CN110108847A - A kind of phosphine gas concentration monitor - Google Patents
A kind of phosphine gas concentration monitor Download PDFInfo
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- CN110108847A CN110108847A CN201910504793.3A CN201910504793A CN110108847A CN 110108847 A CN110108847 A CN 110108847A CN 201910504793 A CN201910504793 A CN 201910504793A CN 110108847 A CN110108847 A CN 110108847A
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- Prior art keywords
- monitoring
- shell
- gas concentration
- phosphine gas
- monitoring element
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- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 title claims abstract description 166
- 229910000073 phosphorus hydride Inorganic materials 0.000 title claims abstract description 82
- 238000012544 monitoring process Methods 0.000 claims abstract description 192
- 239000007789 gas Substances 0.000 claims description 92
- 238000012806 monitoring device Methods 0.000 claims description 27
- 238000007789 sealing Methods 0.000 claims description 19
- 241000208125 Nicotiana Species 0.000 abstract description 17
- 235000002637 Nicotiana tabacum Nutrition 0.000 abstract description 17
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 235000019504 cigarettes Nutrition 0.000 description 3
- 238000012790 confirmation Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 235000019506 cigar Nutrition 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention discloses a kind of phosphine gas concentration monitor, including the first monitoring portion and the second monitoring portion, first monitoring portion can be used for monitoring phosphine gas concentration in warehouse, when phosphine gas concentration is larger, first monitoring element can monitor gas concentration, when gas concentration reduces, first monitoring element can not precise measurement when, control device controls piston rod and rises, gasket seal is separated with venthole, ambient atmos enter in piston cylinder, it is contacted with the second monitoring element, second monitoring element can accurately monitor the phosphine gas concentration under low concentration state.When needing to be monitored the intracorporal phosphine gas concentration of the case of stifling tobacco leaf, second monitoring portion is connect with the first monitoring portion, second monitoring portion is protruded into cabinet, third monitoring element is monitored phosphine gas concentration in cabinet, this invention simplifies phosphine gas concentrations to monitor difficulty, provides safety guarantee for the working environment of staff.
Description
Technical field
The present invention relates to technology of instrument and meter fields, more particularly to a kind of phosphine gas concentration monitor.
Background technique
The long-term storage of crops need to solve it is infested, mildew the problems such as.By taking tobacco leaf as an example, it is in the process of tobacco
Improve the quality of cigarette, it usually needs 1-3 natural alcoholization.During tobacco mellowing, there is following three problem: first is that cigarette
Leaf is easy to infested；Second is that, because the variation of temperature, humidity is greatly, being easy mildew during Four seasons change；Third is that with excessive air
Contact, tobacco leaf color are easy to browning, deepen, and influence cigarette quality.On the one hand natural alcoholization is given due to above-mentioned various problems
Tobacco causes serious loss, it is reported that the loss after tobacco mellowing is every year substantially in 0.8%-1% (even higher), one
Direct economic loss caused by medium-sized cigar mill year is up to more than 2,000 ten thousand；The inside and outside quality of tobacco leaf is also seriously affected on the other hand,
Influence the quality of tobacco leaf deep processed product.Therefore, to solve the above problems, needing toxic gas during tobacco mellowing
(generally using hydrogen phosphide) carries out the gas concentration of stifling and its concentration value of real-time monitoring and storage space.
Since phosphine gas belongs to extremely toxic gas, staff needs to guarantee phosphine gas in warehouse when entering warehouse
Concentration is within the scope of safe concentration.Meanwhile in order to guarantee tobacco mellowing quality, staff needs the cabinet to stifling tobacco leaf
Interior phosphine gas concentration is monitored, and existing phosphine gas concentration monitor equipment is wanted when carrying out gas-monitoring
Since range is larger, it is difficult to accurately monitor the phosphine gas concentration under low concentration state or can monitor lower dense
Phosphine gas under degree state, but monitoring range is smaller, is unable to satisfy use demand.
Therefore, how to change in the prior art, phosphine gas concentration monitoring instrument can not monitor high concentration state simultaneously
It is those skilled in the art's urgent problem to be solved with the status of the phosphine gas concentration of low concentration state.
Summary of the invention
The object of the present invention is to provide a kind of phosphine gas concentration monitor, to solve above-mentioned of the existing technology ask
Topic makes phosphine gas concentration monitoring instrument while monitoring the dense of the phosphine gas of high concentration state and low concentration state
Degree.
To achieve the above object, the present invention provides following schemes: the present invention provides a kind of phosphine gas concentration monitoring
Instrument, comprising:
First monitoring portion, first monitoring portion include hollow first shell, control device and the first combination monitoring dress
It sets, the first shell is split type structure, and the control device is set in the cavity of the first shell, described first group
Closing monitoring device includes the first monitoring element, the second monitoring element and piston component, first monitoring element and described second
Monitoring element is all set in the cavity of the first shell, and first monitoring element can monitor the phosphorus of concentration higher state
Change hydrogen gas concentration, the monitoring position of first monitoring element is stretched out outside the first shell；The piston component includes living
Stopper rod and piston cylinder, the piston rod are slidably disposed in the piston cylinder, and second monitoring element is set to described
On piston rod, second monitoring element can monitor concentration compared with the phosphine gas concentration under low state, the piston cylinder
Venthole is set on side wall, and the venthole is connected with the environment outside the first shell, is arranged on the piston rod close
When the bottom of gasket, the bottom of the piston rod and the piston cylinder abuts against, the gasket seal can block described logical
Stomata, the control device can control the piston rod and slidably reciprocate along the axis direction of the piston cylinder；
Second monitoring portion, second monitoring portion include hollow second shell and the second combination monitoring device, and described the
Two shells are split type structure, and the second combination monitoring device includes third monitoring element, the third monitoring element setting
In the inner cavity of the second shell, the third monitoring element can monitor the phosphine gas concentration of concentration higher state,
The monitoring position of the third monitoring element is connected with the environment outside the second shell, and the second shell is hollow tube
Shape structure；
Second monitoring portion and the removable connection of the first monitoring portion.
Preferably, the first combination monitoring device and the second combination monitoring device are respectively provided with temperature-humidity monitoring member
Part, the temperature-humidity monitoring element are set in the first shell or the second shell, the temperature-humidity monitoring element with
External environment is connected.
Preferably, the first shell includes face-piece, rear cover and lower plate, the face-piece respectively with the rear cover and described
Lower plate is detachably connected, and is respectively provided with sealing element between the face-piece and the rear cover, the face-piece and the lower plate, institute
It states controller to be set in the cavity that the face-piece, the rear cover and the lower plate surround, the prison of first monitoring element
It surveys position and stretches out the lower plate, the piston cylinder of the part where the venthole stretches out the lower plate, first prison
It surveys between element and the lower plate, be respectively provided with sealing element, the first shell between the piston cylinder and the lower plate
It is connected with external air source, external air source can be passed through gas to the inner cavity of the first shell.
Preferably, sealing ring, the inner wall phase of the sealing ring and the piston cylinder are set on the lateral wall of the piston rod
It abutting, for second monitoring element between the sealing ring and the gasket seal, the piston rod is connected with driver,
The driver can control the piston rod and move back and forth along the piston cylinder, the driver and the controller phase
Even.
Preferably, setting check valve is covered after described, external air source can be by the check valve to the first shell
Inner cavity be passed through gas；The first combination monitoring device further includes Pressure monitoring element, and the Pressure monitoring element can supervise
Survey the pressure change of the first shell inner cavity.
Preferably, the second shell includes housing connection member, and second monitoring portion is connected with first monitoring portion
When, the housing connection member is threadedly coupled with the first shell.
Preferably, the second shell further includes pressure cap and hollow shaft, and the housing connection member passes through the pressure cap and institute
It states hollow shaft to abut against, the pressure cap is threadedly coupled with the hollow shaft, and sealing is arranged between the pressure cap and the hollow shaft
Element.
Preferably, the third monitoring element is set to the one end of the hollow shaft far from the housing connection member, described
Second shell further includes end cap, and the end cap is detachably connected with the hollow shaft, is arranged centre bore on the end cap, and described
The monitoring position of three monitoring elements is connected by the centre bore with external environment.
The present invention achieves following technical effect compared with the existing technology: phosphine gas concentration monitor of the invention,
Including the first monitoring portion and the second monitoring portion, the second monitoring portion and the removable connection of the first monitoring portion, during the first monitoring portion includes
Empty first shell, control device and the first combination monitoring device, first shell are split type structure, and control device is set to the
In the cavity of one shell, the first combination monitoring device includes the first monitoring element, the second monitoring element and piston component, the first prison
It surveys element and the second monitoring element is all set in the cavity of first shell, the first monitoring element can monitor concentration higher state
Phosphine gas concentration, the monitoring position of the first monitoring element is stretched out outside first shell；Piston component includes piston rod and work
Plug cylinder, piston rod are slidably disposed in piston cylinder, and the second monitoring element is set on piston rod, and the second monitoring element can
Concentration is monitored compared with the phosphine gas concentration under low state, venthole, venthole and first shell are set on the side wall of piston cylinder
External environment is connected, and gasket seal is arranged on piston rod, when the bottom of piston rod and the bottom of piston cylinder abut against, sealing
Gasket can block venthole, and control device can control piston rod and slidably reciprocate along the axis direction of piston cylinder；Second prison
Survey portion includes hollow second shell and the second combination monitoring device, and second shell is split type structure, the second combination monitoring dress
It sets including third monitoring element, third monitoring element is set in the inner cavity of second shell, and third monitoring element can monitor dense
The phosphine gas concentration of higher state is spent, the monitoring position of third monitoring element is connected with the environment outside second shell,
Second shell is hollow tubular structure.First monitoring portion can be used for monitoring phosphine gas concentration in warehouse, work as phosphine gas
When concentration is larger, the first monitoring element can monitor gas concentration, and when gas concentration reduces, the first monitoring element can not be surveyed accurately
When amount, control device controls piston rod and rises, and gasket seal is separated with venthole, and ambient atmos enter in piston cylinder, with second
Monitoring element contact, the second monitoring element can accurately monitor the phosphine gas concentration under low concentration state, make work
Make personnel and enter back into warehouse after phosphine gas is in safe concentration range in confirmation warehouse, is mentioned for staff's personal safety
It has supplied to ensure.When needing to be monitored the intracorporal phosphine gas concentration of the case of stifling tobacco leaf, by the second monitoring portion and the
The connection of one monitoring portion, the second monitoring portion is protruded into cabinet, third monitoring element supervises phosphine gas concentration in cabinet
It surveys, simplifies phosphine gas concentration monitoring difficulty, provide safety guarantee for the working environment of staff.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the overall structure diagram of phosphine gas concentration monitor of the invention；
Fig. 2 is the structural schematic diagram of the first monitoring portion of phosphine gas concentration monitor of the invention；
Fig. 3 is the disassemblying structure schematic diagram of the first monitoring portion of phosphine gas concentration monitor of the invention；
Fig. 4 is the disassemblying structure schematic diagram of the first combination monitoring device of phosphine gas concentration monitor of the invention；
Fig. 5 is the cutting structural schematic diagram of the second monitoring element of phosphine gas concentration monitor of the invention；
Fig. 6 is the disassemblying structure schematic diagram of the second monitoring portion of phosphine gas concentration monitor of the invention；
Wherein, 1 is the first monitoring portion, and 2 be the second monitoring portion, and 3 be first shell, and 4 be the first combination monitoring device, and 5 are
First monitoring element, 6 be the second monitoring element, and 7 be piston cylinder, and 8 be piston rod, and 9 be second shell, and 10 be the second combination monitoring
Device, 11 be third monitoring element, and 12 be temperature-humidity monitoring element, and 13 be face-piece, and 14 be rear cover, and 15 be lower plate, and 16 be shell
Body connector, 17 be pressure cap, and 18 be hollow shaft, and 19 be end cap.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of phosphine gas concentration monitor, to solve above-mentioned of the existing technology ask
Topic makes phosphine gas concentration monitoring instrument while monitoring the dense of the phosphine gas of high concentration state and low concentration state
Degree.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
Please refer to Fig. 1-6, wherein Fig. 1 is the overall structure diagram of phosphine gas concentration monitor of the invention, figure
2 be the structural schematic diagram of the first monitoring portion of phosphine gas concentration monitor of the invention, and Fig. 3 is phosphatization hydrogen of the invention
The disassemblying structure schematic diagram of first monitoring portion of bulk concentration monitor, Fig. 4 are phosphine gas concentration monitor of the invention
The disassemblying structure schematic diagram of first combination monitoring device, Fig. 5 are the second monitoring of phosphine gas concentration monitor of the invention
The cutting structural schematic diagram of element, Fig. 6 are the disassemblying structure of the second monitoring portion of phosphine gas concentration monitor of the invention
Schematic diagram.
The present invention provides a kind of phosphine gas concentration monitor, comprising:
First monitoring portion 1, the first monitoring portion 1 include hollow first shell 3, control device and the first combination monitoring device
4, first shell 3 is split type structure, and control device is set in the cavity of first shell 3, and the first combination monitoring device 4 includes
First monitoring element 5, the second monitoring element 6 and piston component, the first monitoring element 5 and the second monitoring element 6 are all set in
In the cavity of one shell 3, the first monitoring element 5 can monitor the phosphine gas concentration of concentration higher state, the first monitoring member
The monitoring position of part 5 is stretched out outside first shell 3；Piston component includes piston rod 8 and piston cylinder 7, and piston rod 8 is mounted slidably
In in piston cylinder 7, the second monitoring element 6 is set on piston rod 8, and the second monitoring element 6 can monitor concentration compared under low state
Phosphine gas concentration, venthole is set on the side wall of piston cylinder 7, venthole is connected with the environment outside first shell 3,
Gasket seal is set on piston rod 8, and when the bottom of piston rod 8 and the bottom of piston cylinder 7 abut against, gasket seal can block logical
Stomata, control device can control piston rod 8 and slidably reciprocate along the axis direction of piston cylinder 7.First monitoring portion 1 can be used for supervising
Phosphine gas concentration in warehouse is surveyed, when phosphine gas concentration is larger, the first monitoring element 5 can monitor gas concentration,
When gas concentration reduce, the first monitoring element 5 can not precise measurement when, control device control piston rod 8 rise, gasket seal with
Venthole separation, ambient atmos enter in piston cylinder 7, contact with the second monitoring element 6, and the second monitoring element 6 can be to low dense
Phosphine gas concentration under degree state is accurately monitored, and staff's phosphine gas in confirmation warehouse is made to be in safety
Warehouse is entered back into after concentration range, provides guarantee for staff's personal safety.
Second monitoring portion 2, the second monitoring portion 2 include hollow second shell 9 and the second combination monitoring device 10, second shell
Body 9 is split type structure, and the second combination monitoring device 10 includes third monitoring element 11, and third monitoring element 11 is set to second
In the inner cavity of shell 9, third monitoring element 11 can monitor the phosphine gas concentration of concentration higher state, third monitoring element
11 monitoring position is connected with the environment outside second shell 9, and second shell 9 is hollow tubular structure.It is needing to stifling
When the intracorporal phosphine gas concentration of the case of tobacco leaf is monitored, the second monitoring portion 2 is connect with the first monitoring portion 1, by second
Monitoring portion 2 protrudes into cabinet, since phosphine gas concentration need to be maintained at higher concentration in cabinet, it is ensured that tobacco mellowing quality,
Third monitoring element 11 can be monitored phosphine gas concentration in cabinet.
Phosphine gas concentration monitor of the invention can monitor the phosphatization of high concentration state and low concentration state simultaneously
The concentration of hydrogen simplifies phosphine gas concentration monitoring difficulty, provides safety guarantee for the working environment of staff.
In addition, it is necessary to which the monitoring result of explanation, the first combination monitoring device 4 and the second combination monitoring device 10 can be by wirelessly passing
The modes such as defeated or wire transmission are transmitted, and monitoring result is transmitted to the outside of first shell 3 and second shell 9, are convenient for work
Make personnel's examination, in addition power supply module need to be arranged in phosphine gas concentration monitor of the invention, because setting power supply module belongs to
The conventional means of those skilled in the art are not belonging to the present invention made new improvement compared with the existing technology, herein no longer
It repeats.
In addition, the first combination monitoring device 4 and the second combination monitoring device 10 are respectively provided with temperature-humidity monitoring element 12, it is warm and humid
Degree monitoring element 12 is set in first shell 3 or second shell 9, and temperature-humidity monitoring element 12 is connected with external environment, can
It is monitored in warehouse with the intracorporal temperature and humidity of case, understands in storage space and cabinet in time convenient for staff respectively
Whether temperature and humidity is suitable for, to adjust in time, improving tobacco mellowing quality.
Specifically, first shell 3 include face-piece 13, rear cover 14 and lower plate 15, face-piece 13 respectively with rear cover 14 and bottom
Plate 15 is detachably connected, and is respectively provided with sealing element between face-piece 13 and rear cover 14, face-piece 13 and lower plate 15, controller is set to
In the cavity that face-piece 13, rear cover 14 and lower plate 15 surround, lower plate 15, ventilation are stretched out in the monitoring position of the first monitoring element 5
Partial piston cylinder 7 where hole stretches out lower plate 15, between the first monitoring element 5 and lower plate 15, piston cylinder 7 and lower plate 15
Between be respectively provided with sealing element, first shell 3 is connected with external air source, and external air source can be logical to the inner cavity of first shell 3
Enter gas.Gas concentration detector in the prior art in the process of running it is possible that failure but can not distinguish the case where knowing,
Therefore, the application is passed through compressed air into the inner cavity of first shell 3 by external air source, while the application is outside lower plate 15
Portion is arranged gas-pressure component, gas-pressure component can the air pressure in the inner cavity to first shell 3 be monitored, when gas in first shell 3
Drops, by air pressure change can differentiate the first monitoring portion 1 whether seal failure, slightly decreased when there is air pressure in first shell 3
The case where when, can continue to be passed through air into first shell 3 by external air source.
To guarantee the leakproofness in first shell 3, sealing ring, sealing ring and piston cylinder 7 are set on the lateral wall of piston rod 8
Inner wall abut against, the second monitoring element 6 between sealing ring and gasket seal, in order to enable piston rod 8 smoothly slide, piston
Bar 8 is connected with driver, and driver can control piston rod 8 and move back and forth along piston cylinder 7, and driver is connected with controller.
More specifically, check valve is arranged on rear cover 14, external air source can be logical to the inner cavity of first shell 3 by check valve
Enter gas, check valve can also prevent gas backflow；First combination monitoring device 4 further includes Pressure monitoring element, Pressure monitoring
Element can monitor the pressure change of 3 inner cavity of first shell, and monitoring result can be transferred to operator by Pressure monitoring element,
Information is obtained convenient for operator.
In this embodiment, second shell 9 includes housing connection member 16, the second monitoring portion 2 and the first monitoring portion 1
When being connected, housing connection member 16 is threadedly coupled with first shell 3, and threaded connection is connected firmly, easy disassembly, alleviates work people
The labor burden of member.
Further, second shell 9 further includes pressure cap 17 and hollow shaft 18, housing connection member 16 pass through pressure cap 17 with it is hollow
Axis 18 abuts against, and housing connection member 16 penetrates rotatably the through-hole of pressure cap 17, and pressure cap 17 is threadedly coupled with hollow shaft 18, pressure
Sealing element is set between cap 17 and hollow shaft 18, and after pressure cap 17 screws, housing connection member 16 is connected with hollow shaft 18, completes the
One monitoring portion 1 is connect with the second monitoring portion 2.
Further, third monitoring element 11 is set to the one end of hollow shaft 18 far from housing connection member 16, second shell
Body 9 further includes end cap 19, and end cap 19 is detachably connected with hollow shaft 18, and centre bore, third monitoring element 11 are arranged on end cap 19
Monitoring position be connected by centre bore with external environment.When being monitored to the intracorporal phosphine gas concentration of case, lead to
The needle-shaped core bar crossed in a casing and casing is inserted into cabinet, then core bar is removed, and the second monitoring portion 2 is inserted by sleeve
Enter box house, gas concentration in cabinet and temperature and humidity can be monitored.
Phosphine gas concentration monitor of the invention, it is dense that the first monitoring portion 1 can be used for monitoring phosphine gas in warehouse
Degree, when phosphine gas concentration is larger, the first monitoring element 5 can monitor gas concentration, and when gas concentration reduces, first is supervised
Survey element 5 can not precise measurement when, control device controls piston rod 8 and rises, and gasket seal separates with venthole, ambient atmos into
Enter in piston cylinder 7, contacted with the second monitoring element 6, the second monitoring element 6 can be dense to the phosphine gas under low concentration state
Degree is accurately monitored, and staff is made to enter back into warehouse after phosphine gas is in safe concentration range in confirmation warehouse,
Guarantee is provided for staff's personal safety.It is needing to be monitored the intracorporal phosphine gas concentration of the case of stifling tobacco leaf
When, the second monitoring portion 2 is connect with the first monitoring portion 1, the second monitoring portion 2 is protruded into cabinet, third monitoring element 11 is to case
Internal phosphine gas concentration is monitored, and is simplified phosphine gas concentration monitoring difficulty, is the working environment of staff
Provide safety guarantee.
Specific examples are applied in the present invention, and principle and implementation of the present invention are described, above embodiments
Illustrate to be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art, according to
According to thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (8)
1. a kind of phosphine gas concentration monitor characterized by comprising
First monitoring portion, first monitoring portion include hollow first shell, control device and the first combination monitoring device, institute
Stating first shell is split type structure, and the control device is set in the cavity of the first shell, the first combination prison
Surveying device includes the first monitoring element, the second monitoring element and piston component, and first monitoring element and described second monitor
Element is all set in the cavity of the first shell, and first monitoring element can monitor the hydrogen phosphide of concentration higher state
The monitoring position of gas concentration, first monitoring element is stretched out outside the first shell；The piston component includes piston rod
And piston cylinder, the piston rod are slidably disposed in the piston cylinder, second monitoring element is set to the piston
On bar, second monitoring element can monitor concentration compared with the phosphine gas concentration under low state, the side wall of the piston cylinder
Upper setting venthole, the venthole are connected with the environment outside the first shell, and gasket is arranged on the piston rod
When the bottom of piece, the bottom of the piston rod and the piston cylinder abuts against, the gasket seal can block the venthole,
The control device can control the piston rod and slidably reciprocate along the axis direction of the piston cylinder；
Second monitoring portion, second monitoring portion include hollow second shell and the second combination monitoring device, the second shell
Body is split type structure, and the second combination monitoring device includes third monitoring element, and the third monitoring element is set to institute
It states in the inner cavity of second shell, the third monitoring element can monitor the phosphine gas concentration of concentration higher state, described
The monitoring position of third monitoring element is connected with the environment outside the second shell, and the second shell is hollow tubular knot
Structure；
Second monitoring portion and the removable connection of the first monitoring portion.
2. phosphine gas concentration monitor according to claim 1, it is characterised in that: the first combination monitoring device
It is respectively provided with temperature-humidity monitoring element with the second combination monitoring device, the temperature-humidity monitoring element is set to the first shell
In body or the second shell, the temperature-humidity monitoring element is connected with external environment.
3. phosphine gas concentration monitor according to claim 1, it is characterised in that: the first shell includes face
Shell, rear cover and lower plate, the face-piece are detachably connected with the rear cover and the lower plate respectively, the face-piece and it is described after
Be respectively provided with sealing element between lid, the face-piece and the lower plate, the controller be set to the face-piece, the rear cover with
In the cavity that the lower plate surrounds, the lower plate, the venthole institute are stretched out in the monitoring position of first monitoring element
The part piston cylinder stretch out the lower plate, between first monitoring element and the lower plate, the piston cylinder
Sealing element is respectively provided between the lower plate, the first shell is connected with external air source, and external air source can be to institute
The inner cavity for stating first shell is passed through gas.
4. phosphine gas concentration monitor according to claim 3, it is characterised in that: on the lateral wall of the piston rod
Sealing ring is set, and the inner wall of the sealing ring and the piston cylinder abuts against, and second monitoring element is located at the sealing ring
Between the gasket seal, the piston rod is connected with driver, and the driver can control the piston rod along institute
It states piston cylinder to move back and forth, the driver is connected with the controller.
5. phosphine gas concentration monitor according to claim 3, it is characterised in that: it is unidirectional to cover setting after described
Valve, external air source can be passed through gas to the inner cavity of the first shell by the check valve；The first combination monitoring dress
Setting further includes Pressure monitoring element, and the Pressure monitoring element can monitor the pressure change of the first shell inner cavity.
6. phosphine gas concentration monitor according to claim 1, it is characterised in that: the second shell includes shell
Connector, when second monitoring portion is connected with first monitoring portion, the housing connection member and the first shell screw thread
Connection.
7. phosphine gas concentration monitor according to claim 6, it is characterised in that: the second shell further includes pressure
Cap and hollow shaft, the housing connection member pass through the pressure cap and abut against with the hollow shaft, the pressure cap and the hollow shaft
It is threadedly coupled, sealing element is set between the pressure cap and the hollow shaft.
8. phosphine gas concentration monitor according to claim 7, it is characterised in that: the third monitoring element setting
In the one end of the hollow shaft far from the housing connection member, the second shell further includes end cap, the end cap and the sky
Mandrel is detachably connected, and centre bore is arranged on the end cap, and the monitoring position of the third monitoring element passes through the centre bore
It is connected with external environment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910504793.3A CN110108847A (en) | 2019-06-12 | 2019-06-12 | A kind of phosphine gas concentration monitor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910504793.3A CN110108847A (en) | 2019-06-12 | 2019-06-12 | A kind of phosphine gas concentration monitor |
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| CN110108847A true CN110108847A (en) | 2019-08-09 |
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| CN201910504793.3A Pending CN110108847A (en) | 2019-06-12 | 2019-06-12 | A kind of phosphine gas concentration monitor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110412222A (en) * | 2019-08-26 | 2019-11-05 | 昆明美光科技有限公司 | A kind of isolation gas type gas concentration monitoring instrument |
Citations (8)
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