the embodiment of the invention provides a kind of nano impression mould groups, comprising: the template and substrate being oppositely arranged, institute
Stating template has nano impression structure towards the substrate side, and the substrate has nano impression glue towards the template side
Layer；It further include the electrode structure between the template and the substrate；
Contact printing is carried out in the nano impression structure of the template side and the nano impression glue-line of the substrate side
When, the electrode structure is configured as under the driving of voltage, makes the nano impression glue-line contacted with the nano impression structure
Drop have wetability.
Optionally, in the specific implementation, in above-mentioned nano impression mould group provided in an embodiment of the present invention, the electrode knot
Structure includes: driving electrodes and reference electrode；The reference electrode is oppositely arranged with the driving electrodes.
Optionally, in the specific implementation, described with reference to electricity in above-mentioned nano impression mould group provided in an embodiment of the present invention
Pole and the driving electrodes are respectively positioned between the substrate and the nano impression glue-line.
Optionally, in the specific implementation, described with reference to electricity in above-mentioned nano impression mould group provided in an embodiment of the present invention
Pole and the driving electrodes are respectively positioned on the nano impression structure backwards to the side of the template.
Optionally, in the specific implementation, described with reference to electricity in above-mentioned nano impression mould group provided in an embodiment of the present invention
Pole and the driving electrodes are located on the same floor, and the driving electrodes and the reference electrode are alternately arranged.
Optionally, in the specific implementation, described with reference to electricity in above-mentioned nano impression mould group provided in an embodiment of the present invention
Pole and the driving electrodes are located at different layers.
Optionally, in the specific implementation, described with reference to electricity in above-mentioned nano impression mould group provided in an embodiment of the present invention
Pole is located at the nano impression structure backwards to the side of the template, and the driving electrodes are located at the substrate and the nanometer pressure
It prints between glue-line.
Optionally, in the specific implementation, in above-mentioned nano impression mould group provided in an embodiment of the present invention, further includes: position
In the first dielectric layer and the first hydrophobic layer that the nano impression structure outermost surfaces are cascading, and it is located at described
The second hydrophobic layer and the second dielectric layer of surface contact setting of the nano impression glue-line towards the substrate side.
Correspondingly, the embodiment of the invention also provides a kind of pressures of above-mentioned nano impression mould group provided in an embodiment of the present invention
Impression method, comprising:
The nano impression glue-line of the nano impression structure of the template side and the substrate side is subjected to contact printing；
To the electrode structure on-load voltage, make the liquid of the nano impression glue-line contacted with the nano impression structure
Drop has wetability, and the nano impression structure is printed on the nano impression glue-line.
Optionally, in the specific implementation, it in above-mentioned method for stamping provided in an embodiment of the present invention, is pressed by the nanometer
Print structure is printed on the nano impression glue-line, is specifically included:
The nano impression glue-line is solidified using ultraviolet light, the nano impression structure is made to be printed on the nano impression glue
On layer.
Optionally, in the specific implementation, in above-mentioned method for stamping provided in an embodiment of the present invention, Xiang Suoshu electrode structure
After on-load voltage preset time, the nano impression glue-line is solidified using ultraviolet light；Or,
To after the electrode structure on-load voltage preset time, stop to the electrode structure on-load voltage, use is ultraviolet
Nano impression glue-line described in photocuring.
Beneficial effects of the present invention:
Nano impression mould group provided in an embodiment of the present invention and its method for stamping, the nano impression mould group include: opposite set
The template and substrate set, template have nano impression structure towards substrate side, and substrate has nano impression towards template side
Glue-line；It further include the electrode structure between template and substrate；The present invention by nano impression structure in template side with
When the nano impression glue-line of substrate side carries out contact printing, voltage is applied to electrode structure, by changing nano impression glue-line
Drop and nano impression structure between voltage, to change wetting of the drop of nano impression glue-line in nano impression structure
Property, that is, change the contact angle between drop and nano impression structure, drop can be sprawled in nano impression body structure surface, solid-liquid contact
There is widened trend in face, i.e. drop is greater than its cohesive force to the adhesive force of nano impression body structure surface, makes and nano impression structure
The drop of the nano impression glue-line of contact has wetability, therefore the drop of nano impression glue-line can be made to nano impression structure
Filling is abundant.Therefore, nano impression mould group provided in an embodiment of the present invention solves anti-stick because carrying out to template in the prior art
The contact angle that processing causes template gap to imprint glue drop with UV becomes larger, and UV coining glue is caused to fill not the nanostructure of template
Abundant problem.
Detailed description of the invention
Fig. 1 is one of the structural schematic diagram of nano impression mould group in the related technology；
Fig. 2 is the second structural representation of nano impression mould group in the related technology；
Fig. 3 is one of the structural schematic diagram of nano impression mould group provided in an embodiment of the present invention；
Fig. 4 is the second structural representation of nano impression mould group provided in an embodiment of the present invention；
Fig. 5 is the third structural representation of nano impression mould group provided in an embodiment of the present invention；
Fig. 6 is the four of the structural schematic diagram of nano impression mould group provided in an embodiment of the present invention；
Fig. 7 is the flow chart of the method for stamping of nano impression mould group provided in an embodiment of the present invention.
Specific embodiment
In order to make the purpose of the present invention, the technical scheme and advantages are more clear, with reference to the accompanying drawing, to the embodiment of the present invention
The nano impression mould group of offer and its specific embodiment of method for stamping are described in detail.
Each layer film thickness and shape do not reflect the actual proportions of nano impression mould group in attached drawing, and purpose is schematically illustrate
The content of present invention.
Nano impression mould group provided in an embodiment of the present invention, as shown in Figures 3 to 6, comprising: 1 He of template being oppositely arranged
Substrate 2, template 1 have nano impression structure 3 towards 2 side of substrate, and substrate 2 has nano impression glue-line towards 1 side of template
4；It further include the electrode structure 5 between template 1 and substrate 2；
When the nano impression structure 3 of 1 side of template and the nano impression glue-line 4 of 2 side of substrate carry out contact printing, electricity
Pole structure 5 is configured as under the driving of voltage, has the drop of the nano impression glue-line 5 contacted with nano impression structure 3
Wetability.
Nano impression mould group provided in an embodiment of the present invention includes: the template being oppositely arranged and substrate, and template is towards substrate
Side has nano impression structure, and substrate has nano impression glue-line towards template side；Further include be located at template and substrate it
Between electrode structure；The present invention in the nano impression structure of template side and the nano impression glue-line of substrate side by connecing
When pressing print, voltage is applied to electrode structure, the electricity between drop and nano impression structure by changing nano impression glue-line
Pressure changes drop and nano impression structure to change wetability of the drop of nano impression glue-line in nano impression structure
Between contact angle, drop can sprawl in nano impression body structure surface, and there is widened trend in solid-liquid contact face, i.e., drop is to nanometer
The adhesive force on stamping structure surface is greater than its cohesive force, has the drop of the nano impression glue-line contacted with nano impression structure
Wetability, therefore the drop of nano impression glue-line can be made abundant to nano impression structure filling.Therefore, the embodiment of the present invention mentions
The nano impression mould group of confession solves causes template gap and UV to imprint glue because carrying out anti-stick processing to template in the prior art
The contact angle of drop becomes larger, and UV coining glue is caused to fill insufficient problem to the nanostructure of template.
Further, in the specific implementation, in above-mentioned nano impression mould group provided in an embodiment of the present invention, extremely such as Fig. 3
Shown in Fig. 6, electrode structure 5 includes: driving electrodes 51 and reference electrode 52；Driving electrodes 51 are oppositely arranged with reference electrode 52.
It is carried out below by structure of several specific embodiments to above-mentioned nano impression mould group provided in an embodiment of the present invention
It is described in detail.
Embodiment one:
As shown in figure 3, driving electrodes 51 and reference electrode 52 are respectively positioned between substrate 2 and nano impression glue-line 4；Driving electricity
Pole 51 and reference electrode 52 are located at different layers.The nano impression structure further include: be located at 3 outermost surfaces of nano impression structure according to
Secondary the first dielectric layer 61 and the first hydrophobic layer 71 being stacked, and the table positioned at nano impression glue-line 4 towards 2 side of substrate
The second hydrophobic layer 72 and the second dielectric layer 62 of face contact setting.Specifically, driving electrodes 51 and reference electrode 52 all can be
It is that strip electrode is that plane-shape electrode or strip electrode, which are with driving electrodes 51 and reference electrode 52 in the embodiment of the present invention one,
Example.
In the specific implementation, as shown in figure 3, in the nano impression structure 3 of 1 side of template and the nanometer pressure of 2 side of substrate
When printing the progress contact printing of glue-line 4, by applying certain voltage (such as 10-50V) to driving electrodes 51 and reference electrode 52, by
In being provided with hydrophobic layer in 1 side of template and in 2 side of substrate, when driving electrodes 51 and reference electrode 52 apply voltage,
Hydrophobic layer can guarantee that the drop of nano impression glue-line 4 has good wetability, to regulate and control the drop of nano impression glue-line 4
Pattern, to change the contact angle between the drop of nano impression glue-line 4 and nano impression structure 3, the solid-liquid under the control of voltage
Contact surface has widened trend, i.e., drop is greater than its cohesive force to the adhesive force on 3 surface of nano impression structure, makes and nano impression
The drop for the nano impression glue-line 4 that structure 3 contacts has wetability, therefore the drop of nano impression glue-line 4 can be made to nanometer
Stamping structure 3 is filled sufficiently.
Specifically, driving electrodes 51 are made on a substrate 2 and the method for reference electrode 52 includes but is not limited to chemical gaseous phase
The material of deposition, PCVD, magnetron sputtering any of them, driving electrodes 51 and reference electrode 52 include but is not limited to aluminium,
ITO, copper, chromium and its their compositions, making temperature used in driving electrodes 51 and reference electrode 52 can be room temperature -400
℃。
Specifically, the first dielectric layer 61 is made in template 1, and makes the second dielectric layer 62 on a substrate 2, it is used
Method includes but is not limited to spin coating, spraying, PVD any of them, the material packet of the first dielectric layer 61 and the second dielectric layer 62
Include esters of acrylic acid (molecular weight 2,000-20 ten thousand), epoxy resin (molecular weight 2,000-20 ten thousand), polyurethanes (molecular weight 2
One of ten thousand) or combination thousand -20.
Specifically, the first hydrophobic layer 71 is made by the way of spraying or spin coating in template 1, on a substrate 2 using spray
Apply or the mode of spin coating make the second hydrophobic layer 72, the material of the first hydrophobic layer 71 and the second hydrophobic layer 72 be polytetrafluoroethylene (PTFE),
One of polyvinylidene fluoride, organofluorine compound or combination.
In the specific implementation, when each film layer in making Fig. 3 on substrate 2, by using above-mentioned described each film layer
Production method sequentially forms driving electrodes 51, reference electrode 52, second dielectric layer 62, the second hydrophobic layer 72 on a substrate 2 and receives
Rice coining glue-line 4.
Embodiment two:
As shown in figure 4, Fig. 4 is the difference from Fig. 3 is that driving electrodes 51 and reference electrode 52 are located on the same floor, and are driven
Moving electrode 51 and reference electrode 52 are alternately arranged；The structure of other film layers is identical.The structure of Fig. 4 is due to driving electrodes 51 and reference
Electrode 52 is located on the same floor, and can further decrease the thickness of nano impression mould group.Specifically, driving electrodes 51 and reference electrode
52 be strip electrode, the function and coining principle phase of nano impression mould group shown in Fig. 4 and nano impression mould group shown in FIG. 1
Together, can make when the nano impression structure 3 of 1 side of template and the nano impression glue-line 4 of 2 side of substrate carry out contact printing,
Guarantee that the drop of nano impression glue-line 4 has good wetability, to make the drop of nano impression glue-line 4 to nano impression knot
Structure 3 is filled sufficiently.
Specifically, the production method of each film layer of Fig. 4 shown in embodiment two and material etc. with institute in embodiment one
The production method of each film layer of the Fig. 3 shown and material etc. are identical, and specific detailed in Example one, this will not be repeated here.
In the specific implementation, when each film layer in making Fig. 4 on substrate 2, by using described in above-described embodiment one
Each film layer production method, sequentially form on a substrate 2 driving electrodes 51, reference electrode 52, second dielectric layer 62, second dredge
Water layer 72 and nano impression glue-line 4.
Embodiment three:
As shown in figure 5, Fig. 5 is the difference from Fig. 3 is that reference electrode 52 is located at nano impression structure 3 backwards to template 1
Side, driving electrodes 51 between substrate 2 and nano impression glue-line 4, i.e., reference electrode 52 be located at nano impression structure 3 with
Between first medium layer 61, driving electrodes 51 are between substrate 2 and second dielectric layer 62；The structure of other film layers is identical.Fig. 5
Structure when applying voltage to driving electrodes 51 and reference electrode 52, since reference electrode 52 is located at the back of nano impression structure 3
To the side of template 1, it can make the drop of nano impression glue-line 4 that there is good wetability, fill out nano impression glue-line 4 sufficiently
It fills in nano impression structure 3；But since the structure of nano impression structure 3 is micro-structure, reference electrode is deposited above it
52 difficulty is larger, therefore driving electrodes 51 and reference electrode 52 in preferred embodiment of the embodiment of the present invention one and embodiment two
Structure.Specifically, the driving electrodes 51 in Fig. 5 and reference electrode 52 can be plane-shape electrode or strip electrode, shown in fig. 5
Nano impression mould group is identical as the function of nano impression mould group shown in FIG. 1 and coining principle, can make receiving in 1 side of template
When rice stamping structure 3 and the nano impression glue-line 4 of 2 side of substrate carry out contact printing, guarantee the drop tool of nano impression glue-line 4
There is good wetability, so that the drop of nano impression glue-line 4 be made to fill sufficiently nano impression structure 3.
Specifically, the production method of each film layer of Fig. 5 shown in embodiment three and material etc. with institute in embodiment one
The production method of each film layer of the Fig. 3 shown and material etc. are identical, and specific detailed in Example one, this will not be repeated here.
In the specific implementation, when each film layer in making Fig. 5 in template 1 and substrate 2, by using above-described embodiment one
In described each film layer production method, sequentially form driving electrodes 51, second dielectric layer 62, the second hydrophobic layer on a substrate 2
72 and nano impression glue-line 4；Nano impression structure 3, reference electrode 52, first medium layer 61 and are sequentially formed in template 1
One hydrophobic layer 7.
Example IV:
As indicated with 6, Fig. 6 is the difference from Fig. 3 is that driving electrodes 51 and reference electrode 52 are respectively positioned on nano impression knot
For structure 3 backwards to the side of template 1, the structure of other film layers is identical.The nano impression structure 3 illustrated in Fig. 6 only schematically illustrates
The positional relationship of driving electrodes 51 and reference electrode 52 and nano impression structure 3 does not represent true micro- knot of nano impression structure 3
Structure.Specifically, the driving electrodes 51 in Fig. 6 and reference electrode 52 can be plane-shape electrode or strip electrode, and the structure of Fig. 6 exists
When applying voltage to driving electrodes 51 and reference electrode 52, since driving electrodes 51 and reference electrode 52 are respectively positioned on nano impression knot
Structure 3 can preferably make the drop of nano impression glue-line 4 have good wetability backwards to the side of template 1, make nanometer
Coining glue-line 4 is sufficient filling in nano impression structure 3；But since the structure of nano impression structure 3 is micro-structure, on it
Driving electrodes 51 are deposited in face and the difficulty of reference electrode 52 is larger, therefore preferred embodiment of the embodiment of the present invention one and embodiment two
In 52 structure of driving electrodes 51 and reference electrode.Specifically, the driving electrodes 51 in Fig. 6 and reference electrode 52 can be face
The function and coining principle of shape electrode or strip electrode, nano impression mould group shown in fig. 6 and nano impression mould group shown in FIG. 1
It is identical, it can make to carry out contact printing in the nano impression structure 3 of 1 side of template and the nano impression glue-line 4 of 2 side of substrate
When, guarantee that the drop of nano impression glue-line 4 has good wetability, to make the drop of nano impression glue-line 4 to nanometer pressure
Print structure 3 is filled sufficiently.
Specifically, the production method of each film layer of Fig. 6 shown in example IV and material etc. with institute in embodiment one
The production method of each film layer of the Fig. 3 shown and material etc. are identical, and specific detailed in Example one, this will not be repeated here.
In the specific implementation, when each film layer in making Fig. 6 in template 1 and substrate 2, by using above-described embodiment one
In described each film layer production method, sequentially form second dielectric layer 62, the second hydrophobic layer 72 and nano impression on a substrate 2
Glue-line 4；Nano impression structure 3, reference electrode 52, first medium layer 61, driving electrodes 51, first are sequentially formed in template 1
Dielectric layer 61 and the first hydrophobic layer 7.
In the specific implementation, when the viscosity of nano impression glue is lower (10cps or so), the glue of low viscosity is to nanometer pressure
(30-100 microns) of relatively big gap fillings for printing structure are preferable, but are influenced glue drop in meniscus by interfacial tension；For receiving
When the gap of rice stamping structure is moderate, because of the hydrophobic treatment of template, then it is difficult to fill, pattern poor reproducibility.And use the present invention
The nano impression mould group that embodiment provides is provided with electrode structure, hydrophobic layer and dielectric layer due to increasing, in receiving for template side
It, can by applying voltage to electrode structure when rice stamping structure and the nano impression glue-line of substrate side carry out contact printing
Make the drop of the nano impression glue-line of low viscosity in nano impression structure have wetability, so as to so that low viscosity nanometer
The drop of coining glue-line is filled sufficiently in nano impression structure.
(0.5 ten thousand -3 ten thousand cps), pair of the highly viscous glue to nano impression structure when the viscosity of nano impression glue is higher
It is difficult to fill completely, or even without filling compared with big gap (30-100 microns)；When moderate for the gap of nano impression structure, no
It is influenced vulnerable to interfacial contact angle, but needs certain force of impression.And nano impression mould group provided in an embodiment of the present invention is used, due to increasing
Add and be provided with electrode structure, hydrophobic layer and dielectric layer, in the nano impression structure of template side and the nano impression of substrate side
When glue-line carries out contact printing, by applying voltage to electrode structure, the drop of highly viscous nano impression glue-line can be made to exist
In nano impression structure have wetability, so as to so that the drop of highly viscous nano impression glue-line in nano impression structure
Filling is abundant.
Therefore, above-mentioned nano impression mould group provided in an embodiment of the present invention is suitable for filling out for the nano impression glue of any viscosity
It fills.
It should be noted that above-mentioned four enumerated the embodiment of the present invention is driving electrodes 51 and reference electricity in the present invention
The section Example structure of pole 52, when it is implemented, can according to need the structure of design driven electrode 51 and reference electrode 52,
It is right as long as can be realized when the nano impression structure of template side and the nano impression glue-line of substrate side carry out contact printing
Electrode structure applies voltage, and the drop of nano impression glue-line can be made to have wetability in nano impression structure, can make to receive
The drop of rice coining glue-line is filled in nano impression structure sufficiently belongs to the content that the present invention protects.
It should be noted that being to include first in nano impression mould group in above-mentioned four enumerated the embodiment of the present invention
It is illustrated for hydrophobic layer and the second hydrophobic layer, certainly when it is implemented, can not also be set in above-mentioned nano impression mould group
Set the first hydrophobic layer and the second hydrophobic layer.
Based on the same inventive concept, the embodiment of the invention also provides a kind of above-mentioned nanometer pressures provided in an embodiment of the present invention
The method for stamping of stamp group, as shown in fig. 7, can specifically include:
S701, the nano impression glue-line of the nano impression structure of template side and substrate side is subjected to contact printing；
S702, to electrode structure on-load voltage, there is the drop of the nano impression glue-line contacted with nano impression structure
Nano impression structure is printed on nano impression glue-line by wetability.
The method for stamping of nano impression mould group provided in an embodiment of the present invention passes through the nano impression structure in template side
When carrying out contact printing with the nano impression glue-line of substrate side, voltage is applied to electrode structure, by changing nano impression glue
Voltage between the drop and nano impression structure of layer, to change profit of the drop of nano impression glue-line in nano impression structure
Moist, i.e., between change drop and nano impression structure contact angle, drop can be sprawled in nano impression body structure surface, and solid-liquid connects
Contacting surface has widened trend, i.e. drop is greater than its cohesive force to the adhesive force of nano impression body structure surface, makes and nano impression knot
The drop of the nano impression glue-line of structure contact has wetability, therefore the drop of nano impression glue-line can be made to nano impression knot
Structure filling is abundant.
Further, in the specific implementation, in above-mentioned method for stamping provided in an embodiment of the present invention, by nano impression
Structure is printed on nano impression glue-line, can specifically include:
Glue-line is imprinted using ultraviolet light curing nano, is printed on nano impression structure on nano impression glue-line.
It further, in the specific implementation, can be to electrode knot in above-mentioned method for stamping provided in an embodiment of the present invention
After structure on-load voltage preset time, glue-line is imprinted using ultraviolet light curing nano；Or,
It can stop to after electrode structure on-load voltage preset time to electrode structure on-load voltage, using UV light
Change nano impression glue-line.
Nano impression mould group provided in an embodiment of the present invention and its method for stamping, the nano impression mould group include: opposite set
The template and substrate set, template have nano impression structure towards substrate side, and substrate has nano impression towards template side
Glue-line；It further include the electrode structure between template and substrate；The present invention by nano impression structure in template side with
When the nano impression glue-line of substrate side carries out contact printing, voltage is applied to electrode structure, by changing nano impression glue-line
Drop and nano impression structure between voltage, to change wetting of the drop of nano impression glue-line in nano impression structure
Property, that is, change the contact angle between drop and nano impression structure, drop can be sprawled in nano impression body structure surface, solid-liquid contact
There is widened trend in face, i.e. drop is greater than its cohesive force to the adhesive force of nano impression body structure surface, makes and nano impression structure
The drop of the nano impression glue-line of contact has wetability, therefore the drop of nano impression glue-line can be made to nano impression structure
Filling is abundant.Therefore, nano impression mould group provided in an embodiment of the present invention solves anti-stick because carrying out to template in the prior art
The contact angle that processing causes template gap to imprint glue drop with UV becomes larger, and UV coining glue is caused to fill not the nanostructure of template
Abundant problem.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (11)
1. a kind of nano impression mould group characterized by comprising the template and substrate being oppositely arranged, the template is towards described
Substrate side has nano impression structure, and the substrate has nano impression glue-line towards the template side；It further include being located at
Electrode structure between the template and the substrate；
When the nano impression structure of the template side and the nano impression glue-line of the substrate side carry out contact printing, institute
It states electrode structure to be configured as under the driving of voltage, makes the drop of the nano impression glue-line contacted with the nano impression structure
With wetability.
2. nano impression mould group as described in claim 1, which is characterized in that the electrode structure includes: driving electrodes and ginseng
Examine electrode；The reference electrode is oppositely arranged with the driving electrodes.
3. nano impression mould group as claimed in claim 2, which is characterized in that the reference electrode and the equal position of the driving electrodes
Between the substrate and the nano impression glue-line.
4. nano impression mould group as claimed in claim 2, which is characterized in that the reference electrode and the equal position of the driving electrodes
In the nano impression structure backwards to the side of the template.
5. nano impression mould group as described in claim 3 or 4, which is characterized in that the reference electrode and the driving electrodes
It is located on the same floor, and the driving electrodes and the reference electrode are alternately arranged.
6. nano impression mould group as described in claim 3 or 4, which is characterized in that the reference electrode and the driving electrodes
Positioned at different layers.
7. nano impression mould group as claimed in claim 2, which is characterized in that the reference electrode is located at the nano impression knot
Structure is backwards to the side of the template, and the driving electrodes are between the substrate and the nano impression glue-line.
8. such as the described in any item nano impression mould groups of claim 1-4 and 7, which is characterized in that further include: it is located at the nanometer
The first dielectric layer and the first hydrophobic layer that stamping structure outermost surfaces are cascading, and it is located at the nano impression glue
Second hydrophobic layer and second dielectric layer of the level to the contact setting of the surface of the substrate side.
9. a kind of method for stamping of such as described in any item nano impression mould groups of claim 1-8 characterized by comprising
The nano impression glue-line of the nano impression structure of the template side and the substrate side is subjected to contact printing；
To the electrode structure on-load voltage, have the drop of the nano impression glue-line contacted with the nano impression structure
There is wetability, the nano impression structure is printed on the nano impression glue-line.
10. method for stamping as claimed in claim 9, which is characterized in that the nano impression structure is being printed on described receive
On rice coining glue-line, specifically include:
The nano impression glue-line is solidified using ultraviolet light, the nano impression structure is made to be printed on the nano impression glue-line
On.
11. method for stamping as claimed in claim 10, which is characterized in that Xiang Suoshu electrode structure on-load voltage preset time
Afterwards, the nano impression glue-line is solidified using ultraviolet light；Or,
To after the electrode structure on-load voltage preset time, stop to the electrode structure on-load voltage, using UV light
Change the nano impression glue-line.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910549453.2A CN110133962A (en) | 2019-06-24 | 2019-06-24 | A kind of nano impression mould group and its method for stamping |
| PCT/CN2020/084318 WO2020258993A1 (en) | 2019-06-24 | 2020-04-10 | Nano-imprinting module and imprinting method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910549453.2A CN110133962A (en) | 2019-06-24 | 2019-06-24 | A kind of nano impression mould group and its method for stamping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110133962A true CN110133962A (en) | 2019-08-16 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020258993A1 (en) * | 2019-06-24 | 2020-12-30 | 京东方科技集团股份有限公司 | Nano-imprinting module and imprinting method therefor |
| CN112340693A (en) * | 2020-09-29 | 2021-02-09 | 清华大学 | Method for producing coatings having a surface microstructure |
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| KR20090028224A (en) * | 2007-09-14 | 2009-03-18 | 삼성전자주식회사 | Nano-imprint lithography process |
| US20110193263A1 (en) * | 2010-02-09 | 2011-08-11 | Samsung Electronics Co., Ltd. | Nano imprint apparatus and method of fabricating semiconductor device using the same |
| CN103926789A (en) * | 2014-02-07 | 2014-07-16 | 南方科技大学 | Nano-imprinting template, system thereof and imprinting method |
| CN109188862A (en) * | 2018-10-11 | 2019-01-11 | 京东方科技集团股份有限公司 | Stamping structure and its manufacturing method, impression block |
| CN109343306A (en) * | 2018-10-12 | 2019-02-15 | 京东方科技集团股份有限公司 | Impression block and the method imprinted using it |
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| CN110133962A (en) * | 2019-06-24 | 2019-08-16 | 京东方科技集团股份有限公司 | A kind of nano impression mould group and its method for stamping |
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- 2019-06-24 CN CN201910549453.2A patent/CN110133962A/en active Pending
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Patent Citations (5)
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| KR20090028224A (en) * | 2007-09-14 | 2009-03-18 | 삼성전자주식회사 | Nano-imprint lithography process |
| US20110193263A1 (en) * | 2010-02-09 | 2011-08-11 | Samsung Electronics Co., Ltd. | Nano imprint apparatus and method of fabricating semiconductor device using the same |
| CN103926789A (en) * | 2014-02-07 | 2014-07-16 | 南方科技大学 | Nano-imprinting template, system thereof and imprinting method |
| CN109188862A (en) * | 2018-10-11 | 2019-01-11 | 京东方科技集团股份有限公司 | Stamping structure and its manufacturing method, impression block |
| CN109343306A (en) * | 2018-10-12 | 2019-02-15 | 京东方科技集团股份有限公司 | Impression block and the method imprinted using it |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020258993A1 (en) * | 2019-06-24 | 2020-12-30 | 京东方科技集团股份有限公司 | Nano-imprinting module and imprinting method therefor |
| CN112340693A (en) * | 2020-09-29 | 2021-02-09 | 清华大学 | Method for producing coatings having a surface microstructure |
| CN112340693B (en) * | 2020-09-29 | 2023-08-25 | 清华大学 | Method for producing a coating having a surface microstructure |
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| WO2020258993A1 (en) | 2020-12-30 |
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