CN110018215B - Fick diffusion law-based miniature chloride ion sensor and method thereof - Google Patents
Fick diffusion law-based miniature chloride ion sensor and method thereof Download PDFInfo
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Abstract
The invention discloses a miniature chloride ion sensor based on Fick's law of diffusion and a method thereof, and the chloride ion sensor prepared by the method is a thin-sheet type all-solid miniature chloride ion sensor, has the advantages of small volume, good structural stability, high reliability and good tightness, can be placed at any test position of instrument and equipment, is little influenced by external factors, and is particularly suitable for real-time monitoring of the corrosion condition of an aircraft in a high-salt high-humidity micro-liquid film environment. The method can make up for the defects of weak passive measurement signal, poor stability, short service life, long response time and the like before, can measure the chloride ion concentration in the micro-liquid film state, can be applied to the salt spray corrosion and protection of the aircraft, and can improve the service life of the aircraft.
Description
Technical Field
The invention relates to the field of chloride ion sensors, in particular to a miniature chloride ion sensor based on Fick diffusion law and a method thereof.
Background
Corrosion is one of the major forms of structural damage to aircraft, accounting for 20% of the total structural damage. Aircraft structural corrosion is the cumulative chemical loss and destruction of a component by chemical or electrochemical action in an atmospheric corrosion micro-liquid film environment. In the early stages of corrosion, the corrosion site is difficult to detect, and when it is initiated, it will develop faster and more severe than other lesions if not controlled. The corrosion damage of the aircraft directly affects the attendance rate of the aircraft, and more seriously affects the life safety of pilots. Therefore, positive protective measures must be taken to predict the degree of corrosion of the aircraft in advance to reduce the maintenance costs of the aircraft and to avoid tragedy.
The eastern coastal areas of China are civil and military aircraft, and the surfaces of the aircraft and even the inner part of the cockpit are not subjected to various corrosion at any time due to long-term execution of flight tasks under severe and complex environments such as high salt mist, high humidity and the like. These corrosion are generally not observed by the naked human eye in the initial stages of occurrence, and by the time the aircraft surface has suffered serious corrosion, which would greatly reduce the service life of the aircraft and would seriously threaten the personnel safety of the pilot.
At present, the corrosion protection of the aircraft in China is mainly based on the regular inspection of sealing water isolation and organisms, the traditional detection mode is low in efficiency and high in cost, although the corrosion condition of the aircraft and the like is also reported to be evaluated by ultrasonic, infrared imaging and other technologies, the method is used for detecting the corrosion part only when the aircraft is corroded seriously, and the efficiency is low and the cost is high. At present, corrosion inspection of aircrafts in China mainly takes pH value as a main part, and as the corrosion rate of chloride ions to the aircrafts is lower than that of hydrogen ions to the aircrafts, corrosion protection of chloride ions at home and abroad is not researched, but the corrosion rate of chloride ions to the aircrafts in coastal environments, island environments and the like in high-salt, high-humidity and weak-acid environments is nearly multiplied, and a sensor for monitoring the concentration of the chloride ions is urgently needed in the aircrafts.
Disclosure of Invention
The invention aims to solve the technical problem of providing a miniature chloride ion sensor based on Fick diffusion law and a method thereof aiming at the defects related to the background technology.
The invention adopts the following technical scheme for solving the technical problems:
the miniature chloride ion sensor based on Fick's diffusion law comprises a polyimide sheet substrate, an auxiliary electrode, a sensing electrode, a reference electrode and a counter electrode;
the auxiliary electrode, the sensing electrode, the reference electrode and the counter electrode are all arranged on the polyimide sheet substrate and comprise sensitive elements, wires and welding spots connected with the sensitive elements through the wires;
the sensitive elements of the sensing electrodes are in an interdigital shape; the sensitive element of the auxiliary electrode is rectangular, and a groove for placing the sensitive element of the sensing electrode is formed in the sensitive element; the sensitive element of the sensing electrode is placed in the groove of the sensitive element of the auxiliary electrode;
the sensing elements of the reference electrode and the counter electrode are in strip shapes, are respectively arranged on two sides of the auxiliary electrode sensing element, are parallel to the edges on two sides of the auxiliary electrode sensing element, and are perpendicular to the length direction of the interdigital sensing element;
the sensing element of the auxiliary electrode, the sensing element of the sensing electrode and the sensing element of the reference electrode all comprise a Ti adhesion layer, a Pt electrode layer and an Au film layer from bottom to top; the sensitive element of the counter electrode comprises a Ti adhesion layer and a Pt electrode layer from bottom to top;
the sensing element of the auxiliary electrode, the sensing element of the sensing electrode and the sensing element of the reference electrode are plated with Ag film layers, and the Ag film layers are plated with AgCl film layers;
the auxiliary electrode, the sensing electrode, the reference electrode and the counter electrode are not contacted.
As a further optimization scheme of the miniature chloride ion sensor based on Fick's diffusion law, the interdigital index of the sensing element of the sensing electrode is 3, the interdigital width is 5 mu m, the interdigital distance is 1mm, and the interdigital length is 3mm; the line width of the conducting wire of the sensing electrode is 70 mu m, and the welding spot of the sensing electrode is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the auxiliary electrode is a rectangle with the diameter of 8 mm or 4 mm; the distance between the auxiliary electrode sensor and the sensing electrode sensor is 5 mu m; the line width of the lead of the auxiliary electrode is 70 mu m, and the welding spot of the auxiliary electrode is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the reference electrode is a rectangle with the size of 70 x 3000 mu m; the distance between the reference electrode sensor and the auxiliary electrode sensor is 70 μm; the line width of the reference electrode lead is 70 mu m, and the reference electrode welding spot is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the counter electrode is a rectangle with the diameter of 70 x 3000 mu m; the distance between the counter electrode sensitive element and the auxiliary electrode sensitive element is 70 mu m; the line width of the counter electrode wire is 70 mu m, and the welding spot of the counter electrode is rectangular with the size of 1 x 1.5 mm.
As a further optimization scheme of the miniature chloride ion sensor based on Fick diffusion law, the miniature chloride ion sensor further comprises first to fourth connectors;
one ends of the first to fourth connectors are respectively connected with welding spots of the auxiliary electrode, the sensing electrode, the reference electrode and the Pt counter electrode, and the other ends of the first to fourth connectors are connected with the outside;
and insulating layers are arranged on the wires and welding spots of the auxiliary electrode, the sensing electrode, the reference electrode and the Pt counter electrode.
The invention also discloses a measuring method of the miniature chloride ion sensor based on Fick diffusion law, which comprises the following steps:
step 1), setting a current source, a function generator and a potential measuring device, wherein the control end of the current source is connected with the function generator, constant pulse and constant current are generated through the function generator, the positive electrode of the current source is connected with a welding point of a counter electrode, and the negative electrode of the current source is connected with a welding point of an auxiliary electrode; the positive electrode of the potential measuring device is connected with the welding spot of the sensing electrode, and the negative electrode of the potential measuring device is connected with the welding spot of the reference electrode;
step 2), measuring by a potential measuring device to obtain a potential curve of a sensing electrode in the miniature chloride ion sensor;
step 3), deriving the potential curve to obtain a derivative curve of the potential curve, and enabling the time corresponding to the peak value of the derivative curve to be the transition time tau;
step 4), calculating the chloride ion concentration C measured by the miniature chloride ion sensor according to the following formula * O ：
Wherein D is O Is the chloride ion diffusion coefficient, A is the surface area of the auxiliary electrode, F is the Faraday coefficient, and I is the current applied by the current source.
The invention also discloses a preparation method of the mini-type chloride ion sensor based on Fick diffusion law, which comprises the following steps:
step A), sequentially sputtering a Ti adhesion layer and a Pt electrode layer on a polyimide sheet substrate by adopting a magnetron sputtering method;
step B), performing circuit pattern transfer on the polyimide sheet substrate after the Ti adhesive layer and the Pt electrode layer are sputtered by adopting a photoetching technology to form patterns of a reference electrode, a sensing electrode, an auxiliary electrode and a counter electrode on the Ti adhesive layer and the Pt electrode layer;
step C), electroplating Au on the Pt electrode layers of the patterns of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an Au film layer;
step D), electroplating Ag on the Au film layers of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an Ag film layer;
and E), electroplating AgCl on the Ag film layers of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an AgCl film layer.
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
the invention has high stability and good sensitivity, can monitor chloride ions in real time in weak acid salt fog environment, and solves the problems that the traditional monitoring stations are mainly used for the current atmosphere monitoring, the stations are few, the coverage area is small, the data updating instantaneity is poor, and the real air quality information contacted by people can not be truly reflected.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the miniature chloride ion sensor provided by the invention.
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
FIG. 3 is a schematic diagram of a sputtering and lithography scheme of a miniature chloride ion sensor provided by the invention;
FIG. 4 is a schematic diagram of a test circuit of a chloride ion sensor according to the present invention;
FIG. 5 is a graph of pulse current function of the miniature chloride ion sensor provided by the invention;
FIG. 6 is a graph of Nernst theoretical potential of a miniature chloride ion sensor provided by the invention;
FIG. 7 is a graph showing the relationship between the potential value and time of the micro-chloride ion sensor according to the embodiment of the invention under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chloride ion concentration micro-liquid film after signal processing;
FIG. 8 is a graph showing the derivative of the results of the micro-chlorine ion sensor according to the embodiment of the invention under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chlorine ion concentration micro-liquid film respectively;
FIG. 9 is a graph showing the comparison between a transition time calibration curve and a theoretical equation obtained by performing ten tests on the micro-chlorine ion sensor according to the embodiment of the invention under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chlorine ion concentration micro-liquid films.
In the figure, the sensor of the 1-counter electrode, the wire of the 2-counter electrode, the welding point of the 3-counter electrode, the sensor of the 4-auxiliary electrode, the wire of the 5-auxiliary electrode, the welding point of the 6-auxiliary electrode, the sensor of the 7-sensing electrode, the wire of the 8-sensing electrode, the welding point of the 9-sensing electrode, the sensor of the 10-reference electrode, the wire of the 11-reference electrode, the welding point of the 12-reference electrode and the 13-polyimide sheet substrate.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the accompanying drawings:
this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the components are exaggerated for clarity.
As shown in fig. 1, the invention discloses a mini-type chloride ion sensor based on Fick's law of diffusion, which comprises a polyimide sheet substrate, an auxiliary electrode, a sensing electrode, a reference electrode and a counter electrode;
the auxiliary electrode, the sensing electrode, the reference electrode and the counter electrode are all arranged on the polyimide sheet substrate and comprise sensitive elements, wires and welding spots connected with the sensitive elements through the wires;
as shown in fig. 2, the sensing elements of the sensing electrode are in an interdigital shape; the sensitive element of the auxiliary electrode is rectangular, and a groove for placing the sensitive element of the sensing electrode is formed in the sensitive element; the sensitive element of the sensing electrode is placed in the groove of the sensitive element of the auxiliary electrode;
the sensing elements of the reference electrode and the counter electrode are in strip shapes, are respectively arranged on two sides of the auxiliary electrode sensing element, are parallel to the edges on two sides of the auxiliary electrode sensing element, and are perpendicular to the length direction of the interdigital sensing element;
the sensing element of the auxiliary electrode, the sensing element of the sensing electrode and the sensing element of the reference electrode all comprise a Ti adhesion layer, a Pt electrode layer and an Au film layer from bottom to top; the sensitive element of the counter electrode comprises a Ti adhesion layer and a Pt electrode layer from bottom to top;
the sensing element of the auxiliary electrode, the sensing element of the sensing electrode and the sensing element of the reference electrode are plated with Ag film layers, and the Ag film layers are plated with AgCl film layers;
the auxiliary electrode, the sensing electrode, the reference electrode and the counter electrode are not contacted.
As a further optimization scheme of the miniature chloride ion sensor based on Fick's diffusion law, the interdigital index of the sensing element of the sensing electrode is 3, the interdigital width is 5 mu m, the interdigital distance is 1mm, and the interdigital length is 3mm; the line width of the conducting wire of the sensing electrode is 70 mu m, and the welding spot of the sensing electrode is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the auxiliary electrode is a rectangle with the diameter of 8 mm or 4 mm; the distance between the auxiliary electrode sensor and the sensing electrode sensor is 5 mu m; the line width of the lead of the auxiliary electrode is 70 mu m, and the welding spot of the auxiliary electrode is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the reference electrode is a rectangle with the size of 70 x 3000 mu m; the distance between the reference electrode sensor and the auxiliary electrode sensor is 70 μm; the line width of the reference electrode lead is 70 mu m, and the reference electrode welding spot is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the counter electrode is a rectangle with the diameter of 70 x 3000 mu m; the distance between the counter electrode sensitive element and the auxiliary electrode sensitive element is 70 mu m; the line width of the counter electrode wire is 70 mu m, and the welding spot of the counter electrode is rectangular with the size of 1 x 1.5 mm.
As a further optimization scheme of the miniature chloride ion sensor based on Fick diffusion law, the miniature chloride ion sensor further comprises first to fourth connectors;
one ends of the first to fourth connectors are respectively connected with welding spots of the auxiliary electrode, the sensing electrode, the reference electrode and the Pt counter electrode, and the other ends of the first to fourth connectors are connected with the outside;
and insulating layers are arranged on the wires and welding spots of the auxiliary electrode, the sensing electrode, the reference electrode and the Pt counter electrode.
The invention also discloses a preparation method of the mini-type chloride ion sensor based on Fick diffusion law, which comprises the following steps:
step A), sequentially sputtering a Ti adhesion layer and a Pt electrode layer on a polyimide sheet substrate by adopting a magnetron sputtering method;
step B), performing circuit pattern transfer on the polyimide sheet substrate after the Ti adhesive layer and the Pt electrode layer are sputtered by adopting a photoetching technology to form patterns of a reference electrode, a sensing electrode, an auxiliary electrode and a counter electrode on the Ti adhesive layer and the Pt electrode layer;
step C), electroplating Au on the Pt electrode layers of the patterns of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an Au film layer;
step D), electroplating Ag on the Au film layers of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an Ag film layer;
and E), electroplating AgCl on the Ag film layers of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an AgCl film layer.
The polyimide sheet substrate is a 15×10×1mm rectangular substrate. The Polyimide sheet substrate is made of Polyimide (PI) which has the advantages of high temperature resistance (up to 400 ℃), excellent mechanical property, high irradiation resistance, good acid-base chemical stability, flexibility and the like. The polyimide is used as the substrate material of the chloride ion sensor, so that the use temperature range of the sensor can be increased, the influence of the external corrosion environment on the chloride ion sensor is reduced, and the stability and reliability of the sensor in a complex environment are improved. In addition, polyimide is a flexible material, so that the application field and the application range of the chloride ion sensor can be widened.
FIG. 3 is a schematic diagram of a sputtering and lithography scheme for a miniature chloride ion sensor provided by the invention.
The invention also discloses a measuring method of the miniature chloride ion sensor based on Fick diffusion law, which comprises the following steps:
step 1), as shown in fig. 4, a current source, a function generator and a potential measuring device are arranged, wherein the control end of the current source is connected with the function generator, constant pulse constant current is generated through the function generator, the positive electrode of the current source is connected with a welding point of a counter electrode, and the negative electrode of the current source is connected with a welding point of an auxiliary electrode; the positive electrode of the potential measuring device is connected with the welding spot of the sensing electrode, and the negative electrode of the potential measuring device is connected with the welding spot of the reference electrode;
step 2), measuring by a potential measuring device to obtain a potential curve of a sensing electrode in the miniature chloride ion sensor;
step 3), deriving the potential curve to obtain a derivative curve of the potential curve, and enabling the time corresponding to the peak value of the derivative curve to be the transition time tau;
step 4), calculating the chloride ion concentration C measured by the miniature chloride ion sensor according to the following formula * O ：
Wherein D is O Is chlorineIon diffusion coefficient, a is the surface area of the auxiliary electrode, F is the faraday coefficient, and I is the current applied by the current source.
FIG. 5 is a graph of pulse current function of the miniature chloride ion sensor provided by the invention; referring to fig. 5, the pulse current is a direct current signal, and the change rule with time is the same; when the pulse current is positive, the sensor starts to measure to obtain an S-shaped curve with the potential changing along with time, software calculates to obtain a transition time corresponding to the S-shaped curve through a test interface, and when the pulse current is negative, the sensor is in a stagnation state, and the potential gradually returns to zero value fluctuation;
FIG. 6 is a graph of Nernst theoretical potential of a miniature chloride ion sensor provided by the invention; referring to fig. 6, τ is the transition time of chloride ion concentration, theoretically when t=τ, the potential is infinity, which is shown as the measurement device potential threshold;
FIG. 7 is a graph showing the relationship between the potential value and time of the micro-chloride ion sensor according to the embodiment of the invention under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chloride ion concentration micro-liquid film after signal processing; referring to fig. 7, the potential time curve measured by the sensor in the micro-liquid film environment is an S-shaped curve, and as the concentration increases, the S-shaped curve gradually moves backward, and the higher the concentration is, the smoother the curve is, and the clearer the inflection point (transition time) of the curve is;
FIG. 8 is a graph showing the derivative of the results of the micro-chlorine ion sensor according to the embodiment of the invention under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chlorine ion concentration micro-liquid film respectively; referring to FIG. 8, the peak values of derivative curves of the sensors are obvious under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chloride ion concentration micro-liquid films respectively, and the peak values of the derivative curves can be obtained through an automatic peak finding function, and the peak values are transition time values;
FIG. 9 is a graph comparing a transition time calibration curve obtained by performing ten tests on micro-chlorine ion sensors according to the embodiment of the invention under the conditions of 0.1, 0.3, 0.5, 0.7 and 1mol/L chlorine ion concentration micro-liquid films with theoretical equations; referring to fig. 9, the transition time calibration curve obtained by the sensor performing multiple measurements is the same as the law of the theoretical equation, and has good stability.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.
Claims (5)
1. The miniature chloride ion sensor based on Fick's diffusion law is characterized by comprising a polyimide sheet substrate, an auxiliary electrode, a sensing electrode, a reference electrode and a counter electrode;
the auxiliary electrode, the sensing electrode, the reference electrode and the counter electrode are all arranged on the polyimide sheet substrate and comprise sensitive elements, wires and welding spots connected with the sensitive elements through the wires;
the sensitive elements of the sensing electrodes are in an interdigital shape; the sensitive element of the auxiliary electrode is rectangular, and a groove for placing the sensitive element of the sensing electrode is formed in the sensitive element; the sensitive element of the sensing electrode is placed in the groove of the sensitive element of the auxiliary electrode;
the sensing elements of the reference electrode and the counter electrode are in strip shapes, are respectively arranged on two sides of the auxiliary electrode sensing element, are parallel to the edges on two sides of the auxiliary electrode sensing element, and are perpendicular to the length direction of the interdigital sensing element;
the sensing element of the auxiliary electrode, the sensing element of the sensing electrode and the sensing element of the reference electrode all comprise a Ti adhesion layer, a Pt electrode layer and an Au film layer from bottom to top; the sensitive element of the counter electrode comprises a Ti adhesion layer and a Pt electrode layer from bottom to top;
the sensing element of the auxiliary electrode, the sensing element of the sensing electrode and the sensing element of the reference electrode are plated with Ag film layers, and the Ag film layers are plated with AgCl film layers;
the auxiliary electrode, the sensing electrode, the reference electrode and the counter electrode are not contacted.
2. The mini-type chloride ion sensor based on Fick's diffusion law according to claim 1, wherein the sensing element of the sensing electrode has an interdigital index of 3, an interdigital width of 5 μm, an interdigital distance of 1mm, and an interdigital length of 3mm; the line width of the conducting wire of the sensing electrode is 70 mu m, and the welding spot of the sensing electrode is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the auxiliary electrode is a rectangle with the diameter of 8 mm or 4 mm; the distance between the auxiliary electrode sensor and the sensing electrode sensor is 5 mu m; the line width of the lead of the auxiliary electrode is 70 mu m, and the welding spot of the auxiliary electrode is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the reference electrode is a rectangle with the size of 70 x 3000 mu m; the distance between the reference electrode sensor and the auxiliary electrode sensor is 70 μm; the line width of the reference electrode lead is 70 mu m, and the reference electrode welding spot is rectangular with the size of 1 x 1.5 mm;
the sensitive element of the counter electrode is a rectangle with the diameter of 70 x 3000 mu m; the distance between the counter electrode sensitive element and the auxiliary electrode sensitive element is 70 mu m; the line width of the counter electrode wire is 70 mu m, and the welding spot of the counter electrode is rectangular with the size of 1 x 1.5 mm.
3. The Fick's law of diffusion based micro chloride ion sensor of claim 1, further comprising first through fourth connectors;
one ends of the first to fourth connectors are respectively connected with welding spots of the auxiliary electrode, the sensing electrode, the reference electrode and the Pt counter electrode, and the other ends of the first to fourth connectors are connected with the outside;
and insulating layers are arranged on the wires and welding spots of the auxiliary electrode, the sensing electrode, the reference electrode and the Pt counter electrode.
4. The method for measuring the micro chloride ion sensor based on Fick's law of diffusion according to claim 1, comprising the steps of:
step 1), setting a current source, a function generator and a potential measuring device, wherein the control end of the current source is connected with the function generator, constant pulse and constant current are generated through the function generator, the positive electrode of the current source is connected with a welding point of a counter electrode, and the negative electrode of the current source is connected with a welding point of an auxiliary electrode; the positive electrode of the potential measuring device is connected with the welding spot of the sensing electrode, and the negative electrode of the potential measuring device is connected with the welding spot of the reference electrode;
step 2), measuring by a potential measuring device to obtain a potential curve of a sensing electrode in the miniature chloride ion sensor;
step 3), deriving the potential curve to obtain a derivative curve of the potential curve, and enabling the time corresponding to the peak value of the derivative curve to be the transition time tau;
step 4), calculating the chloride ion concentration C measured by the miniature chloride ion sensor according to the following formula * O ：
Wherein D is O Is the chloride ion diffusion coefficient, A is the surface area of the auxiliary electrode, F is the Faraday coefficient, and I is the current applied by the current source.
5. The method for preparing the mini-type chloride ion sensor based on Fick's diffusion law as claimed in claim 1, comprising the following steps:
step A), sequentially sputtering a Ti adhesion layer and a Pt electrode layer on a polyimide sheet substrate by adopting a magnetron sputtering method;
step B), performing circuit pattern transfer on the polyimide sheet substrate after the Ti adhesive layer and the Pt electrode layer are sputtered by adopting a photoetching technology to form patterns of a reference electrode, a sensing electrode, an auxiliary electrode and a counter electrode on the Ti adhesive layer and the Pt electrode layer;
step C), electroplating Au on the Pt electrode layers of the patterns of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an Au film layer;
step D), electroplating Ag on the Au film layers of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an Ag film layer;
and E), electroplating AgCl on the Ag film layers of the reference electrode, the sensing electrode and the auxiliary electrode by adopting an electroplating method to form an AgCl film layer.
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| Development of a Wireless Miniaturized Smart Sensor Network for Aircraft Corrosion Monitoring;Jeff Demo 等;IEEE;第1-9页 * |
| Influence of the electrolyte film thickness and NaCl concentration onthe oxygen reduction current on platinum;O. Dolgikh 等;Corrosion Science;第102卷;第338–347页 * |
| 全固态离子选择性电极研究进展;安清波 等;中国科学: 化学;第47卷(第5期);第524-531页 * |
| 海岛盐雾含量自动测量系统设计;张颖 等;传感器与微系统;第37卷(第1期);第102-107页 * |
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