CN109900234A - A kind of outside circle average diameter testing agency of internal tooth form workpiece - Google Patents

A kind of outside circle average diameter testing agency of internal tooth form workpiece Download PDF

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Publication number
CN109900234A
CN109900234A CN201910300049.1A CN201910300049A CN109900234A CN 109900234 A CN109900234 A CN 109900234A CN 201910300049 A CN201910300049 A CN 201910300049A CN 109900234 A CN109900234 A CN 109900234A
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China
Prior art keywords
detection
average diameter
testing agency
outside circle
sliding block
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CN201910300049.1A
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Chinese (zh)
Inventor
熊丽
崔贞涛
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Hubei Aviation Precision Machinery Technology Co Ltd
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Hubei Hangjia Magna Seating System Co Ltd
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Priority to CN201910300049.1A priority Critical patent/CN109900234A/en
Publication of CN109900234A publication Critical patent/CN109900234A/en
Withdrawn legal-status Critical Current

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Abstract

The invention discloses a kind of outside circle average diameter testing agency of internal tooth form workpiece, including four groups of identical detection components, four around same center line arrangement and both adjacent angle is 90 degree;Every group of detection components include: guide pad, equipped with the guide groove radially extended along the circumference;Sliding block, including the main part being adapted to guide groove;Arm is detected, the main part is installed on;Limited block is fixed on the guide pad, and when sliding block slide outwardlys into extreme position, the detection arm and the limited block are inconsistent;Cylinder, for driving the sliding block to slide along the guide groove;Displacement sensor, including the detection axis for being located at the intracorporal spring of shell and extending out from shell, one end of the detection axis is abutted against with the spring, is abutted against on the outside of the other end and the sliding block, to detect the radial displacement of the sliding block.The outside circle average diameter testing agency can rapidly and accurately detect the outside circle average diameter of internal tooth form workpiece.

Description

A kind of outside circle average diameter testing agency of internal tooth form workpiece
Technical field
The present invention relates to internal tooth form workpiece package technique fields, average more particularly to a kind of outside circle of internal tooth form workpiece Diameter testing agency, for detecting the outside circle average diameter of internal tooth form workpiece, to assist the assembling of internal tooth form workpiece.
Background technique
A kind of flexible production line in the prior art, for producing the product with internal tooth form workpiece of plurality of specifications.It should Flexible production line is provided with detection station, and whether the outside circle average diameter that internal tooth form workpiece is detected on the station conforms to It asks.
Currently, the mode of the outside circle average diameter of detection internal tooth form workpiece is: three-coordinates measuring machine is detected using probe The position of 3-6 point on the crest top land of internal tooth form workpiece, then draws the circle where 3-6 point, then takes the flat of each circular diameter Mean value.Or universal tool microscope micro mirror is used, by adjusting eyepiece, visual field and focal length, tooth top is captured, to be calculated.It is above-mentioned Two kinds of detection methods can just detect the average diameter of the outside circle of an internal tooth form workpiece for general more than 10 minutes, detect speed Slowly, detection efficiency is low, can not adapt to the productive temp of production line.
It is those skilled in the art in view of this, how rapidly and accurately to detect the outside circle average diameter of internal tooth form workpiece Member's technical issues that need to address.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of outside circle average diameter testing agency of internal tooth form workpiece, Including four groups of identical detection components, four around same center line arrangement and both adjacent angle is 90 degree;
Detection components described in every group include:
Guide pad, equipped with the guide groove radially extended;
Sliding block, including the main part being adapted to the guide groove;
Arm is detected, the main part is installed on;
Limited block is fixed on the guide pad, when the sliding block slide outwardlys into extreme position, the detection arm with it is described Limited block is inconsistent;
Cylinder, for driving the sliding block to slide along the guide groove;
Displacement sensor, including the detection axis for being located at the intracorporal spring of shell and extending out from shell, the detection axis One end abutted with the spring, the other end is abutted with the outside of the sliding block, to detect the radial displacement of the sliding block.
So set, having the following technical effect that outside circle average diameter testing agency:
(1) since four detection arms respectively can be moved independently, when detection, it is each detect arm can be moved to The inconsistent position of the crest top land of internal tooth form workpiece makes the center line of outside circle average diameter testing agency pass through internal tooth form always The outside circle center of circle of workpiece, has thus evaded detection error caused by the deflection of the center of circle.Therefore, testing result is accurate and reliable.
(2) due to only needing the crest top land of four detection arms and internal tooth form workpiece to contradict when detection, without pressing from both sides Tool is fixed, moreover, disposably can correspond to four coordinate points by four conflict positions, and by four coordinate points when detection Corresponding four circles out, and by taking the average value of four diameter of a circles to obtain the outside circle average diameter of internal tooth form workpiece.Therefore, Detection speed is fast, detection efficiency is high.
(3) since the detection axis of displacement sensor can be moved with the movement of sliding block, the outside circle average diameter Testing agency can be suitable for the internal tooth form workpiece of different tip diameters, so as to meet different size on flexible production line Product detection demand.
The top outside of outside circle average diameter testing agency as described above, the detection arm is cambered surface, the arc Each center of circle in face is respectively positioned on the center line.
Outside circle average diameter testing agency as described above, the inner end of the main part are equipped with the bottom with the detection arm The bottom of the mounting hole of portion's adaptation, the detection arm is plugged in the mounting hole;The inner end of the main part be additionally provided with it is described Mounting hole vertically through threaded hole, bolt is twisted in the threaded hole, to hold out against the detection arm.
Outside circle average diameter testing agency as described above, the sliding block further includes abutting portion, and the abutting portion is set to The outer end of the main part, when the sliding block slid inward is to extreme position, the abutting portion and the limited block are inconsistent.
Outside circle average diameter testing agency as described above, the limited block are connected in the top surface of the guide pad, institute It states guide groove and forms opening in the top surface of the guide pad, the guide groove is stretched out from the opening in the abutting portion.
Outside circle average diameter testing agency as described above, each guide pad is wholely set to be oriented to monolith, described The center for being oriented to monolith is equipped with central through hole, and the inner end of each guide groove and the central through hole penetrate through, and each guiding Slot is dovetail groove.
Outside circle average diameter testing agency as described above, further includes connecting plate, detection components described in each group are connected in The connecting plate, the center of the connecting plate are equipped with the axis hole being adapted to the 6th axis of six-joint robot.
Outside circle average diameter testing agency as described above, detection components described in every group further include L shape connection frame, described L shape connection frame includes the first side plate for being parallel to the connecting plate and the second side plate perpendicular to the connecting plate;Described first Side plate is connected in the bottom surface of the connecting plate, and the guide pad is connected in the top surface of the connecting plate, the cylinder body of the cylinder and described The shell of displacement sensor is connected in the lateral surface of second side plate, the piston rod of the cylinder and institute's displacement sensors Detection axis passes inwardly through second side plate.
Outside circle average diameter testing agency as described above, detection components described in every group further include L shape transfer block and float Dynamic connector, the L shape transfer block includes the third side plate and the 4th side plate perpendicular to the connecting plate, and the piston rod passes through institute It states floating junction to be connected with the third side plate, the 4th side plate is connected with the sliding block.
Outside circle average diameter testing agency as described above, further includes controller, the controller includes:
Memory module, prestores detection arm distance S between the center line at first position, and described first It sets and refers to the detection arm and the inconsistent position of the limited block;
Four station acquisition modules for acquiring the position of the corresponding detection arm, and are configured that work as and collect correspondence The detection arm send detection instruction to corresponding institute's displacement sensors when being in the first position and the second position, So that institute's displacement sensors measure each detection arm circumferentially successively arranged in the first position and the second Displacement L1, L2, L3, L4 between setting, the second position refer to that the crest top land of the detection arm and internal tooth form workpiece to be measured is inconsistent Position;
Computing module, for according to S, L1, L2, L3, L4 calculate the positions (S-L1,0) of four coordinate points, (0, S-L2), (L3-S, 0), (0, L4-S), and four diameter of a circles for calculating wantonly three coordinate points formation and four diameters Average value d, d are the outside circle average diameter of internal tooth form workpiece to be measured.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of specific embodiment of outside circle average diameter provided by the present invention testing agency;
Fig. 2 is flat using the outside circle of the outside circle average diameter testing agency detection internal tooth form workpiece in specific embodiment The structural schematic diagram of equal diameter;
Fig. 3 is main view of the detection arm in specific embodiment in first position and the second position;
Fig. 4 is the structural schematic diagram of the detection arm in specific embodiment;
Fig. 5 is the structural schematic diagram that specific embodiment removes detection arm and bolt;
Fig. 6 is the structural schematic diagram of the guide pad and limited block in specific embodiment.
Wherein, the reference numerals are as follows into Fig. 6 by Fig. 1:
A outside circle average diameter testing agency, B internal tooth form workpiece;
1 detection components;
11 guide pads, 111 guide grooves, a central through hole, 12 sliding blocks, 121 main parts, 1211 mounting holes, 1212 threaded holes, 122 abutting portions, 13 detection arms, 131 cambered surfaces, 14 cylinders, 141 piston rods, 15 displacement sensors, 151 detection axises, the connection of 16L shape Frame, 17L shape transfer block, 18 floating junctions, 19 limited blocks;
2 connecting plates, 21 axis holes.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing and have Body embodiment is described in further detail technical solution of the present invention.
Fig. 1 to Fig. 6 is please referred to, Fig. 1 is a kind of specific embodiment of outside circle average diameter provided by the present invention testing agency Structural schematic diagram;Fig. 2 is the tooth that internal tooth form workpiece is detected using the outside circle average diameter testing agency in specific embodiment The structural schematic diagram of tip circle average diameter;Fig. 3 is main view of the detection arm in specific embodiment in first position and the second position Figure;Fig. 4 is the structural schematic diagram of the detection arm in specific embodiment;Fig. 5 is the knot that specific embodiment removes detection arm and bolt Structure schematic diagram;Fig. 6 is the structural schematic diagram of the guide pad and limited block in specific embodiment.
Firstly, it is necessary to illustrate, the nouns of locality such as top, bottom described in context are all based on for the visual angle in Fig. 1.
As shown in Figure 1, outside circle average diameter testing agency A (hereinafter referred to as testing agency) includes that four groups of structures are identical Detection components 1, four groups of detection components 1 are arranged around same center line and the angle of two adjacent groups detection components 1 is 90 degree.
As shown in Figure 1, every group of detection components 1 include guide pad 11, sliding block 12, detection arm 13, limited block 19,14 and of cylinder Displacement sensor 15.
Wherein, guide pad 11 is equipped with the guide groove 111 radially extended circumferentially.
Wherein, sliding block 12 includes main part 121, and main part 121 is adapted to guide groove 111, i.e. the cross section of main part 121 Shape, size are almost the same with the cross-sectional shape of guide groove 111, size.
Wherein, detection arm 13 is installed on the main part 121 of sliding block 12.
Wherein, limited block 19 is fixed on guide pad 11, when sliding block 12 slide outwardlys into extreme position, detection arm 13 and limit Position block 19 is inconsistent.
Wherein, the piston rod 141 of cylinder 14 is connected with sliding block 12, to drive sliding block 12 to slide along guide groove 111.
Wherein, displacement sensor 15 includes shell, is located at the intracorporal spring of shell (invisible in figure), extends out from shell Detection axis 151.One end of detection axis 151 is abutted with spring, the outside of the other end and sliding block 12 (i.e. far from the side in the center of circle) It abuts.When sliding block 12 slides in and out, compresses and moved outside detection axis 151, increase amount of spring compression;When 12 slid inward of sliding block When, under the resilient force of spring, moved in detection axis 151.Believe the inside of the mobile triggering displacement sensor 15 of detection axis 151 It number changing, the internal control unit of displacement sensor 15 knows the displacement of detection axis 151 according to the variation of internal signal, That is the displacement of sliding block 12.
In application, as shown in Figures 2 and 3, the testing agency top down, it is bottom-up.Application process are as follows:
Sliding block 12 is pulled out first with cylinder 14, until detection arm 13 is moved outwardly to extreme position (i.e. detection arm 13 The inconsistent position with limited block 19), which is denoted as first position.Arm 13 is detected at first position, detects arm The distance between 13 and center line are denoted as S.It is appreciated that since each 1 structure of detection components is identical and circular same center line Arrangement, so respectively the value of the detection corresponding S of arm 13 is identical.
Then, sliding block 12 is inwardly pushed using cylinder 14, while testing agency is driven to move down, until detection arm 13 Top is extend into the scallop of internal tooth form workpiece B.Later, sliding block 12 is pulled out using cylinder 14, until detection arm 13 moves The position inconsistent with the crest top land of internal tooth form workpiece B is moved, which is denoted as the second position.
Period detects each detection arm 13 using displacement sensor 15 and is moved to the corresponding position in the second position from first position It moves.First detection arm, second detection arm, third detection arm, the 4th detection arm circumferentially successively arranges, four it is corresponding displacement according to It is secondary to be denoted as L1, L2, L3, L4.
Then, according to S, L1, L2, L3, L4 calculate the positions (S-L1,0) of four coordinate points, (0, S-L2), (L3-S, 0), (0, L4-S) can determine a round principle according to three coordinate points, can obtain four circles, calculate four diameter of a circle d1, D2, d3, d4, and the average value d, d=d1+d2+d3+d4/4, d for calculating 4 diameter of a circles are that outside circle to be measured is average straight Diameter.
In specific implementation, which can be set controller, and the automatic calculating of d is realized by controller.Specifically, Controller may include memory module, four station acquisition modules and computing module.
Wherein, memory module prestores S.
Wherein, each position acquisition module is used to acquire the position of each detection arm 13, and is configured that work as and collects detection arm 13 When in first position and the second position, detection instruction is sent to corresponding displacement sensor 15.The control of displacement sensor 15 The difference for the internal signal twice that unit processed detects by comparing, obtains L1, L2, L3, L4.
Wherein, computing module according to S, L1, L2, L3, L4 calculate four coordinate points position (S-L1,0), (0, S- L2), (L3-S, 0), (0, L4-S), and four diameter of a circles d1, d2, d3, d4 that wantonly three coordinate points are formed are calculated, and calculate The average value d of four diameters.
Further, as shown in Figure 1, the testing agency is additionally provided with connecting plate 2, each group detection components 1 are mounted on connection Plate 2.
Also, the center of connecting plate 2 is equipped with the axis hole 21 being adapted to the 6th axis of six-joint robot.Before, by six axis Robot is placed near the detection station of flexible production line, and make the 6th axle position of six-joint robot in detection station just on Side.Then, so that the 6th axis is penetrated through the axis hole 21 of connecting plate 2, each group detection components is made to be connected by connecting plate 2 with the 6th axis. Also, the top surface of connection status lower connecting plate 2 downward, bottom surface upward.
In application, when the detection station of internal tooth form Workpiece circulation to flexible production line, the 6th axis band of six-joint robot Dynamic testing agency moves down, and the top of the detection arm 13 of outside circle testing agency is made to extend into the scallop of internal tooth form workpiece Interior, after the completion of detection, the 6th axis of six-joint robot drives testing agency to move up, and makes the detection arm of outside circle testing agency The scallop of 13 abjection internal tooth form workpiece continues circulation to next station to detect qualified internal tooth form workpiece.It is achieved in The on-line checking of tip diameter.
In specific embodiment, as shown in Figure 1, every group of detection components 1 include L shape connection frame 16, L shape connection frame 16 includes flat First side plate of the row in connecting plate 2 and the second side plate perpendicular to connecting plate 2.First side plate is connected in the bottom surface of connecting plate 2, guiding Block 11 is connected in the top surface of connecting plate 2.The cylinder body of cylinder 14 is connected in the lateral surface of the second side plate, and the piston rod 141 of cylinder 14 is inside It is connected across the second side plate with sliding block 12.The shell of displacement sensor 15 is connected in the lateral surface of the second side plate, and detection axis 151 is inside Outside across the second side plate and sliding block 12 abuts against.In this way, the connection of detection components 1 Yu connecting plate 2 is realized, this connection Mode will not interfere flexible and detection axis 151 the movement of piston rod 141.Certainly, the connection side of connecting plate 2 and detection components 1 Formula is not limited thereto, for example, the cylinder body of cylinder 14 and the shell of displacement sensor 15 can also be made to be directly connected in connecting plate 2 Top surface.
In specific embodiment, as shown in Figure 1, every group of detection components 1 further include L shape transfer block 17 and floating junction 18, L shape Transfer block 17 includes the third side plate and the 4th side plate perpendicular to connecting plate 2, and piston rod 141 passes through floating junction 18 and third side Plate is connected, and the 4th side plate is connected with sliding block 12.L shape transfer block 17 is set, convenient for the connection of piston rod 141 and sliding block 12, setting Floating junction 18, conducive to the accuracy that cylinder 14 drives is improved.
In specific embodiment, as shown in Figure 1, sliding block 12 further includes abutting portion 122,12 slid inward of sliding block to extreme position When, abutting portion 122 and limited block 19 are inconsistent.In this way, 19 one side of limited block can limit the pole that sliding block 12 slide outwardlys into On the other hand extreme position can also limit the extreme position that 12 slid inward of sliding block arrives.
In specific embodiment, as shown in Figure 1, limited block 19 is set to the top surface of guide pad 11, guide groove 111 is in guide pad 11 Top surface formed opening, abutting portion 122 from opening stretch out guide groove 111, with inconsistent with limited block 19.Limited block 19 is connected in The top surface of guide pad 11 will not influence sliding block 12 in the sliding of guide groove 111.
In specific embodiment, as shown in figure 4, the top outside of detection arm 13 is cambered surface 131, each center of circle of cambered surface 131 On center line.In this way, being conducive to further promote the accuracy of testing result.It should be noted that the diameter of cambered surface 131 is got over Close to the tip diameter of internal tooth form workpiece, testing result is more accurate.Therefore, in, when the tooth top of internal tooth form workpiece to be measured When circular diameter differs larger with the top outside diameter of detection arm 13, detection arm is needed replacing.
In specific embodiment, fitted as shown in figure 5, the inner end of the main part 121 of sliding block 12 is equipped with the bottom of detection arm 13 The bottom of the mounting hole 1211 matched, detection arm 13 is plugged in mounting hole 1211.In figure, which is square hole.Also, The inner end of main part 121 be additionally provided with mounting hole 1211 vertically through threaded hole 1212, bolt twists in threaded hole 1212, with Hold out against detection arm 13.So set, detecting arm 13 convenient for quick-replaceable.
In specific embodiment, as shown in figure 4, the cross-sectional area at the middle part of detection arm 13 is greater than the cross of the bottom of detection arm 13 Sectional area makes the junction of middle part and bottom form First terrace, under assembled state, the master of the First terrace and sliding shoe The top surface in body portion 121 is bonded, to limit inserting position of the detection arm 13 with respect to mounting hole 1211.Also, detect the middle part of arm 13 Cross-sectional area also greater than detection arm 13 top cross-sectional area, make middle part and top junction formed second step face, When detection, the end face of the second step face and internal tooth form workpiece is contradicted, to limit the tooth form that detection arm 13 protrudes into internal tooth form workpiece B The depth in hole.
In specific embodiment, as shown in fig. 6, the guide groove 111 of guide pad 11 is the higher dovetail groove of guiding accuracy, that is, lead It is dovetail-shape to the cross section of slot 111.Also, each guide pad 11 is wholely set to be oriented to monolith, in this way, being conducive to guarantee each guiding Block 11 is located on same circumference.In figure, guiding monolith is in " ten " font.Also, the center for being oriented to monolith is equipped with central through hole a, The inner end of each guide groove 111 and central through hole a are penetrated through, in this way, being convenient for the machine-shaping of guide groove 111.
In conclusion the testing agency has the following technical effect that:
1, it can guarantee that the center line of testing agency passes through the center of circle of internal tooth form workpiece when detecting, thereby ensure that detection knot The accuracy of fruit;
2, detection speed is fast and detection efficiency is high;
3, the internal tooth form workpiece of different size can be suitable for;
4, detection arm can quickly and easily be replaced;
5, can with the 6th axis connection of six-joint robot, to realize the on-line checking of outside circle average diameter.
A kind of outside circle average diameter testing agency of internal tooth form workpiece provided by the present invention has been carried out in detail above It introduces.Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above embodiments It is merely used to help understand method and its core concept of the invention.It should be pointed out that for the ordinary skill people of the art Member for, without departing from the principle of the present invention, can with several improvements and modifications are made to the present invention, these improve and Modification is also fallen within the protection scope of the claims of the present invention.

Claims (10)

1. a kind of outside circle average diameter testing agency of internal tooth form workpiece, which is characterized in that including four groups of identical detection groups Part (1), four around same center line arrangement and both adjacent angle is 90 degree;Detection components described in every group (1) include:
Guide pad (11), equipped with the guide groove (111) radially extended;
Sliding block (12), including the main part (121) being adapted to the guide groove (111);
It detects arm (13), is installed on the main part (121);
Limited block (19) is fixed on the guide pad (11), when the sliding block (12) slide outwardlys into extreme position, the detection Arm (13) and the limited block (19) are inconsistent;
Cylinder (14), for driving the sliding block (12) to slide along the guide groove (111);
Displacement sensor (15), including the detection axis (151) for being located at the intracorporal spring of shell and extending out from shell, the inspection The one end for surveying axis (151) is abutted with the spring, and the other end is abutted with the outside of the sliding block (12).
2. outside circle average diameter according to claim 1 testing agency, which is characterized in that the top of detection arm (13) Portion's lateral surface is cambered surface (131), and each center of circle of the cambered surface (131) is respectively positioned on the center line.
3. outside circle average diameter according to claim 2 testing agency, which is characterized in that the main part (121) Inner end is equipped with the mounting hole (1211) being adapted to the bottom of detection arm (13), and the bottom of detection arm (13) is plugged in institute State mounting hole (1211);The inner end of the main part (121) be additionally provided with the mounting hole (1211) vertically through threaded hole (1212), bolt is twisted in the threaded hole (1212), to hold out against the detection arm (13).
4. outside circle average diameter according to claim 1 testing agency, which is characterized in that the sliding block (12) further includes Abutting portion (122), the abutting portion (122) are set to the outer end of the main part (121), sliding block (12) slid inward to pole When extreme position, the abutting portion (122) and the limited block (19) are inconsistent.
5. outside circle average diameter according to claim 4 testing agency, which is characterized in that the limited block (19) is connected In the top surface of the guide pad (11), the guide groove (111) forms opening, the conflict in the top surface of the guide pad (11) The guide groove (111) is stretched out from the opening by portion (122).
6. outside circle average diameter according to claim 1 testing agency, which is characterized in that each guide pad (11) one Body be set as guiding monolith, it is described guiding monolith center be equipped with central through hole (a), the inner end of each guide groove (111) with Central through hole (a) perforation, and each guide groove (111) is dovetail groove.
7. outside circle average diameter according to claim 1-6 testing agency, which is characterized in that further include connection Plate (2), detection components (1) described in each group are connected in the connecting plate (2), and the center of the connecting plate (2) is equipped with and six axis machines The axis hole (21) of the 6th axis adaptation of device people.
8. outside circle average diameter according to claim 7 testing agency, which is characterized in that detection components described in every group It (1) further include L shape connection frame (16), the L shape connection frame (16) includes being parallel to the first side plate of the connecting plate and vertical In the second side plate of the connecting plate;First side plate is connected in the bottom surface of the connecting plate (2), and the guide pad (11) is connected in The top surface of the connecting plate (2), the cylinder body of the cylinder (14) and the shell of institute's displacement sensors (15) are connected in described The detection axis (151) of the lateral surface of two side plates, the piston rod (141) of the cylinder (14) and institute's displacement sensors (15) to It is interior to pass through second side plate.
9. outside circle average diameter according to claim 8 testing agency, which is characterized in that detection components described in every group It (1) further include L shape transfer block (17) and floating junction (18), the L shape transfer block (17) includes perpendicular to the connecting plate Third side plate and the 4th side plate, the piston rod (141) is connected by the floating junction (18) with the third side plate, described 4th side plate is connected with the sliding block (12).
10. outside circle average diameter according to claim 1-6 testing agency, which is characterized in that further include control Device processed, the controller include:
Memory module, prestores the detection arm (13) distance S between the center line at first position, and described first It sets and refers to detection arm (13) and the limited block (19) inconsistent position;
Four station acquisition modules for acquiring the position of detection arm (13), and are configured that corresponding described when collecting Detection is sent to corresponding institute's displacement sensors (15) when detection arm (13) is in the first position and the second position to refer to Enable, so as to institute's displacement sensors (15) measure each detection arm (13) circumferentially successively arranged the first position with Displacement L1, L2, L3, L4 between the second position, the second position refer to the detection arm (13) and internal tooth form workpiece to be measured The inconsistent position of crest top land;
Computing module, for calculating position (S-L1,0), (0, S-L2), (L3- of four coordinate points according to S, L1, L2, L3, L4 S, 0), (0, L4-S), and four diameter of a circles for calculating the wantonly three coordinate points formation and four diameters are averaged Value d, d are the outside circle average diameter of internal tooth form workpiece to be measured.
CN201910300049.1A 2019-04-15 2019-04-15 A kind of outside circle average diameter testing agency of internal tooth form workpiece Withdrawn CN109900234A (en)

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CN112254691A (en) * 2020-09-15 2021-01-22 广州大学 Device and method for measuring outer diameter of annular part
CN113001394A (en) * 2019-12-20 2021-06-22 株式会社荏原制作所 Substrate processing apparatus, substrate processing method, and substrate polishing method

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