CN109883194B - Semi-hole brazing hot-forming furnace for TO tube base plate of semiconductor laser - Google Patents
Semi-hole brazing hot-forming furnace for TO tube base plate of semiconductor laser Download PDFInfo
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- CN109883194B CN109883194B CN201910212035.4A CN201910212035A CN109883194B CN 109883194 B CN109883194 B CN 109883194B CN 201910212035 A CN201910212035 A CN 201910212035A CN 109883194 B CN109883194 B CN 109883194B
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Abstract
The invention belongs TO the technical field of TO tube seat production equipment, and aims TO provide a semi-hole brazing hot junction furnace for a TO tube seat plate of a semiconductor laser, which has the technical scheme that the semi-hole brazing hot junction furnace comprises a hot junction furnace body, wherein a feed inlet and a discharge outlet are respectively arranged at two ends of the hot junction furnace body, work tables are respectively arranged at two ends of the hot junction furnace body, a transmission belt is arranged on each work table and penetrates through the hot junction furnace body, the transmission belts are transmission silk screens, cooling devices are respectively arranged at the lower ends of the two work tables, and the transmission belts penetrate through the cooling devices; according TO the semi-hole brazing heat-sealing furnace for the TO tube base plate of the semiconductor laser, the cooling device is arranged, and the two sections of cooling devices are used for cooling the transmission belt, so that the transmission belt is prevented from being oxidized and fatigued at high temperature for a long time, the transmission belt is kept at a good performance, and a graphite positioning die is driven TO perform stable transmission.
Description
Technical Field
The invention relates TO the technical field of TO tube seat production equipment, in particular TO a semi-hole brazing hot junction furnace for a TO tube seat plate of a semiconductor laser.
Background
The semiconductor laser has the advantages of small volume, light weight, high efficiency, long service life, easy modulation, low price and the like, and is widely applied to the fields of industry, medicine and military, such as material processing, optical fiber communication, laser ranging, target indication, laser guidance, laser radar, space optical communication and the like. Most of the existing semiconductor lasers are packaged by TO tube seats, and the stability of the TO tube seats directly influences the normal operation of the semiconductor lasers.
For example, chinese patent publication No. CN101888057B discloses a method for manufacturing a laser diode package housing, a sintering apparatus for a semiconductor device disclosed in chinese patent publication No. CN202304373U, and a chain contact heating sintering furnace for sintering and packaging semiconductor chips disclosed in chinese patent publication No. CN 201059867.
Combine the sintering process of understanding semiconductor laser TO tube socket that above-mentioned patent can be clear, the fritting furnace generally divide into the preheating zone, the sintering zone, cooling zone, drive the normal operating that the in-process that graphite positioning die carries out the sintering at the transmission band needs TO guarantee the transmission band, and carry out segmentation cooling TO the transmission band simultaneously, prevent that high temperature from producing the transmission band oxidation high temperature fatigue, but cooling device among the prior art generally adopts the water cooling, although the mode of water cooling is easy TO carry out, water in the water cooling generally is static, the temperature after carrying out the cooling TO the transmission band for a long time can rise, thereby it is not good TO the continuous cooling effect of transmission band, lead TO the performance change of transmission band, phenomenons such as fracture can appear, thereby influence the production of whole TO tube socket.
Disclosure of Invention
The invention provides a semi-hole brazing and sintering furnace for a TO tube base plate of a semiconductor laser, which has the advantages of good cooling effect on a transmission belt and capability of ensuring the stability of the performance of the transmission belt.
The technical purpose of the invention is realized by the following technical scheme:
the utility model provides a semi-bore brazing hot junction stove of semiconductor laser TO tube panel, includes the hot junction furnace body, the both ends of hot junction furnace body are provided with feed inlet and discharge gate respectively, the both ends of hot junction furnace body all are provided with the workstation, be provided with the transmission band on the workstation, the transmission band runs through in the hot junction furnace body, the transmission band is transmission silk screen, the hot junction furnace body includes preheating zone, thermostatic zone and cooling space, all separate, two through sealed baffle between preheating zone, thermostatic zone and the cooling space the lower extreme of workstation all is provided with cooling device, the transmission band is worn TO establish in cooling device, cooling device is including setting up the cooling box body in the workstation below, setting up first cooling zone and the second cooling zone in the cooling box body, setting up the dry section in the cooling box body.
Through adopting above-mentioned technical scheme, the transmission band drives graphite positioning mould and gets into in the hot junction furnace body from the feed inlet, graphite positioning mould gets into the preheating zone in proper order, thermostatic zone and cooling space, it can guarantee that semiconductor chip is difficult for receiving the high temperature influence to heat up in the sintering furnace gradually, guarantee its original parameter and nature, improve production quality, the transmission band rotation need be opened at the in-process of sintering, utilize two sections cooling device to cool off the transmission band, prevent long-time high temperature from with transmission band oxidation and high temperature fatigue, make the transmission band keep good performance, it carries out stable transmission to drive graphite positioning mould.
Further setting: the first cooling section comprises three first partition plates fixedly connected in the cooling box body, a first water inlet pipe arranged at the upper end of each first partition plate, and a drain pipe communicated with the lower end of each first partition plate.
Through adopting above-mentioned technical scheme, first inlet tube pours into cold water into in to first cooling zone into, and cold water cools off the transmission band, and the continuous circulation of cold water in the first cooling zone can be guaranteed with first inlet tube to the drain pipe to can guarantee that the temperature in the first cold water section keeps at lower state, thereby can guarantee the cooling effect of transmission band.
Further setting: the second cooling section comprises a second partition plate fixedly connected in the cooling box body, a second water inlet pipe communicated with the cooling box body in a penetrating and inserting mode, a first fixing ring communicated with the lower end of the second water inlet pipe, a first flow guide channel arranged in the first fixing ring, and a spray head fixedly connected to the inner side of the first fixing ring, and the second water inlet pipe and the spray head are communicated with the first flow guide channel.
Through adopting above-mentioned technical scheme, let in cold water in to the second intake pipe, start the shower nozzle, annular shower nozzle can be to the surface spray cold water in transmission area to can carry out certain cooling action to the transmission area, make the transmission area can have certain cooling effect of cooling when step-by-step, make the transmission area can keep the low temperature state, avoid long-time high temperature to form certain damage to the transmission area.
Further setting: one side of second cooling zone is provided with the third cooling zone, the second connecting rod of fixed connection in the cooling box, set up the induced air that leads to the groove in the second connecting rod, lead to the intake pipe that the groove communicates with the induced air, with the solid fixed ring of second connecting rod lower extreme fixed connection, set up the second water conservancy diversion passageway in the second fixed ring, set up the inboard air outlet in the solid fixed ring of second, the induced air leads to the groove and is linked together with second water conservancy diversion passageway.
Through adopting above-mentioned technical scheme, let in the cooling air in to the air-intake pipe, the cooling air leads to groove and second water conservancy diversion passageway and blows off from the air outlet and act on the transmission band through the induced air, remains the cooling water on the transmission band, and the effect of the air-cooling of letting in again makes the temperature on transmission band surface lower to can play good cooling effect to the transmission band with the cooling water cooperation, guarantee the stability of transmission band transmission.
Further setting: the first cooling section and the second cooling section are alternately provided with a plurality of groups.
Through adopting above-mentioned technical scheme, first cooling zone sets up with the second cooling zone in turn and can make the transmission band refrigerated effect and refrigerated speed faster under the dual function of cooling water and cooling air, guarantees the low temperature state of transmission band.
Further setting: the drying section comprises a fan fixedly connected to the outer side of the cooling box body and an air inlet pipeline communicated with the fan, and the air inlet pipeline is communicated and inserted into the cooling box body and acts on the conveying belt.
Through adopting above-mentioned technical scheme, start the fan, the fan can be to the air inlet pipe in through like dry wind, dry wind from the air inlet pipe in the air outlet and act on the transmission band, dry wind can carry out the drying to remaining cooling water on the transmission band, make the transmission band can keep dry state after the cooling.
Further setting: the sealing baffle comprises two parallel foamed cement boards and aluminum silicate heat-insulating cotton arranged between the two foamed cement boards.
Through adopting above-mentioned technical scheme, sealing baffle can distinguish preheating zone, thermostatic zone and cooling space, and foaming cement board and aluminium silicate heat preservation cotton homoenergetic can play the thermal-insulated effect of heat preservation, can separate the temperature in the different intervals TO guarantee that the TO tube socket can reach different states in the interval of difference, make the effect of brazing of TO tube socket better.
Further setting: the sealing device is characterized in that a sealing through groove is formed in the sealing baffle, a sealing partition plate is connected in the sealing through groove in a sliding mode and linked with the air cylinder, and the lower end of the sealing partition plate is attached to the upper end of the transmission belt.
Through adopting above-mentioned technical scheme, sealed baffle is the shrink state under normal condition, can drive graphite positioning mould together step-by-step pass the interval that gets into the difference from sealed logical groove when the transmission band is step-by-step, cool off the transmission band when needs, but can start the cylinder when the semiconductor weldment among the graphite positioning mould still needs the heating, make the cylinder promote sealed baffle, sealed baffle laminates with the upper end of transmission band mutually, thereby can be when the step-by-step cooling of transmission band, graphite positioning mould still is detained and preheats in an interval, heating or cooling, guarantee the effect of brazing to semiconductor parts.
In conclusion, the invention has the following beneficial effects:
1. the first cooling section and the second cooling section cool the conveying belt to a certain extent by changing the cooling mode of cooling water, so that the conveying belt is cooled more thoroughly, and the conveying quality of the conveying belt is ensured;
2. the second cooling section and the third cooling section can be combined to alternately cool the conveying belt, so that ears of the conveying belt can be cooled more thoroughly, and the quality of the conveying belt can be ensured;
3. the drying section can dry water retained on the conveying belt in the air, so that the circulating transmission of the conveying belt is ensured;
4. the arrangement of the sealing partition plate can cool the conveying belt and maintain the normal working flow of the semiconductor parts.
Drawings
FIG. 1 is a schematic view showing the overall structure of a brazing heat-bonding furnace;
FIG. 2 is a schematic view showing the internal structure of the hot-junction furnace;
FIG. 3 is a schematic view showing a specific structure for embodying the cooling apparatus;
FIG. 4 is a schematic diagram showing a detailed structure of the second cooling section and the drying section;
fig. 5 is an enlarged schematic view of a structure at a in fig. 4.
In the figure, 1, a hot junction furnace body; 111. a preheating zone; 112. a constant temperature area; 113. a cooling zone; 2. a feed inlet; 3. a discharge port; 4. a work table; 5. a conveyor belt; 6. sealing the baffle; 61. a foamed cement board; 62. aluminum silicate heat preservation cotton; 63. sealing the through groove; 64. sealing the partition plate; 7. a cooling device; 71. cooling the box body; 72. a first cooling section; 721. a first separator; 722. a first water inlet pipe; 723. a drain pipe; 73. a second cooling section; 731. a second separator; 733. a second water inlet pipe; 734. a first retaining ring; 735. a first flow guide passage; 736. a spray head; 74. a drying section; 741. a fan; 742. an air inlet pipeline; 8. a third cooling section; 81. a second connecting rod; 82. an induced air through groove; 83. an air inlet pipe; 84. a second retaining ring; 85. a second flow guide channel; 86. an air outlet; 9. and a cylinder.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Example (b): a semi-hole brazing and heat-bonding furnace for a TO tube seat plate of a semiconductor laser, which is disclosed in the invention patent with the publication number of CN101888057B, comprises a heat-bonding furnace body 1, wherein a feed inlet 2 and a discharge outlet 3 are respectively arranged at two ends of the heat-bonding furnace body 1, two ends of the heat-bonding furnace body 1 are respectively provided with a workbench 4, a transmission belt 5 is arranged on each workbench 4, the transmission belts 5 penetrate through the heat-bonding furnace body 1, the transmission belts 5 are transmission silk screens (not shown in the figure), the lower ends of the two workbenches 4 are respectively provided with a cooling device 7, the transmission belts 5 penetrate through the cooling devices 7, the transmission belts 5 are started, the transmission belts 5 can drive graphite positioning molds TO move, the graphite positioning molds enter the heat-bonding furnace TO sinter the TO tube seats of the semiconductor, and the cooling devices 7 can play a certain role in cooling the transmission belts 5 in the operation process of the transmission belts 5, so that good running of the conveyor belt 5 can be ensured.
As shown in fig. 2, the hot junction furnace body 1 includes a preheating zone 111, a constant temperature zone 112 and a cooling zone 113, the preheating zone 111, the constant temperature zone 112 and the cooling zone 113 are separated from each other by a sealing baffle 6, when a TO tube seat in a graphite positioning mold is driven by a transmission belt 5 TO enter the hot junction furnace, the TO tube seat can be better sintered, the sealing baffle 6 includes two parallel foamed cement boards 61, aluminum silicate heat preservation cotton 62 arranged between the two foamed cement boards 61, the sealing baffle 6 can distinguish the preheating zone 111, the constant temperature zone 112 and the cooling zone 113, the foamed cement boards 61 and the aluminum silicate heat preservation cotton 62 can both play a heat preservation and insulation effect, the temperature in different zones can be separated, thereby ensuring that the TO tube seat can reach different states in different zones, and the brazing effect of the TO tube seat is better.
As shown in fig. 2, a sealing through groove 63 is formed in the sealing baffle 6, a sealing partition plate 64 is slidably connected in the sealing through groove 63, a cylinder 9 is fixedly connected to the outer side of the cooling box 71, the sealing partition plate 64 is linked with the cylinder 9, the lower end of the sealing partition plate 64 is attached to the upper end of the transmission belt 5, the cylinder 9 is started, the cylinder 9 can support the sealing partition plate 64, the sealing partition plate 64 is abutted to the upper end of the transmission belt 5, and therefore the graphite positioning mold can be retained in an interval to continue sintering when the transmission belt 5 is stepped, and the brazing effect of the semiconductor part is guaranteed.
As shown in fig. 3, the cooling device 7 includes a cooling tank 71 disposed below the working table 4, a first cooling section 72 and a second cooling section 73 disposed in the cooling tank 71, and a drying section 74 disposed in the cooling tank 71, wherein the first cooling section 72 includes three first partitions 721 fixedly connected in the cooling tank 71, a first water inlet pipe 722 disposed at an upper end of the first partitions 721, and a water outlet pipe 723 communicated with a lower end of the first partitions 721, and the water outlet pipe 723 and the first water inlet pipe 722 can ensure continuous circulation of cold water in the first cooling section 72, so that a water temperature in the first cold water section can be kept at a low state, and a cooling effect of the conveyor belt 5 can be ensured.
As shown in fig. 4, the second cooling section 73 includes a second partition 731 fixedly connected in the cooling box 71, a second water inlet tube 733 inserted in the cooling box 71, a first fixing ring 734 communicated with a lower end of the second water inlet tube 733, a first flow guide channel 735 arranged in the first fixing ring 734, and a nozzle 736 fixedly connected inside the first fixing ring 734, wherein the second water inlet tube 733 and the nozzle 736 are communicated with the first flow guide channel 735, cold water is introduced into the second water inlet tube 733, the nozzle 736 is started, and the annular nozzle 736 can spray cold water on the surface of the conveying belt 5, so that the conveying belt 5 can be cooled to a certain extent, the conveying belt 5 can have a certain cooling effect when being stepped, the conveying belt 5 can be kept at a low temperature state, and the conveying belt 5 is prevented from being damaged to a certain extent due to a long-time high temperature.
As shown in fig. 5, a third cooling section 8 is disposed on one side of the second cooling section 73, a plurality of sets of the second cooling section 73 and the third cooling section 8 are alternately disposed, the third cooling section 8 includes a second connecting rod 81 fixedly connected in the cooling box 71, an air inducing through groove 82 formed in the second connecting rod 81, an air inlet pipe 83 communicated with the air inducing through groove 82, a second fixing ring 84 fixedly connected with a lower end of the second connecting rod 81, a second diversion channel 85 formed in the second fixing ring 84, and an air outlet 86 formed inside the second fixing ring 84, the air inducing through groove 82 is communicated with the second diversion channel 85, cooling air is introduced into the air inlet pipe 83, the cooling air passes through the air inducing through groove 82 and the second diversion channel 85 and blows out from the air outlet 86 to the conveying belt 5, cooling water remains on the conveying belt 5, and the surface of the conveying belt 5 is cooled by the action of the cooling air, thereby can play good cooling effect to transmission band 5 with the cooling water cooperation, guarantee the stability of transmission band 5.
As shown in fig. 4, the drying section 74 includes a fan 741 fixedly connected to the outside of the cooling box 71, and an air inlet duct 742 communicated with the fan 741, the air inlet duct 742 is inserted into the cooling box 71 and acts on the conveyor 5, a plurality of air inlet ducts 742 may be provided, the fan 741 may be linked with the air inlet pipe 83 to start the fan 741, the fan 741 may pass dry air into the air inlet duct 742, the dry air is discharged from the air inlet duct 742 and acts on the conveyor 5, and the dry air can dry the cooling water remaining on the conveyor 5, so that the conveyor 5 can maintain a dry state after being cooled.
The specific working process is as follows: start transmission band 5, transmission band 5 drives graphite positioning mould and removes and get into hot junction furnace and sinter, when needs carry out the refrigerated to transmission band 5, open cylinder 9, make cylinder 9 support and move sealed partition plate 64 and carry out certain spacing to graphite positioning mould, transmission band 5 can cool off, let in cold water in to first inlet tube 722, cold water cools off transmission band 5, the continuous circulation of cold water in first cooling zone 72 can be guaranteed with first inlet tube 722 to drain pipe 723, cool down the cooling to transmission band 5.
The cold water is introduced into the second water inlet pipe 733, the spray head 736 is started, the annular spray head 736 can spray cold water to the surface of the transmission belt 5, the fan 741 is started simultaneously, cooling air is introduced into the air inlet pipe 83, the cooling air passes through the induced air through groove 82 and the second diversion channel 85 and is blown out from the air outlet 86 to act on the transmission belt 5, cooling water is remained on the transmission belt 5, the cooling air enters the transmission belt to lower the surface temperature of the transmission belt 5, and therefore the cooling water can be matched with the cooling water to achieve a good cooling effect on the transmission belt 5.
The fan 741 can supply dry air into the air inlet duct 742, the dry air is discharged from the air inlet duct 742 and acts on the conveyor belt 5, and the dry air can dry the cooling water remaining on the conveyor belt 5, so that the conveyor belt 5 can be kept in a dry state after being cooled, and the graphite positioning mold can be normally driven to move.
The present invention is not limited to the specific embodiments, but can be modified as required by those skilled in the art after reading the present specification without any inventive contribution to the present invention, and all of the modifications are protected by patent laws within the scope of the claims.
Claims (3)
1. The utility model provides a semiconductor laser TO tube panel half bore braze welding thermojunction stove, includes thermojunction furnace body (1), the both ends of thermojunction furnace body (1) are provided with feed inlet (2) and discharge gate (3) respectively, the both ends of thermojunction furnace body (1) all are provided with workstation (4), be provided with transmission band (5) on workstation (4), transmission band (5) run through in thermojunction furnace body (1), transmission band (5) are the transmission silk screen, thermojunction furnace body (1) is including preheating zone (111), thermostatic zone (112) and cooling space (113), its characterized in that: the preheating area (111), the constant temperature area (112) and the cooling area (113) are separated by a sealing baffle (6), the lower ends of the two working tables (4) are respectively provided with a cooling device (7), the conveying belt (5) is arranged in the cooling device (7) in a penetrating manner, and the cooling device (7) comprises a cooling box body (71) arranged below the working tables (4), a first cooling section (72) and a second cooling section (73) arranged in the cooling box body (71) and a drying section (74) arranged in the cooling box body (71);
the first cooling section (72) comprises three first clapboards (721) fixedly connected in the cooling box body (71), a first water inlet pipe (722) arranged at the upper end of the first clapboards (721), and a water outlet pipe (723) communicated with the lower ends of the first clapboards (721);
the second cooling section (73) comprises a second clapboard (731) fixedly connected in the cooling box body (71), a second water inlet pipe (733) inserted in the cooling box body (71) in a penetrating way, a first fixing ring (734) communicated with the lower end of the second water inlet pipe (733), a first flow guide channel (735) arranged in the first fixing ring (734), and a spray head (736) fixedly connected to the inner side of the first fixing ring (734), wherein the second water inlet pipe (733) and the spray head (736) are communicated with the first flow guide channel (735);
a third cooling section (8) is arranged on one side of the second cooling section (73), the third cooling section (8) comprises a second connecting rod (81) fixedly connected in the cooling box body (71), an induced air through groove (82) formed in the second connecting rod (81), an air inlet pipe (83) communicated with the induced air through groove (82), a second fixing ring (84) fixedly connected with the lower end of the second connecting rod (81), a second flow guide channel (85) formed in the second fixing ring (84), and an air outlet (86) formed in the inner side of the second fixing ring (84), and the induced air through groove (82) is communicated with the second flow guide channel (85);
the first cooling sections (72) and the second cooling sections (73) are alternately provided with a plurality of groups;
the drying section (74) comprises a fan (741) fixedly connected to the outer side of the cooling box body (71) and an air inlet pipeline (742) communicated with the fan (741), and the air inlet pipeline (742) is inserted into the cooling box body (71) in a penetrating mode and acts on the conveying belt (5).
2. The semi-hole brazing heat-junction furnace for the TO tube base plate of the semiconductor laser as claimed in claim 1, wherein: the sealing baffle (6) comprises two parallel foamed cement boards (61) and aluminum silicate heat-insulating cotton (62) arranged between the two foamed cement boards (61).
3. The semi-hole brazing heat-junction furnace for the TO tube base plate of the semiconductor laser as claimed in claim 2, wherein: set up sealed logical groove (63) in sealed baffle (6), sliding connection has sealed baffle (64) in sealed logical groove (63), cooling box (71) outside fixedly connected with cylinder (9), sealed baffle (64) and cylinder (9) linkage, the lower extreme of sealed baffle (64) is laminated with the upper end of transmission band (5) mutually.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910212035.4A CN109883194B (en) | 2019-03-20 | 2019-03-20 | Semi-hole brazing hot-forming furnace for TO tube base plate of semiconductor laser |
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| CN201910212035.4A CN109883194B (en) | 2019-03-20 | 2019-03-20 | Semi-hole brazing hot-forming furnace for TO tube base plate of semiconductor laser |
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| CN109883194A CN109883194A (en) | 2019-06-14 |
| CN109883194B true CN109883194B (en) | 2020-09-04 |
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| JP2746048B2 (en) * | 1993-01-13 | 1998-04-28 | 三菱電機株式会社 | Conveyor conveyance type induction heating device |
| JP2003014375A (en) * | 2001-06-28 | 2003-01-15 | Rohm Co Ltd | Continuous calcination furnace apparatus for workpiece plate |
| CN100471606C (en) * | 2007-04-09 | 2009-03-25 | 盐城市康杰机械制造有限公司 | Intermittent type gas protecting soldering furnace |
| CN202377642U (en) * | 2011-12-31 | 2012-08-15 | 江西艾芬达卫浴有限公司 | Cooling device of mesh-belt type brazing furnace |
| CN105627743B (en) * | 2016-01-19 | 2018-06-22 | 深圳市三鑫精美特玻璃有限公司 | A kind of multilayer clean tunnel stove |
| CN106123582B (en) * | 2016-08-30 | 2018-09-18 | 广州帕夫斯特汽车零部件有限公司 | A kind of shortwave far infrared automobile disc brake pad ablator |
| CN208162808U (en) * | 2017-08-21 | 2018-11-30 | 托普工业(江苏)有限公司 | A kind of stainless steel high temperature soldering oven |
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