CN110132460B - Flexible sensitive pressure sensing device based on porous structure - Google Patents
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- CN110132460B CN110132460B CN201910316547.5A CN201910316547A CN110132460B CN 110132460 B CN110132460 B CN 110132460B CN 201910316547 A CN201910316547 A CN 201910316547A CN 110132460 B CN110132460 B CN 110132460B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Abstract
The invention discloses a flexible sensitive pressure sensing device based on a porous structure. The flexible pressure sensor is mainly formed by sequentially and tightly assembling a flexible porous sensitive pressure sensing unit, a flexible porous shell, a flexible electrode layer, a flexible substrate and a flexible porous substrate from top to bottom, wherein a groove is formed in the bottom surface of the flexible porous shell, the flexible porous substrate is embedded in the groove in an interference fit manner, and the flexible electrode layer is connected with an external analysis circuit; a mounting hole is formed in the flexible porous shell right above the flexible electrode layer, the flexible porous sensitive pressure sensing unit is mounted in the mounting hole in the flexible porous shell in an interference fit mode, the bottom surface of the flexible porous sensitive pressure sensing unit is of a concave-convex structure designed aiming at the geometric shape of a mounting plane, and the bottom surface of the flexible porous substrate is attached to the mounting plane outside. The invention has the advantages that the invention not only has the physical properties of small Young modulus, large friction coefficient and the like of the porous structure, but also the concave-convex structure at the bottom of the unit makes the porous structure more sensitive when sensing external force.
Description
Technical Field
The invention relates to a sensing device, in particular to a flexible sensitive pressure sensing device based on a porous structure.
Background
At present, the mechanical gripper as an important component of a service robot gradually enters the daily production and life of people, and plays an increasingly important role in the development of the human society.
The mechanical gripper is the most important execution component in the process of performing precise tasks by the service robot. In the working process of the mechanical gripper, pressure feedback and flexible protection between fingertips of the mechanical gripper are the basis of action decision and object protection of the mechanical gripper. That is, the pressure feedback of the fingertip brings the mechanical paw with 'touch', so that the mechanical paw is changed from a simple executing device to a simulated hand with a sensing function. The robot can interact with the outside.
At present, most of the sensors widely used, which include mechanical structural shapes designed to improve pressure sensitivity, are solid structures and do not have porous structures. The flexible sensor based on the porous structure has few mechanical structure shapes designed for improving the pressure sensitivity, so that the sensitivity of the regular three-dimensional structure of the conventional flexible sensor based on the porous structure is relatively low under the condition that the sensor works, and the sensing of some precise pressures is not facilitated.
On the other hand, the hardness of the hard sensor and the hardness of the traditional flexible sensor are both relatively high, so that when the manipulator grabs a fragile or flexible object, the hard sensor and the traditional flexible sensor can easily damage the object to a certain extent.
Disclosure of Invention
The problem that the traditional flexible pressure sensor is low in pressure sensitivity is solved, and the requirement of a key installation position on sensing precision is met. The invention provides a flexible sensitive pressure sensing device based on a porous structure, which can be applied to pressure feedback and flexible protection in a mechanical paw.
The technical scheme adopted by the invention for solving the problems is as follows:
the flexible porous pressure sensing device is mainly formed by sequentially and tightly assembling a flexible porous sensitive pressure sensing unit, a flexible porous shell, a flexible electrode layer, a flexible substrate and a flexible porous substrate from top to bottom, wherein the flexible electrode layer is arranged on the top surface of the flexible substrate, the flexible substrate provides a carrier plane for the flexible electrode layer, the flexible substrate is arranged on the top surface of the flexible porous substrate, the flexible porous shell is arranged on the flexible electrode layer, the bottom surface of the flexible porous shell is provided with a groove, the flexible porous substrate is embedded in the groove in an interference fit manner, so that the flexible electrode layer and the flexible substrate are clamped between the flexible porous shell and the flexible porous substrate together, and two output ends of the flexible electrode layer are led out to be connected with an external analysis circuit; the flexible porous shell right above the flexible electrode layer is provided with a mounting hole, the flexible porous sensitive pressure sensing unit is mounted in the mounting hole in the flexible porous shell in an interference fit mode, the bottom surface of the flexible porous sensitive pressure sensing unit is of a concave-convex structure designed aiming at the geometric shape of a mounting plane, the bottom surface of the flexible porous substrate is attached to the mounting plane outside, and the flexible sensitive pressure sensing device is fixed on the mounting plane.
The flexible porous sensitive pressure sensing unit is obtained by soaking, but not limited to, formed melamine sponge into, but not limited to, a solution containing a sensitive conductive material, such as carbon nanotubes, and then taking out the melamine sponge, or dropping the solution containing the sensitive conductive material, such as carbon nanotubes, on the melamine sponge; then drying, cleaning by using n-hexane solution, and drying again to obtain the product. The prepared flexible porous sensitive pressure sensing unit has a porous structure, and a microscopic filamentous conductive path is formed inside the flexible porous sensitive pressure sensing unit.
The external force acts on the flexible porous pressure sensing unit to enable the unit to generate geometric deformation, and then the number of microscopic filiform conductive paths in the unit is changed to cause the change of the resistance value. The change of the resistance value can reflect the force applied to the flexible porous sensitive pressure sensing unit from the outside.
The high sensitivity of the invention is embodied in that the geometrical shape of the bottom of the flexible porous sensitive pressure sensing unit, which is contacted with the electrode, is a concave-convex structure, which can enhance the stress concentration generated by the porous structure, so that the porous structure can generate a more obvious stress concentration effect as far as possible when the flexible porous sensitive pressure sensing unit senses an external force, thereby increasing the deformation quantity of the flexible porous sensitive pressure sensing unit, further increasing the change number of the micro-filamentous conductive paths of the porous structure in the unit, and further enhancing the change of the electrical quantity more obviously.
The formed melamine sponge is processed into a three-dimensional structure capable of sensing pressure by a hot stamping method or a laser cutting method, and the shape of the three-dimensional structure comprises but is not limited to a sawtooth shape.
The flexible porous substrate is rectangular but not limited to rectangular.
The flexible porous substrate material includes, but is not limited to, melamine.
The flexible substrate is rectangular but not limited to rectangular.
The flexible substrate material includes, but is not limited to, polyimide PI.
The flexible electrode layer is arranged in an interdigital structure but is not limited to the interdigital structure.
The flexible electrode layer material includes but is not limited to copper Cu.
The flexible electrode layer is deposited on the surface of the flexible substrate by a patterning process including, but not limited to, ink jet printing and the like.
The flexible porous shell is rectangular but not limited to rectangular, and corresponds to the shape of the flexible porous substrate.
The flexible porous shell material includes, but is not limited to, melamine.
The flexible porous shell is used as an integral packaging and protecting structure of the flexible sensitive pressure sensing device to protect the normal work of the internal electrode layer.
Meanwhile, the flexible porous material is quite suitable for the application of pressure feedback and flexible protection in a mechanical paw because of the quite small Young modulus. Meanwhile, the extremely high friction coefficient can also play a considerable role in preventing skidding on the mechanical paw.
The invention has the beneficial effects that:
the flexible porous sensitive pressure sensing unit can generate a relatively obvious stress concentration effect as much as possible when external force is sensed, and the deformation of the flexible porous sensitive pressure sensing unit is increased. And then the change number of the conductive paths in the porous structure of the unit is increased, the change of the electrical quantity is enhanced, and the high-sensitivity pressure sensing detection is realized.
The invention has the advantages that the invention not only has the physical properties of small Young modulus, large friction coefficient and the like of the porous structure, but also the concave-convex structure at the bottom of the unit makes the porous structure more sensitive when sensing external force.
The invention can be provided with flexible porous sensitive pressure sensing units of different shapes and different sensitive conductive materials to adapt to the sensing requirements.
Drawings
FIG. 1 is a schematic structural diagram of a flexible pressure-sensitive sensor apparatus of the present invention;
FIG. 2 is an isometric view of a flexible sensitive pressure sensing device of the present invention;
fig. 3 is a diagram of sensing units of different shapes of the flexible sensitive pressure sensing device of the present invention.
FIG. 4 is a graph showing the dynamic pressure test results of the flexible porous pressure sensing unit with the triangular saw-tooth-shaped bottom (as shown in FIG. 3 a).
FIG. 5 is a graph of dynamic pressure test results for a flexible porous pressure sensing cell with a bottom in the shape of a semicircle (as shown in FIG. 3 b).
FIG. 6 is a graph of dynamic pressure test results for a flexible porous pressure sensing cell with a trapezoidal bottom shape (as shown in FIG. 3 c).
In the figure: the flexible porous sensitive pressure sensing device comprises a flexible porous sensitive pressure sensing unit (1), a flexible porous shell (2), a flexible electrode layer (3), a flexible substrate (4) and a flexible porous substrate (5).
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in FIG. 1, the embodiment of the invention comprises a flexible porous substrate 5, a flexible substrate 4 stacked on the flexible porous substrate 5, a flexible electrode layer 3 deposited on the surface of the flexible substrate 4 by a patterning method, a flexible porous shell 2 mounted by interference fit above the flexible electrode layer, and a flexible porous sensitive pressure sensing unit 1 mounted in a mounting hole on the flexible porous shell by interference fit, which constitute a flexible sensitive pressure sensing device based on a porous structure. Specifically, the flexible electrode layer 3 is arranged on the top surface of the flexible substrate 4, the flexible substrate 4 provides a carrier plane for the flexible electrode layer 3, the flexible substrate 4 is arranged on the top surface of the flexible porous substrate 5, the flexible porous shell 2 is arranged on the flexible electrode layer 3, a groove is formed in the bottom surface of the flexible porous shell 2, the flexible porous substrate 5 is embedded in the groove in an interference fit manner, the flexible electrode layer 3 and the flexible substrate 4 are clamped between the flexible porous shell 2 and the flexible porous substrate 5 together, and two output ends of the flexible electrode layer 3 are led out to be connected with an external analysis circuit as an electrical signal transmission channel; a mounting hole is formed in the flexible porous shell 2 right above the flexible electrode layer 3, the flexible porous sensitive pressure sensing unit 1 is mounted in the mounting hole in the flexible porous shell 2 in an interference fit mode, the bottom surface of the flexible porous sensitive pressure sensing unit 1 is of a concave-convex structure designed aiming at the geometric shape of a mounting plane, the bottom surface of the flexible porous substrate 5 is attached to the external mounting plane, and the flexible sensitive pressure sensing device is fixed on the mounting plane.
Due to the action of external force, the flexible porous sensitive pressure sensing unit 1 is subjected to geometric deformation, so that the number of conductive paths inside the flexible porous sensitive pressure sensing unit 1 is changed, and further the resistance value is changed. The external force can be detected by monitoring the electrical parameter resistance value of the flexible porous sensitive pressure sensing unit 1.
Before installation, the flexible electrode layer 3 is placed on the upper portion of the flexible porous substrate 5, then the flexible porous substrate 5 is installed on the lower portion of the flexible porous shell 2 in an interference fit mode, and the flexible porous shell 2, the flexible substrate 4 and the flexible porous substrate 5 form a sandwich-shaped structure.
The bottom geometric structure of the flexible porous sensitive pressure sensing unit 1 is in a sawtooth shape, but not limited to the sawtooth structure; the overall geometry of the device can be fitted into the mounting hole by interference fit. When the flexible porous sensitive pressure sensing unit is installed, the geometric shape of the flexible porous sensitive pressure sensing unit 1 is only required to be plugged into the installation hole, and after the flexible porous sensitive pressure sensing unit 1 is assembled, the flexible porous sensitive pressure sensing unit is slightly contacted with the bottom flexible electrode layer 3.
The flexible electrode layer 3 on the flexible substrate 4 is of an interdigital structure, each electrode comprises 3 interdigital structures which are arranged in a crossed mode, and the electrodes and an external singlechip analysis circuit monitor the resistance value of the flexible porous sensitive pressure sensing unit 1 through the ohm law. The signal is then sent to an external computer analysis device for feedback and enforcement of the corresponding action strategy.
Under the condition of non-pressing after installation, the flexible porous sensitive pressure sensing unit 1 slightly contacts the flexible electrode layer 3;
according to the pressing, the flexible porous sensitive pressure sensing unit 1 is elastically deformed and is compressed in the direction of the pressing force under the action of the pressing force, the number of the conductive paths in the flexible porous sensitive pressure sensing unit 1 is changed, meanwhile, the contact area between the flexible porous sensitive pressure sensing unit 1 and the flexible electrode layer 3 is increased, and the resistance value between the two electrodes is changed.
The flexible electrode layer 3 on the flexible substrate 4 at the bottom of the device can be deposited and connected with the flexible substrate 4 into a whole by a patterning method such as ink-jet printing, and the port of the flexible electrode layer 3 can be connected with an analysis circuit such as a singlechip.
The flexible porous sensitive pressure sensing unit 1 of the embodied device is taken out after soaking melamine sponge including but not limited to melamine sponge into solution containing sensitive conductive materials including but not limited to carbon nanotubes and the like, or dripping the solution containing the sensitive conductive materials including the carbon nanotubes and the like on the sponge; then drying, cleaning by using n-hexane solution, and then drying to obtain the product.
When the device is used, the lower surface of the flexible porous substrate 5 without the sensing function is attached to the area to be detected, and the flexible porous sensitive pressure sensing unit 1 senses the magnitude of external force.
The sensing precision and the pressure sensing range of the flexible porous sensing pressure sensing unit 1 can be changed by changing the type and the concentration of the sensitive conductive material or changing the structure of the flexible porous sensing pressure sensing unit 1. The Young's modulus can be adjusted by adding prepolymers of polydimethylsiloxane PDMS in different proportions to the sensitive conductive material solution: curing agent to adjust the young's modulus of the flexible porous sensitive pressure sensing unit 1.
The material of which the flexible porous substrate 5 is made is a flexible material, including but not limited to, a poly (terephthalic acid) Plastic (PET); the flexible porous sensitive pressure sensing unit 1 is made of materials including, but not limited to, melamine; sensitive conductive materials include, but are not limited to, carbon nanotubes; materials used for the flexible electrode layer 3 include, but are not limited to, copper (Cu); the materials of the flexible porous substrate 5 and the flexible porous shell 2 include, but are not limited to, melamine.
As shown in FIG. 2, the flexible pressure sensing device based on the porous structure is formed by mounting a flexible porous substrate 5, a flexible substrate 4 stacked on the flexible porous substrate 5, a flexible electrode layer 3 deposited on the surface of the flexible substrate 4 by a patterning method, and a flexible porous shell 2 mounted by interference fit and a flexible porous pressure sensing unit 1 mounted in a mounting hole on the flexible porous shell by interference fit together, wherein an axonometric view of the flexible pressure sensing device based on the porous structure is shown in FIG. 2.
As shown in fig. 3, the process of assembling the flexible porous sensitive pressure sensing unit 1 of the present invention to the flexible porous housing 2 is only related to the geometrical dimensions of the mounting holes and the flexible porous sensitive pressure sensing unit 1, and is not related to the sensitive shape of the bottom of the flexible porous sensitive pressure sensing unit 1 which is beneficial to pressure sensing. Then, flexible porous sensitive pressure sensing units 1 of different shapes can be used such as: a triangular saw tooth shape, b double semi-circle shape, c trapezoid shape or other more complex structures beneficial to pressure sensing.
As shown in fig. 3a to 3c, the triangular saw-tooth shape, the double semi-circle shape and the double trapezoid shape are respectively.
Example 1
The test conditions of the reciprocating cyclic force loading test of 0.1N-1N are as follows: the flexible porous pressure sensing unit 1 is subjected to a tension-compression test at a speed of 100mm/min by a tension-compression testing machine, and the minimum pressure and the maximum pressure of the test, which act on the sensing unit, are respectively 0.1N and 1N. The measuring resistance is the resistance of the bottom structure of the flexible porous sensitive pressure sensing unit 1.
For the reciprocating cyclic force loading experiment of 0.1N-1N, the flexible porous pressure sensing unit 1 with the triangular sawtooth shape as shown in FIG. 3a is adopted. The sensing results of this test are shown in fig. 4: the resistance change ratio (ratio of the maximum value of the change resistance to the lowest resistance during the experiment) was 7 times, and the result is shown in fig. 5; a flexible porous pressure sensing cell 1 in the shape of a double semicircle is used as shown in fig. 3 b. The sensing results of this test are shown in fig. 6: the resistance change ratio (the ratio of the maximum value of the change resistance to the lowest resistance in the experimental process) was 2.5 times; a flexible porous pressure sensing cell 1 in the shape of a triangular prism is used as shown in fig. 3 c. The sensing results of this test are shown in fig. 6: the resistance change ratio (ratio of the change resistance to the static resistance) was 1.7 times.
Meanwhile, the experiment had two additional control groups with the same cell shape. The sensitivity ordering of the three shapes within the three groups is: triangular sensitivity > semicircular sensitivity > trapezoidal sensitivity.
It can be shown that under dynamic pressure application conditions, sensing units with different geometrical base shapes have different sensitivity characteristics. Therefore, the flexible sensitive pressure sensing device based on the porous structure can change the sensitivity of the unit by changing the shape of the bottom.
Example 2
Since the bottom shape structures of the flexible porous pressure sensing units 1 with different shapes have different sensitivity characteristics, different bottom shape structures can be adopted in different application scenes.
For the sensing unit of the surface of the mechanically dexterous hand, a flexible porous pressure sensing unit 1 with a triangular saw-tooth shape as shown in fig. 3a can be used. The sensor is relatively excellent in sensitivity and suitable for being applied to precise operation machinery such as mechanical dexterous hands.
For a sensing array of a human-computer interaction robot surface, a flexible porous pressure sensing unit 1 with a trapezoidal shape as shown in fig. 3c can be adopted. The device is relatively insensitive to external force change, and the problem of false alarm caused by over sensitivity of the sensor in the human-computer interaction process is solved. Meanwhile, the Young's moduli of the units with different bottom shapes are different from each other due to the influence of shape factors, and the capacity of resisting external impact is also different.
The process of assembling the flexible porous sensitive pressure sensing unit on the flexible porous substrate is only related to the geometric dimensions of the mounting hole and the flexible porous sensitive pressure sensing unit, and is not related to the shape of the bottom of the flexible porous sensitive pressure sensing unit and the conductive material. Therefore, after the processing cost and the sensing precision of the flexible porous sensing pressure sensing units of different shapes and different sensitive conductive materials are comprehensively considered, the flexible porous sensing pressure sensing units of different shapes and different sensitive conductive materials can be installed to adapt to the sensing requirements.
Claims (9)
1. A flexible sensitive pressure sensing device based on porous structure, its characterized in that:
mainly comprises a flexible porous sensitive pressure sensing unit (1), a flexible porous shell (2), a flexible electrode layer (3), a flexible substrate (4) and a flexible porous substrate (5) which are tightly assembled in sequence from top to bottom, wherein the flexible electrode layer (3) is arranged on the top surface of the flexible substrate (4), the flexible substrate (4) provides a carrier plane for the flexible electrode layer (3), the flexible substrate (4) is arranged on the top surface of the flexible porous substrate (5), the flexible porous shell (2) is arranged on the flexible electrode layer (3), and the bottom surface of the flexible porous shell (2) is provided with a groove, the flexible porous substrate (5) is embedded in the groove in an interference fit manner, the flexible electrode layer (3) and the flexible substrate (4) are clamped between the flexible porous shell (2) and the flexible porous substrate (5), and two output ends of the flexible electrode layer (3) are led out to be connected with an external analysis circuit; a mounting hole is formed in the flexible porous shell (2) right above the flexible electrode layer (3), the flexible porous sensitive pressure sensing unit (1) is mounted in the mounting hole in the flexible porous shell (2) in an interference fit mode, the bottom surface of the flexible porous sensitive pressure sensing unit (1) is of a concave-convex structure designed aiming at the geometric shape of a mounting plane, the bottom surface of the flexible porous substrate (5) is attached to the external mounting plane, and the flexible sensitive pressure sensing device is fixed on the mounting plane;
the concave-convex structure can enhance the porous structure to generate stress concentration, so that the porous structure generates a stress concentration effect when the flexible porous sensitive pressure sensing unit senses external force, the deformation quantity of the flexible porous sensitive pressure sensing unit is increased, the change number of microscopic filamentous conductive paths of the porous structure in the flexible porous sensitive pressure sensing unit is increased, and the change of electrical quantity is enhanced;
the bottom shape structure of the flexible porous pressure sensing unit (1) with different shapes and different sensitive conductive materials is specifically implemented and installed, so that the flexible porous pressure sensing unit has different sensitivity characteristics to adapt to different sensing requirements.
2. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the flexible porous sensitive pressure sensing unit (1) is formed by soaking formed melamine sponge into a solution containing sensitive conductive materials and then taking out the melamine sponge, or dripping solutions containing sensitive conductive materials such as carbon nano tubes on the melamine sponge; then drying, cleaning by using n-hexane solution, and drying again to obtain the product.
3. The flexible sensitive pressure sensing device based on porous structure of claim 2, wherein: the formed melamine sponge is processed into a solid structure by a hot stamping method or a laser cutting method.
4. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the flexible porous substrate (5), the flexible substrate (4) and the flexible porous shell (2) are rectangular.
5. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the materials of the flexible porous substrate (5) and the flexible porous shell (2) comprise melamine.
6. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the flexible substrate (4) material comprises Polyimide (PI).
7. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the flexible electrode layer (3) is arranged in an interdigital structure.
8. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the flexible electrode layer (3) material comprises copper (Cu).
9. The flexible sensitive pressure sensing device based on porous structure of claim 1, wherein: the flexible electrode layer (3) is deposited on the surface of the flexible substrate (4) by a patterning method.
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| CN110589754B (en) * | 2019-09-12 | 2023-03-24 | 复旦大学 | Flexible underwater pressure sensor and preparation method thereof |
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| US7713574B2 (en) * | 2004-07-13 | 2010-05-11 | Dexcom, Inc. | Transcutaneous analyte sensor |
| CN201653446U (en) * | 2010-03-11 | 2010-11-24 | 浙江吉利汽车研究院有限公司 | Sensor protective cover |
| CN103358312A (en) * | 2013-07-29 | 2013-10-23 | 华南农业大学 | End effector and application thereof |
| CN104811084B (en) * | 2014-06-13 | 2017-05-03 | 纳米新能源（唐山）有限责任公司 | Friction generator, and touch pressure sensor and manufacture method thereof |
| US9631666B1 (en) * | 2015-06-11 | 2017-04-25 | Genplex, Inc. | Plastic expandable bolt thread protector |
| EP3299071A4 (en) * | 2016-02-05 | 2018-12-05 | Park Lee, Chuen Wook | Protective equipment for transmitting a score in sports |
| CN105840680B (en) * | 2016-05-11 | 2018-09-25 | 中车青岛四方机车车辆股份有限公司 | A kind of taper interference fit component dismounting protective device and shaft coupling |
| CN105865667B (en) * | 2016-05-19 | 2018-06-01 | 北京印刷学院 | Condenser type pliable pressure sensor based on micro-structural dielectric layer and preparation method thereof |
| CN106932128A (en) * | 2017-04-21 | 2017-07-07 | 清华大学深圳研究生院 | For the pressure sensitive layer and piezoresistive pressure sensor of piezoresistive pressure sensor |
| CN107260188B (en) * | 2017-07-19 | 2020-03-31 | 东南大学 | Multi-direction occlusal force measuring device based on force sensor |
| CN107677296B (en) * | 2017-09-25 | 2019-11-08 | 合肥工业大学 | A kind of Grazing condition is close to-touch-pressure sensation sensor |
| CN108444620B (en) * | 2018-02-08 | 2020-11-03 | 浙江大学 | Same-layer type multi-stage array pressure sensor |
| CN108489644B (en) * | 2018-02-12 | 2020-01-03 | 华中科技大学 | High-sensitivity sensor based on MXene/rGO composite three-dimensional structure |
| CN108557759A (en) * | 2018-05-10 | 2018-09-21 | 北京大学 | High-performance flexible touch force sensor and preparation method thereof |
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