CN109971421A - A kind of producing device and production method of grinding and polishing compound particle - Google Patents

A kind of producing device and production method of grinding and polishing compound particle Download PDF

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Publication number
CN109971421A
CN109971421A CN201910214770.9A CN201910214770A CN109971421A CN 109971421 A CN109971421 A CN 109971421A CN 201910214770 A CN201910214770 A CN 201910214770A CN 109971421 A CN109971421 A CN 109971421A
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CN
China
Prior art keywords
grinding
particle
thinning
abrasive
cylinder
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Granted
Application number
CN201910214770.9A
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Chinese (zh)
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CN109971421B (en
Inventor
潘继生
张棋翔
阎秋生
陈志君
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Guangdong University of Technology
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Guangdong University of Technology
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C21/00Disintegrating plant with or without drying of the material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C23/00Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
    • B02C23/08Separating or sorting of material, associated with crushing or disintegrating
    • B02C23/16Separating or sorting of material, associated with crushing or disintegrating with separator defining termination of crushing or disintegrating zone, e.g. screen denying egress of oversize material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C1/00Magnetic separation
    • B03C1/02Magnetic separation acting directly on the substance being separated
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/02Polishing compositions containing abrasives or grinding agents
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1409Abrasive particles per se
    • C09K3/1427Abrasive particles per se obtained by division of a mass agglomerated by melting, at least partially, e.g. with a binder
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1436Composite particles, e.g. coated particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C23/00Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
    • B02C23/08Separating or sorting of material, associated with crushing or disintegrating
    • B02C23/16Separating or sorting of material, associated with crushing or disintegrating with separator defining termination of crushing or disintegrating zone, e.g. screen denying egress of oversize material
    • B02C2023/165Screen denying egress of oversize material

Abstract

The present invention relates to the technical fields of Ultra-precision Turning, more specifically, it is related to the producing device and production method of a kind of grinding and polishing compound particle, include: working plate, generating device, grinding device, device for thinning and collection device: generating device is fixed on working plate, the top of generating device is equipped with mechanical stirring device, and the two sides of generating device are equipped with dynamic magnetic field agitating device;Grinding device is set to below generating device, and grinding device is equipped with entrance;Device for thinning is set to below grinding device, and device for thinning is equipped with the feed inlet being connected to grinding device, and device for thinning is equipped with abrasive material chamber;Collection device is set to below device for thinning, and the partition being obliquely installed is equipped with inside collection device, and collection device outer upper is equipped with screening magnet.Abrasive particle of the present invention is wrapped in magnetic-particle surface, so that abrasive particle becomes half fixed state from free state, guarantees useful effect of the abrasive particle to workpiece, improves abrasive particle utilization rate, guarantee the uniformity of polishing effect.

Description

A kind of producing device and production method of grinding and polishing compound particle
Technical field
The present invention relates to the technical fields of Ultra-precision Turning, more particularly, to a kind of grinding and polishing compound particle Producing device and production method.
Background technique
Magnetorheological grinding technique and Technique of Magnetorheological Finishing obtain extensively because it can obtain higher machined surface quality Wealthy application range, work are all to realize grinding to the effect of workpiece surface under High-gradient Magnetic field action using magnetorheological fluid Or polishing.Currently, common magnetorheological fluid is to be uniformly mixed abrasive material with magnetic-particle, then the magnetorheological fluid prepared is passed through Loader is transported to grinding/polishing disk disk of embedded array permanent magnet, under the influence of a magnetic field magnetic-particle in magnetorheological fluid It is arranged along magnetic line of force bunchiness, is mixed into abrasive grain therein and is captured, constrains between the magnetic-particle in chainlike distribution, by magnetic Property particle constraint, clamping abrasive grain.Abrasive material is in centrifugal force, magnetorheological fluid resistance and chip and the reversed rotation of grinding/polishing disk Under turning, machining area is escaped out, to realize the self-renewing of abrasive grain.
However, there are problems for such magnetorheological fluid: (1) abrasive material is gone by the constraint of magnetic-particle, clamping action Process of lapping is completed, can not effectively capture, constrain abrasive grain, it is low to the utilization rate of abrasive material, it not can guarantee processing uniformity;(2) by Then can in the difference on the clamping action that abrasive material is by magnetic-particle, abrasive material quality or the bulky grain as caused by agglomeration Lower section is sunk to, what is really worked to workpiece is thinner abrasive material, will affect the material removal effect of workpiece;(3) magnetic-particle With the discrete distribution of abrasive material, causes abrasive material that there is uncertainty to the function and effect of workpiece, can not determine to be abrasive material to workpiece The effect of effect or magnetic-particle to workpiece;(4) the discrete distribution of magnetic-particle and abrasive material, it is opposite between magnetic-particle Movement may result in following abrasive material refinement, blunt.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of production of grinding and polishing compound particle dresses It sets and production method, improves the utilization rate of abrasive material, improve the surface quality and material removing rate of workpiece.
In order to solve the above technical problems, the technical solution adopted by the present invention is that:
There is provided a kind of producing device of grinding and polishing compound particle, comprising: working plate is used for mictomagnetism abrasive material particles Particle and chemical bond are simultaneously formed by curing the generating device of solidifying body, obtain the crushing of granulate mixture for crushing solidifying body Device obtains the device for thinning of powders mixture and collects for screening to obtain compound grain for refining the granulate mixture The collection device of son: the generating device is fixed on working plate, and the top of generating device is equipped with mechanical stirring device, is filled The two sides set are equipped with dynamic magnetic field agitating device;The grinding device is set to below generating device, and grinding device is equipped with and hair The entrance of generating apparatus coaxial arrangement;The device for thinning is set to below grinding device, and device for thinning is equipped with and is connected to grinding device The feed inlet of setting, and device for thinning is equipped with the abrasive material chamber of micronized particles mixture;The collection device is set under device for thinning Side, collection device inside are equipped with the partition being obliquely installed, and collection device outer upper is equipped with screening magnet.
The producing device of grinding and polishing compound particle of the present invention, magnetic-particle and abrasive particle can be sufficiently mixed, Under the action of chemical bond and dynamic magnetic field, the encapsulation process of compound particle is completed by way of solidifying while stirring, Abrasive particle is set sufficiently to be wrapped in magnetic-particle surface;When mixed solution formed solidifying body after, solidifying body by entrance into Enter and is crushed to obtain granulate mixture into grinding device;Granulate mixture is entered in device for thinning and is refined by ball milling, carefully Change obtained powders mixture to enter collection device and separate under the action of screening magnet, magnetic-particle and compound particle can lean on Nearly screening magnet side, abrasive material and coating agent clast can then fall into the side far from magnet along inclined partition.Present invention collection Generating device, grinding device and device for thinning etc. are integrated, and save the space of processing unit (plant), and primary charging is i.e. exportable compound Particle, production process are simple and efficient.
Further, the generating device include be installed in working plate the first cylinder and be set to the first cylinder in and can The second cylinder flexibly moved;The working plate is equipped with the through-hole of connection the first cylinder and grinding device, and the through hole is equipped with The baffle being flexibly connected with working plate.Second cylinder is not fixed, and outer diameter is slightly less than the first cylinder internal diameter, in whipping process It can be moved freely with liquid agitation, chemical bond can be prevented to be bonded in the inner wall of the first cylinder or the second cylinder;When mixed After closing solution solidification, baffle is extracted out, solidifying body can be sent into grinding device by open baffle and carry out crushing operation.
Further, the mechanical stirring device include the fixed frame for being installed on working plate, the lifting that is connect with fixed frame Bar, with elevating lever crossbeam connected vertically, the first motor being fixed on crossbeam and be connected to stirring for first motor output shaft Device is mixed, the blender and the second cylinder are coaxially disposed.By driving first motor, drive blender rotates, so that the The mixed solution of two inner barrels is uniformly mixed;By adjusting the height of elevating lever, blender can be withdrawn from, in time convenient for mixing The solidification of solution.
Further, the dynamic magnetic field agitating device includes the second motor for being fixed on working plate, is connected to the second electricity First conical gear of machine output shaft and two groups of second conical gears being engaged with the first conical gear, second circle Magnet is embedded with inside bevel gear, two groups of magnet are symmetrically distributed in the two sides of the second tubular axis.Second motor drives the first circle Bevel gear rotation, the first conical gear drive the second conical gear and inner magnet movement, form dynamic magnetic field;It is being put into chemistry After bonding agent, magnetic-particle clamping abrasive particle forms magnetic force chain under the action of dynamic magnetic field, to complete compound particle Cladding process.
Further, the grinding device includes third motor and the screw rod for being connected to third motor output shaft, described Screw rod is equipped with the feeding screw reamer being sequentially arranged, squeezes out spiral reamer and returning charge spiral, and the feeding screw reamer is set to hair The lower section of generating apparatus, the top for squeezing out spiral reamer and being set to device for thinning;The feeding screw reamer and extrusion spiral hinge The rotation direction of knife is identical, and the returning charge spiral and extrusion spiral reamer are oppositely oriented;Hole is surrounded by the outside of the extrusion spiral reamer Plate.Solidifying body drops to grinding device, and the feeding screw reamer of rotation shreds solidifying body, then through extrusion spiral reamer into The chopping of one step, is filled into next layer by orifice plate;Increase returning charge spiral, rotation direction and extrusion spiral in the end for squeezing out spiral reamer Reamer it is oppositely oriented, the granulate mixture for being transported to end can inversely convey under the action of returning charge spiral, can be clear in time Except crushed material, crushed material is prevented to be deposited in end.
Further, the device for thinning includes the 4th motor, the third gear for being connected to the 4th motor output shaft, with the The 4th gear that three gears are engaged and the third cylinder being fixedly connected with the 4th gear, the abrasive material chamber are set to third cylinder Internal portion, the abrasive material chamber is interior to be equipped with several mill balls.The work of 4th motor, drives the rotation of third gear, and third gear drives The rotation of 4th gear, the 4th gear drive abrasive material chamber to rotate together, and realize the ball milling refinement of granulate mixture.
Further, it is equipped with feed cavity in the third cylinder, the second orifice plate is equipped between the feed cavity and abrasive material chamber, The feed cavity is communicated with the air inlet for being blown into hot-air;The abrasive material chamber is equipped with third orifice plate, mill far from one end of feed cavity Material chamber is communicated with the discharge port being connected to collection device, and the discharge outlet is equipped with outlet valve.The coagulum of chopping is from feed inlet Into feed cavity, is dried under the hot air acting that air inlet is blown into and enter abrasive material chamber;Particle mixing is realized in abrasive material chamber rotation The ball milling of object refines;Air is discharged from gas outlet, opens outlet valve, and the powders mixture refined enters collection from feed inlet Device;Magnetic-particle and compound particle can be collected close to screening magnet side, and abrasive material and coating agent clast then can be along inclinations Partition fall into far from screening magnet side.
The present invention also provides a kind of production methods of grinding and polishing compound particle, comprising the following steps:
S10. chemical bond component A is added in generating device, abrasive particle and magnetic-particle are added and are chemically combined It is stirred evenly in agent component A and by mechanical stirring device;
S20. start dynamic magnetic field agitating device, so that abrasive particle is uniformly wrapped in around magnetic-particle;Additionization Bonding agent B component is learned, stirring solidifies to obtain solidifying body to chemical bond;
S30. it takes out and opens baffle, solidifying body drops to grinding device in step S20, through feeding screw reamer and squeezes out spiral hinge Granulate mixture is obtained after knife chopping, the granulate mixture is filled into device for thinning by the first orifice plate;
S40. granulate mixture described in step S30 enters feed cavity drying, refines to obtain powder into abrasive material chamber ball milling Mixture;
S50. outlet valve is opened, powders mixture described in step S40 enters collection device, magnetic-particle from discharge port It is collected in compound particle close to screening magnet side, abrasive material and coating agent clast then can be along inclined baffle collections in separate Screen the side of magnet.
The production method of grinding and polishing compound particle of the invention, by the way of package, using magnetic-particle in One layer of abrasive particle is wrapped up in core, periphery under the action of chemical bond, can be improved material remove rate, obtains preferable table Face quality;When the compound particle of the method for the present invention preparation is used for Magnetorheological Polishing, replacement magnetorheological fluid is not needed, the time is saved, Rough polishing can be realized to the overall process of finishing polish in time processing, and the workpiece surface quality consistency of acquisition is good, high in machining efficiency, Processing cost is low.
Preferably, the partial size of the magnetic-particle is 1 μm~5 μm, and magnetic-particle is carbonyl iron dust, straight iron powder, reduced iron Powder it is one or more;The partial size of the abrasive particle be 5nm~500nm, abrasive particle be diamond, silicon carbide, aluminium oxide, One of silica, ceria or a variety of combinations.Abrasive particle is nano-scale particle, and magnetic-particle is micron order Grain, enables abrasive particle to be wrapped in magnetic-particle surface, so that abrasive particle becomes half fixed state from free state, protects Useful effect of the abrasive particle to workpiece is demonstrate,proved, the utilization rate of abrasive particle is improved, improves the uniformity of polishing effect.
Preferably, the chemical bond component A is curing agent, is selected from aliphatic polyamine, alicyclic polyamine, low molecular weight polycaprolactone One or more combinations of amide, aromatic amine;The chemical bond B component is rubber powder, is selected from metallographic rubber powder, acrylic One of powder, acrylic acid powder or a variety of combinations.When component A and B component mix, it can occur at normal temperature with air quick It reacts and condenses.
Compared with prior art, the beneficial effects of the present invention are:
The producing device and production method of grinding and polishing compound particle of the invention, abrasive particle are wrapped in magnetic-particle Surface: on the one hand, so that abrasive particle becomes half fixed state from free state, guarantee abrasive particle to effective work of workpiece With raising abrasive particle utilization rate guarantees the uniformity of polishing effect;On the other hand, magnetic-particle is tied as kernel by chemistry Mixture package, does not act on workpiece surface, reduces the possibility of magnetic-particle abrasion, prolongs the service life, and between magnetic-particle Relative motion do not contact directly, will not have refinement, passivation to abrasive material, can be improved abrasive material utilization rate, extend polishing The service life of liquid;
The producing device and production method of grinding and polishing compound particle of the invention, collection generating device, grinding device and Device for thinning etc. is integrated, and saves the space of processing unit (plant), and primary charging is exportable compound particle, and production process is simply high Effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the producing device of the grinding and polishing compound particle of embodiment one;
Fig. 2 is schematic diagram of the compound particle under mechanical stirring state;
Fig. 3 is the structural schematic diagram of the dynamic magnetic field agitating device of the producing device of grinding and polishing compound particle;
Fig. 4 is schematic diagram of the compound particle under dynamic magnetic field stirring;
Fig. 5 is the schematic diagram that compound particle enters grinding device;
Fig. 6 is the schematic diagram that compound particle enters device for thinning;
Fig. 7 is the flow diagram of the production method of the grinding and polishing compound particle of embodiment two;
Fig. 8 is the structural schematic diagram of compound particle.
In attached drawing: 1- working plate;2- generating device;The first cylinder of 21-;The second cylinder of 22-;23- baffle;3- crushes dress It sets;31- entrance;32- third motor;33- screw rod;34- feeding screw reamer;35- squeezes out spiral reamer;36- returning charge spiral; The first orifice plate of 37-;38- orifice-baffle support frame;39- shell;310- screw support rack;311- second bearing;312- second end gland; 4- device for thinning;41- feed inlet;42- abrasive material chamber;The 4th motor of 43-;44- third gear;The 4th gear of 45-;46- third cylinder Body;47- feed cavity;The second orifice plate of 48-;49- air inlet;410- third orifice plate;411- discharge port;412- outlet valve;413- into Expect partition;414- air inlet partition;415- discharge partition plate;416- ring-type liner plate;417- 3rd bearing;418- 3rd bearing seat; The gas outlet 419-;5- collection device;51- partition;52- screens magnet;53- wedge shape;6- mechanical stirring device;61- fixed frame; 62- elevating lever;63- crossbeam;64- first motor;65- blender;66- rotary shaft;67- column;68- horizontal axis;7- dynamic magnetic Field agitating device;The second motor of 71-;The first conical gear of 72-;The second conical gear of 73-;74- magnet;75- bracket;76- One end gland;77- first bearing;78- first bearing seat;8- magnetic-particle;9- abrasive particle;10- chemical bond.
Specific embodiment
The present invention is further illustrated With reference to embodiment.Wherein, attached drawing only for illustration, What is indicated is only schematic diagram, rather than pictorial diagram, should not be understood as the limitation to this patent;Reality in order to better illustrate the present invention Example is applied, the certain components of attached drawing have omission, zoom in or out, and do not represent the size of actual product;To those skilled in the art For, the omitting of some known structures and their instructions in the attached drawings are understandable.
The same or similar label correspond to the same or similar components in the attached drawing of the embodiment of the present invention;It is retouched in of the invention In stating, it is to be understood that if the orientation or positional relationship for having the instructions such as term " on ", "lower", "left", "right" is based on attached drawing Shown in orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, rather than indication or suggestion is signified Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore positional relationship is described in attached drawing Term only for illustration, should not be understood as the limitation to this patent, for the ordinary skill in the art, can To understand the concrete meaning of above-mentioned term as the case may be.
Embodiment one
It is as shown in Figures 1 to 6 the embodiment of the producing device of grinding and polishing compound particle of the invention, comprising: work Make plate 1, for 8 abrasive particle 9 of mictomagnetism particle with chemical bond and be formed by curing the generating device 2 of solidifying body, be used for Solidifying body is crushed to obtain the grinding device 3 of granulate mixture, obtain the refinement dress of powders mixture for micronized particles mixture Set 4 and obtain the collection device 5 of compound particle for screening to collect: generating device 2 is fixed on working plate 1, generating device 2 Top be equipped with mechanical stirring device 6, the two sides of generating device 2 are equipped with dynamic magnetic field agitating device 7;Grinding device 3 is set to hair 2 lower section of generating apparatus, and grinding device 3 is equipped with the entrance 31 being coaxially disposed with generating device 2;Device for thinning 4 is set to grinding device 3 Lower section, device for thinning 4 is equipped with the feed inlet 41 that setting is connected to grinding device 3, and device for thinning 4 is equipped with micronized particles mixture Abrasive material chamber 42;Collection device 5 is set to 4 lower section of device for thinning, is equipped with the partition 51 being obliquely installed inside collection device 5, collects 5 outer upper of device is equipped with screening magnet 52.
Magnetic-particle 8 and abrasive particle 9 are sufficiently mixed, when implementing in chemical bond and dynamic magnetic by the present embodiment Under the action of, the encapsulation process of compound particle is completed by way of solidifying while stirring, abrasive particle 9 is enable sufficiently to wrap It is wrapped in 8 surface of magnetic-particle;When mixed solution formed solidifying body after, solidifying body by entrance 31 enter in grinding device 3 into Row crushes and obtains granulate mixture;Granulate mixture is entered in device for thinning 4 and is refined by ball milling, the powder mixing refined Object enters collection device 5 and separates under the action of screening magnet 52, and magnetic-particle 8 and compound particle can be close to screening magnet 52 Side, abrasive material and coating agent clast can then fall into the side far from screening magnet 52 along inclined partition 51.
As shown in Figure 1, generating device 2 includes being installed in the first cylinder 21 of working plate 1 and being set in the first cylinder 21 And movable second cylinder 22;Working plate 1 is equipped with the through-hole of the first cylinder of connection 21 with grinding device 3, and through hole is set There is the baffle 23 being flexibly connected with working plate 1.Second cylinder 22 is not fixed, and outer diameter is slightly less than 21 internal diameter of the first cylinder, It can be moved freely with liquid agitation in whipping process, chemical bond can be prevented to be bonded in the first cylinder 21 or the second cylinder 22 inner wall;After mixed solution solidification, baffle 23 is extracted out, solidifying body can be sent into grinding device by open baffle 23 Crushing operation is carried out in 3.
As shown in Fig. 2, mechanical stirring device 6 includes being installed on the fixed frame 61 of working plate 1, the liter connecting with fixed frame 61 Drop bar 62, with the crossbeam 63 connected vertically of elevating lever 62, the first motor 64 that is fixed on crossbeam 63 and be connected to the first electricity The blender 65 of 64 output shaft of machine, blender 65 and the second cylinder 22 are coaxially disposed.When implementation, by driving first motor 64, Blender 65 is driven to rotate, so that the mixed solution inside the second cylinder 22 is uniformly mixed;By adjusting elevating lever 62 Highly, blender 65 can be withdrawn from, in time convenient for the solidification of mixed solution.Blender 65 in the present embodiment is the stirring of " Ш " type Device 65, " Ш " type blender 65 are made of 66, four columns parallel with rotary shaft 66 67 of a rotary shaft, four columns 67 are equidistantly connected by a horizontal axis 68, as shown in Figure 2.To guarantee preferable mixing effect, in mechanical stirring, far from rotation Two columns 67 of axis 66 are arranged close to 22 inner wall of the second cylinder, and horizontal axis 68 is arranged close to 22 bottom of the second cylinder.
As shown in Figure 3, Figure 4, dynamic magnetic field agitating device 7 includes the second motor 71 for being fixed on working plate 1, is connected to the The first conical gear 72 and two groups of second conical gears being engaged with the first conical gear 72 of two motors, 71 output shaft 73, magnet 74 is embedded with inside the second conical gear 73, and two groups of magnet 74 are symmetrically distributed in the two sides of 22 axis of the second cylinder.It is real Shi Shi, the second motor 71 drive the rotation of the first conical gear 72, and the first conical gear 72 drives the second conical gear 73 and inside Magnet 74 moves, and forms dynamic magnetic field;After being put into chemical bond, the clamping of magnetic-particle 8 mill under the action of dynamic magnetic field Expect that particle 9 forms magnetic force chain, to complete the cladding process of compound particle.It, can for guarantee the connection of each structure in the present embodiment By property and the reasonability of topology layout, the second motor 71 is bolted on bracket 75, and bracket 75 is bolted on On working plate 1, and opposite side of the first motor 64 with respect to the first cylinder 21 is arranged in bracket 75;Magnet 74 is column strong magnets 74, the magnetic field strength with 0.1T~2T, 74 diameter of magnet is less than the internal diameter of the second conical gear 73, and magnet 74 is by being set to the The first end gland 76 of two conical gears, 73 end is fixed, is equipped with first bearing 77, first bearing 77 on first end gland 76 It is mounted on working plate 1 by first bearing seat 78.
As shown in figure 5, grinding device 3 includes third motor 32 and is connected to the screw rod 33 of 32 output shaft of third motor, Screw rod 33 is equipped with the feeding screw reamer 34 being sequentially arranged, squeezes out spiral reamer 35 and returning charge spiral 36, feeding screw reamer 34 Set on the lower section of generating device 2, the top that spiral reamer 35 is set to device for thinning 4 is squeezed out;Feeding screw reamer 34 and extrusion spiral shell The rotation direction for revolving reamer 35 is identical, and returning charge spiral 36 and extrusion spiral reamer 35 are oppositely oriented;It squeezes out and is surrounded on the outside of spiral reamer 35 Have the first orifice plate 37,37 through hole plate bracing frame 38 of the first orifice plate, which is fixed on, to be squeezed out on spiral reamer 35, the first orifice plate 37 with squeeze Spiral reamer 35 is coaxial out, and installation diameter is slightly larger than feeding screw reamer diameter, and 37 aperture of the first orifice plate is 10mm~20mm.It is real Shi Shi, solidifying body drop to grinding device 3, and the feeding screw reamer 34 of rotation shreds solidifying body, then by squeezing out spiral Reamer 35 further shreds, and is filled into next layer by the first orifice plate 37;Increase returning charge spiral shell in the end for squeezing out spiral reamer 35 Rotation 36, rotation direction is oppositely oriented with extrusion spiral reamer 35, and the granulate mixture for being transported to end can be in the work of returning charge spiral 36 With lower reverse conveying.In the present embodiment: to guarantee the stability of each building block of grinding device 3 installation and the safety of work, In the outside mask of third motor 32 and screw rod 33 equipped with the shell 39 for including intermediate bulkhead, screw rod 33 is mounted on screw support rack On 310, screw support rack 310 is connected between working plate 1 and intermediate bulkhead;Third motor 32 is connected by retarder and screw rod 33 It connects, screw rod 33 is equipped with the feeding screw reamer 34 being sequentially arranged, squeezes out spiral reamer 35 and returning charge spiral 36, wherein feeding spiral shell Rotation reamer 34 is equidistant raised spiral reamer, and helical angle is 10 °~30 °, squeezes out spiral reamer 35 and feeding screw reamer 34 is same Rotation direction, for equidistant recessed spiral reamer, helical angle is 30 °~60 °, and returning charge spiral 36 and extrusion spiral reamer 35 are oppositely oriented, For individual pen raised spiral, helical angle is 120 °~150 °;The end of returning charge spiral 36 is equipped with second bearing 311, second bearing 311 are fixed on intermediate bulkhead by second end gland 312.
As shown in fig. 6, device for thinning 4 include the 4th motor 43, be connected to 43 output shaft of the 4th motor third gear 44, The 4th gear 45 being engaged with third gear 44 and the third cylinder 46 being fixedly connected with the 4th gear 45, abrasive material chamber 42 Inside third cylinder 46, several mill balls are equipped in abrasive material chamber 42;Wherein, feed cavity 47 is equipped in third cylinder 46, into Expect to be equipped with the second orifice plate 48 between chamber 47 and abrasive material chamber 42, feed cavity 47 is communicated with the air inlet 49 for being blown into hot-air;Abrasive material chamber 42 one end far from feed cavity 47 are equipped with third orifice plate 410, and abrasive material chamber 42 is communicated with the discharge port 411 being connected to collection device 5, Outlet valve 412 is equipped at discharge port 411.When implementation, the coagulum of chopping enters feed cavity 47 from feed inlet 41, in air inlet 49 It is dried under the hot air acting being blown into and enters abrasive material chamber 42;The work of 4th motor 43, drives third gear 44 to rotate, third tooth Wheel 44 drives the rotation of the 4th gear 45, and the 4th gear 45 drives abrasive material chamber 42 to rotate together, realizes that the ball milling of granulate mixture is thin Change;Air is discharged from gas outlet, opens outlet valve 412, and the powders mixture refined enters collection device from feed inlet 41 5.In the present embodiment, it is equipped with feed spacer 413 at feed inlet 41, air inlet partition 414, feed cavity 47 and mill are equipped at air inlet 49 Expect to be equipped with the second orifice plate 48 between chamber 42, abrasive material chamber 42 is equipped with third orifice plate 410, third orifice plate far from one end of feed cavity 47 Discharge partition plate 415 is equipped between 410 and discharge port 411;Above-mentioned each panel aperture is different: 413 aperture of feed spacer be 10mm~ 20mm, guarantee powders mixture it is smooth by and filter out the bulky grain particle not crushed;414 aperture of air inlet partition is 0.5mm ~5mm, guarantees the smooth outflow of hot-air, and filters out the dust in air;Second orifice plate, 48 aperture is 100 μm~1000 μ M prevents bulky grain particle from entering abrasive material chamber 42;410 aperture of third orifice plate is 10 μm~50 μm, what control was discharged by abrasive material chamber 42 The particle size range of powders mixture;415 aperture of discharge partition plate is 50 μm~100 μm, guarantees the smoothness of discharging.In addition, third 46 inner wall of cylinder is equipped with damage of the cyclic annular liner plate 416 to avoid mill ball when ball milling to 46 inner wall of third cylinder, third cylinder 46 Both ends 3rd bearing 417 is installed, 3rd bearing 417 is fixedly mounted on the bottom plate of shell 39 by 3rd bearing seat 418.
As shown in Figure 1, collection device 5 is set to 4 lower section of device for thinning, the partition being obliquely installed is equipped with inside collection device 5 51,5 outer upper of collection device is equipped with screening magnet 52.Wherein, the tilt angle of partition 51 and relative level be 5 °~ 30 °, partition 51 is 0.1T~2T close to one end wedge shaped 53 of screening magnet 52, the magnetic field strength of screening magnet 52.
Embodiment two
It is illustrated in figure 7 the embodiment of the production method of grinding and polishing compound particle of the invention, comprising the following steps:
S10. chemical bond component A is added in generating device 2, chemical knot is added in abrasive particle 9 and magnetic-particle 8 It is stirred evenly in mixture component A and by mechanical stirring device 6;
S20. start dynamic magnetic field agitating device 7, so that abrasive particle 9 is uniformly wrapped in around magnetic-particle 8;It is added Chemical bond B component, stirring solidify to obtain solidifying body to chemical bond;
S30. it takes out and opens baffle 23, solidifying body drops to grinding device 3 in step S20, through feeding screw reamer 34 and squeezes out Spiral reamer 35 obtains granulate mixture after shredding, granulate mixture is filled into device for thinning 4 by the first orifice plate 37;
S40. granulate mixture enters the drying of feed cavity 47 in step S30, refines to obtain powder into 42 ball milling of abrasive material chamber Mixture;
S50. outlet valve 412 is opened, powders mixture enters collection device 5 from discharge port 411 in step S40, magnetic Particle 8 and compound particle are collected in close to screening 52 side of magnet, and abrasive material and coating agent clast then can be along inclined partitions 51 It is collected in the side far from screening magnet 52.
Wherein, the partial size of magnetic-particle 8 is 1 μm~5 μm, and magnetic-particle 8 is carbonyl iron dust, straight iron powder, reduced iron powder It is one or more;The partial size of abrasive particle 9 is 5nm~500nm, and abrasive particle 9 is diamond, silicon carbide, aluminium oxide, titanium dioxide One of silicon, ceria or a variety of combinations.The mass ratio of magnetic-particle 8 and abrasive particle 9 is according to magnetic of selection 8 types of grain and partial size, the differences of abrasive species and partial size and it is different.
Chemical bond component A is curing agent, selected from aliphatic polyamine, alicyclic polyamine, Versamid, modified virtue One or more combinations of amine;Chemical bond B component is rubber powder, in metallographic rubber powder, acrylic powder, acrylic acid powder One or more combinations.When component A and B component mix, fast reaction can occur with air at normal temperature and condense, wherein The proportion of component A and B component forms different and different according to component A, B component.
By above step, abrasive particle 9 is wrapped in 8 surface of magnetic-particle, as shown in Figure 8: on the one hand, so that abrasive grain Son 9 becomes half fixed state from free state, guarantees useful effect of the abrasive particle 9 to workpiece, improves abrasive particle 9 and utilizes Rate guarantees the uniformity of polishing effect;On the other hand, magnetic-particle 8 is wrapped up by chemical bond as kernel, not with workpiece table Face effect reduces the possibility that magnetic-particle 8 is worn, prolongs the service life.
Embodiment three
The present embodiment is the Application Example of embodiment two, and in the present embodiment, component A is aliphatic polyamine, and B component is gold Phase rubber powder, magnetic-particle 8 are carbonyl iron dust, and abrasive particle 9 is diamond, comprising the following steps:
S10. chemical bond component A aliphatic polyamine is added in generating device 2, the carbonyl iron that partial size is 2 μm is added Powder, mechanical stirring 1min~3min, uniformly rear closing mechanical stirring device 6 to be mixed, and rise blender 65;
S20. the diamond abrasive of 50nm~100nm is added, starts dynamic magnetic field agitating device 7, so that abrasive particle 9 is equal It is even to be wrapped in around magnetic-particle 8;Chemical bond B component metallographic rubber powder is added, continues to stir 15min~20min, until molten Liquid thoroughly solidifies;Wherein the mass ratio of aliphatic polyamine and metallographic rubber powder is 1:1.0~2.0, abrasive particle 9 and magnetic-particle 8 Mass ratio be 1:2~5;
S30. dynamic magnetic field agitating device 7 is closed, pumping opens baffle 23, and solidifying body drops to grinding device 3 in step S20, Granulate mixture is obtained through feeding screw reamer 34 and after squeezing out the chopping of spiral reamer 35, granulate mixture passes through the first orifice plate 37 It is filled into device for thinning 4;
S40. granulate mixture enters the dry 20min of feed cavity 47 in step S30, refines into 42 ball milling 1h of abrasive material chamber To powders mixture;
S50. outlet valve 412 is opened, powders mixture enters collection device 5 from discharge port 411 in step S40, magnetic Particle 8 and compound particle are collected in close to screening 52 side of magnet, and abrasive material and coating agent clast then can be along inclined partitions 51 It is collected in the side far from screening magnet 52.
Example IV
The present embodiment is the Application Example of embodiment two, and in the present embodiment, component A is polyamide, and B component is acrylic Powder, magnetic-particle 8 are iron powder, and abrasive particle 9 is silica, comprising the following steps:
S10. chemical bond component A polyamide is added in generating device 2, the iron powder that partial size is 3 μm is added, machinery stirs 3min~5min, uniformly rear closing mechanical stirring device 6 to be mixed are mixed, and rises blender 65;
S20. the abrasive silica of 50nm~100nm is added, starts dynamic magnetic field agitating device 7, so that abrasive particle 9 Uniformly it is wrapped in around magnetic-particle 8;Chemical bond B component metallographic rubber powder is added, continues to stir 30min~40min, until Solution thoroughly solidifies;Wherein the mass ratio of polyamide and acrylic powder is 1:1.0~2.0, abrasive particle 9 and magnetic-particle 8 Mass ratio is 1:2~5;
S30. dynamic magnetic field agitating device 7 is closed, pumping opens baffle 23, and solidifying body drops to grinding device 3 in step S20, Granulate mixture is obtained through feeding screw reamer 34 and after squeezing out the chopping of spiral reamer 35, granulate mixture passes through the first orifice plate 37 It is filled into device for thinning 4;
S40. granulate mixture enters the dry 20min of feed cavity 47 in step S30, refines into 42 ball milling 1h of abrasive material chamber To powders mixture;
S50. outlet valve 412 is opened, powders mixture enters collection device 5 from discharge port 411 in step S40, magnetic Particle 8 and compound particle are collected in close to screening 52 side of magnet, and abrasive material and coating agent clast then can be along inclined partitions 51 It is collected in the side far from screening magnet 52.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention Protection scope within.

Claims (10)

1. a kind of producing device of grinding and polishing compound particle characterized by comprising working plate (1) is used for mictomagnetism Particle (8), abrasive particle (9) are with chemical bond (10) and are formed by curing the generating device (2) of solidifying body, for crushing solidification Body obtains the grinding device (3) of granulate mixture, obtains the device for thinning of powders mixture for refining the granulate mixture (4) and for screening to collect obtain the collection device (5) of compound particle: the generating device (2) is fixed on working plate (1) On, the top of generating device (2) is equipped with mechanical stirring device (6), and the two sides of generating device (2) are equipped with dynamic magnetic field agitating device (7);The grinding device (3) is set to below generating device (2), and grinding device (3) is equipped with and is coaxially disposed with generating device (2) Entrance (31);The device for thinning (4) is set to below grinding device (3), and device for thinning (4) is equipped with grinding device (3) even The feed inlet (41) of logical setting, and device for thinning (4) is equipped with the abrasive material chamber (42) of micronized particles mixture;The collection device (5) it is set to below device for thinning (4), the partition (51) being obliquely installed, collection device (5) outside is equipped with inside collection device (5) Top is equipped with screening magnet (52).
2. the producing device of grinding and polishing compound particle according to claim 1, which is characterized in that the generating device (2) include be installed in working plate (1) the first cylinder (21) and be set to the first cylinder (21) in and movable second Cylinder (22);The working plate (1) is equipped with the through-hole of connection the first cylinder (21) and grinding device (3), and the through hole is equipped with The baffle (23) being flexibly connected with working plate (1).
3. the producing device of grinding and polishing compound particle according to claim 2, which is characterized in that the mechanical stirring Device (6) includes fixed frame (61), the elevating lever (62) connecting with fixed frame (61) and the elevating lever for being installed on working plate (1) (62) crossbeam (63) connected vertically, the first motor (64) that is fixed on crossbeam (63) and to be connected to first motor (64) defeated The blender (65) of shaft, the blender (65) and the second cylinder (22) are coaxially disposed.
4. the producing device of grinding and polishing compound particle according to claim 2, which is characterized in that the dynamic magnetic field Agitating device (7) includes the second motor (71) for being fixed on working plate (1), the first circle for being connected to the second motor (71) output shaft Bevel gear (72) and two groups of second conical gears (73) being engaged with the first conical gear (72), the second circular cone tooth It is embedded with magnet (74) inside wheel (73), two groups of magnet (74) are symmetrically distributed in the two sides of the second cylinder (22) axis.
5. the producing device of grinding and polishing compound particle according to claim 1, which is characterized in that the grinding device It (3) include third motor (32) and the screw rod (33) for being connected to third motor (32) output shaft, the screw rod (33) is equipped with suitable The feeding screw reamer (34) of secondary setting squeezes out spiral reamer (35) and returning charge spiral (36), the feeding screw reamer (34) Set on the lower section of generating device (2), the top for squeezing out spiral reamer (35) and being set to device for thinning (4);The feeding screw Reamer (34) is identical as the rotation direction of spiral reamer (35) is squeezed out, the returning charge spiral (36) and extrusion spiral reamer (35) rotation direction phase Instead;The first orifice plate (37) are surrounded by the outside of the extrusion spiral reamer (35).
6. the producing device of grinding and polishing compound particle according to any one of claims 1 to 5, which is characterized in that institute State the third gear (44) and third tooth that device for thinning (4) include the 4th motor (43), are connected to the 4th motor (43) output shaft Take turns (44) the 4th gear (45) being engaged and the third cylinder (46) being fixedly connected with the 4th gear (45), the abrasive material Chamber (42) is set to third cylinder (46) inside, is equipped with several mill balls in the abrasive material chamber (42).
7. the producing device of grinding and polishing compound particle according to claim 6, which is characterized in that the third cylinder (46) feed cavity (47) are equipped in, are equipped with the second orifice plate (48) between the feed cavity (47) and abrasive material chamber (42), the charging Chamber (47) is communicated with the air inlet (49) for being blown into hot-air;The abrasive material chamber (42) is equipped with third far from the one end of feed cavity (47) Orifice plate (410), abrasive material chamber (42) are communicated with the discharge port (411) being connected to collection device (5), set at the discharge port (411) There are outlet valve (412).
8. a kind of production method of grinding and polishing compound particle, which comprises the following steps:
S10. chemical bond component A is added in generating device (2), chemistry is added in abrasive particle (9) and magnetic-particle (8) It is stirred evenly in bonding agent component A and by mechanical stirring device (6);
S20. start dynamic magnetic field agitating device (7), so that abrasive particle (9) is uniformly wrapped in around magnetic-particle (8);Add Enter chemical bond B component, stirring solidifies to obtain solidifying body to chemical bond;
S30. it takes out and opens baffle (23), solidifying body drops to grinding device (3) in step S20, through feeding screw reamer (34) and squeezes Granulate mixture is obtained after spiral reamer (35) chopping out, the granulate mixture is filled into refinement dress by the first orifice plate (37) Set (4);
S40. granulate mixture described in step S30 enters feed cavity (47) drying, refines to obtain into abrasive material chamber (42) ball milling Powders mixture;
S50. outlet valve (412) are opened, powders mixture described in step S40 enters collection device from discharge port (411) (5), magnetic-particle (8) and compound particle are collected in close to screening magnet (52) side, and abrasive material and coating agent clast then can be along Inclined partition (51) is collected in the side far from screening magnet (52).
9. the production method of grinding and polishing compound particle according to claim 8, which is characterized in that the magnetic-particle (8) partial size is 1 μm~5 μm, and magnetic-particle (8) is one of carbonyl iron dust, straight iron powder, reduced iron powder or a variety of;It is described The partial size of abrasive particle (9) is 5nm~500nm, and abrasive particle (9) is diamond, silicon carbide, aluminium oxide, silica, dioxy Change one of cerium or a variety of combinations.
10. the production method of grinding and polishing compound particle according to claim 8, which is characterized in that the chemistry knot Mixture component A be curing agent, selected from aliphatic polyamine, alicyclic polyamine, Versamid, aromatic amine it is one or more Combination;The chemical bond B component is rubber powder, is selected from one of metallographic rubber powder, acrylic powder, acrylic acid powder or a variety of Combination.
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CN113561048A (en) * 2021-09-26 2021-10-29 常州市名流干燥设备有限公司 Polishing paste conveying mechanism for semiconductor wafer drying system
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CN113561048A (en) * 2021-09-26 2021-10-29 常州市名流干燥设备有限公司 Polishing paste conveying mechanism for semiconductor wafer drying system

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