CN109946323A - X-ray analysis equipment and method for detecting abnormality - Google Patents
X-ray analysis equipment and method for detecting abnormality Download PDFInfo
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- CN109946323A CN109946323A CN201811221495.5A CN201811221495A CN109946323A CN 109946323 A CN109946323 A CN 109946323A CN 201811221495 A CN201811221495 A CN 201811221495A CN 109946323 A CN109946323 A CN 109946323A
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Abstract
The present invention provides a kind of x-ray analysis equipment and method for detecting abnormality that height can be prevented to be applied to detector to voltage more than required degree.X-ray analysis equipment (1) of the invention has multiple detectors (detection unit (3)), voltage application portion (circuit (4)) and abnormality detection processing unit (61).Multiple detectors detect X-ray.Voltage application portion applies voltage to multiple detectors.Abnormality detection processing unit (61) is gradually increasing the voltage for being applied to multiple detectors from voltage application portion in the state that the X-ray generated from sample is not detected by multiple detectors, and be compared the measured value based on the detection signal from multiple detectors at this moment with threshold value, thus detection is abnormal.
Description
Technical field
The present invention relates to a kind of x-ray analysis equipments and X analyzed by detecting the X-ray generated from sample
The method for detecting abnormality of ray analysis device.
Background technique
An example as x-ray analysis equipment, it is known to following fluorescent x-ray analyzer: it is penetrated by irradiating X to sample
Line detects the X-ray to generate the distinctive X-ray of element contained in sample (fluorescent X-ray), thus analysis examination
Ingredient (such as with reference to following patent documents 1) in sample.The X-ray generated from sample is added after being divided through optical splitter by detector
With detection.
In this x-ray analysis equipment, also by for become analysis object each element setting optical splitter and
Detector is so as to the device (simultaneous type fluorescent x-ray analyzer) analyzed multiple element simultaneously.Specifically,
Detection unit is constituted by being integrally packed into optical splitter and detector, configures multiple inspections around the setting position of sample
Survey unit.Setting close to each other has multiple detection units of same general configuration as a result,.
Detector is, for example, in the container for being sealed with gas inserted with the composition of filament, when analysis, is applied to filament high
Voltage.As a result, when the X-ray from sample is incident in container, the gas in container is ionized, and is generated because of the ionization
Electric current in the form of output signal from detector export.The detector of each detection unit is according to the element for becoming analysis object
Type and have container of different shapes, in the container enclose gas type also according to become analysis object element kind
Class and it is different.Therefore, the value for being applied to the high voltage of detector is different according to each detector.
On the other hand, the circuit for connecting each detector is generated since each detector is applied high voltage and being detected because of ionization
Electric current this processing it is identical, therefore be to use identical circuit respectively mostly.That is, can load and unload in each detection unit
Mode be connected with nondescript same circuits in appearance.
[existing technical literature]
[patent document]
[patent document 1] Japan Patent opens clear 60-49455 bulletin in fact
Summary of the invention
[problems to be solved by the invention]
When carrying out the maintenance of x-ray analysis equipment or when the replacement of part etc., sometimes from each detection unit
Circuit is unloaded to install again later.At this point, in the case where identical to the circuit of each detection unit installation as described above,
It is possible that not corresponding circuit is inadvertently coupled to each detection unit.In this case, there is the voltage of degree needed for arriving because of height or more
It is applied to detector and generates electric discharge, so as to cause the worry of detector breakage.
In addition, be not only as described above will not corresponding circuit the case where being inadvertently coupled to each detection unit, it is also possible to
Mistake the setting to the applied voltage of detector.In this case, height also is applied to voltage more than required degree
Detector and the worry for leading to detector breakage.
The present invention is formed in view of above-mentioned truth, and its purpose is to provide one kind can prevent height to required degree or more
Voltage is applied to the x-ray analysis equipment and method for detecting abnormality of detector.
[technical means to solve problem]
(1) x-ray analysis equipment of the invention is analyzed by detecting the X-ray generated from sample, the X-ray point
Analysis apparatus has multiple detectors, voltage application portion and abnormality detection processing unit.The multiple detector detects X-ray.It is described
Voltage application portion applies voltage to the multiple detector.The abnormality detection processing unit the X-ray generated from sample not by
Make to apply from the voltage under the state (such as X ray excited state for not exposing to sample) that the multiple detector detects
The voltage that portion is applied to the multiple detector is gradually increasing, and will be at this moment based on the detection letter from the multiple detector
Number measured value be compared with threshold value, thus detection is abnormal.
According to this composition, can make to apply in the state that the X-ray generated from sample is not detected by multiple detectors
The voltage for adding to multiple detectors is gradually increasing, and detects exception thus according to the detection signal from multiple detectors.From
In the state that the X-ray that sample generates is not detected by multiple detectors, if normally, even if then making to be applied to detector
Voltage is gradually increasing, and the detection signal for carrying out self-detector also hardly changes.Nevertheless, adding with to the outer of detector
In the case that the rising of voltage and the measured value based on the detection signal for carrying out self-detector have been more than defined threshold, it is able to detect that
Exception has occurred.Thereby, it is possible to prevent height to be applied to detector to voltage more than required degree.
(2) x-ray analysis equipment can also be also equipped with voltage stopping processing unit.It is examined by the abnormality detection processing unit
In the case where measuring exception, the voltage stops processing unit and at least the detector that the measured value has been more than threshold value is stopped coming
From the application of the voltage of the voltage application portion.
It, at least can be super for measured value in the case where detecting exception by abnormality detection processing unit according to this composition
The detector for having crossed threshold value stops the application of voltage, therefore, is reliably prevented from and applies height to required degree to the detector
Above voltage.
(3) in the case where detecting exception by the abnormality detection processing unit, the voltage stops processing unit preferably only
It has been more than that the detector of threshold value stops the application of the voltage from the voltage application portion for the measured value.In the situation
Under, the abnormality detection processing unit can also for a certain detector stop the voltage from the voltage application portion application it
Continue abnormal detection also by the voltage for being applied to other detectors from the voltage application portion is gradually increasing afterwards.
Only it is more than for measured value in the case where detecting exception by abnormality detection processing unit according to this composition
The detector of threshold value stops the application of voltage, will continue to be gradually increasing to the applied voltage of other detectors, thus different to continue
Normal detection.Exception relevant to other detectors can also continue to be detected as a result, therefore can more reliably detect different
Often.
(4) x-ray analysis equipment can also be also equipped with notifier processes portion.The notifier processes portion is by the abnormal inspection
It surveys in the case that processing unit detects exception and notifies this content.
According to this composition, this content is notified that in the case where detecting exception by abnormality detection processing unit, therefore,
It confirmed that the user of the notice is able to carry out appropriate disposition.Thereby, it is possible to be more reliably prevented from height to required degree or more
Voltage is applied to detector.
(5) voltage application portion can also have the interconnecting piece that can individually load and unload to the multiple detector.
According to this composition, not corresponding interconnecting piece by misconnection in the case where detector, can be according to from should
The detection signal of detector detects exception.Thus, it is possible to prevent because interconnecting piece is by misconnection cause height to arrive needed for degree with
On voltage be applied to detector.
(6) x-ray analysis equipment can also be also equipped with shell, shutter door and opening and closing sensor.The shell collecting post
Multiple detectors are stated, the space for loading and unloading the interconnecting piece to the multiple detector is formed in inside.The shutter door setting
On the housing, the space is opened and closed.The opening and closing sensor detects the opening and closing of the shutter door.In the situation
Under, the abnormality detection processing unit can also be only just by the inspection being opened and closed after sensor detects the opening and closing of the shutter door
Survey the processing for being gradually increasing the voltage for being applied to the multiple detector from the voltage application portion when device high pressure applies.
According to this composition, in the case where that can not be attached the handling in portion, can omit makes to be applied to detector
Voltage be gradually increasing this time-consuming processing.
(7) method for detecting abnormality of the invention is the method for detecting abnormality of x-ray analysis equipment, the X-ray analysis dress
It sets by being divided using the X-ray that multiple detectors detection that voltage applies is generated from sample is obtained from voltage application portion
Analysis, the method for detecting abnormality include anomalies detecting step.In the anomalies detecting step, the X-ray generated from sample not
In the state of being detected by the multiple detector, make to be applied to from the voltage application portion voltage of the multiple detector by
Gradually rise, and the measured value based on the detection signal from the multiple detector at this moment is compared with threshold value, thus
Detection is abnormal.
(8) method for detecting abnormality can also also stop step comprising voltage.Stop passing through in step in the voltage
In the case that the anomalies detecting step detects exception, at least the detector that the measured value has been more than threshold value is stopped coming
From the application of the voltage of the voltage application portion.
(9) stop in step in the voltage, in the case where detecting exception by the anomalies detecting step, preferably
It has only been more than that the detector of threshold value stops the application of the voltage from the voltage application portion for the measured value.In the situation
Under, in the anomalies detecting step, applying for the voltage from the voltage application portion can also stopped for a certain detector
In addition continue abnormal detection also by the voltage for being applied to other detectors from the voltage application portion is gradually increasing after.
(10) method for detecting abnormality can also also include notifying process.In the notifying process, by described different
Normal detecting step notifies this content in the case where detecting exception.
[The effect of invention]
According to the present invention, in the rising with the applied voltage for detector based on the detection signal for carrying out self-detector
Measured value be more than defined threshold in the case where, be able to detect that and exception have occurred, therefore, can prevent high to required degree
Above voltage is applied to detector.
Detailed description of the invention
Fig. 1 is the skeleton diagram for indicating the configuration example of x-ray analysis equipment involved in one embodiment of the present invention.
Fig. 2 is the block diagram for indicating an example of x-ray analysis equipment electrically constituted.
Fig. 3 is the flow chart for indicating the concrete example of the abnormality detection carried out by abnormality detection processing unit.
Specific embodiment
The overall structure of 1.X ray analysis device
Fig. 1 is the skeleton diagram for indicating the configuration example of x-ray analysis equipment 1 involved in one embodiment of the present invention.The X
Ray analysis device 1 is by (glimmering from sample S generation X-ray and the sample S X-ray irradiation of position is arranged in sample to being arranged in
Light X-ray) and the fluorescent x-ray analyzer analyzed by detecting the X-ray.It is equipped in x-ray analysis equipment 1
There are x-ray source 2, detection unit 3 and circuit 4 etc..
X-ray source 2 is for example made of X-ray tube.Matched in this x-ray source 2 equipped with being for example mutually vacated with a gap
The filament and target (not shown) set.Target can for example be formed by Cu, Cr, Mo, Al, Ag or Au.It powers to x-ray source 2
And to applying high voltage between filament and target.Thermoelectron is projected from filament towards target as a result, which hits to target,
Thus X-ray is generated.The X-ray generated from x-ray source 2 is irradiated to sample S.
The distinctive X-ray of element contained in sample S is generated as fluorescent X-ray from the sample S by x-ray bombardment.
The X-ray generated from sample S is detected by detection unit 3, and detection signal is input to circuit 4.Detection unit 3 is via even
Socket part 5 is connect with circuit 4.Interconnecting piece 5 is for example made of assemble and unassemble connector, will test unit 3 with circuit 4 can fill
The mode unloaded links together.
Detection unit 3 is incorporated with 1 part of optical splitter 31 and detector 32 with being integrally constituted.Optical splitter 31 for example by
Analyzing crystal is constituted, and is divided to the X-ray generated from sample S.Then, the X after light splitting is detected using detector 32 is penetrated
Line, thereby, it is possible to measure the intensity of specific wavelength.
Detector 32 is constituted such as by proportional counter tube or scintillation counter.Detector 32 is, for example, to be sealed with gas
Container in the composition inserted with filament, when analysis, high voltage is applied to filament.It is incident in the X-ray from sample S as a result,
When in container, the gas in container is ionized, and the electric current generated by the ionization is in the form of output signal from detector
32 outputs.
Circuit 4 has high-voltage generator 41, amplifier 42, wave-height analyzer 43 and counter 44 etc..High voltage occurs
Device 41 and interconnecting piece 5 together form the voltage application portion for applying high voltage to detector 32.Amplifier self-detector in 42 future
32 output signal amplifies and is input to wave-height analyzer 43.Wave-height analyzer 43 carrys out self-detector to what is inputted from amplifier 42
The wave height of 32 output signal (output pulse) is measured.Counter 44 is to being more than regulation wave height value in wave-height analyzer 43
Output signal (output pulse) counted.
X-ray analysis equipment 1 has the shell 12 of the hollow form with inner space 11.In the inner space 11 of shell 12
Contain x-ray source 2, detection unit 3, circuit 4 and interconnecting piece 5.It is provided on shell 12 and is opened to internal volume 11
The shutter door 13 closed.Thus, it, can be in inner space 11 to detector by opening 13 open interior space 11 of shutter door
32 handling interconnecting pieces 5.
The electrical of 2.X ray analysis device is constituted
Fig. 2 is the block diagram for indicating an example of x-ray analysis equipment 1 electrically constituted.In x-ray analysis equipment 1, in addition to upper
Other than detection unit 3, circuit 4 and the interconnecting piece 5 stated, it is further equipped with control unit 6, opening and closing sensor 7 and display unit 8 etc..Control
Portion 6 is, for example, the composition comprising CPU (Central Processing Unit (central processing unit)), by executing journey by CPU
Sequence stops processing unit 62 and notifier processes portion 63 etc. as abnormality detection processing unit 61, voltage and functions.
As shown in Fig. 2, equipped with multiple detection units 3 in the x-ray analysis equipment 1 of present embodiment.Each detection unit 3
The detector 32 of middle outfit has not similar shape to detect different elements respectively, according to the type for the element for becoming analysis object
The container of shape, and different types of gas is sealed in the container.
Each detection unit 3 has same structure, is arranged respectively at around the setting position of sample S.As a result, at
For the state of multiple detection units 3 setting close to each other.When analysis, the different distinctive X of element are detected by each detection unit 3 respectively
Ray, thereby, it is possible to analyze simultaneously multiple element.
Circuit 4 is connected with via interconnecting piece 5 respectively in each detection unit 3.That is, the x-ray analysis equipment 1 of present embodiment
In be provided with the detection unit 3 and circuit 4 that multiple groups interconnect via interconnecting piece 5.Each interconnecting piece 5 can be loaded and unloaded individually
Each detection unit 3 and each circuit 4.As described above, each circuit 4 has high-voltage generator 41, amplifier 42, wave-height analyzer 43
And counter 44 etc., it is respectively provided with same circuits composition.Therefore, each circuit 4 is difficult to distinguish in appearance, does not correspond to mutually to have
Different groups detection units 3 and circuit 4 via assemble and unassemble interconnecting piece 5 worry of misconnection.
Therefore, present embodiment is that not corresponding circuit 4 can be prevented to be inadvertently coupled to each inspection by the control of control unit 6
Survey the such composition of unit 3.Specifically, passing through abnormality detection processing unit 61, detector 32 of the basis from each detection unit 3
Detection signal detect exception.In addition, feelings of the "abnormal" in addition to being inadvertently coupled to each detection unit 3 including not corresponding circuit 4
Other than condition, it is right as mistaking and be applied to the setting of voltage etc. of each detector 32 from high-voltage generator 41 to include the case where
Each detector 32 applies the various states of the voltage except imagining.
Abnormality detection processing unit 61 is in the state of being not provided with sample S on the sample of x-ray analysis equipment 1 setting position
The voltage for making the high-voltage generator 41 from each circuit 4 be applied to the detector 32 of each detection unit 3 is gradually increasing.At this point, applying
The voltage for adding to each detector 32 is controlled as continuously or periodically rising when until reaching the use of the detector 32 and should apply
Until the voltage (setting voltage) added.
In the abnormality detection that abnormality detection processing unit 61 is carried out, due to being not provided with sample S on sample setting position,
Therefore, if without any exception, completely will not from each detector 32 export detection signal, even if output detection signal
Seldom.But such as in not corresponding 4 misconnection of circuit in the case where each detection unit 3, or be applied to as having mistaken
When the case where setting of the voltage of each detector 32 etc. is applied with the voltage except imagining to either detector 32 like that, sometimes
From the detector 32 output derived from the detection signal of electric discharge.
Therefore, when abnormality detection processing unit 61 will be gradually increasing the voltage for being applied to each detector 32 based on from each
The measured value of the detection signal of detector 32 is compared with threshold value, thus detects exception as described above.That is, based on next
In the case where being more than defined threshold from the measured value of the detection signal of a certain detector 32, it is possible to determine that the detector 32 occurs
Exception.As said determination value, counting rate (cps) may be exemplified, but it is not limited to this.
The abnormality detection that abnormality detection processing unit 61 is carried out should apply the progress of detector high pressure at the time of, but in this reality
It applies in mode, is that whether there is or not be opened and closed to start abnormality detection according to shutter door 13.X-ray analysis equipment 1 is equipped with for example with machinery
The opening and closing sensor 7 of the opening and closing of mode or optical mode detection shutter door 13.Shutter door 13 is being detected by opening and closing sensor 7
In the case where opening state or closed state, abnormality detection processing unit 61 only starts when detector high pressure soon later applies
The high-voltage generator 41 from each circuit 4 is set to be applied to the processing that the voltage of the detector 32 of each detection unit 3 is gradually increasing.By
This, in the case where that can not be attached the handling in portion 5, can omit makes the voltage for being applied to detector be gradually increasing this
Time-consuming processing.
In the case where detecting exception by abnormality detection processing unit 61, voltage stops processing unit 62 and at least stops to detection
To the application of the voltage of abnormal detector 32 (detector 32 that measured value has been more than threshold value).Although that is, can stop to all
The application of the voltage of detector 32, but can also only stop the application to the voltage for detecting abnormal detector 32 and continue to it
The application of the voltage of his detector 32.
In the case where detecting exception by abnormality detection processing unit 61, this content is notified to use by notifier processes portion 63
Family.In the present embodiment, notifier processes portion 63 will notify user to the display of display unit 8 by control extremely.Display unit 8
Such as it is made of liquid crystal display.But be not limited to the display to display unit 8, for example, can also for by other means such as sound come
The abnormal such composition of notice.
3. the concrete example of abnormality detection
Fig. 3 is the flow chart for indicating the concrete example of the abnormality detection carried out by abnormality detection processing unit 61.In this embodiment party
In formula, in the case where detecting the opening and closing of shutter door 13 by opening and closing sensor 7 (being "Yes" in step S101), start abnormal inspection
Survey the abnormality detection (step S102, S103, S106: anomalies detecting step) that processing unit 61 is carried out.
Specifically, the voltage for being applied to each detector 32 is made to be gradually increasing (step S102), it will be based on from each detection
The measured value (such as counting rate) and threshold value (such as 10cps) of the detection signal of device 32 are compared (step S103).In the mistake
Cheng Zhong (is in step S103 in the case where the measured value based on the detection signal from a certain detector 32 has been more than threshold value
"Yes"), only stop the application of the voltage for the detector 32 (step S104: voltage stops step).In addition, passing through display unit
8 display will test this abnormal content and notify to give user (step S105: notifying process).At this point, can also notify to determine inspection
Measure the information of abnormal detector 32.
Even if, also can be by making as described above, in the case where stopped the application for the voltage of either detector 32
The voltage for being applied to other detectors 32 is gradually increasing (step S102) to continue abnormal detection until abnormality detection processing knot
Until beam (until becoming "Yes" in step S106).Then, in the measured value based on the detection signal from other detectors 32
In the case where being more than threshold value (being "Yes" in step S103), to the detector 32 carry out voltage stop step (step S104) and
Notifying process (step S105).
4. function and effect
(1) in the present embodiment, the shape by not detected by multiple detectors 32 in the X-ray generated from sample S
The voltage for being applied to multiple detectors 32 is set to be gradually increasing (step S102) under state, it can be according to the inspection from multiple detectors 32
Signal is surveyed to detect exception (step S103).In the state that the X-ray generated from sample S is not detected by multiple detectors 32
Under, if normally, even if being then gradually increasing the voltage for being applied to detector 32, the detection signal for carrying out self-detector 32 is also several
It will not change.Nevertheless, in the rising with the applied voltage for detector 32 and based on the inspection for carrying out self-detector 32
The measured value for surveying signal has been more than to be able to detect that and exception has occurred in the case where defined threshold (being "Yes" in step S103).
Thereby, it is possible to prevent height to be applied to detector 32 to voltage more than required degree.
(2) in addition, in the present embodiment, (the step in the case where detecting exception by abnormality detection processing unit 61
In S103 be "Yes"), can at least stop be more than for measured value the voltage of the detector 32 of threshold value application (step S104),
Therefore, it is reliably prevented from and the high voltage to more than required degree is applied to the detector 32.
(3) especially in the present embodiment, (the step in the case where detecting exception by abnormality detection processing unit 61
In S103 be "Yes"), only stop be more than for measured value the voltage of the detector 32 of threshold value application (step S104), for
The applied voltage of other detectors 32 then continues to be gradually increasing (step S102), thus continues abnormal detection.As a result, with other
The relevant exception of detector 32 can also continue to be detected, therefore can more reliably detect exception.
(4) in addition, in the present embodiment, (the step in the case where detecting exception by abnormality detection processing unit 61
In S103 be "Yes"), be notified that this content (step S105), it is thus identified that the user of the notice be able to carry out it is appropriate
Disposition.Thereby, it is possible to be more reliably prevented from height to be applied to detector 32 to voltage more than required degree.
(5) in the present embodiment, each circuit 4 is to be connected to multiple detectors via the interconnecting piece 5 that can individually load and unload
32.Thus, it, can be according to the inspection from the detector 32 in not corresponding 5 misconnection of interconnecting piece in the case where detector 32
Signal is surveyed to detect exception.Thus, it is possible to prevent from causing the voltage of the high degree needed for or more to be applied because interconnecting piece 5 is by misconnection
Add to detector 32.
(6) in addition, in the present embodiment, (being in step S101 in the case where shutter door 13 is not opened and closed
"No"), omit the abnormal detection that abnormality detection processing unit 61 is carried out.In the case where being opened and closed to shutter door 13,
Interconnecting piece 5 can be loaded and unloaded to the detector 32 accommodated in shell 12.Thus, in the case where being opened and closed to shutter door 13,
The abnormal detection that abnormality detection processing unit 61 carried out is needed, if but the handling in portion 5 can not be attached, then it need not be on foot
Waste time to labor.
5. variation
As long as the abnormality detection that abnormality detection processing unit 61 is carried out is in the X-ray generated from sample S not by each detector
32 detect in the state of carry out, however it is not limited to sample setting is not provided with the state of sample S on position.That is, can also be
It is not different to progress below such as the sample S irradiation states as the X-ray of x-ray source 2 being arranged on sample setting position
Often detection.
Start to be not limited to be opened and closed shutter door 13 at the time of the abnormality detection that abnormality detection processing unit 61 is carried out
The case where.For example, it is also possible to which any other moment when as the power supply of x-ray analysis equipment 1 is connected etc. starts exception
Detection.
The present invention is not limited to Wavelength dispersion type fluorescent x-ray analyzers, can also apply to energy dispersion type fluorescence X and penetrate
Other x-ray analysis equipments such as line analysis device.
Symbol description
1 x-ray analysis equipment
2 x-ray sources
3 detection units
4 circuits
5 interconnecting pieces
6 control units
7 opening and closing sensors
8 display units
11 inner spaces
12 shells
13 shutter doors
31 optical splitters
32 detectors
41 high-voltage generators
42 amplifiers
43 wave-height analyzers
44 counters
61 abnormality detection processing units
62 voltages stop processing unit
63 notifier processes portions.
Claims (10)
1. a kind of x-ray analysis equipment is analyzed, the x-ray analysis equipment by detecting the X-ray generated from sample
It is characterized in that having:
Multiple detectors, they detect X-ray；
Voltage application portion applies voltage to the multiple detector；And
Abnormality detection processing unit, make in the state that the X-ray generated from sample is not detected by the multiple detector from
The voltage that the voltage application portion is applied to the multiple detector is gradually increasing, and will be at this moment based on from the multiple inspection
The measured value for surveying the detection signal of device is compared with threshold value, and thus detection is abnormal.
2. x-ray analysis equipment according to claim 1, which is characterized in that
It is also equipped with voltage and stops processing unit, in the case where detecting exception by the abnormality detection processing unit, the voltage stops
Only processing unit at least stops applying for the voltage from the voltage application portion for the detector that the measured value has been more than threshold value
Add.
3. x-ray analysis equipment according to claim 2, which is characterized in that
In the case where detecting exception by the abnormality detection processing unit, the voltage stops processing unit only for the measurement
Value has been more than that the detector of threshold value stops the application of the voltage from the voltage application portion,
The abnormality detection processing unit for a certain detector stop the voltage from the voltage application portion application after,
Continue abnormal detection also by the voltage for being applied to other detectors from the voltage application portion is gradually increasing.
4. x-ray analysis equipment according to claim 1, which is characterized in that
It is also equipped with notifier processes portion, the notifier processes portion leads in the case where detecting exception by the abnormality detection processing unit
Know this content.
5. x-ray analysis equipment according to claim 1, which is characterized in that
The voltage application portion has the interconnecting piece that can individually load and unload relative to the multiple detector.
6. x-ray analysis equipment according to claim 5, which is characterized in that be also equipped with:
Shell accommodates the multiple detector, is formed in inside and loads and unloads the interconnecting piece relative to the multiple detector
Space；
Shutter door is arranged on the housing, for the space to be opened and closed；And
It is opened and closed sensor, detects the opening and closing of the shutter door,
In the case where detecting the opening and closing of the shutter door by the opening and closing sensor, the abnormality detection processing unit is only at it
Implement to make to be applied to the voltage of the multiple detector gradually from the voltage application portion when detector high pressure soon applies afterwards
The processing of rising.
7. a kind of method for detecting abnormality, is the method for detecting abnormality of x-ray analysis equipment, the x-ray analysis equipment passes through
It is analyzed using the X-ray that multiple detectors detection that voltage applies is generated from sample is obtained from voltage application portion, this is different
Often detection method is characterized in that,
Comprising anomalies detecting step, in the state that the X-ray generated from sample is not detected by the multiple detector, make from
The voltage that the voltage application portion is applied to the multiple detector is gradually increasing, and will be at this moment based on from the multiple inspection
The measured value for surveying the detection signal of device is compared with threshold value, and thus detection is abnormal.
8. method for detecting abnormality according to claim 7, which is characterized in that
Also stop step comprising voltage, in the case where detecting exception by the anomalies detecting step, at least for described
Measured value has been more than that the detector of threshold value stops the application of the voltage from the voltage application portion.
9. method for detecting abnormality according to claim 8, which is characterized in that
Stop in step in the voltage, in the case where detecting exception by the anomalies detecting step, only for described
Measured value has been more than that the detector of threshold value stops the application of the voltage from the voltage application portion,
In the anomalies detecting step, for a certain detector stop the voltage from the voltage application portion application it
Afterwards, continue abnormal detection also by the voltage for being applied to other detectors from the voltage application portion is gradually increasing.
10. method for detecting abnormality according to claim 7, which is characterized in that
Include also notifying process, this content is notified in the case where detecting exception by the anomalies detecting step.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-245330 | 2017-12-21 | ||
| JP2017245330A JP6863267B2 (en) | 2017-12-21 | 2017-12-21 | X-ray analyzer and abnormality detection method |
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| CN109946323A true CN109946323A (en) | 2019-06-28 |
| CN109946323B CN109946323B (en) | 2022-02-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113274044A (en) * | 2020-02-19 | 2021-08-20 | 佳能医疗系统株式会社 | X-ray detector and medical image diagnostic apparatus |
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Also Published As
| Publication number | Publication date |
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| CN109946323B (en) | 2022-02-25 |
| JP6863267B2 (en) | 2021-04-21 |
| JP2019113351A (en) | 2019-07-11 |
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