CN110081957B - Calibration method applied to liquid discharge system - Google Patents

Calibration method applied to liquid discharge system Download PDF

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CN110081957B
CN110081957B CN201910415140.8A CN201910415140A CN110081957B CN 110081957 B CN110081957 B CN 110081957B CN 201910415140 A CN201910415140 A CN 201910415140A CN 110081957 B CN110081957 B CN 110081957B
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analog sensor
calibration
volume
metering tank
value
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CN110081957A (en
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卡尔·罗伯特·休斯特
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Spmc Changzhou Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/0084—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume for measuring volume

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  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Measuring Volume Flow (AREA)

Abstract

The invention provides a calibration method applied to a liquid discharge system, wherein the liquid discharge system comprises a metering tank, an analog sensor A for acquiring the volume of liquid in the metering tank is arranged in the metering tank, the liquid discharge system also comprises a control system, an analog sensor B is also arranged in the metering tank, and the analog sensor B is arranged in the metering tankThe sensor B and the analog sensor A are positioned at different heights; the calibration method applied to the liquid discharge system comprises the following steps: step A-determination of the calibration volume VCAnd step B-determining the proportionality constant C of the analog sensor AC. The invention relates to a calibration method comprising the determination of a calibration volume VCAnd determining the proportionality constant CCIn addition, in the regular calibration process of each time, the calibration can be completed through automatic control of a control system, so that the calibration precision is obviously improved, and the calibration efficiency is further improved.

Description

Calibration method applied to liquid discharge system
Technical Field
The invention relates to the technical field of liquid drainage, in particular to a calibration method applied to a liquid drainage system.
Background
In the manufacturing process of semiconductors, LEDs, solar cells and other industries, a certain proportion of acidic or alkaline mixed chemical liquid is often required to be utilized to carry out wet processing such as cleaning or etching on products. In the wet treatment process, a certain amount of chemical liquid is usually required to be prepared according to a formula provided by a customer and injected into a treatment tank for wet treatment. Generally, a metering tank is provided above and below the treatment tank, and the chemical liquid is injected into and discharged from the treatment tank by the gravity of the liquid. In the prior art, analog sensors are often used to obtain the volume of the chemical liquid in the metering tank, and these analog sensors are of the type including pressure sensors, capacitive sensors, resistive sensors, sonar, radar, and the like. The above-mentioned types of analog sensors usually measure the volume of the chemical liquid by sensing a scale mark on the metering tank, and the scale mark is usually determined manually by a calibration person, so that the accuracy of the volume value measured by the method is usually not very high.
In addition, whether an analog sensor of any of the above types is used, it is necessary to calibrate the sensor before use to obtain the zero-offset value Q of the sensorZAnd the proportionality constant C between the sensor reading and the liquid volumeC(hereinafter abbreviated as proportionality constant), and then by the formula V ═ CC×(Q-QZ) And calculating to obtain the size of the liquid volume V, wherein Q is the ADC data output value of the sensor.
At present, the proportionality constant C of the sensor is calibratedCThere are two main methods, specifically as follows:
the first method comprises the following steps:
a) liquid feeding: injecting a certain amount of chemical liquid into the metering tank; b) after the liquid is completely fed, reading the reading of the sensor as Q1(ii) a c) Liquid drainage: discharging a predetermined amount of the chemical liquid from the metering tank, and collecting the discharged chemical liquidChemical liquid and its volume measured is recorded as Vm(ii) a d) After the drainage is completed, reading the reading of the sensor as Q2(ii) a e) According to the proportionality constant C between the sensor and the volume of the chemical liquidc＝Vm/(Q1-Q2) Calculating to obtain CCThe value of (c).
The second method comprises the following steps:
a) liquid feeding: injecting a certain amount of chemical liquid into the metering tank; b) after the liquid is completely fed, reading the reading of the sensor as Q3(ii) a c) Secondary liquid feeding: feeding a known volume V into the metering tankAThe chemical liquid of (1); d) after the secondary liquid feeding is finished, reading the reading of the sensor as Q4(ii) a e) According to the proportionality constant C between the sensor and the volume of the chemical liquidC＝VA/(Q4-Q3) Calculating to obtain a proportionality constant CCThe value of (c).
However, the proportionality constant C between the sensor and the volume of the chemical liquid is measured using the two methods described aboveCThere are certain drawbacks: firstly, the first method and the second method relate to liquid inlet or liquid discharge operation of chemical liquid, the chemical liquid needs to be added or discharged manually, and the personal safety of calibration personnel can be endangered; secondly, most analog sensors result in a proportionality constant C after a long time of useCAnd the zero point drifts, so the operation of the method I or the method II must be repeated, and the analog sensor is regularly calibrated to ensure the accuracy of each measurement; because chemical liquid has various unstable factors such as liquid level oscillation in the process of liquid inlet or liquid discharge, if the volume of the chemical liquid is directly measured, the accuracy of the measured value is difficult to ensure, and the actual liquid inlet amount or liquid discharge amount is easy to cause large deviation.
Disclosure of Invention
In view of the above-mentioned problems, it is an object of the present invention to provide a calibration method for a liquid discharge system, which is applied to a sensor with a proportionality constant CCThe calibration is carried out, the personal safety of calibration personnel is guaranteed, the calibration steps are simplified, the calibration efficiency is obviously improved, and the calibration precision is effectively improved.
The technical scheme of the invention is as follows: a calibration method applied to a liquid discharge system comprises a metering tank, wherein a chemical liquid inlet pipe is arranged above the metering tank, a liquid inlet valve for controlling liquid inlet is arranged on the chemical liquid inlet pipe, an analog sensor A for acquiring the volume of liquid in the metering tank is arranged in the metering tank, a liquid discharge pipe is also arranged at the bottom of the metering tank, a liquid discharge valve is arranged on the liquid discharge pipe, the liquid discharge system also comprises a control system, the control system is respectively connected with the analog sensor A, the liquid inlet valve and the liquid discharge valve in a control mode, an analog sensor B is also arranged in the metering tank, and the analog sensor B and the analog sensor A are located at different positions;
the calibration method applied to the liquid discharge system comprises the following steps:
step A-determination of the calibration volume VC：
When the analog sensor A and the analog sensor B are simultaneously submerged by liquid, the liquid volumes acquired by the analog sensor A and the analog sensor B are respectively VAAnd VBAnd a zero offset value Q of the analog sensor A is setAZAnd zero offset value Q of analog sensor BBZAre all known; setting a calibration volume VCIs equal to VAAnd VBThe difference between the values is measured by injecting water into the metering tank and discharging it quantitatively according to the calibrated volume VCThe relation between the volume of water and the volume of water to calculate the calibration volume VCA value of (d);
assume a proportionality constant K between ADC data output value and pressure value of analog sensor AAAnd a constant of proportionality K between the ADC data output value of the analog sensor B and the pressure valueBSimilarly, the operation of step a is specifically as follows:
a1 zero offset value Q of analog sensor AAZAnd zero offset value Q of analog sensor BBZUnder the known conditions, injecting water into the metering tank until the analog sensor A and the analog sensor B are submerged simultaneously;
a2, after the water injection is finished, the control system reads the ADC data output values of the analog sensor A and the analog sensor B at the moment, and the ADC data output values are respectively recorded as QA1And QB1；
A3, discharging and collecting a certain amount of water from the metering tank;
a4, after the water drainage is finished, the control system reads the ADC data output value of the analog sensor A at the moment and records the value as QA2；
A5, measuring the volume of water displaced in step A3 and marking as VM；
A6, according to the calibration volume VC＝VM×[(QA1-QAZ)-(QB1-QBZ)]/(QA1-QA2) Calculating to obtain a calibration volume VC；
Step B-determining the proportionality constant C of the analog sensor AC：
B1, controlling the opening and closing of the liquid inlet valve by the control system, and injecting chemical liquid into the metering tank to ensure that the chemical liquid simultaneously passes through the analog sensors A and B;
b2, the control system reads the ADC data output values of the analog sensor A and the analog sensor B, which are respectively marked as QAAnd QB；
B3 according to proportionality constant CC＝VC/[(QA-QAZ)-(QB-QBZ)]And calculating to obtain a proportionality constant C of the analog sensor ACThe value of (c).
Preferably, step a further includes step a0, ensuring that the measuring tank is empty, and the control system reading the ADC data output values of the analog sensor a and the analog sensor B, respectively, i.e. the zero offset values of the analog sensor a and the analog sensor B, respectively, denoted as QAZAnd QBZ。
Preferably, the control system reads the ADC data output value of the analog sensor accurately, that is, the control system starts reading only after the metering tank is left standing for a while.
Preferably, when the control system accurately reads the ADC data output value of the analog sensor, after the metering tank is left standing for a while, the metering tank may be read many times, and data processing may be performed on the multiple reading results to obtain a more accurate value.
Compared with the prior art, the invention has the following beneficial effects: the invention relates to a calibration method applied to a liquid discharge system, which comprises the step of determining a calibration volume VCAnd determining the proportionality constant CCTwo steps, to the proportionality constant C between the analog sensor and the chemical liquidCThe calibration is carried out, and in the whole calibration process, the calibrator does not need to contact with chemical liquid for treatment, so that the personal safety of the calibrator is ensured; the calibration steps are effectively simplified, and the calibration efficiency is obviously improved; in addition, in the periodic calibration process at every time, the calibration can be automatically controlled and completed through a control system, manual participation is not needed usually, the calibration precision is obviously improved, and the calibration efficiency is further improved.
Drawings
Table 1 shows the comparison of the actual liquid discharge volume results under various factors;
fig. 1 is a schematic structural diagram of a hardware device used in embodiment 1 of the present invention;
in the figure: 1-a metering tank, 2-a chemical liquid inlet pipe, 3-an inlet valve, 4-a bubble pipe A, 5-a bubble pipe B, 6-an analog sensor A, 7-an analog sensor B, 8-an air source with a pressure regulating valve, 9-an air flow throttle valve A, 10-an air flow throttle valve B, 11-a PLC controller and 12-a liquid discharge valve.
Detailed Description
The invention is described in further detail below with reference to the figures and the detailed description, embodiments of the invention include, but are not limited to, the following examples.
Example 1
Referring to fig. 1, a calibration method applied to a liquid discharge system, in this embodiment, the liquid discharge system includes a metering tank 1 having a uniform cross-sectional area, a chemical liquid inlet pipe 2 is disposed above the metering tank 1, a liquid inlet valve 3 (a pneumatic valve is used in this embodiment) for controlling liquid inlet is disposed on the chemical liquid inlet pipe 2, a bubble vial a4 and a bubble vial B5 are disposed in the metering tank 1, respectively, wherein a bottom end of the bubble vial a4 is lower than a bottom end of the bubble vial B5, the bubble vial a4 and the bubble vial B5 are connected to an analog sensor A6 and an analog sensor B7 (both the analog sensor A6 and the analog sensor B7 are analog pressure sensors) respectively for reading internal pressures of the bubble vial a4 and the bubble vial B5, the bubble vial a4 and the bubble vial B5 are connected to a gas source 8 having a pressure regulating valve and a pipeline between the gas source 8 and the bubble vial a4 respectively through pipelines, and a throttle valve A9 and a throttle valve B10 are respectively arranged on a pipeline between the air source 8 and the bubble tube B5 and are respectively used for limiting and constant flow of air in the bubble tube A4 and the bubble tube B5, a liquid discharge pipe is also arranged at the bottom of the metering tank 1, a liquid discharge valve 12 is arranged on the liquid discharge pipe and is used for controlling liquid discharge from the metering tank 1, the liquid discharge system further comprises a PLC (programmable logic controller) 11, the PLC 11 is respectively in control connection with the analog sensor A6, the analog sensor B7, the liquid inlet valve 3 and the liquid discharge valve 12, the PLC 11 can read the signal output of the analog sensor A6 and the analog sensor B7 and control the opening and closing of the pneumatic valve 3 and the liquid discharge valve 12.
The calibration method applied to the liquid discharge system comprises the following steps:
step A-determination of the calibration volume VC：
A0, when the measuring tank 1 is empty, the PLC 11 reads the ADC data output values of the analog sensor A6 and the analog sensor B7, that is, the zero offset values of the analog sensor A6 and the analog sensor B7, which are respectively denoted as QAZAnd QBZ；
A1, injecting water into the measuring tank 1, and stopping injecting water until the pressure value read by the analog sensor B7 is equal to about 20mm of water pressure;
a2, after the water injection is finished, after the metering tank 1 is kept still for a moment, the PLC 11 accurately reads the ADC data output values of the analog sensor A6 and the analog sensor B7 at the moment, and the ADC data output values are respectively marked as QA1And QB1；
A3, draining water from the tank 1 until the reading Q of the analog sensor A6A≈QB1Stopping discharging and collecting discharged water;
a4, after the water discharge is finished, after the measuring tank 1 is stood for a moment, the PLC 11 accurately reads the ADC data output value of the analog sensor A6 at the moment and records as QA2；
A5, measuring the volume of water discharged from tank 1 in step A3 and marking as VM；
A6, the volume between the water surface in the design amount tank 1 and the bottom end of the bubble tube A4 at the same height and the water surface of the bottom end of the bubble tube B5 at the same height is a calibration bodyProduct VC(with particular reference to FIG. 1), according to a calibration volume VC＝VM×[(QA1-QAZ)-(QB1-QBZ)]/(QA1-QA2) Calculating to obtain a calibration volume VC。
Step B-determine the proportionality constant C of the analog sensor A6C：
B1, the PLC 11 controls the liquid inlet valve 3 to open, so that the chemical liquid enters the measuring tank 1 through the chemical liquid inlet pipe 2, and the PLC 11 controls the liquid inlet valve 3 to close until the pressure value read by the analog sensor B7 is equal to 20mm water pressure;
b2, after the liquid inlet is finished, and after the metering tank 1 is stood for a moment, the PLC 11 accurately reads the ADC data output values of the analog sensor A6 and the analog sensor B7 at the moment, and the ADC data output values are recorded as Q respectivelyA3And QB3；
B3 according to proportionality constant CC＝VC/[(QA3-QAZ)-(QB3-QBZ)]And calculating a proportionality constant C of the analog sensor A6CThe value of (c).
It is understood that in the above step a5, since the density ρ of water is known, the mass M of discharged water can be measured by a balance according to which M is ρ × VMCalculating to obtain the volume V of water dischargeM。
It can be understood that, in the above steps, when the PLC controller 11 reads the readings of the analog sensors, specifically, after the pressure values P measured by the analog sensors are respectively digitized by the analog-to-digital converters, the obtained ADC data output values Q are obtained, where Q is K × P + Qz(QzIs the zero offset value of the analog sensor, and K is the proportionality constant between the analog sensor ADC data output value Q and the pressure value P).
It should be noted that, in the present embodiment, since the analog sensor a6 and the analog sensor B7 are of the same type, the proportional constant K between the ADC data output value and the pressure value based on the analog sensor a6 is used in the calculation processAAnd a proportionality constant K between the ADC data output value of the analog sensor B7 and the pressure valueBOn the assumption of similarity, in other implementationsIn this case, the assumption may not be assumed, but the water filling operation is generally repeated after the water filling operation of step a1 to determine KBThe value of (c).
As can be appreciated, in step B3, the proportionality constant C of sensor A6 is modeledCSatisfy the relation VA＝CC×(QA-QZA) In which V isAIs the volume above the liquid level at the same height as the bottom of bubble vial a 4.
Preferably, in order to further improve the measurement accuracy, in the step a2, the step a4 and the step B2, after the measuring tank 1 is left standing for a moment, the PLC controller 11 may be repeatedly used to accurately read the readings of the analog sensor a6 and the analog sensor B7 at this time, and perform data processing on the multiple reading results to obtain a more accurate value. Specific data processing methods include, but are not limited to, an average method, a fast fourier transform method, a minimum-maximum measurement method, and the like.
In the above calibration procedure, comprising the step A-determining the calibration volume VCAnd step B-determining the proportionality constant C of the analog sensorCWherein, in the step A, calibration personnel is required to manually participate in the water injection and discharge treatment, and the step does not involve the use of chemical liquid; in step B, the calibration volume V obtained in step A is usedCDetermining the final proportionality constant C by using chemical liquidCIn the step, the liquid inlet and the liquid outlet of the chemical liquid are both completed by the PLC controller, and the chemical liquid is not required to be manually processed by a calibrator, so that the personal safety of the calibrator is effectively ensured, the loss of the chemical liquid does not exist in the step B, and the production cost is effectively reduced; furthermore, step A is used to determine a calibration volume VCSince the calibration volume V is chosen for a particular combination of drainage devices (without the relative positions of bubble tube a and bubble tube B being changed in this embodiment), the calibration volume V is chosenCThe calibration method is unchangeable, so that the step A does not need to be repeated periodically, and the calibration efficiency is improved.
It will be appreciated that if the combination of the drainage devices is changed, this results in a calibrated volume VCChanges (as in this example)The relative positions of bubble tube a4 and bubble tube B5 have changed), then step a would need to be repeated to determine the changed calibration volume VC。
It will be appreciated that, with the prior art, step B can be set to a fully automated operation, which can be performed automatically and periodically by an automated program-controlled drainage system, even without the need for an operator to be present.
It is understood that the combination of the measuring tank, the bubble vial, and the analog pressure sensor having a uniform cross-sectional area used in the present embodiment is an example for describing the calibration method according to the present invention in detail, and other combinations of the liquid discharge devices based on the method may be used in other embodiments. For example, the liquid inlet valve 3 is a pneumatic valve in the present embodiment, and other types of control valves may be used in other embodiments. For another example, in the present embodiment, analog sensors a6 and B7 are analog pressure sensors, and in other embodiments, other types of analog sensors may be used, including but not limited to analog sensors with different ranges of measurement, resistive strip types, or capacitive types, or analog sensors with acoustic or radar types, etc., and when other analog sensors are used, the specific algorithm used to convert the reading to volume ultimately depends on the type of analog sensor actually used.
In order to verify the accuracy of the calibration method applied to the liquid discharge system, the inventor performed calibration experiments using four different chemical liquids (including water, sodium bicarbonate solution, isopropanol and sulfuric acid) by using the liquid discharge system and the specific calibration steps in example 1, and referring to table 1 for specific experimental results, wherein each numbered experiment was repeated 10 times, the actual liquid discharge volume average value and the standard deviation value of each numbered experiment were obtained by calculation, respectively, and the final results were compared. It should be noted that, in the calibration process, since it is difficult to directly measure the volume of the discharged liquid with high precision, the inventor performs the liquid discharge in combination with the liquid discharge method referred to in the "method for discharging a specified volume" of the invention that the applicant has applied when performing the calibration experiment.
As shown in Table 1, all the results of the calibration experiments are within +/-1%, thus demonstrating the high accuracy of the calibration method according to the present invention.
Table 1: comparison of actual liquid discharge volume results under various different factors
Figure GDA0002478079650000061
Note: in table 1, ("1/2-inch PFA pneumatic regulator valve") was provided by Entegris, usa, ("CDK 1/2-inch PFA pneumatic valve" (upper orifice 4mm) was provided by japan CDK, and ((1/2) -inch PFA pneumatic valve "(lower orifice 4mm) was provided by japan CDK), and ((r) 1/2-inch PFA pneumatic valve" (lower orifice 5mm) was provided by japan CDK.
Various other modifications and changes may be made by those skilled in the art based on the above-described technical solutions and concepts, and all such modifications and changes should fall within the scope of the claims of the present invention.

Claims (4)

1. The utility model provides a calibration method for flowing back system, flowing back system includes the metering tank, and the metering tank top is equipped with chemical liquid feed liquor pipe, is equipped with the feed liquor valve that is used for the control feed liquor on the chemical liquid feed liquor pipe, is equipped with the analog sensor A that is used for acquireing the liquid volume in the metering tank, and the metering tank bottom still is equipped with the fluid-discharge tube, is equipped with the flowing back valve on the fluid-discharge tube, and this flowing back system still includes control system, and control system is the control connection analog sensor A, feed liquor valve and flowing back valve respectively, its characterized: an analog sensor B is also arranged in the metering tank, and the analog sensor B and the analog sensor A are positioned at different heights;
the calibration method applied to the liquid discharge system comprises the following steps:
step A-determination of the calibration volume VC：
If the analog sensor A and the analog sensor B are simultaneously submerged by liquid, the analog sensor A and the analog sensor B are arrangedThe liquid volumes obtained by the sensor B are respectively VAAnd VBAnd a zero offset value Q of the analog sensor A is setAZAnd zero offset value Q of analog sensor BBZAre all known; setting a calibration volume VCIs equal to VAAnd VBThe difference between the values is measured by injecting water into the metering tank and discharging it quantitatively according to the calibrated volume VCThe relation between the volume of water and the volume of water to calculate the calibration volume VCA value of (d);
assume a proportionality constant K between ADC data output value and pressure value of analog sensor AAAnd a constant of proportionality K between the ADC data output value of the analog sensor B and the pressure valueBSimilarly, the operation of step a is specifically as follows:
a1 zero offset value Q of analog sensor AAZAnd zero offset value Q of analog sensor BBZUnder the known conditions, injecting water into the metering tank until the analog sensor A and the analog sensor B are submerged simultaneously;
a2, after the water injection is finished, the control system reads the ADC data output values of the analog sensor A and the analog sensor B at the moment, and the ADC data output values are respectively recorded as QA1And QB1；
A3, discharging and collecting a certain amount of water from the metering tank;
a4, after the water drainage is finished, the control system reads the ADC data output value of the analog sensor A at the moment and records the value as QA2；
A5, measuring the volume of water displaced in step A3 and marking as VM；
A6, according to the calibration volume VC＝VM×[(QA1-QAZ)-(QB1-QBZ)]/(QA1-QA2) Calculating to obtain a calibration volume VC；
Step B-determining the proportionality constant C of the analog sensor AC：
B1, controlling the opening and closing of the liquid inlet valve by the control system, and injecting chemical liquid into the metering tank to ensure that the chemical liquid simultaneously passes through the analog sensors A and B;
b2, the control system reads the ADC data output values of the analog sensor A and the analog sensor BAre respectively denoted as QAAnd QB；
B3 according to proportionality constant CC＝VC/[(QA-QAZ)-(QB-QBZ)]And calculating to obtain a proportionality constant C of the analog sensor ACThe value of (c).
2. A calibration method applied to a drainage system according to claim 1, wherein: step A also includes step A0, ensuring that the measuring tank is empty, and the control system respectively reads the ADC data output values of the analog sensor A and the analog sensor B, namely the zero offset values of the analog sensor A and the analog sensor B are respectively marked as QAZAnd QBZ。
3. A calibration method applied to a drainage system according to any one of claims 1 to 2, wherein: the control system reads the ADC data output value of the analog sensor accurately, namely, the control system starts to read after the metering tank is kept still for a moment.
4. A calibration method applied to a drainage system according to claim 3, wherein: when the control system accurately reads the ADC data output value of the analog sensor, the metering tank can be read for many times after standing for a moment, and data processing is carried out on a plurality of reading results to obtain a more accurate numerical value.
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