CN109976098A - A kind of photoresist cutter head - Google Patents
A kind of photoresist cutter head Download PDFInfo
- Publication number
- CN109976098A CN109976098A CN201910222344.XA CN201910222344A CN109976098A CN 109976098 A CN109976098 A CN 109976098A CN 201910222344 A CN201910222344 A CN 201910222344A CN 109976098 A CN109976098 A CN 109976098A
- Authority
- CN
- China
- Prior art keywords
- surge chamber
- pressure
- photoresist
- bit body
- cutter head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 37
- 239000007788 liquid Substances 0.000 claims abstract description 78
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 239000011248 coating agent Substances 0.000 claims abstract description 21
- 230000003139 buffering effect Effects 0.000 claims abstract description 8
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 239000007921 spray Substances 0.000 claims description 7
- 239000000243 solution Substances 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 claims description 4
- 239000013589 supplement Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000005507 spraying Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012788 optical film Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000007115 recruitment Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Abstract
The present invention discloses a kind of photoresist cutter head, including bit body, surge chamber and controller, surge chamber is provided with pressure-regulating device and liquid outlet, pressure-regulating device includes adjusting branch pipe, pressure detector and two-way liquid pump, one surge chamber is installed in the hollow structure of bit body, and the one side wall of surge chamber and the one side wall of bit body are co-walled, while opening up liquid outlet on the side wall, and pressure detector is installed at equal intervals, convenient for being detected to the pressure for buffering indoor different parts.If the pressure value detected on some position is excessively high or lower, then photoresist liquid is pumped by two-way liquid pump to be delivered in the surge chamber at the position through overregulating branch pipe, so that the pressure value in surge chamber on each position is maintained in a certain range value, and the value range can be by manually being set.Therefore, in coating, the photoresist liquid supplied by the liquid outlet on surge chamber is relatively stable, to achieve the effect that even spread.
Description
Technical field
The present invention relates to light blockage coating apparatus field more particularly to a kind of photoresist cutter heads.
Background technique
Optical film and existing protective film or adhesive tape are two kinds of entirely different concepts, and thickness necessary for optical film is equal
Even, surface requirements are dustless, lack crystal point.And the coating technique technique requirement with higher for it, such as: it is required that film obtained
It is thick more uniform, accurate coating process is needed to have hence for coating, and therefrom continuous hair and perfect, then reaches this
The production requirement of close coating process.
In conventional coating process, the medical fluid of coating usually can be because of pressure be uneven everywhere in cutter head, and after causing coating
Film thickness homogeneity deviation it is excessive, and then directly affect coating quality.Cause to occur everywhere on subsequent glass substrate
The different situation of film thin and thick can not Sensitive Apparatus in protective substrate if coating film thickness is too thin；If coating film thickness is blocked up.It is then right
The luminous efficiency of device interferes, and then influences the yield of glass substrate.If also, it is bad there is a situation where being coated with, also can
Load is brought to generate repairing producing line, causes the increase of production cost.
Summary of the invention
For this reason, it may be necessary to provide a kind of photoresist cutter head, coated film thin and thick is easy to happen not to solve existing coating process
One the problem of.
To achieve the above object, a kind of photoresist cutter head, including bit body, surge chamber and controller are inventor provided；
The bit body is hollow structure, and the surge chamber is arranged in the hollow structure of bit body, and the one of the surge chamber
The co-walled setting of the one side wall of side wall and bit body；The surge chamber is provided with pressure-regulating device and liquid outlet, the pressure
Regulating device includes adjusting branch pipe, pressure detector and two-way liquid pump, and described one end for adjusting branch pipe is conducted with surge chamber
Setting, the other end for adjusting branch pipe are connect with the port of two-way liquid pump, and pressure detector is electrically connected with the controller, control
Device is electrically connected with two-way liquid pump, and the pressure detector is arranged in surge chamber；The pressure-regulating device be provided with it is multiple,
Multiple pressure-regulating devices are set in qually spaced on the co-walled lateral surface of surge chamber and bit body；The liquid outlet setting
Have it is multiple, multiple liquid outlets along the height such as same horizontal line the co-walled lateral surface that surge chamber and bit body are set
On.
Further, the length of hollow structure of length and bit body of the surge chamber is identical.
Further, total liquid injection pipe is additionally provided on the surge chamber, total liquid injection pipe is located at surge chamber and cutter head sheet
On the co-walled lateral surface of body.
It further, further include liquid pump, the liquid pump connect setting with total liquid injection pipe, and liquid pump is used for surge chamber
Supplement light blocking solution coating.
It further, further include surge chamber pressure detector, the surge chamber pressure detector is arranged in surge chamber, delays
It rushes chamber pressure force detector and is electrically connected with the controller setting.
Further, the liquid outlet is provided with spray head.
Further, electromagnetic valve, the electromagnetic valve and control are provided on the pipeline between the spray head and liquid outlet
Device electrical connection setting processed.
It is different from the prior art, above-mentioned technical proposal installs a surge chamber in the hollow structure of bit body, and slow
The one side wall of the one side wall and bit body of rushing room is co-walled, while opening up liquid outlet on the side wall, and installation pressure at equal intervals
Force detector, convenient for being detected to the pressure for buffering indoor different parts.If the pressure value mistake detected on some position
It is high or lower, then photoresist liquid is pumped by two-way liquid pump and be delivered in the surge chamber at the position through overregulating branch pipe, in turn
So that the pressure value in surge chamber on each position is maintained in a certain range value, and the value range can be by manually being set
It is fixed.Therefore, in coating, the photoresist liquid supplied by the liquid outlet on surge chamber is relatively stable, to reach even spread
Effect.
Detailed description of the invention
Fig. 1 is the schematic diagram of the bit body of photoresist cutter head described in specific embodiment；
Fig. 2 is the cross-sectional view of the bit body of photoresist cutter head described in specific embodiment；
Fig. 3 is the schematic diagram of photoresist cutter head described in specific embodiment；
Fig. 4 is the circuit diagram of photoresist cutter head described in specific embodiment.
Description of symbols:
10, bit body；11, liquid outlet；101, hollow structure；111, electromagnetic valve；
112, spray head；
20, surge chamber；21, pressure-regulating device；22, branch pipe is adjusted；23, pressure detector；
24, two-way liquid pump；25, total liquid injection pipe；251, liquid pump；
26, surge chamber pressure detector；
30, controller；40, pressure reducing valve；
Specific embodiment
Technology contents, construction feature, the objects and the effects for detailed description technical solution, below in conjunction with specific reality
It applies example and attached drawing is cooperated to be explained in detail.
Fig. 1, Fig. 2, Fig. 3 and Fig. 4 are please referred to, the present embodiment provides a kind of photoresist cutter heads, including bit body 10, surge chamber
20 and controller 30；The model Mitsubishi Q series Q01UCPU controller of controller, bit body are hollow structure 101, buffering
Room is arranged in the hollow structure of bit body.21 pairs of the pressure-regulating device indoor each positions of buffering are used in the present embodiment
Pressure be adjusted so that relatively stable by the photoresist liquid conveyed in liquid outlet 11, reach coordinated control bit body and applying
Liquid outlet quantity when cloth, the film thickness of effective improvement coating on the glass substrate everywhere is identical or in qualified value range, improves
The coating yield of glass substrate.And then reach the characteristic for changing film thickness uniformity stability difference in conventional coating, by each pressure
The two-way liquid pump of the adjusting branch pipe of regulating device controls the photoresist liquid coating weight at each position, effective to improve glass base
The different situation of the thin and thick of film thickness everywhere on plate.
Specifically, installing a surge chamber in the hollow structure of bit body, and the one side wall and bit body of surge chamber
One side wall it is co-walled, it is referred to as co-walled face that this is co-walled in the present specification.Multiple liquid outlets are set at equal intervals on the co-walled face
11, while liquid outlet is along same horizontal distribution, so that via the photoresist liquid exported in surge chamber in sustained height, convenient for adjusting
Control the pressure inside surge chamber.Multiple pressure-regulating devices, multiple pressure-regulating devices are also equipped on the lateral surface in co-walled face
It is mounted on co-walled face at equal intervals also along same horizontal line, allows pressure-regulating device to different parts in surge chamber
Carry out pressure detecting.The length of hollow structure of length and bit body of surge chamber is identical in the present embodiment, therefore passes through
Co-walled face can install pressure-regulating device on the lateral surface of bit body, and open up liquid outlet.
In the side installation and adjustment branch pipe 22 of liquid outlet, adjusting branch pipe is a hose, is used to connect pump and buffering
Room conveys photoresist liquid, and pressure detector 23 is installed on the surge chamber inner sidewall in the hollow structure of bit body, pressure inspection
Survey device is ceramic pressure detector, the pressure detector of model AP681/AP683 series.And the position of pressure detector with
Adjust the opposite of branch pipe, it can be understood as pressure detector and adjusting are in same two end sides for being parallel to bit body by all means
The vertical plane in face.Therefore the pressure value adjusted at branch pipe can be accurately detected, and the signal of the pressure value is fed back into controller
It is interior.By manually setting the pressure limit value of pressure detector, therefore can be detected automatically during bit body is coated with
Photoresist liquid output pressure then opens the two-way liquid pump 24 adjusted on branch pipe if detection pressure is excessive, will be more in surge chamber
Remaining photoresist liquid takes reflux away, back flows back into it in storage tank of liquid-supplying system；If detect insufficient pressure, then open double
The photoresist liquid in storage tank is extracted to liquid pump, increases the photoresist liquid discharge-amount at liquid outlet, the pressure value at liquid outlet
It returns in the range of setting, closes two-way liquid pump at this time, stop to supplement light blocking solution in surge chamber.Reached coating when pair
Buffer the purpose that the pressure at indoor each position is adjusted.
And when for the preparatory process of early period, by pressure-regulating device to each position supplement light blocking solution of surge chamber, together
When, adjusts the pressure value at each position consistent, and the pressure value of whole surge chamber passes through surge chamber pressure detector 26
It is detected, when the pressure value of surge chamber pressure detector detection meets the requirement of coating, that is, controller can be used to be connected out
The electromagnetic valve 111 of pipeline at liquid mouth opens liquid outlet, can carry out spraying operation at any time, completes early period to the standard of surge chamber
Standby work, improves the working efficiency of photoresist cutter head and the quality of coating.
In order to the preparation being efficiently completed before bit body use, in the co-walled face of bit body in the present embodiment
One total liquid injection pipe 25 of upper installation, total liquid injection pipe liquid level hose are used to connect pump and surge chamber conveying photoresist liquid, and total fluid injection
Pipe diameter can be greater than the diameter for adjusting branch pipe.Therefore during beginning preparing, the liquid pump 251 on total liquid injection pipe is opened, is passed through
Liquid pump quickly pumps the photoresist liquid in storage tank to surge chamber, quickly loads surge chamber and completes, and makes surge chamber
Interior pressure value is maintained in the value range of setting.Achieve the effect that reduce the time prepared, and has improved the efficiency of work.And
And it if when the conveying capacity of photoresist liquid is greater than magnitude of recruitment, can also be mended by total liquid injection pipe after the efficiency for improving spraying
It fills, guarantees that bit body is operated normally in coating, avoid coating from interrupting and cause to be coated with undesirable happen.
Spray head 112 can be installed at liquid outlet in the present embodiment, can change the side of the ejection of photoresist liquid by spray head
It is practical to improve its to meet the spraying method of different glass substrates for formula, such as column spraying or shower spraying etc. mode
Property.
In order to improve the safety of photoresist cutter head, it is reserved between surge chamber and the hollow structure of bit body certain
The space of non-tight, and pressure reducing valve 40 is provided on the inner sidewall of the surge chamber in the hollow structure of bit body, work as buffering
When room pressure is extremely excessively high, pressure reducing valve can be washed open by the photoresist liquid in it, so that buffering indoor pressure-reducing, while avoiding cutter head sheet
Body explodes, and effectively ensures the security performance of bit body.
It should be noted that being not intended to limit although the various embodiments described above have been described herein
Scope of patent protection of the invention.Therefore, it based on innovative idea of the invention, change that embodiment described herein is carried out and is repaired
Change, or using equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it directly or indirectly will be with
Upper technical solution is used in other related technical areas, is included within scope of patent protection of the invention.
Claims (7)
1. a kind of photoresist cutter head, it is characterised in that: including bit body, surge chamber and controller；
The bit body is hollow structure, and the surge chamber is arranged in the hollow structure of bit body, and the surge chamber
One side wall and bit body the co-walled setting of one side wall；
The surge chamber is provided with pressure-regulating device and liquid outlet, and the pressure-regulating device includes adjusting branch pipe, pressure inspection
Survey device and two-way liquid pump, described one end for adjusting branch pipe and surge chamber are conducted setting, the other end for adjusting branch pipe and
The port of two-way liquid pump connects, and pressure detector is electrically connected with the controller, and controller is electrically connected with two-way liquid pump, the pressure
Force detector is arranged in surge chamber；The pressure-regulating device is provided with multiple, and multiple pressure-regulating devices are equidistant
It is arranged on the co-walled lateral surface of surge chamber and bit body；
The liquid outlet is provided with multiple, and multiple liquid outlets are along the setting of the height such as same horizontal line in surge chamber and cutter head
On the co-walled lateral surface of ontology.
2. photoresist cutter head according to claim 1, it is characterised in that: the length of the surge chamber and bit body it is hollow
The length of structure is identical.
3. photoresist cutter head according to claim 1, it is characterised in that: be additionally provided with total liquid injection pipe, institute on the surge chamber
Total liquid injection pipe is stated to be located on the co-walled lateral surface of surge chamber and bit body.
4. photoresist cutter head according to claim 3, it is characterised in that: it further include liquid pump, the liquid pump and total fluid injection
Pipe connection setting, liquid pump are used for surge chamber supplement light blocking solution coating.
5. photoresist cutter head according to claim 1, it is characterised in that: further include surge chamber pressure detector, the buffering
Chamber pressure force detector is arranged in surge chamber, and surge chamber pressure detector is electrically connected with the controller setting.
6. photoresist cutter head according to claim 1, it is characterised in that: the liquid outlet is provided with spray head.
7. photoresist cutter head according to claim 6, it is characterised in that: be arranged on the pipeline between the spray head and liquid outlet
There is electromagnetic valve, the electromagnetic valve is electrically connected with the controller setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910222344.XA CN109976098B (en) | 2019-03-22 | Photoresist tool bit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910222344.XA CN109976098B (en) | 2019-03-22 | Photoresist tool bit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109976098A true CN109976098A (en) | 2019-07-05 |
| CN109976098B CN109976098B (en) | 2024-04-12 |
Family
ID=
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05270164A (en) * | 1992-03-26 | 1993-10-19 | Mitsubishi Paper Mills Ltd | Application and treatment apparatus for protecting gum solution |
| CN102189064A (en) * | 2010-03-15 | 2011-09-21 | 东丽工程株式会社 | Coating liquid supply device, coating liquid supply method and buffer tank |
| US20130155380A1 (en) * | 2011-12-20 | 2013-06-20 | Asml Netherlands B.V. | Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method |
| CN207052580U (en) * | 2016-08-25 | 2018-02-27 | 东京毅力科创株式会社 | Substrate board treatment |
| CN209560264U (en) * | 2019-03-22 | 2019-10-29 | 福建华佳彩有限公司 | A kind of photoresist cutter head |
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05270164A (en) * | 1992-03-26 | 1993-10-19 | Mitsubishi Paper Mills Ltd | Application and treatment apparatus for protecting gum solution |
| CN102189064A (en) * | 2010-03-15 | 2011-09-21 | 东丽工程株式会社 | Coating liquid supply device, coating liquid supply method and buffer tank |
| US20130155380A1 (en) * | 2011-12-20 | 2013-06-20 | Asml Netherlands B.V. | Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method |
| CN207052580U (en) * | 2016-08-25 | 2018-02-27 | 东京毅力科创株式会社 | Substrate board treatment |
| CN209560264U (en) * | 2019-03-22 | 2019-10-29 | 福建华佳彩有限公司 | A kind of photoresist cutter head |
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