CN109937466A - Electrode body and high-pressure discharge lamp - Google Patents
Electrode body and high-pressure discharge lamp Download PDFInfo
- Publication number
- CN109937466A CN109937466A CN201780069485.1A CN201780069485A CN109937466A CN 109937466 A CN109937466 A CN 109937466A CN 201780069485 A CN201780069485 A CN 201780069485A CN 109937466 A CN109937466 A CN 109937466A
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- China
- Prior art keywords
- core wire
- electrode
- electrode body
- low friction
- core
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Discharge Lamp (AREA)
Abstract
The present invention provides a kind of electrode body (1) and has used the high-pressure discharge lamp of the electrode body, in the electrode body (1) that the core wire (4) by electrode (2) and the core line pluging handhole (3) for being inserted in electrode (2) forms, when core wire (4) to be inserted in core line pluging handhole (3) of electrode (2), it is able to carry out smoothly core wire insertion operation, and eliminates the generation of the notch of core line pluging handhole (3), rupture.It is characterized in that, being provided with low friction layer (5) in the periphery of the insert region of the inner surface and/or core wire of the core line pluging handhole (3) of electrode (2).
Description
Technical field
The present invention relates to the electrode body for high-pressure discharge lamp and the high-pressure discharge lamp of the electrode body has been used, particularly,
It is related to being suitable for the exposure light source of manufacturing field of semiconductor, liquid crystal etc., the projection light source of projector or the light for analysis
The electrode body of the high-pressure discharge lamp in source.
Background technique
High-pressure discharge lamp due to the oppositely disposed top in a pair of electrodes in luminous tube apart from it is short and close to point light source,
Therefore be used as and being combined with optical system exposure device with or projector projection light source.
An example of such high-pressure discharge lamp is disclosed in Japanese Unexamined Patent Application 60-79659 bulletin (patent document 1).
Fig. 9 shows the previous high-pressure discharge lamp, and the luminous tube 10 of high-pressure discharge lamp has centrally located be formed as
The sealing 12 of substantially spherical illumination region 11 and its both ends.In illumination region 11, cathode 21 and anode made of tungsten etc.
31 is oppositely disposed in mode relative to each other, and is sealed with the luminescent substances such as mercury, xenon in its emitting space S.
The core wire 22,32 of above-mentioned cathode 21 and anode 31 is connected in through not shown metal foil or via using heat
The material that the coefficient of expansion is slightly different is sealed the formations connected between luminous tube and core wire by sealing 12,12.
When lighting between two electrodes electric current flowing, the electrode temperature due to radiation, resistance heating from plasma
Become high.Particularly, since anode becomes the high temperature that temperature is up to 2000 degree or more, anode is by the vapour pressure in high temperature
Lesser metal is constituted, and is needed to inhibit the temperature of anode to rise using the biggish material of thermal capacity, such as Fig. 9
(B) shown in, the electrode being made of using entirety tungsten.
Such electrode body 30 is by being drilled with core line pluging handhole 33 in the rear end of electrode 31 and being inserted and fixed core wire 32
It is made in the core line pluging handhole 33.Therefore, in order not to generating falling off for core wire, the internal diameter and core wire of the core line pluging handhole of electrode
The difference of outer diameter be designed to be minimum.
Therefore, because the processing of core wire and core line pluging handhole, especially because the size when processing of core line pluging handhole is inclined
Core wire and the deviation of center of core line pluging handhole when difference, core wire insertion operation etc., the insertion of core wire is more difficult, Huo Zhewu
Method carries out the insertion of specific length, can be in the end of core line pluging handhole in addition when the intensity of the indentation when reinforcing insertion operation
Exceedingly apply stress, generates the adverse effects such as notch, rupture.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Application 60-79659 bulletin
Summary of the invention
Problems to be solved by the invention
Project to be solved by this invention is in view of the above problems in the prior art, to provide by electrode and being inserted in this
It electrode body that the core wire of the core line pluging handhole of electrode is constituted and has used in the high-pressure discharge lamp of the electrode body, has been inserted by core wire
When the core line pluging handhole of electrode, it is able to carry out smoothly core wire insertion operation and eliminates the notch of core line pluging handhole, ruptures
The electrode body of generation and the high-pressure discharge lamp for having used the electrode body.
A technical solution to solve project
In order to solve the above problems, electrode body of the invention is characterized in that, in the core line pluging handhole of the electrode
The periphery of the insert region of surface and/or the core wire is provided with low friction layer.
In addition, which is characterized in that the low friction layer is carburization zone.
In addition, which is characterized in that the low friction layer is nitration case.
In addition, which is characterized in that the coefficient of friction of the low friction layer is when being evaluated by ball disk friction test
0.2~0.35.
In addition, which is characterized in that inner surface and/or the core of the low friction layer in the core line pluging handhole of the electrode
The periphery of the insert region of line is set to regional area.
In addition, which is characterized in that the low friction layer is set to the periphery of the core wire, is set to the insertion than the core wire
The bigger range in region.
In addition, which is characterized in that the top end part of the core wire has carried out chamfering.
In addition, which is characterized in that be formed with space between the top of core wire and the bottom surface sections of the core line pluging handhole.
In addition, which is characterized in that the gap between the core wire and the core wire embedded hole of the electrode is folded with metal
Foil.
In addition, in the high-pressure discharge lamp that the both ends of illumination region have sealing, which is characterized in that inserted in the core wire of electrode
The periphery for entering the inner surface in hole and/or the insert region of core wire is provided with low friction layer.
Invention effect
Electrode body according to the present invention and the high-pressure discharge lamp for having used the electrode body pass through the core line pluging handhole in electrode
Inner surface and/or core wire insert region periphery be arranged low friction layer, make the insertion operation pole of core wire swimmingly carry out and
Operability improves, and will not generate the notch of core line pluging handhole, rupture.
Detailed description of the invention
Fig. 1 is the cross-sectional view of the first embodiment of electrode body of the invention.
Fig. 2 is the cross-sectional view of second embodiment.
Fig. 3 is the cross-sectional view of 3rd embodiment.
Fig. 4 is the cross-sectional view of fourth embodiment.
Fig. 5 is the cross-sectional view (A) and its X-X cross-sectional view (B) of the 5th embodiment.
Fig. 6 is the cross-sectional view of sixth embodiment.
Fig. 7 is the cross-sectional view of the 7th embodiment.
Fig. 8 is the cross-sectional view of the 8th embodiment.
Fig. 9 is the cross-sectional view of overall diagram (A) and previous electrode body of high-pressure discharge lamp.
Specific embodiment
Fig. 1 is the cross-sectional view of first embodiment, and (A) is sectional view, and (B) is its A-A cross-sectional view.
In Fig. 1, electrode body 1 is by electrode 2 and is inserted in the core wire 4 of the core line pluging handhole 3 being drilled in its back-end and forms.
Low friction layer 5 is formed in the inner surface of core line pluging handhole 3.The low friction layer 5 is by tungsten carbide (Tungsten Carbide) etc.
Nitride compounds such as carbonized compound, tungsten nitride etc. are constituted.
An example that the forming method of low friction layer 5 is formed to 3 inner surface of core line pluging handhole is enumerated as follows.It is herein to form carbon
Change layer as low friction layer 5 and using carbonized compound, that is, tungsten carbide example of tungsten.
It is added to the adhesive of the organic as nitrocellulose to be dissolved in mixed solution made of butyl acetate
Carbon dust modulates carbon containing solution.Or it also can use prepared Chinese ink.
By pen, brush or sprayer etc. by the solution coating in the inner surface of core line pluging handhole.Alternatively, it is also possible to pass through
Solution injection is filled in core line pluging handhole and is coated disposing extra solution later.
After the solution being applied out in this way is dry, electrode is warming up to 1500~1800 DEG C using high-temperature vacuum furnace,
And kept for 30 points or so to be sintered.In this way, forming low friction layer 5 in 3 inner surface of core line pluging handhole.
The coefficient of friction of the low friction layer made of the metal carbides formed by such method rubs by ball disk
It wipes and tests when being evaluated as 0.2~0.35.Coefficient of friction with the tungsten without containing carbide lamella (low friction layer) is 0.5
The case where left and right, compares, and can reach the degree of less than half.
In addition, forming low-friction material of the nitration case as low friction layer 5 and the nitride compound using tungsten i.e. nitridation
In the case where tungsten, places an electrode within and heated in the atmosphere containing ammonia or nitrogen.Thus make nitrogen penetrate into surface nearby to make
Standby compound.At this point, the position for being not intended to nitridation, the i.e. part other than core line pluging handhole 3, it can be by being hidden
It covers and is only arranged in the inner surface of core line pluging handhole 3 by WN, WN2Low friction layer 5 made of equal tungsten nitrides.
Fig. 2 is that in a second embodiment, the top end part 4a of core wire 4 has carried out chamfering, thus swimmingly carry out by electrode 2 to
The insertion operation that core line pluging handhole 3 is inserted into.
In addition, as shown in figure 3, core wire 4 can not also reach core wire insertion hole 3 whole region do not reach bottom surface sections,
It can be inserted into the state for being formed with space S on its top.It should be noted that in the case, 3 inner surface of core line pluging handhole
Low friction layer 5 both can only be formed in the region of insertion core wire 4, it is also contemplated that the shape to the operability for forming low friction layer
The whole region of 3 inner surface of Cheng Yuxin line pluging handhole.
Although in the various embodiments described above, low friction layer 5 is formed on the circumferencial direction of the inner surface of core line pluging handhole 3
Complete cycle show the structure of the regional area on the circumferencial direction for being formed in inner surface but in the fourth embodiment of Fig. 4.
In addition, the 5th embodiment as shown in Figure 5, low friction layer 5 can also be formed in the inner surface of core line pluging handhole 3
Axis direction on regional area.
Although being formed with low friction layer 5 in the inner surface of core line pluging handhole 3 in the first~five above embodiment,
It in the sixth embodiment of Fig. 6, shows and is formed with the structure of low friction layer 6 in core wire 4, in the insert district on the top of core wire 4
The periphery in domain is formed with low friction layer 6.It should be noted that at this point, without make the forming region of low friction layer 6 only with core wire 4
Insert region strict conformance, as shown in fig. 6, the range more slightly larger than insert region can also be formed in.
It can be formed to the formation of the low friction layer 6 of core wire 4: be described with first embodiment above-mentioned in the following way
Mode be used in the same manner pen, brush or sprayer for carbon containing solution coating in the top end part of core wire 4, or by by core wire
4 top end part, which is impregnated in solution, to be lifted again and is coated, and is dried and is heated and shape to the top end part of the core wire 4 after coating
At.
It should be noted that it is as shown in Figure 6 form low friction layer 6 in 4 side of core wire in the case where, can also be as
Shown in Fig. 4, Fig. 5, it is formed in outer peripheral surface of the low friction layer 6 in the insert region of core wire 4 on circumferencial direction or axis direction
On regional area.
In addition, low friction layer 5,6 can also be formed in core line pluging handhole 3 and core wire 4 this both sides, which indicates in Fig. 7
For the 7th embodiment.
That is, the inner surface in the core line pluging handhole 3 of electrode 2 forms low friction layer 5, and the insertion of the tip side in core wire 4
The periphery in region forms low friction layer 6.
The 8th embodiment is shown in FIG. 8, is that the gap filling between core wire 4 and core line pluging handhole 3 has metal foil 7
Structure.It is in the structure that the top end part of core wire 47 at coiled metal foil and is pressed into core line pluging handhole 3.Metal foil 7 is by Mo, Ta
Equal refractory metals are made, for example, with a thickness of 0.15mm or so.In this way, gap is eliminated between core wire 4 and core line pluging handhole 3,
It is formed reliable fixed.
The height for the structure that the electrode body of such structure can both be used to have sealing at the both ends of illumination region presses
Anode and cathode this both sides in electric light, can also be arranged at either side.
As explained above, in the present invention, in the core wire by electrode and the core line pluging handhole for being inserted in the electrode
It the electrode body of composition and has used in the high-pressure discharge lamp of the electrode body, has passed through the inner surface of the core line pluging handhole in the electrode
And/or low friction layer is arranged in the periphery of the insert region of the core wire, thus core wire is inserted into the core line pluging handhole of electrode
When, the insertion operation can be swimmingly carried out without applying excessive stress to electrode, can prevent the accidents such as defect.
Label declaration
1 electrode body
2 electrodes
3 core line pluging handholes
4 core wires
4a break corner portion
5,6 low friction layer
7 metal foils
The space S
Claims (10)
1. a kind of electrode body is made of the core wire of electrode and the core line pluging handhole for being inserted in the electrode, which is characterized in that
The periphery of the insert region of the inner surface and/or core wire of the core line pluging handhole of the electrode is provided with low friction
Layer.
2. electrode body according to claim 1, which is characterized in that
The low friction layer is carburization zone.
3. electrode body according to claim 1, which is characterized in that
The low friction layer is nitration case.
4. electrode body according to claim 1, which is characterized in that
The coefficient of friction of the low friction layer is 0.2~0.35 when being evaluated by ball disk friction test.
5. electrode body according to claim 1, which is characterized in that
The low friction layer is set in the periphery of the inner surface of the core line pluging handhole of the electrode and/or the insert region of the core wire
It is placed in regional area.
6. electrode body according to claim 1, which is characterized in that
The low friction layer is set to the periphery of the core wire, is set to the range bigger than the insert region of the core wire.
7. electrode body described according to claim 1~any one of 6, which is characterized in that
The top end part of the core wire has carried out chamfering.
8. electrode body described according to claim 1~any one of 7, which is characterized in that
Space is formed between the top of the core wire and the bottom surface sections of the core line pluging handhole.
9. electrode body described according to claim 1~any one of 8, which is characterized in that
Gap between the core wire and the core wire embedded hole of the electrode is folded with metal foil.
10. a kind of high-pressure discharge lamp, which is characterized in that
There is sealing at the both ends of illumination region, and the electricity described in any one of at least having a claim 1~9
Polar body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016248605A JP6548043B2 (en) | 2016-12-22 | 2016-12-22 | Electrode body and high pressure discharge lamp |
| JP2016-248605 | 2016-12-22 | ||
| PCT/JP2017/043921 WO2018116839A1 (en) | 2016-12-22 | 2017-12-07 | Electrode body and high-voltage discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109937466A true CN109937466A (en) | 2019-06-25 |
| CN109937466B CN109937466B (en) | 2020-02-28 |
Family
ID=62627455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780069485.1A Active CN109937466B (en) | 2016-12-22 | 2017-12-07 | Electrode assembly and high-pressure discharge lamp |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10553419B2 (en) |
| JP (1) | JP6548043B2 (en) |
| KR (1) | KR102079313B1 (en) |
| CN (1) | CN109937466B (en) |
| DE (1) | DE112017006510B4 (en) |
| WO (1) | WO2018116839A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7134398B2 (en) * | 2018-05-22 | 2022-09-12 | ウシオ電機株式会社 | high pressure discharge lamp |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1121640A (en) * | 1994-05-17 | 1996-05-01 | 东芝照明技术株式会社 | Discharge lamp and illumination apparatus using the same |
| CN1434477A (en) * | 2002-01-21 | 2003-08-06 | 日本碍子株式会社 | High-pressure discharge lamp assembly, high-pressure discharge lamp and discharge vessels for same |
| JP2007311300A (en) * | 2006-05-22 | 2007-11-29 | Ushio Inc | Discharge lamp |
| JP2010282758A (en) * | 2009-06-02 | 2010-12-16 | Ushio Inc | Short-arc discharge lamp and method of manufacturing the same |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4811984Y1 (en) | 1968-05-31 | 1973-03-31 | ||
| US4039883A (en) * | 1972-07-04 | 1977-08-02 | U.S. Philips Corporation | Soldered joint |
| NL7300381A (en) | 1973-01-11 | 1974-07-15 | ||
| JPS6079659A (en) | 1983-10-07 | 1985-05-07 | Ushio Inc | Short arc discharge lamp |
| JP3429791B2 (en) | 1992-09-04 | 2003-07-22 | 松下電器産業株式会社 | Home position adjustment method for linear positioning device |
| JP3614042B2 (en) * | 1999-07-05 | 2005-01-26 | ウシオ電機株式会社 | Discharge lamp |
| JP2002008586A (en) | 2000-06-22 | 2002-01-11 | Ushio Inc | Electrode for discharge lamp |
| JP2004111235A (en) | 2002-09-19 | 2004-04-08 | Ushio Inc | Discharge lamp |
| JP4725389B2 (en) * | 2006-03-29 | 2011-07-13 | ウシオ電機株式会社 | High pressure discharge lamp |
| DE102008062676A1 (en) | 2008-12-17 | 2010-06-24 | Osram Gesellschaft mit beschränkter Haftung | discharge lamp |
| JP2010232023A (en) * | 2009-03-27 | 2010-10-14 | Ushio Inc | Short arc type discharge lamp |
| JP2011187256A (en) | 2010-03-08 | 2011-09-22 | Ushio Inc | Short arc discharge lamp |
| JP5812053B2 (en) * | 2013-04-24 | 2015-11-11 | ウシオ電機株式会社 | Short arc type discharge lamp |
-
2016
- 2016-12-22 JP JP2016248605A patent/JP6548043B2/en active Active
-
2017
- 2017-12-07 DE DE112017006510.0T patent/DE112017006510B4/en active Active
- 2017-12-07 CN CN201780069485.1A patent/CN109937466B/en active Active
- 2017-12-07 US US16/472,353 patent/US10553419B2/en active Active
- 2017-12-07 WO PCT/JP2017/043921 patent/WO2018116839A1/en active Application Filing
- 2017-12-07 KR KR1020197016100A patent/KR102079313B1/en active IP Right Grant
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1121640A (en) * | 1994-05-17 | 1996-05-01 | 东芝照明技术株式会社 | Discharge lamp and illumination apparatus using the same |
| CN1434477A (en) * | 2002-01-21 | 2003-08-06 | 日本碍子株式会社 | High-pressure discharge lamp assembly, high-pressure discharge lamp and discharge vessels for same |
| JP2007311300A (en) * | 2006-05-22 | 2007-11-29 | Ushio Inc | Discharge lamp |
| JP2010282758A (en) * | 2009-06-02 | 2010-12-16 | Ushio Inc | Short-arc discharge lamp and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6548043B2 (en) | 2019-07-24 |
| US10553419B2 (en) | 2020-02-04 |
| US20190362959A1 (en) | 2019-11-28 |
| KR102079313B1 (en) | 2020-02-19 |
| DE112017006510T5 (en) | 2020-04-02 |
| CN109937466B (en) | 2020-02-28 |
| WO2018116839A1 (en) | 2018-06-28 |
| JP2018101597A (en) | 2018-06-28 |
| DE112017006510B4 (en) | 2022-12-08 |
| KR20190068634A (en) | 2019-06-18 |
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