CN110132935A - A kind of preparation method enhancing surface-enhanced raman scattering substrate - Google Patents

A kind of preparation method enhancing surface-enhanced raman scattering substrate Download PDF

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CN110132935A
CN110132935A CN201910417340.7A CN201910417340A CN110132935A CN 110132935 A CN110132935 A CN 110132935A CN 201910417340 A CN201910417340 A CN 201910417340A CN 110132935 A CN110132935 A CN 110132935A
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flame
carbon black
preparation
support substrates
nanostructure
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CN110132935B (en
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潘路军
王建桢
赵永鹏
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Dalian University of Technology
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Dalian University of Technology
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N21/658Raman scattering enhancement Raman, e.g. surface plasmons

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Abstract

A kind of preparation method enhancing surface-enhanced raman scattering substrate, belongs to technical field of material.Enhancing surface-enhanced raman scattering substrate includes one layer of porous structure carbon black nano particle and noble metal (gold, silver etc.) nano particle for being attached to above-mentioned nano grain surface.Above-mentioned porous structure carbon black nano particle can be used various flammable non-toxic organic objects and deposit preparation by flame method on support substrates, and one layer of noble metal nano particles are deposited using physical gas phase deposition technology on its surface as template in porous structure carbon black nano particle, substrate is detected for SERS to construct porous carbon black/noble metal granule composite construction.High repeatability, low cost, property is stable, can be prepared on a large scale by can be obtained on support substrates by simple flame deposited and physical gas phase deposition technology by the present invention, and the SERS active-substrate of high sensitivity, a kind of easy new way is provided for the preparation and application scientific research of SERS substrate.

Description

A kind of preparation method enhancing surface-enhanced raman scattering substrate
Technical field
The invention belongs to technical field of material, be related to it is a kind of it is at low cost, homogeneity is good, it is repeated it is high, can be extensive The preparation method of the surface enhanced Raman scattering substrate of preparation.
Background technique
Surface Raman enhancement (Surface enhanced Raman Scattering, SERS) technology, which utilizes, has Gao Ling It is a kind of hypersensitive spectral technique suitable for low concentration detection to monomolecular detection that the active substrate of sensitivity, which is realized,.Cause Its high sensitivity, it is easy to detect the advantages that become common point of the fields such as biology, diagnostics, environmental monitoring, medical diagnosis on disease Analysis means.There are two aspects: Chemical enhancement and Electromagnetic enhancement for the enhancing mechanism of surface Raman enhancement scattering substrate;Chemical enhancement Principle is: generating photoinduced charge transfer between noble metal nano particles and the probe molecule for being attracted to substrate surface, is formed New surface metal compound polarizability increase, have under the irradiation of exciting light appropriate Raman enhance scattering effect.Electromagnetism The principle of enhancing is: generating local electric field between noble metal nano particles and forms surface plasmon resonance, covibration causes Local electric field enhanced strength is that Raman scattering strength is multiplied.Base is learnt according to the working principle that surface Raman enhancement scatters Can bottom surface form be the important factor in order that SERS effect occur and determine SERS signal power, so SERS substrate is always It is the research hotspot in the field.There is special nanostructure, the substrate of morphology controllable by preparation surface, reach highly sensitive inspection The purpose of survey.
The current preparation method for commonly preparing SERS substrate mainly has: chemical vapour deposition technique, physical vaporous deposition, Electrochemical redox method, chemical etching method, metal-sol method, oldered array printing technology etc..Common SERS substrate preparation Method there is preparation process it is complicated, at high cost, experimental period is long the problems such as, largely limit the popularization of SERS technology With application.
Therefore, a kind of function admirable is developed, is easy to large scale preparation, is low in cost, is easy to use, and testing result can The high high-performance SERS substrate of repeatability becomes particularly important.
Summary of the invention
It is an object of the invention to solve preparation time, cost of material, sensitivity etc. in existing SERS substrate technology of preparing Aspect is difficult to the problem of coordinating and unifying, provides a kind of quick, cheap, low consumption SERS substrate preparation method.
In order to achieve the above-mentioned object of the invention, the present invention provides following technical schemes:
A kind of preparation method enhancing surface-enhanced raman scattering substrate, enhancing surface-enhanced raman scattering substrate include one layer of porous knot Structure carbon black nano particle and noble metal (gold, silver etc.) nano particle for being attached to above-mentioned nano grain surface.Preparation method packet Include following steps:
The first step, using flame method, the porous carbon black nanostructure of deposition three-dimensional, realization are three-dimensional more on support substrates surface The building of hole carbon black nanoparticle structure body, specifically:
Support substrates are placed in combustible organic upper horizontal and are aligned it with flame source center;Define substrate and flame The distance in source is d, as shown in Fig. 1.Flame source is lighted, regulates and controls the relative altitude d of flame and support substrates, one layer can be deposited Three-dimensional porous carbon black nanostructure.The thickness of the three-dimensional porous carbon black nanostructure according to sedimentation time and can support The regulation of the relative position of substrate and flame;
Support substrates and mask plate can also be placed in combustible organic upper horizontal and be aligned it with flame source center, Wherein, mask plate is placed in support substrates lower surface;Flame source is lighted, the relative altitude of flame and support substrates, Ji Kechen are regulated and controled The three-dimensional porous carbon black nanostructure of one layer model of product.The thickness of the three-dimensional porous carbon black nanostructure of the medelling Degree can regulate and control according to the relative position of sedimentation time and support substrates and flame.
Second step, the three-dimensional porous carbon black nano junction of three-dimensional porous carbon black nanostructure or medelling that the first step is obtained Support membrane of the structure as SERS substrate, in your gold that its surface uses physical vaporous deposition to deposit a layer thickness as 10-500nm Metal nano-particle layer, to construct out carbon black/metal nanoparticle composite S ERS substrate.The support membrane is also referred to as crucial lining Bottom surface pattern manipulates layer.The noble metal nano particles size can be regulated and controled according to physical vapour deposition (PVD) relevant parameter.Root According to SERS enhance characteristic, can size, pattern, grain spacing to metal nanoparticle be finely adjusted guarantee SERS signal enhancing reach To suitable strength, the sensitivity for minimal feeding is promoted.
Further, combustable organic object described in the first step is any combustible organic that can produce carbon black nanostructure, packet Include alcohol, kerosene, candle etc..
Further, support substrates described in the first step include quartz plate, silicon wafer, titanium dioxide silicon wafer, stainless steel and aluminium oxide Substrate etc..
Further, the relative altitude of flame and support substrates described in the first step is 0 < d < 7cm;The sedimentation time is 10s-180s。
Further, noble metal described in second step is capable of forming active hot spot, including gold nanoparticle, Nano silver grain or The composite nanoparticle of the two.
Further, the physical gas phase deposition technology described in second step for deposited metal film includes magnetron sputtering Method, ion beam deposition, vapour deposition method, atomic force sedimentation, pulsed deposition method.
Compared with prior art, the invention has the benefit that the present invention on support substrates by passing through simple fire Flame deposition and physical gas phase deposition technology can be obtained high repeatability, low cost, property stabilization, can be prepared on a large scale, and The SERS active-substrate of high sensitivity provides a kind of easy new way for the preparation and application scientific research of SERS substrate.
Detailed description of the invention
Fig. 1 is carbon black manufacturing process schematic diagram in embodiment 1;
Fig. 2 is carbon black manufacturing process schematic diagram in embodiment 2;
Fig. 3 is the vertical view scanning electron microscope (SEM) photograph (SEM) of carbon black nanostructure in embodiment 1;
Fig. 4 is carbon black nanostructure cross section scanning electron microscope (SEM) photograph (SEM) in embodiment 1;
Fig. 5 is the vertical view scanning electron microscope (SEM) photograph (SEM) of the SERS substrate prepared in embodiment 1;
Fig. 6 is the cross section scanning electron microscope (SEM) photograph (SEM) of the SERS substrate prepared in embodiment 1;
Fig. 7 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 1;
Fig. 8 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 2;
Fig. 9 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 3;
Figure 10 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 4;
Figure 11 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 6;
Figure 12 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 10;
Figure 13 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 11;
Figure 14 is the Raman signal of R6G measured by the SERS substrate for preparing in embodiment 14.
Specific embodiment
As shown in Fig. 1, support substrates are placed in flame source (such as alcolhol burner) upper horizontal and makes itself and flame source center Alignment, lights flame source, lights flame source and start to deposit, three-dimensional porous carbon black nano junction can be obtained in time 10s-180s Hereafter support membrane of the structure as SERS substrate utilizes physical gas phase deposition technology deposition one on the carbon black structural body surface of preparation Layer noble metal film finally obtains carbon black/metal nanoparticle composite S ERS substrate with a thickness of 10nm-500nm.
As shown in Fig. 2, support substrates and mask plate are placed in flame source (such as alcolhol burner) upper horizontal, and makes itself and fire The alignment of flame source center, lights flame source, lights flame source and start to deposit, three-dimensional porous carbon can be obtained in time 10s-180s Hereafter support membrane of the black nanostructure as SERS substrate utilizes physical vapour deposition (PVD) skill on the carbon black structural body surface of preparation Art deposits one layer of noble metal film and finally obtains carbon black/metal nanoparticle composite S ERS base with a thickness of 10nm-500nm Bottom.
The present invention can be more easily to understand by reference to the detailed description below to embodiment and attached drawing.However, this Invention can have many different forms to implement, and should not be construed as limited to embodiment described in this paper.These embodiments It is intended to keep the disclosure complete and informs those skilled in the art in the invention's the scope of the present invention.It is three-dimensional more The macrostructure of hole carbon black nanostructure can be supported directly on silicon wafer using the porous carbon black nanostructure of flame source deposition three-dimensional Body, the mask plate that also can use plurality of specifications are prepared into the three-dimensional porous carbon black nanostructure supporter of different mode.
Embodiment 1
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in alcolhol burner upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and it is to start to deposit at 3cm that support substrates, which are placed in flame kernel d value, and time 10s can be obtained three Tie up porous carbon black nanostructure as SERS substrate support membrane (attached drawing 3 be this example in using flame method deposition three-dimensional it is more The stereoscan photograph (SEM) of hole carbon black nano-particle layer, as shown, the distribution of carbon black nanostructure size dimension is more equal One, and wherein have apparent hole configurations), silver nano-grain, setting are deposited using magnetic control sputtering device in carbon black nanostructure Magnetic control sputtering device operating current is 60mA, operating voltage 40mV, operating power 20W, sedimentation time 30min is obtained (attached drawing 4 is that this example sputters the SEM figure after silver nano-grain using magnetron sputtering to SERS substrate, as shown, silver nano-grain Size and form is more uniform, and is similarly formed 3 D stereo hole configurations).
Attached drawing 7 is the SERS substrate that is prepared using this example to rhodamine (biological stain, R6G) various concentration aqueous solution Raman spectrogram when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detectable concentration of this example preparation The limit is lower than 10-11Mol/L shows excellent SERS feature.
Embodiment 2
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates and mask plate are placed in alcolhol burner upper horizontal as shown in Fig. 2 and make itself and fire The alignment of flame source center, lights flame source, and it is to start to deposit at 3cm that support substrates, which are placed in flame kernel d value, time 10s, i.e., The three-dimensional porous carbon black nanostructure of medelling can be obtained as the support membrane of SERS substrate, and (attached drawing 3 is as shown in 2 illustration of attached drawing Using the stereoscan photograph (SEM) of the three-dimensional porous carbon black nano-particle layer of flame method deposition in this example, as shown, carbon Black nanostructure size dimension distribution is more uniform, and wherein has apparent hole configurations), magnetic is utilized in carbon black nanostructure It controls sputter and deposits silver nano-grain, setting magnetic control sputtering device operating current is 60mA, operating voltage 40mV, operating power are 20W, sedimentation time 30min, obtaining SERS substrate, (attached drawing 4 is after this example sputters silver nano-grain using magnetron sputtering SEM figure, as shown, silver nano-grain size and form is more uniform, and is similarly formed 3 D stereo hole configurations).
Attached drawing 8 is the SERS substrate that is prepared using this example to rhodamine (biological stain, R6G) various concentration aqueous solution Raman spectrogram when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detectable concentration of this example preparation The limit is lower than 10-11Mol/L shows excellent SERS feature.
Embodiment 3
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.It is burnt using kerosene Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and it is to start to deposit at 5cm that support substrates, which are placed in flame kernel d value, time 50s, it can be obtained Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate deposits silver using magnetic control sputtering device in carbon black nanostructure Nano particle, setting magnetic control sputtering device operating current is 60mA, operating voltage 40mV, operating power 20W, and sedimentation time is 30min obtains SERS substrate, and silver nano-grain size and form is more uniform, forms 3 D stereo hole configurations.
Attached drawing 9 is that the SERS substrate prepared with this experiment exists to rhodamine (biological stain, R6G) various concentration aqueous solution Raman spectrogram when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detectable concentration pole of this example preparation Limit is lower than 10-11Mol/L shows very excellent SERS feature.
Embodiment 4
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize candle combustion Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 1cm, time 30s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, is received in carbon black nanostructure using magnetic control sputtering device deposition silver Rice grain, setting magnetic control sputtering device operating current be 60mA, operating voltage 40mV, operating power 20W, sedimentation time is 30min obtains SERS substrate, and silver nano-grain size and form is more uniform, forms 3 D stereo hole configurations.
Attached drawing 10 is water-soluble to rhodamine (biological stain, R6G) various concentration for the SERS substrate prepared using this example Raman spectrogram of the liquid when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detection of this example preparation are dense It spends the limit and is lower than 10-11Mol/L, attached drawing 6 be the SERS substrate that is prepared using this example to rhodamine (biological stain, R6G) no With Raman spectrogram of the concentration of aqueous solution when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS of this example preparation The substrate detectable concentration limit is lower than 10-11Mol/L shows very excellent SERS feature.
Embodiment 5
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in alcolhol burner upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, ion beam depositing silver nanoparticle is utilized in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations, can express excellent SERS feature.
Embodiment 6
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.It is burnt using kerosene Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 150s be can be obtained Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate utilizes ion beam depositing silver nanoparticle in carbon black nanostructure Particle obtains SERS substrate, forms 3 D stereo hole configurations.
Attached drawing 11 is water-soluble to rhodamine (biological stain, R6G) various concentration for the SERS substrate prepared using this example Raman spectrogram of the liquid when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detection of this example preparation are dense It spends the limit and is lower than 10-10Mol/L shows very excellent SERS feature.
Embodiment 7
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize candle combustion Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, ion beam depositing silver nanoparticle is utilized in carbon black nanostructure Grain obtains SERS substrate, forms three-dimensional porous structure, can express very excellent SERS feature.
Embodiment 8
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, vapor deposition silver nanoparticle is utilized in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations, can express very excellent SERS feature.
Embodiment 9
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.It is burnt using kerosene Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, vapor deposition silver nanoparticle is utilized in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations, can express very excellent SERS feature.
Embodiment 10
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize candle combustion Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, vapor deposition silver nanoparticle is utilized in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations.
Attached drawing 12 is water-soluble to rhodamine (biological stain, R6G) various concentration for the SERS substrate prepared using this example Raman spectrogram of the liquid when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detection of this example preparation are dense It spends the limit and is lower than 10-10Mol/L shows very excellent SERS feature.
Embodiment 11
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 50s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, deposits silver nanoparticle using atomic force in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations.
Attached drawing 13 is water-soluble to rhodamine (biological stain, R6G) various concentration for the SERS substrate prepared using this example Raman spectrogram of the liquid when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detection of this example preparation are dense It spends the limit and is lower than 10-11Mol/L shows excellent SERS characteristic.
Embodiment 12
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.It is burnt using kerosene Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, deposits silver nanoparticle using atomic force in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations, can express excellent SERS characteristic.
Embodiment 13
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize candle combustion Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 100s be can be obtained Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate deposits silver nanoparticle using atomic force in carbon black nanostructure Particle obtains SERS substrate, forms 3 D stereo hole configurations, can express excellent SERS characteristic.
Embodiment 14
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, deposits silver nanoparticle using impulse method in carbon black nanostructure Grain obtains SERS substrate, forms 3 D stereo hole configurations.
Attached drawing 14 is water-soluble to rhodamine (biological stain, R6G) various concentration for the SERS substrate prepared using this example Raman spectrogram of the liquid when Raman excitation optical wavelength is 532.8nm, as seen from the figure, the SERS substrate detection of this example preparation are dense It spends the limit and is lower than 10-11Mol/L shows very excellent SERS feature.
Embodiment 15
Support dried for standby after quartz plate (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.It is fired using kerosene The flame flame envelope of burning deposits carbon black.As shown in Fig. 1 flame source upper horizontal place support substrates and make its in flame source Heart alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s be can be obtained Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate deposits silver nanoparticle using impulse method in carbon black nanostructure Particle obtains SERS substrate, forms 3 D stereo hole configurations, can express excellent SERS feature.
Embodiment 16
Support dried for standby after titanium dioxide silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize wax Burned flame flame envelope of lighting up deposits carbon black.Support substrates are placed in flame source upper horizontal as shown in Fig. 1 and make itself and flame The alignment of source center, lights flame source, by support substrates as flame kernel d value to start to deposit at 3cm, time 10s Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate is obtained, deposits silver using impulse method in carbon black nanostructure Nano particle obtains SERS substrate, forms 3 D stereo hole configurations, can express excellent SERS feature.
Embodiment 17
Support dried for standby after stainless steel (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.It is fired using alcohol The flame flame envelope of burning deposits carbon black.As shown in Fig. 1 alcolhol burner upper horizontal place support substrates and make its in flame source Heart alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s be can be obtained Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate deposits gold using magnetic control sputtering device in carbon black nanostructure Nano particle, setting magnetic control sputtering device operating current be 60mA, operating voltage 40mV, operating power 20W, sedimentation time For 20min, SERS substrate is obtained, can express excellent SERS feature.
Embodiment 18
Support dried for standby after aluminum oxide substrate (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize wine Smart burned flame flame envelope deposits carbon black.Support substrates are placed in alcolhol burner upper horizontal as shown in Fig. 1 and make itself and flame The alignment of source center, lights flame source, by support substrates as flame kernel d value to start to deposit at 3cm, time 10s Support membrane of the three-dimensional porous carbon black nanostructure as SERS substrate is obtained, ion beam depositing gold is utilized in carbon black nanostructure Nano particle obtains SERS substrate, can express excellent SERS feature.
Embodiment 19
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in alcolhol burner upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, vapor deposition gold nano is utilized in carbon black nanostructure Grain, obtains SERS substrate, can express excellent SERS feature.
Embodiment 20
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in alcolhol burner upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, deposits gold nano using atomic force in carbon black nanostructure Grain, obtains SERS substrate, can express excellent SERS feature.
Embodiment 21
Support dried for standby after silicon wafer (1cm*1cm) is cleaned with acetone, alcohol, deionized water respectively.Utilize alcohol burn Flame flame envelope deposit carbon black.Support substrates are placed in alcolhol burner upper horizontal as shown in Fig. 1 and make itself and flame source center Alignment, lights flame source, and by support substrates as flame kernel d value to start to deposit at 3cm, time 10s can be obtained three Support membrane of the porous carbon black nanostructure as SERS substrate is tieed up, deposits gold nano using impulse method in carbon black nanostructure Grain, obtains SERS substrate, can express excellent SERS feature.
Examples detailed above proves: simple and practical SERS substrate is synthesized using Technical Design proposed in this paper, it is significant to drop Low experimental period, low consumption and high sensitivity.The above-mentioned description to example simultaneously is the ordinary skill for the ease of the technical field Personnel can understand and apply the invention.Person skilled in the art obviously easily can make various repair to these examples Change, and applies the general principles described here to other examples without having to go through creative labor.Therefore, of the invention Examples of implementation here are not limited to, those skilled in the art's announcement according to the present invention for the improvement of the invention made and is repaired Changing all should be within protection scope of the present invention.

Claims (10)

1. a kind of preparation method for enhancing surface-enhanced raman scattering substrate, which is characterized in that the preparation method includes following step It is rapid:
The first step, using flame method on support substrates surface the porous carbon black nanostructure of deposition three-dimensional, realize three-dimensional porous carbon The building of black nanoparticle structure body, specifically: support substrates are placed in combustible organic upper horizontal and make itself and flame source Center alignment, defining substrate is d at a distance from flame source;Flame source is lighted, the relative altitude d of flame and support substrates is regulated and controled, One layer of three-dimensional porous carbon black nanostructure can be deposited;The thickness of the three-dimensional porous carbon black nanostructure can be according to heavy The relative position of product time and support substrates and flame regulates and controls;
The three-dimensional porous carbon black nanostructure of second step, the three-dimensional porous carbon black nanostructure that the first step is obtained or medelling is made For the support membrane of SERS substrate, uses physical vaporous deposition to deposit a layer thickness on its surface and received for the noble metal of 10-500nm Rice grain layer, to construct out carbon black/metal nanoparticle composite S ERS substrate;The noble metal nano particles size can root Regulated and controled according to physical vapour deposition (PVD) relevant parameter.
2. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 1, which is characterized in that the first step In, support substrates and mask plate can also be placed in combustible organic upper horizontal and be aligned it with flame source center, wherein Mask plate is placed in support substrates lower surface;Flame source is lighted, regulates and controls the relative altitude of flame and support substrates, one layer can be deposited The three-dimensional porous carbon black nanostructure of medelling;The thickness of the three-dimensional porous carbon black nanostructure of the medelling can root Regulate and control according to the relative position of sedimentation time and support substrates and flame.
3. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 1 or 2, which is characterized in that institute The relative altitude of the flame and support substrates stated is 0 < d < 7cm;The sedimentation time is 10s-180s.
4. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 1 or 2, which is characterized in that institute The support substrates stated include quartz plate, silicon wafer, titanium dioxide silicon wafer, stainless steel and aluminum oxide substrate.
5. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 3, which is characterized in that described Support substrates include quartz plate, silicon wafer, titanium dioxide silicon wafer, stainless steel and aluminum oxide substrate.
6. a kind of preparation method of enhancing surface-enhanced raman scattering substrate described according to claim 1 or 2 or 5, which is characterized in that The noble metal includes the composite nanoparticle of gold nanoparticle, Nano silver grain or both.
7. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 3, which is characterized in that described Noble metal includes the composite nanoparticle of gold nanoparticle, Nano silver grain or both.
8. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 4, which is characterized in that described Noble metal includes the composite nanoparticle of gold nanoparticle, Nano silver grain or both.
9. a kind of preparation method of enhancing surface-enhanced raman scattering substrate described according to claim 1 or 2 or 5 or 7 or 8, special Sign is, the physical gas phase deposition technology for deposited metal film include magnetron sputtering method, ion beam deposition, Vapour deposition method, atomic force sedimentation, pulsed deposition method.
10. a kind of preparation method for enhancing surface-enhanced raman scattering substrate according to claim 3, which is characterized in that described The physical gas phase deposition technology for deposited metal film include magnetron sputtering method, ion beam deposition, vapour deposition method, atom Power sedimentation, pulsed deposition method.
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