CN110112857A - A kind of vacuum motor and its manufacturing process - Google Patents
A kind of vacuum motor and its manufacturing process Download PDFInfo
- Publication number
- CN110112857A CN110112857A CN201910465181.8A CN201910465181A CN110112857A CN 110112857 A CN110112857 A CN 110112857A CN 201910465181 A CN201910465181 A CN 201910465181A CN 110112857 A CN110112857 A CN 110112857A
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- China
- Prior art keywords
- copper plate
- shell
- sealing ring
- rotor
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 238000007789 sealing Methods 0.000 claims abstract description 58
- 230000002093 peripheral effect Effects 0.000 claims abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 66
- 229910052802 copper Inorganic materials 0.000 claims description 63
- 239000010949 copper Substances 0.000 claims description 63
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 238000001816 cooling Methods 0.000 claims description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 241000826860 Trapezium Species 0.000 claims description 7
- 239000004642 Polyimide Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- 238000012423 maintenance Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 7
- 239000012535 impurity Substances 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacture Of Motors, Generators (AREA)
Abstract
The present invention relates to technical field of motors, specially a kind of vacuum motor and its manufacturing process, including shell, the drive end bearing bracket of shell one end is mounted on by screw, the rear seal-cover of the shell other end is mounted on by screw, the rotor installing the stator on the inner wall of the housing and being arranged on shell, it is characterised in that: perforation is connected with intake valve on the rear seal-cover；Several locating rods is laterally fixedly connected on the drive end bearing bracket, between multiple locating rods in a ring equidistant placement in the peripheral direction of rotor, pass through setting sliding block and sealing ring, rotor is in rotation, sealing ring loses sealing effect, internal gas can quickly be discharged under vacuum conditions, more quickly it is evacuated to ultrahigh vacuum, after rotor stops rotating, spring pushes sealing ring to be extruded on drive end bearing bracket, it realizes sealing, the higher air of outer moisture and other impurities is avoided to enter enclosure interior.
Description
Technical field
The present invention relates to technical field of motors, specially a kind of vacuum motor and its manufacturing process.
Background technique
Vacuum motor is the motor for using under vacuum conditions.Inside the motor of the prior art and material internal can be deposited
Include vapor in large quantity of air, need the time to evaporate in vacuum environment, so that release is slower, has to client's vacuum degree
Large effect.
Summary of the invention
In order to solve the problems, such as that underwater propeller battery pack is difficult to replace, the present invention provides a kind of vacuum motor and its manufacture
Technique.
The present invention solves its technical problem using following technical scheme to realize: a kind of vacuum motor, including shell pass through
Screw is mounted on the drive end bearing bracket of shell one end, is mounted on the rear seal-cover of the shell other end by screw, in installation on the inner wall of the housing
Stator and the rotor that is arranged on shell, it is characterised in that: perforation is connected with intake valve on the rear seal-cover；The drive end bearing bracket
Upper transverse direction is fixedly connected with several locating rods, peripheral direction of the equidistant placement in rotor in a ring between multiple locating rods
On, a sealing ring is slidably connected in the locating rod jointly, the sealing ring is connected on the securing lever by spring, described
Spring is used to sealing ring being extruded in drive end bearing bracket, and the rubber for sealing is fixedly connected on the sealing ring and drive end bearing bracket
Seal washer；The inner wall of the sealing ring is to be obliquely installed, and the end face of sealing ring is trapezium structure, the inner sidewall of the sealing ring
Upper rolling is connected with idler wheel, and the idler wheel is rotatably connected in the mounting groove that sliding block is opened up, and the sliding block is and sealing ring phase
The trapezium structure of cooperation, sliding block are slidably connected on slide bar, and the slide bar is fixedly connected on rotor, rotor when rotated, meeting
Band moving slide-bar and sliding block rotate together, and sliding block is subject to centrifugal forces can be mobile to the direction far from rotor, and idler wheel exists at this time
Rolled on the inner wall of sealing ring, simultaneously because the end face of sealing ring be trapezium structure so that sealing ring under the promotion of idler wheel with
Drive end bearing bracket is detached from, and sealing ring loses sealing effect at this time, internal gas can quickly be discharged under vacuum conditions, than very fast
Speed is evacuated to ultrahigh vacuum, and after rotor stops rotating, spring pushes sealing ring to be extruded on drive end bearing bracket, realizes sealing, avoids
The higher air of outer moisture enters enclosure interior, dry nitrogen can be filled with to enclosure interior by intake valve at this time, with
Keep the air pressure of shell inside and outside identical.
As one embodiment of the present invention, the gap between the rotor and stator is between 0.02-0.05mm.
As one embodiment of the present invention, the rotor is rotatably installed on drive end bearing bracket and rear end cap by bearing,
And the bearing is ceramic bearing.
As one embodiment of the present invention, cooling device is provided on the shell.
As one embodiment of the present invention, the cooling device includes upper conducting copper plate, lower conducting copper plate, water-cooled copper
Body and water tap, it is hinged between the upper conducting copper plate and lower conducting copper plate, far from hinge joint between upper conducting copper plate and lower conducting copper plate
One end be bent outwardly, and offer the tapped through hole for installation, upper conducting copper plate and lower conducting copper plate close after in
Shell is coated on shell to matched square cylinder, upper conducting copper plate and lower conducting copper plate tight type；The upper conduction copper
It is equipped with water-cooled copper body on plate and lower conducting copper plate, the cooling duct for cooling water circulation is equipped in the water-cooled copper body, it is cold
But the both ends in channel are respectively equipped with the water tap connecting with laser water cooler；Between upper conducting copper plate, lower conducting copper plate and water-cooled copper body
Cooperation, realize water-cooling, solving the problems, such as can not wind-cooling heat dissipating when vacuum motor is run under vacuum conditions.
As one embodiment of the present invention, two water-cooled copper bodies are shaped in conducting copper plate under respectively
On the lateral wall of conducting copper plate.
As one embodiment of the present invention, the copper wire on the stator and the rotor passes through conducting wire and external electrical
Source connection, external power supply is alternating current, and the conducting wire is the conducting wire of polyimides material package, polyimides be comprehensive performance most
One of good high-molecular organic material, high temperature resistant are suitble to dissipating up to 400 DEG C or more, -200~300 DEG C of long-term use temperature range
It is used in the weaker vacuum motor of heat.
A kind of manufacturing process of vacuum motor, comprising the following steps:
Step 1: each components on motor are produced by drawing, and each components are subjected to assembly；
Step 2: the motor that assembly is completed being placed in vacuum tank and is tested, and opens motor, starts vacuum tank, will
Air extraction in vacuum tank, i.e., the air in motor can be extracted, until the air pressure in vacuum tank does not occur, start to count at this time
When；
Step 3: after timing runs scheduled duration, scheduled duration stops vacuumizing in-hour, waits vacuum electric
Machine is cooling, vacuumizes operation after the completion of cooling again three times；It is detected by the operation that vacuumizes three times, the property of motor can be tested out
Energy；
Step 4: after vacuumizing, the working order of motor is detected, vacuum motor failure then carries out inspection of doing over again
It repairs, vacuum motor works well, and dry nitrogen is filled with into vacuum tank, so that nitrogen enters inside vacuum motor, then will be electric
Machine takes out.
Compared with prior art, the beneficial effects of the present invention are:
1, a kind of vacuum motor of the present invention, by setting sliding block and sealing ring, in rotation, sealing ring loses rotor
Sealing effect is removed, internal gas can quickly be discharged under vacuum conditions, ultrahigh vacuum is more quickly evacuated to, in rotor
After stopping rotating, spring push sealing ring be extruded on drive end bearing bracket, realize sealing, avoid the higher air of outer moisture and its
He enters enclosure interior by impurity.
2, a kind of vacuum motor of the present invention is detected by the operation that vacuumizes three times, can test out motor
Performance is filled with dry nitrogen into vacuum motor, so that nitrogen enters inside vacuum motor, so that enter nitrogen in material,
To reduce the infiltration of subsequent other impurities gas.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the partial enlarged view in Fig. 1 at A；
Fig. 3 is the structural schematic diagram of cooling device in the present invention；
Fig. 4 is process flow diagram of the invention.
In figure: shell 1, drive end bearing bracket 2, rear seal-cover 3, stator 4, rotor 5, intake valve 6, locating rod 7, sealing ring 8, spring 9,
Rubber gasket 10, idler wheel 11, sliding block 12, slide bar 13, bearing 14, cooling device 15, upper conducting copper plate 151, lower conduction copper
Plate 152, water-cooled copper body 153, water tap 154.
Specific embodiment
Below in conjunction with the attached drawing in embodiment of the present invention, the technical solution in embodiment of the present invention is carried out clear
Chu is fully described by, it is clear that described embodiment is only some embodiments of the invention, rather than whole implementation
Mode.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without making creative work
Every other embodiment, shall fall within the protection scope of the present invention.
Please refer to Fig. 1-4, the present invention provides a kind of technical solution: a kind of vacuum motor, including shell 1 are pacified by screw
It is mounted on the rear seal-cover 3 of 1 other end of shell mounted in the drive end bearing bracket 2 of 1 one end of shell, by screw, is mounted on 1 inner wall of shell
Stator 4 and the rotor 5 being arranged on shell 1, it is characterised in that: perforation is connected with intake valve 6 on the rear seal-cover 3；Before described
Laterally be fixedly connected with several locating rods 7 on end cap 2, between multiple locating rods 7 in a ring equidistant placement in rotor 5 four
In circumferential direction, a sealing ring 8 is slidably connected in the locating rod 7 jointly, it is fixed that the sealing ring 8 is connected to by spring 9
On the bar 7 of position, the spring 9 is used to for sealing ring 8 being extruded in drive end bearing bracket 2, fixed company on the sealing ring 8 and drive end bearing bracket 2
It is connected to the rubber gasket 10 for sealing；The inner wall of the sealing ring 8 is to be obliquely installed, and the end face of sealing ring 8 is trapezoidal
Structure rolls on the inner sidewall of the sealing ring 8 and is connected with idler wheel 11, and the idler wheel 11 is rotatably connected on what sliding block 12 was opened up
In mounting groove, the sliding block 12 is the trapezium structure matched with sealing ring 8, and sliding block 12 is slidably connected on slide bar 13, described
Slide bar 13 is fixedly connected on rotor 5, and rotor 5 when rotated, will drive slide bar 13 and sliding block 12 rotates together, sliding block 12 by
The effect of centrifugal force can be mobile to the direction far from rotor 5, and idler wheel 11 rolls on the inner wall of sealing ring 8 at this time, simultaneously because
The end face of sealing ring 8 is trapezium structure, so that sealing ring 8 is detached under the promotion of idler wheel 11 with drive end bearing bracket 2, sealing ring 8 at this time
Sealing effect is lost, internal gas can quickly be discharged under vacuum conditions, be more quickly evacuated to ultrahigh vacuum, is being turned
After son 5 stops rotating, spring 9 pushes sealing ring 8 to be extruded on drive end bearing bracket 2, realizes sealing, avoids the higher air of outer moisture
It, at this time can be by intake valve 6 to dry nitrogen is filled with inside shell 1, to keep 1 inside and outside of shell into inside shell 1
Air pressure it is identical.
As one embodiment of the present invention, the gap between the rotor 5 and stator 4 is between 0.02-0.05mm.
As one embodiment of the present invention, the rotor 5 is rotatably installed in drive end bearing bracket 2 and rear end cap by bearing 14
On, and the bearing 14 is ceramic bearing 14.
As one embodiment of the present invention, cooling device 15 is provided on the shell 1.
As one embodiment of the present invention, the cooling device 15 includes upper conducting copper plate 151, lower conducting copper plate
152, water-cooled copper body 153 and water tap 154, hinged between the upper conducting copper plate 151 and lower conducting copper plate 152, upper conducting copper plate 151
One end between lower conducting copper plate 152 far from hinge joint is bent outwardly, and offers the tapped through hole for installation, upper thermally conductive
Copper sheet 151 and lower conducting copper plate 152 are in shell 1 to matched square cylinder after closing, and upper conducting copper plate 151 is thermally conductive under
152 tight type of copper sheet is coated on shell 1；Water-cooled copper body is equipped in the upper conducting copper plate 151 and lower conducting copper plate 152
153, the interior cooling duct being equipped with for cooling water circulation of the water-cooled copper body 153, the both ends of cooling duct are respectively equipped with and swash
The water tap 154 of light water cooler connection；Water is realized in cooperation between upper conducting copper plate 151, lower conducting copper plate 152 and water-cooled copper body 153
Cold heat dissipation, solving the problems, such as can not wind-cooling heat dissipating when vacuum motor is run under vacuum conditions.
As one embodiment of the present invention, two water-cooled copper bodies 153 are shaped in conducting copper plate respectively
151 and lower conducting copper plate 152 lateral wall on.
As one embodiment of the present invention, the copper wire on the stator 4 and the rotor 5 passes through conducting wire and outside
Power supply connection, external power supply is alternating current, and the conducting wire is the conducting wire of polyimides material package, and polyimides is comprehensive performance
One of optimal high-molecular organic material, high temperature resistant -200~300 DEG C of long-term use temperature range, are suitble to up to 400 DEG C or more
The weaker vacuum motor that radiates is interior to be used.
Working principle: connecting external power supply, so that rotor 5 rotates, rotor 5 rotates together with moving slide-bar 13 and sliding block 12,
Sliding block 12 is subject to centrifugal forces can be mobile to the direction far from rotor 5, and idler wheel 11 rolls on the inner wall of sealing ring 8 at this time
It is dynamic, simultaneously because the end face of sealing ring 8 is trapezium structure, so that sealing ring 8 is detached under the promotion of idler wheel 11 with drive end bearing bracket 2,
Sealing ring 8 loses sealing effect at this time, and internal gas can quickly be discharged under vacuum conditions, be more quickly evacuated to super
High vacuum, after rotor 5 stops rotating, spring 9 pushes sealing ring 8 to be extruded on drive end bearing bracket 2, realizes sealing, avoids external wet
It spends higher air and other impurities enters inside shell 1, it at this time can be by intake valve 6 to being filled with drying inside shell 1
Nitrogen, to keep the air pressure of 1 inside and outside of shell identical.
A kind of manufacturing process of vacuum motor, comprising the following steps:
Step 1: each components on motor are produced by drawing, and each components are subjected to assembly；
Step 2: the motor that assembly is completed being placed in vacuum tank and is tested, and opens motor, starts vacuum tank, will
Air extraction in vacuum tank, i.e., the air in motor can be extracted, until the air pressure in vacuum tank does not occur, start to count at this time
When；
Step 3: after timing runs scheduled duration, scheduled duration stopped vacuumizing at 3-5 hours, waited vacuum
Motor is cooling, vacuumizes operation after the completion of cooling again three times；It is detected by the operation that vacuumizes three times, motor can be tested out
Performance；
Step 4: after vacuumizing, the working order of motor is detected, vacuum motor failure then carries out inspection of doing over again
It repairs, vacuum motor works well, and dry nitrogen is filled with into vacuum tank, so that nitrogen enters inside vacuum motor, then will be electric
Machine takes out.
Although hereinbefore invention has been described by reference to embodiment, the scope of the present invention is not being departed from
In the case where, various improvement can be carried out to it and can replace component therein with equivalent.Especially, as long as being not present
Structural conflict, the various features in presently disclosed embodiment can be combined with each other use by any way,
The description for not carrying out exhaustive to the case where these combinations in this specification is examined merely for the sake of omission length with what is economized on resources
Consider.Therefore, the invention is not limited to specific embodiments disclosed herein, but the institute including falling within the scope of the appended claims
There is technical solution.
Claims (8)
1. a kind of vacuum motor, including shell (1) are mounted on the drive end bearing bracket (2) of shell (1) one end by screw, pass through screw
It is mounted on the rear seal-cover (3) of shell (1) other end, the stator (4) being mounted on shell (1) inner wall and setting are on shell (1)
Rotor (5), it is characterised in that: on the rear seal-cover (3) perforation be connected with intake valve (6)；It is laterally solid on the drive end bearing bracket (2)
Surely it is connected with several locating rods (7), peripheral direction of the equidistant placement in rotor (5) in a ring between multiple locating rods (7)
On, a sealing ring (8) is slidably connected on the locating rod (7) jointly, the sealing ring (8) is connected to by spring (9)
In locating rod (7), the spring (9) is for sealing ring (8) to be extruded in drive end bearing bracket (2), the sealing ring (8) and drive end bearing bracket
(2) rubber gasket (10) for sealing is fixedly connected on；The inner wall of the sealing ring (8) is to be obliquely installed, close
The end face of seal ring (8) is trapezium structure, rolls on the inner sidewall of the sealing ring (8) and is connected with idler wheel (11), the idler wheel
(11) it is rotatably connected in the mounting groove that sliding block (12) is opened up, the sliding block (12) is trapezoidal to match with sealing ring (8)
Structure, sliding block (12) are slidably connected on slide bar (13), and the slide bar (13) is fixedly connected on rotor (5).
2. a kind of vacuum motor according to claim 1, it is characterised in that: the gap between the rotor (5) and stator (4)
Between 0.02-0.05mm.
3. a kind of vacuum motor according to claim 1, it is characterised in that: the rotor (5) is rotated by bearing (14)
It is mounted on drive end bearing bracket (2) and rear end cap, and the bearing (14) is ceramic bearing (14).
4. a kind of vacuum motor according to claim 1, it is characterised in that: be provided with cooling device on the shell (1)
(15)。
5. a kind of vacuum motor according to claim 4, it is characterised in that: the cooling device (15) includes upper conduction copper
Plate (151), lower conducting copper plate (152), water-cooled copper body (153) and water tap (154), the upper conducting copper plate (151) and under it is thermally conductive
Hinged between copper sheet (152), one end between upper conducting copper plate (151) and lower conducting copper plate (152) far from hinge joint is bent outwardly,
And offer tapped through hole for installation, upper conducting copper plate (151) and lower conducting copper plate (152) close after be in and shell (1)
To matched square cylinder, upper conducting copper plate (151) and lower conducting copper plate (152) tight type are coated on shell (1)；It is described
It is equipped with water-cooled copper body (153) in upper conducting copper plate (151) and lower conducting copper plate (152), is equipped in the water-cooled copper body (153)
For the cooling duct of cooling water circulation, the both ends of cooling duct are respectively equipped with the water tap (154) connecting with laser water cooler.
6. a kind of vacuum motor according to claim 5, it is characterised in that: two water-cooled copper bodies (153) difference one
It is body formed on the lateral wall of upper conducting copper plate (151) and lower conducting copper plate (152).
7. a kind of vacuum motor according to claim 1, it is characterised in that: on the stator (4) and the rotor (5)
Copper wire passes through conducting wire and connect with external power supply, and external power supply is alternating current, and the conducting wire is leading for polyimides material package
Line.
8. a kind of manufacturing process of vacuum motor, which comprises the following steps:
Step 1: each components on motor are produced by drawing, and each components are subjected to assembly；
Step 2: the motor that assembly is completed being placed in vacuum tank and is tested, and opens motor, starts vacuum tank, by vacuum
Air extraction in tank, i.e., the air in motor can be extracted, until the air pressure in vacuum tank does not occur, start timing at this time；
Step 3: after timing runs scheduled duration, scheduled duration stopped vacuumizing at 3-5 hours, waited vacuum motor
It is cooling, operation is vacuumized after the completion of cooling again three times；
Step 4: after vacuumizing, the working order of motor is detected, vacuum motor failure then carries out maintenance of doing over again, very
Empty motor works well, and dry nitrogen is filled with into vacuum tank, so that nitrogen enters inside vacuum motor, then motor is taken
Out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910465181.8A CN110112857A (en) | 2019-05-30 | 2019-05-30 | A kind of vacuum motor and its manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910465181.8A CN110112857A (en) | 2019-05-30 | 2019-05-30 | A kind of vacuum motor and its manufacturing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110112857A true CN110112857A (en) | 2019-08-09 |
Family
ID=67493110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910465181.8A Pending CN110112857A (en) | 2019-05-30 | 2019-05-30 | A kind of vacuum motor and its manufacturing process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110112857A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1041669A (en) * | 1963-12-27 | 1966-09-07 | Imp Tobacco Co Ltd | Improved method and apparatus for testing vacuumized tins |
| DE202014100496U1 (en) * | 2014-02-05 | 2014-03-13 | Von Ardenne Gmbh | Magnetron endblock and vacuum rotary feedthrough |
| CN104296943A (en) * | 2014-09-25 | 2015-01-21 | 展测真空技术（上海）有限公司 | Vacuum type helium detecting equipment and method thereof |
| CN205064356U (en) * | 2015-09-06 | 2016-03-02 | 广德玉龙泵业有限公司 | Vacuum pump sealing device |
| CN105449913A (en) * | 2016-01-11 | 2016-03-30 | 江苏永年激光成形技术有限公司 | Water cooling radiator for stepping and servo motor under vacuum environment |
| CN107841721A (en) * | 2017-12-22 | 2018-03-27 | 中山国鳌智能科技有限公司 | A kind of Novel film-coated equipment |
| CN108616187A (en) * | 2018-07-13 | 2018-10-02 | 苏州启承动能科技有限公司 | A kind of vacuum water cooling high speed motor |
| CN108758325A (en) * | 2018-04-16 | 2018-11-06 | 成都科瑞尔低温设备有限公司 | One kind vacuumizing degassing process |
-
2019
- 2019-05-30 CN CN201910465181.8A patent/CN110112857A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1041669A (en) * | 1963-12-27 | 1966-09-07 | Imp Tobacco Co Ltd | Improved method and apparatus for testing vacuumized tins |
| DE202014100496U1 (en) * | 2014-02-05 | 2014-03-13 | Von Ardenne Gmbh | Magnetron endblock and vacuum rotary feedthrough |
| CN104296943A (en) * | 2014-09-25 | 2015-01-21 | 展测真空技术（上海）有限公司 | Vacuum type helium detecting equipment and method thereof |
| CN205064356U (en) * | 2015-09-06 | 2016-03-02 | 广德玉龙泵业有限公司 | Vacuum pump sealing device |
| CN105449913A (en) * | 2016-01-11 | 2016-03-30 | 江苏永年激光成形技术有限公司 | Water cooling radiator for stepping and servo motor under vacuum environment |
| CN107841721A (en) * | 2017-12-22 | 2018-03-27 | 中山国鳌智能科技有限公司 | A kind of Novel film-coated equipment |
| CN108758325A (en) * | 2018-04-16 | 2018-11-06 | 成都科瑞尔低温设备有限公司 | One kind vacuumizing degassing process |
| CN108616187A (en) * | 2018-07-13 | 2018-10-02 | 苏州启承动能科技有限公司 | A kind of vacuum water cooling high speed motor |
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