CN110119042A - 一种mz型光波导电控去偏器 - Google Patents

一种mz型光波导电控去偏器 Download PDF

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CN110119042A
CN110119042A CN201910391733.5A CN201910391733A CN110119042A CN 110119042 A CN110119042 A CN 110119042A CN 201910391733 A CN201910391733 A CN 201910391733A CN 110119042 A CN110119042 A CN 110119042A
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佘玄
姚俊杰
陈侃
黄腾超
舒晓武
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Zhejiang University ZJU
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/126Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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    • G02B2006/1204Lithium niobate (LiNbO3)
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
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    • G02B2006/12035Materials
    • G02B2006/12061Silicon
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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Abstract

本发明公开了一种MZ型光波导电控去偏器。本发明包括输入直波导、1:2分束波导、调制电极、90度偏振旋转波导、直波导、弯曲增程波导、2:1合束波导、输出直波导;宽谱TE偏振光从直波导输入,经1:2分束波导后分成两束宽谱TE偏振光,1:2分束波导上分支的宽谱TE偏振光经90°偏振旋转波导后转换为宽谱TM偏振光,由直波导进入2:1合束波导的上分支,经过下分支的宽谱TE偏振光经过弯曲增程波导后与上分支的宽谱TM偏振光在输出直波导汇合后,形成去偏光。本发明的调制电极通过电控实现精密调节两臂的分光比,使输出直波导中TE和TM能量相等;克服了由偏振旋转波导损耗、TE和TM波导传输损耗造成的分光不均。

Description

一种MZ型光波导电控去偏器
技术领域
本发明属于集成光学领域,具体涉及一种MZ型光波导电控去偏器。
背景技术
许多光学仪器、光纤传感器、光通信系统都对光的偏振态(SOP)敏感,而光纤芯的微小瑕疵、永久压力、弯曲、扭转以及外界温度的变化等因素都会造成光的偏振态的不稳定,这种不必要的偏振依赖性将很容易引起偏振损害,从而导致这些器件和系统的性能大大下降。
为了克服偏振敏感所带来的种种问题,迄今为止人们已提出了多种方法。其中应用比较普遍是Lyot型去偏器,它是用两端长度比2:1的双折射保偏光纤以主轴相差45°对接而成,满足实现退偏的两个条件,一是出射光映射到两个正交轴上的电场强度要相等,二是保证光纤足够长,使输出x、y方向的电场Ex、Ey的延时差远大于相干时间,两正交电场完全不相干。由于光纤的双折射仅为5×10-4左右,在某些应用中需要数米或数十米长的光纤以满足系统对去偏的需要,另外,精准的45度熔接难以保证,熔接点相对比较脆弱且易受应力的影响使得光纤型Lyot去偏器受到限制。
发明内容
为了解决背景技术中的问题,本发明提供一种集成度高、尺寸小、制备工艺简单、易于封装的基于MZ型结构的电控去偏器。
本发明采用的技术方案是:
本发明包括硅衬底、设于硅衬底上表面的二氧化硅缓冲层及设于二氧化硅缓冲层上表面的铌酸锂单晶薄膜层;其中,硅衬底厚度为0.2~1毫米;二氧化硅缓冲层厚度为1~10微米,铌酸锂单晶薄膜厚度0.2~2微米。
铌酸锂单晶薄膜层表面集成有输入直波导、调制电极、1:2分束波导、90度偏振旋转波导、直波导、弯曲增程波导、2:1合束波导、输出直波导;输入直波导与1:2分束波导的输入端口相连,1:2分束波导的一个输出端口依次经90度偏振旋转波导、直波导连接至2:1合束波导的一个输入端口,1:2分束波导另一个输出端口经弯曲增程波导连接至2:1合束波导的另一个输入端口,2:1合束波导的输出端口与输出直波导相连;1:2分束波导输入端两侧设有调制电极。
宽谱TE偏振光从输入直波导输入,经1:2分束波导后分成两束宽谱TE偏振光;经过1:2分束波导上分支的一束宽谱TE偏振光经90°偏振旋转波导后转换为宽谱TM偏振光,再经直波导进入2:1合束波导的上分支;经过1:2分束波导下分支的一束宽谱TE偏振光经弯曲增程波导、2:1合束波导的下分支后与进入2:1合束波导上分支的宽谱TM偏振光在输出直波导汇合,形成去偏光。
所述的输入直波导、调制电极、1:2分束波导、90度偏振旋转波导、直波导、弯曲增程波导、2:1合束波导、输出直波导均为脊波导.
所述1:2分束波导上下分支的光程差大于输入宽谱光的相干长度。
所述调制电极通过调节1:2分束波导上下分支的分光比,使输出直波导中的宽谱TE偏振光和宽谱TM偏振光能量相等。
本发明的有益效果:
1)本发明采用MZ干涉结构,将TE、TM光分别经由不同的光链路后汇合,1毫米长度的光程差即相当Lyot去偏器中约4米普通保偏光纤带来的去偏效果。器件的集成度高、尺寸小、制备工艺简单、易于封装适于批量生产。
2)本发明提出的基于MZ型结构的电控去偏器中的1:2分束波导两边制备有调制电极,用以调节两臂的分光比,克服偏振旋转波导损耗、TE和TM波导传输损耗造成的分光不均,可以大大降低对光波导制备损耗的要求;通过电控可以实现精密调节两臂的分光比,使输出直波导中TE和TM能量相等。
附图说明
图1是本发明的结构示意图;
图2是脊波导的截面示意图。
图中:1、输入直波导,2、调制电极,3、1:2分束波导,4、90度偏振旋转波导,5、直波导,6、弯曲增程波导,7、2:1合束波导,8、输出直波导,9、铌酸锂单晶薄膜,10、二氧化硅缓冲层,11、硅衬底。
具体实施方式
下面结合附图和实施例对本发明作进一步说明。
如图1所示,本发明包括输入直波导1、调制电极2、1:2分束波导3、90度偏振旋转波导4、直波导5、弯曲增程波导6、2:1合束波导7、输出直波导8。输入直波导1与1:2分束波导3的输入端口相连,1:2分束波导3的一个输出端口依次经90度偏振旋转波导4、直波导5连接至2:1合束波导7的一个输入端口,1:2分束波导3另一个输出端口经弯曲增程波导6连接至2:1合束波导7的另一个输入端口,2:1合束波导7的输出端口与输出直波导8相连;1:2分束波导3输入端两侧设有调制电极2。
宽谱TE偏振光从输入直波导1输入,经1:2分束波导3后分成两束宽谱TE偏振光;经过1:2分束波导3上分支的一束宽谱TE偏振光经90°偏振旋转波导4后转换为宽谱TM偏振光,再经直波导5进入2:1合束波导7的上分支;经过1:2分束波导3下分支的一束宽谱TE偏振光经弯曲增程波导6、2:1合束波导7的下分支后与进入2:1合束波导7上分支的宽谱TM偏振光在输出直波导7汇合,形成去偏光。
如图2所示,输入直波导1、调制电极2、1:2分束波导3、90度偏振旋转波导4、直波导5、弯曲增程波导6、2:1合束波导7、输出直波导8集成于铌酸锂单晶薄膜层9表面,硅衬底11位于最底层,二氧化硅缓冲层10位于硅衬底上表面,铌酸锂单晶薄膜层9位于二氧化硅缓冲层10。其中,硅衬底11厚度为0.2~1毫米;二氧化硅缓冲层10厚度为1~10微米,铌酸锂单晶薄膜9厚度为0.2~2微米。
调制电极2通过调节1:2分束波导3上下分支的分光比,使输出直波导8中的宽谱TE偏振光和宽谱TM偏振光能量相等;克服了由90度偏振旋转波导4损耗、TE和TM波导传输损耗造成的分光不均,可以大大降低对光波导制备损耗的要求。
实施例:
本实例输入的宽谱TE偏振光光源采用SLD光源,输出功率为800微瓦,中心波长为1310纳米,3dB半高谱宽40nm。光源的相干长度为42.9微米。硅衬底11厚度为0.5毫米、二氧化硅缓冲层10厚度为2微米、铌酸锂单晶薄膜9厚度为0.6微米。输入直波导1、调制电极2、1:2分束波导3、90度偏振旋转波导4、直波导5、弯曲增程波导6、2:1合束波导7、输出直波导8均为脊波导;波导宽度为0.8微米,脊高0.3微米;调制电极2长度为2毫米,调制电极2与脊波导的间距为2微米。弯曲增程波导6的长度比90度偏振旋转波导4和直波导5的长度和大100微米。铌酸锂脊波导的等效折射率约为2,则MZ两个分支的光程差大于200微米,大于SLD光源相干长度的3倍,达到去偏的目的。

Claims (5)

1.一种MZ型光波导电控去偏器,其特征在于:包括硅衬底(11)、设于硅衬底(11)上表面的二氧化硅缓冲层(10)及设于二氧化硅缓冲层(10)上表面的铌酸锂单晶薄膜层(9);
铌酸锂单晶薄膜层(9)表面集成有输入直波导(1)、调制电极(2)、1:2分束波导(3)、90度偏振旋转波导(4)、直波导(5)、弯曲增程波导(6)、2:1合束波导(7)、输出直波导(8);输入直波导(1)与1:2分束波导(3)的输入端口相连,1:2分束波导(3)的一个输出端口依次经90度偏振旋转波导(4)、直波导(5)连接至2:1合束波导(7)的一个输入端口,1:2分束波导(3)另一个输出端口经弯曲增程波导(6)连接至2:1合束波导(7)的另一个输入端口,2:1合束波导(7)的输出端口与输出直波导(8)相连;1:2分束波导(3)输入端两侧设有调制电极(2)。
2.根据权利要求1所述的一种MZ型光波导电控去偏器,其特征在于:宽谱TE偏振光从输入直波导(1)输入,经1:2分束波导(3)后分成两束宽谱TE偏振光;经过1:2分束波导(3)上分支的一束宽谱TE偏振光经90°偏振旋转波导(4)后转换为宽谱TM偏振光,再经直波导(5)进入2:1合束波导(7)的上分支;经过1:2分束波导(3)下分支的一束宽谱TE偏振光经弯曲增程波导(6)、2:1合束波导(7)的下分支后与进入2:1合束波导(7)上分支的宽谱TM偏振光在输出直波导(7)汇合,形成去偏光。
3.根据权利要求1所述的一种MZ型光波导电控去偏器,其特征在于:所述的输入直波导(1)、调制电极(2)、1:2分束波导(3)、90度偏振旋转波导(4)、直波导(5)、弯曲增程波导(6)、2:1合束波导(7)、输出直波导(8)均为脊波导。
4.根据权利要求1所述的一种MZ型光波导电控去偏器,其特征在于:所述1:2分束波导(3)上下分支的光程差大于输入宽谱光的相干长度。
5.根据权利要求1所述的一种MZ型光波导电控去偏器,其特征在于:所述调制电极(2)通过电控精密调节1:2分束波导(3)上下分支的分光比,使输出直波导(8)中的宽谱TE偏振光和宽谱TM偏振光能量相等。
CN201910391733.5A 2019-05-13 2019-05-13 一种mz型光波导电控去偏器 Pending CN110119042A (zh)

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