CN110010342A - A kind of fexible film, device and the method for regulating and controlling the fexible film local direction of magnetization - Google Patents
A kind of fexible film, device and the method for regulating and controlling the fexible film local direction of magnetization Download PDFInfo
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- CN110010342A CN110010342A CN201910131434.8A CN201910131434A CN110010342A CN 110010342 A CN110010342 A CN 110010342A CN 201910131434 A CN201910131434 A CN 201910131434A CN 110010342 A CN110010342 A CN 110010342A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
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Abstract
The present invention provides a kind of fexible film, device and the method for regulating and controlling the fexible film local direction of magnetization, this method comprises: S1, cleaning flexible substrates, and carries out bending fixation with a curvature, forms substrate；S2, magnetic nanoscale films are formed by magnetron sputtering mode on the substrate；The magnetic nanoscale films prepared in S3, flattening S2, the fexible film at acquisition center to edge direction of magnetization consecutive variations.The present invention is based on magnetron sputterings to prepare nano thin-film technology, using the deposited magnetic nano thin-film in substrate.The local direction of magnetization of fexible film provided by the invention is continuously adjustable in mm-scale range；Film thickness, the power of magnetron sputtering, being bent the parameters such as the position of substrate can easily regulate and control it.The present invention provides large scale preparation scheme to prepare functional magnetic thin-film device on a flexible substrate, has certain business realized value.
Description
Technical field
The invention belongs to fexible films, technical field of film preparation, the in particular to tune of the fexible film local direction of magnetization
Control and its relevant technologies and product.
Background technique
Flexible device generally comprises flexible substrates and functional structure unit.Since it is with good spatial compatibility
And environmental suitability, it is closely bound up with daily life, it is in the past twenty years always the focus studied and applied.
Along with the variation of mechanical energy, functional unit thereon can be transformed into electro magnetic/optical signal, on the contrary for the deformation of flexible device
Also may be used.The former corresponds to flexible detector/sensor, and the latter corresponds to MEMS (MEMS).If a device can
The stability that output signal is kept under deformation, then can be used as a structural unit in flexible display or information memory.
Currently, the demand with the whole world to flexible apparatus is growing, a large amount of research work is committed to developing these hybrid devices
So that creating new material property, convenient and fast large-scale production process is proposed for industry.
In general, the manufacture of flexible device is to utilize elastic deformation of the flexible support at macro length or microcosmic local,
The physical property of the ultrathin membrane of deposition is manipulated in such a way that energy conversion or pattern are modified.Its plastic deformation has typically been compressed
Very little is ignored.And prepared in magnetic material technology on a flexible substrate, the anisotropy of thin magnetic film compiles magnetism
It is one of key underlying issue for code and driving.However in the prior art, magnetostriction materials are largely rare earth metals
Between compound, content is less, expensive, and cost of manufacture is high.This market for having seriously affected conventional the type thin-film material pushes away
Wide property, and in the prior art, the adjustment for the same film about easy axis direction does not relate to, and at present such
The industrial mass production of film still cannot effectively carry out, and color can be opened up in poor with magnetic transferability aspect.
Summary of the invention
In view of the deficiencies of the prior art, the present invention proposes a kind of fexible film, device and regulation fexible film local magnetization
The method in direction.This method is to adjust permalloy film using the localized plastic deformations and macroscopical elastic deformation of binding and layout paper
Magnetic anisotropy.90 ° of the direction of magnetization of steering experimentally is realized in convex surface substrate deposition for the first time, and illustrates magnetic sample
The high stability of property.In conjunction with common binding and layout paper, carrying out simple design by Fabrication parameter can be with the magnetic of flexible modulation film
Anisotropy.In addition to this, due to local residual stress and paper the characteristics of, the film of preparation also have industrial-scale raw
The advantages that production, color can be opened up in magnetic transferability.Specifically, the present invention provides technical solutions below:
Firstly, the present invention provides a kind of methods of regulation fexible film local direction of magnetization, comprising the following steps:
S1, flexible substrates are cleaned, and bending fixation is carried out with a curvature, form substrate；
S2, magnetic nanoscale films are formed by magnetron sputtering mode on the substrate；
The film prepared in S3, flattening S2, the fexible film at acquisition center to edge direction of magnetization consecutive variations.
Preferably, the flexible substrates have the composite construction of upper layer plastic deformation layer and lower layer's local support layer.
Preferably, the flexible substrates are binding and layout paper, parchamyn paper, tectorial paper, leaching membrane paper, cross modeling paper, cross modeling paper, weigh
Paper, A4 paper, polystyrene or hard card paper.
Preferably, the thin magnetic film substance includes: iron, cobalt, nickel, and the alloy comprising above-mentioned substance.
Preferably, in the magnetron sputtering in the S2, deposition power is 50W~200W, and base vacuum maintains 10-4Pa,
Working gas is Ar, gas flow are as follows: 10sccm, sputtering operating air pressure are 0.3Pa.
Preferably, the thin magnetic film substance is common Ni80Fe20Permalloy.
Preferably, for the fexible film with a thickness of 10~100nm, the substrate bending curvature is 5~9.4mm.
Preferably, in the magnetron sputtering of the S2, exposure mask is carried out using flexible material, deposition region is only left, passes through
Fexible film center is adjusted at a distance from target center, realizes the regulation of the fexible film local direction of magnetization.
Preferably, when the fexible film carries out magnetic transfer, the local support layer fibrous paper of lower layer is removed, heavy
The long-pending magnetic nanoscale films surface sprays hydrophobic material, and is dried, and shifts thin magnetic film after dry.
It preferably, can be when film substrate, film thickness, film bends curvature, film deposition power change
Obtain superior in quality direction of magnetization consecutive variations fexible film in a certain range, and the easy axis of film from center along film
Stress direction to edge-perpendicular in the stress direction of film, 90 ° of transformation has occurred.
In addition, the fexible film includes substrate, magnetic nanoscale films, institute the present invention also provides a kind of fexible film
Fexible film is stated to be prepared using the method for the regulation fexible film local direction of magnetization as described above.
In addition, the device includes fexible film, the fexible film the present invention also provides a kind of fexible film device
Including substrate, magnetic nanoscale films, the fexible film is using the side for regulating and controlling the fexible film local direction of magnetization as described above
Method is prepared.
Compared with the prior art, the invention has the following advantages:
(1) flexible substrates that the present invention uses is common business binding and layout paper, with very big universality, from a wealth of sources,
Economic serviceability is strong.
(2) process that uses of the present invention is simple, the easy-to-use actual industrial production of production equipment engineering design structure and sets
Standby transformation, can obtain flexible nano thin-film and the large-scale production of direction of magnetization consecutive variations easily.
(3) stablized using the flexible nano thin-film magnetic anisotropy for the method preparation that the present invention uses, with pushing away for time
It is undamped to move performance.
(4) it can be realized in the case where not influencing plant machinery performance using the film for the method preparation that the present invention uses
The exhibition of various colors is in that can prepare same color large area thin magnetic film, and magneto-optic effect can be enhanced, and can also utilize color
Coloured silk is learned and is fitted to it.Based on this, magnetic and color dual coding can be designed that, be applied to anti-fake, and its color exists
Wide angle is constant.In addition to this it is possible to be applied to printing and drawing etc..
(5) product of the invention can be directly as commercial product.
Detailed description of the invention
Fig. 1 a is the normalization Ke Er loop line along X-axis of the embodiment of the present invention, increases D=0.5mm every time；
Fig. 1 b is the normalization Ke Er loop line along Y-axis of the embodiment of the present invention, increases D=0.5mm every time；
Fig. 1 c is the K for repeatedly measuring different samples of the embodiment of the present invention with D variation diagram, and each group of shape is same
A sample tests, K is magnetic anisotropy constant, positive and negative to characterize the direction of magnetization.
Fig. 2 is the normalized Ke Er loop line of the different single layer substrates of the embodiment of the present invention；
Fig. 3 is the normalization Ke Er curve of the permalloy of the different-thickness of the embodiment of the present invention；
Fig. 4 is the identical thickness and power of the embodiment of the present invention, and the normalization Ke Er of permalloy turns under different curvature
Angle；
Fig. 5 is on the binding and layout paper in r ≈ 9mm of the embodiment of the present invention, respectively in power (a) 200W, (b) 150W, (c)
The permalloy of 50nm is prepared under 50W, (d) 30W；
Fig. 6 a is the photo of exposure mask on the binding and layout paper of the embodiment of the present invention, exposure mask width 1mm；
Fig. 6 b is the configuration diagram that the exposure mask of the embodiment of the present invention sputters；
Fig. 6 c is the normalization Ke Er curve along X-axis and Y-axis of the D=7mm of the embodiment of the present invention；
Fig. 6 d is the experimental data and matched curve of the D=7mm of the embodiment of the present invention；
Fig. 6 e is the normalization Ke Er curve along X-axis and Y-axis of the D=0mm of the embodiment of the present invention；
Fig. 6 f is the experimental data and matched curve of the D=0mm of the embodiment of the present invention；
Fig. 6 g is the design schematic diagram of the industrial upper roller of the embodiment of the present invention；
Fig. 7 is (Si)/Ni of the embodiment of the present invention80Fe20Absorbing medium structural model schematic diagram
Fig. 8 a is the Si that 35nm is deposited on 50nm permalloy of the embodiment of the present invention；
From left to right for the embodiment of the present invention, the Si optical coating of different-thickness, color originates in colourless to bright Fig. 8 b
Yellow arrives purple again and finally arrives sapphirine；
Fig. 9 a is the spraying of the embodiment of the present invention and the schematic diagram for shifting thin magnetic film；
Fig. 9 b is the normalization hysteresis loop of the 50nm permalloy for not spraying hydrophobing agent of the embodiment of the present invention；
Fig. 9 c be the embodiment of the present invention spraying hydrophobing agent after fibrous paper removed after 50nm permalloy normalizing
Change hysteresis loop；
Wherein, BP refers to binding and layout paper.
Specific embodiment
The invention will now be further described with reference to specific embodiments, the advantages and features of the present invention will be with description and
It is apparent.But examples are merely exemplary, and it is not intended to limit the scope of the present invention in any way.Those skilled in the art answer
It should be appreciated that without departing from the spirit and scope of the invention can details to technical solution of the present invention and form repair
Change or replace, but these modifications and replacement are fallen within the protection scope of the present invention.
Embodiment 1:
In a specific embodiment, the side of the magnetic fexible film of preparation direction of magnetization consecutive variations of the invention
Method can be accomplished by the following way, and in the present embodiment, substrate is using flexible binding and layout paper:
(1) cleaning and fixation of flexible binding and layout paper substrates
Binding and layout paper substrates cleaning: using the colored binding and layout paper of common commercial, since common commercial binding and layout paper can not be kept away
Exempt from surface, there are a certain amount of dirts, need to carry out at cleaning binding and layout paper surface to prepare good nano thin-film
Reason.Particularity in view of binding and layout paper is that conventional clean is avoided to damage binding and layout paper bottom fiber element paper, using alcohol
Cotton, which dips alcohol and is wiped repeatedly the mode on binding and layout paper surface, to be reached substrate cleaning and meets plated film requirement.
The fixation of binding and layout paper substrate: since binding and layout paper has sufficiently flexible characteristic, itself does not have certain shapes
The ability of controlling oneself, it is preferable that appropriately sized binding and layout paper is fixed in the r ≈ 9mm curvature of 3D printing production half can be cut
On cylinder plastics supporting body (sample carrier).
(2)Ni80Fe20The preparation of permalloy magnetic nanoscale films
In nano thin-film formation stages, can be carried out using vacuum environment magnetism sputtering mode.Substrate is put into planar magnetic
The vacuum chamber of sputtering system equipment is controlled, base vacuum reaches 10-4After Pa magnitude, using Ni80Fe20Alloy target material passes to 10SCCM
The Ar gas of flow, the Ni of magnetron sputtering deposition 50nm thickness under 0.3Pa operating air pressure80Fe20Magnetic nanoscale films.
(3) magneto-optical kerr measurement is carried out
Ke Er curve is normalized to marginal test along the center of film, each interval about 0.5mm, edge respectively on each point
X-axis and Y-axis are tested and are analyzed, as seen in figure la and lb.It was found that great variety has occurred in the direction of the easy axis of magnetic anisotropy,
Along the stress direction of film to edge-perpendicular in the stress direction of film from center, 90 ° of turn is had occurred in the direction of easy axis
Become.
Embodiment 2:
In the present embodiment, the film of the forming method production based on fexible film proposed by the present invention, examines substrate, thin
The influence of film thickness, curvature, deposition power to the direction of magnetization
(1) different base is to magnetic influence
Under identical curvature (r ≈ 9mm) and power (80W), different-thickness single-part stationery and (respectively 20 μm of plastics are selected
Pan paper, 100 μm of A4 paper, 150 μm of polystyrene and 220 μm of hard card paper) be used as substrate, deposited above identical
Thickness permalloy film, such as 50nm, successively along the direction of stress (i.e. X-axis) and perpendicular to stress direction (i.e. Y-axis) into
Row measurement obtains normalized Ke Er curve, and abscissa is the outfield applied, and ordinate is normalization kerr rotational angle.We have found that
Anisotropy is produced, and the easy axis direction of magnetic anisotropy is each along stress direction, as shown in the comparison in Fig. 2.
(2) different-thickness is to magnetic influence
For identical binding and layout paper substrates, Ni is deposited under equal-wattage (such as 80W) and curvature (r ≈ 9mm)80Fe20It is thin
Film has studied film thickness (from 10nm to 100nm) to magnetic influence, the results showed that when film thickness is arrived in 10nm
Occurs apparent magnetic anisotropy between 50nm and along stress direction.When film thickness be greater than 75nm when, magnetic respectively to
The opposite sex disappears, as shown in Figure 3
(3) different curvature is to magnetic influence
For identical binding and layout paper substrates, deposit Ni under equal-wattage (80W) and film thickness (50nm)80Fe20It is thin
Film has studied curvature (r → ∞, r=9.4mm, r ≈ 9mm and r=5mm) to magnetic influence.When for r → ∞, thin magnetic film
Show isotropism；When sample deposits on curved surface, with the reduction of radius of curvature, anisotropy is gradually increased, such as Fig. 4 institute
Show.
(4) different capacity is to magnetic influence
For identical binding and layout paper substrates, deposited under same curvature (r ≈ 9mm) and film thickness (50nm)
Ni80Fe20Film has studied power (from 30W to 200W) to magnetic influence.The experimental results showed that magnetic is each when power is smaller
Anisotropy is smaller.And power it is excessive when, anisotropy can also reduce.The appearance maximum power of anisotropy is 80W.Either increase
Power is added still to reduce power, anisotropy can all weaken.As shown in Figure 5.
Embodiment 3:
In the present embodiment, giving a kind of industry that method of the invention can be performed can production method.
We carry out exposure mask using paper flexible, only leave the region of deposition, as shown in figure 6 a and 6b.In film
Magnetism at heart D also can accurately be measured in the method for exposure mask.Our centers (O) to sputtering target material in Fig. 6 b, it is bent
The center (O ') of face support and exposure mask center (E) discuss.In the discussion of deposition parameter, it is each to discuss thin film center
The variation of anisotropy.Middle section, that is, OO' is parallel to the center line of target, and with the increase of D, oblique incidence is deposited predominantly
Position.In one embodiment, the model of the target used is φ 60mm, and target and substrate spacing are set as 60mm, and sputter
Region only has 20mm, therefore sputter area is uniform for deposition region.We move anchoring base in production equipment
Curved surface support, be aligned exposure mask center (E) with the center (O) of target, such as Fig. 6 b, in other words, during at this moment masked areas is also
Heart district domain.Such as Fig. 6 c and 6d, for the edge of film, anisotropic easy axis direction is perpendicular to stress direction.We utilize and cut
Knife or icking tool prepare mask plate, and shape is rectangle.The limit of exposure mask is a millimeter rank, and long side is that Centimeter Level is other,
Length-width ratio is greater than 10, this is the size of typical shape anisotropy, and applicant is had found by many experiments, anisotropic
Easy axis direction does not change, and the anisotropy that shape generates here is not main cause, such as Fig. 6 e and 6f (D=
0mm), for central area, anisotropic easy axis is still along the direction of stress.Therefore, by industrially preparing film
General idler wheel technology only changes lower baffle plate with idler wheel center at a distance from, so that it may realize produce the extensive direction of magnetization continuously,
Adjustable thin magnetic film, as shown in Figure 6 f.
Embodiment 4:
In the present embodiment, it is based on technical solution of the present invention, discussing that the color of the fexible film prepared can open up is in
Property.
On a flexible substrate, the exhibition that can realize various colors by depositing optical layers is in.The thickness of optical coating
When (when for example, by using Si) is the integral multiple of incidence wave wavelength, corresponding color is showed.Light can occur more in interference cavity
Grade multiple reflections, with gradually increasing for series, amplitude is gradually weak, and schematic diagram is as shown in Figure 7.Prior art channel syndrome
Real, under suitable condition, there are strong interference effects in high-selenium corn ultra thin optical coating, can show (the application of abundant color
Number CN201610535022.7: a kind of color printing method of ultra-thin semiconductor nano coating additional polarization information).Though binding and layout paper
It is so relatively rough, but capable and experienced relate to (i.e. level-one interference) and still remain.For same sample (r ≈ 9mm), deposits 50nm perm and close
Then gold deposits the Si of 35nm on curved surface, intermediate due to the influence of oblique deposition (i.e. target and substrate is at an angle)
It is different with the thickness at edge, different colors is shown, such as Fig. 8 a and 8b.The deposition region of Selection Center passes through control silicon
Thickness, available color arrives yellow from base coat colour, red finally to arrive sky blue.The experimental results showed that the film that we prepare
The exhibition that can realize various colors in the case where not influencing plant machinery performance is in, and color is constant under wide angle.Easily
Axis is well along its stress direction, and color exhibition is in as shown in Figure 8.We combine the design of idler wheel sputtering, can prepare
Same color large area thin magnetic film.Magneto-optic effect can be enhanced in this thin magnetic film, can also be carried out using color science to it
Fitting.Based on this, we can be designed that magnetic and color dual coding, be applied to it is anti-fake, and its color wide angle not
Become.In addition to this it is possible to be applied to printing and drawing etc..
Embodiment 5:
In the present embodiment, it is based on technical solution of the present invention, the magnetic transferability of fexible film is discussed.
In actual application, fibrous paper is particularly easy to wear, and with poor hydrophobicity and is easy by environment
The shortcomings that influence.In order to overcome these disadvantages, we have proposed a kind of methods: binding and layout paper is by upper layer PVC (that is: polyvinyl chloride, English
Literary full name: Polyvinyl chloride) and lowermost fibre paper composition, the fibrous paper of lower layer is removed, while also ensuring slope
The not magnetic stabilization of alloy, as illustrated in fig. 9.It is most hot in recent decades that super hydrophobic surface, which is made, by new material or Meta Materials
One of the topic of door.We spray hydrophobic material (for example, by using the hydrophobic of OLB company on the binding and layout paper surface of deposition permalloy
Material), it is about 2 hours dry by the method for spraying, thin magnetic film is shifted.New coating can be very good to protect
The initial pattern for protecting the film of permalloy, can also be to PVC (that is: polyvinyl chloride, full name in English: Polyvinyl
Chloride it) plays a supporting role, can also prevent mantle friction and environment from influencing.Utilize vibrating specimen magnetometer
The whole magnetism of (Vibrating Sample Magnetometer) measurement, the central area of selection about~5 × 2mm2.I
Find spraying after magnetic attribute and spraying before magnetic attribute have almost no change, such as Fig. 9 b and 9c.In addition to this, contact is utilized
Angle measuring instrument (Biolin, AAN11455) measurement infiltration angle, about 142 °, as is shown in fig. 9 c.Therefore, a kind of thin super-hydrophobic
Coating significantly improves the environmental suitability of sample, while not losing its space compatible and magnetism again.Ultralight (2.4mg/cm2)
The thin magnetic film of ultra-thin (30 μm) has superelevation magnetic susceptibility.In the solution, thin magnetic film is under downfield even earth's magnetic field
Can be with displacement, which has certain meaning to the movement of nanometer-in a liquid/Micro-Robot.
Embodiment 6:
In another embodiment, method of the invention can also prepare a kind of fexible film, and the fexible film includes
Substrate, magnetic nanoscale films, the fexible film is using the regulation fexible film local magnetization side as described in embodiment 1-5 is any
To method be prepared.
In addition, method of the invention can also assist preparing fexible film device, the device includes fexible film, described
Fexible film includes substrate, magnetic nanoscale films, and the fexible film is using the regulation flexible thin as described in embodiment 1-5 is any
The method of the film local direction of magnetization is prepared.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify to technical solution documented by previous embodiment or equivalent replacement of some of the technical features；And
These are modified or replaceed, the spirit and model of technical solution of the embodiment of the present invention that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (11)
1. a kind of method of the regulation fexible film local direction of magnetization, which comprises the following steps:
S1, flexible substrates are cleaned, and bending fixation is carried out with a curvature, form substrate；
S2, magnetic nanoscale films are formed by magnetron sputtering mode on the substrate；
The magnetic nanoscale films prepared in S3, flattening S2, the fexible film at acquisition center to edge direction of magnetization consecutive variations.
2. the method according to claim 1, wherein the flexible substrates have plastic deformation layer in upper layer under
The composite construction of layer local support layer.
3. according to the method described in claim 2, it is characterized in that, the flexible substrates be binding and layout paper, parchamyn paper, tectorial paper,
Leaching membrane paper crosses modeling paper, crosses modeling paper, pan paper, A4 paper, polystyrene or hard card paper.
4. the method according to claim 1, wherein the thin magnetic film substance includes: iron, cobalt, nickel, and
Alloy comprising above-mentioned substance.
5. the method according to claim 1, wherein in magnetron sputtering in the S2, deposition power be 50W~
200W, base vacuum maintain 10-4Pa, working gas Ar, gas flow are as follows: 10sccm, sputtering operating air pressure are 0.3Pa.
6. the method according to claim 1, wherein the thin magnetic film substance is common Ni80Fe20Perm
Alloy.
7. the method according to claim 1, wherein the fexible film is with a thickness of 10~100nm, the base
Bottom bending curvature is 5~9.4mm.
8. the method according to claim 1, wherein in the magnetron sputtering of the S2, using flexible material into
Line mask only leaves deposition region, by adjusting fexible film center at a distance from target center, realizes fexible film local magnetic
Change the regulation in direction.
9. according to the method described in claim 2, it is characterized in that, when the fexible film carries out magnetic transfer, by lower layer
The removing of local support layer fibrous paper, spray hydrophobic material on the magnetic nanoscale films surface of deposition, and be dried, do
Thin magnetic film is shifted after dry.
10. a kind of fexible film, the fexible film includes substrate, magnetic nanoscale films, which is characterized in that the fexible film
It is prepared using the described in any item methods of claim 1-9.
11. a kind of fexible film device, which is characterized in that the device includes fexible film, the fexible film include substrate,
Magnetic nanoscale films, which is characterized in that the fexible film is prepared using the described in any item methods of claim 1-9.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112497952A (en) * | 2020-11-13 | 2021-03-16 | 中钞特种防伪科技有限公司 | Magnetic anti-counterfeiting element and magnetic anti-counterfeiting product |
| CN113684450A (en) * | 2021-08-24 | 2021-11-23 | 内蒙古大学 | Film super-sensitive to small-angle change and preparation method and application thereof |
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| CN113684450A (en) * | 2021-08-24 | 2021-11-23 | 内蒙古大学 | Film super-sensitive to small-angle change and preparation method and application thereof |
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