CN110006378A - A kind of structure detection method - Google Patents

A kind of structure detection method Download PDF

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Publication number
CN110006378A
CN110006378A CN201910039017.0A CN201910039017A CN110006378A CN 110006378 A CN110006378 A CN 110006378A CN 201910039017 A CN201910039017 A CN 201910039017A CN 110006378 A CN110006378 A CN 110006378A
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China
Prior art keywords
detected
workpiece
data
detecting head
axis
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CN110006378B (en
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陈文波
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Suzhou Roy Amy Precision Industry Co Ltd
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Suzhou Roy Amy Precision Industry Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Structure detection method disclosed by the invention includes at least following steps, obtains the basic data of workpiece to be detected and the verification data as standard;Based on basic data, initial model is constructed;According to initial model, calculating detecting head is realization continuous probe, and the motion profile with workpiece relative motion to be detected;When being detected, the position of detecting head is set, architecture system drives workpiece to be detected, runs detecting head according to motion profile, and carries out the coordinate point data that detection obtains test point on workpiece to be detected;According to the coordinate point data obtained, the model of workpiece to be detected is constructed, is compared with verification data, obtains test result.The method of the present invention obtains continuous motion profile when detecting head detection by calculating, it can be realized direct one-shot measurement, selection detection angle and direction are repeatedly retracted in the form of increasing investigation depth without using, the efficiency of detection and the precision of detection are improved, and reduces system data processing difficulty.

Description

A kind of structure detection method
Technical field
The present invention relates to a kind of structure detection method, especially a kind of pair of labyrinths especially to have complicated inner cavity structure The detection method that is detected of component.
Complicated inner cavity structure refer mainly to unconventional form, include but not limited to such as long arc shape, multistage combination knot The non continuous smoothness structure such as structure.
Background technique
As a kind of important detection instrument, three coordinate measuring machine is widely used in machinery, automobile, aviation, military project etc. In industry, test object may include cabinet, rack, gear, cam, worm gear, worm screw, blade, curve, curved surface, various tools Middle-size and small-size accessory of prototype, machine etc., can size to workpiece, shape and geometric tolerance carry out Precision measurement, to complete zero The tasks such as part detection, shape measurement, process control.The structure of three coordinate measuring machine is led in three mutually orthogonal directions To mechanism, long element, digital display device are surveyed, has the workbench that can place workpiece, measuring probe can be with manual or motor-driven Mode is moved on measured point, is set by a kind of measurement that reading device and digital display device show the coordinate value of measured point It is standby.As shown in Figure 1, in general, the measuring probe of three coordinate measuring machine is fixed in the mechanism of moving guide rail, to labyrinth, When especially measuring complicated inner cavity structure, need measuring probe repeatedly to stretch while with close angle according to existing technology Degree adjustment, that is, when measurement, need on certain direction to put in measuring probe inner cavity and carry out detect operation, once visiting After the completion of survey, detecting head retracts original position, and adjustment direction puts in inner cavity again and carries out new detect operation, repeats this operation, until Complete detection operations.Existing this measurement method needs for test job to be divided into multiple sections to measure operation, and Each section of operation coordinate point data obtained, it is also necessary to measuring head data adjusted to be corrected, then this is more Section coordinate points carry out splicing integration, could form complete measurement result model.This measurement method is complicated for operation, is easily formed Dead angle is measured, and is to need biggish calculation amount in model foundation, the building efficiency of DATA REASONING and model can be seriously affected.
Summary of the invention
To solve the above problems, the invention discloses connect when a kind of structure detection method obtains detecting head detection by calculating Continuous motion profile, so that detecting head when especially complicated inner cavity structure is detected, can be realized directly to labyrinth One-shot measurement repeatedly retracts selection detection angle and direction in the form of increasing investigation depth without using, improves detection Efficiency and detection precision, and reduce system data processing difficulty.
Structure detection method disclosed by the invention includes at least following steps,
Obtain the basic data of workpiece to be detected and the verification data as standard;
Based on basic data, constructing initial model, (initial model includes but not limited to be obtained based on complete basic data The complete model that takes or the department pattern established based on partial data or emphasis data and the emphasis model etc. established);
According to initial model, calculating detecting head is realization continuous probe, and the movement rail with workpiece relative motion to be detected (this running track includes being not limited to workpiece to be detected in five-axle linkage environment to mark, and stable detecting head joins relative to five axis The workpiece to be detected of dynamic driving, the track passively run;Three-shaft linkage or it is four-axle linked when, participate in linkage detecting head it is opposite In three-shaft linkage or the workpiece to be detected of four-axle linked driving), and then obtain the active operating parameter of architecture system;
When being detected, the position of detecting head is set, architecture system drives workpiece to be detected, makes detecting head according to movement Track operation, and carry out the coordinate point data that detection obtains test point on workpiece to be detected;
According to the coordinate point data obtained, the model of workpiece to be detected is constructed, inspection data can be obtained accordingly and (at least wrapped Include shape data and/or dimension data and/or Tolerance Data), it is compared with verification data, obtains test result.
A kind of improvement of structure detection method disclosed by the invention, basic data are the complicated inner cavity structure of workpiece to be detected Shape data and/or dimension data.
Another improvement of structure detection method disclosed by the invention, basic data are the structural parameters of workpiece to be detected And/or machined parameters.
The further improvement of structure detection method disclosed by the invention, structural parameters are the drawing before work pieces process to be detected Layout design before the Preliminary detection data or integrated correction of design data or workpiece to be detected work pieces process to be detected The secondary data of data and Preliminary detection data.
The further improvement of structure detection method disclosed by the invention, quadratic parameter are the drawing before work pieces process to be detected The median of design data and Preliminary detection data.
The further improvement of structure detection method disclosed by the invention, verification data include at least shape data and/or ruler Very little data and/or Tolerance Data.
A kind of improvement of structure detection method disclosed by the invention, architecture system include at least work piece platform and position Regulating system, wherein;
Work piece platform, for limiting workpiece to be detected, and under the driving of position regulating system, make workpiece to be detected to Searching surface is subjected to displacement relative to detecting head;
Position regulating system, under the control of position control instruction, control position regulating system to drive workbench On workpiece to be detected be subjected to displacement according to desired guiding trajectory.
Another improvement of structure detection method disclosed by the invention, position regulating system according to X-axis and/or Y-axis and/or Z axis and/or A axis and/or B axle drive workbench, and the workpiece to be detected on driving is subjected to displacement according to desired guiding trajectory.
Another improvement of structure detection method disclosed by the invention, position regulating system to workbench in X-axis and/or The driving of Y-axis and/or Z axis and/or A axis and/or B axle, respectively by least any for driving force in servo-system, bearing arrangement System provides driving force.
It should be noted that X-axis, Y-axis, Z axis, A axis, B axle refer both to universal driving shaft in the present invention program, rather than to main in lathe The restriction of axis total amount.
Another improvement of structure detection method disclosed by the invention, Driving force system are air bearing (further, sky Gas bearing be high-precision air bearing, as its speed of mainshaft be it is 100,000 turns per minute, rotating accuracy is 0.5 micron).
Its implementation of the method for the present invention can also be by including but not limited to that following scheme is implemented.
Structure detection system disclosed by the invention includes at least detection system, architecture system and control system, wherein
Detection system includes at least detecting head, for workpiece coordinate acquisition point data to be detected;
And architecture system, include at least work piece platform and position regulating system;
Work piece platform, for limiting workpiece to be detected, and under the driving of position regulating system, make workpiece to be detected to Searching surface is subjected to displacement relative to detecting head;
Here work piece platform can be fixture form, and the limitation to workpiece to be detected is realized by the clamping of several fixtures It is fixed;Workpiece to be detected can also be restricted to platform structure (such as plank frame, stepped construction, slope formula knot using platform-type Structure etc., specifically can be depending on workpiece to be detected) on, it is support with platform structure;It can also be suspended structure, by vertical Workpiece to be detected is carried out suspension limitation by the hanger bracket of direction or inclined direction, and the specific direction that hangs is then workpiece to be detected Geomery and selected with the relative position of detecting head;By the selection of suitable workbench, can optimize to The motion track of workpiece is detected, convenience is provided according to track movement in the lumen for detecting head, to improve detection efficient and keep away Exempt from detection dead angle occur;
Position regulating system, under the control of position control instruction, control position regulating system to drive workbench On workpiece to be detected be subjected to displacement according to desired guiding trajectory;
And control system, it is at least used to receive the coordinate point data of detection system feedback and calculates acquisition workpiece to be detected Geometrical structure parameter and/or for issue position control instruction be subjected to displacement workpiece to be detected according to desired guiding trajectory;
The coordinate data that control system can obtain for detecting head provides storage, model construction calculates and is according to track The movement that position regulating system controls workpiece to be detected provides control and supports, that is, uses single control system for multitask Control is provided to support;It can also be position regulating system control by coordinate data storage, calculating, model construction etc. and according to track The movement for making workpiece to be detected provides control and is divided into multiple independent control systems (control unit, as used with muti-piece difference PLC Mould group is that the control system of core is single control unit, to be provided respectively the control work of each system by multiple units Support), specific selection selects etc. depending on data volume, calculation amount and control complexity.
A kind of improvement of structure detection system disclosed by the invention, detection system are provided at least one detecting head;Here Detection system setting detecting head, can be one, thus in the detection process detecting head can at least position adjust be System X-axis and/or Y-axis and/or Z-direction are rotated;Multiple detecting heads, such as 3 detecting head difference can also be respectively set Corresponding to position regulating system X-axis and/or Y-axis and/or Z-direction, realizes that multiple spot is multi-direction and detect simultaneously.Furthermore most important It is that by this scheme, can also combine and (as formed phasor coordinate, be combined with detection data) with track, coordinate origin etc., Modeling coordinate is quickly and efficiently formed, to realize rapid modeling.
Another improvement of structure detection system disclosed by the invention, detecting head are acoustic detection head (such as with ultrasonic wave Sound wave or its pulse are the detecting head for detecting medium) or electromagnetic wave detection head (such as with laser, radio wave, microwave, infrared The electromagnetic waves such as line, visible light, ultraviolet light or its pulse are the detecting head for detecting medium) or mechanical perception detecting head (such as contact Sensing type detecting head) or (can also will be a variety of using in sound wave, electromagnetic wave, mechanical perception at least two polynary detecting head Same direction is arranged in detecting head using different detection media parallel, improves detection accuracy rate or adaptation not to be mutually authenticated With detection medium without replacement detecting head, such as under oil, underwater, under air, fog, steam varying environment detection; Also it can be set in different directions).
The further improvement of structure detection system disclosed by the invention, detecting head are Renishaw Probes.
A kind of improvement of structure detection system disclosed by the invention, position regulating system is in X-axis and/or Y-axis and/or Z axis Workpiece to be detected on direction driving workbench is subjected to displacement according to desired guiding trajectory.
Another improvement of structure detection system disclosed by the invention, position regulating system is in X-axis and/or Y-axis and/or Z Axis direction provides driving force by least any in servo-system, bearing arrangement respectively for Driving force system.
The Driving force system of the present invention program refers to empty with servo motor/linear motor, high-precision bearing system, high-precision Gas bearing etc. is power source, cooperates guide rail platforms of materials such as the natural high-precision granite of grating scale, low-heat deformation coefficient etc. Technology realizes the high-precision control of system.It needs to be particularly limited to, the related testing agency of the present invention program is not explicitly defined With the technical solution pointed out, can be given using the prior art completely, to realize normal implement.
The further improvement of structure detection system disclosed by the invention, Driving force system are air bearing (further, sky Gas bearing be high-precision air bearing, as its speed of mainshaft be it is 100,000 turns per minute, rotating accuracy is 0.5 micron).
A kind of improvement of structure detection system disclosed by the invention, workpiece to be detected, with inner-cavity structure (as complicated Inner-cavity structure includes but not limited to the inner-cavity structure etc. with curved surface, irregular surface etc.).
The data acquisition of measuring head can acquire for point data, or continuous path data acquisition etc..
It passes through fixed detecting head (can be directly using detecting head as coordinate origin when coordinate calculates) to the present invention, into And the machined parameters in the process of inner cavity is cooperated to be formed by the primary mold etc. of model or measured in advance, to calculate The motion track of detecting head in the lumen (can carry out motion track using detecting head as coordinate origin at this time when measuring out Vector calculates, and then carries out vector calculus to detection coordinate points, complete continuous coordinate data is formed, to reduce modeling The difficulty of data operation and integration), determine the operating parameter of workpiece to be detected when detecting, when test and make workpiece to be detected by It is run according to parameter, detecting head is made to carry out complete continuous measurement according to track in the lumen when measuring operation, which achieves One-shot measurement in manufacturing limit, that is to say, that as long as the inner cavity that machine tool can complete the process may be implemented in this programme, Motion track can be designed and realize one-shot measurement, to avoid the prior art using repeatedly flexible detecting head and change its side To and the form that carries out segmentation detection reduces Modeling Calculation amount to improve the connecting of data.
Detailed description of the invention:
The schematic diagram of Fig. 1, a kind of prior art of the invention;
Fig. 2, the present invention program a kind of embodiment 1 schematic diagram of state;
Workpiece to be detected is rotated to obtain by 2 schematic diagram of state of Fig. 3, embodiment, state 2 by state 1 by shown direction;
The schematic diagram of another embodiment five-axle linkage of Fig. 4, the present invention program, wherein X-axis, Y-axis, Z axis refer to its work Make platform in the shifting axle of system in three-dimensional space;A axis refers to workbench rotary shaft in the horizontal direction;B axle refers to workbench Embedded platform axis of rotation, for the normal axis perpendicular to workbench (or its A axis).
Reference signs list:
1, workpiece to be detected;2, complicated inner cavity structure;3, detecting head;4, the detecting head moving direction of the prior art;5, it visits Measuring point C and its radial corresponding points C ';6, the moving direction of workpiece to be detected of the invention;21, workbench;22, it embeds flat Platform.
Specific embodiment
Specific embodiment below, the present invention is furture elucidated, it should be understood that following specific embodiments are merely to illustrate this It invents rather than limits the scope of the invention.
The implementation of the present invention program can be implemented by following technological means, be with the workpiece to be detected with complicated inner cavity Example, situation as shown in Figure 2, Figure 3, Figure 4 are only used as used in example, and not as to the present invention claims the restrictions of range:
After the completion of the work pieces process, the machine toolings such as its machining drilling machine, milling machine, boring machine, grinding machine diagram inner cavity is obtained Machined parameters (including be not limited to feed parameter, rotation parameter, load parameter etc.), at least inner-cavity structure is initially modeled, To obtain the original state of geodesic structure to be checked and carry out measuring and calculating assessment to it.After the completion of assessment, detecting head is determined by calculation and exists (continuous path is used only at least detecting head and detected entirely the continuous path passively run when detecting in the inner-cavity structure The set of paths passively run in journey, and be not necessarily referring to the detecting head and be in the state continuously moved always).Again simultaneously for the track In conjunction with the shape data of workpiece to be detected, the parameter of especially fixed position is (when such as by being fixed with method of clamping, with bite For reference coordinate point, shape data model foundation is carried out), and then obtain in test process and run in entire workpiece to be detected When, system of processing active operating parameter (moving parameter of moving parameter and/or Y direction including at least X-direction and/ Or Z-direction moving parameter and/or workbench around A axis rotation parameter and/or embedded platform around B axle rotation parameter). To make the running track of detecting head in detection process match with the running track obtained is calculated, to complete entirely to detect work The continuous operation of work.After the completion of detection, detection data is integrated, completes modeling, and compare with verification data, acquisition includes The test result of geomery, machining tolerance etc., and then whether judge workpiece to be detected meets processing request.Using this The modeling efficiency of kind scheme is estimated to be able to ascend 5-10% or more, it is contemplated that main contributions are since fixed detecting head is as coordinate Origin, and by movement locus vector, and then be conducive to detect the calculating of coordinate and the foundation of model, while this technology is primary Detection, eliminates the multiple technology and model splicing of traditional technology.
It includes but not limited to following scheme that it, which is embodied and can use:
Wherein, detection system includes detection system, architecture system and control system, and detection system is obtained by detecting head The coordinate point data of sensing point, it (includes that it is embedded flat when workbench five-axle linkage that construction system, which then passes through mobile working platform, Platform) and/or detecting head (detecting head 3 is only three axis or four-axle linked (four-axle linked for except X-axis, Y-axis, Z axis in workbench Further include rotation of the workbench around A axis or B axle outside direction) Shi Yunhang), wherein coordinated operation parameter (includes at least X-direction Moving parameter and/or Y direction moving parameter and/or Z-direction moving parameter and/or around A axis rotation parameter and/ Or the rotation parameter around B axle), to make detecting head run according to track relative to workpiece to be detected, to continuously be visited The coordinate point data of measuring point, control system are based on coordinate point data and complete model construction, form the shape and structure of labyrinth, obtain Obtain related physical size, shape information.
Detection system, including detecting head 3 when the detecting head 3 is contactless, by way of detection medium scanning, obtain Take the coordinate point data of sensing point;When the detecting head 3 is contact, more sensing points are contacted, to obtain the coordinate points of sensing point Data.Contactless detecting head includes but not limited to optical scanner detecting head, ultrasonic scanning detecting head etc., is specifically as follows It include but not limited to SP25M gauge head, SP600 gauge head, SP80 gauge head etc..The detecting head of contact includes but not limited to machinery pressure Power gauge head, piezoelectric ceramics gauge head, optics triggering gauge head, mechanical triggering gauge head etc., being specifically as follows includes but not limited to that TP20 is surveyed Head, TP200 gauge head, TP6 (A) gauge head, TP7M gauge head, OTP6M gauge head, TP2/TP1S (M) gauge head etc..
Architecture system supports workpiece to be detected according to the fortune of scheduled parameter by workbench and position regulating system Row, thus run detecting head according to track in the detection process, as long as to it realize in the machine tooling limit Detecting head, which is adjusted, by the track realizes primary detection.
Workbench is that the part treated detection piece in system and carry out limitation carrying can be driven when detecting by carrying It moves and workpiece to be detected is followed to run.This platform can be holding frame form, limit work to be detected by holing clip clamping Part, holding frame when detecting, is moved under the driving of position regulating system according to parameter, to make detecting head 3 according to rail Mark operation completes detection and obtains coordinate data, and this form structure is simple, and overall weight is low, and detection process is not vulnerable to sky Between structure interference limitation.Or it is desk-top, i.e., workpiece placement to be detected is carried on platform and is limited, and holding frame exists It when detection, is moved under the driving of position regulating system according to parameter, so that detecting head 3 be made to run according to track, is completed Detection obtains coordinate data, and the stability of this form is good, and bearing capacity is strong, is suitable for large scale or heavy weight workpiece. Can also to be underslung, i.e., workpiece to be detected by the limitation of the suspension types such as hanger bracket, holding frame when detecting, in position tune It is moved under the driving of section system according to parameter, so that detecting head 3 be made to run according to track, completes detection and obtain number of coordinates According to this form has preferable anti-interference and data stability.
Position regulating system to support part to be detected to run according to parameter in system, and realizes detecting head according to track The power support device of operation.
As an implementation, position regulating system its may include sliding equipment, the base end side of workbench is simultaneously And workbench sliding movement can be made;And driving mechanism, make workbench mobile by driving sliding equipment.Sliding Mechanism can be in bis- directions in bis- directions in two directions horizontal X-Y or vertical X-Z or vertical Y-Z or three-dimensional X-Y- Z-direction can be said to be the rotation parameter and/or embedded platform that can drive workbench around A axis according to operating parameter movement Around the rotation parameter of B axle, when operation, meets the detecting head 3 detected in the workpiece to be detected of workbench support according to default Track is passively run, and measurement is completed.
Control system, the coordinate data that one side can be obtained according to detecting head 3 are completed to be checked by computation modeling The geometry models building of part is surveyed, and obtaining includes but not limited to dimensional accuracy, positioning accuracy, geometric accuracy and contour accuracy Equal workpiece qualities assess data, to determine that the processing quality of workpiece provides foundation.It on the other hand, can also be according to part to be detected Primary mold of process data or measured in advance etc. calculates running track of the detecting head 3 in complicated inner cavity, workbench (workbench is that the operating parameters of three-shaft linkage situation detecting head 3 are only this hair to the operating parameters of operating parameters and/or detecting head 3 Necessary to bright scheme) etc. calculating.In another aspect, control service etc. can also be provided for workbench in detection.These The realization of function can be realized by triangular web (such as same or several pieces of integrated chips), can also be distributed to several systems (such as several independent chip systems) is realized respectively.
As shown in Figures 2 and 3, for the workpiece to be detected 1 with complicated inner cavity structure, in order to detect its complicated inner cavity knot Structure 2 determines its processing quality (including processing dimension and machining accuracy), if meet processing request.In the prior art, it needs Detecting head 3 is probeed into complicated inner cavity structure 2 along moving direction 4, detects sensing point C, and its radial corresponding points C ' is then biography The not detectable regions of this detection of system detection method need to exit detecting head 3 and again adjustment period position to radial direction corresponding points C ' Set again detection can.And this technology is then when encountering complicated inner cavity structure 2 as shown in the figure, it can be in movement work to be detected Part 1 increase detecting head 3 while the investigation depth of complicated inner cavity structure 2, cooperate moving direction 6 movement, thus make to Detection work 1 is in state shown in Fig. 3, to realize the one-time detection to sensing point C and its its radial corresponding points C ', similarly It is equally applicable to the detection of other points and its corresponding points, as long as according to motion control parameter to work piece platform and/or detecting head Linkage.This, which allows for this technology, may be implemented in the machine tooling limit, visit according to desired guiding trajectory parameter is passively mobile Gauge head 3 realizes primary detection.
One of embodiment is that when using contact type probe, position regulating system passes through each axis to X, Y, Z axis Direction apply force to bearing workbench so that it is positioned at specified position, and in the case where applying external force, detecting head 3 with answer In the case that miscellaneous inner-cavity structure 2 abuts, stylus can be moved along each axis direction of X, Y, Z axis in a certain range.
Furthermore detecting head 3 has X-axis gauge head sensor, Y-axis gauge head sensor and the Z axis survey in the position of each axis direction Head sensor.In addition, each sensor has output with detecting head 3 in the position of the corresponding pulse signal of amount of movement of each axis direction Sensor.
Another embodiment is, as shown in figure 4, having the workbench 21 of embedded platform 22, wherein embedded platform 22 Upper to place workpiece 1 to be detected, in the detection process, workbench 21 is under the driving of position regulating system according to detecting head 3 Detection demand runs it passively in complicated inner cavity structure 2 according to desired guiding trajectory.The movement of workbench 21 may include The linkage that X axis, Y-axis, the movement of Z-direction and workbench 21 are rotated around A axis, inner cavity platform 22 is rotated around B axle.Exactly By this linkage, the detection to complicated inner cavity is realized.This is the five-axle linkage situation of workbench.
Another embodiment is that workpiece 1 to be detected, in the detection process, workbench 21 are placed on workbench 21 And detecting head 3 under the driving of respective power according to preset kinematic parameter, to meet the detection need of detecting head 3 It asks, runs it passively in complicated inner cavity structure 2 according to desired guiding trajectory.The movement of workbench 21 may include in X-axis, Y The movement of axis, Z-direction;Furthermore detecting head 3 is rotated around the rotation of A axis, inner cavity platform 22 around B axle, and is formed with workbench 21 Linkage.It is exactly based on this linkage, realizes the detection to complicated inner cavity.This is the three-shaft linkage situation of workbench.
Driving of the position regulating system on the directions such as X-axis, Y-axis, Z axis, A axis, B axle, by servo-system (such as according to instruction The kinematic system of the servo motor driving of operation) each axis direction as power along X, Y, Z, A, B axle moves and/or rotary work Platform, to realize the passive movement of detecting head;Can also by air bearing as power along each axis side of X, Y, Z, A, B axis To mobile or rotary working platform, to realize the passive movement of detecting head.
Certainly same direction can by cover more dynamical system (such as more set servo-systems, cover air-bearing system and The two servo-system and air-bearing system etc.) parallel connection and improve system operation safety and stability.Certainly this In the process, it can also mutually be calibrated by more set systems, and reduce the error of the operation of system.
This place embodiment is not exhaustive claimed midpoint of technical range and in embodiment technology In scheme to single or multiple technical characteristics it is same replacement be formed by new technical solution, equally all the present invention claims In the range of protection;Simultaneously the present invention program it is all enumerate or unlisted embodiment in, in the same embodiment each Parameter is merely representative of an example (i.e. a kind of feasible scheme) for its technical solution, and between parameters and is not present stringent Cooperation and qualified relation, wherein each parameter can be replaced mutually when stating and asking without prejudice to axiom and the present invention, special declaration Except.
The technical means disclosed in the embodiments of the present invention is not limited to the technical means disclosed in the above technical means, and further includes Technical solution consisting of any combination of the above technical features.The foregoing is a specific embodiment of the present invention, should refer to Out, for those skilled in the art, without departing from the principle of the present invention, can also make several Improvements and modifications, these modifications and embellishments are also considered to be within the scope of the present invention.

Claims (10)

1. a kind of structure detection method includes at least following steps,
Obtain the basic data of workpiece to be detected and the verification data as standard;
Based on basic data, initial model is constructed;
According to initial model, calculating detecting head is realization continuous probe, and the motion profile with workpiece relative motion to be detected, into And obtain the active operating parameter of architecture system;
When being detected, the position of detecting head is set, architecture system drives workpiece to be detected, makes detecting head according to motion profile Operation, and carry out the coordinate point data that detection obtains test point on workpiece to be detected;
According to the coordinate point data obtained, the model of workpiece to be detected is constructed, is compared with verification data, detection knot is obtained By.
2. structure detection method according to claim 1, which is characterized in that the basic data is the interior of workpiece to be detected The shape data and/or dimension data of cavity configuration.
3. structure detection method according to claim 1 or 2, which is characterized in that the basic data is workpiece to be detected Structural parameters and/or machined parameters.
4. structure detection method according to claim 3, which is characterized in that the structural parameters are work pieces process to be detected Before the Preliminary detection data of preceding layout design data or workpiece to be detected or integrated correction work pieces process to be detected The secondary data of layout design data and Preliminary detection data.
5. structure detection method according to claim 4, which is characterized in that the quadratic parameter is work pieces process to be detected The median of preceding layout design data and Preliminary detection data.
6. structure detection method according to claim 1, which is characterized in that the verification data include at least shape data And/or dimension data and/or Tolerance Data.
7. structure detection method according to claim 1, which is characterized in that the architecture system is flat including at least workpiece Platform and position regulating system, wherein;
Work piece platform makes the to be detected of workpiece to be detected for limiting workpiece to be detected, and under the driving of position regulating system Surface is subjected to displacement relative to detecting head;
Position regulating system, under the control of position control instruction, control position regulating system to be driven on workbench Workpiece to be detected is subjected to displacement according to desired guiding trajectory.
8. structure detection method according to claim 7, which is characterized in that the position regulating system according to X-axis and/or Y-axis and/or Z axis and/or A axis and/or B axle drive workbench, and the workpiece to be detected on driving occurs according to desired guiding trajectory Displacement.
9. structure detection method according to claim 7 or 8, which is characterized in that the position regulating system is flat to work Platform X-axis and/or Y-axis and/or Z axis and/or A axis and/or B axle driving, respectively by least appointing in servo-system, bearing arrangement One provides driving force for Driving force system.
10. structure detection method according to claim 9, which is characterized in that the Driving force system is air bearing.
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