CN109916522A - A kind of aberration compensating method and its realization device based on hologram continuation - Google Patents
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Abstract
The present invention relates to a kind of aberration compensating method and its realization device based on hologram continuation comprises the following steps that (1) acquires data；(2) phase demodulating is carried out ,+1 grade of information of its frequency spectrum is extracted, extracts test object phase；(3) binary image exposure mask is sought, the hologram for eliminating test object part striped is obtained, i.e., only includes the hologram of background area；(4) make the continuous continuation of white space in the only hologram comprising background area, the test object area filling of blank is expired；Iteration success obtains the hologram that a width includes holonomic system aberration phase W (x, y)；(5) test object phase is obtained.It can effectively compensate for total aberration of system, including inclined aberration, spherical aberration and other low orders and higher order aberratons.Entire compensation process only needs single holographic figure, and parameter, such as sample and the accurate distance of CCD etc. is arranged without experimental system.
Description
Technical field
The invention belongs to field of optical measuring technologies, especially a kind of aberration compensating method based on hologram continuation and its
Realization device.
Background technique
Digital holographic microscope (DHM) can carry out digital record and reconstruction to the wavefront information of sample, can be accurately real
When quantitative detection wave amplitude and phase information, become the strong tools of no label quantitative phase imaging (QPI).It compares
Traditional micro imaging method, digital holographic microscope record is object phase information, for transparent object such as cell,
Digital holographic microscope, which observes cell, to carry out any label, such as fluorescent staining, nano particle or radiation to cell, this
Sample will not cause any damage or externality to cell is observed.Digital holographic microscope is after years development,
Through being surveyed in the detection of unmarked biological cell, material surface measurement, micro-system and the analysis of MEMS multi-dimensional vibration, dynamic profile
The application aspects such as amount, micro optical element detection are of great importance.
However, digital holographic microscope still has some problems although achieving important breakthrough, obtained phase result
In include aberration, mainly include the inclined aberration as caused by the off-axis angle of off-axis gaussian beam, and by micro objective (MO) introduce
Other aberrations, comprising: defocus, spherical aberration, the low orders such as astigmatism and higher order aberratons.Therefore, it is necessary to aberration for compensation to obtain object
Precise phase result.
Many work have been done in recent years and have carried out aberration for compensation, can be generally divided into two classes: physical compensation method and numerical value
Compensation method.Physical compensation method can compensate spherical aberration, by certain device or light path design physically aberration for compensation, than
Such as identical spherical aberration is introduced to realize spherical aberration compensation simultaneously in object wave and reference wave by using identical object lens.Class
As there are also railway digital holographic microscope (CPDHM) design altogether, the optical path of object wave and reference wave is identical, it means that
They can eliminate the phase distortion as caused by optical element including spherical aberration by identical optical element.Numerical compensation side
Method can compensate various aberrations, and the aberration wavefront of fitting is obtained using serial of methods, then uses the original comprising aberration
Beginning phase subtracts aberration to obtain correct phase, such as double exposure method, the fitting of Zernike multinomial aberration, principal component analysis
Method obtains fitting aberration wavefront etc. using the parameter in spectrum and aberration formula.However, physical compensation method is usually in reality
Optical path adjustment is upper relatively difficult, and has very big calculating requirement simplest numerical compensation approximating method.
Hologram continuation method is widely used in optic test, can extend fringe area, can be used for changing hologram
Shape to meet the requirement of certain algorithms, while will not reduce resolution ratio, will not lose existing information or extension hologram
To obtain the information except actual acquisition region, to improve the resolution ratio of hologram
Summary of the invention
For the deficiency of existing aberration compensation technology, in order to more preferably compensate the various aberrations in digital holographic microscope, this
Invention provides a kind of aberration compensating method based on hologram continuation, can effectively compensate for total aberration of system, including incline
Tiltedly, defocus, spherical aberration and other low orders and higher order aberratons, it is only necessary to which parameter, example is arranged without experimental system in single holographic figure
The accurate distance of such as sample and CCD.By the present invention in that with Corner Detection Algorithm, identify and divide the sample in hologram and
Background area, removes the striped of sample areas, only leaves the striped of background area.Prolonged using the hologram based on Fourier transformation
Algorithm is opened up with the region that fills in the blanks, obtains the hologram of a no sample situation, wherein phase information is total aberration of system.So
Total aberration of system is subtracted, using the original phase with aberration afterwards to obtain correct phase.Entire compensation process only needs
Parameter, such as sample and the accurate distance of CCD etc. is arranged without experimental system in single holographic figure.
The present invention also provides the realization devices of the above-mentioned aberration compensating method based on hologram continuation；
Term is explained:
1, Corner Detection Algorithm, the present invention in refer to the Corner Detection based on gray scale.Angle point is image important feature,
It plays a very important role to the understanding and analysis of image graphics.In the Corner Detection based on gray scale, the definition of angle point is two dimension
Gray value of image changes the point of curvature maximum on violent point or image border curve.
2, the hologram continuation algorithm based on Fourier transformation carries out Fourier transformation to hologram, obtains its Fourier
Spectrogram eliminates the background information in its spectrum component and carries out inverse Fourier transform, since Fourier transformation is that one kind is based on
The algorithm of infinite field, therefore after frequency-domain operations and inverse Fourier transform, initial data can be realized towards white space continuation
Round hologram continuation squarely has mended incomplete hologram.
The technical solution of the present invention is as follows:
A kind of aberration compensating method based on hologram continuation, for carrying out aberration benefit to the hologram comprising various aberrations
It repays, obtains correct test object phase, comprise the following steps that
(1) data are acquired, the single holographic figure comprising test object phase and system aberration, i.e. original hologram are obtained；
System aberration includes the inclined aberration as caused by the off-axis angle of off-axis gaussian beam, and the other pictures introduced by micro objective M0
Difference, comprising: defocus, spherical aberration, the low orders such as astigmatism and higher order aberratons；
(2) phase demodulating is carried out to the single holographic figure intensity distribution that step (1) obtains, by based on Fourier transformation
Phase demodulating method extracts+1 grade of information of its frequency spectrum, and test object phase is extracted from+1 grade of information, obtains comprising aberration
Original test object phase ,+1 grade of information of frequency spectrum refers to corresponding to object real image information in the Fourier spectrum of hologram
Component；
(3) the test object phase that step (2) is acquired, using Corner Detection Algorithm, distinguishing tests object area and back
Scene area, and be 0 by test object area assignment, background area is assigned a value of 1, obtains a binary image exposure mask, uses two-value
Change image masks to be multiplied with the original hologram that step (1) collects, obtains one and eliminate test object part striped
Hologram only includes the hologram of background area；
(4) the only hologram comprising background area that step (3) acquires iteratively is used based on the complete of Fourier transformation
Figure continuation algorithm is ceased, i.e., Fourier transformation is carried out to it and obtains its frequency spectrum, only retains+1 grade of component therein, carries out inverse Fourier
Transformation；The process is constantly repeated until meeting iteration stopping condition, so that only white space in the hologram comprising background area
The test object region of blank, that is, step (3) removal test object is partially filling up by continuous continuation；
When continuation success, striped fills the test object region of entire blank；Since the above process only changes tester
The phase information of the information of body region, background area does not change, after continuation the phase of the background area of hologram almost with original
Beginning hologram is identical.In phase compensation result, background area should be very smooth horizontal plane.Therefore, holographic after continuation
Deviation between the phase and original hologram of the background area of figure, i.e. the root mean square RMS and peak valley difference value of the difference of the two
PV, the evaluation criteria as iteration；
PV and RMS reduce with iteration, until reaching capacity, when the variation for the PV that PV is obtained with preceding an iteration is less than
0.01 λ, and when the obtained variation of RMS of RMS and preceding an iteration is less than 0.01 λ, iteration success, obtaining a width includes holonomic system
The hologram of system aberration phase W (x, y)；Otherwise, iteration continues, and until meeting iteration success conditions, λ is the work of system source
Wavelength；For the He-Ne laser of system for use in carrying of the present invention, λ 632.8nm.
(5) the original test object phase comprising aberration that step (2) obtains includes test object phase and aberration phase,
The aberration phase that step (4) obtains is subtracted using the original test object phase comprising aberration, obtains test object phase.
It is further preferred that the intensity distribution of hologram is by shown in digital record such as formula (I) in the step (1):
I (x, y)=| O+R |2=| O |2+|R|2+RO*+R*O (I)
In formula (I), R and O are reference light and object light, RO respectively*And R*O is interference term, and I (x, y) represents intensity on hologram
Distribution, (x, y) are horizontal, the vertical position coordinates of the point on image respectively.
It is further preferred that carrying out phase to the single holographic figure intensity distribution that step (1) obtains in the step (2)
Demodulation, by the phase demodulating method based on Fourier transformation, extracts+1 grade of information of its frequency spectrum, as shown in formula (II):
In formula (II), Iv(x, y) is+1 grade of information, i.e. interference term R*The intensity distribution of O, i are imaginary unit, T (x, y) and P
(x, y) respectively represents inclined aberration and spherical aberration；It is the dominant aberration of system；
Test object phase is extracted from+1 grade of information, as shown in formula (III):
In formula (III), Φoriginal(x, y) is the original test object phase comprising aberration,It is test object
True phase, W (x, y) is the aberration of digital holographic microscope.Including inclination, defocus, spherical aberration, astigmatism and other low orders and
Higher order aberratons；
The realization device of the above-mentioned aberration compensating method based on hologram continuation, including polarization He-Ne laser, the first half
Wave plate, spatial filter, polarization splitting prism, the first reflecting mirror, test sample, the first microcobjective, the second half-wave plate, second
Reflecting mirror, the second microcobjective, unpolarized Amici prism, ccd detector；
It is described polarization He-Ne laser issue linearly polarized light successively pass through first half-wave plate, spatial filter, partially
Shake Amici prism, the first reflecting mirror, sample to be tested, the first microcobjective, unpolarized Amici prism, ccd detector, constitutes test
Optical path；
It is described polarization He-Ne laser issue linearly polarized light successively pass through first half-wave plate, spatial filter, partially
Shake Amici prism, the second half-wave plate, the second reflecting mirror, the second microcobjective, unpolarized Amici prism, ccd detector, constitutes ginseng
Examine optical path；
The linearly polarized light that the polarization He-Ne laser issues first passes through the first half-wave plate, using polarization splitting prism point
At S light and P light；
S light is reflected by polarization splitting prism, by test sample, carries the phase information of test sample as test
Light, test light is incident on unpolarized Amici prism after the amplification of the first microcobjective, into ccd detector；
P light is transmitted by polarization splitting prism, by the second half-wave plate, is joined by the rotation angular adjustment of the second half-wave plate
The polarization direction for examining light keeps reference light consistent with the polarization direction of test light；After the amplification of the second microcobjective, it is incident on non-inclined
Enter ccd detector after vibration Amici prism, with test combiner, reference light is interfered with test light, connect by ccd detector
It receives.
The invention has the benefit that
1, compared with prior art, the present invention has been obtained entire by way of hologram continuation from single holographic figure
Total aberration of system obtains correct test object phase to have effectively achieved the aberration compensation to result.
2, the present invention requires information data low, it is only necessary to and parameter is arranged without experimental system in a width hologram, such as
Sample and the accurate distance of CCD etc..
3, the present invention is preferable to the compensation effect of background aberration, can compensate various low orders and higher order aberratons simultaneously, without
It is the inclined aberration and defocus aberration for compensating only for low order.
Detailed description of the invention
Fig. 1 is digital holographic microscope schematic device used in the present invention；
Fig. 2 is a kind of flow chart of the aberration compensating method based on hologram continuation of the present invention；
Fig. 3 (a) is collected original hologram；
Fig. 3 (b) is the hologram of the representative system aberration phase obtained using the mode of hologram continuation；
Fig. 4 is the system aberration phase diagram that the method for the present invention obtains；
Fig. 5 is obtained test sample phase diagram after the method for the present invention aberration compensation；
Fig. 6 is using the test sample phase diagram after comparative example the method aberration compensation；
Fig. 7 (a) is the white box mark part amplification display figure in Fig. 5；
Fig. 7 (b) is the white box mark part amplification display figure in Fig. 6；
Fig. 8 is Fig. 7 (a), the cross-sectional profiles line comparison display of white box position is schemed in (b).
1, He-Ne laser, the 2, first half-wave plate, 3, spatial filter, 4, polarization splitting prism, the 5, first reflection are polarized
Mirror, 6, test sample, the 7, first microcobjective, the 8, second half-wave plate, the 9, second reflecting mirror, the 10, second microcobjective, 11, non-
Polarization splitting prism, 12, ccd detector.
Specific embodiment
The present invention is further qualified with embodiment with reference to the accompanying drawings of the specification, but not limited to this.
Embodiment 1
A kind of aberration compensating method based on hologram continuation, for carrying out aberration benefit to the hologram comprising various aberrations
It repays, correct test object phase is obtained, as shown in Fig. 2, comprising the following steps that
(1) data are acquired, the single holographic figure comprising test object phase and system aberration, i.e. original hologram are obtained；
System aberration includes the inclined aberration as caused by the off-axis angle of off-axis gaussian beam, and the other pictures introduced by micro objective MO
Difference, comprising: defocus, spherical aberration, the low orders such as astigmatism and higher order aberratons；
In step (1), the intensity distribution of hologram is by shown in digital record such as formula (I):
I (x, y)=| O+R |2=| O |2+|R|2+RO*+R*O (I)
In formula (I), R and O are reference light and object light, RO respectively*And R*O is interference term, and I (x, y) represents intensity on hologram
Distribution, (x, y) are horizontal, the vertical position coordinates of the point on image respectively.
(2) phase demodulating is carried out to the single holographic figure intensity distribution that step (1) obtains, by based on Fourier transformation
Phase demodulating method extracts+1 grade of information of its frequency spectrum, and test object phase is extracted from+1 grade of information, obtains comprising aberration
Original test object phase ,+1 grade of information of frequency spectrum refers to corresponding to object real image information in the Fourier spectrum of hologram
Component；
Phase demodulating is carried out to the single holographic figure intensity distribution that step (1) obtains, passes through the phase based on Fourier transformation
Position demodulation method, extracts+1 grade of information of its frequency spectrum, as shown in formula (II):
In formula (II), Iv(x, y) is+1 grade of information, i.e. the intensity distribution of interference term R*O, and i is imaginary unit, T (x, y) and
P (x, y) respectively represents inclined aberration and spherical aberration；It is the dominant aberration of system；
Test object phase is extracted from+1 grade of information, as shown in formula (III):
In formula (III), Φoriginal(x, y) is the original test object phase comprising aberration,It is test object
True phase, W (x, y) is the aberration of digital holographic microscope.Including inclination, defocus, spherical aberration, astigmatism and other low orders and
Higher order aberratons；
(3) the test object phase that step (2) is acquired, using Corner Detection Algorithm, distinguishing tests object area and back
Scene area, and be 0 by test object area assignment, background area is assigned a value of 1, obtains a binary image exposure mask, uses two-value
Change image masks to be multiplied with the original hologram that step (1) collects, obtains one and eliminate test object part striped
Hologram only includes the hologram of background area；
(4) the only hologram comprising background area that step (3) acquires iteratively is used based on the complete of Fourier transformation
Figure continuation algorithm is ceased, i.e., Fourier transformation is carried out to it and obtains its frequency spectrum, only retains+1 grade of component therein, carries out inverse Fourier
Transformation；The process is constantly repeated until meeting iteration stopping condition, so that only white space in the hologram comprising background area
The test object region of blank, that is, step (3) removal test object is partially filling up by continuous continuation；
When continuation success, striped fills the test object region of entire blank；Since the above process only changes tester
The phase information of the information of body region, background area does not change, after continuation the phase of the background area of hologram almost with original
Beginning hologram is identical.In phase compensation result, background area should be very smooth horizontal plane.Therefore, holographic after continuation
Deviation between the phase and original hologram of the background area of figure, i.e. the root mean square RMS and peak valley difference value of the difference of the two
PV, the evaluation criteria as iteration；
PV and RMS reduce with iteration, until reaching capacity, when the variation for the PV that PV is obtained with preceding an iteration is less than
0.01 λ, and when the obtained variation of RMS of RMS and preceding an iteration is less than 0.01 λ, iteration success, obtaining a width includes holonomic system
The hologram of system aberration phase W (x, y)；Otherwise, iteration continues, and until meeting iteration success conditions, λ is the work of system source
Wavelength；For the He-Ne laser of system for use in carrying of the present invention, λ 632.8nm.
(5) the original test object phase comprising aberration that step (2) obtains includes test object phase and aberration phase,
The aberration phase that step (4) obtains is subtracted using the original test object phase comprising aberration, obtains test object phase.
In the present embodiment, collected original hologram and the representative system aberration obtained using the mode of hologram continuation
The hologram of phase is respectively such as the system aberration phase that shown in Fig. 3 (a), Fig. 3 (b), obtains as shown in figure 4, phase after aberration compensation
Position is as shown in Figure 5.In Fig. 4, Fig. 5, horizontal, ordinate is the position coordinates on picture respectively.
Embodiment 2
According to a kind of realization device of the aberration compensating method based on hologram continuation described in embodiment 1, such as Fig. 1 institute
Show, including polarization He-Ne laser 1, the first half-wave plate 2, spatial filter 3, polarization splitting prism 4, the first reflecting mirror 5, test
Sample 6, the first microcobjective 7, the second half-wave plate 8, the second reflecting mirror 9, the second microcobjective 10, unpolarized Amici prism 11,
Ccd detector 12；
The linearly polarized light that polarization He-Ne laser 1 issues successively passes through the first half-wave plate 2, spatial filter 3, polarization spectro
Prism 4, the first reflecting mirror 5, sample to be tested 6, the first microcobjective 7, unpolarized Amici prism 11, ccd detector 12 are constituted and are surveyed
Try optical path；
The linearly polarized light that polarization He-Ne laser 1 issues successively passes through the first half-wave plate 2, spatial filter 3, polarization spectro
Prism 4, the second half-wave plate 8, the second reflecting mirror 9, the second microcobjective 10, unpolarized Amici prism 11, ccd detector 12, structure
At reference path；
The linearly polarized light that polarization He-Ne laser 1 issues first passes through the first half-wave plate 2, divides using polarization splitting prism 4
At S light and P light；
S light is reflected by polarization splitting prism 4, by test sample 6, carries the phase information of test sample 6 as survey
Light is tried, test light is incident on unpolarized Amici prism 11 after the amplification of the first microcobjective 7, into ccd detector 12；
P light is transmitted by polarization splitting prism 4, by the second half-wave plate 8, passes through the rotation angle tune of the second half-wave plate 8
The polarization direction for saving reference light, keeps reference light consistent with the polarization direction of test light；It is incident after the amplification of the second microcobjective 10
Enter ccd detector 12 after to unpolarized Amici prism 11, with test combiner, reference light is interfered with test light, by CCD
Detector 12 receives.
Comparative example 1
According to a kind of aberration compensating method based on hologram continuation described in embodiment 1, difference is, step (1)
The single holographic figure of acquisition directly eliminates inclined aberration using the method for mobile positive level-one frequency spectrum, and use is based on principal component point
The method of analysis eliminates spherical aberration；Phase is as shown in Figure 6 after aberration compensation.White box mark part amplification display in Fig. 5, Fig. 6 is such as
Shown in Fig. 7 (a), Fig. 7 (b), Fig. 8 is the cross-sectional profiles line of white line position in Fig. 7 (a), Fig. 7 (b), in Fig. 8, abscissa
The different location coordinate of the white line along Fig. 7 (a), Fig. 7 (b) is represented, ordinate represents phase value.
By Fig. 5, Fig. 6, Fig. 7 (a), Fig. 7 (b), Fig. 8, two methods are compared it can be seen that based on hologram continuation
Aberration compensating method is more preferable to the compensation effect of system aberration, and background tallies with the actual situation closer to ideal plane.And
Can be with total aberration of single compensation system, including inclined aberration, spherical aberration and other low orders and higher order aberratons.To prove
The present invention can effectively compensate for the phase aberrations in digital holographic microscope system.
Claims (4)
1. a kind of aberration compensating method based on hologram continuation, for carrying out aberration benefit to the hologram comprising various aberrations
It repays, obtains correct test object phase, which is characterized in that comprise the following steps that
(1) data are acquired, the single holographic figure comprising test object phase and system aberration, i.e. original hologram are obtained；
(2) phase demodulating is carried out to the single holographic figure intensity distribution that step (1) obtains, passes through the phase based on Fourier transformation
Demodulation method extracts+1 grade of information of its frequency spectrum, and test object phase is extracted from+1 grade of information, obtains the original comprising aberration
Beginning test object phase ,+1 grade of information of frequency spectrum refer to point that object real image information is corresponded in the Fourier spectrum of hologram
Amount；
(3) the test object phase that step (2) is acquired, using Corner Detection Algorithm, distinguishing tests object area and background area
Domain, and be 0 by test object area assignment, background area is assigned a value of 1, obtains a binary image exposure mask, uses binary picture
Picture exposure mask is multiplied with the original hologram that step (1) collects, and obtains the holography for eliminating test object part striped
Figure only includes the hologram of background area；
(4) hologram based on Fourier transformation is iteratively used to the only hologram comprising background area that step (3) acquires
Continuation algorithm carries out Fourier transformation to it and obtains its frequency spectrum, only retain+1 grade of component therein, carries out inverse Fourier and becomes
It changes；The process is constantly repeated until meeting iteration stopping condition, so that only white space is not in the hologram comprising background area
The test object region of blank, that is, step (3) removal test object is partially filling up by disconnected continuation；
When continuation success, striped fills the test object region of entire blank；The phase of the background area of hologram after continuation
Deviation between original hologram, i.e. the root mean square RMS and peak valley difference value PV of the difference of the two, the assessment mark as iteration
It is quasi-；
PV and RMS reduce with iteration, when the variation for the PV that PV and preceding an iteration obtain is less than 0.01 λ, and RMS with it is previous
When the variation for the RMS that secondary iteration obtains is less than 0.01 λ, iteration success, obtaining a width includes holonomic system aberration phase W (x, y)
Hologram；Otherwise, iteration continues, and until meeting iteration success conditions, λ is the operation wavelength of system source；
(5) the original test object phase comprising aberration that step (2) obtains includes test object phase and aberration phase, is used
Original test object phase comprising aberration subtracts the aberration phase that step (4) obtains, and obtains test object phase.
2. a kind of aberration compensating method based on hologram continuation according to claim 1, which is characterized in that the step
(1) in, the intensity distribution of hologram is by shown in digital record such as formula (I):
I (x, y)=| O+R |2=| O |2+|R|2+RO*+R*O (I)
In formula (I), R and O are reference light and object light, RO respectively*And R*O is interference term, and I (x, y) represents intensity point on hologram
Cloth, (x, y) are horizontal, the vertical position coordinates of the point on image respectively.
3. a kind of aberration compensating method based on hologram continuation according to claim 1, which is characterized in that the step
(2) in, phase demodulating is carried out to the single holographic figure intensity distribution that step (1) obtains, passes through the phase based on Fourier transformation
Demodulation method extracts+1 grade of information of its frequency spectrum, as shown in formula (II):
In formula (II), Iv(x, y) is+1 grade of information, i.e. interference term R*The intensity distribution of O, i are imaginary units, T (x, y) and P (x,
Y) inclined aberration and spherical aberration are respectively represented；
Test object phase is extracted from+1 grade of information, as shown in formula (III):
In formula (III), Φoriginal(x, y) is the original test object phase comprising aberration,It is the true of test object
Phase, W (x, y) are the aberrations of digital holographic microscope.
4. the realization device of any aberration compensating method based on hologram continuation of claim 1-3, which is characterized in that
Including polarization He-Ne laser, the first half-wave plate, spatial filter, polarization splitting prism, the first reflecting mirror, test sample, the
One microcobjective, the second half-wave plate, the second reflecting mirror, the second microcobjective, unpolarized Amici prism, ccd detector；
The linearly polarized light that the polarization He-Ne laser issues is successively by first half-wave plate, spatial filter, polarization point
Light prism, the first reflecting mirror, sample to be tested, the first microcobjective, unpolarized Amici prism, ccd detector constitute test light
Road；
The linearly polarized light that the polarization He-Ne laser issues is successively by first half-wave plate, spatial filter, polarization point
Light prism, the second half-wave plate, the second reflecting mirror, the second microcobjective, unpolarized Amici prism, ccd detector constitute reference light
Road；
The linearly polarized light that the polarization He-Ne laser issues first passes through the first half-wave plate, is divided into S using polarization splitting prism
Light and P light；
S light is reflected by polarization splitting prism, by test sample, is carried the phase information of test sample as test light, is surveyed
Examination light is incident on unpolarized Amici prism after the amplification of the first microcobjective, into ccd detector；
P light is transmitted by polarization splitting prism, by the second half-wave plate, passes through the rotation angular adjustment reference light of the second half-wave plate
Polarization direction, keep reference light consistent with the polarization direction of test light；After the amplification of the second microcobjective, it is incident on unpolarized point
Enter ccd detector after light prism, with test combiner, reference light is interfered with test light, received by ccd detector.
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