CN109901631A - Light beam drop point site feedback device - Google Patents
Light beam drop point site feedback device Download PDFInfo
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- CN109901631A CN109901631A CN201910225912.1A CN201910225912A CN109901631A CN 109901631 A CN109901631 A CN 109901631A CN 201910225912 A CN201910225912 A CN 201910225912A CN 109901631 A CN109901631 A CN 109901631A
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- light beam
- feedback
- drop point
- light
- transmission connection
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Abstract
The present invention provides a kind of light beam drop point site feedback device, which includes analog light source, beam delivery system, interface imaging optical system and data acquisition and analysis system；The device is by increasing interface imaging optical system and analog light source being arranged in run-home face, reusable beam Propagation optical system, making the optical system is both the optical system and light beam drop point site inverse imaging of beam Propagation, to realize the feedback of light beam drop point site.The cost of device saving light beam drop point site feedback system；It is also applied for some to be placed around the special circumstances of imaging system in run-home face simultaneously.
Description
Technical field
The present invention relates to light beam drop point site control fields, in particular to are directed toward control for light beam and near field alignment control mentions
For feedback, feedback control is carried out for the stability to transmission laser system, optical imaging system etc..
Background technique
With the development of Modern Optics Technology, under the traction of scientific research demand and industry demand, either active optics system
System or Passive optics develop into one of trend towards heavy caliber, extensive, precise treatment and integrated direction.It is active
The Typical Representative of optical system is heavy caliber device of high power laser, and the Typical Representative of Passive optics is heavy caliber photoetching
Machine.These optical systems are required to carry out light beam drop point accurate control.The many because being known as of light beam drop point site are influenced, in addition to
The position of optical element clamping device itself deviate and angle offset outside, there are also outside environmental elements, including thermal change, air-flow and
Mechanical oscillation etc..Other than eliminating certain unstability from Machine Design, for complicated optical system, it is also devised with phase
Biggish bias correction is returned to target position by the autocollimation mechanism answered.Shake for some upper frequencies, it is small-bore
Optical system generally use position sensitive detectors (PSD) combine fast mirror scheme carry out active control, by light beam
The position specified in drop point control to PSD, reference by location is PSD itself.It is especially multiple but for heavy-caliber optical system
Miscellaneous optical system cannot set PSD to position reference, but need to be required according to drop point, and corresponding benchmark is arranged.It is common
Way is to use optical imaging system to light beam drop point site and base position while being imaged.In some special application scenarios,
Such as high-intensity magnetic field, strong electrical field or enemy position etc., generally specially design corresponding optical system to light beam drop point reference point and
Light beam drop point is observed simultaneously, and this often will increase design-build cost.
Summary of the invention
The object of the present invention is to provide a kind of light beam drop point site feedback device, which transmits optical system
System, which is both the optical system and light beam drop point site inverse imaging of beam Propagation, it is only necessary to additional to increase
Add interface imaging optical system that light beam drop point site feedback can be realized.The device saves light beam drop point site feedback system
Cost；The special circumstances of imaging system should not be placed around in run-home face for some, be easy to implement light beam drop point site
Feedback.
To realize that above-mentioned target, technical solution of the invention are as follows:
The device includes analog light source, beam delivery system, interface imaging optical system and data acquisition and analysis system.
Transmission Connection face and run-home face are a pair of of conjugate planes of beam delivery system.Light beam to be feedback successively passes through Transmission Connection face
Run-home face is reached with beam delivery system.The simulated light beam reversal that analog light source issues successively is passed through by system above
Run-home face and beam delivery system reach Transmission Connection face.Interface imaging optical system treats feedback beam in transmission pair
Light spot image of the light spot image and simulation light beam of junction in Transmission Connection face is imaged simultaneously, is recorded by data acquisition and analysis system
Respective image is simultaneously analyzed.
Analog light source is located in run-home face, can be luminous point or light-emitting surface, is also possible to shine through other light sources
The bright object with tick lables function.Light beam from analog light source becomes simulation light beam, can enter beam delivery system.
Simulation light beam both can also can be transferred to biography by beam Propagation to be feedback to run-home face by beam delivery system
Defeated interface.
Interface imaging optical system can use positive by the light beam to be feedback in Transmission Connection face and back through biography
The sampled light of the simulation light beam of defeated interface realizes that forward and reverse is imaged simultaneously to Transmission Connection face.
Data acquisition and analysis system includes image capturing system and data processing system；The image capturing system record
The light spot image of light beam to be feedback and simulation light beam on Transmission Connection face；The data processing system is according to Image Acquisition system
The image of system acquisition carries out image procossing and analysis, light beam drop point relative position information is obtained, for whether judging light beam drop point
Meet control to require and feedback is provided.
Light beam drop point site feedback device of the present invention, has the advantages that
(1) present apparatus multiplexed beam Transmission system, it is only necessary to which light can be realized in the additional interface imaging optical system that increases
Beam drop point site feedback；
(2) when the present apparatus is transferred to the designated position of target face by beam delivery system for controlling light beam, it is only necessary to
Adjust relative position of the beam Propagation to the spatial position and simulated light of the interface on the face between the spatial position of picture point
Meet control to require；
(3) device has saved the cost of light beam drop point site feedback system；
(4) special circumstances of imaging system should not be placed around in run-home face for some, be easy to implement light beam and fall
The feedback of point position.
Detailed description of the invention
Fig. 1 is 1 structural schematic diagram of light beam drop point site feedback device embodiment of the present invention
In figure: 10- analog light source；20- beam delivery system；30- interface imaging optical system；The acquisition point of 40- data
Analysis system；The run-home face 101-；102- simulates light beam；103- simulated light picture point on Transmission Connection face；201- light to be feedback
Beam；202- light beam to be feedback convergent point on Transmission Connection face；203- light beam to be feedback is in run-home face drop point site；301-
Transmission Connection face；401- image capturing system；402- data processing system.
Fig. 2 is 2 structure light path schematic diagram of light beam drop point site feedback device embodiment of the present invention
In figure: 10- analog light source；20- beam delivery system；30- interface imaging optical system；The acquisition point of 40- data
Analysis system；The run-home face 101-；102- simulates light beam；103- simulates beam center；104- simulated light is on Transmission Connection face
Picture point；105- simulated light picture point central point；201- light beam to be feedback；202- light beam to be feedback near field light on Transmission Connection face
Spot；Near-field beam spot center point to be feedback on 203- target surface；Near-field beam spot center point to be feedback on 204- interface；
301- Transmission Connection face；401- image capturing system；402- data processing system.
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, it can also make certain adjustments and improvements.These belong to the present invention
Protection scope.
Embodiment 1
Fig. 1 is the structural schematic diagram of light beam drop point site feedback device embodiment 1 of the present invention.Light beam drop point site to be feedback
The hot spot at place is a convergent point, and analog light source 10 is a luminous point, is located in run-home face 101.
The simulation light beam 102 that analog light source 10 issues successively is reached by run-home face 101 and beam delivery system 20
Transmission Connection face 301 forms a simulated light picture point 103.Transmission Connection face 301 and run-home face 101 are beam Propagation systems
A pair of of conjugate planes of system 20.Hot spot of 30 pairs of the interface imaging optical system simulation light beams 102 in Transmission Connection face 301 is sampled into
Picture records the image by data acquisition and analysis system 40.Light beam 201 to be feedback forms light beam to be feedback in Transmission Connection face 301
Convergent point 202, interface imaging optical system 30 also treats the hot spot sampling imaging of feedback beam simultaneously, by data collection and analysis
The image capturing system 401 of system 40 records the image.The image of 402 pairs of data processing system acquisitions is analyzed, and is obtained simultaneously
Spot center coordinate position of the light beam convergent point 202 to be feedback with simulated light picture point 103 in Transmission Connection face is obtained, and calculates its phase
To positional relationship, which is a bivector, is represented by (x, y) under cartesian coordinate system.It is required according to control, it is opposite
Positional relationship target value is (x0,y0).Calculate the difference of the two:
Dx and dy are fed back into control system and calculate motion control amount for it.In the unstable situation of beam delivery system
Under, it may cause simulated light picture point and shaken on interface, but by formula (1) it is found that feedback quantity is a relative quantity, i.e., only
Guarantee that light beam to be feedback and the relative positional relationship of simulated light picture point are met the requirements.
Embodiment 2
Fig. 2 is the structural schematic diagram of light beam drop point site feedback device embodiment 2 of the present invention.Light beam drop point site to be feedback
The hot spot at place is the large spot of collimation, or referred to as near field light beam.Analog light source 10 is located at and is aimed at using a pair of parallel small light beam
In target face 101.
The simulation light beam 102 that analog light source 10 issues successively is reached by run-home face 101 and beam delivery system 20
Transmission Connection face 301 forms a pair of of simulated light picture point 104, center 105.Transmission Connection face 301 and run-home face
101 be a pair of of conjugate planes of beam delivery system 20.30 pairs of simulation light beams 102 of interface imaging optical system are in Transmission Connection face
301 hot spot sampling imaging records the image by data acquisition and analysis system 40.Light beam 201 to be feedback is in Transmission Connection face 301
It is a near field hot spot 202, interface imaging optical system 30 is treated the hot spot sampling imaging of feedback beam simultaneously, adopted by data
The image capturing system 401 of set analysis system 40 records the image.The image of 402 pairs of data processing system acquisitions is analyzed,
Seat of the central point 105 in Transmission Connection face of near-field beam spot center point to be feedback 204 and simulated light picture point 104 is obtained simultaneously
Cursor position, and its relative positional relationship is calculated, which is a bivector, is represented by (x, y) under cartesian coordinate system.Root
It is required according to control, relative positional relationship target value is (x0,y0)。
Calculate the difference of the two:
Dx and dy are fed back into control system and calculate motion control amount for it.In the unstable situation of beam delivery system
Under, it may cause simulated light picture point and shaken on interface, but by formula (2) it is found that feedback quantity is a relative quantity, i.e., only
Guarantee that light beam to be feedback and the relative positional relationship of simulated light picture point are met the requirements.
Claims (6)
1. a kind of light beam drop point site feedback device, which is characterized in that the device includes analog light source (10), beam delivery system
(20), interface imaging optical system (30) and data acquisition and analysis system (40)；Transmission Connection face (301) and run-home face
It (101) is a pair of of conjugate planes of beam delivery system (20)；Light beam (201) to be feedback successively by Transmission Connection face (301) and
Beam delivery system (20) reaches run-home face (101), and interface imaging optical system (30) treats feedback beam (201) and exists
The light spot image in Transmission Connection face (301) is imaged, and is recorded the image by data acquisition and analysis system (40) and is analyzed；Simulation
The simulation light beam (102) that light source (10) issues successively reaches transmission by run-home face (101) and beam delivery system (20)
Interface (301), light spot image of the interface imaging optical system (30) to simulation light beam (102) in Transmission Connection face (301)
Imaging, is recorded the image by data acquisition and analysis system (40) and is analyzed；By analysis, light beam drop point relative position is obtained
Information, for judge light beam drop point whether meet control require and feedback is provided.
2. light beam drop point site feedback device according to claim 1, which is characterized in that described analog light source (10) position
In run-home face (101), analog light source can be luminous point or light-emitting surface, be also possible to the tool illuminated through other light sources
There is the object of tick lables function.
3. light beam drop point site feedback device according to claim 1, which is characterized in that the beam delivery system
(20) light beam to be feedback (201) can be both transferred to run-home face (101), simulation light beam (102) can also be transferred to biography
Defeated interface (301).
4. light beam drop point site feedback device according to claim 1, which is characterized in that the interface image optics
System (30) can use positive by the light beam to be feedback (102) of Transmission Connection face (301) and back through Transmission Connection face
(301) sampled light of simulation light beam (102) realizes that forward and reverse is imaged simultaneously to Transmission Connection face (301).
5. light beam drop point site feedback device according to claim 1, which is characterized in that the data collection and analysis system
System (40) includes image capturing system (401) and data processing system (402)；Described image capturing system (401) record to
The light spot image of feedback beam (201) and simulation light beam (102) on Transmission Connection face (301)；The data processing system
(402) image procossing and analysis are carried out according to the image of image capturing system (401) acquisition, obtains light beam drop point relative position letter
Breath, for judge light beam drop point whether meet control require and feedback is provided.
6. light beam drop point site feedback device according to claim 1, which is characterized in that data processing system (402) is right
The image of acquisition is analyzed, while obtaining light beam to be feedback and simulated light in the spot center coordinate position in Transmission Connection face,
And its relative positional relationship is calculated, which is a bivector, (x, y) is represented by under cartesian coordinate system, according to control
It is required that relative positional relationship target value is (x0,y0), calculate the difference of the two:
Dx and dy are fed back into control system and calculate motion control amount for it.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910225912.1A CN109901631B (en) | 2019-03-25 | 2019-03-25 | Light beam falling point position feedback device |
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| CN201910225912.1A CN109901631B (en) | 2019-03-25 | 2019-03-25 | Light beam falling point position feedback device |
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| CN109901631A true CN109901631A (en) | 2019-06-18 |
| CN109901631B CN109901631B (en) | 2022-03-08 |
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