CN109959398A

CN109959398A - Winding and scale for inductive position encoder construct

Info

Publication number: CN109959398A
Application number: CN201811570920.1A
Authority: CN
Inventors: T.S.库克
Original assignee: Mitutoyo Corp
Current assignee: Mitutoyo Corp
Priority date: 2017-12-21
Filing date: 2018-12-21
Publication date: 2019-07-02
Anticipated expiration: 2038-12-21
Also published as: DE102018222892A1; JP7154990B2; CN109959398B; JP2019144227A

Abstract

A kind of spacing inductive position encoder, including scale, detector and signal processing part, the scale include having wavelength for the first track and the second track of the periodic patterns of W.Second track pattern can be deviated along measurement direction relative to the first track pattern with pattern shift amount STO.In the detector, the first track field generate coiler part and the second track field generate coiler part respectively with generate field in the first interior zone and the second interior zone of the first pattern track and the second pattern track alignment.The the first sense wire ring structure and the second sense wire ring structure with the first track and the second track alignment offset relative to each other STO+/- 0.5*W along measurement direction respectively.In embodiments, if generated, field polarity is different, and the single coil polarity that the first sense wire ring structure and the second sense wire ring structure can have same sequence can have inversion or opposite sequence if generation field polarity is identical.

Description

Winding and scale for inductive position encoder construct

Cross reference to related applications

The application be submit on December 21st, 2017, Serial No. No.15/850,457, entitled " WINDING AND The part of the U.S. Patent application of SCALE CONFIGURATION FOR INDUCTIVE POSITION ENCODER " continues Shen Please, the patent application be submit on August 24th, 2016, Serial No. No.15/245,560, entitled " WINDING The part of CONFIGURATION FOR INDUCTIVE POSITION ENCODER ", which continues, applies, in the disclosure of each of which Hold and is integrally incorporated herein by reference.

Technical field

The present invention relates to measuring instruments, and relate more particularly to inductive position encoder, can be used for precision measuring instrument Device.

Background technique

Various encoder constructions may include various types of optics, capacitor, magnetism, induction, movement and/or position transducing Device.These energy converters utilize the various geometrical constructions of the transmitter and receiver in read head, to measure read head and scale Between movement.Magnetic and inductosyn is but and imperfect to polluting opposite robust.

United States Patent (USP) No.6,011,389 (patent of ' 389) describe a kind of induced current position transducer, can be used in height In accuracy application, United States Patent (USP) No.5,973,494 (patents of ' 494) and 6,002,250 (patent of ' 250) describe increment type Location sensitive slide calliper rule and slide-rule dial comprising signal occurs and processing circuit, United States Patent (USP) No.5, and 886,519 (' 519 are special Benefit), 5,841,274 (patents of ' 274) and 5,894,678 (patents of ' 678) describe absolute position induction slide calliper rule and using incuding The electronic band of current transducer measures tool.United States Patent (USP) No.7,906,958 (patent of ' 958) describes a kind of induced current position Energy converter can be used in high accuracy application, wherein there are two parallel half portion and multiple groups transmitting coils and receiving coil for tool Scale eliminate originally can be generated in induced current position transducer mistake some signal bias components.But ' 958 The unconventional scale of patent requirements, and schematical coil layout is only shown.In this way, its introduction is related to leading to despite useful It crosses " ideal " sensor or at least " identical " sensor generates signal.On the contrary, it does not account for and/or solves centainly Manufacturing issue and/or limitation, this typically results in " undesirable " sensor generated by practical layout, manufacture and cost constraint.This A little problems and associated design factor are discussed further below.

The United States Patent (USP) of all aforementioned lists is incorporated herein by reference in their entirety herein.As discussed in these patents, induced electricity Flowing energy converter can be manufactured using printed-board technology, and not mind pollution greatly.

But existing system, which is limited to them, provides some combined abilities of feature desired by user, it is such as, compact Size, signal strength, high-resolution, cost, practical layout and the combination to the robustness of misalignment and pollution etc..Offer changes Construction into combined encoder will be desired.

Summary of the invention

Summary of the invention is provided, is described in further detail in the following specific embodiments in simplified form to introduce The selection of design.The content of present invention is not intended to identify the key feature of the theme of prescription, is also not intended to be used as determining want Seek the auxiliary of the range of the theme of right.

A kind of electronic position encoder is provided, can be used for measuring along measurement axis direction opposite between two elements Position, the measurement axis direction are overlapped with x-axis direction.In various embodiments, electronic position encoder include scale and Detector portion.In each embodiment, signal processing configuration can be operably coupled to detector portion, to provide drive Dynamic signal (being constructed for example, coil occurs to field), and detector portion is determined based on the detector signal inputted from detector portion Divide the relative position between (for example, sense wire ring structure) and scale pattern.In various embodiments, signal processing configuration can be with Detector portion combines (for example, as the circuit being used as on the circuit board for the substrate of detector portion).In other implementations In mode, signal processing configuration may include the external circuit that detector portion is connected to by connector.

The scale extends along measurement axis direction, and including signal modulation scale pattern comprising is arranged as putting down each other The first and second capable pattern tracks.Each pattern track includes field attenuating elements, they are locally declined with relatively large degree Subtract the magnetic flux of variation；Element is maintained with field, the magnetic flux or local enhancement that they are changed with relatively small degree local attenuation become The magnetic flux of change.Field attenuating elements and field maintain element to interlock along x-axis direction with the periodic patterns with space wavelength W.

Detector portion is configured to move close to pattern track installation and along measurement axis direction relative to pattern track. In various embodiments, detector portion includes that field generates coil construction and sense wire ring structure.

It includes that at least one field generates ring that field, which generates coil construction, can be fixed on substrate.Field generates coil and constructs quilt Response coil drive signal is configured in the first magnetic with the variation provided in the first interior zone of the first pattern track alignment It is logical, and coil drive signal is responded in the second magnetic with the variation provided in the second interior zone of the second pattern track alignment It is logical.

Sense wire ring structure includes that first track the first space phase signal sensing coil construction and the second track first are empty Between phase signal sense wire ring structure.In various embodiments, according to known principle, and depending on will be in conjunction with detector portion The desired signal processing and position measurement technique used, sense wire ring structure can further include being similar to the first and second tracks the One space phase signal coil construction the first and second tracks " additional " phase signal coil construct (for example, second, third, 4th space phase signal coil construction, etc.).

First track the first space phase signal sensing coil construction is arranged in the first interior zone, and including corresponding to One group of N number of positive winding that space wavelength W is distributed along the duplicate positive winding area in x-axis direction, and with anode around Group region alternately and correspond to one group of N number of cathode being distributed along the duplicate cathode winding area in x-axis direction of space wavelength W around Group.N is at least 2 integer.The each response of positive and negative pole winding by opposite field attenuating elements or field maintain that element provides Local effect on magnetic flux, and the first track the provided for first track the first space phase signal sensing coil construction are provided One space phase signal component provides signal contribution.Second track the first space phase signal sensing coil construction is arranged in second In interior zone, and one group of M be distributed along the duplicate positive winding area in x-axis direction including corresponding to space wavelength W Positive winding, and replacing with positive winding area and corresponding to space wavelength W along x-axis direction duplicate cathode winding area M cathode winding of one group be distributed in domain.M is at least 2 integer.Winding each response in positive and negative pole is decayed first by opposite field Part or field maintain element to provide the local effect on variation magnetic flux, and are second track the first space phase signal sensing coil Second track the first space phase signal component that construction provides provides signal contribution.

It is different from prior art configuration (patent of ' 958 for example, such as existing), first track the first space phase signal sensing line Ring structure and second track the first space phase signal sensing coil construction limit the first and second sensings along x-axis direction respectively Span, and the first and second sensing spans are not in alignment with each other along x-axis direction, first track the first space phase signal sensing Coil construction and second track the first space phase signal sensing coil construction about along x-axis in the first and second pattern rails Boundary line between road is not mutually symmetrical.This provides certain actual design freedom degree and other are excellent following detailed description of Gesture.

It is different from prior art configuration (patent of ' 958 for example, such as existing), in embodiments, the period of the second pattern track Property pattern along x-axis direction relative to the first pattern track periodic patterns alignment or offset be not 0.5*W scale track Pattern shift amount STO (wherein, W is scale pattern wavelength or spacing).

In embodiments, electronic position encoder is according to A) or B) one construction, in which:

A) field generates coil construction and is configured in the first interior zone along the first pattern track and along the second figure The variation magnetic flux of opposite polarity is provided in the second interior zone of case track；With

Along sense wire ring structure since starting ends, first track the first space phase signal sensing coil construction has A kind of construction, wherein it has the first winding polarity, second the first space phase of track along the starting ends winding of the first track Signal sensing coil construction has a kind of construction, wherein and it has the first winding polarity along the starting ends winding of the second track, And a winding offset WO=STO+/- 0.5* is offset from one another along x-axis direction along the starting ends winding of the first and second tracks W。

Or:

B) field generates coil construction and is configured in the first interior zone along the first pattern track and along the second figure The variation magnetic flux of identical polar is provided in the second interior zone of case track；With

Along sense wire ring structure since starting ends, first track the first space phase signal sensing coil construction has A kind of construction, wherein it has the first winding polarity, second the first space of track along the starting ends winding of the first pattern track Phase signal sense wire ring structure has a kind of construction, wherein it has and the along the starting ends winding of the second pattern track The second opposite winding polarity of one winding polarity, and along the starting ends winding of the first and second tracks along x-axis direction each other Deviate a winding offset WO=STO+/- 0.5*W.

According to or A) or each embodiment B) in, N can be equal to M.According to or A) or each implementation B) In example, scale pattern offset STO can be in range 0+/- 0.25W.According to or A) or some embodiments B) in, Scale pattern offset STO can be zero, correspond to the construction of traditional scale.According to or A) or each embodiment B) In, the winding of first and second track the first space phase signal sensing coils includes leading of manufacturing in layer printed circuit board Body, wherein conductor includes the lead connected between the different layers of printed circuit board, and is included in without lead and is located at the first He In the part of winding in second interior zone.

According to or A) or each embodiment B) in, first track the first space phase signal component and the second track First space phase signal component combination, to form the first space phase signal of combination.In some such embodiments, The phase of one track the first space phase signal sensing coil construction and second track the first space phase signal sensing coil construction Answering winding includes the corresponding portion of continuous conductor, first track the first space phase signal component and second the first space of track phase Position signal component inherently combines in continuous conductor, to form the first space phase signal of combination.Implement as other In example, as previously outlined, signal processing configuration can be operatively connected to detector portion, and the first track first is empty Between phase signal components and second track the first space phase signal component be connected to the input terminal of signal processing circuit, and pass through Signal processing is combined to form the first space phase signal of combination.

According to A) each embodiment in, along sense wire ring structure since starting ends, first the first space of track phase Position signal sensing coil construction has a kind of construction, wherein it has the first winding pole along the starting ends winding of the first track Property, and it terminates End winding with second winding polarity opposite with the first winding polarity.In this case, the second rail The first space phase signal sensing coil construction in road has a kind of construction, wherein it has along the starting ends winding of the second track There is the first winding polarity, and it terminates End winding with second winding polarity opposite with the first winding polarity.

According to A) each other embodiments in, along sense wire ring structure since starting ends, the first track first is empty Between phase signal sense wire ring structure have a kind of construction, wherein its along the first track starting ends winding have first around Group polarity, and it terminates End winding also and has the first winding polarity, its starting ends winding and its terminate End winding it Between at least one winding area include two windings, the two windings have the second winding pole opposite with the first winding polarity Property.In this case, second track the first space phase signal sensing coil construction has a kind of construction, wherein its edge The starting ends winding of second track has the first winding polarity, and it terminates End winding also and has the first winding polarity, Its starting ends winding and its terminate at least one winding area between End winding include two windings, the two windings tool There is second winding polarity opposite with the first winding polarity.

According to B) each embodiment in, along sense wire ring structure since starting ends, first the first space of track phase Position signal sensing coil construction has a kind of construction, wherein it has the first winding pole along the starting ends winding of the first track Property, and it terminates End winding with second winding polarity opposite with the first winding polarity.In this case, the second rail The first space phase signal sensing coil construction in road has a kind of construction, wherein it has along the starting ends winding of the second track There is second winding polarity opposite with the first winding polarity, and it terminates End winding with the first winding polarity.

According to B) each other embodiments in, along sense wire ring structure since starting ends, the first track first is empty Between phase signal sense wire ring structure have a kind of construction, wherein its along the first track starting ends winding have first around Group polarity, and it terminates End winding also and has the first winding polarity, its starting ends winding and its terminate End winding it Between at least one winding area include two windings, the two windings have the second winding pole opposite with the first winding polarity Property.In this case, second track the first space phase signal sensing coil construction has a kind of construction, wherein its edge The starting ends winding of second track has second winding polarity opposite with the first winding polarity, and it terminates End winding With second winding polarity opposite with the first winding polarity, its starting ends winding and its terminate between End winding extremely A few winding area includes two windings, the two windings have the first winding polarity.

The most basic combination of design feature disclosed above is enough to eliminate in the prior art (for example, in the patent of ' 958) Certain design constraint, these design constraints have been considered as natural necessary design constraint and are feeling to compensate or to offset Answer certain " offset " signal component in formula encoder.As an example, ' 958 patent requirements do not have widely available non- Traditional scale is (that is, there are two the scales of prograde orbit for tool, wherein scale pattern offsets relative to each other one and half its scale Spacing).Such scale has cost and availability defect, and not compatible with other kinds of detector.Advantageously, non-biography System or traditional scale can be used together to corresponding embodiment disclosed herein.As a further example, (' 958 are special for the prior art Benefit) assume or require the ideal symmetrical in two symmetrical half portions along the detector portion of two parallel scale track alignment. But this is not accounted for place and route asymmetry and can be generated due to practical layout, manufacture or manufacturing constraints, this will lead to respectively Kind asymmetric information and prevention acquisition " signal offset ".Consider that multiple " space phase " coil constructions must be in the same area weight Folded (schematically illustrating relatively with " single phase " simple shown in the patent of ' 958), this is true in particular.This is for relatively For long detector design and especially true, the detector design can require many sensing rings with small size, To obtain high-resolution and enough signal levels.Advantageously, each detector portion design principle disclosed herein allow compared with A large amount of practical layout and manufacture alternative, according to major elements disclosed herein and feature, originally due to practical layout and The producible potential signal asymmetry of manufacturing constraints can be reduced to unconspicuous degree.

Advantageously, each design principle and feature disclosed herein are additionally provided for overcoming " dynamic spacing " effect to generate The alternative of errors in position measurement, " dynamic spacing " effect in United States Patent (USP) No.5,998,990 and 7,239,130 (point Be not He ' 130 of ' 990 patent) in explained, each of which passes through reference herein and is integrally incorporated.Design principle disclosed herein and spy Sign can be used alone or in combination with the technical solution disclosed in for example exist ' 990 and/or the patent of ' 130, with reduce and/or offset by The error that " dynamic spacing " effect generates, while using traditional scale and/or lower cost detector portion design structure, even For spacing and/or high-resolution position encoder.

Detailed description of the invention

Fig. 1 is to utilize the exploded isometric view of the handheld tool type slide calliper rule of electronic position encoder, the electronic position Encoder includes detector portion and scale.

Fig. 2 is the plane for showing the first illustrative embodiments of the detector portion that can be used in electronic position encoder View.

Fig. 3 is the plane for showing the second illustrative embodiments of the detector portion that can be used in electronic position encoder View.

Fig. 4 is the isometric view for showing the first illustrative embodiments of field generation overhang part of detector portion Figure.

Fig. 5 is the isometric view for showing the second illustrative embodiments of field generation overhang part of detector portion Figure.

Fig. 6 be include electronic position encoder measuring system component an illustrative embodiments block diagram.

Fig. 7 is the third example for showing the detector portion and compatible scale pattern that can be used in electronic position encoder The plan view of property embodiment.

Fig. 8 is the 4th example for showing the detector portion and compatible scale pattern that can be used in electronic position encoder The plan view of property embodiment.

Fig. 9 is the 5th example for showing the detector portion and compatible scale pattern that can be used in electronic position encoder The plan view of property embodiment.

Figure 10 is to show the 6th of the detector portion and compatible scale pattern that can be used in electronic position encoder to show The plan view of example property embodiment.

Figure 11 is to show the 7th of the detector portion and compatible scale pattern that can be used in electronic position encoder to show The plan view of example property embodiment.

Figure 12 is to show the 8th of the detector portion and compatible scale pattern that can be used in electronic position encoder to show The plan view of example property embodiment.

Figure 13 is to show the 9th of the detector portion and compatible scale pattern that can be used in electronic position encoder to show The plan view of example property embodiment.

Specific embodiment

Fig. 1 is the exploded isometric view of handheld tool type slide calliper rule 100 comprising scale member 102 and slide block assembly 120, scale member 102 has the cross section of the general rectangular including scale 170.In various embodiments, scale 170 can be along survey It measures axis direction MA (for example, corresponding to x-axis direction) to extend, and may include signal modulation scale pattern 180.Known type Coating 172 (for example, 100 μ m-thicks) can cover scale 170.108 He of measuring jaw near the first end of scale member 102 110 and the removable measuring jaw 116 and 118 on slide block assembly 120 in known manner be used for measurement object size.Sliding block Component 120 can optionally include depth rod 126, and the depth of 102 lower section of scale member is maintained at by end stop 154 In bar groove 152.Depth rod engagement end portion 128 may extend into hole to measure its depth.The lid 139 of slide block assembly 120 can wrap Include off/on switches 134, zero point setting switch 136 and measurement display 138.The base portion 140 of slide block assembly 120 includes connecing The guidance edge 142 of the side edge 146 of scale member 102 is touched, 147 biasing elastic press rods 148 of screw are against scale member 102 Edges matched, to ensure correctly to be aligned, for measuring, and for relative to the mobile read head 164 of scale 170.

The pickup component 160 being mounted on base portion 140 keeps read head 164, and read head is preferably In include substrate 162 (for example, printed circuit board), the base plate carrying detector portion 167 and signal processing configure 166 (examples Such as, control circuit), the detector portion 167 includes generating coil and one group of sensing along the field of measurement axis direction MA arrangement Element (for example, being collectively referred to as field generates and sense winding construction).Elastic sealing element 163 can be crushed on lid 139 and substrate 162 it Between, pollutant is isolated far from circuit and connector.Detector portion 167 can be covered by insulating coating.

In a particular exemplary example, detector portion 167 can be arranged in parallel with scale 170, and towards scale 170, it can be with scale 170 (and/or scale pattern 180) along depth (Z) side before the detector portion 167 towards scale 170 To the gap of separated 0.5mm magnitude.Read head 164 and scale 170 can be formed together as electronic position encoder Partial energy converter.In one embodiment, energy converter can be vortex energy converter, be grasped by generating changing magnetic field Make, wherein changing magnetic field induces circulating current in some signal modulation elements of scale pattern 180, and (it is also referred to as whirlpool Stream), the scale pattern 180 is arranged in the changing magnetic field, as will be described in more detail in the following.It will be realized that such as Fig. 1 institute The slide calliper rule 100 shown are typical one kind in the various applications for implement electronic position encoder, and electronic position encoder has been sent out Many years are opened up, to provide compact dimensioning, low-power operation (for example, for long battery life), high-resolution and high measurement Accuracy, the opposite combination optimized of low cost and pollution robustness.Any aspect among these factors, even small changes It into being also in demand, but is difficult to obtain, is especially considering that and applies in the respective applications in order to obtain business success Design constraint.The principle disclosed in the following description provides all of these factors in the effective and compact mode of abnormal cost It is improve more.

Fig. 2 can be used as detector portion 167 and signal modulation scale pattern in electronic position encoder shown in FIG. 1 The plan view of 180 the first equal illustrative embodiments.It is representative and partially schematic that Fig. 2 may be considered part.Inspection The amplifier section for surveying device part 167 and scale pattern 180 is shown in the lower part of Fig. 2.In Fig. 2, each element described below It is indicated, and is shown as superposed on one another to emphasize some geometrical relationships by their shape or profile.It should be understood that each element can It is in the different manufacture layers being located at Different Plane along z-axis line direction, such as various operating clearances and/or insulating layer are set on demand, It is based on describing and/or summarize will be apparent to those skilled in the art below with reference to Fig. 4.Through the attached drawing of this specification, answer , it is realized that x-axis, y-axis and/or the z-axis line size of one or more elements can be amplified for the sake of clearly showing that.

The shown part of scale pattern 180 includes signal modulation element SME as shown in dotted line outline, they are located in quarter On degree 170 (as shown in Figure 1).In the embodiment shown in Figure 2, the direction the y edge of most of signal modulation element SME is hidden in First and second elongated portion EP1 and EP2 or less.It will be appreciated that scale pattern 180 is during operation relative to detector portion 167 is mobile, as shown in Figure 1.

In the example in figure 2, scale pattern 180 has the nominal scale pattern along the y-axis direction vertical with x-axis wide Size NSPWD is spent, and including discrete signal modulation element SME, they are along measurement axis direction MA (for example, corresponding to x-axis Direction) periodically arrange.More generally however, scale pattern 180 may include various spatially alternate molding figures Case comprising discrete element or one or more continuous pattern elements, as long as the pattern has according to along x-axis direction The space characteristics of change in location, so as to according to known method provide detector portion 167 sensing element SEN (for example, SEN14 the detector signal (in some embodiments, also known as detector signal component) of position is generated depending in).

In various embodiments, detector portion 167 is configured to install close to scale pattern 180, and along measurement axis Direction MA is mobile relative to scale pattern 180.Detector portion includes that field generates coil FGC and multiple sensing elements, can be had There are various alternative constructions, it, such as will be by ability to be applied in combination in various embodiments with various corresponding signal processing mechanisms Field technique personnel are understood.Fig. 2 shows representative single group of sensing element SEN1-SEN24, in the particular implementation It include the sensing loop member (be alternatively referred to as sensing coil part or sense the element of winding) being connected in series in example.In the implementation In example, adjacent loop member is connected by the conductor configuration on each PCB layer, connects (example according to known method by lead Such as, as shown in Figure 4), so that they have opposite winding polarity.That is, if the first ring is with the contribution of positive polarity detector signal Variation magnetic field is responded, then adjacent ring is with the response of negative polarity detector signal contribution.In this particular example, sensing element string Connection connection, so that their detector signal or signal contribution are summed it up, " adduction " detector signal is in detector signal It exports output to signal processing at connector SDS1 and SDS2 and configures (not shown).While figure 2 show that single group of sensing Part is to avoid visual confusion, but it should be appreciated that in some embodiments, it is advantageous to construct detector in different spaces phase The sensing element (for example, in order to provide orthogonal signalling) of the one or more additional groups of the place's of setting setting, such as those skilled in the art institute Understand.However, it will be appreciated that the construction of sensing element described herein is merely exemplary, rather than it is restrictive.As One example, in some embodiments, each exportable individual signal of sensing element ring to corresponding signal processing configure, example The commonly assigned Copending U.S. Patent Application No.15/199 such as such as submitted on June 30th, 2016, disclosed in 723, It is integrally incorporated herein as reference.More generally, in various embodiments, various known sensing elements constructions can with herein It discloses and the principle of prescription is applied in combination, for being combined with various known scale patterns and signal processing mechanism.

Each sensing element and field generate coil FGC and can be fixed on substrate (for example, substrate 162 of Fig. 1).Field generates line Circle FGC can be described as around interior zone INTA, and the interior zone has the nominal coil region length ruler along x-axis direction The nominal coil region width dimensions of very little NCALD and the substantially YSEP along y-axis direction.In various embodiments, field generates line Circle FGC may include the individual pen around interior zone INTA.In operation, including field generation coil FGC response coil drive signal The magnetic flux of variation is generated in the INTA of portion region.

In various embodiments, field generate coil FGC may include importation INP, the first and second elongated portion EP1 and EP2 and end sections EDP (for example, according to implementation disclosed by reference Fig. 4 and/or 5).Importation INP includes the first He Second connecting portion divides CP1 and CP2, will be from signal processing configuration (for example, the signal of the signal processing configuration 166 of Fig. 1, Fig. 6 Processing configuration 766 etc.) coil drive signal be connected to field and generate coil FGC.In some embodiments, the first and second connection Part CP1 and CP2 can be connected to signal processing configuration by printed circuit board lead etc., and connector can be utilized also and reference end Part EDP is shielded in principle those of disclosed below.First and second elongated portion EP1 and EP2 are each along x-axis direction neighbour The side of nearly interior zone INTA extends, and has the nominal generation track width size NGTWD along y-axis direction.Shown In embodiment, the nominal track width size NGTWD that generates is identical for EP1 and EP2, but this not all embodiment In requirement.End sections EDP (for example, as with reference to implementation disclosed by Fig. 4 and/or 5) across with the first and second elongate portions The corresponding y-axis direction the nominal coil width dimensions YSEP between EP1 and EP2 is divided to separate, it is close to provide in-between The connector of the end of interior zone INTA.In each embodiment according to the principle disclosed by this, field generates coil FGC It is advantageously employed such design proportion construction, wherein each nominal track width size NGTWD that generates is at least nominal coil At least 0.1 times of peak width size YSEP.In some embodiments, field generates coil FGC and may be configured so that, Mei Gebiao Claim to generate at least 0.15 times that track width size NGTWD is nominal coil region width dimensions YSEP, or at least 0.25 times, or At least 0.5 times.In some embodiments, field generates coil FGC and may be configured so that, generates in the magnetic flux with response variation Under the nominal operating frequency of the corresponding restriction of detector signal, each nominal track width size NGTWD that generates is elongated portion At least 25 times of the skin depth of EP1 and EP2.

Sensing element SEN1-SEN24 arranges (for example, corresponding to measurement axis direction MA) along x-axis direction and is fixed on On substrate (for example, substrate 162 of Fig. 1).In the example in figure 2, each sensing element SEN has along the nominal of y-axis direction Sensing element width dimensions NSEWD, wherein at least most of nominal sensing element width dimensions NSEWD is included in along y-axis side To nominal coil region width dimensions YSEP in.Sensing element SEN is configured to provide detector signal, responds by adjacent Scale 170 scale pattern 180 modulating part provide variation magnetic flux on local effect.Signal processing configuration (for example, The signal processing of Fig. 1 configures signal processing configuration 766 of 166 or Fig. 6 etc.) it can be configured to, based on defeated from detector portion 167 Detector signal out determines position of the multiple sensing element SEN1-SEN24 relative to scale 170.Generally, field generates Coil FGC and sensing element SEN1-SEN24 etc. can be all according to known principle (for example, the principle for being used for induction encoder) operation As those are described in the bibliography being incorporated to.

In various embodiments, it is insulated from each other (for example, as being located at printed circuit to generate coil FGC and sensing element SEN for field In the different layers of plate, etc.).In such embodiment, the nominal sensing element of at least one sensing element SEN is wide Spend size NSEWD be advantageously greater than nominal coil region width dimensions YSEP, and extend beyond at least one elongated portion EP1 or Internal edge IE a certain amount of EP2, the amount are defined as overlapping dimension OD.In addition, in embodiments, field generates coil FGC can be advantageously configured to so that, the nominal track width size NGTWD that generates is greater than corresponding overlapping dimension OD.Each In embodiment, elongated portion EP1 and EP2 can be manufactured on the first layer of printed circuit board, and sensing element SEN may include system The conducting ring in one or more layers of printed circuit board is made, described one or more layers includes the layer different from first layer, until Less near overlapping dimension OD.

In various embodiments, substrate may include printed circuit board, also, it may include that manufacture exists that field, which generates coil FGC, Conductive trace (e.g., including elongated portion EP1 and EP2) on printed circuit board.In various embodiments, sensing element SEN It may include the magnetic flux sensing ring that the conductive trace of manufacture on a printed circuit is formed.As described above with respect to figure 1, in each implementation In mode, detector portion 167 may include the measuring instrument in each type (for example, slide calliper rule, micrometer, measuring instrument, linear quarter Degree) in.For example, detector portion 167 can be fixed to sliding component, scale pattern 180 can be fixed to the beam with measurement axis Component, measurement axis are overlapped with x-axis direction.In such construction, sliding component can be movably mounted at beam On, and can be moved along measurement axis direction MA in the plane in x-axis direction and y-axis direction, z-axis line direction is orthogonal In the plane.

Fig. 3 can be used as detector portion 367 of detector portion 167 in electronic position encoder shown in FIG. 1 etc. The second illustrative embodiments plan view.Detector portion 367 has the spy similar with the detector portion 167 of Fig. 2 Property and component, and its design and operation be configured to realize herein disclose and prescription each design principle.Particularly, Fig. 3 In the specified element of the appended drawing reference that " has slash " be similar to the respective class with Fig. 2 as " no slash " appended drawing reference element, And can be regarded as similarly operating, unless illustrating additionally below.

The main distinction between Fig. 3 and the embodiment of Fig. 2 is that detector portion 367 is along y-axis direction than detector portion It is narrow to divide 167, so that nominal scale pattern width dimensions NSPWD is significantly greater than nominal scale pattern width dimensions NSPWD ' and detection Other obvious y-axis sizes of device part 367.For example, in a particular implementation, nominal scale pattern width dimensions NSPWD ' can be about 2/3 or less of nominal scale pattern width dimensions NSPWD.In various embodiments, such structure Make the bigger Strategic Lateral Offset tolerance that can lead to for detector portion 367 relative to the lateral movement of scale pattern 180.

Despite the presence of this difference, other features of detector portion 367 can be similar to those of detector portion 167 Feature.For example, each sensing element SEN ' can have the nominal sensing element width dimensions NSEWD ' along y-axis direction, wherein At least most of nominal sensing element width dimensions NSEWD ' is included in the nominal coil region width dimensions along y-axis direction In YSEP '.In various embodiments, it includes the first and second elongated portion EP1 ' and EP2 ' and end that field, which generates coil FGC ', Part EDP ' (for example, according to implementation disclosed by reference Fig. 4 and/or 5), it is all these to have and detector portion 167 The similar construction of respective element.In some embodiments, field generates coil FGC ' and may be configured so that, each nominal generation mark Line width dimensions NGTWD ' is at least 0.1 times or at least 0.15 times of nominal coil region width dimensions YSEP ', or at least 0.25 times, or at least 0.50 times.Other features and/or design relation can be also similar to described in reference diagram 2, if desired.

Example constructions relative to above-mentioned detector portion 167 and 367, it should be appreciated that some existing systems are using relatively Relatively narrow trace and/or relatively large interior zone are (for example, biggish region INTA and/or nominal coil region broad-ruler Very little YSEP) for field generation coil.More particularly, in some existing systems, it is usually desirable to relevant detector portion element With relatively high inductance, so that the system, with the relatively long time of resonating, will be considered for utilizing with sufficiently high Q Signal processing and measurement method it is advantageous.Relatively, according to principle disclosed herein, using wider track width (for example, Using INTA and/or YSEP as cost, the total detector y-axis size applied by specific application is limited), this causes relatively Small inductance and lesser total impedance, for this purpose, larger amount of electric current can be flowed in the relatively short time (for example, generating Stronger signal), and it still is able to obtain the resonance of expected time length for measuring.As above about 167 He of detector portion Described in 367, in various embodiments, each nominal track width size NGTWD that generates is nominal coil region width dimensions At least 0.10 times or at least 0.15 times of YSEP, or at least 0.25 times, or at least 0.50 times.As some particular example values, In some embodiments, nominal coil region width dimensions YSEP can be the magnitude of 2.0mm or 8.0mm or 10mm, and each The nominal track width size NGTWD that generates can be at least 0.25mm or 0.50mm or 1.00mm or bigger magnitude.These can Compared with the track width in some existing systems of 0.10mm magnitude.Such as those constructions disclosed herein are in some examples It determines in son, when comparable driving signal input field is generated coil, obtains than comparable prior art configuration signal water The flat detector signal level for being 1.5 or more more than the factor, and be in some cases 3 or more more than the factor.

Example constructions etc. relative to detector portion 167 and 367, in some embodiments, sensing element SEN (example Such as, as shown in Figures 2 and 3 region encapsulating ring or coil part) it can provide some advantages relative to more conventional sensing element (for example, increased gain etc.), if they are constructed according to peak signal gain design disclosed herein, wherein generating line with field The amount of the sensing element field receiving area of circle FGC coincidence or position in the inner (for example, in INTA) should be maximized relatively, simultaneously The amount (for example, along y-axis direction) of sensing element field receiving area except the conductor for forming field generation coil FGC answers phase It maximizes over the ground.It will be appreciated that overlapping dimension OD is presented in sensing element SEN as shown in Figure 2, has and meet the upper of the principle State design relation.For example, keeping each nominal generation track width size NGTWD bigger than corresponding overlapping dimension OD.

Fig. 4 be show according to be disclosed herein with the principle of prescription include in detector portion 467 field generation Isometric " wire frame " view of the first illustrative embodiments of the end sections EDP of coil FGC.It will be appreciated that detector portion 467 element can with as the element class of the like numerals of the detector portion of Fig. 2 167 design and operate.Detector portion Dividing 467 includes that (the sensing element SEN17-SEN24 of illustrative is such as by field generation coil FGC and multiple sensing element SEN1-SEN24 Shown in Fig. 4).It includes the first and second elongated portion EP1 and EP2 and end sections EDP that field, which generates coil FGC, and fixed On substrate (for example, substrate 162 of Fig. 1) and surround interior zone INTA.

In various embodiments, generation coil FGC and sensing element SEN in field is insulated from each other, for example, it is located at printed circuit In the different layers of plate (layer structure does not clearly show that in Fig. 4).In Fig. 4, the Z coordinate respectively marked can be regarded as being overlapped or know The respective surfaces of not each printed circuit board (PCB) layer, but the manufacturing method of substitution can also be used.The element of scale pattern 180 SME is present on the surface of scale 170 (as shown in Figure 1) at Z coordinate Zsme.It will be appreciated that scale 170 and carrying detector The printed circuit board (PCB) of the element of part 467 separates.In the embodiment shown in fig. 4, the front surface of PCB is (for example, have The front surface of insulating coating) it is located at Z coordinate Zfs.There is operation between scale element Z coordinate Zsme and front surface Z coordinate Zfs Gap.Elongated portion EP1 and EP2 can be manufactured on the PCB layer surface with Z coordinate Zep, and they can be covered by insulating coating Lid.Sensing element SEN may include the conductive loop section of interconnection, they are located at the corresponding PCB layer with Z coordinate ZseL1 and ZseL2 On surface.Conductive loop section can be connected between layers using lead, so that conductor can be interlaced with each other, while connecting in a series arrangement Sensing signal contribution, and the signal contribution polarity of response is provided, as described above.

First and second elongated portion EP1 and EP2 it is each along x-axis direction extend, nominally and along and x-axis and y-axis The vertical z-axis line direction in line direction is located at the front surface elongate portion of the PCB away from the detector portion 467 towards scale pattern 180 Divide at z distance EPZD=(Zep-Zsme).As described above, end sections EDP includes conductive path, across with first and second The corresponding y-axis direction nominal coil width dimensions YSEP interval between elongated portion EP1 and EP2, to mention in-between For the connector close to the end of interior zone INTA.In the embodiment shown in fig. 4, end sections EDP includes being located to have Z Shielding end section SES on the corresponding PCB layer surface of coordinate Zses, nominally positioned at the PCB's away from detector portion 467 At the shielding end section z distance SESZD=(Zses-Zfs) of front surface, wherein shielding end section z distance SESZD is greater than Elongated portion z distance EPZD.First elongated portion EP1 is connected to shielding end by the first pontes CNP1 (for example, PCB lead) The first end of portion section SES, second connecting portion divide CNP2 (for example, PCB lead) that the second elongated portion EP2 is connected to shielding The second end of end section SES.

In embodiment shown in Fig. 4, detector portion 467 further includes conductive shield region CSR (for example, passing through Fig. 4 In the conductive plane regions that indicate of void " edge " line arbitrarily placed), conductive shield region CSR is along x-axis and y-axis direction Extend, nominally and be located at Z coordinate Zcsr corresponding PCB layer surface on, nominally be located at away from detector portion 467 At the shielding area z distance SRZD=(Zcsr-Zfs) of the front surface of PCB.In various embodiments, shielding area z distance SRZD It is located at least part and inspection of shielding end section SES less than shielding end section z distance SESZD, conductive shield region CSR It surveys between the front surface of the PCB of device part 467.Conductive shield region CSR may include prolonging in the PCB of detector portion 467 The part of ground plane layer is stretched, or in some embodiments, may include discrete region.Conductive shield region CSR may include sky Lyriform pore, so that the first and second coupling part CNP1 (for example, PCB lead) and conductive shield region CSR is separated or is insulated from.

Generally, known before to generate overhang part (for example, the end extended along y-axis direction for field Part) construction generate field component already lead in the detector signal closest to their sensing element generate mistake point Amount --- it is known as " end effect ".It has attempted to using " tapered ends construction " in a detector and/or passes through spaced ends This end effect is eliminated partially away from end sensing element.But these schemes undesirably reduce signal strength, or Increase detector x-axis size, or both all have.Relatively, above-mentioned shielding structure tends to reduce and be generated by end sections Field component and/or prevent it from reaching signal modulation element SME.In this way, the field component for being coupled to nearest sensing element is smaller And/or substantially constant, and it is unrelated with graduation position, thus substantially eliminate arbitrary end effect.

As described above, elongated portion EP1 and EP2 can be manufactured on the first layer of printed circuit board in various embodiments, Shielding end section SES can be manufactured on the second layer of printed circuit board, and conductive shield region CSR manufactures the ratio print in circuit board The second layer of printed circuit board is closer on the layer of detector front surface (for example, front surface of the PCB of detector).In this way at one Embodiment in, conductive shield region CSR can be manufactured on the layer between first layer and the second layer of printed circuit board. In such construction, conductive shield region CSR may include at least part of the ground plane layer of printed circuit board, wherein ground Plane layer is between first layer and the second layer.In one embodiment, elongated portion EP1 or EP2 and shielding end section Connector (for example, a part as first or second coupling part CNP1 or CNP2) between SES may include along z-axis line side To the printed circuit board lead of extension.In the construction as one, conductive shield region CSR can be manufactured in printed circuit board On layer between first layer and the second layer, and printed circuit board lead may pass through manufacture in the CSR of conductive shield region Opening.

Fig. 5 be show according to be disclosed herein with the principle of prescription include in detector portion 567 field generation Isometric " wire frame " view of the second illustrative embodiments of the end sections EDP of coil FGC.It will be appreciated that detector portion 567 element can with as the element class of the like numerals of the detector portion 467 of the detector portion 167 and/or Fig. 4 of Fig. 2 Design and operation, and can be by analogy therewith by basic comprehension.

In Fig. 5, as shown in Figure 4, the Z coordinate respectively marked can be regarded as being overlapped or identifying each printed circuit board (PCB) each surface of layer, but the manufacturing method of substitution can also be used.The element SME of scale pattern 180 is at Z coordinate Zsme On the surface of scale 170 (as shown in Figure 1).Detector portion 567 have be located at Z coordinate Zfs at front surface (for example, The front surface of insulating coating on the PCB of detector portion 567).Between scale element Z coordinate Zsme and front surface Z coordinate Zfs There are operating clearances.Elongated portion EP1 and EP2 can be manufactured on the PCB layer surface with Z coordinate Zep, and they can be insulated Coating covering.Sensing element SEN may include the conductive loop section of interconnection, they are located at the phase with Z coordinate ZseL1 and ZseL2 It answers on PCB layer surface, is connected as being summarized reference detector part 467 above.

Nominally the first and second elongated portion EP1 and EP2 are located at away from the detector portion 567 towards scale pattern 180 Front surface elongated portion z distance EPZD=(Zep-Zsme) at.Such as in detector portion 467, end sections EDP includes Conductive path, it is corresponding across the nominal coil width dimensions YSEP between the first and second elongated portion EP1 and EP2 Y-axis direction interval, to provide the connector close to the end of interior zone INTA in-between.Embodiment shown in Fig. 5 In, end sections EDP " includes the shielding end section SES " on the corresponding PCB layer surface with Z coordinate Zses ", name In justice at shielding end section z distance SESZD "=(the Zses "-Zfs) of the front surface away from detector portion 567, wherein It shields end section z distance SESZD " and is greater than elongated portion z distance EPZD.The first pontes CNP1 (e.g., including PCB draws Line CNP1A and conductive trace CNP1B) by the first elongated portion EP1 be connected to shielding end section SES first end, second Second elongated portion EP2 is connected to shielding by coupling part CNP2 (e.g., including PCB lead CNP2A and conductive trace CNP2B) The second end of end section SES.

In embodiment shown in Fig. 5, detector portion 567 further includes conductive shield region CSR " (for example, passing through figure The conductive plane regions that empty edge line in 5 indicates), which extends along x-axis and y-axis direction, and name It is upper to be located on the corresponding PCB layer surface with Z coordinate Zcsr ", nominally it is located at the preceding table of the PCB away from detector portion 567 At shielding area z distance SRZD "=(the Zcsr "-Zfs) in face.In various embodiments, shielding area z distance SRZD " is less than screen End section z distance SESZD " is covered, conductive shield region CSR " is located at least part and detection of shielding end section SES " Between the front surface of the PCB of device part 567.For embodiment shown in fig. 5, it should be appreciated that in some embodiments, if If it is expected that, shielding area CSR " can be located at surface identical with elongated portion EP1 and EP2 on (that is, Zcsr "=Zep and EPZD=SRZD' ', if desired).In addition, in such embodiment, shielding end section SES " and conduction Trace CNP1B and CNP2B can be located at the similar face (one or more) for sensing element SEN, if desired (that is, Zses "=ZseL1 or Zses "=ZseL2, if desired).In such an embodiment, detector portion 567 PCB may include less layer compared with detector portion 467 and/or relatively thin along z-axis line direction.Under any circumstance, it is examining The shielding structure of the end sections EDP " of device part 567 is surveyed to summarize with the end sections EDP of reference detector part 467 before Similar mode eliminates end effect.

About above-mentioned example detectors part 467 and 567, it should be appreciated that be based at least partially on and generated relative to field The opposite layer position of the shielding end section SES of the layer position of the elongated portion EP1 and EP2 of coil FGC is (for example, be located at difference PCB layer on, etc.), conductive shield region (one or more) CSR (CSR ") can reduce shielding end section SES for sense Survey the influence (for example, magnetic flux about variation) of element SEN.It is such construction allow using conductive shield region (one or It is multiple) CSR (CSR "), and allowing field to generate coil FGC has shorter total x-axis size (for example, for this purpose, end sections EDP It does not need in order to avoid influencing to respond to change the detector signal and separate sensing element SEN positioning, etc. that magnetic flux generates).

Fig. 6 be include electronic position encoder 710 measuring system 700 component an illustrative embodiments frame Figure.It will be appreciated that the component 7XX of some labels of Fig. 6 can correspond to the component 1XX of the like numerals of Fig. 1, and/or have with Etc as operate, unless described additionally below.Electronic position encoder 710 includes the scale for being formed together energy converter 770 and detector portion 767 and signal processing configuration 766.In various embodiments, detector portion 767 may include above About any construction or other constructions described in Fig. 2-6.Measuring system 700 further includes user interface feature, such as display 738 It and can additionally include power supply 765 with the operable switch 734 and 736 of user.In various embodiments, it can also wrap Include external data interface 732.All these elements are attached to signal processing and configure 766 (or signal processing and control circuits), this It can be embodied as single processor.Signal processing configuration 766 is determined based on the detector signal inputted from detector portion 767 Position of the sensing element of detector portion 767 relative to scale 770.

In various embodiments, Fig. 6 signal processing configuration 766 (and/or Fig. 1 signal processing configuration 166) may include Runs software is to execute the one or more processors of function described herein, or is made from it.Processor includes programmable General or specialized microprocessor, programmable controller, specific integrated circuit (ASIC), programmable logic device (PLD) etc. or this The combination of the device of sample.Software can store in memory, such as random access storage device (RAM), read-only memory (ROM), The combination of flash memory etc. or such component.Software is also stored in one or more storage devices, such as CD, flash memory Device or any other kinds of nonvolatile memory for storing data.Software may include one or more program moulds Block comprising execute particular task or implement subprogram, programs, objects, element, the data structure of particular abstract data type Deng.In a distributed computing environment, the function of program module can by wired or wireless tectonic association or be distributed in it is multiple in terms of In calculation system or device, and accessed via service request.

Fig. 7 is the detector portion 167 and scale pattern 180 that can be used separately as in electronic position encoder shown in FIG. 1 Detector portion 767 and compatible scale pattern 780 third illustrative embodiments plan view.Detector portion 767 have the characteristic and component similar with the detector portion 167 of Fig. 2, and its design and operation are configured to realize and drape over one's shoulders herein Each design principle of dew and prescription.Particularly, pass through the appended drawing reference or label in Fig. 7 --- with Fig. 2 or herein its (for example, similar " XX " adds prefix as 7XX and 2XX) those of similar or identical in his figure --- indicate similar element, And be understood to be and similarly operate, unless being particularly pointed out following.Therefore, 767 He of detector portion will only be described below The significant difference of scale pattern 780.Compared with the embodiment described before, detector portion 767 and compatible scale pattern 780 provide the additional advantage about the signal accuracy and/or signal length for providing more excellent robustness, such as institute more fully below It states.

A main distinction between Fig. 7 and the embodiment of Fig. 2 is, scale pattern 780 includes parallel arranged the One pattern track FPT and the second pattern track SPT.First pattern track FPT has in the first track interior boundary FTIB and the Along the nominal first pattern track width size FPTWD in y-axis direction, first track between one track outer limit FTEB For inner limit FTIB closest to another pattern track, the first track outer limit FTEB and another pattern track are farthest. Second pattern track SPT has between the second track interior boundary STIB and the second track outer limit STEB along y-axis side To nominal second pattern track width size SPTWD, the second track interior boundary STIB closest to another pattern track, The second track outer limit STEB and another pattern track are farthest.Each of first and second pattern track FPT and STP Including signal modulation element SME, it is arranged to provide the characteristic of spatial variations, the characteristic is as the position along x-axis direction Periodic function and change.In Fig. 7, the shown signal modulation element SME with cross hatched area can be considered as indicating field Attenuating elements, according to known principle (for example, conductive plate or metal strip type that they can be board type scale are carved The rise region of degree) with the magnetic flux of relatively large degree locally attenuation change, and in the signal modulation of cross-hatched member Space between part SME can be considered as indicating that field maintains element, according to known principle (for example, they can be circuit board class The non-conducting areas of type scale or the recessed area of metal strip type pattern) with relatively small degree locally attenuation change Magnetic flux, or locally enhance the magnetic flux of variation.

Another main distinction is that detector portion 767 is configured to compatibly operate with scale pattern 780.Detection Device part 767 includes that field generates coil construction FGC, can be fixed on substrate, and generate coiler part including the first track field FTFGCP and the second track field generate coiler part STFGCP.It may include importation INP that field, which generates coil construction FGC, this is defeated Entering part includes at least two coupling parts (for example, CP1 and CP2), they believe the coil drive configured from signal processing It number is connected to field and generates coil construction FGC.In generation coil construction FGC on the scene, the first track field generates coiler part FTFGCP Around the first interior zone FINTA being aligned with the first pattern track FPT, and have inside nominal the first of x-axis direction Zone length size FIALD and nominal first interior zone width dimensions YSEP1 along y-axis direction, and respond coil drive Signal generates the first magnetic flux of variation in the first interior zone FINTA.Similarly, the second track field generates coiler part STFGCP surrounds the second interior zone SINTA for be directed at the second pattern track SPT, and with along nominal the of x-axis direction Two interior zone length dimension SIALD and nominal second interior zone width dimensions YSEP2 along y-axis direction, and line of response Circle driving signal generates the second magnetic flux of variation in the second interior zone SINTA.

Detector portion 767 further includes arranging along x-axis direction and being fixed on multiple sensing element SEN (examples on substrate Such as, SEN1, SEN2), each sensing element SEN has the nominal sensing element width dimensions NSEWD along y-axis direction, across Cross the first and second interior zone FINTA and SINTA, wherein the multiple sensing element is configured to provide detector signal, The part to variation magnetic flux that the detector signal response is provided by the signal modulation element SME of neighbouring scale pattern 780 Effect.In various embodiments, the multiple sensing element SEN includes magnetic flux sensing ring, and can be by manufacturing in printed circuit Conductive trace and lead on plate are formed.In each embodiment (for example, as shown in Figure 7), it is configured to provide the first sensing The magnetic flux sensing ring of circumpolar (for example, its polar variation magnetic flux of response first is to generate the electric current along first direction) is along x-axis Direction senses circumpolar (for example, its response is with the first opposite polarity variation magnetic flux to generate edge with offer second is configured to Unidirectional electric current) magnetic flux sensing ring interlock, second sensing circumpolar with first sense circumpolar it is opposite.Signal processing is matched Detector portion can be operatively connected to by setting, and to provide coil drive signal, and be based on according to known method from detection The shown sensing element SEN of device part 767 (and is arranged in other of other space phase places of setting according to known principle and is not shown Sensing element SEN) input detector signal determine the relative position between detector portion and scale pattern.

As shown in fig. 7, field generates coil construction FGC and sensing element SEN advantageously according to the principle disclosed before this Construction.It may include the lead shown in one or more that field, which generates coil construction FGC, be used for one or more end portions to realize Divide the shielding structure of EDP.It should be understood that do not need in certain embodiments or it is undesirable shown in lead can be omitted.

In the embodiment shown in figure, the first track inner side and outer side elongated portion FTIEP and FTOEP is respectively along x-axis Line direction extends adjacent to the first interior zone FINTA.Elongated portion FTIEP is adjacent to the first track interior boundary on the inside of first track FTIB is positioned, and elongated portion FTOEP is positioned adjacent to the first track outer limit FTEB on the outside of the first track.It is thin on the inside of first track Long part FTIEP has generates track width size NFTIGTWD on the inside of nominal first track in y-axis direction.First track Outside elongated portion FTOEP has generates track width size NFTOGTWD on the outside of nominal first track in y-axis direction.Root According to principle disclosed herein, nominal first track generates track width size NFTIGTWD and NFTOGTWD (can be identical, or can With different from each other) it is each at least 0.1 times of nominal first interior zone width dimensions YSEP1.In some embodiments, may be used Advantageously, it is nominal first interior zone width dimensions that the first track, which generates track width size NFTIGTWD and NFTOGTWD, At least 0.15 times or at least 0.25 times of YSEP1 or at least 0.50 times.

Second track inner side and outer side elongated portion STIEP and STOEP is respectively along x-axis direction adjacent to the second interior zone SINTA extends.Elongated portion STIEP is positioned adjacent to the second track interior boundary STIB on the inside of second track, on the outside of the second track Elongated portion STOEP is positioned adjacent to the second track outer limit STEB.Elongated portion STIEP has along y-axis on the inside of second track Track width size NSTIGTWD is generated on the inside of nominal second trace in line direction.Elongated portion STOEP has on the outside of second track Have and generates track width size NSTOGTWD on the outside of nominal second track in y-axis direction.According to principle disclosed herein, mark Claiming the second track to generate track width size NSTIGTWD and NSTOGTWD (can be identical, or can be different from each other) each is mark Claim at least 0.1 times of the second interior zone width dimensions YSEP2.It in some embodiments, can be advantageously, the second track be raw Be at least 0.15 times of nominal second interior zone width dimensions YSEP2 at track width size NSTIGTWD and NSTOGTWD, Or at least 0.25 times or at least 0.50 times.Other features and/or design relation can be also similar to described in reference diagram 2, if it is desired to If.

In various embodiments, it is combined with the feature of above-outlined, nominal sensing element width dimensions NSEWD's is at least big It is partially contained on the outside of the first track on the outside of elongated portion FTOEP and the second track between elongated portion STOEP.In some implementations In mode, at least most of of nominal sensing element width dimensions NSEWD is included in the first and second track interior region FINTA Between SINTA.In various embodiments, it is insulated from each other to generate coil construction FGC and sensing element SEN for field.As shown in fig. 7, The nominal sensing element width dimensions NSEWD of at least one sensing element SEN is greater than the elongated portion FTOEP on the outside of the first track And second between elongated portion STOEP on the outside of track across total interior zone width dimensions OIAWD, and extend beyond the first rail On the outside of road on the outside of elongated portion FTOEP and the second track elongated portion STOEP the internal edge IE a certain amount of at least one, The amount is defined as overlapping dimension (for example, being the first Orbital Overlap size FTOD and/or the second Orbital Overlap size respectively STOD).In various embodiments, field generates coil construction FGC and is configured such that, each nominal outside generates track width ruler Very little (NFTOGTWD and NSTOGTWD) is greater than its associated overlapping dimension.In various embodiments, all elongated portions (FTIEP, FTOEP, STIEP and STOEP) is manufactured in the first layer of printed circuit board, and sensing element SEN includes that manufacture is printing Conducting ring in one or more layers of printed circuit board, described one or more layers include at least near overlapping dimension and and first layer Different layers.

In particular implementation shown in Fig. 7, the first and second pattern track FPT can each include mutually similar with SPT The signal modulation element SME of type, according to identical space periodic or wavelength W along x-axis direction in the first and second pattern rails It is arranged in road FPT and SPT.Signal modulation element SME in the second pattern track SPT is along measurement axis direction (x-axis side To) relative to the signal modulation Component Displacement in the first pattern track be about W/2 nominal scale track pattern shift amount STO.As indicated by the current arrows in Fig. 7, field generates coil construction FGC and is configured in the first interior zone FINTA Generating has the first polar first Orbit revolutionary magnetic flux, and generation is polar with second in the second interior zone SINTA Second Orbit revolutionary magnetic flux, the second polarity are opposite with the first polarity.

As previously mentioned, the multiple sensing element SEN may include having alternate sensing ring polar along x-axis direction Magnetic flux sensing ring (is alternatively referred to as sensing coil or senses winding), and the magnetic flux sensing ring passes through manufacture on a printed circuit Conductive trace formed.In embodiments, at least most of of magnetic flux sensing ring can be along y-axis direction across first and second Interior zone FINTA and SINTA.As shown in fig. 7, for example, specific sensing element SEN14 can be described as including the first track anode Winding (or windings section) FTSEN14 and second track anode winding (or windings section) STSEN14.For example, specific sensing Part SEN15 can be described as include the first track cathode winding (or windings section) FTSEN15 and the second track cathode winding (or around Group part) STSEN15, other sensing elements are also such.Be aligned with the first (track) interior zone FINTA winding (or around Group part) group or group provide an embodiment of first track the first space phase sense wire ring structure FTFSPSCCF.With Winding (or windings section) group of second (track) interior zone SINTA alignment or group provide second the first space phase of track An embodiment of sense wire ring structure STFSPSCCF.First and second track the first space phase sense wire ring structures FTFSPSCCF and STFSPSCCF is formed together total sense wire ring structure SCC, is configured such that, with scale pattern 780 Cooperation, all signal components generated in each of which winding or windings section (for example, FTSEN and STSEN) are having the same Space phase.That is, in this particular example, each sensing element SEN includes winding or windings section, first and second Identical sensing circumpolar is provided in interior zone FINTA and SINTA.Because of the magnetic generated in the first interior zone FINTA Logical polarity with the flux polarity that is generated in the second interior zone SINTA on the contrary, this with the first and second track pattern FTP and STP is of approximately the pattern interaction of the signal modulation element SME of the scale track pattern shift amount STO of W/2, in each sense It surveys in element SEN and generates enhancing signal contribution.It should be understood that the additional sense wire ring structure SCC with different spaces phase can root Detector portion 767 is similarly constructed and is added to according to known principle, and all final signals (for example, orthogonal signalling) can be located Reason is to provide the position measurement of robustness.

Fig. 8 is the detector portion 167 and scale pattern 180 that can be used separately as in electronic position encoder shown in FIG. 1 Detector portion 867 and compatible scale pattern 780 the 4th illustrative embodiments plan view.Quarter shown in Fig. 8 Spending pattern 780 can be similar or identical with scale pattern shown in Fig. 7, it is not described in detail following, but in addition to about itself and inspection Survey the operation of device part 867.Detector portion 867 has the characteristic and component similar with the detector portion 767 of Fig. 7, and its Design and operation are configured to realize each design principle being disclosed herein with prescription, and provide similar advantage.Pass through Appended drawing reference or label in Fig. 8 --- it is those of similar or identical (for example, similar " XX " with Fig. 7 or in this other figure Add prefix as 8XX and 7XX) --- specify similar element, and be understood to be and similarly operate, unless it is following particularly It points out.Therefore, the significant difference of detector portion 867 and detector portion 767 will be described only below.

Similar to detector portion 767, detector portion 867 is configured to the compatible operation with scale pattern 780. First track field generates coiler part FTFGCP and surrounds the first interior zone FINTA being aligned with the first pattern track FPT, and has There are the nominal first interior zone length dimension FIALD along x-axis direction and the nominal first inner area field width along y-axis direction Size YSEP1 is spent, and responds the first magnetic flux that coil drive signal generates variation in the first interior zone FINTA.Similarly, Second track field generates coiler part STFGCP and surrounds the second interior zone SINTA being aligned with the second pattern track SPT, and has There are the nominal second interior zone length dimension SIALD along x-axis direction and the nominal second inner area field width along y-axis direction Size YSEP2 is spent, and responds the second magnetic flux that coil drive signal generates variation in the second interior zone SINTA.

One between detector portion 867 and detector portion 767 differs from, such as the current arrows in Fig. 8 Indicated, field, which generates coil construction FGC and is configured to generate in the first interior zone FINTA, has first polar first Orbit revolutionary magnetic flux, and generating in the second interior zone SINTA, there is polar second track identical with the first polarity to become Change magnetic flux.The second significant difference in terms of the multiple sensing element SEN (for example, SEN1, SEN14) is related to this, such as with It is lower described.

Similar to detector portion 767, in detector portion 867, the multiple sensing element SEN has along y-axis The nominal sensing element width dimensions NSEWD in direction, it is the multiple across the first and second interior zone FINTA and SINTA Sensing element SEN is configured to provide detector signal, and the detector signal responds the adjacent signals tune by scale pattern 780 The local effect on variation magnetic flux that element SME processed is provided and detector signal is provided.As previously mentioned, the multiple sensing element SEN may include magnetic flux sensing ring (is alternatively referred to as sensing coil or senses winding), and the magnetic flux sensing ring is being printed by manufacture Conductive trace on printed circuit board is formed.In embodiments, magnetic flux sensing ring it is at least most of can along y-axis direction across First and second interior zone FINTA and SINTA.But it is different from detector portion 767, shown in detector portion 867 Magnetic flux sensing ring each include they conductive trace cross part or torsional part, in the first interior zone FINTA and the Opposite sensing circumpolar is provided in two interior zone SINTA.In embodiments, for at least big portion of magnetic flux sensing ring Point, the cross part or torsional part of their conductive trace are located in " sluggish " middle section or above it, described " not live Jump " middle section is between the first interior zone FINTA and the second interior zone SINTA, including the first track inside is elongated Part FTIEP and the second track inside elongated portion STIEP, to avoid undesirable signal interference is generated.

As shown in figure 8, for example, specific sensing element SEN14 can be described as including the first track anode winding (or winding portion Point) FTSEN14 and second track cathode winding (or windings section) STSEN14.For example, specific sensing element SEN15 can be described Being includes the first track cathode winding (or windings section) FTSEN15 and the second track anode winding (or windings section) STSEN15, other sensing elements are similar.The winding (or windings section) being aligned with the first (track) interior zone FINTA Group or group provide the another embodiment of first track the first space phase sense wire ring structure FTFSPSCCF.With second Winding (or windings section) group of (track) interior zone SINTA alignment or group provide second the first space phase of track sensing The another embodiment of coil construction STFSPSCCF.As shown in figure 8, furthermore the magnetic flux sensing ring of sensing element SEN is constructed To have in the first track and the second track the first space phase sense wire ring structure FTFSPSCCF and STFSPSCCF are each Along the staggered opposite sensing circumpolar in x-axis direction (for example, one that the enlarged view of the lower part of such as Fig. 8 is schematically shown Exemplary sensing ring conductor view and associated electrical flow arrow).

First and second track the first space phase sense wire ring structure FTFSPSCCF and STFSPSCCF are formed together always Sense wire ring structure SCC, be configured such that, cooperate with scale pattern 780, in each of which winding or windings section (example Such as, FTSEN and STSEN) in generate all signal components space phase having the same.

That is, according to foregoing description because the flux polarity generated in the first interior zone FINTA in the second inner area The flux polarity generated in the SINTA of domain is identical, this with to have in the first and second track pattern FTP and STP be about W/2 Scale track pattern shift amount STO signal modulation element SME interaction, in each " torsion " sensing element SEN Middle generation enhances signal contribution.Signal processing configuration can be operatively connected to detector portion, to provide coil drive Signal, and according to known method based on the shown sensing element SEN from detector portion 867 (and according to known principle from setting Set and sensing element SEN be not shown in other of other space phase places of setting) detector signal of input determine detector portion and Relative position between scale pattern.

As shown in figure 8, field generates coil construction FGC and sensing element SEN advantageously according to the principle disclosed before this Construction.It may include lead shown in one or more that field, which generates coil construction FGC, to execute for one or more end sections The shielding structure of EDP.It should be understood that do not need in certain embodiments or it is undesirable shown in lead can be omitted.According to This principle disclosed, it is each inside nominal first that nominal first track, which generates track width size NFTIGTWD and NFTOGTWD, At least 0.1 times of peak width size YSEP1.It in some embodiments, can be advantageously, the first track generates track width Size NFTIGTWD and NFTOGTWD are at least 0.15 times or at least 0.25 of nominal first interior zone width dimensions YSEP1 Times or at least 0.50 times.According to principle disclosed herein, nominal second track generate track width size NSTIGTWD and NSTOGTWD is each at least 0.1 times of nominal second interior zone width dimensions YSEP2.In some embodiments, can have Benefit, it is nominal second interior zone width dimensions that the second track, which generates track width size NSTIGTWD and NSTOGTWD, At least 0.15 times or at least 0.25 times of YSEP2 or at least 0.50 times.

Other features used in detector portion 867 and/or design relation can be retouched also with reference detector part 767 The compatible feature and/or design relation stated are similar, if desired.

Pair that polarity and sensing element combinations of polarities use is generated in the field of above-outlined with reference to Fig. 7 and Fig. 8 with being similar to It is inclined that track scale pattern can help to reduce or eliminate certain signal that can be generated in monorail scale pattern construction originally Move into point, as without reference in the patent of ' 958 detailed manufacture or layout consider it is disclosed, be incorporated to before the patent and make herein For reference.Indicated herein as before, existing system (for example, what those were referred in the patent of ' 958) utilizes relatively narrow mark Line and/or relatively large interior zone are (for example, biggish region FINTA and/or SINTA and/or nominal coil region width Size YSEP1 and/or YSEP2) for field generation coil construction.In some existing systems, it is generally recognized that expectation detector sense Surveying element has the relatively large region being coupled, and to receive the magnetic flux for generating the variation in coil inside region, is considered Electric current and signal strength are advantageous.Relatively, according to principle disclosed herein, using wider track width (for example, Using interior zone FINTA and/or SINTA and/or YSEP1 and/or YSEP2 as cost, for the total inspection applied by specific application Survey the limitation of device y-axis size), this leads to the relatively small total impedance that coil construction FGC is generated for field, for this purpose, relatively large Electric current can flow (for example, generating stronger signal) in the relatively short time, and still be able to obtain the expected time it is long The resonance of degree is for measuring.This about two-orbit scale pattern be it is especially valuable, this can be since practical consideration be (for example, be Be fitted in space identical with the monorail encoder utilized before) be limited to relatively small the first track pattern width and Second track pattern width.It has been determined in some instances according to the two-orbit construction of principle disclosed herein construction, as general Comparable driving signal input is shown up when generating coil, is obtained than comparable prior art configuration signal level and is more than the factor 1.5 or more detector signal is horizontal, and is in some cases 3 or more more than the factor.

Although having shown and described preferred embodiment by reference to Fig. 1-8, feature and operation order it is shown and described A large amount of variations of arrangement are obvious for those skilled in the art based on this specification.Each variant form can be used for reality Apply principle disclosed above.

As an example, the overlapping dimension of non-zero is utilized with the embodiment described with reference to shown in Fig. 2 and 3 and Fig. 7 and 8 OD, but this is not required in all embodiments.As another example, sensing element SEN and quarter shown in Fig. 7 and 8 The particular configuration of degree track pattern offset STO is merely exemplary, rather than restrictive.Other scale track pattern shifts Amount STO can be applied in combination with the appropriate adaptive change in the shape of sensing element SEN, inclined with the scale track for accommodating specific quantity Shifting amount, as those skilled in the art is intelligible based on description above and principle.

Fig. 9 is show the detector portion 967 and compatible scale pattern 980 that can be used in electronic position encoder the The plan view of five illustrative embodiments.Detector portion 967 have the characteristic similar with the detector portion 767 of Fig. 7 and Component, and its design and operation are configured to realize each design principle being disclosed herein with prescription.Particularly, pass through figure Appended drawing reference or label in 9 --- it is those of similar or identical (for example, similar " XX " adds with Fig. 7 or in this other figure Prefix is as 9XX and 2XX) --- similar element is specified, and is understood to be and similarly operates, unless particularly referring to following Out.Therefore, the significant difference of detector portion 967 and scale pattern 980 will be described only below.About for detector portion 967 There is provided additional layout and manufacture option and reduced cost and in some embodiments using traditional scale can be easy to get Ability in terms of, detector 967 and compatible scale pattern 980 provide certain advantage.In addition, as in institute more fully below It states, the design principle and feature being disclosed additionally provide the alternative for overcoming errors in position measurement to generate, the position Measurement error is generated since certain installation tilts or install misalignment by " dynamic spacing ", the He of ' 990 ' 130 as being incorporated to before It is explained in patent.

Similar to scale pattern 780, scale pattern 980 includes the first and second pattern track FPT of parallel setting And SPT, each pattern track include signal modulation element SME, may include being changed with relatively large degree local attenuation The field attenuating elements of magnetic flux, and with the field of the magnetic flux of relatively small degree local attenuation variation or the magnetic flux of local enhancement variation Maintain element.Signal modulation element SME (field attenuating elements) and field maintain element along x-axis direction with space wavelength W's Periodic patterns are interlocked.But a main distinction is, and it is different from scale pattern 780, in scale pattern 980, the second figure The scale track pattern shift amount STO that it is W/2 that case track SPT is not deviated about or accurately relative to the first pattern track. But in scale pattern 980, the periodic patterns of the second pattern track are along x-axis direction relative to the first pattern track The scale track pattern shift amount STO that periodic patterns alignment or offset are about or accurately not 0.5*W.For example, scale Pattern shift amount can be advantageously in 0+/- 0.25W range.In some embodiments, even more desirably, scale pattern deviates Amount STO can be zero, correspond to the construction of traditional scale.(in traditional scale, signal modulation element is typically narrow rectangle Element or item, the full width across scale pattern extend, without interference or discontinuous or offset.) from have different figures The special scale of multiple tracks of case or offset is compared, traditional scale can in each length with lower price more easily It can get.

Similar to detector portion 767, detector portion 967 is configured to close to pattern track FPT and SPT installation and edge Axis direction is measured relative to pattern track FPT and SPT movement, and generates coil construction FGC including field and provides with corresponding The corresponding sense wire ring structure SCC of at least one of the signal component of space phase.It is only simple herein that field generates coil construction FGC It describes.Field generates coil construction FGC and can be fixed on substrate, and includes: that the first track field generates coiler part FTFGCP, It is configured to respond to coil drive signal and provides variation in the first interior zone FINTA being aligned with the first pattern track FPT The first magnetic flux；Coiler part STFGCP is generated with the second track field, is configured to respond to coil drive signal with second The second magnetic flux of variation is provided in second interior zone SINTA of pattern track SPT alignment.In detector portion 967, second The magnetic flux of variation has the field polarity opposite with the magnetic flux of the first variation.Generating coil construction FGC can be advantageously before basis The principle of general introduction constructs.But in various embodiments, such design principle is merely exemplary rather than restrictive.

The sense wire ring structure SCC of detector portion 967 can be similar to the sense wire ring structure of detector portion 767, and Can similarly it be understood, in addition to certain difference described below.

Some similar aspects are briefly summarized, sense wire ring structure SCC shown in Fig. 9 includes sensing element SEN, each of which Including the first track winding or windings section FTSEN and the second track winding or windings section STSEN.For example, SEN13 can be described Being includes the first track anode winding (or windings section) FTSEN13 and the second track anode winding (or windings section) STSEN13.First is provided with the first (track) interior zone FINTA winding (or windings section) FTSEN group being aligned or group An embodiment of track the first space phase sense wire ring structure FTFSPSCCF.With the second (track) interior zone SINTA Winding (or windings section) group of alignment or group provide second track the first space phase sense wire ring structure STFSPSCCF's One embodiment.First and second track the first space phase sense wire ring structure FTFSPSCCF and STFSPSCCF shape together At total sense wire ring structure SCC, it is configured such that, cooperates with scale pattern 980, in each winding or windings section All signal components space phase having the same generated in (for example, FTSEN and STSEN).

About the difference different from detector portion 767, detector portion 967 includes centainly adding and/or change Feature is configured to the compatible operation with scale pattern 980, has the scale track different from scale pattern 780 Pattern shift amount STO.Particularly, first and second the first space phase of track sense wire ring structure FTFSPSCCF and STFSPSCCF is arranged along x-axis direction according to winding offset WO=STO+/- 0.5*W, wherein STO is scale pattern 980 The specific scale track pattern shift amount STO of particular implementation.As to being summarized before embodiment shown in Fig. 9, scale track figure Case offset STO is not always 0.5*W, and its advantageously in range 0+/- 0.25W (for example, as shown in Figure 9), and even more It can be advantageous to be zero.As it can be seen that first track the first space phase signal sensing coil structure in embodiment shown in Fig. 9 It makes FTFSPSCCF and second track the first space phase signal sensing coil construction STFSPSCCF is limited respectively along x-axis direction First and second sensing span FSS and SSS.Compared with embodiment before, the first and second sensing span FSS and SSS are along x-axis Line direction is not in alignment with each other, and the boundary relative to the x-axis direction between the first and second pattern track FPT and SPT Line is not mutually symmetrical positioning.Alternatively, their span FSS and SSS is offset from one another winding offset WO.In the lower part of Fig. 9 In particular implementation shown in part, in each sensing element SEN, the first track winding FTSEN and the second track winding STSEN deviates WO.

In specific embodiment shown in Fig. 9, the first track and second track the first space phase signal sensing coil structure Each of FTFSPSCCF and STFSPSCCF is made to be configured to provide the anode of identical quantity and cathode winding (windings section), Be it is staggered, without the interference along x-axis direction.But He ' 130 of ' 990 patent explains in sense wire ring structure Spacing in terms of the staggered positive pole zone of imagination and negative regions.The sense wire ring structure of each spacing can have equal The positive and negative pole winding of quantity, but winding does not need to be distributed in each polar region.For example, in the structure of some spacing balance In making, a positive polarity region may include two positive polarity windings, and another positive polarity region can be empty.Some principles can be with Each principle and feature combination disclosed herein.Therefore, specific undisturbed and consistent first track shown in Fig. 9 and the Two track the first space phase signal sensing coils construction FTFSPSCCF and STFSPSCCF is merely exemplary, rather than is limited Property.More generally, first track the first space phase signal sensing coil construction being arranged in the first interior zone FTFSPSCC may include one group of N number of anode being distributed along the duplicate positive winding area in x-axis direction corresponding to space wavelength W Winding, and replace with positive winding area and correspond to space wavelength W and divide along the duplicate cathode winding area in x-axis direction The N number of cathode winding of one group of cloth, wherein N is at least 2 integer.Positive and negative pole winding (for example, FTSEN1-FTSEN24) is every Variation magnetic flux a to be configured to, that response maintains element to provide by opposite field attenuating elements (for example, signal modulation element SME) or field On local effect, and for first track the first space phase signal sensing coil construct FTFSPSCCF (for example, in detector Signal export interconnecting piece SDS1 and SDS2 place) provide first track the first space phase signal component offer signal contribution.Class As, second track the first space phase signal sensing coil being arranged in the second interior zone SINTA constructs STFSPSCCF It may include one group M positive winding being distributed along the duplicate positive winding area in x-axis direction corresponding to space wavelength W, with And replaces with positive winding area and correspond to space wavelength W is distributed along the duplicate cathode winding area in x-axis direction one M cathode winding of group, wherein M is at least 2 integer.Positive and negative pole winding (for example, STSEN1-STSEN24) is each by structure It makes as response is maintained on the variation magnetic flux of element offer by opposite field attenuating elements (for example, signal modulation element SME) or field Local effect, and STFSPSCCF is constructed (for example, in detector signal for second track the first space phase signal sensing coil Export interconnecting piece SDS1 and SDS2 place) provide second track the first space phase signal component offer signal contribution.In each reality It applies in example, it is advantageous that N=M.But in some embodiments, what this was not strictly necessary to.

It will be appreciated that each sensing element SEN includes winding or windings section in specific embodiment shown in Fig. 9 FTSEN and STSEN, they have winding offset WO=STO+/- 0.5*W, and in the first and second interior zone FINTA and Identical sensing circumpolar is provided in SINTA.Because the flux polarity generated in the first interior zone FINTA in second The flux polarity that generates in the SINTA of portion region on the contrary, this with there are the first and second track pattern FTP in scale pattern 980 It interacts with the pattern of the signal modulation element SME of the scale track pattern shift amount STO in STP, in each sensing Enhancing signal contribution is generated in part SEN.Additionally, it will be appreciated that along sense wire ring structure SCC from starting ends (for example, in Fig. 9 In left part) start, first track the first space phase signal sensing coil construct FTFSPSCCF have a kind of construction, In, have the first winding polarity (for example, anode) along the starting ends winding (such as FTSEN1) of the first track FPT, second Track the first space phase signal sensing coil, which constructs STFSPSCCF, has a kind of construction, wherein it is along the second track SPT's Starting ends winding (for example, STSEN1) has the first winding polarity (for example, anode), and along the starting of the first and second tracks End winding is offset from one another a winding offset WO=STO+/- 0.5*W along x-axis direction.The special characteristic is for compensating or disappearing Except signal offset component is important, the signal offset component originally can be since detector portion 967 be relative to scale pattern 980 either statically or dynamically " spacing " misalignment and generate.Spacing misalignment (pitch misalignment) refers to detector portion 967 The angle rotated around Y-axis line is tilted, so that it is not parallel with the plane of scale pattern 980.It was found by the inventors that in addition to The spacing disclosed in ' 990 and/or the patent of ' 130 considers that the other consideration that do not recognize before is related in scale The field attenuating elements of pattern (for example, scale pattern 780 or 980) and field maintain the fine difference in the effect of element.In addition to another Except one different spacing known before considers, solved according to the sense wire ring structure SCC of principles outlined above construction Determined the spacing consideration.

Figure 10 be show with it is the 6th of the scale pattern 980 that describes before also compatible detector portion 1067 exemplary The plan view of embodiment.Detector portion 1067 has and the detector portion 867 of Fig. 8 and the detector portion of Fig. 9 967 similar characteristics and component, and its design and operation are configured to realize each design original being disclosed herein with prescription Reason.Particularly, pass through the appended drawing reference or label in Figure 10 --- with those of in Fig. 8 and/or Fig. 9 or other accompanying drawings in this It is similar or identical --- similar element is specified, and is understood to be and similarly operates, unless being particularly pointed out following.Cause This, will only describe the significant difference of detector portion 1067 below.Detector portion 1067 --- with 980 groups of scale pattern Close --- it provides and those of the general introduction of reference detector part 967 before similar some advantages.

Similar to detector portion 867 and 967, detector portion 1067 is configured to pacify close to pattern track FPT and SPT It fills and is moved along measurement axis direction relative to pattern track FPT and SPT, and generate coil construction FGC including field and tool is provided There is at least one corresponding sense wire ring structure SCC of the signal component of additional space phase.Field generates coil construction FGC herein Only it is briefly described.Field generates coil construction FGC and can be fixed on substrate, and in the shown embodiment includes that the first track field is raw Coiler part STFGCP is generated at coiler part FTFGCP and the second track field, is configured to along the first pattern track FPT The first interior zone FINTA in in the second interior zone SINTA along the second pattern track SPT provide polarity it is identical Change magnetic flux.Field generates coil construction FGC can be advantageously according to the principle of general introduction before construction.But in various embodiments, Such design principle is merely exemplary rather than restrictive.In some embodiments, because the first track field generates Coiler part FTFGCP and the second track field generate coiler part STFGCP and provide identical variation flux polarity, around sensing The single winding of coil construction SCC can be considered as providing two " coiler part ", without using in the first and second tracks Side elongated portion FTIEP and STIEP.Such construction can not provide some advantages summarized before, but in some embodiment party It can be in formula adequately.

The sense wire ring structure SCC of detector portion 1067 can be similar to the sense wire ring structure of detector portion 867, and Can similarly it be understood, in addition to certain difference described below.

Some similar aspects are briefly summarized, sense wire ring structure SCC shown in Fig. 10 includes sensing element SEN, every A includes the first track winding or windings section FTSEN and the second track winding or windings section STSEN.For example, SEN13 can be retouched State be include the first track anode winding (or windings section) FTSEN13 and the second track cathode winding (or windings section) STSEN13.First is provided with the first (track) interior zone FINTA winding (or windings section) FTSEN group being aligned or group An embodiment of track the first space phase sense wire ring structure FTFSPSCCF.With the second (track) interior zone SINTA Winding (or windings section) group of alignment or group provide second track the first space phase sense wire ring structure STFSPSCCF's One embodiment.First and second track the first space phase sense wire ring structure FTFSPSCCF and STFSPSCCF shape together At total sense wire ring structure SCC, it is configured such that, cooperates with scale pattern 980, in each winding or windings section All signal components space phase having the same generated in (for example, FTSEN and STSEN).

About the difference compared with detector portion 867, detector portion 1067 includes centainly adding and/or change Feature is configured to the compatible operation with scale pattern 980, has the scale track different from scale pattern 780 Pattern shift amount STO.Particularly, first and second the first space phase of track sense wire ring structure FTFSPSCCF and STFSPSCCF is arranged along x-axis direction according to winding offset WO=STO+/- 0.5*W, according to before about detector portion Principle described in winding offset WO in 967, this will be understood by.As previously outlined, the quarter for scale pattern 980 Degree track pattern offset STO is not always 0.5*W, and it is advantageously in range 0+/- 0.25W, and even more desirably, It can be zero.For the compatibility with such scale pattern 980, in detector portion 1067, the first and second sensings Span FSS and SSS is not in alignment with each other along x-axis direction, and relative between the first and second pattern track FPT and SPT The boundary line in x-axis direction be not mutually symmetrical positioning.Alternatively, their span FSS and SSS is offset from one another winding offset Measure WO.In the particular implementation shown in the low portion of Fig. 9, in each sensing element SEN, the first track winding FTSEN and the second track winding STSEN deviates WO.

In specific embodiment shown in Fig. 10, the first track and second track the first space phase signal sensing coil structure Each of FTFSPSCCF and STFSPSCCF is made to be configured to provide the anode of identical quantity and cathode winding (windings section), Be it is staggered, without the interference along x-axis direction.But for reference detector part 967 before summarize the reason of, figure Specific undisturbed and consistent first track shown in 10 and second track the first space phase signal sensing coil construction FTFSPSCCF and STFSPSCCF are merely exemplary, rather than restrictive.More generally, it is arranged in the first interior zone First track the first space phase signal sensing coil construction FTFSPSCCF may include correspond to space wavelength W along x-axis side The N number of positive winding of one group be distributed into duplicate positive winding area, and replace with positive winding area and correspond to sky Between one group of N number of cathode winding being distributed along the duplicate cathode winding area in x-axis direction of wavelength W, wherein N is at least 2 Integer.Positive and negative pole winding (for example, FTSEN1-FTSEN24) is each configured to, and response is by opposite field attenuating elements (for example, letter Number modulation element SME) or field maintain element to provide variation magnetic flux on local effect, and be first the first space phase of track Signal sensing coil constructs first that FTFSPSCCF (for example, at detector signal output interconnecting piece SDS1 and SDS2) is provided Track the first space phase signal component provides signal contribution.Similarly, the second rail being arranged in the second interior zone SINTA Road the first space phase signal sensing coil construction STFSPSCCF may include duplicate along x-axis direction corresponding to space wavelength W One group be distributed in positive winding area M positive winding, and replace with positive winding area and correspond to the edge space wavelength W One group of M cathode winding being distributed in the duplicate cathode winding area in x-axis direction, wherein M is at least 2 integer.Just and Cathode winding (for example, STSEN1-STSEN24) is each configured to, and response is by opposite field attenuating elements (for example, signal modulation Element SME) or field maintain element provide to variation magnetic flux local effect, and be second track the first space phase signal sense Second track the of survey line ring structure STFSPSCCF (for example, at the place detector signal output interconnecting piece SDS1 and SDS2) offer One space phase signal component provides signal contribution.In embodiments, it is advantageous that N=M.But in some embodiments, What this was not strictly necessary to.

It will be appreciated that each sensing element SEN includes winding or windings section in specific embodiment shown in Fig. 9 FTSEN and STSEN, they have winding offset WO=STO+/- 0.5*W, and in the first and second interior zone FINTA and Opposite sensing circumpolar is provided in SINTA.Because the flux polarity generated in the first interior zone FINTA in second The flux polarity generated in the SINTA of portion region is identical, this with there are the first and second track pattern FTP in scale pattern 980 It interacts with the pattern of the signal modulation element SME of the scale track pattern shift amount STO in STP, in each sensing Enhancing signal contribution is generated in part SEN.Additionally, it will be appreciated that along sense wire ring structure SCC from starting ends (for example, in Figure 10 In left part) start, first track the first space phase signal sensing coil construct FTFSPSCCF have a kind of construction, In, have the first winding polarity (for example, anode) along the starting ends winding (such as FTSEN1) of the first track FPT, second Track the first space phase signal sensing coil, which constructs STFSPSCCF, has a kind of construction, wherein it is along the second track SPT's Starting ends winding (for example, STSEN1) has second winding polarity opposite with the first winding polarity (for example, anode), and edge The starting ends winding of first and second tracks is offset from one another a winding offset WO=STO+/- 0.5*W along x-axis direction.Root According to the principle that reference detector part 967 before is summarized, which is important for compensating or eliminating signal offset component , the signal offset component originally can due to detector portion 1067 relative to scale pattern 980 either statically or dynamically " Away from " misalignment and generate.

Figure 11 be show it is functionally similar with detector portion 967 and also compatible with the scale pattern 980 that describes before Detector portion 1067 the 7th illustrative embodiments plan view.Pass through the appended drawing reference or label in Figure 11 --- It is similar or identical with those of in Fig. 9 --- similar element is specified, and is understood to be and similarly operates.Detector portion 1167 and compatible scale pattern provide with before to some advantages similar those of described in detector portion 967.

The field of detector portion 1167 generates coil construction FGC can be similar or identical with detector portion 967.Below Significant difference of the detector portion 1167 compared with detector portion 967 will be described only.

In detector portion 967, sense wire ring structure SCC includes the first track winding FTSEN and the second track winding STSEN, they are arranged in pairs, referred to as the part of the corresponding sense ring of sensing element SEN.In a kind of side for describing the arrangement In formula, in detector portion 967, positioned at the response of first track the first space phase signal sensing coil construction FTFSPSCC The first track winding FTSEN in winding area includes the first and second conductor segments, they are horizontal in the first interior zone FINTA It is aligned in x-axis direction.First conductor segment is connected in series by the first series connection part, will be sensed electric current and directly be exported To the conductor segment in the second interior zone SINTA transverse to the alignment of x-axis direction (for example, the second track windings section STSEN ), the part of the winding of second track the first space phase signal sensing coil construction STFSPSCC is formed (for example, second Track windings section STSEN's).In addition, the second conductor segment is connected in series by the second series connection part, electric current will be sensed Conductor segment directly from the second interior zone SINTA transverse to the alignment of x-axis direction is (for example, the second track windings section STSEN's) input, form the part of the winding of second track the first space phase signal sensing coil construction STFSPSCC (for example, the second track windings section STSEN).

Relatively, in detector portion 1167, sense wire ring structure SCC includes the first track winding FTSEN and second Track winding STSEN, the first track winding FTSEN and the second track winding STSEN are empty in the first and second tracks first Between " dividually " be arranged in phase signal sense wire ring structure FTFSPSCC and STFSPSCC, they only go here and there in their end Connection connection, as shown in the right in Figure 11.A representative configuration for conductor is shown at the bottom of Figure 11, is used for First and second track the first space phase signal sensing coils construction FTFSPSCC and STFSPSCC is provided.Otherwise, it should be appreciated that The like configurations feature that there is detector portion 1167 principle that reference detector part 967 is summarized before to provide, and mention For similar advantage.

Figure 12 be show it is functionally similar with detector portion 1067 and also compatible with the scale pattern 980 that describes before Detector portion 1267 the 8th illustrative embodiments plan view.Pass through the appended drawing reference or label in Figure 12 --- It is similar or identical with those of in Figure 10 --- similar element is specified, and is understood to be and similarly operates.Detector portion 1267 and compatible scale pattern provide with before to some advantages similar those of described in detector portion 1067.

The field of detector portion 1267 generates coil construction FGC can be similar or identical with detector portion 1067.With It is lower only to describe significant difference of the detector portion 1267 compared with detector portion 1067.

In detector portion 1267, sense wire ring structure SCC includes the first track winding FTSEN and the second track winding STSEN, they are arranged in pairs, referred to as the part of the corresponding sense ring of sensing element SEN.In a kind of side for describing the arrangement In formula, in detector portion 1067, positioned at the sound of first track the first space phase signal sensing coil construction FTFSPSCC Answering the first track winding FTSEN in winding area includes the first and second conductor segments, they are in the first interior zone FINTA It is aligned transverse to x-axis direction.First conductor segment is connected in series by the first series connection part, and it is directly defeated will to sense electric current Out to the conductor segment in the second interior zone SINTA transverse to the alignment of x-axis direction (for example, the second track windings section STSEN's), formed second track the first space phase signal sensing coil construction STFSPSCC winding part (for example, Second track windings section STSEN's).In addition, the second conductor segment is connected in series by the second series connection part, will sense Conductor segment of the electric current directly from the second interior zone SINTA transverse to the alignment of x-axis direction is (for example, the second track winding Part STSEN's) input, the conductor segment formed second track the first space phase signal sensing coil construction STFSPSCC around The part (for example, second track windings section STSEN) of group.First and second series connection portions are in the first and second interior zones Cross part or torsional part are set in the region between FINTA and SINTA.

Relatively, in detector portion 1267, sense wire ring structure SCC includes the first track winding FTSEN and second Track winding STSEN, the first track winding FTSEN and the second track winding STSEN are empty in the first and second tracks first Between " dividually " be arranged in phase signal sense wire ring structure FTFSPSCC and STFSPSCC, they only go here and there in their end Connection connection, as shown in the right in Figure 12.A representative configuration for conductor is shown at the bottom of Figure 12, is used for First and second track the first space phase signal sensing coils construction FTFSPSCC and STFSPSCC is provided.Otherwise, it should be appreciated that The like configurations feature that there is detector portion 1267 principle that reference detector part 1067 is summarized before to provide, and mention For similar advantage.

Figure 13 be show it is functionally similar with detector portion 1167 and also compatible with the scale pattern 980 that describes before Detector portion 1367 the 9th illustrative embodiments plan view.Pass through the appended drawing reference or label in Figure 13 --- It is similar or identical with those of in Figure 11 --- similar element is specified, and is understood to be and similarly operates.Detector portion 1367 and compatible scale pattern provide with before to some advantages similar those of described in detector portion 1167.

The field of detector portion 1367 generates coil construction FGC can be similar or identical with detector portion 1167.Its It is shown by the equal length along x-axis direction, compared with facilitating with detector 1167, it should be understood that, if it is desired to Words, can obvious much shorter, this is because the reduced length of the sense wire ring structure SCC in detector portion 1367.With It is lower only to describe significant difference of the detector portion 1367 compared with detector portion 1167.

In in detector portion 1167 (and in detector portion 967), first and second the first space phases of track Signal sensing coil construction FTFSPSCC and STFSPSCC is each configured in alternate positive and negative polar region domain positive and negative Pole winding (windings section) is the staggered interference without along x-axis.In addition, along sense wire ring structure from starting ends (for example, left part in figure) starts, and first track the first space phase signal sensing coil, which constructs FTFSPSCC, has one Kind construction, wherein it has the first winding polarity along the starting ends winding of the first track FPT, and it terminates End winding (example Such as, the right part in figure) there is second winding polarity opposite with the first winding polarity；And second the first space phase of track Signal sensing coil, which constructs STFSPSCC, has a kind of construction, wherein it has the along the starting ends winding of the second track SPT One winding polarity, and it terminates End winding with second winding polarity opposite with the first winding polarity.

But as outlined previously, in detector portion 1167 (and in detector portion 967) it is specific not Be disturbed with consistent first track and second track the first space phase signal sensing coil construction FTFSPSCC and STFSPSCC is merely exemplary, rather than restrictive.Detector portion 1367 shows one in multiple feasible alternative structures It is a.In the specific embodiment shown in Figure 13, first track the first space phase signal sensing coil construction FTFSPSCCF includes Four the first track winding FTSEN.The first track winding FTSEN1 and FTSEN4 of anode is located in corresponding positive winding area, Two cathode the first track windings FTSEN2 and FTSEN3 are in the cathode winding area between them.Second track first is empty Between phase signal sense wire ring structure STFSPSCCF include four the second track winding STSEN.Positive second track winding STSEN1 and FTSEN4 is located in corresponding positive winding area, and two cathode the first track windings STSEN2 and STSEN3 are located at In cathode winding area between them.

As detector portion 1367 sense wire ring structure SCC and can be used in lid position various alternatives more Wide in range description, along sense wire ring structure SCC since starting ends (for example, left part in Figure 13), the first track first Space phase signal sensing coil construct FTFSPSCC have a kind of construction, wherein along the first track FPT its starting ends around Group (for example, FTSEN1) has the first winding polarity (for example, anode), and it terminates End winding (for example, FTSEN4) and also has Have first winding polarity (for example, anode), its starting ends winding and its terminate between End winding at least one around Group region includes two windings (for example, FTSEN2 and FTSEN3), has the second winding pole opposite with the first winding polarity Property (for example, cathode).Second track the first space phase signal sensing coil, which constructs STFSPSCC, has a kind of construction, wherein It has the first winding polarity along the starting ends winding of the second track, and it terminates End winding also and has the first winding pole Property, its starting ends winding and its terminate at least one winding area between End winding include two windings, the two Winding has second winding polarity opposite with the first winding polarity.

It may be noted that Figure 13 includes for first track the first space phase signal sensing coil construction FTFSPSCC One group of detector signal exports interconnecting piece SDS1 and SDS2, and is used for second track the first space phase signal sensing coil structure Make the output of second group of detector signal the interconnecting piece SDS1 and SDS2 of STFSPSCC.These can convey and/or export respectively first Track the first space phase signal component and second track the first space phase signal component.In each such embodiment, letter Number processing circuit can be operatively connected to detector portion 1367, and at these group of interconnecting piece obtained by the first rail Road the first space phase signal component and second track the first space phase signal component can be connected to signal processing circuit Input terminal, and combined by signal processing to form the first space phase signal of combination.In each embodiment disclosed herein In, this is the one kind for combining first track the first space phase signal component and second track the first space phase signal component Replacement method, to form the first space phase signal of combination.Relatively, detector portion shown in Fig. 9-12 is using in addition Replacement method, wherein first track the first space phase signal sensing coil constructs FTFSPSCC and the second track first is empty Between phase signal sense wire ring structure STFSPSCC corresponding windings include continuous conductor corresponding portion, the first track first is empty Between phase signal components and second track the first space phase signal component inherently combined in continuous conductor, to form combination The first space phase signal, it is available at the place single group detector signal output interconnecting piece SDS1 and SDS2.It will be appreciated that figure Any detector portion construction shown in 9-13 can be readily adapted to the first space phase signal for providing combination Either method.

It will be appreciated that the detector portion 1367 functionally similar with detector portion 1167 has prompted and detector portion 1267 functionally similar similar detector portions.In such detector portion, coil construction FGC occurs for field will be in detector Part 1267 is similar or identical, although it can have reduced length in various embodiments.In detector portion 1267 (with And in detector portion 1067) in, first and second track the first space phase signal sensing coils construct FTFSPSCC and STFSPSCC is each configured with anode and cathode winding (windings section) in alternate positive and negative polar region domain, is staggered Without the interference along x-axis.In addition, along sense wire ring structure since starting ends (for example, left part in figure), the One track the first space phase signal sensing coil, which constructs FTFSPSCC, has a kind of construction, wherein it is along the first track FPT's Starting ends winding has the first winding polarity, and it terminates End winding (for example, right part in figure) and has and first The second opposite winding polarity of winding polarity；And second track the first space phase signal sensing coil construction STFSPSCC have A kind of construction, wherein it has the second winding pole opposite with the first winding polarity along the starting ends winding of the second track SPT Property, and it terminates End winding with the first winding polarity.

Relatively, as the various functions that the sense wire ring structure to 1267 foregoing description of detector portion can be replaced to use The general description of similar sense wire ring structure SCC, along sense wire ring structure SCC since starting ends, the first track One space phase signal sensing coil construction has a kind of construction, wherein it has the along the starting ends winding of the first track One winding polarity, and it terminates End winding also and has the first winding polarity, its starting ends winding and its terminate end around At least one winding area between group includes two windings, the two windings have opposite with the first winding polarity second around Group polarity；Its second track the first space phase signal sensing coil construction has a kind of construction, wherein it is along the first track Starting ends winding has second winding polarity opposite with the first winding polarity, and it terminates End winding also and has and first The second opposite winding polarity of winding polarity, its starting ends winding and its terminate at least one winding between End winding Region includes two windings, the two windings have the first winding polarity.

It will be appreciated that in the construction of the detector portion shown in Fig. 9-13, first and second the first space phases of track letter Number sensing coil FTFSPSCC and STFSPSCC winding include the conductor manufactured in multiple floor of printed circuit board, wherein Conductor includes the lead connected between the different layers of printed circuit board, and is included in and is located inside first and second without lead In the part of winding in region FINTA and SINTA.This is particularly advantageous, because with the uneven associated letter of ring region Number imbalance --- its script with accommodate lead needed for undesirable conductor wiring it is associated --- dramatically eliminated, because First and second track the first space phase signal senses in the first and second interior zone FINTA and SINTA are fallen in for them Except the main signal formation zone of test coil FTFSPSCC and STFSPSCC.

Although there has been shown and described that the shown and described arrangement of the preferred embodiment of the present invention, feature and operation order It is a large amount of variation based on this specification be obvious for those skilled in the art.Each variant form can be used for implementing This principle disclosed.

As an example, with reference to described in Fig. 9-13 and the illustrative principles emphasized with reference to described in Fig. 7 and 8 and emphasized Along y-axis direction each exemplary dimensions and size relationship combination show.But it is such combination be merely exemplary without It is restrictive.More generally, show when in other detector portions construction in use, with reference to described in Fig. 9-13 with what is emphasized Example property principle can provide some benefits independently of such constraint of size and size relationship along y-axis direction, to ability It is apparent that the technical staff in domain is based on principle disclosed herein.

As a further example, it should be appreciated that in various embodiments, signal modulation element SME may include loop member or The variation of panel element or material properties, and/or in various embodiments, can have the size of the W/2 along x-axis direction, or More than or less than W/2, to generate desired periodic signal pattern.As a further example, it should be appreciated that disclosed herein each Feature and principle can be applied to rotary position encoder, wherein circular measurement axis direction and radial direction are similar to explanation Signified x-axis direction and y-axis direction in book.

More generally, above-mentioned each embodiment and feature can combine, to provide further embodiment.In this explanation Referenced in all United States Patent (USP)s and U.S. Patent application be integrally incorporated herein as reference.If necessary, embodiment party It can change in terms of formula, to apply the design of each patent and application, to provide other embodiment.

Book according to the above description can make these and other variations to embodiment.Generally, in appended claims In, used term is understood not to the specific reality for being limited to claim to disclose in the specification and in the claims Mode is applied, it should be understood that including all feasible embodiment party together with whole equivalent scopes that these claims are endowed Formula.

Claims

1. a kind of electronic position encoder, it can be used to measure the relative position of measurement axis direction in edge between two elements, The measurement axis direction is overlapped with x-axis direction, and the electronic position encoder includes:

Scale extends along measurement axis direction, and including signal modulation scale pattern, the signal modulation scale pattern includes cloth It is set to the first pattern track and the second pattern track parallel to each other, each pattern track includes that field attenuating elements and field maintain member Part, the magnetic flux that field attenuating elements are changed with relatively large degree local attenuation, field maintain element with relatively small degree office The magnetic flux of portion's attenuation change or the magnetic flux for locally enhancing variation, and wherein, field attenuating elements and field maintain element along x-axis Direction is interlocked with the periodic patterns with space wavelength W；And

Detector portion is configured to close to pattern track installation, and is moved along measurement axis direction relative to pattern track, institute Stating detector portion includes:

Field generates coil construction, at least one including being fixed on substrate generates ring, and the field generates coil and constructs by structure Make for response coil drive signal with the first magnetic flux of variation is provided in the first interior zone of the first pattern track alignment, and Response coil drive signal with provide the second magnetic flux of variation in the second interior zone of the second pattern track alignment；

Sense wire ring structure, comprising:

First track the first space phase signal sensing coil construction, be arranged in the first interior zone, including one group it is N number of just Pole winding and one group of N number of cathode winding, described one group N number of positive winding is duplicate along x-axis direction corresponding to space wavelength W It is distributed in positive winding area, one group of N number of cathode winding is replacing with positive winding area and corresponding to the edge space wavelength W X-axis direction is distributed in duplicate cathode winding area, wherein N is at least 2 integer, and wherein, positive winding and negative Winding each response in pole maintains element to provide the local effect on variation magnetic flux by adjacent field attenuating elements or field, and is the First track the first space phase signal component that one track the first space phase signal sensing coil construction provides provides signal Contribution；And

Second track the first space phase signal sensing coil construction, is arranged in the second interior zone, including one group of M a just Pole winding and one group of M cathode winding, described one group M positive winding is duplicate along x-axis direction corresponding to space wavelength W It is distributed in positive winding area, described one group M cathode winding is replacing with positive winding area and corresponding to the edge space wavelength W X-axis direction is distributed in duplicate cathode winding area, wherein M is at least 2 integer, and wherein, positive winding and negative Winding each response in pole maintains element to provide the local effect on variation magnetic flux by adjacent field attenuating elements or field, and is the Second track the first space phase signal component that two track the first space phase signal sensing coils construction provides provides signal Contribution；

Wherein:

First track the first space phase signal sensing coil construction and second track the first space phase signal sensing coil structure Make respectively along x-axis direction limit first sensing span and second sensing span, and first sensing span and second sensing across Degree is not in alignment with each other along x-axis direction, also, first track the first space phase signal sensing coil construction and the second track First space phase signal sensing coil construction about between the first pattern track and the second pattern track along x-axis direction Boundary line is not mutually symmetrical；

Periodic patterns of the periodic patterns of second pattern track along x-axis direction relative to the first pattern track are aligned, or Person's offset is not the scale track pattern shift amount STO of 0.5*W；And

The electronic position encoder is according to A) or B) in one construction, in which:

A)

Field generates coil construction and is configured in the first interior zone along the first pattern track and along the second pattern track The second interior zone in provide opposite polarity variation magnetic flux；And

Along sense wire ring structure since starting ends, first track the first space phase signal sensing coil construction has one kind Construction, wherein it has the first winding polarity, second track the first space phase signal along the starting ends winding of the first track Sense wire ring structure has a kind of construction, wherein it has the first winding polarity, and edge along the starting ends winding of the second track The starting ends winding of first track and the second track is offset from one another a winding offset WO=STO+/- 0.5* along x-axis direction W；Or

B)

Field generates coil construction and is configured in the first interior zone along the first pattern track and along the second pattern track The second interior zone in provide identical polar variation magnetic flux；And

Along sense wire ring structure since starting ends, first track the first space phase signal sensing coil construction has one kind Construction, wherein it has the first winding polarity, second the first space phase of track along the starting ends winding of the first pattern track Signal sensing coil construction have a kind of construction, wherein its along the second pattern track starting ends winding have with first around Opposite polarity second winding polarity of group, and be offset from one another along the starting ends winding of the first and second tracks along x-axis direction One winding offset WO=STO+/- 0.5*W.

2. electronic position encoder as described in claim 1, wherein electronic position encoder is according to A) construction.

3. electronic position encoder as claimed in claim 2, wherein scale pattern offset STO is in range 0+/- 0.25W It is interior, and along sense wire ring structure since starting ends:

First track the first space phase signal sensing coil construction has a kind of construction, wherein its starting along the first track End winding has the first winding polarity, and it terminates End winding with the second winding pole opposite with the first winding polarity Property；And

Second track the first space phase signal sensing coil construction has a kind of construction, wherein its starting along the second track End winding has the first winding polarity, and it terminates End winding with the second winding pole opposite with the first winding polarity Property.

4. electronic position encoder as claimed in claim 2, wherein scale pattern offset STO is in range 0+/- 0.25W It is interior, and along sense wire ring structure since starting ends:

First track the first space phase signal sensing coil construction has a kind of construction, wherein its starting along the first track End winding has the first winding polarity, and it terminates End winding also and have the first winding polarity, and its starting ends around Group and its terminate at least one winding area between End winding include two windings, the two windings have and the first winding Opposite polarity second winding polarity；And

Second track the first space phase signal sensing coil construction has a kind of construction, wherein its starting along the second track End winding has the first winding polarity, and it terminates End winding also and have the first winding polarity, and its starting ends around Group and its terminate at least one winding area between End winding include two windings, the two windings have and the first winding Opposite polarity second winding polarity.

5. electronic position encoder as claimed in claim 2, wherein scale pattern offset STO is in range 0+/- 0.25W It is interior, and at least most of packet for the winding being located in each winding area of first track the first space phase signal sensing coil It includes:

First conductor segment is aligned in the first interior zone transverse to x-axis direction, and is connected by the first series connection portion Ground connection will sense electric current and be directly output in the second interior zone transverse to the alignment of x-axis direction, the second rail of formation The conductor segment of the part of the winding of road the first space phase signal sensing coil；And

Second conductor segment is aligned in the first interior zone transverse to x-axis direction, and is connected by the second series connection portion Ground connection, be aligned from the second interior zone transverse to x-axis direction, second track the first space phase signal of formation The conductor segment for sensing the part of the winding of coil directly inputs sensing electric current；And

The winding of first track the first space phase signal sensing coil and second track the first space phase signal sensing coil Including the conductor manufactured in layer printed circuit board, wherein the conductor includes connecting between the different layers of printed circuit board Lead, and the part for being located at the first interior zone and the winding in the second interior zone does not include lead.

6. electronic position encoder as described in claim 1, wherein electronic position encoder is according to B) construction.

7. electronic position encoder as claimed in claim 6, wherein scale pattern offset STO is in range 0+/- 0.25W It is interior, and along sense wire ring structure since starting ends:

Second track the first space phase signal sensing coil construction has a kind of construction, wherein its starting along the second track End winding has second winding polarity opposite with the first winding polarity, and it terminates End winding with the first winding pole Property.

8. electronic position encoder as claimed in claim 6, wherein scale pattern offset STO is in range 0+/- 0.25W It is interior, and along sense wire ring structure since starting ends:

Second track the first space phase signal sensing coil construction has a kind of construction, wherein its starting along the second track End winding has second winding polarity opposite with the first winding polarity, and it terminates End winding also and has and the first winding Opposite polarity second winding polarity, and its starting ends winding and its terminate at least one winding area between End winding Domain includes two windings, the two windings have the first winding polarity.

9. electronic position encoder as claimed in claim 6, wherein scale pattern offset STO is in range 0+/- 0.25W It is interior, and at least most of packet for the winding being located in each winding area of first track the first space phase signal sensing coil It includes:

First conductive segment is aligned in the first interior zone transverse to x-axis direction, and is connected by the first series connection portion Ground connection will sense electric current and be directly output in the second interior zone transverse to the alignment of x-axis direction, the second rail of formation The conductor segment of the part of the winding of road the first space phase signal sensing coil；And

Second conductor segment is aligned in the first interior zone transverse to x-axis direction, and is connected by the second series connection portion Ground connection, be aligned from the second interior zone transverse to x-axis direction, second track the first space phase signal of formation The conductor segment for sensing the part of the winding of coil directly inputs sensing electric current, and

Wherein, the region of the first series connection portion and the second series connection portion between the first interior zone and the second interior zone Middle setting cross part or torsional part, also, first the first spacing wave of track sensing coil and second the first space phase of track The winding of signal sensing coil includes the conductor manufactured in layer printed circuit board, wherein conductor includes in printed circuit board The lead connected between different layers, and being located in the part of the first interior zone and the winding in the second interior zone does not include drawing Line.

10. electronic position encoder as described in claim 1, wherein according to C) or D) in one, the first track first is empty Between phase signal components and second track the first space phase signal component combination, with formed combination the first space phase letter Number, wherein

C) first track the first space phase signal sensing coil construction and second track the first space phase signal sensing coil The corresponding windings of construction include the corresponding portion of continuous conductor, and first track the first space phase signal component and the second track First space phase signal component inherently combines in continuous conductor, to form the first space phase signal of combination；Or

D) signal processing circuit is operatively connected to detector portion, and first track the first space phase signal component and Second track the first space phase signal component is connected to the input terminal of signal processing circuit, and is combined by signal processing with shape At the first space phase signal of combination.

11. electronic position encoder according to claim 1, wherein N=M.

12. electronic position encoder according to claim 1, wherein it is zero that scale pattern, which deviates STO,.