CN110076646A - A kind of quartz wafer grinding frequency measuring device - Google Patents
A kind of quartz wafer grinding frequency measuring device Download PDFInfo
- Publication number
- CN110076646A CN110076646A CN201910478361.XA CN201910478361A CN110076646A CN 110076646 A CN110076646 A CN 110076646A CN 201910478361 A CN201910478361 A CN 201910478361A CN 110076646 A CN110076646 A CN 110076646A
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- China
- Prior art keywords
- controller
- quartz wafer
- type support
- measuring device
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
Abstract
The invention discloses a kind of quartz wafers to grind frequency measuring device, including bottom plate, fixed station, abrasive sheet and mounting box, the left upper end of bottom plate is equipped with L-type support, motor is installed among the transverse bottom of L-type support, the vertical side lower end to the left of L-type support is equipped with mounting box, the inside of mounting box is equipped with the first controller, second controller, third controller and battery, the bottom end of motor is connected with ball-screw, the bottom of ball-screw is equipped with abrasive sheet, and the upper end bilateral symmetry of abrasive sheet is inlaid with frequency probe.The present invention passes through setting aspiration pump, abrasive sheet, frequency probe, ball-screw, motor, funnel, articles holding table, connecting tube, tee tube, tracheae ontology, the first controller, second controller and third controller architecture, it is bad and current in the presence of fixation to quartz wafer to solve existing quartz wafer grinding frequency measuring device, by manually grinding to quartz wafer, lead to the problem that working efficiency is low and final product quality is bad.
Description
Technical field
The present invention relates to grinding frequency measuring device technical field, specially a kind of quartz wafer grinds frequency measuring device.
Background technique
Quartz plate is usually ground by quartzy melting and cutting, and dioxide-containing silica is up to 99.99% or more.Hardness
It is seven grades of Mohs, has the characteristics that low high temperature resistant, thermal expansion coefficient, resistance to heat shocks and electrical insulation capability are good.It is usually colourless
Transparent class, it is seen that 85% or more light transmission rate.Quartz plate is formed as the very high caused result of its melt high-temperature viscosity.With
In production semiconductor, electric light source device, half conducting T unit, laser, optical instrument, Laboratory Instruments, electrical devices, medical treatment are set
Standby and corrosion-and high-temp-resistant chemical apparatuses, chemical industry, electronics, metallurgy, building materials and national defence etc. are industrial, and application is very extensive,
It needs to carry out grinding frequency measurement to quartz wafer before using quartz wafer.
But existing technology has the following deficiencies:
1. existing quartz wafer grinding frequency measuring device has that fixation is bad to quartz wafer.
2. currently, leading to the problem that working efficiency is low and final product quality is bad by manually grinding to quartz wafer.
Summary of the invention
(1) the technical issues of solving
In view of the deficiencies of the prior art, the present invention provides a kind of quartz wafers to grind frequency measuring device, solves existing quartz
Wafer grinding frequency measuring device is bad with currently, by manually grinding to quartz wafer in the presence of fixing to quartz wafer, causes
The problem that working efficiency is low and final product quality is bad.
(2) technical solution
To achieve the above object, the invention provides the following technical scheme: a kind of quartz wafer grind frequency measuring device, including bottom plate,
Fixed station, abrasive sheet and mounting box, the left upper end of the bottom plate are equipped with L-type support, among the transverse bottom of the L-type support
Motor is installed, the vertical side lower end to the left of the L-type support is equipped with mounting box, and the inside of the mounting box is equipped with first
Controller, second controller, third controller and battery, the bottom end of the motor are connected with ball-screw, the ball wire
The bottom of thick stick is equipped with abrasive sheet, and the upper end bilateral symmetry of the abrasive sheet is inlaid with frequency probe, the upper right side of the bottom plate
Fixed station is installed, the upper end of the fixed station is symmetrically set with articles holding table, and the inside bilateral symmetry of fixed station is inlaid with
Funnel, the upper end of the bottom plate are equipped with aspiration pump, and the upper end of the aspiration pump is connected with tracheae ontology, the tracheae ontology
Upper end is connected with tee tube, and the left and right ends of the tee tube are symmetrically connected with connecting tube, and the connecting tube is far from tee tube
One end is connected to the bottom end of funnel, and first controller is connected by conducting wire with motor, and the second controller passes through conducting wire
It is connected with aspiration pump, the third controller passes through conducting wire and frequency probe connection.
Preferably, the bottom of the L-type support is provided with fixing seat, and the fixing seat is mounted on bottom plate, the L-type branch
Frame is mounted on the left upper end of bottom plate by fixing seat.
Preferably, organic block is installed in the upper end of the motor, and the base is mounted on the transverse bottom of L-type support, described
Motor is mounted among the transverse bottom of L-type support by base.
Preferably, the right side of the mounting box is provided with mounting base, and the mounting base is mounted on the vertical inclined of L-type support
Left side lower end, the mounting box are mounted on the vertical side lower end to the left of L-type support, the bottom righthand side of the mounting box by mounting base
Offer wiring hole.
Preferably, the bottom of the motor is connected with shaft coupling, and the bottom end of the shaft coupling is connected to the upper of ball-screw
End, the motor are connected by shaft coupling with ball-screw.
Preferably, installation fitting is provided among the bottom of the ball-screw, the bottom end of the installation fitting is connected to
Among the upper end of abrasive sheet, the ball-screw is connected by installation fitting with abrasive sheet.
Preferably, the centre of the articles holding table offers through-hole, the position of the upper end opening of the position and funnel of the through-hole
Set the equal in magnitude of the upper end opening of corresponding and through-hole size and funnel, the left end of the tee tube, right end and lower end are equal
It is provided with connector sleeve, the bottom of the funnel is provided with connector sleeve, and the lower end of the tee tube passes through the gentle tube body of connector sleeve
Upper end connection, the left end of the tee tube connected by connector sleeve with one end of connecting tube, and the right end of the tee tube passes through
Connector sleeve is connected with one end of connecting tube, and the other end of the connecting tube is connected by connector sleeve with the bottom end of funnel.
Preferably, the bottom of the aspiration pump is provided with pump seat, and the pump seat is mounted on bottom plate, and the aspiration pump passes through
Pump seat is mounted on bottom plate, and the aspiration pump is located at the underface middle position of fixed station, bottom of the fixed station or so pair
Title is equipped with drum seat.
(3) beneficial effect
The present invention provides a kind of quartz wafer grind frequency measuring device, have it is following the utility model has the advantages that
(1) of the invention, pass through the aspiration pump of setting, funnel, articles holding table, connecting tube, tee tube, tracheae ontology and second controller
Quartz wafer is placed on the inside of articles holding table by structure, user, and then user opens aspiration pump by second controller, so
Make gas enter the inside of funnel by through-hole afterwards, then passes the gas through the inside that funnel enters connecting tube, then make gas
Body enters the inside of tracheae ontology by tee tube, then makes the inside of articles holding table form negative pressure and quartz wafer is sucked, solve
Existing quartz wafer grinding frequency measuring device of having determined has that fixation is bad to quartz wafer.
(2) of the invention, by the abrasive sheet of setting, frequency probe, ball-screw, motor, funnel, articles holding table, connecting tube,
Tee tube, tracheae ontology, the first controller, second controller and third controller architecture, user are beaten by third controller
Frequency probe is opened, then user opens motor by the first controller, then ball-screw is operated, then to grind
Plate moves down, and is then ground by the bottom of abrasive sheet to the quartz wafer being fixed on articles holding table, while passing through frequency
Rate probe carries out frequency measurement to the quartz wafer that is fixed on articles holding table, when frequency elicite when reaching default value,
User closes motor by the first controller, and then user is again turned on motor by operating the first controller, then makes
Ball-screw running is obtained, then abrasive sheet is moved up, until abrasive sheet is made to be moved upward to home position, is then made
User closes aspiration pump by second controller, then makes gas stop the inside for entering funnel by through-hole, then makes to stop
Then the inside for only entering connecting tube by funnel makes gas stop the inside for entering tracheae ontology by tee tube, then makes
The inside of articles holding table stops forming negative pressure and unclamps quartz wafer, then user removes quartz wafer from articles holding table
Come, solves currently, leading to the problem that working efficiency is low and final product quality is bad by manually grinding to quartz wafer.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structure enlargement diagram in the present invention in Fig. 1 at A；
Fig. 3 is the structure enlargement diagram in the present invention in Fig. 1 at B；
Fig. 4 is the structure enlargement diagram in the present invention in Fig. 1 at C.
Appended drawing reference in figure are as follows: 1, bottom plate；2, fixing seat；3, drum seat；4, pump seat；5, aspiration pump；6, fixed station；7, it grinds
Nog plate；8, frequency is popped one's head in；9, installation fitting；10, ball-screw；11, base；12, motor；13, shaft coupling；14, L-type support；
15, funnel；16, connector sleeve；17, through-hole；18, articles holding table；19, connecting tube；20, tee tube；21, tracheae ontology；22, the first control
Device processed；23, second controller；24, third controller；25, mounting box；26, wiring hole；27, battery；28, mounting base.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It please refers to shown in Fig. 1-4, a kind of embodiment provided by the invention: a kind of quartz wafer grinding frequency measuring device, including
Bottom plate 1, fixed station 6, abrasive sheet 7 and mounting box 25, the left upper end of bottom plate 1 are equipped with L-type support 14, the bottom of L-type support 14
It is provided with fixing seat 2, fixing seat 2 is mounted on bottom plate 1, and L-type support 14 is mounted on the left upper end of bottom plate 1, L by fixing seat 2
Motor 12 is installed, organic block 11 is installed in the upper end of motor 12, and base 11 is mounted on L-type branch among the transverse bottom of type bracket 14
The transverse bottom of frame 14, motor 12 are mounted among the transverse bottom of L-type support 14 by base 11, L-type support 14 it is vertical
Side lower end to the left is equipped with mounting box 25, and the right side of mounting box 25 is provided with mounting base 28, and mounting base 28 is mounted on L-type support
14 vertical side lower end to the left, mounting box 25 are mounted on the vertical side lower end to the left of L-type support 14, mounting box by mounting base 28
25 bottom righthand side offers wiring hole 26, and the inside of mounting box 25 is equipped with the first controller 22, second controller 23, third control
Device 24 and battery 27 processed, the bottom end of motor 12 are connected with ball-screw 10, and the bottom of motor 12 is connected with shaft coupling 13, shaft coupling
The bottom end of device 13 is connected to the upper end of ball-screw 10, and motor 12 is connected by shaft coupling 13 and ball-screw 10, ball-screw
Installation fitting 9 is provided among 10 bottom, the bottom end of installation fitting 9 is connected among the upper end of abrasive sheet 7, ball-screw 10
It is connected by installation fitting 9 and abrasive sheet 7, the bottom of ball-screw 10 is equipped with abrasive sheet 7, upper end of abrasive sheet 7 or so pair
Title is inlaid with frequency probe 8, and the upper right side of bottom plate 1 is equipped with fixed station 6, and the bottom of fixed station 6 has been left and right symmetrically arranged drum
Seat 3, the upper end of fixed station 6 is symmetrically set with articles holding table 18, and the centre of articles holding table 18 offers through-hole 17, the position of through-hole 17
The equal in magnitude of the upper end opening of corresponding with the position of the upper end opening of funnel 15 and through-hole 17 size and funnel 15 is set, Gu
The inside bilateral symmetry for determining platform 6 is inlaid with funnel 15, and the bottom of funnel 15 is provided with connector sleeve 16, and the upper end of bottom plate 1 is equipped with
Aspiration pump 5, the bottom of aspiration pump 5 are provided with pump seat 4, and pump seat 4 is mounted on bottom plate 1, and aspiration pump 5 is mounted on bottom by pump seat 4
On plate 1, aspiration pump 5 is located at the underface middle position of fixed station 6, and the upper end of aspiration pump 5 is connected with tracheae ontology 21, tracheae sheet
The upper end of body 21 is connected with tee tube 20, and left end, right end and the lower end of tee tube 20 are provided with connector sleeve 16, tee tube 20
Lower end is connected by the upper end of the gentle tube body 21 of connector sleeve 16, and the left and right ends of tee tube 20 are symmetrically connected with connecting tube 19,
Connecting tube 19 is connected to the bottom end of funnel 15 far from one end of tee tube 20, and the left end of tee tube 20 passes through connector sleeve 16 and connection
One end of pipe 19 connects, and the right end of tee tube 20 is connected by connector sleeve 16 with one end of connecting tube 19, connecting tube 19 it is another
End is connected by connector sleeve 16 with the bottom end of funnel 15, and the first controller 22 is connected by conducting wire and motor 12, second controller
23 are connected by conducting wire and aspiration pump 5, and third controller 24 passes through 8 connection of conducting wire and frequency probe, the model of the aspiration pump 5
KSC-14, the model 2P-14N of frequency probe 8, the model Y90S-2 of the motor 12, the model of first controller 22
For IW1699-03AC/DC, the model IW1699-03AC/DC of the second controller 23, the model of the third controller 24
IW1699-03AC/DC, the model L2-400 of the battery 27 are the known and disclosed prior art, in use, passing through
Fixing seat 2 is mounted on L-type support 14 on bottom plate 1, by drum seat 3 fixed station 6 is mounted on bottom plate 1, passes through pump
Seat 4 is mounted on aspiration pump 5 on bottom plate 1, by installation fitting 9 ball-screw 10 and abrasive sheet 7 is connected, passes through base
11 are mounted on motor 12 in L-type support 14, by shaft coupling 13 motor 12 and ball-screw 10 are connected.
Working principle: in use, bottom plate 1 is fixed on designated position by user, then user will by power supply line
Wiring hole 26 is connected with external power supply, and then quartz wafer is placed on the inside of articles holding table 18 by user, and then user is logical
It crosses second controller 23 and opens aspiration pump 5, gas is then made to enter the inside of funnel 15 by through-hole 17, then make gas logical
The inside that funnel 15 enters connecting tube 19 is crossed, the inside that tee tube 20 enters tracheae ontology 21 is then passed the gas through, then makes
The inside for obtaining articles holding table 18 forms negative pressure and quartz wafer is sucked, and then user opens frequency probe by third controller 24
8, then user opens motor 12 by the first controller 22, operates ball-screw 10, then makes abrasive sheet 7
It moves down, then the quartz wafer being fixed on articles holding table 18 is ground by the bottom of abrasive sheet 7, while passing through frequency
The quartz wafer that 8 pairs of rate probe is fixed on articles holding table 18 carries out frequency measurement, when what frequency probe 8 elicited reaches default value
When, user closes motor 12 by the first controller 22, and then user is again turned on electricity by operating the first controller 22
Machine 12 operates ball-screw 10, moves up abrasive sheet 7, until being moved upward to abrasive sheet 7
Home position, then user closes aspiration pump 5 by second controller 23, and gas is then made to stop entering by through-hole 17
Then the inside of funnel 15 makes the inside for stopping entering connecting tube 19 by funnel 15, gas stopping then being made to pass through tee tube
20 enter the inside of tracheae ontologies 21, then make the inside of articles holding table 18 stop forming negative pressure and unclamp quartz wafer, then
User takes off quartz wafer from articles holding table 18.
It can to sum up obtain, the present invention passes through setting aspiration pump 5, abrasive sheet 7, frequency probe 8, ball-screw 10, motor 12, leakage
Bucket 15, articles holding table 18, connecting tube 19, tee tube 20, tracheae ontology 21, the first controller 22, second controller 23 and third control
Device 24 processed solve existing quartz wafer grinding frequency measuring device exist to quartz wafer it is fixed bad and currently, by artificial right
Quartz wafer is ground, and the problem that working efficiency is low and final product quality is bad is caused.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (8)
1. a kind of quartz wafer grinds frequency measuring device, including bottom plate (1), fixed station (6), abrasive sheet (7) and mounting box (25),
Be characterized in that: the left upper end of the bottom plate (1) is equipped with L-type support (14), peace among the transverse bottom of the L-type support (14)
Equipped with motor (12), the vertical side lower end to the left of the L-type support (14) is equipped with mounting box (25), the mounting box (25)
Inside is equipped with the first controller (22), second controller (23), third controller (24) and battery (27), the motor
(12) bottom end is connected with ball-screw (10), and the bottom of the ball-screw (10) is equipped with abrasive sheet (7), the abrasive sheet
(7) upper end bilateral symmetry is inlaid with frequency probe (8), and the upper right side of the bottom plate (1) is equipped with fixed station (6), described solid
The upper end for determining platform (6) is symmetrically set with articles holding table (18), and the inside bilateral symmetry of fixed station (6) is inlaid with funnel (15),
The upper end of the bottom plate (1) is equipped with aspiration pump (5), and the upper end of the aspiration pump (5) is connected with tracheae ontology (21), the gas
The upper end of tube body (21) is connected with tee tube (20), and the left and right ends of the tee tube (20) are symmetrically connected with connecting tube
(19), the connecting tube (19) is connected to the bottom end of funnel (15), first controller far from the one end of tee tube (20)
(22) it is connected by conducting wire and motor (12), the second controller (23) is connected by conducting wire and aspiration pump (5), the third
Controller (24) passes through conducting wire and frequency probe (8) connection.
2. a kind of quartz wafer according to claim 1 grinds frequency measuring device, it is characterised in that: the L-type support (14)
Bottom be provided with fixing seat (2), the fixing seat (2) is mounted on bottom plate (1), and the L-type support (14) passes through fixing seat
(2) it is mounted on the left upper end of bottom plate (1).
3. a kind of quartz wafer according to claim 1 grinds frequency measuring device, it is characterised in that: the motor (12) it is upper
End installation organic block (11), the base (11) are mounted on the transverse bottom of L-type support (14), and the motor (12) passes through base
(11) it is mounted among the transverse bottom of L-type support (14).
4. a kind of quartz wafer according to claim 1 grinds frequency measuring device, it is characterised in that: the mounting box (25)
Right side is provided with mounting base (28), and the mounting base (28) is mounted on the vertical side lower end to the left of L-type support (14), the peace
Mounted box (25) is mounted on the vertical side lower end to the left of L-type support (14), the bottom right of the mounting box (25) by mounting base (28)
End offers wiring hole (26).
5. a kind of quartz wafer according to claim 3 grinds frequency measuring device, it is characterised in that: the bottom of the motor (12)
Portion is connected with shaft coupling (13), and the bottom end of the shaft coupling (13) is connected to the upper end of ball-screw (10), the motor (12)
It is connected by shaft coupling (13) and ball-screw (10).
6. a kind of quartz wafer according to claim 5 grinds frequency measuring device, it is characterised in that: the ball-screw (10)
Bottom among be provided with installation fitting (9), the bottom end of the installation fitting (9) is connected among the upper end of abrasive sheet (7), institute
Ball-screw (10) are stated to connect by installation fitting (9) and abrasive sheet (7).
7. a kind of quartz wafer according to claim 1 grinds frequency measuring device, it is characterised in that: the articles holding table (18)
Centre offers through-hole (17), and the position of the upper end opening of the position and funnel (15) of the through-hole (17) is corresponding and through-hole
(17) upper end opening of size and funnel (15) it is equal in magnitude, left end, right end and the lower end of the tee tube (20) are all provided with
It is equipped with connector sleeve (16), the bottom of the funnel (15) is provided with connector sleeve (16), and the lower end of the tee tube (20) passes through company
The upper end of female connector (16) gentle tube body (21) connects, and the left end of the tee tube (20) passes through connector sleeve (16) and connecting tube
(19) one end connection, the right end of the tee tube (20) is connected by connector sleeve (16) with one end of connecting tube (19), described
The other end of connecting tube (19) is connected by connector sleeve (16) with the bottom end of funnel (15).
8. a kind of quartz wafer according to claim 1 grinds frequency measuring device, it is characterised in that: the aspiration pump (5)
Bottom is provided with pump seat (4), and the pump seat (4) is mounted on bottom plate (1), and the aspiration pump (5) is mounted on bottom by pump seat (4)
On plate (1), the aspiration pump (5) is located at the underface middle position of fixed station (6), bottom of the fixed station (6) or so pair
Title is equipped with drum seat (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910478361.XA CN110076646A (en) | 2019-06-04 | 2019-06-04 | A kind of quartz wafer grinding frequency measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910478361.XA CN110076646A (en) | 2019-06-04 | 2019-06-04 | A kind of quartz wafer grinding frequency measuring device |
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| Publication Number | Publication Date |
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| CN110076646A true CN110076646A (en) | 2019-08-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910478361.XA Pending CN110076646A (en) | 2019-06-04 | 2019-06-04 | A kind of quartz wafer grinding frequency measuring device |
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| CN111002214A (en) * | 2019-12-25 | 2020-04-14 | 唐山万士和电子有限公司 | Piezoelectric quartz wafer convex surface grinding frequency real-time monitoring device |
| CN113714927A (en) * | 2021-08-27 | 2021-11-30 | 苏州斯尔特微电子有限公司 | Wafer grinding mechanical grinding process |
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| US20060121840A1 (en) * | 2004-12-03 | 2006-06-08 | Jong-Su Kim | Grinding assembly of semiconductor wafer back-grinding apparatus and method of fastening a grinding plate to a grinding mount of the same |
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