CN110070971A - Laser resistor trimming system - Google Patents
Laser resistor trimming system Download PDFInfo
- Publication number
- CN110070971A CN110070971A CN201910393097.XA CN201910393097A CN110070971A CN 110070971 A CN110070971 A CN 110070971A CN 201910393097 A CN201910393097 A CN 201910393097A CN 110070971 A CN110070971 A CN 110070971A
- Authority
- CN
- China
- Prior art keywords
- resistance
- circuit
- laser
- control
- electrically connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Laser Beam Processing (AREA)
Abstract
This application involves a kind of laser resistor trimming systems.Laser resistor trimming system includes resistance attachment device, channel switching device, measuring equipment, master control set and resistance trimming device.Resistance attachment device is electrically connected with resistance to be adjusted when in use.Channel switching device is electrically connected with resistance attachment device.Measuring equipment includes comparison circuit and measurement circuit, measurement circuit is electrically connected with channel switching device, measurement circuit provides measured current through channel switching device for resistance to be adjusted, and the voltage value of resistance to be adjusted is measured through channel switching device and resistance attachment device, comparison circuit is electrically connected with measurement circuit, and comparison circuit is for judging whether the voltage of resistance to be adjusted reaches preset value.Master control set is electrically connected with measurement circuit and channel switching device respectively.Resistance trimming device is electrically connected with master control set and measurement circuit respectively.Laser resistor trimming system can be in the quick response after adjusting resistance to reach preset value, and the continuous resistance trimming to different resistance to be adjusted may be implemented.
Description
Technical field
This application involves laser resistor trimming technical fields, more particularly to a kind of laser resistor trimming system.
Background technique
Laser resistor trimming system, which carries out resistance trimming to plate resistor, is beaten on plate resistor using a branch of superfine laser beam, is led to
It crosses and gasification realization cutting is carried out to the resistance body of plate resistor.With the progress of laser cutting process, while passing through measurement system reality
When measure and monitor the variation of plate resistor resistance value, after the actual resistance of plate resistor reaches target resistance value, laser beam is closed,
Realize laser resistor trimming process.
However, the laser resistor trimming system in traditional scheme, which not can guarantee plate resistor, has foot when resistance value reaches target value
Enough speeds of response.And the lower speed of response of laser resistor trimming system not can guarantee the cut mark effect and resistance essence of resistance trimming process
Degree.
Summary of the invention
Based on this, it is necessary to be rung in plate resistor when resistance value reaches target value for laser resistor trimming system in the related technology
The problem that rate is lower is answered, a kind of laser resistor trimming system is provided.
A kind of laser resistor trimming system, comprising:
Resistance attachment device is electrically connected with resistance to be adjusted when in use；
Channel switching device is electrically connected with the resistance attachment device, for channel where controlling the resistance to be adjusted
Opening and closing；
Measuring equipment, including comparison circuit, measurement circuit and power circuit, the measurement circuit and power circuit respectively with
The channel switching device electrical connection, the power circuit provide measurement electricity through the channel switching device for the resistance to be adjusted
Stream, the measurement circuit measure the voltage value of the resistance to be adjusted through the channel switching device and the resistance attachment device,
The comparison circuit is electrically connected with the measurement circuit, and the comparison circuit is used to judge whether the voltage of the resistance to be adjusted to reach
To preset value；
Master control set is electrically connected with the power circuit and the channel switching device respectively, for controlling the power supply
Circuit output measures electric current, and controls the channel conversion of the channel switching device；And
Resistance trimming device is electrically connected with the master control set and the measurement circuit respectively, for receiving the master control set
With the control instruction of the measurement circuit, and the laser to the resistance to be adjusted is started or stopped according to the control instruction that receives
Cutting.
The resistance trimming device includes: in one of the embodiments,
Resistance trimming control circuit is electrically connected with the master control set and the measurement circuit respectively, for receiving the master control
The control instruction of device and the measuring equipment；And
Resistance trimming equipment is electrically connected with the resistance trimming control circuit, for receiving the control instruction of the resistance trimming control circuit,
And laser cutting to the resistance to be adjusted is started or stopped according to the control instruction that receives.
The resistance trimming equipment includes: in one of the embodiments,
Laser is electrically connected, for exporting laser with the resistance trimming control circuit；And
Galvanometer is electrically connected with the resistance trimming control circuit, is adjusted for the transmission optical path to output laser.
The resistance trimming control circuit includes: in one of the embodiments,
Laser control circuit is electrically connected with the master control set, the measurement circuit and the laser respectively, is used for
The control instruction of the master control set and the measuring equipment is received, and controls the start and stop of the laser according to control instruction；
And
Galvanometer control circuit is electrically connected, for receiving respectively with the master control set, the measurement circuit and the galvanometer
The control instruction of the master control set and the measuring equipment, and control according to control instruction the movement and start and stop of the galvanometer.
The galvanometer includes: in one of the embodiments,
Coated optics eyeglass, for adjusting the transmission optical path of laser；
Servo motor, the coated optics eyeglass are set to the servo motor, and the servo motor is described for driving
Coated optics eyeglass is moved；And
Vibrating mirror driver is electrically connected, for receiving the vibration respectively with the galvanometer control circuit and the servo motor
The control command of mirror control circuit simultaneously drives the servo motor.
The resistance trimming equipment in one of the embodiments, further include:
Field lens is focused, is set to from the optical path of galvanometer output laser, for laser to be focused on the electricity to be adjusted
Resistance.
The resistance attachment device includes probe card in one of the embodiments, is electrically connected with the channel switching device
It connects, and is electrically connected when in use with the resistance to be adjusted.
The probe card includes the first probe and the second probe in one of the embodiments, be respectively arranged at it is described to
The both ends of resistance are adjusted, and are separately connected two conducting wires, first probe and second probe are for inputting measured current simultaneously
Access is provided to measure the voltage value of the resistance to be adjusted.
The channel switching device includes: in one of the embodiments,
Conversion control circuit is electrically connected with the master control set, for receiving the control instruction of the master control set；And
Relay board is electrically connected, for receiving respectively with the conversion control circuit and the resistance attachment device
The control instruction of conversion control circuit is stated, and provides access for the transmission of the signal of the resistance attachment device.
The relay board includes: in one of the embodiments,
Control relay circuit is electrically connected with the conversion control circuit, for receiving and executing the conversion and control electricity
The control instruction on road；And
Multiple relays are electrically connected with the control relay circuit and the resistance attachment device respectively, and for connecing
It receives the control instruction of the control relay circuit and is attracted or is disconnected according to control instruction.
In above-mentioned laser resistor trimming system.The channel switching device may be implemented to the resistance to be adjusted described in different it
Between switch, to realize the continuous resistance trimming to resistance to be adjusted described in different.It is defeated that the master control set controls the measuring equipment
Measured current out, and control the channel conversion of the channel switching device.Comparison circuit and amount are provided in the measuring equipment
Slowdown monitoring circuit.The comparison circuit can carry out quick response described when adjusting resistance to reach preset value.The measurement electricity
Road can export measured current and monitor the voltage of the resistance to be adjusted.Meanwhile it being filled by the measurement circuit and the resistance trimming
It sets and is electrically connected, can be described when adjusting resistance to reach preset value in comparison circuit judgement, pass through the measurement
Resistance trimming device described in circuit control carries out start and stop, to realize that the laser resistor trimming system reaches pre- in the resistance to be adjusted
If the quick response after value.
Detailed description of the invention
Fig. 1 is a kind of laser resistor trimming system connection relationship diagram provided by the embodiments of the present application；
Fig. 2 is another laser resistor trimming system connection relationship diagram provided by the embodiments of the present application；
Fig. 3 is that a kind of laser provided by the embodiments of the present application influences schematic diagram to cut mark；
Fig. 4 is that a kind of laser resistor trimming system provided by the embodiments of the present application using laser cutting changes resistance to be adjusted
Schematic illustration；
Fig. 5 is a kind of laser resistor trimming system Cutting Length provided by the embodiments of the present application and resistance relation schematic diagram；
Fig. 6 is one kind provided by the embodiments of the present application resistance the schematic diagram of the section structure to be adjusted；
Fig. 7 is a kind of laser resistor trimming system probe card structure schematic diagram provided by the embodiments of the present application.
Drawing reference numeral explanation
100 laser resistor trimming systems
10 resistance attachment devices
110 probe cards
111 first probes
112 second probes
20 channel switching devices
210 conversion control circuits
220 relay boards
221 control relay circuits
222 relays
30 measuring equipments
310 comparison circuits
320 measurement circuits
330 power circuits
40 master control sets
50 resistance trimming devices
510 resistance trimming control circuits
511 laser control circuits
512 galvanometer control circuits
520 resistance trimming equipment
521 lasers
522 galvanometers
523 coated optics eyeglasses
524 servo motors
525 vibrating mirror drivers
526 focus field lens
200 resistance to be adjusted
Specific embodiment
In order to make the above objects, features, and advantages of the present application more apparent, with reference to the accompanying drawing to the application
Specific embodiment be described in detail.Many details are explained in the following description in order to fully understand this Shen
Please.But the application can be implemented with being much different from other way described herein, those skilled in the art can be not
Similar improvement is done in the case where violating the application intension, therefore the application is not limited by following public specific implementation.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.
Unless otherwise defined, all technical and scientific terms used herein and the technical field for belonging to the application
The normally understood meaning of technical staff is identical.The term used in the description of the present application is intended merely to description tool herein
The purpose of the embodiment of body, it is not intended that in limitation the application.Term " and or " used herein includes one or more phases
Any and all combinations of the listed item of pass.
Referring to Figure 1, the application provides a kind of laser resistor trimming system 100.The laser resistor trimming system 100 connects including resistance
Connection device 10, channel switching device 20, measuring equipment 30, master control set 40 and resistance trimming device 50.
The resistance attachment device 10 is electrically connected with resistance 200 to be adjusted when in use.It is appreciated that the resistance connection dress
10 are set can while to be stably connected with multiple resistance 200 to be adjusted.Meanwhile the resistance attachment device 10 can be connection
The resistance to be adjusted 200 provides electric current input and voltage measurement channel.The setting of the resistance attachment device 10 can guarantee institute
State being stably connected with for laser resistor trimming system 100 and the resistance 200 to be adjusted, at the same can for the laser resistor trimming system 100 into
The multiple resistance 200 to be adjusted of row continuously repair resistance and provide guarantee.
The channel switching device 20 is electrically connected with the resistance attachment device 10.The channel switching device 20 is used for
Control the opening and closing in the 200 place channel of resistance to be adjusted.It is appreciated that the channel switching device 20 can be by relay group
At, by control relay disconnection and actuation can switch measure channel.The setting of the channel switching device 20 can be protected
It demonstrate,proves the laser resistor trimming system 100 and resistance is continuously repaired to multiple resistance 200 to be adjusted.
The measuring equipment 30 includes comparison circuit 310, measurement circuit 320 and power circuit 330.The measurement circuit
320 and the power circuit 330 be electrically connected respectively with the channel switching device 20.In one embodiment, the measurement electricity
Road 320 is attached with the 20 throughput survey line cable of channel switching device.The power circuit 330 is through the channel converting means
It sets 20 and provides measured current for the resistance 200 to be adjusted, the measurement circuit 320 is through the channel switching device 20 and the electricity
Resistance attachment device 10 measures the voltage value of the resistance 200 to be adjusted.The comparison circuit 310 is electrically connected with the measurement circuit 320
It connects.The comparison circuit 310 is used to judge whether the voltage of the resistance 200 to be adjusted to reach preset value.It is appreciated that the ratio
It may include comparator compared with circuit 310.The resistance to be adjusted can be judged by hardware by the way that the comparison circuit 310 is arranged
Whether 200 resistance value reaches preset value, so that the operating lag due to the laser resistor trimming system 100 be avoided to cause resistance trimming smart
Degree is insufficient.The measurement circuit 320 can export default measured current, measured current under the control of the master control set 40
Successively the resistance 200 to be adjusted is inputted through the channel switching device 20 and the resistance attachment device 10.The measurement circuit
The voltage value and predetermined amount measured can be passed through after 320 output measured currents with the voltage value of resistance to be adjusted 200 described in real-time measurement
The current value for surveying electric current can calculate 200 resistance value of resistance to be adjusted, and then in the 100 resistance trimming process of laser resistor trimming system
In the resistance value of the resistance 200 to be adjusted is monitored in real time.
The master control set 40 is electrically connected with the power circuit 330 and the channel switching device 20 respectively.The master
Control device 40 exports measured current for controlling the power circuit 330, and the channel for controlling the channel switching device 20 turns
It changes.It is appreciated that the master control set 40 can control the measurement circuit 320 and the channel switching device 20 executes phase
The movement answered.The master control set 40 can receive the control instruction of host computer simultaneously.The control instruction may include described
Which resistance the location information of resistance 200 to be adjusted, i.e., will cut, and start or stop the command information of cutting.By setting
Setting the master control set 40 may be implemented the communication of the laser resistor trimming system 100 and host computer.In one embodiment, described
Master control set 40 may include communication module, may be implemented by the communication module to the remote of the laser resistor trimming system 100
Process control and real time monitoring to cutting process.
The resistance trimming device 50 is electrically connected with the master control set 40 and the measurement circuit 320 respectively.The resistance trimming dress
50 are set for receiving the control instruction of the master control set 40 and the measurement circuit 320, and according to the control instruction received
Start or stop the laser cutting to the resistance 200 to be adjusted.It is appreciated that the resistance trimming device 50 is execution unit.It is described
Resistance trimming device 50 can export laser, and the transmission optical path according to the location information of the resistance 200 to be adjusted adjustment laser, thus
It completes to cut the specified resistance 200 to be adjusted.In one embodiment, the laser resistor trimming system 100 can will in
The each control module in portion is integrated on one or more control panel, thus reduce the volume of the laser resistor trimming system 100, and
Improve integrated level.
It is appreciated that 100 working principle of laser resistor trimming system is as follows: the master control set 40 send comprising it is described to
Adjust the control instruction of 200 location information of resistance to the channel switching device 20.The channel switching device 20 control it is described to
It opens in channel where adjusting resistance 200.It is defeated to the resistance 200 to be adjusted that the master control set 40 controls the measurement circuit 320
Preset measured current out.The master control set 40 controls the resistance trimming device 50 and cuts to the resistance 200 to be adjusted.It opens
Begin after cutting, the measurement circuit 320 monitors the voltage value of the resistance 200 to be adjusted in real time and is transferred to the comparison circuit
310, the comparison circuit 310 compares the size of real-time voltage value and preset voltage value.
(resistance value of the i.e. described resistance 200 to be adjusted does not reach when adjusting the voltage of resistance 200 to be not up to preset voltage value when described
To preset resistive value), the comparison circuit 310 in the measuring equipment 30 can export a constant level.At this point, the master
Control device 40, which can continue to control the resistance trimming device 50, persistently to be exported laser and controls transmission optical path.The measurement circuit 320
Can be with permanent output survey electric current to the resistance 200 to be adjusted, and measure the real-time voltage of the resistance 200 to be adjusted.It can manage
Solution, (resistance value of the i.e. described resistance 200 to be adjusted reaches pre- when adjusting the virtual voltage of resistance 200 to reach preset voltage value when described
Handicapping value), the output level of the comparison circuit 310 can be flipped.
After the output level of the comparison circuit 310 inverts, the comparison circuit 310 is through the measurement circuit
320 send a signal to the master control set 40.Then, the master control set 40 controls the stopping of resistance trimming device 50 resistance trimming.?
In one embodiment, the resistance trimming device 50 includes laser and galvanometer, i.e. stopping resistance trimming process includes closing laser and controlling
Damping mirror stop motion.The measurement circuit 320 stops output measured current simultaneously.The measurement circuit 320 stops output quantity
After surveying electric current, the channel switching device 20 closes current channel, i.e. the cutting process of resistance 200 to be adjusted described in one is completed.
Measurement system in the related technology, when described wait adjust the resistance value of resistance 200 to be generally difficult to guarantee when reaching preset value
It is with enough speeds of response, to not can guarantee good cut mark effect and resistance precision.The laser that the application proposes
The channel switching device 20 of resistance trimming system 100 may be implemented to switch between the resistance 200 to be adjusted described in the difference, from
And resistance 200 to be adjusted continuous resistance trimming can be carried out described in difference.The master control set 40 controls the measuring equipment 30 and exports
Measured current, and control the channel conversion of the channel switching device 20, i.e., different channels open or close.The measurement dress
It sets and is provided with the comparison circuit 310 and the measurement circuit 320 in 30.The comparison circuit 310 can be in the electricity to be adjusted
Hinder instant response when 200 resistance values reach preset value.The measurement circuit 320 can export measured current and monitor described wait adjust
The voltage of resistance 200.Meanwhile being electrically connected by the measurement circuit 320 and the resistance trimming device 50, it can be in the ratio
Judge compared with circuit 310 described when adjusting 200 resistance value of resistance to reach preset value, is directly controlled by the measurement circuit 320 described
Resistance trimming device 50 is out of service, to realize that the laser resistor trimming system 100 reaches preset value in 200 resistance value of resistance to be adjusted
Quick response afterwards.It is appreciated that the laser resistor trimming system 100 integrates laser controlling, galvanometer control and measurement control,
Intelligent, efficient and accuracy it can manufacture Chip-R.
Please also refer to Fig. 2, in one embodiment, the resistance trimming device 50 includes resistance trimming control circuit 510 and resistance trimming
Equipment 520.The resistance trimming control circuit 510 is electrically connected with the master control set 40 and the measurement circuit 320 respectively.The tune
Resistance control circuit 510 is used to receive the control instruction of the master control set 40 and the measuring equipment 30.The resistance trimming equipment 520
It is electrically connected with the resistance trimming control circuit 510.The resistance trimming equipment 520 is used to receive the control of the resistance trimming control circuit 510
It instructs, and starts or stops the laser cutting to the resistance 200 to be adjusted according to the control instruction received.It is appreciated that institute
Signal can be controlled to the resistance trimming of the resistance trimming equipment 520 according to the master control set 40 transmission by stating resistance trimming control circuit 510
Process is controlled.The operational efficiency of the laser resistor trimming system 100 can be improved in the setting of the resistance trimming control circuit 510.
In one embodiment, it can not also include the resistance trimming control circuit 510, directly be realized by the master control set 40 to institute
State the control of resistance trimming equipment 520.
In one embodiment, the resistance trimming equipment 520 includes laser 521 and galvanometer 522.The laser 521 with
The resistance trimming control circuit 510 is electrically connected, for exporting laser.The galvanometer 522 is electrically connected with the resistance trimming control circuit 510
It connects.The galvanometer 522 is used to be adjusted the transmission optical path of output laser.It is appreciated that the laser 521 can export
Pulse laser.Pass through the shifting of laser pulse spot during cutting to the resistance 200 to be adjusted please also refer to Fig. 3
It is dynamic, it gradually stacks forward, to form continuous notch together.Wherein, size after kerf width can be focused by hot spot with
And the power level of laser determines.Meanwhile the quality of notch can by modification the parameters such as spot densities and cutting speed come into
Row adjustment.The optical path of adjustable 521 outgoing laser beam of the laser transmission of galvanometer 522.Laser beam passes through the vibration
The eyeglass of mirror 522 rotates and changes optical path, finally forms laser cutting kerf on the resistance 200 to be adjusted.It is described sharp by being arranged
The accurate cutting to the resistance 200 to be adjusted may be implemented in light device 521 and the galvanometer 522, to further increase described sharp
The resistance trimming precision of light resistance trimming system 100.
In one embodiment, the resistance trimming control circuit 510 includes laser control circuit 511 and galvanometer control circuit
512.The laser control circuit 511 respectively with the master control set 40, the measurement circuit 320 and the laser 521
Electrical connection.The laser control circuit 511 is used to receive the control instruction of the master control set 40 and the measuring equipment 30,
And the start and stop of the laser 521 are controlled according to control instruction.The galvanometer control circuit 512 respectively with the master control set
40, the measurement circuit 320 and the galvanometer 522 are electrically connected.The galvanometer control circuit 512 is for receiving the master control set
40 and the measuring equipment 30 control instruction, and control according to control instruction the movement and start and stop of the galvanometer 522.It can manage
Solution, the laser control circuit 511 and the galvanometer control circuit 512 can be respectively to the laser 521 and the vibrations
Mirror 522 is controlled.The setting of the laser control circuit 511 and the galvanometer control circuit 512 can control two
Process separates, so as to further increase the control precision and operational efficiency of the laser resistor trimming system 100.Implement at one
It, can be by the laser control circuit 511 and the vibration in order to improve the integrated level of the laser resistor trimming system 100 in example
Mirror control circuit 512 is integrated on same circuit board.
In one embodiment, the galvanometer 522 includes coated optics eyeglass 523, servo motor 524 and vibrating mirror driver
525.The coated optics eyeglass 523 is used to adjust the transmission optical path of laser.The coated optics eyeglass 523 is set to described watch
Motor 524 is taken, the servo motor 524 is for driving the coated optics eyeglass 523 to be moved.The vibrating mirror driver
525 are electrically connected with the galvanometer control circuit 512 and the servo motor 524 respectively.The vibrating mirror driver 525 is for receiving
The control command of the galvanometer control circuit 512 simultaneously drives the servo motor 524.It is appreciated that the vibrating mirror driver 525
Driving signal is received, and the servo motor 524 with the coated optics eyeglass 523 is driven to be moved.In a reality
It applies in example, the servo motor 524 can be closed loop increment servo motor.The driving signal of the vibrating mirror driver 525 can be with
It is exported and is monitored by the galvanometer control circuit 512.Please also refer to Fig. 4, the galvanometer 522 drives laser scanning cutting
The substrate of the resistance to be adjusted 200 makes resistance slurry layer stimulated light heating and gasifying, forms the indentation of certain depth, to change
The conductive cross-sectional area and conductive lengths of 200 body of resistance to be adjusted, and then the resistance 200 to be adjusted that will be less than preset resistive value is adjusted
In the whole deviation range allowed to resistance value.Fig. 5-Fig. 6 is referred to, the calculation formula of resistance can be expressed as R=ρ (L/A).Its
In, ρ is impedance factor, and L is resistance length, and A is resistance cross section area, and the unit of R is ohm.As can be seen from the above formula that
Laser resistor trimming changes the resistance value of the resistance 200 to be adjusted by changing current channel.It is appreciated that laser at least needs to cut
To resistance substrate.In addition, Cutting Length is longer, resistance is bigger.
It is appreciated that the relationship between resistance and temperature are as follows: R=R0*(1+at).Wherein, R0Metallic conductor when being 0 DEG C
Resistance, a are the temperature-coefficient of electrical resistance of the metallic conductor (the temperature-coefficient of electrical resistance a of different metal conductor is different).From public affairs above
For formula it is found that temperature suffered by resistance is higher, change in resistance amount is bigger.Therefore it in the case where laser scored same clean, adjusts
The temperature that the resistance 200 to be adjusted is acted on during resistance is lower, and stability is higher.
In one embodiment, the resistance trimming equipment 520 further includes focusing field lens 526.The focusing field lens 526 is arranged
In in the optical path from the galvanometer 522 output laser.The focusing field lens 526 is used to focusing on laser into the resistance to be adjusted
200.It is appreciated that the size after being focused due to hot spot influences kerf width.It therefore, can by the way that the focusing field lens 526 is arranged
To further increase the accuracy of the 100 resistance trimming process of laser resistor trimming system.
Please also refer to Fig. 7, in one embodiment, the resistance attachment device 10 includes probe card 110, is led to described
Road conversion equipment 20 is electrically connected, and is electrically connected when in use with the resistance 200 to be adjusted.In one embodiment, the probe
Card 110 includes the first probe 111 and the second probe 112, is respectively arranged at the both ends of the resistance 200 to be adjusted, and is separately connected
Two conducting wires, first probe 111 and second probe 112 are for inputting measured current and measuring the resistance to be adjusted
200 voltage value.Wherein, first probe 111 and 112 part of the second probe are triangle.Conducting wire HF, LF, HS and
LS is the line that first probe 111 or second probe 112 are drawn.In one embodiment, HF, LF are respectively constant current
The high potential and low potential of power supply.HS, LS are respectively the high potential and low potential of voltage measurement.The laser resistor trimming system 100
The resistance value of the resistance 200 to be adjusted, the i.e. electricity by measuring the resistance 200 to be adjusted are measured using the method for input constant current
The method of pressure carries out resistance value measurement.The probe card 110 can connect multiple resistance 200 to be adjusted simultaneously, so as to described
Laser resistor trimming system 100 continuously cuts multiple resistance 200 to be adjusted.
In one embodiment, if the preset resistive value of the resistance to be adjusted 200 is 100 ohm.The preset resistive value can be with
It is set in the master control set 40.The master control set 40 can distribute described in needing to be input to according to preset resistive value wait adjust
The constant current at 200 both ends of resistance.If the constant current distributed to 200 both ends of resistance to be adjusted is 100mA, according to described
Input constant current used in laser resistor trimming system 100 surveys the mode of voltage, can be calculated by formula R=U/I default
Voltage is 10V.During being cut to the resistance 200 to be adjusted, i.e., the described measuring equipment 30 can monitor it is described to
The variation of 200 predeterminated voltage of resistance is adjusted, the output level of the comparison circuit 310 can be overturn when reaching 10V, and energizing signal passes
It is defeated by the measurement circuit 320 and the master control set 40.The measurement circuit 320 stops output measured current, the measurement
Circuit 320 outputs signal to the laser control circuit 511 and the galvanometer control circuit 512 simultaneously, thus described in control
Laser 521 and the galvanometer 522 stop working.After the measurement circuit 320 stops exporting the measured current, the master
Control device 40 controls the channel switching device 20 and closes current channel.
In one embodiment, the channel switching device 20 includes conversion control circuit 210 and relay board 220.
The conversion control circuit 210 is electrically connected with the master control set 40.The conversion control circuit 210 is for receiving the master control
The control instruction of device 40.The relay board 220 respectively with the conversion control circuit 210 and the resistance attachment device
10 electrical connections.The relay board 220 is used to receive the control instruction of the conversion control circuit 210, and is the resistance
The signal transmission of attachment device 10 provides access.The relay board 220 may include several to dozens of relays, be one
The electrical component of kind high speed, high frequency switching on off operating mode.It is appreciated that the channel switching device 20 is by being arranged the relay
Device board 220 can provide volume for the laser resistor trimming system 100 and survey channel.Meanwhile the relay board 220 can be protected
Continuous cutting of the laser resistor trimming system 100 to multiple resistance 200 to be adjusted is demonstrate,proved, it is described sharp so as to further increase
The working efficiency of light resistance trimming system 100.
In one embodiment, the relay board 220 includes control relay circuit 221 and multiple relays 222.
The control relay circuit 221 is electrically connected with the conversion control circuit 210.The control relay circuit 221 is for connecing
Receive and execute the control instruction of the conversion control circuit 210.The multiple relay 222 controls electricity with the relay respectively
Road 221 and the resistance attachment device 10 electrical connection.The multiple relay 222 with for receiving the control relay circuit
221 control instruction is simultaneously attracted or is disconnected according to control instruction.It is appreciated that being controlled by the way that the relay is separately provided
Circuit 221 can guarantee good control of the laser resistor trimming system 100 during the work time to the multiple relay 222,
The working efficiency of the laser resistor trimming system 100 can be improved in the i.e. described control relay circuit 221.It is appreciated that described more
The type of a relay 222 is not construed as limiting, as long as it can provide volume survey channel and will not be to the laser resistor trimming system 100
Stability have an impact.In one embodiment, the multiple relay 222 can have contact relay for switching regulator
Device.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The several embodiments of the application above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
The limitation to claim therefore cannot be interpreted as.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the concept of this application, various modifications and improvements can be made, these belong to the protection of the application
Range.Therefore, the scope of protection shall be subject to the appended claims for the application patent.
Claims (10)
1. a kind of laser resistor trimming system characterized by comprising
Resistance attachment device (10) is electrically connected with resistance to be adjusted (200) when in use；
Channel switching device (20) is electrically connected with the resistance attachment device (10), for controlling resistance (200) institute to be adjusted
Opening and closing in channel；
Measuring equipment (30), including comparison circuit (310), measurement circuit (320) and power circuit (330), the measurement circuit
(320) it is electrically connected respectively with the channel switching device (20) with the power circuit (330), power circuit (330) warp
The channel switching device (20) is that the resistance (200) to be adjusted provides measured current, and the measurement circuit (320) is through described logical
Road conversion equipment (20) and the resistance attachment device (10) measure the voltage value of the resistance (200) to be adjusted, and the comparison is electric
Road (310) is electrically connected with the measurement circuit (320), and the comparison circuit (310) is used to judge the resistance (200) to be adjusted
Whether voltage reaches preset value；
Master control set (40) is electrically connected, for controlling respectively with the power circuit (330) and the channel switching device (20)
The power circuit (330) exports measured current, and controls the channel conversion of the channel switching device (20)；And
Resistance trimming device (50) is electrically connected with the master control set (40) and the measurement circuit (320) respectively, described for receiving
The control instruction of master control set (40) and the measurement circuit (320), and started or stopped pair according to the control instruction that receives
The laser cutting of the resistance to be adjusted (200).
2. laser resistor trimming system according to claim 1, which is characterized in that the resistance trimming device (50) includes:
Resistance trimming control circuit (510) is electrically connected, for connecing respectively with the master control set (40) and the measurement circuit (320)
Receive the control instruction of the master control set (40) and the measuring equipment (30)；And
Resistance trimming equipment (520) is electrically connected with the resistance trimming control circuit (510), for receiving the resistance trimming control circuit (510)
Control instruction, and start or stop according to the control instruction that receives the laser cutting to the resistance (200) to be adjusted.
3. laser resistor trimming system according to claim 2, which is characterized in that the resistance trimming equipment (520) include:
Laser (521) is electrically connected, for exporting laser with the resistance trimming control circuit (510)；And
Galvanometer (522) is electrically connected with the resistance trimming control circuit (510), is adjusted for the transmission optical path to output laser.
4. laser resistor trimming system according to claim 3, which is characterized in that the resistance trimming control circuit (510) includes:
Laser control circuit (511), respectively with the master control set (40), the measurement circuit (320) and the laser
(521) it is electrically connected, for receiving the control instruction of the master control set (40) and the measuring equipment (30), and refers to according to control
Enable the start and stop for controlling the laser (521)；And
Galvanometer control circuit (512), respectively with the master control set (40), the measurement circuit (320) and the galvanometer (522)
Electrical connection, for receiving the control instruction of the master control set (40) and the measuring equipment (30), and according to control instruction control
Make the movement and start and stop of the galvanometer (522).
5. laser resistor trimming system according to claim 4, which is characterized in that the galvanometer (522) includes:
Coated optics eyeglass (523), for adjusting the transmission optical path of laser；
Servo motor (524), the coated optics eyeglass (523) are set to the servo motor (524), the servo motor
(524) for driving the coated optics eyeglass (523) to be moved；And
Vibrating mirror driver (525) is electrically connected with the galvanometer control circuit (512) and the servo motor (524) respectively, is used for
It receives the control command of the galvanometer control circuit (512) and drives the servo motor (524).
6. laser resistor trimming system according to claim 3, which is characterized in that the resistance trimming equipment (520) further include:
It focuses field lens (526), is set to from the optical path of the galvanometer (522) output laser, it is described for focusing on laser
Resistance (200) to be adjusted.
7. laser resistor trimming system according to claim 1, which is characterized in that the resistance attachment device (10) includes probe
Block (110), is electrically connected with the channel switching device (20), and be electrically connected when in use with the resistance (200) to be adjusted.
8. laser resistor trimming system according to claim 7, which is characterized in that the probe card (110) includes the first probe
(111) and the second probe (112) both ends of the resistance (200) to be adjusted, are respectively arranged at, and are separately connected two conducting wires, institute
It states the first probe (111) and second probe (112) is used to input measured current and to measure the resistance (200) to be adjusted
Voltage value provides access.
9. laser resistor trimming system according to claim 1, which is characterized in that the channel switching device (20) includes:
Conversion control circuit (210) is electrically connected, for receiving the control of the master control set (40) with the master control set (40)
Instruction；And
Relay board (220) is electrically connected with the conversion control circuit (210) and the resistance attachment device (10) respectively,
It is mentioned for receiving the control instruction of the conversion control circuit (210), and for the transmission of the signal of the resistance attachment device (10)
For access.
10. laser resistor trimming system according to claim 9, which is characterized in that the relay board (220) includes:
Control relay circuit (221) is electrically connected, for receiving and executing the conversion with the conversion control circuit (210)
The control instruction of control circuit (210)；And
Multiple relays (222), are electrically connected with the control relay circuit (221) and the resistance attachment device (10) respectively
Connect, with for receive the control relay circuit (221) control instruction and be attracted or disconnected according to control instruction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910393097.XA CN110070971A (en) | 2019-05-13 | 2019-05-13 | Laser resistor trimming system |
| PCT/CN2020/089919 WO2020228715A1 (en) | 2019-05-13 | 2020-05-13 | Laser resistance trimming system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910393097.XA CN110070971A (en) | 2019-05-13 | 2019-05-13 | Laser resistor trimming system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110070971A true CN110070971A (en) | 2019-07-30 |
Family
ID=67370655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910393097.XA Pending CN110070971A (en) | 2019-05-13 | 2019-05-13 | Laser resistor trimming system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110070971A (en) |
| WO (1) | WO2020228715A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020228715A1 (en) * | 2019-05-13 | 2020-11-19 | 深圳市杰普特光电股份有限公司 | Laser resistance trimming system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201115008Y (en) * | 2007-06-05 | 2008-09-10 | 禾宇精密科技股份有限公司 | Laser cutter |
| CN102353841A (en) * | 2011-09-29 | 2012-02-15 | 沈玉良 | Resistance measuring device for laser trimmer |
| CN102426295A (en) * | 2011-09-29 | 2012-04-25 | 沈玉良 | Relay matrix and driving device used in laser trimmer |
| CN208391273U (en) * | 2018-01-16 | 2019-01-18 | 北京奥依特科技有限责任公司 | A kind of multifunction laser precision trims device |
| CN210120004U (en) * | 2019-05-13 | 2020-02-28 | 深圳市杰普特光电股份有限公司 | Laser resistance adjusting system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3543731B2 (en) * | 2000-05-15 | 2004-07-21 | 日本電気株式会社 | Laser trimming method and laser trimming apparatus |
| JP4076925B2 (en) * | 2003-08-12 | 2008-04-16 | ローム株式会社 | Voltage generation circuit |
| CN110070971A (en) * | 2019-05-13 | 2019-07-30 | 深圳市杰普特光电股份有限公司 | Laser resistor trimming system |
-
2019
- 2019-05-13 CN CN201910393097.XA patent/CN110070971A/en active Pending
-
2020
- 2020-05-13 WO PCT/CN2020/089919 patent/WO2020228715A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201115008Y (en) * | 2007-06-05 | 2008-09-10 | 禾宇精密科技股份有限公司 | Laser cutter |
| CN102353841A (en) * | 2011-09-29 | 2012-02-15 | 沈玉良 | Resistance measuring device for laser trimmer |
| CN102426295A (en) * | 2011-09-29 | 2012-04-25 | 沈玉良 | Relay matrix and driving device used in laser trimmer |
| CN208391273U (en) * | 2018-01-16 | 2019-01-18 | 北京奥依特科技有限责任公司 | A kind of multifunction laser precision trims device |
| CN210120004U (en) * | 2019-05-13 | 2020-02-28 | 深圳市杰普特光电股份有限公司 | Laser resistance adjusting system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020228715A1 (en) * | 2019-05-13 | 2020-11-19 | 深圳市杰普特光电股份有限公司 | Laser resistance trimming system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020228715A1 (en) | 2020-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8234015B2 (en) | Method for controlling a grid voltage | |
| CN102375429B (en) | Processing information acquisition system in processing machine supplying processing point with energy or material | |
| CN103477427A (en) | Methods and systems for laser processing a workpiece using a plurality of tailored laser pulse shapes | |
| CN110164641A (en) | The control method of laser resistor trimming system | |
| CN110070971A (en) | Laser resistor trimming system | |
| CN106769881A (en) | A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping | |
| US4758061A (en) | Method and apparatus for converging the ends of two light waveguides | |
| CN104412474A (en) | Electrical-wire processing device and electrical-wire status detection method for electrical-wire processing device | |
| CN101718368A (en) | Control method and device of proportional solenoid and engineering machinery using device | |
| CN210120004U (en) | Laser resistance adjusting system | |
| CN108698172A (en) | The cutting method and equipment of battery pole piece | |
| CN110729669A (en) | Cable axial cutting system and method based on phase type laser ranging | |
| CN107214418B (en) | A kind of method and device of laser processing wafer | |
| CN109239784B (en) | Intelligent constant-current resistance-changing box for electrical detection | |
| CN113126591A (en) | Test method and device for train controller | |
| CN116422652A (en) | Laser cleaning processing head and method applied to laser cleaning of surface of hardware terminal | |
| CN106324469A (en) | Multiplex PIV (peak inverse voltage) testing system suitable for optical transmitter module and testing method of multiplex PIV testing system | |
| US20220302851A1 (en) | System and method for variable dc bus voltage coupled to inverters | |
| CN107321586B (en) | A kind of liquid electric pulse shock wave generation device | |
| CN1031929C (en) | Method and circuit arrangement controlled welding current according to welding speed | |
| CN202057754U (en) | Man-machine interaction type life test and assessment system for fuse | |
| WO2009026971A1 (en) | A system for emulating track circuits in railway lines | |
| Meng et al. | Hardware-in-loop test for automatic voltage regulator based on identification model | |
| CN110320888B (en) | Aging testing device and method for asynchronous motor controller | |
| WO2022098697A1 (en) | Methods of operating a wire bonding machine, including methods of monitoring an accuracy of bonding force on a wire bonding machine, and related methods |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |