CN109935543A - Film magazine automatic transportation equipment and transportation resources - Google Patents
Film magazine automatic transportation equipment and transportation resources Download PDFInfo
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- CN109935543A CN109935543A CN201711367906.7A CN201711367906A CN109935543A CN 109935543 A CN109935543 A CN 109935543A CN 201711367906 A CN201711367906 A CN 201711367906A CN 109935543 A CN109935543 A CN 109935543A
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- film magazine
- handgrip
- automatic transportation
- control system
- transportation equipment
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Abstract
The present invention provides a kind of film magazine automatic transportation equipment, it include: control system, navigation device, mechanical arm, handgrip and NI Vision Builder for Automated Inspection, the control system controls the navigation device and drives the mechanical arm to run to target position by planning path, the control system obtains the distance grabbed on handgrip to film magazine a little also according to the film magazine characteristic information that the NI Vision Builder for Automated Inspection is shot, and the control system controls the mobile distance of the handgrip to grab film magazine.The present invention provides a kind of film magazine automatic transportation equipment and transportation resources, film magazine characteristic information is shot by NI Vision Builder for Automated Inspection during film magazine crawl, the distance grabbed on handgrip to film magazine a little is also obtained according to the film magazine characteristic information by control system, and the mobile distance of handgrip is controlled to grab film magazine, the deviations occurred during grabbing film magazine are avoided, handling efficiency is improved.
Description
Technical field
The present invention relates to a kind of haulage equipment, especially a kind of film magazine automatic transportation equipment and transportation resources.
Background technique
Since 21 century, automatic Material Handling System is used widely in industrial circle, in the preceding road technique of IC industry
Producing line in, in especially 12 cun of producing lines, generallyd use automatic material conveyer (AMHS), including AGV, OHT,
Stocker etc..AMHS is dispatched by MES system, silicon wafer film magazine is directly directly transported to the interface of each board from Stocker
On, then order board carries out automated production, and the inefficient mode manually transported completely before changing greatly promotes elder generation
Into the automatization level of IC technique producing line, human cost is effectively saved, improves product output.
In semiconductor workshop especially after road encapsulate producing line, board automation is the trend of future development, artificial in producing line
The status of transport will thoroughly change.It has been adopted in main preceding 12 cun of semiconductor producing lines in road of semiconductor manufacturer in world wide at present
Handling of goods and materials is carried out with OHT system, but also faces the update of material automated system for many rear road encapsulation producing lines
Problem, and 12 cun of products are increasingly occupied an leading position, the film magazine weight of full and down is about 7.5Kg, for operative employee compared with
Painstakingly, and there is certain risk；Meanwhile labour will understand critical shortage in future and labor cost is higher and higher, therefore film magazine
The demand of transportation robot will be increasing；Further, since the scale and profit of encapsulation factory are limited, before can not supporting such as
The OHT system investments of road semiconductor producing line need more to facilitate, economic automation film magazine transport plan and equipment.
In the prior art, it is commonly used in the automatic transportation equipment of film magazine carrying, the robot arm system fortune in equipment
Film magazine is directly grabbed after moving to target position, is easy to appear deviations during grabbing film magazine, influences the crawl of film magazine, is dropped
Low handling efficiency.
Summary of the invention
The purpose of the present invention is to provide a kind of film magazine automatic transportation equipment and transportation resources, are carried with solving existing film magazine
The higher problem of deviations during equipment crawl.
In order to achieve the above object, the present invention provides a kind of film magazine automatic transportation equipment, comprising: control system, navigation
Device, mechanical arm, handgrip and NI Vision Builder for Automated Inspection, the control system control the navigation device by described in planning path drive
Mechanical arm is run to target position, and the control system is obtained also according to the film magazine characteristic information that the NI Vision Builder for Automated Inspection is shot
Distance a little is grabbed on handgrip to film magazine, the control system controls the mobile distance of the handgrip to grab film magazine.
Further, when the handgrip crawl film magazine, the end joint of the mechanical arm connecting with handgrip is grabbed with described
Hand is in 90 degree or 90 degree minus.
Further, the film magazine automatic transportation equipment further includes frame, and film magazine is provided on the frame and places station.
Further, the mechanical arm, control system and navigation device are separately mounted on the frame.
Further, it is at least two that the film magazine, which places the quantity of station,.
Further, the film magazine automatic transportation equipment further includes laser sensor, and the laser sensor and control are
System connection, the control system obtain the complaint message of short transverse according to the laser sensor.
Further, the film magazine automatic transportation equipment further includes Sonar system, and being configured to detection has personnel to enter machine
Warning message is generated when within tool arm stroke range.
Further, the film magazine automatic transportation equipment further includes Sonar system, and the Sonar system detection personnel enter
Information is generated when in the stroke range of the mechanical arm to the control system, the control system controls institute according to the information
Mechanical arm is stated to slow down or stop.
Further, the NI Vision Builder for Automated Inspection is mounted on the handgrip.
Further, the control system controls the mechanical arm and drives the handgrip movement, so that the handgrip is transported
Dynamic height range is 450mm~1350mm.
The present invention also provides a kind of film magazine automatic transportation methods, comprising:
S1: mechanical arm is driven to run to target position by the carrying task of planning by control system；
S2: shooting the characteristic information of film magazine, obtains crawl point on handgrip to film magazine according to the characteristic information of the film magazine
Distance；
S3: the mobile distance of the handgrip is controlled to grab film magazine by the control system.
Further, step S1 includes:
S1.1: carrying task is obtained by control system, the carrying task includes planning path and film magazine to be handled letter
Breath；
S1.2: judging whether film magazine to be handled is in different height layers according to the carrying task, if so, entering step
Rapid S1.3, if it is not, then entering step S1.4；
S1.3: navigation device is controlled by the control system and drives mechanical arm to run to target position by planning path；
S1.4: controlling navigation device by the control system and drive mechanical arm to run to target position by planning path,
And the target position is made to be in the relationship of opposite rule with layer height that film magazine is placed to the distance of film magazine.
Further, step S2 includes:
S2.1: the characteristic information of film magazine to be handled is shot by NI Vision Builder for Automated Inspection；
S2.2: the distance grabbed on handgrip to film magazine a little is obtained according to the characteristic information of the film magazine.
Further, in step S2.1, film magazine top flange dish to be handled is shot to obtain by NI Vision Builder for Automated Inspection
Characteristic information.
Further, further includes:
S4: film magazine is obtained according to the carrying task and parks position, the film magazine is moved to the film magazine by the handgrip
Park position.
The present invention provides a kind of film magazine automatic transportation equipment and transportation resources, are regarded during film magazine crawl by machine
Feel system photographs film magazine characteristic information, is also obtained by control system according to the film magazine characteristic information and grabbed on handgrip to film magazine
The distance of point, and the mobile distance of handgrip is controlled to grab film magazine, it is inclined to avoid the positioning occurred during grabbing film magazine
Difference improves handling efficiency.
Detailed description of the invention
Fig. 1 is the perspective view of film magazine automatic transportation equipment provided in an embodiment of the present invention；
Fig. 2 is the rearview of film magazine automatic transportation equipment provided in an embodiment of the present invention；
Fig. 3 is the perspective view of frame provided in an embodiment of the present invention；
Fig. 4 is the side view of handgrip under inverted L-shaped state provided in an embodiment of the present invention；
Fig. 5 is that film magazine automatic transportation equipment provided in an embodiment of the present invention grabs the perspective view after film magazine.
In figure, 1: navigation device, 2: mechanical arm, 3: handgrip, 4: NI Vision Builder for Automated Inspection, 5: laser sensor, 6: sonar system
System, 7:RFID sensor, 8: frame.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
As depicted in figs. 1 and 2, the present invention provides a kind of film magazine automatic transportation equipment, comprising: control system is (in figure not
Signal), navigation device 1, mechanical arm 2, handgrip 3 and NI Vision Builder for Automated Inspection 4, the control system controls the navigation device 1 and presses
Planning path drives the operation of mechanical arm 2 to target position, and the control system is shot also according to the NI Vision Builder for Automated Inspection 4
Film magazine characteristic information obtain and grab distance a little on handgrip 3 to film magazine, the control system controls described in the handgrip 3 moves
Distance is to grab film magazine.
Wherein, for navigating to entire haulage equipment, and horizontally, obstacle avoids navigation device 1, navigation dress
Setting 1 for example can be used laser aiming mode using self-navigation chassis shown in FIG. 1, navigation device 1, but not limited to this.
In order to improve racks store amount as far as possible, placement space is saved, shelf can be usually arranged at least two layers, such as may
It can accomplish 3 layers, interfloor height is no more than 450mm, and for automatic transportation equipment, the space for leaving mechanical arm for has very much for this
Limit.Based on this, when handgrip 3 grabs film magazine, the end joint and the handgrip 3 that mechanical arm 2 is connect with handgrip 3 are in 90 degree or minus 90
Degree, i.e. handgrip 3 at work with 2 end joint of mechanical arm is L-shaped or inverted L shape is arranged.
Preferably, Fig. 4 and Fig. 5 are please referred to, handgrip 3 is arranged with 2 end joint of mechanical arm in inverted L shape at work, handgrip 3
When protruding into shelf, 2 end joint of mechanical arm is located at 3 lower section of handgrip, is protruded into saving handgrip 3 to the full extent for pallet height
The occupancy in space, is particularly suitable for the shelf of multilayer setting, while can reduce the torque to mechanical arm tail end.
In the present embodiment, handgrip 3 can use passive mode, and when grabbing film magazine, handgrip 3 is used for grippale tabs
The top flange of box, NI Vision Builder for Automated Inspection 4 can capture the characteristic information of film magazine surface crawl point, such as the top flange of film magazine,
According to position of the film magazine crawl point under camera, convert x of the NI Vision Builder for Automated Inspection 4 apart from film magazine top flange, y, z to distance with
The angle of Rz is rotated, and then acquires distance of the handgrip 3 apart from the flange.
In the present embodiment, when grabbing film magazine, handgrip 3 protruded into from the space between top flange and piece box main body after to
After certain position, film magazine is held up vertically upward；When placing film magazine, after film magazine is placed on shelf, handgrip 3 is along vertically downward
Direction movement, is extracted out after being detached from film magazine.
In order to further save space, the crawl efficiency of elevating mechanism arm, the preferably mechanical arm 2 of 6DOF, and handgrip 3
It is set as that 360 degree rotation can be carried out.
With continued reference to FIG. 1, the NI Vision Builder for Automated Inspection 4 is preferably mounted on the handgrip 3, can be moved with handgrip
To target position, the characteristic information of film magazine is further obtained.NI Vision Builder for Automated Inspection 4 may be mounted at the side of the handgrip 3,
But not limited to this.
Further, it as shown in figure 3, the film magazine automatic transportation equipment further includes frame 8, is provided on the frame 8
Film magazine places station.In the present embodiment, the mechanical arm 2, control system and navigation device 1 are separately mounted to the frame
On, the rigidity of film magazine automatic transportation equipment can be promoted by the way that frame 8 is arranged.Preferably, the film magazine places the quantity of station
Be at least two, therefore film magazine automatic transportation equipment can carry more box film magazines, while can supporting more box film magazines transport with
It loads and unloads one by one, improves efficiency.
Mechanical arm and handgrip collide obstacle during exercise in order to prevent, and the film magazine automatic transportation equipment further includes laser
Sensor 5, the laser sensor 5 are connect with control system, and the control system obtains height according to the laser sensor 5
The complaint message in direction, laser sensor 5 may be mounted at the two sides in film magazine automatic transportation equipment direction of advance, but be not limited to
This.
Safety is carried in order to be promoted, the film magazine automatic transportation equipment further includes Sonar system 6, and Sonar system 6 can match
Being set to detection has personnel to generate warning message when entering within mechanical arm stroke range, can also detect described in personnel's entrance
Information is generated when in the stroke range of mechanical arm to the control system, the control system controls the machine according to the information
Tool arm slows down or stops, and Sonar system 6 may be mounted at two sides and rear side in film magazine automatic transportation equipment direction of advance, but
It is without being limited thereto.
The film magazine automatic transportation equipment further includes RFID sensor, is configured to obtain the letter that film magazine carries film magazine at station
Breath, the carrying data for being able to record film magazine by the way that RFID sensor is arranged.
In addition, the control system is additionally configured to according to pallet height tune when the shelf for placing film magazine are multilayer
Full wafer box automatic transportation equipment stand (the i.e. described target position) is to the distance of shelf, so that film magazine position to be picked and placed
Shelf layer height at a distance from film magazine automatic transportation equipment stand to shelf in the relationship of opposite rule.For example, with goods
For frame is three layers, the different strategy of mobile platform stop position is can be used when grabbing film magazine in hereinafter referred to as high, medium and low layer,
Reasonably to improve the stability of system.
In the present embodiment, when film magazine is at upper layer, film magazine automatic transportation equipment rests in the distance apart from shelf 100mm
Left and right, to shorten the move distance and crawl torque of motion arm, reduce the possibility tumbled, this time slice as close as shelf
Box has biggish space on motion arm mounting plane, plans end movement track, avoids motion arm automatic with film magazine
Transporting equipment collision or interference also avoid shelf and collide or interfere with film magazine automatic transportation equipment.When film magazine is in lower layer, piece
Box automatic transportation equipment rests in the distance or so apart from shelf 400mm, and farther out apart from shelf, film magazine is installed in motion arm at this time
Under plane, space is smaller, and planning end movement track avoids motion arm and film magazine automatic transportation equipment from colliding or interfere,
Shelf are avoided to collide or interfere with film magazine automatic transportation equipment.When film magazine in middle level when, rolled over according to high-rise and low layer strategy
Middle consideration, so that film magazine automatic transportation equipment stop position is between the distance between high-rise and low layer respective distances.
Further, the control system controls the mechanical arm and drives the handgrip movement, so that the handgrip is transported
Dynamic height range is 450mm~1350mm.
The present invention also provides a kind of film magazine automatic transportation methods, comprising:
S1: drive the operation of mechanical arm 2 to target position by the carrying task of planning by control system；
S2: shooting the characteristic information of film magazine, obtains crawl point on handgrip to film magazine according to the characteristic information of the film magazine
Distance；
S3: the mobile distance of the handgrip is controlled to grab film magazine by the control system.
Further, step S1 includes:
S1.1: carrying task is obtained by control system, the carrying task includes planning path and film magazine to be handled letter
Breath；
S1.2: judging whether film magazine to be handled is in different height layers according to the carrying task, if so, entering step
Rapid S1.3, if it is not, then entering step S1.4；
S1.3: navigation device is controlled by the control system and drives mechanical arm to run to target position by planning path；
S1.4: controlling navigation device by the control system and drive mechanical arm to run to target position by planning path,
And the target position is made to be in the relationship of opposite rule with layer height that film magazine is placed to the distance of film magazine.
Further, step S2 includes:
S2.1: the characteristic information of film magazine to be handled is shot by NI Vision Builder for Automated Inspection 4；
S2.2: the distance grabbed on handgrip to film magazine a little is obtained according to the characteristic information of the film magazine.
Further, in step S2.1, film magazine top flange dish to be handled is shot to obtain by NI Vision Builder for Automated Inspection
Characteristic information.
Further, further includes:
S4: film magazine is obtained according to the carrying task and parks position, the film magazine is moved to the film magazine by the handgrip
Park position.
Wherein, film magazine parks position and can according to need and be set in carrying task, such as can be shelf, or
The film magazine that film magazine automatic transportation equipment provides places station.
Wherein, for navigating to entire haulage equipment, and horizontally, obstacle avoids navigation device 1, navigation dress
Setting 1 can be used laser aiming mode, but not limited to this.
In order to improve racks store amount as far as possible, placement space is saved, shelf can be usually arranged at least two layers, such as may
It can accomplish 3 layers, interfloor height is no more than 450mm, and for automatic transportation equipment, the space for leaving mechanical arm for has very much for this
Limit.Based on this, when handgrip 3 grabs film magazine, the end joint of mechanical arm 2 connecting with handgrip 3 and the handgrip 3 are in 90 degree or negative
90 degree, i.e., handgrip 3 at work with 2 end joint of mechanical arm is L-shaped or inverted L shape is arranged.
Preferably, handgrip 3 is arranged with 2 end joint of mechanical arm in inverted L shape at work, mechanical when handgrip 3 protrudes into shelf
2 end joint of arm is located at the lower section of handgrip 3, protrudes into occupancy for pallet height space to save handgrip 3 to the full extent, especially
Suitable for the shelf of multilayer setting, while the torque to mechanical arm tail end can be reduced.
In the present embodiment, handgrip 3 can use passive mode, and when grabbing film magazine, handgrip 3 is used for grippale tabs
The top flange of box, NI Vision Builder for Automated Inspection 4 can capture the characteristic information of film magazine surface crawl point, such as the top flange of film magazine,
According to position of the film magazine crawl point under camera, convert x of the NI Vision Builder for Automated Inspection 4 apart from film magazine top flange, y, z to distance with
The angle of Rz is rotated, and then acquires distance of the handgrip 3 apart from the flange.
In the present embodiment, when grabbing film magazine, handgrip 3 protruded into from the space between top flange and piece box main body after to
After certain position, film magazine is held up vertically upward；When placing film magazine, after film magazine is placed on shelf, handgrip 3 is along vertically downward
Direction movement, is extracted out after being detached from film magazine.
In order to further save space, the crawl efficiency of elevating mechanism arm, the preferably mechanical arm 2 of 6DOF, and handgrip 3
It is set as that 360 degree rotation can be carried out.
With continued reference to FIG. 1, the NI Vision Builder for Automated Inspection 4 is preferably mounted on the handgrip 3, can be moved with handgrip
To target position, the characteristic information of film magazine is further obtained.NI Vision Builder for Automated Inspection 4 may be mounted at the side of the handgrip 3,
But not limited to this.
In addition, the control system is additionally configured to according to pallet height tune when the shelf for placing film magazine are multilayer
Full wafer box automatic transportation equipment park (the i.e. described target position) is to the distance of shelf, so that shelf at position when film magazine picks and places
Layer height is at a distance from film magazine automatic transportation equipment park to shelf in the relationship of opposite rule.For example, with shelf for three layers
For, when grabbing film magazine the different strategy of mobile platform stop position can be used, with reasonable in hereinafter referred to as high, medium and low layer
The stability of raising system.
In the present embodiment, when film magazine is at upper layer, film magazine automatic transportation equipment rests in the distance apart from shelf 100mm
Left and right, to shorten the move distance and crawl torque of motion arm, reduce the possibility tumbled, this time slice as close as shelf
Box has biggish space on motion arm mounting plane, plans end movement track, avoids motion arm automatic with film magazine
Transporting equipment collision or interference also avoid shelf and collide or interfere with film magazine automatic transportation equipment.When film magazine is in lower layer, piece
Box automatic transportation equipment rests in the distance or so apart from shelf 400mm, and farther out apart from shelf, film magazine is installed in motion arm at this time
Under plane, space is smaller, and planning end movement track avoids motion arm and film magazine automatic transportation equipment from colliding or interfere,
Shelf are avoided to collide or interfere with film magazine automatic transportation equipment.When film magazine in middle level when, rolled over according to high-rise and low layer strategy
Middle consideration, so that film magazine automatic transportation equipment stop position is between the distance between high-rise and low layer respective distances.
The present invention provides a kind of film magazine automatic transportation equipment and transportation resources, are regarded during film magazine crawl by machine
Feel system photographs film magazine characteristic information, is also obtained by control system according to the film magazine characteristic information and grabbed on handgrip to film magazine
The distance of point, and the mobile distance of handgrip is controlled to grab film magazine, it is inclined to avoid the positioning occurred during grabbing film magazine
Difference improves handling efficiency.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (15)
1. a kind of film magazine automatic transportation equipment characterized by comprising control system, navigation device, mechanical arm, handgrip and machine
Device vision system, the control system control the navigation device and drive the mechanical arm to run to target position by planning path
It sets, the control system is obtained also according to the film magazine characteristic information that the NI Vision Builder for Automated Inspection is shot and grabbed a little on handgrip to film magazine
Distance, the control system controls the mobile distance of the handgrip to grab film magazine.
2. film magazine automatic transportation equipment as described in claim 1, which is characterized in that when the handgrip crawl film magazine, the machine
The end joint of tool arm connecting with handgrip and the handgrip are in 90 degree or 90 degree minus.
3. film magazine automatic transportation equipment as described in claim 1, which is characterized in that the film magazine automatic transportation equipment further includes
Frame is provided with film magazine on the frame and places station.
4. film magazine automatic transportation equipment as claimed in claim 3, which is characterized in that the mechanical arm, control system and navigation
Device is separately mounted on the frame.
5. film magazine automatic transportation equipment as claimed in claim 3, which is characterized in that the quantity that the film magazine places station is extremely
It is two few.
6. film magazine automatic transportation equipment as described in claim 1, which is characterized in that the film magazine automatic transportation equipment further includes
Laser sensor, the laser sensor are connect with control system, and the control system obtains high according to the laser sensor
Spend the complaint message in direction.
7. film magazine automatic transportation equipment as described in claim 1, which is characterized in that the film magazine automatic transportation equipment further includes
Sonar system, and being configured to detection has personnel to generate warning message when entering within mechanical arm stroke range.
8. film magazine automatic transportation equipment as described in claim 1, which is characterized in that the film magazine automatic transportation equipment further includes
Sonar system, the Sonar system detection personnel generate information to the control when entering in the stroke range of the mechanical arm and are
System, the control system control the mechanical arm according to the information and slow down or stop.
9. film magazine automatic transportation equipment as described in claim 1, which is characterized in that the NI Vision Builder for Automated Inspection is mounted on described
On handgrip.
10. film magazine automatic transportation equipment as described in claim 1, which is characterized in that the control system controls the machinery
Armband moves the handgrip movement, so that the handgrip moving height range is 450mm~1350mm.
11. a kind of film magazine automatic transportation method characterized by comprising
S1: mechanical arm is driven to run to target position by the carrying task of planning by control system；
S2: shooting the characteristic information of film magazine, and the distance grabbed on handgrip to film magazine a little is obtained according to the characteristic information of the film magazine；
S3: the mobile distance of the handgrip is controlled to grab film magazine by the control system.
12. film magazine automatic transportation method as claimed in claim 11, which is characterized in that step S1 includes:
S1.1: carrying task is obtained by control system, the carrying task includes planning path and film magazine information to be handled；
S1.2: judge whether film magazine to be handled is in different height layers according to the carrying task, if so, entering step
S1.3, if it is not, then entering step S1.4；
S1.3: navigation device is controlled by the control system and drives mechanical arm to run to target position by planning path；
S1.4: navigation device is controlled by the control system and drives mechanical arm to run to target position by planning path, and is made
The target position to film magazine distance with layer height that film magazine is placed in the relationship of opposite rule.
13. film magazine automatic transportation method as claimed in claim 11, which is characterized in that step S2 includes:
S2.1: the characteristic information of film magazine to be handled is shot by NI Vision Builder for Automated Inspection；
S2.2: the distance grabbed on handgrip to film magazine a little is obtained according to the characteristic information of the film magazine.
14. film magazine automatic transportation method as claimed in claim 13, which is characterized in that in step S2.1, regarded by machine
Feel system photographs film magazine top flange dish to be handled to obtain characteristic information.
15. film magazine automatic transportation method as claimed in claim 11, which is characterized in that further include:
S4: film magazine is obtained according to the carrying task and parks position, the film magazine to the film magazine is moved by the handgrip and is parked
Position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711367906.7A CN109935543A (en) | 2017-12-18 | 2017-12-18 | Film magazine automatic transportation equipment and transportation resources |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711367906.7A CN109935543A (en) | 2017-12-18 | 2017-12-18 | Film magazine automatic transportation equipment and transportation resources |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109935543A true CN109935543A (en) | 2019-06-25 |
Family
ID=66982862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711367906.7A Pending CN109935543A (en) | 2017-12-18 | 2017-12-18 | Film magazine automatic transportation equipment and transportation resources |
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| Country | Link |
|---|---|
| CN (1) | CN109935543A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118053795A (en) * | 2024-04-16 | 2024-05-17 | 香港科技大学(广州) | Scientific research type wet etching full-automatic system and machine |
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| US7039499B1 (en) * | 2002-08-02 | 2006-05-02 | Seminet Inc. | Robotic storage buffer system for substrate carrier pods |
| CN104827483A (en) * | 2015-05-25 | 2015-08-12 | 山东理工大学 | Method for grabbing object through mobile manipulator on basis of GPS and binocular vision positioning |
| CN107324041A (en) * | 2016-04-29 | 2017-11-07 | 上海微电子装备（集团）股份有限公司 | The manipulator and automatic film magazine handling device clamped for film magazine |
| CN107414832A (en) * | 2017-08-08 | 2017-12-01 | 华南理工大学 | A kind of mobile mechanical arm crawl control system and method based on machine vision |
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2017
- 2017-12-18 CN CN201711367906.7A patent/CN109935543A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7039499B1 (en) * | 2002-08-02 | 2006-05-02 | Seminet Inc. | Robotic storage buffer system for substrate carrier pods |
| CN104827483A (en) * | 2015-05-25 | 2015-08-12 | 山东理工大学 | Method for grabbing object through mobile manipulator on basis of GPS and binocular vision positioning |
| CN107324041A (en) * | 2016-04-29 | 2017-11-07 | 上海微电子装备（集团）股份有限公司 | The manipulator and automatic film magazine handling device clamped for film magazine |
| CN107414832A (en) * | 2017-08-08 | 2017-12-01 | 华南理工大学 | A kind of mobile mechanical arm crawl control system and method based on machine vision |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118053795A (en) * | 2024-04-16 | 2024-05-17 | 香港科技大学(广州) | Scientific research type wet etching full-automatic system and machine |
| CN118053795B (en) * | 2024-04-16 | 2024-07-12 | 香港科技大学(广州) | Scientific research type wet etching full-automatic system and machine |
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Application publication date: 20190625 |
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| RJ01 | Rejection of invention patent application after publication |