CN110029314A - A kind of vacuum coater improved efficiency - Google Patents
A kind of vacuum coater improved efficiency Download PDFInfo
- Publication number
- CN110029314A CN110029314A CN201910308644.XA CN201910308644A CN110029314A CN 110029314 A CN110029314 A CN 110029314A CN 201910308644 A CN201910308644 A CN 201910308644A CN 110029314 A CN110029314 A CN 110029314A
- Authority
- CN
- China
- Prior art keywords
- feeding
- vacuum
- membrane material
- screw rod
- evaporator assemblies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Abstract
The present invention relates to technical field of vacuum plating, especially a kind of vacuum coater improved efficiency.It includes vacuum film coating chamber, vacuum pump system, evaporator assemblies and charging component；Charging component includes feed compartment, feeding chamber, feeding mechanism and feed pipe, and the both ends of feed pipe are respectively set to inlet port and outlet port, and the height of feed inlet is higher than the height of discharge port, and the bottom of feeding chamber is provided with charging valve.The membrane material loaded on feeding chamber is delivered at feed inlet by the present apparatus by feeding mechanism, and the membrane material entered in feed inlet is eventually delivered in evaporator assemblies by discharge port, in order to timely add new membrane material for evaporator assemblies.The device be it is extremely easy when evaporator assemblies add new membrane material and quickly, reducing number and the time for adding membrane material for evaporator assemblies manually has very strong practical value and market popularization value so as to improve the efficiency of entire vacuum coater.
Description
Technical field
The present invention relates to technical field of vacuum plating, especially a kind of vacuum coater improved efficiency.
Background technique
Vacuum coating refers to heats metal or nonmetallic materials under conditions of high vacuum, evaporates it and is condensed in plating piece
(metal, semiconductor or insulator) surface and a kind of method for forming film.For example, vacuum aluminum-coated, vacuum chromium-coated etc..
There are mainly three types of forms, i.e. evaporation coating, sputter coating and ion film plating for existing vacuum coating, and plate in evaporation
Membrane material is evaporated frequently with resistive heater heats in film, and the simple structure of this equipment, low cost, using reliable can be used for
The less high membrane material of fusing point is evaporated, is particularly suitable in the large batch of production less high to film quality requirement.And existing
Evaporation coating during, be frequently necessary to manually to be added new membrane material in evaporator often to guarantee that evaporator can be after
Continuous evaporation membrane material is to realize coating operation, and this frequently vacuum coating undoubtedly greatly reduces in the mode of addition membrane material manually
Efficiency is unfavorable for large batch of production.
Therefore, it is necessary to propose improvement project to existing vacuum coater, manual addition can be reduced by providing one kind
Membrane material number is to improve the vacuum coater of vacuum coating whole efficiency.
Summary of the invention
In view of the deficiency of the prior art, the purpose of the present invention is to provide a kind of vacuum coatings improved efficiency
Device.
To achieve the goals above, the present invention adopts the following technical scheme:
A kind of vacuum coater improved efficiency, it includes vacuum film coating chamber, is set on vacuum film coating chamber periphery wall
And it vacuum pump system for vacuumizing to vacuum film coating chamber, is set in vacuum coating room for evaporating the evaporator group of membrane material
Part, be set in vacuum coating room and be located at evaporator assemblies profile above substrate frame and be set to vacuum coating outside
And for the charging component to evaporator assemblies addition membrane material；
The charging component include the feed compartment of sealing, be set to the indoor feeding chamber of charging, be set in feed compartment and
Feeding mechanism below feeding chamber profile and the feed pipe for being set to feeding mechanism one end, the feed pipe is close to feeding
The end of mechanism is set as feed inlet, and the other end of the feed pipe is set as discharge port, and the height of the feed inlet is higher than
The height of material mouth, the discharge port sequentially pass through the profile that evaporator assemblies are stretched to after feed compartment and vacuum film coating chamber
Interior, the bottom of the feeding chamber is provided with charging valve, and control charging valve switch is provided on the periphery wall of the feed compartment
Charging button and feeding button for controlling feeding mechanism feeding.
Preferably, the feeding mechanism includes feeding belt, feeding motor, drive roll and driven voller, the drive roll and from
Dynamic roller is formed by feeding belt to link, and for the feeding motor for driving drive roll to rotate, the feeding belt is set to feeding chamber
Profile below, the feeding button is used to control the switch of feeding motor.
Preferably, the matching ends of the size of the feed inlet and feeding belt, one end of the feeding belt extend into
In material mouth.
Preferably, the evaporator assemblies include heat-insulating room made of being piled up as insulating fire brick, are set in heat-insulating room
For holding the crucible of membrane material and being set to the first heating coil of crucible bottom, the discharge port is located at the profile model of crucible
In enclosing.
Preferably, the second heating coil is additionally provided on the periphery wall of the crucible, second heating coil is located in
Between the internal perisporium of heat-insulating room and the periphery wall of crucible.
Preferably, it further includes the regulating mechanism for adjusting substrate rack position, the regulating mechanism include heat insulation shell,
Lifting motor, screw rod and rotating electric machine are fixedly connected at the top of the top and vacuum coating indoor of the heat insulation shell, described
Lifting motor, screw rod and rotating electric machine are all set in heat insulation shell, and the lifting motor is fixedly installed on the inside of heat insulation shell
Top, the lifting motor is fixedly connected with the upper end of screw rod for driving screw rod to rotate, and screw thread socket is gone back on the screw rod
There is mounting base, the rotating electric machine is fixed on the bottom of mounting base and is located on the outside of the profile of screw rod, sets on the rotating electric machine
Be equipped with output shaft, the length of the output shaft is greater than the length of screw rod, the lower end of the output shaft after heat insulation shell with base
The top center of horse is fixedly connected.
Preferably, the regulating mechanism further includes being fixed on the top on the inside of heat insulation shell and the slide bar parallel with screw rod,
The lower end of the slide bar extends downwardly distribution behind the bottom of mounting base.
As the above scheme is adopted, the membrane material loaded on feeding chamber is delivered to feed inlet by feeding mechanism by the present apparatus
Place, the membrane material entered in feed inlet are eventually delivered in evaporator assemblies by discharge port, in order to timely be evaporator
Component adds new membrane material.The device be it is extremely easy when evaporator assemblies add new membrane material and quickly, reduce and be manually
Evaporator assemblies add number and the time of membrane material, so as to improve the efficiency of entire vacuum coater, have very strong
Practical value and market popularization value.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
Fig. 2 is the enlarged drawing in Fig. 1 at A；
Fig. 3 is the structural schematic diagram of the charging component of the embodiment of the present invention；
Fig. 4 is the structural schematic diagram of the evaporator assemblies of the embodiment of the present invention；
In figure: 10, vacuum film coating chamber；11, vacuum pump system；12, substrate frame；
20, evaporator assemblies；21, heat-insulating room；22, crucible；23, the first heating coil；24, the second heating coil；
30, feed component；31, feed compartment；32, feeding chamber；321, feed valve；33, feeding mechanism；331, feeding belt；
332, feeding motor；333, drive roll；334, driven voller；34, feed pipe；341, feed inlet；342, discharge port；
40, regulating mechanism；41, heat insulation shell；42, lifting motor；43, screw rod；44, rotating electric machine；441, output shaft；
45, mounting base；46, slide bar；
A, membrane material.
Specific embodiment
The embodiment of the present invention is described in detail below in conjunction with attached drawing, but the present invention can be defined by the claims
Implement with the multitude of different ways of covering.
As shown in Figures 1 to 4, a kind of vacuum coater improved efficiency provided by the invention, it includes vacuum coating
Room 10, the vacuum pump system 11 for being set on 10 periphery wall of vacuum film coating chamber and being used to vacuumize vacuum film coating chamber 10, setting
In in vacuum film coating chamber 10 for evaporate membrane material a evaporator assemblies 20, be set in vacuum film coating chamber 10 and be located at evaporator
Substrate frame 12 above 20 profile of component and it is set to 10 outside of vacuum film coating chamber and for adding film to evaporator assemblies 20
The charging component 30 of material a；Charging component 30 includes the feed compartment 31 of sealing, the feeding chamber 32 being set in feed compartment 31, setting
In in feed compartment 31 and the feeding mechanism 33 that is located at below 32 profile of feeding chamber and being set to the feeding of 33 one end of feeding mechanism
Pipe 34, feed pipe 34 are set as feed inlet 341 close to the end of feeding mechanism 33, and the other end of feed pipe 34 is set as discharge port
342, the height of feed inlet 341 is higher than the height of discharge port 342, and discharge port 342 sequentially passes through feed compartment 31 and vacuum film coating chamber
It is stretched to after 10 in the profile of evaporator assemblies 20, the bottom of feeding chamber 32 is provided with charging valve 321, feed compartment 31
It is provided with the charging button of the control charging switch of valve 321 on periphery wall and the feeding for controlling 33 feeding of feeding mechanism is pressed
Button.
Based on the above structure, the membrane material a loaded on feeding chamber 32 is delivered to feed inlet by feeding mechanism 33 by the present apparatus
At 341, since the height of feed inlet 341 is higher than the height of discharge port 342, hence into final to the membrane material a in feed inlet 341
It can be delivered in evaporator assemblies 20 by discharge port 342, in order to timely add new membrane material a for evaporator assemblies 20.This
Device opens charging valve 321 so that the film installed inside feeding chamber 32 when adding new membrane material a in evaporator assemblies 20
Material a is fallen on feeding mechanism 33, is then turned on charging button so that feeding mechanism 33 works and the membrane material a that will fall off is transported to
At feed inlet 341.During actual use, enough membrane material a can be loaded in feeding chamber 32 in advance, so as to and
When by feeding mechanism 33 be evaporator assemblies 20 in add new membrane material a.The present apparatus is reduced during actual use
Add the number of membrane material a for evaporator assemblies 20 manually, and the speed for adding membrane material a by the present apparatus is quickly, opens and feeds
Valve 321 and new membrane material a quickly can be supplemented for evaporator assemblies 20 after opening charging button, reduce the present apparatus for steaming
Hair device assembly 20 supplements the time of new membrane material a, it is thus possible to increase the efficiency of entire vacuum coater in certain degree.
Substrate frame 12 is for placing substrate, and in order to which the substrate placed in substrate frame 12 obtains effective plated film, vacuum pump system 11 is adopted
The conventional pumped vacuum systems used in this field.It is appreciated that the various feed pipe 34 is running through feed compartment 31 and Vacuum Deposition
It is required to carry out corresponding encapsulation process during film room 10, to guarantee the vacuum degree of vacuum film coating chamber 10.Based on this, the dress
It is extremely easy and quickly when setting that work efficiency is high and adding new membrane material a for evaporator assemblies 20, have very strong practical value and
Market popularization value.
In order to realize the feeding function of feeding mechanism 33, preferably, the feeding mechanism 33 of the present embodiment includes sending
Material strip 331, feeding motor 332, drive roll 333 and driven voller 334, drive roll 333 and driven voller 334 pass through 331 shape of feeding belt
At linkage, for driving drive roll 333 to rotate, feeding belt 331 is set to below the profile of feeding chamber 32 feeding motor 332,
Feeding button is used to control the switch of feeding motor 332.The rotation of feeding motor 332 is controlled by feeding button as a result, and is driven
Drive roll 333 rotates, and driven voller 334 forms linkage by feeding belt 331 and drive roll 333, so as to make by feeding chamber 32
On the membrane material a that falls convey and be transported in feed inlet 341 in feeding belt 331；It is appreciated that the various feeding button controls feeding
During motor 332 rotates, feeding belt 331 is to convey membrane material a towards 341 direction of feed inlet.
Membrane material a is sent in feed inlet 341 for the ease of feeding mechanism 33, preferably, the present embodiment into
The size of material mouth 341 and the matching ends of feeding belt 331, one end of feeding belt 331 is extend into feed inlet 341.Film as a result,
Material a can be sent directly into feed inlet 341 by feeding belt 331, and the membrane material a in feed inlet 341 is in the feeding being obliquely installed
It can be slid into from discharge port 342 on evaporator assemblies 20 in pipe 34, to add new membrane material a for evaporator assemblies 20.
In order to accelerate membrane material a by the efficiency of thermal evaporation, preferably, the evaporator assemblies 20 of the present embodiment include by
Heat-insulating room 21 made of insulating fire brick is piled up is set to the crucible 22 in heat-insulating room 21 for holding membrane material a and is set to
First heating coil 23 of 22 bottom of crucible, discharge port 342 are located in the profile of crucible 22.Pass through the first heating as a result,
23 heating crucible 22 of coil, so that the membrane material a held in crucible 22 be made to evaporate, the atom or molecule after membrane material a evaporation are from membrane material a
Surface escape up, substrate is finally condensed in a manner of physical absorption and chemisorption by the substrate installed in substrate frame 12
Surface on, formed film.Heat-insulating room 21 is piled up by insulating fire brick to be formed and crucible 22 is set in heat-insulating room 21, thus logical
It crosses the heat generated after 23 heating crucible 22 of the first heating coil and can compare and concentrate in crucible 22, and be easily detected by heat-insulating room
21 conduct, to increase the efficiency that the membrane material a in crucible 22 is heated, membrane material a are obtained within the shorter time
To evaporation, and then the efficiency of entire vacuum coater has been correspondingly improved it.
In order to further accelerate membrane material a by the efficiency of thermal evaporation, preferably, outside the crucible 22 of the present embodiment
Be additionally provided with the second heating coil 24 on peripheral wall, the second heating coil 24 be located in heat-insulating room 21 internal perisporium and crucible 22 it is outer
Between peripheral wall.As a result, by heating while the first heating coil 23 and the second heating coil 24, it can more quickly make film
Material a is by enough heats, to guarantee the rate of membrane material a evaporation.It is appreciated that the various the first heating coil 23 and the second heating
Coil 24 can control its opening and closing by different control buttons respectively, to reach the effect of control membrane material a evaporation rate
Fruit.
For the ease of adjusting the position of substrate frame 12, preferably, the vacuum coater of the present embodiment further includes
For adjusting the regulating mechanism 40 of 12 position of substrate frame, regulating mechanism 40 includes heat insulation shell 41, lifting motor 42,43 and of screw rod
The top of rotating electric machine 44, heat insulation shell 41 is fixedly connected with the top of 10 inside of vacuum film coating chamber, lifting motor 42, screw rod 43
It is all set in heat insulation shell 41 with rotating electric machine 44, lifting motor 42 is fixedly installed on the top of 41 inside of heat insulation shell, rises
Drop motor 42 is fixedly connected for driving screw rod 43 to rotate with the upper end of screw rod 43, is gone back screw thread on screw rod 43 and is socketed with mounting base
45, rotating electric machine 44 is fixed on the bottom of mounting base 45 and is located on the outside of the profile of screw rod 43, is provided on rotating electric machine 44 defeated
Shaft 441, the length of output shaft 441 are greater than the length of screw rod 43, the lower end of output shaft 441 after heat insulation shell 41 with substrate
The top center of frame 12 is fixedly connected.Screw rod 43 is driven to rotate by lifting motor 42 as a result, to make and 43 thread bush of screw rod
The mounting base 45 connect moves up and down, and then the rotating electric machine 44 for the bottom centre for being fixed on mounting base 45 is driven also to carry out
Lower movement, so the substrate frame 12 being fixedly connected with the output shaft 441 of rotating electric machine 44 can be adjusted by lifting motor 42
Height, rotating electric machine 44 is for driving substrate frame 12 to rotate, in order to which the substrate installed in substrate frame 12 can be
Uniform plated film is obtained during rotation.The length of output shaft 441 is greater than the length of screw rod 43, thus in mounting base 45 in silk
During bar 43 slides up and down, substrate frame 12 will not be connected to the bottom of screw rod 43, and then maximumlly ensure that substrate frame
12 ranges to move up and down.It is appreciated that the various heat insulation shell 41 is made using the material of good heat-insulation effect, to maximize
The heat prevented in vacuum film coating chamber 10 be directly transferred to the inside of heat insulation shell 41, and then guarantee inside heat insulation shell 41
The normal work of lifting motor 42 and rotating electric machine 44.
In order to guarantee stability of the substrate frame 12 in lifting process, preferably, the regulating mechanism of the present embodiment
40 further include being fixed on the top on the inside of heat insulation shell 41 and the slide bar 46 parallel with screw rod 43, and the lower end of slide bar 46 is through installation
Distribution is extended downwardly behind the bottom of seat 45.Since rotating electric machine 44 is fixed on the bottom centre of mounting base 45, thus pass through lifting
During motor 42 drives screw rod 43 to rotate and then mounting base 45 is made to move up and down, mounting base 45 can have bigger rolling
Dynamic, slide bar 46 can play certain position-limiting action during mounting base 45 moves up and down, so that mounting base 45 can only edge
The axial direction of slide bar 46 move up and down, so as to increase during mounting base 45 moves up and down in certain degree
Stability, and then guarantee that the rotating electric machine 44 of 45 lower section of mounting base and substrate frame 12 are more steady during up and down motion
It is fixed.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all utilizations
Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content is applied directly or indirectly in other correlations
Technical field, similarly include in scope of patent protection of the invention.
Claims (7)
1. a kind of vacuum coater improved efficiency, it is characterised in that: it includes vacuum film coating chamber, is set to vacuum film coating chamber
Vacuum pump system on periphery wall and for vacuumizing to vacuum film coating chamber is set in vacuum coating room for evaporating membrane material
Evaporator assemblies, be set in vacuum coating room and be located at evaporator assemblies profile above substrate frame and be set to Vacuum Deposition
Film outside and the charging component for being used to add membrane material to evaporator assemblies；
The charging component includes the feed compartment of sealing, is set to the indoor feeding chamber of charging, is set in feed compartment and is located at
Feeding mechanism below feeding chamber profile and the feed pipe for being set to feeding mechanism one end, the feed pipe is close to feeding mechanism
End be set as feed inlet, the other end of the feed pipe is set as discharge port, and the height of the feed inlet is higher than discharge port
Height, the discharge port stretches in the profile of evaporator assemblies after sequentially passing through feed compartment and vacuum film coating chamber, institute
The bottom for stating feeding chamber is provided with charging valve, and the charging of control charging valve switch is provided on the periphery wall of the feed compartment
Button and feeding button for controlling feeding mechanism feeding.
2. a kind of vacuum coater improved efficiency as described in claim 1, it is characterised in that: the feeding mechanism includes
Feeding belt, feeding motor, drive roll and driven voller, the drive roll and driven voller are formed by feeding belt and are linked, the feeding
For driving drive roll to rotate, the feeding belt is set to below the profile of feeding chamber motor, and the feeding button is for controlling
The switch of feeding motor.
3. a kind of vacuum coater improved efficiency as claimed in claim 2, it is characterised in that: the size of the feed inlet
It is extend into feed inlet with one end of the matching ends of feeding belt, the feeding belt.
4. a kind of vacuum coater improved efficiency as described in claim 1, it is characterised in that: the evaporator assemblies packet
Heat-insulating room made of being piled up as insulating fire brick is included, the crucible in heat-insulating room for holding membrane material is set to and is set to crucible
First heating coil of bottom, the discharge port are located in the profile of crucible.
5. a kind of vacuum coater improved efficiency as claimed in claim 4, it is characterised in that: the periphery wall of the crucible
On be additionally provided with the second heating coil, second heating coil be located in heat-insulating room internal perisporium and crucible periphery wall it
Between.
6. a kind of vacuum coater improved efficiency as described in claim 1, it is characterised in that: it further includes for adjusting
The regulating mechanism of substrate rack position, the regulating mechanism include heat insulation shell, lifting motor, screw rod and rotating electric machine, it is described every
It is fixedly connected at the top of the top of hot shell and vacuum coating indoor, the lifting motor, screw rod and rotating electric machine are respectively provided with
In in heat insulation shell, the lifting motor is fixedly installed on the top on the inside of heat insulation shell, the lifting motor and screw rod it is upper
End is fixedly connected for driving screw rod to rotate, and screw thread is gone back on the screw rod and is socketed with mounting base, the rotating electric machine is fixed on peace
It fills the bottom of seat and is located on the outside of the profile of screw rod, be provided with output shaft on the rotating electric machine, the length of the output shaft is big
It is fixedly connected after heat insulation shell with the top center of substrate frame in the lower end of the length of screw rod, the output shaft.
7. a kind of vacuum coater improved efficiency as claimed in claim 6, it is characterised in that: the regulating mechanism also wraps
It includes and is fixed on the top on the inside of heat insulation shell and the slide bar parallel with screw rod, the lower end of the slide bar is behind the bottom of mounting base
Extend downwardly distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910308644.XA CN110029314A (en) | 2019-04-17 | 2019-04-17 | A kind of vacuum coater improved efficiency |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910308644.XA CN110029314A (en) | 2019-04-17 | 2019-04-17 | A kind of vacuum coater improved efficiency |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110029314A true CN110029314A (en) | 2019-07-19 |
Family
ID=67238765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910308644.XA Pending CN110029314A (en) | 2019-04-17 | 2019-04-17 | A kind of vacuum coater improved efficiency |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110029314A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877646A (en) * | 2021-01-13 | 2021-06-01 | 嘉讯科技(深圳)有限公司 | High-efficient vacuum plating device with mix and plate |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106119781A (en) * | 2016-07-27 | 2016-11-16 | 京东方科技集团股份有限公司 | Vaporising device, evaporated device and evaporation coating method |
| CN207435581U (en) * | 2017-07-27 | 2018-06-01 | 隆基绿能科技股份有限公司 | A kind of material delivery system and crystal growth system |
-
2019
- 2019-04-17 CN CN201910308644.XA patent/CN110029314A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106119781A (en) * | 2016-07-27 | 2016-11-16 | 京东方科技集团股份有限公司 | Vaporising device, evaporated device and evaporation coating method |
| CN207435581U (en) * | 2017-07-27 | 2018-06-01 | 隆基绿能科技股份有限公司 | A kind of material delivery system and crystal growth system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877646A (en) * | 2021-01-13 | 2021-06-01 | 嘉讯科技(深圳)有限公司 | High-efficient vacuum plating device with mix and plate |
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Application publication date: 20190719 |
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| RJ01 | Rejection of invention patent application after publication |