CN110092968A - A kind of high stability water-proof cable - Google Patents

A kind of high stability water-proof cable Download PDF

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Publication number
CN110092968A
CN110092968A CN201910372728.XA CN201910372728A CN110092968A CN 110092968 A CN110092968 A CN 110092968A CN 201910372728 A CN201910372728 A CN 201910372728A CN 110092968 A CN110092968 A CN 110092968A
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carbon black
high stability
antioxidant
proof cable
stability water
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CN110092968B (en
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不公告发明人
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Zhuhai Zhongsheng wire & Cable Co.,Ltd.
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Shandong Tiger Force Machinery Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L23/00Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers
    • C08L23/02Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L23/04Homopolymers or copolymers of ethene
    • C08L23/06Polyethene
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00Insulated conductors or cables characterised by their form
    • H01B7/17Protection against damage caused by external factors, e.g. sheaths or armouring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B7/00Insulated conductors or cables characterised by their form
    • H01B7/17Protection against damage caused by external factors, e.g. sheaths or armouring
    • H01B7/28Protection against damage caused by moisture, corrosion, chemical attack or weather
    • H01B7/282Preventing penetration of fluid, e.g. water or humidity, into conductor or cable
    • H01B7/2825Preventing penetration of fluid, e.g. water or humidity, into conductor or cable using a water impermeable sheath

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Conductive Materials (AREA)

Abstract

The present invention relates to a kind of high stability water-proof cables, it from the inside to the outside include conductor, semiconductive shielding layer, insulating layer, waterproof layer, armor and sheath, the semiconductive shielding layer is made of semi-conductive shielding material, wherein, semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethylene-vinyl acetate copolymer 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.High stability water-proof cable structure prepared by the present invention is simple, light weight and shield effectiveness are good, and the tensile strength of cable is high, durable corrosion-resistant, and service life is longer.

Description

A kind of high stability water-proof cable
Technical field
The present invention relates to a kind of high stability water-proof cables.
Background technique
As Chinese Urbanization is accelerated with what is modernized, domestic electricity is that system is also completed constantly.It is various Large-scale coal, waterpower, nuclear energy, renewable new energy power station of water-power plant, large-scale intensive development etc. are all numerous and confused In construction.This results in the demand of crosslinked polyetylene insulated middle-high voltage power cable to increase year by year.
In recent years, China is being dedicated to promoting the quality level of semiconductive shielding layer, diminution and Foreign Advanced Lerel always Gap.The main reason for limitation middle-high voltage power cable is domesticized with semiconductive shieldin material is the absence of the proper tree haveing excellent performance Rouge and the technology for preparing ultra pure materials are also immature.Since the electric field strength in middle-high voltage power cable insulating layer is very big, appoint Tiny flaw on what semiconductive shielding layer all may cause serious electrical field deformation, and shelf depreciation occurs, final to cause electricity tree The phenomenon that branch.Therefore, semiconductive shielding layer used in middle-high voltage power cable requires the very high expression surface of smoothness.
Foreign countries' research and development to semiconductive shieldin material since eighties of last century the fifties are just.By 60 years The commercialization in generation, the polymer such as ethylene-vinyl acetate copolymer accelerates research and development of the people to cable screen material.The seventies Afterwards, it is external oneself develop the semiconductive shieldin material with practical application value and successfully put into use.However, China for The research of semiconductive shieldin material starts from the end of last century, compared to starting late for developed country.Cable raw material used are such as EVA, high-purity polyethylene etc. depend on import more, and the conductive black of domestic production also has larger gap with foreign countries.This is resulted in The shielding material of domestic production has serious defect in terms of electrical property, and compared to external product, shielding layer surface has more Protrusion or burr, it is not smooth enough.
State Grid Corporation of China obtains a kind of cable semi-conductive shielding material (CN106279929A), the material packet by research and development Include the raw material of following weight percent: polyethylene 40-80%, ethylene-vinyl acetate copolymer 5-20%, modified carbon black 15- 40%, auxiliary agent 5-20%, crosslinking agent 0.1-1.5%.Present invention firstly provides the supported active metals on carbon black, improve carbon black On space potential distribution, and the surface nature of carbon black can be improved to a certain extent, improve carbon black in shielding material system Degree of scatter during standby, to prepare, surface is smooth, the small excellent shielding material with conductor contact hole.
However, reacted by market practice, the shielding material of above-mentioned cable there are still the technical problem of shield effectiveness deficiency, Research staff by detection discovery, the volume resistivity of above-mentioned cable shield material is still higher and 50 μm or more amount of impurities still It is on the high side, eventually lead to the requirement for being unable to satisfy high shield effectiveness.
Summary of the invention
Volume resistivity in order to solve cable shield material in the prior art is still higher and 50 μm or more amount of impurities Still on the high side and cable shield effectiveness is difficult to the technical issues of meeting high demand.
The invention proposes following technical solutions:
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 9-10, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel Simple substance and cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is 3wt% Activation after carbon black;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is 1:1 mixing structure by compound (1) and dialkyl sulphosuccinates succinate by weight in the step 3 At;
The structural formula of the compound (1) is as follows:
The crosslinking agent is one of Triallyl isocyanurate, trihydroxy methyl propane trimethyl acrylate.
The antioxidant is one of antioxidant 1010, antioxidant 1024, antioxidant 1035.
Calcination temperature is 150-200 DEG C in the step 1.
Calcination temperature is 300-350 DEG C in the step 3, calcination time 3-7h.
Technical solution of the present invention has as follows by beneficial effect:
(1) compared with the prior art, the volume resistivity (Ω m) for the shielding material that the present invention is prepared can achieve 19, and 50 μm or more amount of impurities are eliminated, greatly improve the shield effectiveness and stability of cable;
(2) carrying out compound modified synergic to carbon black using compound (1) and dialkyl sulphosuccinates succinate can be significantly The dispersion effect for improving carbon black is conducive to carbon black and realizes in shielding material be uniformly distributed, and gives full play to carbon black in the cable Shield effectiveness guarantees the stability of cable;
(3) it compared to nickel-loaded and aluminium, would be even more beneficial to improve charcoal using nickel and cobalt as the supported active metals of carbon black Space potential distribution and surface nature on black, improve degree of scatter of the carbon black in shielding material preparation process, guarantee cable Stability.
(4) cable of the invention includes waterproof layer, it is ensured that the waterproof effect of cable.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to embodiments and comparative example, The present invention will be described in further detail.
Embodiment 1
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 9, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel list Matter and cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is 3wt% Carbon black after activation;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is 1:1 mixing structure by compound (1) and dialkyl sulphosuccinates succinate by weight in the step 3 At;
The structural formula of the compound (1) is as follows:
Wherein, the crosslinking agent is Triallyl isocyanurate, and the antioxidant is antioxidant 1010, the step 1 Middle calcination temperature is 150 DEG C, and calcination temperature is 300 DEG C in the step 3, calcination time 3h.
Embodiment 2
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 9, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel list Matter and cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is 3wt% Carbon black after activation;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is 1:1 mixing structure by compound (1) and dialkyl sulphosuccinates succinate by weight in the step 3 At;
The structural formula of the compound (1) is as follows:
Wherein, the crosslinking agent is trihydroxy methyl propane trimethyl acrylate, and the antioxidant is antioxidant 1024, institute Stating calcination temperature in step 1 is 170 DEG C, and calcination temperature is 320 DEG C in the step 3, calcination time 5h.
Embodiment 3
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 10, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel list Matter and cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is 3wt% Carbon black after activation;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is 1:1 mixing structure by compound (1) and dialkyl sulphosuccinates succinate by weight in the step 3 At;
The structural formula of the compound (1) is as follows:
Wherein, the crosslinking agent is trihydroxy methyl propane trimethyl acrylate, and the antioxidant is antioxidant 1035, institute Stating calcination temperature in step 1 is 200 DEG C, and calcination temperature is 350 DEG C in the step 3, calcination time 7h.
Comparative example 1
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Al3+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 9, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel list Matter and aluminium simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of aluminium is 3wt% Carbon black after activation;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is 1:1 mixing structure by compound (1) and dialkyl sulphosuccinates succinate by weight in the step 3 At;
The structural formula of the compound (1) is as follows:
Wherein, the crosslinking agent is Triallyl isocyanurate, and the antioxidant is antioxidant 1010, the step 1 Middle calcination temperature is 150 DEG C, and calcination temperature is 300 DEG C in the step 3, calcination time 3h.
Comparative example 2
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 9, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel list Matter and cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is 3wt% Carbon black after activation;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is only made of compound (1) in the step 3;
The structural formula of the compound (1) is as follows:
Wherein, the crosslinking agent is Triallyl isocyanurate, and the antioxidant is antioxidant 1010, the step 1 Middle calcination temperature is 150 DEG C, and calcination temperature is 300 DEG C in the step 3, calcination time 3h.
Comparative example 3
A kind of high stability water-proof cable includes conductor, semiconductive shielding layer, insulating layer, waterproof layer, armouring from the inside to the outside Layer and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
The semi-conductive shielding material includes the raw material of following weight percent: polyethylene 50%, ethene-vinyl acetate are total Polymers 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
The preparation method of the modified carbon black the following steps are included:
Step 1: carbon black pretreatment, carbon black are impregnated for 24 hours in lye, are impregnated in nitric acid after washing for 24 hours, through deionized water It cleans, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, be added ammonium hydroxide adjustment pH value arrive 9, agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel list Matter and cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is 3wt% Carbon black after activation;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, modifying agent is added, 4~8h is stirred to react, It is centrifuged, washs, is dried to get modified carbon black;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
Modifying agent is only made of dialkyl sulphosuccinates succinate in the step 3.
Wherein, the crosslinking agent is Triallyl isocyanurate, and the antioxidant is antioxidant 1010, the step 1 Middle calcination temperature is 150 DEG C, and calcination temperature is 300 DEG C in the step 3, calcination time 3h.
Characterization result: the semi-conductive shielding material that embodiment 1 and comparative example 1-3 are prepared detects, detection Main two indices: (1) volume resistivity (Ω m);(2) 50 μm or more amount of impurities.
Following table describes type, the composition of dispersing agent, the volume electricity of active metal in embodiment 1 and comparative example 1-3 in detail Resistance rate (Ω m) and 50 μm or more amount of impurities.
The above results show: (1) compared with the prior art, the volume resistivity for the shielding material that the present invention is prepared (Ω m) can achieve 19, eliminates 50 μm or more amount of impurities, greatly improves the shield effectiveness and stability of cable;(2) from Embodiment 1 and the result of comparative example 2-3, which can be seen that, carries out carbon black using compound (1) and dialkyl sulphosuccinates succinate Compound modified synergic can increase substantially the dispersion effect of carbon black, be conducive to carbon black and realize in shielding material be uniformly distributed, The shield effectiveness of carbon black in the cable is given full play to, guarantees the stability of cable;It (3) can from embodiment 1 and comparative example 1 Out, compared to nickel-loaded and aluminium, it would be even more beneficial to improve the sky on carbon black using nickel and cobalt as the supported active metals of carbon black Between Potential distribution and surface nature, improve degree of scatter of the carbon black in shielding material preparation process, guarantee the stability of cable.

Claims (8)

1. a kind of high stability water-proof cable, which is characterized in that from the inside to the outside include conductor, semiconductive shielding layer, insulating layer, prevent Water layer, armor and sheath, the semiconductive shielding layer are made of semi-conductive shielding material.
2. high stability water-proof cable according to claim 1, which is characterized in that the semi-conductive shielding material include with The raw material of lower weight percent: polyethylene 50%, ethylene-vinyl acetate copolymer 20%, modified carbon black 19%, diethyl carbonate 10%, crosslinking agent 0.5%, antioxidant 0.5%.
3. high stability water-proof cable according to claim 2, which is characterized in that the preparation method packet of the modified carbon black Include following steps:
Step 1: carbon black pretreatment, carbon black is impregnated for 24 hours in lye, is impregnated in nitric acid after washing for 24 hours, clear through deionized water It washes, calcining and activating is under inert atmosphere to get the carbon black after activation;
Step 2: the carbon black after activation is added to containing Ni2+And Co2+Aqueous solution in, ammonium hydroxide is added and adjusts pH value to 9-10, Agitated, decompression filters, cleaning, it is dry, under inert atmosphere calcination processing to get supported active metals carbon black;With nickel simple substance With cobalt simple substance meter, nickel loading is the carbon black after the activation of 15wt% in the modified carbon black, and the load capacity of cobalt is the work of 3wt% Carbon black after change;
Step 3: by the carbon black dispersion of supported active metals in ethanol solution, add modifying agent, be stirred to react 4~8h, through from Heart separation, is dried to get modified carbon black washing;The dosage of the modifying agent is the carbon black of supported active metals 5wt%, the partial size of the modified carbon black are 100-1000nm.
4. high stability water-proof cable according to claim 3, which is characterized in that modifying agent is by chemical combination in the step 3 Object (1) and dialkyl sulphosuccinates succinate are that 1:1 mixing is constituted by weight;
The structural formula of the compound (1) is as follows:
5. high stability water-proof cable according to claim 2, which is characterized in that the crosslinking agent is triallyl isocyanide One of urea acid esters, trihydroxy methyl propane trimethyl acrylate.
6. high stability water-proof cable according to claim 2, which is characterized in that the antioxidant be antioxidant 1010, One of antioxidant 1024, antioxidant 1035.
7. high stability water-proof cable according to claim 3, which is characterized in that calcination temperature is in the step 1 150-200℃。
8. high stability water-proof cable according to claim 3, which is characterized in that calcination temperature is in the step 3 300-350 DEG C, calcination time 3-7h.
CN201910372728.XA 2019-05-06 2019-05-06 High-stability waterproof cable Active CN110092968B (en)

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WO2023177091A1 (en) * 2022-03-16 2023-09-21 솔브레인 주식회사 Shielding compound, thin film forming method using same, and semiconductor substrate and semiconductor device manufactured therefrom

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WO2023177091A1 (en) * 2022-03-16 2023-09-21 솔브레인 주식회사 Shielding compound, thin film forming method using same, and semiconductor substrate and semiconductor device manufactured therefrom

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