CN109886956B - Method and device for detecting defect point aggregations - Google Patents
Method and device for detecting defect point aggregations Download PDFInfo
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- 230000007547 defect Effects 0.000 title claims abstract description 261
- 238000000034 method Methods 0.000 title claims abstract description 59
- 230000002776 aggregation Effects 0.000 title claims description 37
- 238000004220 aggregation Methods 0.000 title claims description 37
- 238000005192 partition Methods 0.000 claims abstract description 365
- 238000010586 diagram Methods 0.000 claims abstract description 144
- 238000001514 detection method Methods 0.000 claims abstract description 38
- 230000011218 segmentation Effects 0.000 claims abstract description 19
- 230000002950 deficient Effects 0.000 claims description 66
- 230000003321 amplification Effects 0.000 claims description 37
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 37
- 238000004364 calculation method Methods 0.000 claims description 21
- 238000004590 computer program Methods 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 15
- 238000010606 normalization Methods 0.000 claims description 11
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- 230000008569 process Effects 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 description 13
- 230000006870 function Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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Abstract
The invention discloses a method and a device for detecting the aggregative property of defect points, which relate to the technical field of automatic optical detection and improve the detection efficiency and accuracy for detecting whether the defect points in a defect point diagram have the aggregative property, and the main technical scheme of the invention is as follows: acquiring a to-be-detected defect point diagram, a partition mode, partition quantity and a variance threshold; performing area segmentation processing on the to-be-detected defect point diagram according to the partition mode and the partition number to obtain a plurality of partitions; determining the number of defect points corresponding to each partition, and calculating the normalized occupation ratio value corresponding to each partition according to the number of defect points corresponding to each partition; calculating variance values corresponding to the plurality of normalized ratio values; judging whether the variance value is larger than the variance threshold value; and if so, determining that the defect points in the defect point diagram to be detected have aggregative property. The method is applied to the process of detecting whether the defect points in the defect point diagram have aggregative property.
Description
Technical Field
The invention relates to the technical field of automatic optical detection, in particular to a method and a device for detecting defect point aggregations.
Background
With the continuous development of scientific technology, AOI (automatic optical inspection) technology has been widely used in electronics manufacturing industry. In the manufacturing process of the array substrate, it is very important to detect whether the defect points on the array substrate have aggregative properties. In the process of AOI detection of the AOI detection equipment on the array substrate, the AOI detection equipment records the coordinates of each defect point on the array substrate according to a preset coordinate system, and after the detection is finished, draws a defect point diagram corresponding to the array substrate according to the recorded coordinates corresponding to each defect point, and can determine whether the defect points on the array substrate have aggregation or not according to the defect point diagram.
At present, when determining whether the defect points on the array substrate have aggregative property according to the defect point diagram corresponding to the array substrate, a manual detection method is usually adopted, that is, a worker manually identifies the defect points in the defect point diagram, and when determining that the number of the defect points in a unit area exceeds a certain number, the defect points in the defect point diagram can be determined to have aggregative property, so that the defect points on the array substrate can be determined to have aggregative property.
The inventor finds that the following technical problems exist in the prior art in the process of implementing the invention, and because the number of defect point diagrams to be detected is too large, a large amount of time is consumed when a worker detects all the defect point diagrams; moreover, the detection standards of different workers are not uniform, so that the accuracy of the detection result cannot be guaranteed, and therefore, the detection efficiency of detecting whether the defect point in the defect point diagram has the aggregative property in a manual detection mode is low, and the accuracy is poor.
Disclosure of Invention
In view of the above, the present invention provides a method and an apparatus for detecting defect point aggregations, and mainly aims to improve the efficiency and accuracy of detecting whether defect points in a defect point diagram have aggregations.
In order to solve the above problems, the present invention mainly provides the following technical solutions:
in one aspect, the present invention provides a method for detecting defective spot aggregability, the method comprising:
acquiring a to-be-detected defect point diagram, a partition mode, partition quantity and a variance threshold;
performing area segmentation processing on the to-be-detected defect point diagram according to the partition mode and the partition number to obtain a plurality of partitions;
determining the number of defect points corresponding to each partition, and calculating the normalized occupation ratio value corresponding to each partition according to the number of defect points corresponding to each partition;
calculating variance values corresponding to the plurality of normalized ratio values;
judging whether the variance value is larger than the variance threshold value;
and if so, determining that the defect points in the defect point diagram to be detected have aggregative property.
Optionally, the partition mode is a vertical partition mode or a horizontal partition mode; the calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition includes:
calculating the number of the defective points corresponding to the to-be-detected defective point diagram according to the number of the defective points corresponding to each partition;
and calculating the ratio of the number of the defective points corresponding to each partition to the number of the defective points corresponding to the defect point diagram to be detected so as to obtain the normalized ratio corresponding to each partition.
Optionally, the partition mode is a positive oblique partition mode or a negative oblique partition mode; the calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition includes:
determining the area corresponding to the to-be-detected defect point diagram and the area corresponding to each partition;
and substituting the number of the defect points corresponding to each partition, the area corresponding to each partition and the area corresponding to the to-be-detected defect point diagram into a preset algorithm, and calculating the normalized ratio corresponding to each partition.
Optionally, after the calculating the normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition, the method further includes:
amplifying each normalized ratio value by using a preset amplification factor;
calculating a square value of the preset amplification factor, and amplifying the variance threshold value by using the square value;
the calculating the variance values corresponding to the plurality of normalized ratio values includes:
calculating variance values corresponding to the plurality of the normalized ratio values after amplification processing;
the determining whether the variance value is greater than the variance threshold includes:
and judging whether the variance values corresponding to the plurality of amplified normalized ratio values are larger than the variance threshold value after amplification.
Optionally, the partition mode is any one of a vertical partition mode, a horizontal partition mode, a positive oblique partition mode and a negative oblique partition mode.
In order to achieve the above object, according to another aspect of the present invention, there is provided an electronic apparatus including: the device comprises a memory, a processor and a program which is stored on the memory and can run on the processor, wherein when the processor executes the program, the method for detecting the defect point aggregations is realized.
In order to achieve the above object, according to another aspect of the present invention, there is provided a computer-readable storage medium having stored thereon a computer program, which when executed implements the above-described method for detecting defective dot aggregability.
In another aspect, the present invention provides an apparatus for detecting defective spot aggregability, the apparatus comprising:
the acquiring unit is used for acquiring a to-be-detected defect point diagram, a partition mode, partition quantity and a variance threshold;
the area dividing unit is used for carrying out area dividing processing on the to-be-detected defect point diagram according to the partition mode and the partition number acquired by the acquiring unit so as to acquire a plurality of partitions;
a first determining unit, configured to determine the number of defect points corresponding to each partition;
a first calculating unit, configured to calculate a normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition determined by the first determining unit;
the second calculation unit is used for calculating variance values corresponding to the plurality of normalized ratio values;
a judgment unit configured to judge whether the variance value calculated by the second calculation unit is larger than the variance threshold;
and the second determining unit is used for determining that the defect points in the defect point diagram to be detected have aggregative property when the judging unit judges that the variance value is larger than the variance threshold value.
Optionally, the partition mode is a vertical partition mode or a horizontal partition mode; the first calculation unit includes:
the first calculating module is used for calculating the number of the defective points corresponding to the to-be-detected defective point diagram according to the number of the defective points corresponding to each partition;
and the second calculating module is used for calculating the ratio of the number of the defective points corresponding to each partition to the number of the defective points corresponding to the defect point diagram to be detected so as to obtain the normalized ratio corresponding to each partition.
Optionally, the partition mode is a positive oblique partition mode or a negative oblique partition mode; the first calculation unit includes:
the determining module is used for determining the area corresponding to the to-be-detected defect point diagram and the area corresponding to each partition;
and the third calculating module is used for substituting the number of the defective points corresponding to each partition, the area corresponding to each partition and the area corresponding to the to-be-detected defective point diagram into a preset algorithm, and calculating the normalized ratio corresponding to each partition.
Optionally, the apparatus further comprises:
the first amplification unit is used for performing amplification processing on each normalization ratio value by using a preset amplification factor after the first calculation unit calculates the normalization ratio value corresponding to each partition according to the number of defect points corresponding to each partition;
the third calculation unit is used for calculating a square value of the preset magnification;
a second amplification unit configured to amplify the variance threshold using the square value calculated by the third calculation unit;
the second calculating unit is specifically configured to calculate variance values corresponding to the amplified plurality of normalized ratio values;
the judgment unit is specifically configured to judge whether a variance value corresponding to the amplified multiple normalized occupation ratio values is greater than the variance threshold value after amplification.
Optionally, the partition mode is any one of a vertical partition mode, a horizontal partition mode, a positive oblique partition mode and a negative oblique partition mode.
By the technical scheme, the technical scheme provided by the invention at least has the following advantages:
the invention provides a method and a device for detecting defect point aggregations, compared with the prior art that whether defect points in a defect point diagram have aggregations or not is detected by adopting a manual detection mode, the method and the device can carry out region segmentation processing on a defect point diagram to be detected by terminal equipment according to a partition mode and the partition number after the terminal equipment acquires the defect point diagram to be detected drawn by AOI detection equipment and the partition mode, the partition number and a variance threshold value set by a worker according to detection requirements, thereby obtaining a plurality of partitions; after determining the number of defect points corresponding to each partition, the terminal device calculates a normalized occupation value corresponding to each partition according to the number of defect points corresponding to each partition, and calculates variance values corresponding to a plurality of normalized occupation values; when the terminal equipment judges that the variance values corresponding to the plurality of normalized ratio values are larger than the variance threshold value, the defect points in the defect point diagram to be detected can be determined to have aggregation. Because the terminal equipment detects whether the defect points in the defect point diagram have aggregative property, the detection efficiency for detecting whether the defect points in the defect point diagram have aggregative property can be improved; and, the terminal device can detect a plurality of defect point maps using the same detection criteria, and therefore, can improve the accuracy of detecting whether or not the defect points in the defect point maps have aggregations.
The foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a flowchart of a method for detecting defective spot aggregations according to an embodiment of the present invention;
fig. 2a is a schematic diagram illustrating a processing of performing region segmentation on a defect point diagram to be detected by using a vertical partition manner according to an embodiment of the present invention;
fig. 2b is a schematic diagram illustrating a processing of performing region segmentation on a defect point diagram to be detected by using a horizontal partition manner according to an embodiment of the present invention;
fig. 2c is a schematic diagram illustrating a processing of performing region segmentation on a defect point diagram to be detected by using an orthorhombic partition method according to an embodiment of the present invention;
fig. 2d is a schematic diagram illustrating a processing of performing region segmentation on a defect point diagram to be detected by using a negative diagonal partition manner according to an embodiment of the present invention;
FIG. 3 is a flowchart of another method for detecting defective spot aggregations according to an embodiment of the present invention;
FIG. 4 is a block diagram of an apparatus for detecting defective point clustering according to an embodiment of the present invention;
fig. 5 is a block diagram of another apparatus for detecting defective dot clustering according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
An embodiment of the present invention provides a method for detecting defect point aggregations, as shown in fig. 1, where the method includes:
101. and acquiring a point diagram of the defect to be detected, a partition mode, the number of partitions and a variance threshold.
The method comprises the steps that a to-be-detected defect point diagram is a defect point diagram corresponding to an array substrate to be detected, in the process of AOI detection of the to-be-detected array substrate by AOI detection equipment, the AOI detection equipment records the coordinates of each defect point on the to-be-detected array substrate according to a preset coordinate system, and after the detection is finished, the defect point diagram corresponding to the to-be-detected array substrate (namely the to-be-detected defect point diagram) is drawn according to the recorded coordinates corresponding to each defect point, and at the moment, the to-be-detected defect point diagram can be obtained; the partition mode, the partition quantity and the variance threshold are set by a worker according to detection requirements, and the partition mode is any one of a vertical partition mode, a transverse partition mode, a positive oblique partition mode and a negative oblique partition mode.
In the embodiment of the present invention, in order to detect whether a defect point in a defect point diagram has aggregative property, a terminal device first needs to acquire a defect point diagram to be detected drawn by an AOI detection device and a partition mode, a partition number, and a variance threshold set by a worker according to a detection requirement.
102. And performing area segmentation processing on the defect point diagram to be detected according to the partition mode and the partition number to obtain a plurality of partitions.
In the embodiment of the invention, after acquiring the defect point diagram to be detected, the partition mode and the partition number, the terminal equipment can perform area segmentation processing on the defect point diagram to be detected according to the acquired partition mode and partition number, thereby acquiring a plurality of partitions.
Specifically, in this step, when the obtained partition mode is a vertical partition mode, the terminal device performs area segmentation processing on the defect point diagram to be detected by using a plurality of dividing lines perpendicular to a horizontal axis of the defect point diagram to be detected, so as to obtain a plurality of partitions whose number is the number of partitions, where intervals of the plurality of dividing lines are equal, which may be specifically shown in fig. 2 a; when the obtained partition mode is a horizontal partition mode, the terminal device performs area partition processing on the defect point diagram to be detected by using a plurality of dividing lines parallel to a horizontal axis of the defect point diagram to be detected, so as to obtain a plurality of partitions with the number of partitions, wherein the intervals of the plurality of dividing lines are equal, which can be specifically shown in fig. 2 b; when the obtained partition mode is a forward-oblique partition mode, the terminal device performs area segmentation processing on the defect point diagram to be detected by using multiple dividing lines with a positive slope, so as to obtain multiple partitions with the number of partitions, wherein the multiple dividing lines have equal intervals, which can be specifically shown in fig. 2 c; when the obtained partition mode is a negative slope partition mode, the terminal device performs area segmentation processing on the defect point diagram to be detected by using multiple dividing lines with negative slopes, so as to obtain multiple partitions with the number of partitions, where the multiple dividing lines have equal intervals, which may be specifically shown in fig. 2d, but is not limited thereto.
103. And determining the number of the defect points corresponding to each partition, and calculating the normalized ratio corresponding to each partition according to the number of the defect points corresponding to each partition.
In the embodiment of the invention, the terminal device performs the area segmentation processing on the defect point diagram to be detected according to the obtained partition mode and the partition number, and can determine the number of defect points corresponding to each partition after obtaining a plurality of partitions. Because, when the number of defect points corresponding to a certain defect point diagram is relatively large, but the distribution of the defect points in the defect point diagram is relatively uniform, it is determined that the defect points in the defect point diagram have no aggregative property; however, when the number of defect points corresponding to a certain defect point diagram is small, but the distribution of the defect points in the defect point diagram is concentrated, it should be determined that the defect points in the defect point diagram have aggregative property, and therefore, in order to eliminate the influence of the number of defect points corresponding to the defect point diagram to be detected on the detection result, the terminal device needs to perform normalization processing on the number of defect points corresponding to each partition, that is, the normalization occupation ratio value corresponding to each partition is calculated according to the number of defect points corresponding to each partition.
Specifically, in this step, when the obtained partition mode is a vertical partition mode or a horizontal partition mode, since the areas corresponding to each partition are the same, the normalized occupation ratio value corresponding to each partition can be directly calculated according to the number of the defective points corresponding to each partition, that is, the number of the defective points corresponding to the defective point diagram to be detected is calculated according to the number of the defective points corresponding to each partition, and then the ratio of the number of the defective points corresponding to each partition to the number of the defective points corresponding to the defective point diagram to be detected is calculated, so as to obtain the normalized occupation ratio value corresponding to each partition; when the obtained partition mode is a positive oblique partition mode or a negative oblique partition mode, because the areas corresponding to the partitions are different, when the normalized ratio value corresponding to each partition is calculated according to the number of the defective points corresponding to each partition, normalization processing needs to be performed on the area corresponding to each partition as well, that is, the area corresponding to the defect point diagram to be detected and the area corresponding to each partition are determined first, and then the number of the defective points corresponding to each partition, the area corresponding to each partition and the area corresponding to the defect point diagram to be detected are substituted into a preset algorithm, so that the normalized ratio value corresponding to each partition is calculated.
104. And calculating variance values corresponding to the plurality of normalized ratio values.
In the embodiment of the present invention, after the terminal device calculates the normalized ratio value corresponding to each partition, the variance values corresponding to the plurality of normalized ratio values may be calculated, that is, the average values corresponding to the plurality of normalized ratio values are calculated first, and then the plurality of normalized ratio values and the average values corresponding to the plurality of normalized ratio values are substituted into the variance calculation formula, so that the variance values corresponding to the plurality of normalized ratio values may be calculated.
105. And judging whether the variance value is larger than the variance threshold value.
In the embodiment of the present invention, after calculating the variance values corresponding to the plurality of normalized ratio values, the terminal device may determine whether the calculated variance value is greater than the variance threshold obtained in step 101, so as to determine whether the defect point in the defect point diagram to be detected has aggregation according to the determination result.
106. And if so, determining that the defect points in the defect point diagram to be detected have aggregative property.
In the embodiment of the present invention, when the terminal device determines in step 105 that the variance values corresponding to the multiple normalized ratio values are greater than the variance threshold, it may be determined that the defect points in the defect point diagram to be detected have aggregation.
It should be noted that, in the practical application process, a worker may set a plurality of partition modes, the number of partitions corresponding to each partition mode, and the variance threshold according to the detection requirement at the same time, and after obtaining the defect point diagram to be detected, the plurality of partition modes, the number of partitions corresponding to each partition mode, and the variance threshold corresponding to each partition mode, the terminal device may respectively detect whether the defect points in the defect point diagram to be detected have aggregation in each partition mode by using the method described in step 101-106, and when detecting that the defect points in the defect point diagram to be detected have aggregation in any partition mode, may determine that the defect points in the defect point diagram to be detected have aggregation.
Compared with the prior art that whether the defective points in the defect point diagram have the aggregations or not is detected in a manual detection mode, the method for detecting the aggregations of the defective points can be used for carrying out region segmentation processing on the defect point diagram to be detected by the terminal equipment according to the partition mode and the partition number after the terminal equipment acquires the defect point diagram to be detected drawn by the AOI detection equipment and the partition mode, the partition number and the variance threshold value set by a worker according to the detection requirement, so that a plurality of partitions are obtained; after determining the number of defect points corresponding to each partition, the terminal device calculates a normalized occupation value corresponding to each partition according to the number of defect points corresponding to each partition, and calculates variance values corresponding to a plurality of normalized occupation values; when the terminal equipment judges that the variance values corresponding to the plurality of normalized ratio values are larger than the variance threshold value, the defect points in the defect point diagram to be detected can be determined to have aggregation. Because the terminal equipment detects whether the defect points in the defect point diagram have aggregative property, the detection efficiency for detecting whether the defect points in the defect point diagram have aggregative property can be improved; and, the terminal device can detect a plurality of defect point maps using the same detection criteria, and therefore, can improve the accuracy of detecting whether or not the defect points in the defect point maps have aggregations.
To be described in more detail below, an embodiment of the present invention provides another method for detecting defect point aggregations, and in particular, a specific method for a terminal device to calculate a normalized ratio value corresponding to each partition according to a number of defect points corresponding to each partition, as shown in fig. 3 specifically, the method includes:
201. and acquiring a point diagram of the defect to be detected, a partition mode, the number of partitions and a variance threshold.
In step 201, the description of the corresponding part in fig. 1 may be referred to for obtaining the defect point diagram to be detected, the partition mode, the partition number, and the variance threshold, which will not be described herein again in the embodiments of the present invention.
202. And performing area segmentation processing on the defect point diagram to be detected according to the partition mode and the partition number to obtain a plurality of partitions.
In step 202, the area of the defect point map to be detected is divided according to the partition mode and the number of partitions to obtain a plurality of partitions, which may refer to the description of the corresponding portion in fig. 1, and will not be described again in this embodiment of the present invention.
203. And determining the number of defect points corresponding to each partition.
In step 203, the number of defect points corresponding to each partition is determined, which may refer to the description of the corresponding portion in fig. 1, and will not be described again in this embodiment of the present invention.
204. And calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition.
In the embodiment of the present invention, in order to eliminate the influence of the number of defect points corresponding to the defect point diagram to be detected on the detection result, after determining the number of defect points corresponding to each partition, the terminal device needs to perform normalization processing on the number of defect points corresponding to each partition, that is, the normalized occupation ratio value corresponding to each partition is calculated according to the number of defect points corresponding to each partition. How the terminal device calculates the normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition will be described in detail below.
(1) When the obtained partition mode is a vertical partition mode or a horizontal partition mode, because the area corresponding to each partition is the same, the normalized ratio corresponding to each partition can be directly calculated according to the number of defect points corresponding to each partition: firstly, calculating the number of defect points corresponding to a defect point diagram to be detected according to the number of the defect points corresponding to each partition; then, a ratio of the number of defective points corresponding to each partition to the number of defective points corresponding to the defect point diagram to be detected is calculated, so as to obtain a normalized ratio value corresponding to each partition, for example, in the foregoing step, the image of the defect point to be detected is divided into 5 partitions in a vertical partition manner, which are respectively partition a, partition B, partition C, partition D, and partition E, where the number of defective points corresponding to partition a is 10, the number of defective points corresponding to partition B is 15, the number of defective points corresponding to partition C is 20, the number of defective points corresponding to partition D is 5, and the number of defective points corresponding to partition E is 15, so that the number of defective points corresponding to the defect point diagram to be detected is 10+15+20+5+15, so that the normalized ratio value corresponding to partition a is 10/65 ═ 0.154, the normalized ratio value corresponding to partition B is 15/65 ═ 0.231 ═ 0.b, The normalized ratio value corresponding to the partition C is 20/65-0.308, the normalized ratio value corresponding to the partition D is 5/65-0.077, and the normalized ratio value corresponding to the partition E is 15/65-0.231.
(2) When the obtained partition mode is a positive-slope partition mode or a negative-slope partition mode, since the area corresponding to each partition is different, when the normalized ratio value corresponding to each partition is calculated according to the number of defect points corresponding to each partition, normalization processing needs to be performed on the area corresponding to each partition as well: firstly, determining the area corresponding to a to-be-detected defect point diagram and the area corresponding to each partition; then, substituting the number of defect points corresponding to each partition, the area corresponding to each partition and the area corresponding to the defect point diagram to be detected into a preset algorithm, thereby calculating a normalized ratio corresponding to each partition, wherein the preset algorithm specifically comprises the following steps:
wherein n is the number corresponding to the plurality of partitions, and the value range of i is [1, n]，AiIs the normalized ratio value, X, corresponding to the ith partitioniNumber of defective points corresponding to ith division, STFor the area corresponding to the point diagram of the defect to be detected, SiIs the area corresponding to the ith division, X1Number of defective points corresponding to 1 st division, S1Area corresponding to 1 st division, X2Number of defective points corresponding to the 2 nd partition, S2Area … X for the 2 nd partitionnNumber of defective points corresponding to nth partition, SnThe area corresponding to the nth partition.
205. And amplifying the plurality of normalized ratio values and variance threshold values.
In the embodiment of the present invention, since the computed normalized ratio values are smaller in operand magnitude, in order to facilitate the computation, the terminal device needs to perform amplification processing on the normalized ratio values and the variance threshold. Specifically, in this step, when the terminal device performs amplification processing on a plurality of normalization ratio values, each normalization ratio value may be amplified by using a preset amplification factor; when the variance threshold is amplified, a square value of the preset amplification factor may be calculated first, and then the variance threshold is amplified by using the square value of the preset amplification factor, where the preset amplification factor may be, but is not limited to: 50. 100, 200, etc.
206. And calculating variance values corresponding to the plurality of normalized ratio values after amplification processing.
In the embodiment of the present invention, after the terminal device performs amplification processing on the plurality of normalized ratio values, the variance values corresponding to the plurality of amplified normalized ratio values may be calculated, that is, the average value corresponding to the plurality of amplified normalized ratio values is calculated first, and then the plurality of amplified normalized ratio values and the calculated average value are substituted into the variance calculation formula, so that the variance values corresponding to the plurality of amplified normalized ratio values may be calculated.
207. And judging whether the variance values corresponding to the plurality of normalized ratio values after amplification are larger than the variance threshold value after amplification.
In the embodiment of the present invention, after calculating the variance values corresponding to the amplified normalized ratio values, the terminal device may determine whether the calculated variance values are greater than the amplified variance threshold, so as to determine whether the defect points in the defect point diagram to be detected have aggregation according to the determination result.
208. And if so, determining that the defect points in the defect point diagram to be detected have aggregative property.
In step 208, if yes, it is determined that the defect points in the defect point diagram to be detected have aggregative property, reference may be made to the description of the corresponding portion in fig. 1, and details of the embodiment of the present invention will not be described here again.
In order to achieve the above object, according to another aspect of the present invention, an embodiment of the present invention further provides an electronic device, including: the device comprises a memory, a processor and a program which is stored on the memory and can run on the processor, wherein when the processor executes the program, the method for detecting the defect point aggregations is realized.
In order to achieve the above object, according to another aspect of the present invention, there is also provided a computer-readable storage medium, on which a computer program is stored, where the computer program is executed to implement the above method for detecting defect point aggregations.
Further, as an implementation of the method shown in fig. 1 and fig. 3, an embodiment of the present invention provides an apparatus for detecting defective dot aggregability. The embodiment of the apparatus corresponds to the embodiment of the method, and for convenience of reading, details in the embodiment of the apparatus are not repeated one by one, but it should be clear that the apparatus in the embodiment can correspondingly implement all the contents in the embodiment of the method. The apparatus is applied to improve the efficiency and accuracy of detecting whether a defect point in a defect point diagram has aggregative properties, and specifically, as shown in fig. 4, the apparatus includes:
an obtaining unit 301, configured to obtain a defect point diagram to be detected, a partition mode, a partition number, and a variance threshold;
an area dividing unit 302, configured to perform area division processing on the to-be-detected defect point map according to the partition manner and the partition number acquired by the acquiring unit 301, so as to obtain a plurality of partitions;
a first determining unit 303, configured to determine the number of defect points corresponding to each partition;
a first calculating unit 304, configured to calculate a normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition determined by the first determining unit 303;
a second calculating unit 305, configured to calculate variance values corresponding to a plurality of the normalized ratio values;
a judging unit 306 for judging whether the variance value calculated by the second calculating unit 305 is larger than the variance threshold;
a second determining unit 307, configured to determine that the defect points in the defect point diagram to be detected have aggregative property when the determining unit 306 determines that the variance value is greater than the variance threshold.
Further, as shown in fig. 5, the partition manner is a vertical partition manner or a horizontal partition manner; the first calculation unit 304 includes:
a first calculating module 3041, configured to calculate, according to the number of defect points corresponding to each partition, the number of defect points corresponding to the defect point diagram to be detected;
a second calculating module 3042, configured to calculate a ratio of the number of defective points corresponding to each partition to the number of defective points corresponding to the defect point diagram to be detected, so as to obtain a normalized ratio value corresponding to each partition.
Further, as shown in fig. 5, the partition mode is a positive oblique partition mode or a negative oblique partition mode; the first calculation unit 304 includes:
a determining module 3043, configured to determine an area corresponding to the to-be-detected defect point diagram and an area corresponding to each partition;
a third calculating module 3044, configured to substitute the number of defect points corresponding to each partition, the area corresponding to each partition, and the area corresponding to the to-be-detected defect point map into a preset algorithm, and calculate a normalized ratio value corresponding to each partition.
Further, as shown in fig. 5, the apparatus further includes:
a first amplifying unit 308, configured to, after the first calculating unit 304 calculates the normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition, perform amplification processing on each normalized ratio value by using a preset amplification factor;
a third calculating unit 309, configured to calculate a square value of the preset magnification;
a second amplification unit 310, configured to perform amplification processing on the variance threshold value using the square value calculated by the third calculation unit 309;
a second calculating unit 305, specifically configured to calculate variance values corresponding to the amplified normalized ratio values;
the determining unit 306 is specifically configured to determine whether a variance value corresponding to the amplified multiple normalized occupying rate values is greater than the variance threshold after amplification.
Further, as shown in fig. 5, the partition manner is any one of a vertical partition manner, a horizontal partition manner, a positive oblique partition manner, and a negative oblique partition manner.
In summary, embodiments of the present invention provide a method and an apparatus for detecting defect point aggregations, compared with the prior art that a manual detection method is used to detect whether defect points in a defect point diagram have aggregations, the method and the apparatus of the present invention can perform region segmentation processing on a defect point diagram to be detected according to a partition mode and a partition number by a terminal device after the terminal device obtains the defect point diagram to be detected drawn by an AOI detection device and the partition mode, the partition number, and a variance threshold set by a worker according to a detection requirement, so as to obtain a plurality of partitions; after determining the number of defect points corresponding to each partition, the terminal device calculates a normalized occupation value corresponding to each partition according to the number of defect points corresponding to each partition, and calculates variance values corresponding to a plurality of normalized occupation values; when the terminal equipment judges that the variance values corresponding to the plurality of normalized ratio values are larger than the variance threshold value, the defect points in the defect point diagram to be detected can be determined to have aggregation. Because the terminal equipment detects whether the defect points in the defect point diagram have aggregative property, the detection efficiency for detecting whether the defect points in the defect point diagram have aggregative property can be improved; and, the terminal device can detect a plurality of defect point maps using the same detection criteria, and therefore, can improve the accuracy of detecting whether or not the defect points in the defect point maps have aggregations.
The device for detecting defect point aggregations comprises a processor and a memory, wherein the acquisition unit, the area division unit, the first determination unit, the first calculation unit, the second calculation unit, the judgment unit, the second determination unit and the like are stored in the memory as program units, and the processor executes the program units stored in the memory to realize corresponding functions.
The processor comprises a kernel, and the kernel calls the corresponding program unit from the memory. The kernel can be set to be one or more than one, and the kernel parameters are adjusted to improve the efficiency and accuracy of detecting whether the defect points in the defect point diagram have aggregative property.
The memory may include volatile memory in a computer readable medium, Random Access Memory (RAM) and/or nonvolatile memory such as Read Only Memory (ROM) or flash memory (flash RAM), and the memory includes at least one memory chip.
An embodiment of the present invention provides an electronic device, including: the device comprises a memory, a processor and a program which is stored on the memory and can run on the processor, wherein when the processor executes the program, the method for detecting the defect point aggregations is realized.
An embodiment of the present invention provides a computer-readable storage medium, on which a computer program is stored, where the computer program is executed to implement the method for detecting defect point aggregations described above.
The embodiment of the invention provides equipment, which comprises a processor, a memory and a program which is stored on the memory and can run on the processor, wherein the processor executes the program and realizes the following steps:
acquiring a to-be-detected defect point diagram, a partition mode, partition quantity and a variance threshold;
performing area segmentation processing on the to-be-detected defect point diagram according to the partition mode and the partition number to obtain a plurality of partitions;
determining the number of defect points corresponding to each partition, and calculating the normalized occupation ratio value corresponding to each partition according to the number of defect points corresponding to each partition;
calculating variance values corresponding to the plurality of normalized ratio values;
judging whether the variance value is larger than the variance threshold value;
and if so, determining that the defect points in the defect point diagram to be detected have aggregative property.
Further, the partition mode is a vertical partition mode or a horizontal partition mode; the calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition includes:
calculating the number of the defective points corresponding to the to-be-detected defective point diagram according to the number of the defective points corresponding to each partition;
and calculating the ratio of the number of the defective points corresponding to each partition to the number of the defective points corresponding to the defect point diagram to be detected so as to obtain the normalized ratio corresponding to each partition.
Further, the partition mode is a positive oblique partition mode or a negative oblique partition mode; the calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition includes:
determining the area corresponding to the to-be-detected defect point diagram and the area corresponding to each partition;
and substituting the number of the defect points corresponding to each partition, the area corresponding to each partition and the area corresponding to the to-be-detected defect point diagram into a preset algorithm, and calculating the normalized ratio corresponding to each partition.
Further, after the calculating the normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition, the method further includes:
amplifying each normalized ratio value by using a preset amplification factor;
calculating a square value of the preset amplification factor, and amplifying the variance threshold value by using the square value;
the calculating the variance values corresponding to the plurality of normalized ratio values includes:
calculating variance values corresponding to the plurality of the normalized ratio values after amplification processing;
the determining whether the variance value is greater than the variance threshold includes:
and judging whether the variance values corresponding to the plurality of amplified normalized ratio values are larger than the variance threshold value after amplification.
Further, the partition mode is any one of a vertical partition mode, a horizontal partition mode, a positive oblique partition mode and a negative oblique partition mode.
The device herein may be a server, a PC, etc.
The present application further provides a computer program product adapted to perform program code for initializing the following method steps when executed on a data processing device: acquiring a to-be-detected defect point diagram, a partition mode, partition quantity and a variance threshold; performing area segmentation processing on the to-be-detected defect point diagram according to the partition mode and the partition number to obtain a plurality of partitions; determining the number of defect points corresponding to each partition, and calculating the normalized occupation ratio value corresponding to each partition according to the number of defect points corresponding to each partition; calculating variance values corresponding to the plurality of normalized ratio values; judging whether the variance value is larger than the variance threshold value; and if so, determining that the defect points in the defect point diagram to be detected have aggregative property.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
In a typical configuration, a computing device includes one or more processors (CPUs), input/output interfaces, network interfaces, and memory.
The memory may include forms of volatile memory in a computer readable medium, Random Access Memory (RAM) and/or non-volatile memory, such as Read Only Memory (ROM) or flash memory (flash RAM). The memory is an example of a computer-readable medium.
Computer-readable media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), Static Random Access Memory (SRAM), Dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), Read Only Memory (ROM), Electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), Digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include transitory computer readable media (trahsity media) such as modulated data signals and carrier waves.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in the process, method, article, or apparatus that comprises the element.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The above are merely examples of the present application and are not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (10)
1. A method of detecting defective spot aggregability, the method comprising:
acquiring a defect point diagram to be detected, a partition mode, the partition number and a variance threshold, wherein the partition mode is any one of a vertical partition mode, a transverse partition mode, a positive oblique partition mode and a negative oblique partition mode;
performing area segmentation processing on the to-be-detected defect point diagram according to the partition mode and the partition number to obtain a plurality of partitions;
determining the number of defect points corresponding to each partition, and calculating the normalized occupation ratio value corresponding to each partition according to the number of defect points corresponding to each partition;
calculating variance values corresponding to the plurality of normalized ratio values;
judging whether the variance value is larger than the variance threshold value;
and if so, determining that the defect points in the defect point diagram to be detected have aggregative property.
2. The method according to claim 1, wherein the partition manner is a vertical partition manner or a horizontal partition manner; the calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition includes:
calculating the number of the defective points corresponding to the to-be-detected defective point diagram according to the number of the defective points corresponding to each partition;
and calculating the ratio of the number of the defective points corresponding to each partition to the number of the defective points corresponding to the defect point diagram to be detected so as to obtain the normalized ratio corresponding to each partition.
3. The method according to claim 1, wherein the partition manner is a positive slant partition manner or a negative slant partition manner; the calculating the normalized ratio value corresponding to each partition according to the number of the defect points corresponding to each partition includes:
determining the area corresponding to the to-be-detected defect point diagram and the area corresponding to each partition;
and substituting the number of the defect points corresponding to each partition, the area corresponding to each partition and the area corresponding to the to-be-detected defect point diagram into a preset algorithm, and calculating the normalized ratio corresponding to each partition.
4. The method according to any one of claims 1-3, wherein after said calculating the normalized ratio value for each of the partitions according to the number of defect points for each of the partitions, the method further comprises:
amplifying each normalized ratio value by using a preset amplification factor;
calculating a square value of the preset amplification factor, and amplifying the variance threshold value by using the square value;
the calculating the variance values corresponding to the plurality of normalized ratio values includes:
calculating variance values corresponding to the plurality of the normalized ratio values after amplification processing;
the determining whether the variance value is greater than the variance threshold includes:
and judging whether the variance values corresponding to the plurality of amplified normalized ratio values are larger than the variance threshold value after amplification.
5. An apparatus for detecting defective spot aggregations, the apparatus comprising:
the device comprises an acquisition unit, a detection unit and a control unit, wherein the acquisition unit is used for acquiring a defect point diagram to be detected, a partition mode, the partition number and a variance threshold, and the partition mode is any one of a vertical partition mode, a transverse partition mode, a positive oblique partition mode and a negative oblique partition mode;
the area dividing unit is used for carrying out area dividing processing on the to-be-detected defect point diagram according to the partition mode and the partition number acquired by the acquiring unit so as to acquire a plurality of partitions;
a first determining unit, configured to determine the number of defect points corresponding to each partition;
a first calculating unit, configured to calculate a normalized ratio value corresponding to each partition according to the number of defect points corresponding to each partition determined by the first determining unit;
the second calculation unit is used for calculating variance values corresponding to the plurality of normalized ratio values;
a judgment unit configured to judge whether the variance value calculated by the second calculation unit is larger than the variance threshold;
and the second determining unit is used for determining that the defect points in the defect point diagram to be detected have aggregative property when the judging unit judges that the variance value is larger than the variance threshold value.
6. The apparatus of claim 5, wherein the partition manner is a vertical partition manner or a horizontal partition manner; the first calculation unit includes:
the first calculating module is used for calculating the number of the defective points corresponding to the to-be-detected defective point diagram according to the number of the defective points corresponding to each partition;
and the second calculating module is used for calculating the ratio of the number of the defective points corresponding to each partition to the number of the defective points corresponding to the defect point diagram to be detected so as to obtain the normalized ratio corresponding to each partition.
7. The apparatus of claim 5, wherein the partition manner is a positive slope partition manner or a negative slope partition manner; the first calculation unit includes:
the determining module is used for determining the area corresponding to the to-be-detected defect point diagram and the area corresponding to each partition;
and the third calculating module is used for substituting the number of the defective points corresponding to each partition, the area corresponding to each partition and the area corresponding to the to-be-detected defective point diagram into a preset algorithm, and calculating the normalized ratio corresponding to each partition.
8. The apparatus of any one of claims 5-7, further comprising:
the first amplification unit is used for performing amplification processing on each normalization ratio value by using a preset amplification factor after the first calculation unit calculates the normalization ratio value corresponding to each partition according to the number of defect points corresponding to each partition;
the third calculation unit is used for calculating a square value of the preset magnification;
a second amplification unit configured to amplify the variance threshold using the square value calculated by the third calculation unit;
the second calculating unit is specifically configured to calculate variance values corresponding to the amplified plurality of normalized ratio values;
the judgment unit is specifically configured to judge whether a variance value corresponding to the amplified multiple normalized occupation ratio values is greater than the variance threshold value after amplification.
9. An electronic device, comprising: memory, processor and program stored on the memory and executable on the processor, which when executed by the processor performs the method of detecting defective spot aggregations according to any of claims 1-4.
10. A computer-readable storage medium, on which a computer program is stored, which program, when running, carries out the method of detecting defective dot aggregations according to any one of claims 1-4.
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| CN111403309A (en) * | 2020-03-30 | 2020-07-10 | 上海华力集成电路制造有限公司 | Wafer aggregation-like defect detection method and detection system thereof |
| US11972548B2 (en) | 2020-12-03 | 2024-04-30 | Boe Technology Group Co., Ltd. | Computer-implemented method for defect analysis, apparatus for defect analysis, computer-program product, and intelligent defect analysis system |
| TWI808595B (en) * | 2022-01-03 | 2023-07-11 | 友達光電股份有限公司 | Method for analyzing defect |
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| CN101432864A (en) * | 2006-04-27 | 2009-05-13 | 夏普株式会社 | Method and system for classifying defect distribution, method and system for specifying causative equipment, computer program and recording medium |
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