CN110108382A - Double-layer inductor formula passive wireless temperature sensor - Google Patents
Double-layer inductor formula passive wireless temperature sensor Download PDFInfo
- Publication number
- CN110108382A CN110108382A CN201910344138.6A CN201910344138A CN110108382A CN 110108382 A CN110108382 A CN 110108382A CN 201910344138 A CN201910344138 A CN 201910344138A CN 110108382 A CN110108382 A CN 110108382A
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- China
- Prior art keywords
- inductance coil
- down payment
- top metal
- double
- payment category
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/36—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention discloses a kind of double-layer inductor formula passive wireless temperature sensors, including substrate, top metal inductance coil, down payment category inductance coil, photoresist；Surface on substrate is arranged in the down payment category inductance coil, and a layer photoresist is covered on down payment category inductance coil, and top metal inductance coil is arranged on photoresist surface；Photoresist and top metal inductance circle, down payment category inductive loop constitute capacity plate antenna structure.The capacity plate antenna structure that photoresist and top metal inductance circle, down payment category inductive loop are constituted, form the LC resonance circuit of sensor, when the temperature varies, the Q value in sensor resonant circuit can change, therefore the detection for temperature can be realized in the Q value of measure loop or impedance maximum value.The advantages that double-layer inductor formula passive wireless temperature sensor of the invention has structure simple, easy to process, high sensitivity.
Description
Technical field
The present invention relates to a kind of microelectromechanical systems (MEMS) temperature sensor based on electroplating technology, it is especially a kind of
Using the passive and wireless of inductor-capacitor resonant tank formula (Inductor-Capacitor, LC) remote sensing technology that double inductance are formed
Temperature sensor.
Background technique
Real-time monitoring food service industry, file administration, greenhouse.Animal-breeding, drug stock control, the environment in tobacco business
Temperature is project very necessary in Internet of Things research.China is using Internet of Things as an important set of strategic emerging industries
At content.Sensor is the most important component part of thing network sensing layer, is the acquisition entrance of data, and sensor performance will be direct
The accuracy for influencing data in subsequent control system and information system decides entire Internet of things system characteristic and whole performance
Index plays conclusive effect to the application of Internet of Things industry and industry development, and the raising and type of sensor performance
Increase, also plays a part of technology traction to the application intelligently equipped and scene upgrades.And sensor has become Internet of Things hair
The bottleneck of exhibition causes Internet of things system higher cost, and it is larger to promote resistance, it is difficult to universal and extensive utilization comprehensively.In conjunction with new
Emerging technology, independently creative, the novel sensor developed including temperature sensor are extremely urgent.
Summary of the invention
For the more single problem of the type of LC formula passive wireless temperature sensor in the prior art, the purpose of the present invention
It is to provide a kind of double-layer inductor formula passive wireless temperature sensor, structure is simple, easy to process, high sensitivity.
To achieve the above object, the invention adopts the following technical scheme:
A kind of double-layer inductor formula passive wireless temperature sensor, including substrate, top metal inductance coil, down payment category inductor wire
Circle, photoresist；Surface on substrate is arranged in the down payment category inductance coil, is covered with one layer of photoetching on down payment category inductance coil
Glue, top metal inductance coil are arranged on photoresist surface；Photoresist and top metal inductance circle, down payment category inductive loop constitute plate electricity
Hold structure.
Parasitic capacitance and two metal inductance coil structures between the top metal inductance coil and down payment category inductance coil
At the basic sensitive structure unit of inductor-capacitor resonant tank formula sensor.
The substrate is glass substrate.
The material of the top metal inductance coil and down payment category inductance coil is metallic copper.
Top metal inductance coil and the down payment category inductance coil around to opposite.
The top metal inductance coil is processed to obtain with down payment category inductance coil by electroplating technology.
The operation principle of the present invention is that: the parasitism electricity between top layer copper metal inductance coil and bottom copper metal inductance coil
Hold the basic sensitive structure unit that inductor-capacitor resonant tank formula sensor is constituted with two metal inductance coils.In order to make to push up
Metal inductance coil is added with the magnetic field that down payment category inductance coil inductance generates, need by they around to opposite.Photoresist with
It pushes up metal inductance circle, the capacity plate antenna structure that down payment category inductive loop is constituted, that is, forms the LC resonance circuit of sensor, when temperature is sent out
When changing, the Q value in sensor resonant circuit can change, therefore the Q value of measure loop or impedance maximum value can be real
Referring now to the detection of temperature.
The utility model has the advantages that the present invention using top metal inductance coil and down payment category inductance coil phase mutual resonance, makes to sense utensil
There are radio detection, the simple feature of structure.Substrate uses glass substrate, saves process costs, and manufacture craft is simple；Selected by synthesis
For the cost of material, manufacture craft and material property, select glass substrate that can reduce parasitic capacitance and magnetic loss phase
To lower.In addition, the configuration of the present invention is simple, top metal inductance coil is that electroplating technology is processed to obtain with down payment category inductance coil,
With at low cost, stability is strong, the advantage of manufacture craft maturation.
Detailed description of the invention
Fig. 1 is double-layer inductor formula passive wireless temperature sensor sectional view；
Fig. 2 is the three-dimensional structure diagram of double-layer inductor formula passive wireless temperature sensor；
In figure, 1- substrate, 2- pushes up metal inductance coil, 3- down payment category inductance coil, 4- photoresist.
Specific embodiment
Further explanation is done to the present invention with reference to the accompanying drawing.
Such as Fig. 1 and 2, a kind of double-layer inductor formula passive wireless temperature sensor of the invention, including substrate 1, top metal electricity
Feel coil 2, down payment category inductance coil 3, photoresist 4；Substrate 1 is located at the bottom of entire sensor, plays pedestal；Down payment belongs to electricity
The sense setting of coil 3 is covered with a layer photoresist 4 on 1 upper surface of substrate, down payment category inductance coil 3, and top metal inductance coil 2 is set
It sets on 4 surface of photoresist.Top metal inductance coil 2 is processed to obtain with down payment category inductance coil 3 by electroplating technology.Photoresist 4
For the medium between upper and lower metal inductance coil, it is not required to be patterned.
The parasitic capacitance pushed up between metal inductance coil 2 and down payment category inductance coil 3 is constituted with two metal inductance coils
The basic sensitive structure unit of inductor-capacitor resonant tank formula sensor.Photoresist 4 and top metal inductance circle 2, bottom metal inductance
Circle 3 constitutes capacity plate antenna structure, that is, forms the LC resonance circuit of sensor, when the temperature varies, sensor resonant circuit
Q value can change, therefore the detection for temperature can be realized in the Q value of measure loop or impedance maximum value.
It is added to make to push up metal inductance coil with the magnetic field that down payment category inductance coil inductance generates, pushes up metal inductance coil
2 with down payment category inductance coil 3 around on the contrary, if top metal inductance coil 2 is around to be clockwise, then down payment category inductance coil
3 around to be counterclockwise.
Preferably, substrate 1 is glass substrate, can reduce parasitic capacitance and magnetic loss is relatively low.
Preferably, the material of top metal inductance coil 2 and down payment category inductance coil 3 is metallic copper.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (6)
1. a kind of double-layer inductor formula passive wireless temperature sensor, it is characterised in that: including substrate (1), top metal inductance coil
(2), down payment category inductance coil (3), photoresist (4)；The down payment category inductance coil (3) is arranged in substrate (1) upper surface, down payment
Belong to and being covered with a layer photoresist (4) on inductance coil (3), top metal inductance coil (2) is arranged on photoresist (4) surface；Photoetching
Glue (4) and top metal inductance circle (2), down payment category inductive loop (3) constitute capacity plate antenna structure.
2. double-layer inductor formula passive wireless temperature sensor according to claim 1, it is characterised in that: the top metal electricity
The parasitic capacitance felt between coil (2) and down payment category inductance coil (3) constitutes inductor-capacitor resonance with two metal inductance coils
The basic sensitive structure unit of loop-type sensor.
3. double-layer inductor formula passive wireless temperature sensor according to claim 1, it is characterised in that: the substrate (1)
For glass substrate.
4. double-layer inductor formula passive wireless temperature sensor according to claim 1, it is characterised in that: the top metal electricity
The material for feeling coil (2) and down payment category inductance coil (3) is metallic copper.
5. double-layer inductor formula passive wireless temperature sensor according to claim 1, it is characterised in that: the top metal electricity
Feel coil (2) and down payment category inductance coil (3) around to opposite.
6. double-layer inductor formula passive wireless temperature sensor according to claim 1, it is characterised in that: the top metal electricity
Sense coil (2) processes to obtain with down payment category inductance coil (3) by electroplating technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910344138.6A CN110108382A (en) | 2019-04-26 | 2019-04-26 | Double-layer inductor formula passive wireless temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910344138.6A CN110108382A (en) | 2019-04-26 | 2019-04-26 | Double-layer inductor formula passive wireless temperature sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110108382A true CN110108382A (en) | 2019-08-09 |
Family
ID=67486927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910344138.6A Pending CN110108382A (en) | 2019-04-26 | 2019-04-26 | Double-layer inductor formula passive wireless temperature sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN110108382A (en) |
Citations (7)
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|---|---|---|---|---|
| JPH08172161A (en) * | 1994-12-16 | 1996-07-02 | Hitachi Ltd | Inductor element and its manufacture and monolithic microwave integrated circuit using the same |
| ATA55295A (en) * | 1995-03-27 | 1997-03-15 | Sames Andreas | SENSOR FOR WIRELESS REMOTE MEASUREMENT OF TEMPERATURES |
| EP1806569A1 (en) * | 2006-01-09 | 2007-07-11 | Infineon Technologies SensoNor AS | Inductive-capactive sensor |
| CN101752226A (en) * | 2008-12-09 | 2010-06-23 | 上海华虹Nec电子有限公司 | Electrical inductance in integrated circuit and manufacturing method |
| CN105938021A (en) * | 2016-06-30 | 2016-09-14 | 东南大学 | Multi-layer inductor passive wireless LC temperature sensor |
| CN107421654A (en) * | 2017-03-27 | 2017-12-01 | 中北大学 | Superhigh temperature passive film temperature sensor and preparation method thereof |
| CN209605959U (en) * | 2019-04-26 | 2019-11-08 | 南京邮电大学 | Parasitic capacitance formula LC temperature sensor |
-
2019
- 2019-04-26 CN CN201910344138.6A patent/CN110108382A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08172161A (en) * | 1994-12-16 | 1996-07-02 | Hitachi Ltd | Inductor element and its manufacture and monolithic microwave integrated circuit using the same |
| ATA55295A (en) * | 1995-03-27 | 1997-03-15 | Sames Andreas | SENSOR FOR WIRELESS REMOTE MEASUREMENT OF TEMPERATURES |
| EP1806569A1 (en) * | 2006-01-09 | 2007-07-11 | Infineon Technologies SensoNor AS | Inductive-capactive sensor |
| CN101752226A (en) * | 2008-12-09 | 2010-06-23 | 上海华虹Nec电子有限公司 | Electrical inductance in integrated circuit and manufacturing method |
| CN105938021A (en) * | 2016-06-30 | 2016-09-14 | 东南大学 | Multi-layer inductor passive wireless LC temperature sensor |
| CN107421654A (en) * | 2017-03-27 | 2017-12-01 | 中北大学 | Superhigh temperature passive film temperature sensor and preparation method thereof |
| CN209605959U (en) * | 2019-04-26 | 2019-11-08 | 南京邮电大学 | Parasitic capacitance formula LC temperature sensor |
Non-Patent Citations (4)
| Title |
|---|
| TIAN QIULIN等: "A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments", 《JOURNAL OF MICROELECTROMECHANICAL SYSTEMS》, vol. 26, no. 2, pages 351 - 356, XP011644502, DOI: 10.1109/JMEMS.2016.2642580 * |
| ZHANG CONG等: "Passive wireless integrated humidity sensor based on dual-layer spiral inductors", 《ELECTRONICS LETTERS》, vol. 50, no. 18, pages 1 - 2 * |
| 任青颖: "无源无线温湿度传感器研究", 《中国博士学位论文全文数据库 信息科技辑》, pages 140 - 37 * |
| 王渊朝;彭斌;黄武林;: "一种LC谐振无线无源温度传感器的研究", 传感技术学报, no. 10 * |
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