CN109887866A - A kind of semiconductor crystal wafer cleaning device - Google Patents
A kind of semiconductor crystal wafer cleaning device Download PDFInfo
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- CN109887866A CN109887866A CN201910174602.1A CN201910174602A CN109887866A CN 109887866 A CN109887866 A CN 109887866A CN 201910174602 A CN201910174602 A CN 201910174602A CN 109887866 A CN109887866 A CN 109887866A
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Abstract
The invention discloses a kind of semiconductor crystal wafer cleaning devices, its structure includes cleaning device ontology, fold wafer storage basket and swing arm lifting frame, the operating of the second motor drives the rotation of left end rocking bar inside the cleaning case of the cleaning device ontology bottom end, rocker front end bottom is slidably connected with straight trough mouth on the inside of first connecting rod, rocking bar turnover drives first connecting rod to swing, first connecting rod drives left end second connecting rod to swing, second connecting rod drives sliding slot of second sliding block in the second mounting rack to move up and down, since the second sliding block left end is fixedly connected with link block, link block left end is slidably connected by sliding block and mounting rack simultaneously, second sliding block slides up and down process and drives the outline border on top and wire side to move up and down by link block, wire side drives the storage basket ontology on top to move up and down during moving up and down, storage basket ontology will be moved up and down inside cleaning case into The wafer of the cleaning of one step, inside is contacted with ultrapure water inside cleaning case, and wafer activity movement will promote cleaning efficiency.
Description
Technical field
The present invention relates to semiconductors to clean related fields, specifically a kind of semiconductor crystal wafer cleaning device.
Background technique
Wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer,
The original material of wafer is silicon dioxide mine, and silica ore is refined via electric arc furnaces, chlorination of hydrochloric acid, and after distilling, system
At the polysilicon of high-purity, crystal column surface adheres to the Al2O3 and glycerol mixed liquor protective layer of about 2um, necessary before production
It carries out surface clean, when the first surface clean of conventional equipment, often wafer static state is placed on the inside of cleaning solution, due to storage basket
It is intensive that wafer is put in inside, and common storage basket is often coated on the outside of wafer, the wafer and cleaning solution in cleaning process
Contact area is small, and surface is completed in cleaning still has residue to will affect later period flow success rate, while liquid flows in cleaning process
Property is poor, and cleaning efficiency is low.
Summary of the invention
Therefore, in order to solve above-mentioned deficiency, the present invention provides a kind of semiconductor crystal wafer cleaning device herein.
The invention is realized in this way construct a kind of semiconductor crystal wafer cleaning device, the device include cleaning device ontology,
Support frame, cleaning case, water inlet pipe, outlet pipe, runner, fixed frame, motor, fixed plate, connecting plate, the second connecting plate, second are consolidated
Fixed board, fixed link, guide rod, hook, control panel, microcontroller, power supply line, partition, nozzle, folds wafer storage basket at cylinder
With swing arm lifting frame, the cleaning device ontology apical lateral is provided with support frame, support frame as described above bottom face inside and cleaning
Case is fixedly connected, and the water inlet pipe and outlet pipe right side are through on the left of cleaning case, and water inlet pipe and outlet pipe right side
It is fixedly connected with cleaning case left side, is slidably connected at the top of support frame as described above with runner, connect on the outside of the runner with fixed frame activity
It connects, is fixedly connected on the left of the fixed frame rear end face with motor, and motor front end outer side is fixedly connected with runner, the fixation
It is fixedly connected in the middle part of frame top end face with fixed plate, the fixed plate bottom face is bolted with connecting plate, the connecting plate bottom end
Face and the second connecting plate vertical welding, the second connecting plate bottom face and the second fixed plate vertical welding, described second is fixed
It is connect on front side of plate top end face with bolt cylinder, the cylinder end face is fixedly connected with fixed link, and the fixed link top end face is left
Right side is connect with guide bar bolt, and the guide rod top is slidably connected by built-in guide sleeve and the second fixed plate, the fixed link bottom
End face left and right sides is welded with two hooks, and swing arm lifting frame, swing arm lifting frame front end top are equipped with inside the cleaning case
Portion is provided with folded wafer storage basket, and cleaning case front end face upper left side is equipped with control panel, peace inside the control panel
Equipped with microcontroller, power supply line is provided on the left of the cleaning case rear end face, cleaning case medial surface bottom and partition carry out
Welding, the cleaning case medial surface middle part is equipped with nozzle, and nozzle rear end is fixedly connected with water inlet pipe, the water outlet tube top
End face is through partition top end face, and outlet pipe top end face is fixedly connected with partition, the motor, control panel and power supply line
It is electrically connected with microcontroller, the folding wafer storage basket includes storage basket ontology, peripheral board, handle bar, mounting groove, knob
And feet, storage basket ontology middle part outside are provided with peripheral board, the peripheral board front and back end is flexibly connected with handle bar, institute
It states left and right sides inside peripheral board and is provided with mounting groove, be threadedly coupled on the outside of the knob rear end with handle bar, the peripheral board bottom
End face is welded with feet, the swing arm lifting frame include oscillating arm mechanisms, the second motor, link block, outline border, wire side, washer,
Sliding block and mounting rack composition, the oscillating arm mechanisms right end are equipped with the second motor, and oscillating arm mechanisms left side bottom is equipped with
Link block, the link block top end face are bolted with outline border, are fixed and are intercepted with wire side inside the outline border, on the inside of the wire side
Middle part is connected with washer, is fixedly connected with a slide block on the left of the outline border bottom face by link block, on the outside of the sliding block and pacifies
It shelves and is slidably connected, be bolted on the inside of second motor rear end face and cleaning case, it is solid with feet outside on the inside of the washer
Fixed connection, the mounting rack rear end face are bolted with cleaning case, and second motor is electrically connected with microcontroller.
Preferably, the oscillating arm mechanisms are by the second mounting rack, rocking bar, first connecting rod, second connecting rod, the second sliding block and sliding slot
Composition, the second mounting rack middle part are flexibly connected with rocking bar, and the rocking bar right side front is flexibly connected with first connecting rod, described
It being flexibly connected with second connecting rod on rear side of first connecting rod left end, the second connecting rod rear end is flexibly connected with the second sliding block, and described the
Two mounting rack leading insides are provided with sliding slot, and the second mounting rack leading inside is slidably connected by sliding slot and the second sliding block,
The second mounting rack rear end face is bolted with cleaning case medial surface, second sliding block left side and the fixed company of link block
It connects, the rocking bar inboard aperture is fixedly connected by shaft coupling with motor.
Preferably, two groups are provided with before and after the oscillating arm mechanisms and mounting rack, and two groups are centrosymmetric.
Preferably, there are four the link block settings, and four link blocks are in distributed rectangular.
Preferably, the gasket diameters size is greater than feet diameter dimension, and washer is identical as feet distributing position.
Preferably, the web-side surface is coated with 2mm F-C paint, and web-side surface is shiny surface.
Preferably, the handle bar rotation angle range is 0 ~ 110 degree, and handle shank diameter size is less than hook inside
Diameter dimension.
Preferably, straight trough mouth is provided on the inside of the first connecting rod, and straight trough mouth left and right side is cambered surface.
Preferably, the motor model is S6R06GXCE SPG, minimum speed 900r/min；Microcontroller model
msp430g2；Second motor model is 6gu-10k, minimum speed 1500r/min.
The present invention has the advantage that the present invention provides a kind of semiconductor crystal wafer cleaning device by improving herein, and it is same
Type equipment is compared, and has following improve:
Advantage 1: a kind of semiconductor crystal wafer cleaning device of the present invention, the second electricity of cleaning case inside of cleaning device ontology bottom end
Machine operating drives the rocking bar of left end to rotate by built-in shaft coupling, and straight trough mouth slides on the inside of rocker front end bottom and first connecting rod
Connection, rocking bar turnover drive first connecting rod are swung, and first connecting rod drives left end second connecting rod to swing, and second connecting rod drives second to slide
Sliding slot of the block in the second mounting rack moves up and down, and since the second sliding block left end is fixedly connected with link block, while link block is left
End is slidably connected by sliding block and mounting rack, and the second sliding block slides up and down the outline border and wire side that process drives top by link block
It moves up and down, wire side drives the storage basket ontology on top to move up and down during moving up and down, and storage basket ontology will be in cleaning case
Internal ultrapure water moves up and down further cleaning, and inner wafer piece is contacted with ultrapure water inside cleaning case simultaneously, storage basket ontology
Ultrapure water wafer activity movement will promote cleaning efficiency during moving up and down.
Advantage 2: a kind of semiconductor crystal wafer cleaning device of the present invention, peripheral board height is low, deposits in inside mounting groove
Wafer exposed area it is big, big with ultrapure water and cleaning solution contact area in cleaning process, cleaning efficiency is high, and bottom end
Feet convenient for being fixed by washer and wire side, be simply convenient for producing in batches by structure.
Detailed description of the invention
Fig. 1 is cleaning device body construction schematic diagram of the present invention；
Fig. 2 is cleaning device ontology partial structural diagram of the present invention；
Fig. 3 is connecting board structure schematic diagram of the present invention；
Fig. 4 is cleaning case partial structurtes interior view of the present invention；
Fig. 5 is swing arm lifting frame structural schematic diagram of the present invention；
Fig. 6 is oscillating arm mechanisms partial structurtes right view of the present invention；
Fig. 7 is that the present invention folds wafer storage basket structural schematic diagram.
Wherein: cleaning device ontology -1, cleaning case -3, water inlet pipe -4, outlet pipe -5, runner -6, is fixed support frame -2
Frame -7, motor -8, fixed plate -9, connecting plate -10, the second connecting plate -11, the second fixed plate -12, cylinder -13, fixed link -14,
Guide rod -15, control panel -19, microcontroller -20, power supply line -21, partition -31, nozzle -32, folds wafer receipts at hook -16
Receive basket -17, swing arm lifting frame -18, storage basket ontology -171, peripheral board -172, handle bar -173, mounting groove -174, knob -
175, feet -176, oscillating arm mechanisms -181, the second motor -182, link block -183, outline border -184, wire side -185, washer -186,
Sliding block -187, mounting rack -188, the second mounting rack -1811, rocking bar -1812, first connecting rod -1813, second connecting rod -1814,
Two sliding blocks -1815, sliding slot -1816.
Specific embodiment
Below in conjunction with attached drawing 1-7, the present invention is described in detail, and technical solution in the embodiment of the present invention carries out
It clearly and completely describes, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
Every other embodiment, shall fall within the protection scope of the present invention.
The present invention provides a kind of semiconductor crystal wafer cleaning device, including cleaning device ontology 1, support frame by improving herein
2, cleaning case 3, water inlet pipe 4, outlet pipe 5, runner 6, fixed frame 7, motor 8, fixed plate 9, connecting plate 10, the second connecting plate 11,
Second fixed plate 12, cylinder 13, fixed link 14, guide rod 15, hook 16, control panel 19, microcontroller 20, power supply line 21, every
Plate 31, nozzle 32, folding wafer storage basket 17 and swing arm lifting frame 18,1 apical lateral of cleaning device ontology are provided with support frame
2, be fixedly connected with cleaning case 3 on the inside of support frame 2 bottom face, water inlet pipe 4 and 5 right side of outlet pipe through on the left of cleaning case 3,
And it is fixedly connected on the left of water inlet pipe 4 and 5 right side of outlet pipe and cleaning case 3,2 top of support frame is slidably connected with runner 6, turns
6 outside of wheel is flexibly connected with fixed frame 7, and fixed frame 7 rear end face left side is fixedly connected with motor 8, and 8 front end outer side of motor and
Runner 6 is fixedly connected, and is fixedly connected in the middle part of 7 top end face of fixed frame with fixed plate 9,9 bottom face of fixed plate and 10 bolt of connecting plate
Connection, 11 vertical welding of 10 bottom face of connecting plate and the second connecting plate, 11 bottom face of the second connecting plate and the second fixed plate 12 are hung down
Straight welding, 12 top end face of the second fixed plate front side are bolted with cylinder 13, and 13 bottom face of cylinder is fixedly connected with fixed link 14,
14 top end face left and right sides of fixed link is bolted with guide rod 15, and 15 top of guide rod is slided by built-in guide sleeve and the second fixed plate 12
Connection, 14 bottom face left and right sides of fixed link are welded with two hooks 16, are equipped with swing arm lifting frame 18, swing arm inside cleaning case 3
18 front top of crane is provided with folded wafer storage basket 17, and 3 front end face upper left side of cleaning case is equipped with control panel 19, control
Microcontroller 20 is installed inside panel 19, is provided with power supply line 21,3 medial surface bottom of cleaning case on the left of 3 rear end face of cleaning case
It is welded with partition 31, nozzle 32, and 32 rear end of nozzle and the fixed company of water inlet pipe 4 is installed in the middle part of 3 medial surface of cleaning case
It connects, 5 top end face of outlet pipe is through 31 top end face of partition, and 5 top end face of outlet pipe is fixedly connected with partition 31, motor 8, control
Panel 19 and power supply line 21 processed are electrically connected with microcontroller 20, and folding wafer storage basket 17 includes storage basket ontology 171, periphery
Plate 172, handle bar 173, mounting groove 174, knob 175 and feet 176,171 middle part outside of storage basket ontology are provided with peripheral board
172,172 front and back end of peripheral board is flexibly connected with handle bar 173, and 172 inside left and right sides of peripheral board is provided with mounting groove 174, rotation
It is threadedly coupled on the outside of 175 rear end of button with handle bar 173,172 bottom face of peripheral board is welded with feet 176, swing arm lifting frame
18 include oscillating arm mechanisms 181, the second motor 182, link block 183, outline border 184, wire side 185, washer 186, sliding block 187 and installation
Frame 188 forms, and 181 right end of oscillating arm mechanisms is equipped with the second motor 182, and 181 left side bottom of oscillating arm mechanisms is equipped with link block
183,183 top end face of link block is bolted with outline border 184,184 inside of outline border and the fixed interception of wire side 185,185 inside of wire side
Middle part is connected with washer 186, is fixedly connected by link block 183 with sliding block 187 on the left of 184 bottom face of outline border, outside sliding block 187
Side is slidably connected with mounting rack 188, is bolted on the inside of 182 rear end face of the second motor and cleaning case 3,186 inside of washer and pad
It is fixedly connected on the outside of foot 176,188 rear end face of mounting rack is bolted with cleaning case 3, the second motor 182 and 20 electricity of microcontroller
Connection.
Further, the oscillating arm mechanisms 181 are connected by the second mounting rack 1811, rocking bar 1812, first connecting rod 1813, second
Bar 1814, the second sliding block 1815 and sliding slot 1816 form, and 1811 middle part of the second mounting rack is flexibly connected with rocking bar 1812, institute
It states 1812 right side front of rocking bar to be flexibly connected with first connecting rod 1813,1813 left end of the first connecting rod rear side and second connecting rod
1814 are flexibly connected, and 1814 rear end of second connecting rod is flexibly connected with the second sliding block 1815, before second mounting rack 1811
End inside is provided with sliding slot 1816, and 1811 leading inside of the second mounting rack is slided by sliding slot 1816 and the second sliding block 1815
Connection, 1811 rear end face of the second mounting rack is bolted with 3 medial surface of cleaning case, 1815 left side of the second sliding block and
Link block 183 is fixedly connected, and 1812 inboard aperture of rocking bar is fixedly connected by shaft coupling with motor 8.
Further, two groups are provided with before and after the oscillating arm mechanisms 181 and mounting rack 188, and two groups are centrosymmetric,
Outline border 184 conducive to drive top moves up and down.
Further, there are four the settings of link block 183, and four link blocks 183 are in distributed rectangular, are conducive to and top
The outline border 184 at end is attached fixation.
Further, 186 diameter dimension of washer is greater than 176 diameter dimension of feet, and washer 186 and feet 176
Distributing position is identical, is fixed by washer 186 with wire side 185 conducive to the feet 176 of 171 bottom end of storage basket ontology.
Further, 185 surface of wire side is coated with 2mm F-C paint, and 185 surface of wire side is shiny surface, is conducive to
Promote 185 corrosion resistance of wire side.
Further, 173 rotation angle range of handle bar is 0 ~ 110 degree, and 173 diameter dimension of handle bar is less than
16 inside diameter sizes are linked up with, is conducive to handle bar 173 and rotates, the mounting groove 174 on the inside of bottom end is made to place wafer.
Further, straight trough mouth is provided on the inside of the first connecting rod 1813, and straight trough mouth left and right side is cambered surface, benefit
It is flexibly connected in first connecting rod 1813 with rocking bar 1812.
Further, motor 8 model the S6R06GXCE SPG, minimum speed 900r/min；20 type of microcontroller
Number be msp430g2；Second motor 182 model 6gu-10k, minimum speed 1500r/min.
The present invention provides a kind of semiconductor crystal wafer cleaning device by improving, and runs as follows；
First, the power supply line 21 of 1 rear end of cleaning device ontology is connect into electricity first, then again by water inlet pipe 4 and external water inlet line
Secondly outlet pipe 5 connect with external drainage pipeline, then cylinder 13 is connect with external pneumatic system, and operate control by connection
19 face button of panel carries out cleaning device ontology 1 with external production line to dock debugging；
Second, then unscrew knob 175 and handle bar 173 is rotated 110 degree, the peace inside wafer insertion peripheral board 172
Slot 174 is put, and keeps corresponding interval between wafer, then handle bar 173 is turned round into 110 degree of resets, the insertion of knob 175 is mentioned
Hand lever tightens fixation behind 173 rear side bottom end, and storage basket ontology 171 is then put into external production line and is conveyed, external production
Storage basket ontology 171 is transported to 1 left end of cleaning device ontology by line；
Third, then microcontroller 20 controls relay power built in motor 8, and 8 reverse start of motor drives the runner 6 of front end to revolve
Turn, the rotation of runner 6 keeps the fixed frame 7 on top mobile to left end, reaches behind designated position external pneumatic system for 13 air inlet of cylinder
Mouthful ventilation, cylinder 13 will push down on, and fixed link 14 is to by 15 slide downward of left and right sides guide rod, while 14 bottom face of fixed link
Hook 16 will movement set 173 bottom end of handle bar；
4th, then cylinder 13 is vented gas inlet hole by external pneumatic system, and cylinder 13 will be shunk upwards, 14 bottom face of fixed link
The handle bar 173 on top is promoted to upper end and is hung by hook 16, while 8 reverse start of motor drives the runner 6 of front end inversely to revolve
Turn, runner 6, which rotates, makes the fixed frame 7 on top to the mobile rinse bath top set on the left of 3 top end face of cleaning case of right end, external pneumatic
System ventilates 13 air inlet of cylinder, and cylinder 13 will push down on, and then it is logical to control relay built in motor 8 for microcontroller 20
Electricity, 8 reverse start of motor drive the runner 6 of front end to rotate, and then fixed link 14 is detached from storage basket ontology 171, fixed link 14
The movement of storage basket ontology 171 is set 185 top end face of wire side, while four pads of 172 bottom face of peripheral board by the hook 16 of bottom face
Foot 176 will be fixed on the inside of the washer 186 for being inserted into 185 top end face of wire side；
5th, then external water inlet line conveys ultrapure water and is sprayed by water inlet pipe 4 from 32 front end of nozzle, and the ejection of nozzle 32 is set
The wafer surface of the inside of storage basket ontology 171 is cleaned, while 3 inner bottom of cleaning case has ultrapure water, and then second
Motor 182 operates, and drives the rocking bar 1812 of left end to rotate by built-in shaft coupling, 1812 front bottom end of rocking bar and first connecting rod
1813 inside straight trough mouths are slidably connected, and the turnover of rocking bar 1812 drives first connecting rod 1813 to swing, and first connecting rod 1813 drives left end
Second connecting rod 1814 is swung, and second connecting rod 1814 drives sliding slot about 1816 of second sliding block 1815 in the second mounting rack 1811
Mobile, since 1815 left end of the second sliding block is fixedly connected with link block 183, while 183 left end of link block passes through sliding block 187 and peace
It shelves 188 to be slidably connected, the second sliding block 1815 slides up and down the outline border 184 and wire side that process drives top by link block 183
185 move up and down, and wire side 185 drives the storage basket ontology 171 on top to move up and down during moving up and down, storage basket ontology
171 will move up and down further cleaning in 3 inside ultrapure water of cleaning case；
6th, fixed frame 7 sets designated position, external gas to left end movement by 8 reverse start of motor of left end after the completion of cleaning
Dynamic system ventilates 13 gas vent of cylinder, and cylinder 13 will be shunk to upper end, and the hook 16 of bottom end will in 14 lifting process of fixed link
Storage basket ontology 171 is sling by handle bar 173, then microcontroller 20 controls relay power built in motor 8, motor 8
Reverse start drives the rotation of runner 6 of front end by mobile the second rinse bath for setting 3 top inner side of cleaning case of fixed frame 7, completes
After continue to sling storage basket ontology 171 and set external production line to right end conveying；
7th, operation 19 face button of control panel makes external water inlet line will be in cleaning case 3 by outlet pipe 5 after the completion of work
The discharge of portion's water, extracts power supply line 21 again and is powered off after emptying.
The present invention provides a kind of semiconductor crystal wafer cleaning device by improving, in the cleaning case 3 of 1 bottom end of cleaning device ontology
The second motor of portion 182 operates, and drives the rocking bar 1812 of left end to rotate by built-in shaft coupling, 1812 front bottom end of rocking bar and first
1813 inside straight trough mouth of connecting rod is slidably connected, and the turnover of rocking bar 1812 drives first connecting rod 1813 to swing, and first connecting rod 1813 drives
Left end second connecting rod 1814 is swung, and second connecting rod 1814 drives sliding slot 1816 of second sliding block 1815 in the second mounting rack 1811
It moves up and down, since 1815 left end of the second sliding block is fixedly connected with link block 183, while 183 left end of link block passes through sliding block 187
It is slidably connected with mounting rack 188, the second sliding block 1815 slides up and down 184 He of outline border that process drives top by link block 183
Wire side 185 moves up and down, and wire side 185 drives the storage basket ontology 171 on top to move up and down during moving up and down, storage basket sheet
Body 171 will move up and down further cleaning in 3 inside ultrapure water of cleaning case, and inner wafer piece is ultrapure with 3 inside of cleaning case simultaneously
Water contact, wafer activity movement will clean raising efficiency during storage basket ontology 171 moves up and down；172 height of peripheral board
Low, the wafer exposed area deposited in inside mounting groove 174 is big, in cleaning process with ultrapure water and cleaning solution contact area
Greatly, cleaning efficiency is high, and the feet 176 of bottom end is convenient for being fixed by washer 186 with wire side 185, and structure is simply convenient for
Batch production.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (8)
1. a kind of semiconductor crystal wafer cleaning device, including cleaning device ontology (1), support frame (2), cleaning case (3), water inlet pipe
(4), outlet pipe (5), runner (6), fixed frame (7), motor (8), fixed plate (9), connecting plate (10), the second connecting plate (11),
Second fixed plate (12), cylinder (13), fixed link (14), guide rod (15), hook (16), control panel (19), microcontroller
(20), power supply line (21), partition (31) and nozzle (32), it is characterised in that: further include folding wafer storage basket (17) and swing arm
Crane (18), cleaning device ontology (1) apical lateral are provided with support frame (2), on the inside of support frame as described above (2) bottom face
Be fixedly connected with cleaning case (3), the water inlet pipe (4) and outlet pipe (5) right side through on the left of cleaning case (3), and into
It is fixedly connected on the left of water pipe (4) and outlet pipe (5) right side and cleaning case (3), it is sliding with runner (6) at the top of support frame as described above (2)
Dynamic connection, runner (6) outside is flexibly connected with fixed frame (7), solid with motor (8) on the left of fixed frame (7) rear end face
Fixed connection, and motor (8) front end outer side is fixedly connected with runner (6), fixed frame (7) the top end face middle part and fixed plate
(9) it is fixedly connected, fixed plate (9) bottom face is bolted with connecting plate (10), connecting plate (10) bottom face and
Two connecting plates (11) vertical welding, the second connecting plate (11) bottom face and the second fixed plate (12) vertical welding, described
It is bolted on front side of two fixed plates (12) top end face with cylinder (13), cylinder (13) bottom face and fixed link (14) fixed company
It connects, fixed link (14) the top end face left and right sides is bolted with guide rod (15), and guide rod (15) top passes through built-in guide sleeve
It is slidably connected with the second fixed plate (12), fixed link (14) the bottom face left and right sides is welded with two hooks (16), described clear
It is equipped with swing arm lifting frame (18) inside tank-washer (3), swing arm lifting frame (18) front top is provided with folded wafer storage basket
(17), cleaning case (3) the front end face upper left side is equipped with control panel (19), is equipped with inside the control panel (19) micro-
Controller (20) is provided with power supply line (21) on the left of cleaning case (3) rear end face, cleaning case (3) the medial surface bottom with
Partition (31) is welded, and is equipped with nozzle (32) in the middle part of cleaning case (3) medial surface, and nozzle (32) rear end and water inlet
Pipe (4) is fixedly connected, outlet pipe (5) top end face through partition (31) top end face, and outlet pipe (5) top end face with every
Plate (31) is fixedly connected, and the motor (8), control panel (19) and power supply line (21) are electrically connected with microcontroller (20), institute
State fold wafer storage basket (17) include storage basket ontology (171), peripheral board (172), handle bar (173), mounting groove (174),
Knob (175) and feet (176), storage basket ontology (171) middle part outside are provided with peripheral board (172), the peripheral board
(172) front and back end is flexibly connected with handle bar (173), and the internal left and right sides of the peripheral board (172) is provided with mounting groove (174),
Be threadedly coupled on the outside of knob (175) rear end with handle bar (173), peripheral board (172) bottom face and feet (176) into
Row welding, the swing arm lifting frame (18) includes oscillating arm mechanisms (181), the second motor (182), link block (183), outline border
(184), wire side (185), washer (186), sliding block (187) and mounting rack (188) composition, oscillating arm mechanisms (181) the right end peace
Equipped with the second motor (182), oscillating arm mechanisms (181) the left side bottom is equipped with link block (183), the link block
(183) top end face is bolted with outline border (184), and internal fix with wire side (185) of the outline border (184) intercepts, the wire side
(185) middle inside is connected with washer (186), passes through link block (183) and sliding block on the left of outline border (184) bottom face
(187) it is fixedly connected, is slidably connected on the outside of the sliding block (187) with mounting rack (188), the second motor (182) rear end face
It is bolted, is fixedly connected on the inside of the washer (186) and on the outside of feet (176), the mounting rack with cleaning case (3) inside
(188) rear end face is bolted with cleaning case (3), and second motor (182) is electrically connected with microcontroller (20).
2. a kind of semiconductor crystal wafer cleaning device according to claim 1, it is characterised in that: the oscillating arm mechanisms (181) by
Second mounting rack (1811), rocking bar (1812), first connecting rod (1813), second connecting rod (1814), the second sliding block (1815) and cunning
Slot (1816) composition, the second mounting rack (1811) middle part is flexibly connected with rocking bar (1812), on the right side of the rocking bar (1812)
Front end is flexibly connected with first connecting rod (1813), on rear side of first connecting rod (1813) left end even with second connecting rod (1814) activity
It connects, second connecting rod (1814) rear end is flexibly connected with the second sliding block (1815), in the second mounting rack (1811) front end
Side is provided with sliding slot (1816), and the second mounting rack (1811) leading inside passes through sliding slot (1816) and the second sliding block (1815)
It is slidably connected, the second mounting rack (1811) rear end face is bolted with cleaning case (3) medial surface, second sliding block
(1815) left side is fixedly connected with link block (183), and rocking bar (1812) inboard aperture is fixed by shaft coupling and motor (8)
Connection.
3. a kind of semiconductor crystal wafer cleaning device according to claim 1, it is characterised in that: the oscillating arm mechanisms (181) and
Two groups are provided with before and after mounting rack (188), and two groups are centrosymmetric.
4. a kind of semiconductor crystal wafer cleaning device according to claim 1, it is characterised in that: link block (183) setting
There are four, and four link blocks (183) are in distributed rectangular.
5. a kind of semiconductor crystal wafer cleaning device according to claim 1, it is characterised in that: washer (186) the diameter ruler
It is very little to be greater than feet (176) diameter dimension, and washer (186) is identical as feet (176) distributing position.
6. a kind of semiconductor crystal wafer cleaning device according to claim 1, it is characterised in that: wire side (185) the surface spray
It is coated with 2mm F-C paint, and wire side (185) surface is shiny surface.
7. a kind of semiconductor crystal wafer cleaning device according to claim 1, it is characterised in that: handle bar (173) rotation
Angular range is 0 ~ 110 degree, and handle bar (173) diameter dimension is less than hook (16) inside diameter size.
8. a kind of semiconductor crystal wafer cleaning device according to claim 2, it is characterised in that: in the first connecting rod (1813)
Side is provided with straight trough mouth, and straight trough mouth left and right side is cambered surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910174602.1A CN109887866B (en) | 2019-03-08 | 2019-03-08 | Semiconductor wafer cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910174602.1A CN109887866B (en) | 2019-03-08 | 2019-03-08 | Semiconductor wafer cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109887866A true CN109887866A (en) | 2019-06-14 |
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| CN111540704A (en) * | 2020-07-10 | 2020-08-14 | 清华大学 | Wafer deflection device and wafer processing equipment |
| CN112509950A (en) * | 2020-12-21 | 2021-03-16 | 马之彬 | Semiconductor soaking device convenient for backflow of liquid medicine |
| CN112540514A (en) * | 2020-12-17 | 2021-03-23 | 中国电子科技集团公司第十三研究所 | Developing apparatus |
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| CN112540514A (en) * | 2020-12-17 | 2021-03-23 | 中国电子科技集团公司第十三研究所 | Developing apparatus |
| CN112509950A (en) * | 2020-12-21 | 2021-03-16 | 马之彬 | Semiconductor soaking device convenient for backflow of liquid medicine |
| CN112509950B (en) * | 2020-12-21 | 2022-12-09 | 盐城高测新能源科技有限公司 | Semiconductor soaking device convenient for backflow of liquid medicine |
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