CN109879243B - 两平动一转动大行程无耦合大中空并联压电微动平台 - Google Patents
两平动一转动大行程无耦合大中空并联压电微动平台 Download PDFInfo
- Publication number
- CN109879243B CN109879243B CN201910091969.7A CN201910091969A CN109879243B CN 109879243 B CN109879243 B CN 109879243B CN 201910091969 A CN201910091969 A CN 201910091969A CN 109879243 B CN109879243 B CN 109879243B
- Authority
- CN
- China
- Prior art keywords
- rigid block
- table body
- edge
- flexible thin
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Machine Tool Units (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910091969.7A CN109879243B (zh) | 2019-01-30 | 2019-01-30 | 两平动一转动大行程无耦合大中空并联压电微动平台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910091969.7A CN109879243B (zh) | 2019-01-30 | 2019-01-30 | 两平动一转动大行程无耦合大中空并联压电微动平台 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109879243A CN109879243A (zh) | 2019-06-14 |
CN109879243B true CN109879243B (zh) | 2020-12-08 |
Family
ID=66927437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910091969.7A Active CN109879243B (zh) | 2019-01-30 | 2019-01-30 | 两平动一转动大行程无耦合大中空并联压电微动平台 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109879243B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6745567B1 (en) * | 2001-12-28 | 2004-06-08 | Zyvex Corporation | System and method for positional movement of microcomponents |
CN101710229A (zh) * | 2009-12-07 | 2010-05-19 | 天津大学 | 用于纳米压印光刻系统的两平动一转动精密定位工作台 |
CN105643604A (zh) * | 2016-03-25 | 2016-06-08 | 西安电子科技大学 | 一种四自由度微动柔顺系统 |
CN106737646A (zh) * | 2017-01-17 | 2017-05-31 | 西安交通大学 | 可实现平动和转动的三自由度压电驱动调节装置及方法 |
CN107673305A (zh) * | 2017-09-20 | 2018-02-09 | 宁波大学 | 一种两平动一转动三自由度并联柔性结构压电微动平台 |
CN109093598A (zh) * | 2018-08-30 | 2018-12-28 | 上海大学 | 一种三自由度并联微动平台 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8269395B2 (en) * | 2009-10-02 | 2012-09-18 | Siyuan He | Translating and rotation micro mechanism |
-
2019
- 2019-01-30 CN CN201910091969.7A patent/CN109879243B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6745567B1 (en) * | 2001-12-28 | 2004-06-08 | Zyvex Corporation | System and method for positional movement of microcomponents |
CN101710229A (zh) * | 2009-12-07 | 2010-05-19 | 天津大学 | 用于纳米压印光刻系统的两平动一转动精密定位工作台 |
CN105643604A (zh) * | 2016-03-25 | 2016-06-08 | 西安电子科技大学 | 一种四自由度微动柔顺系统 |
CN106737646A (zh) * | 2017-01-17 | 2017-05-31 | 西安交通大学 | 可实现平动和转动的三自由度压电驱动调节装置及方法 |
CN107673305A (zh) * | 2017-09-20 | 2018-02-09 | 宁波大学 | 一种两平动一转动三自由度并联柔性结构压电微动平台 |
CN109093598A (zh) * | 2018-08-30 | 2018-12-28 | 上海大学 | 一种三自由度并联微动平台 |
Also Published As
Publication number | Publication date |
---|---|
CN109879243A (zh) | 2019-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101862966B (zh) | 二自由度平动并联解耦微动平台 | |
US11159103B2 (en) | Six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform | |
CN103225728B (zh) | 一种压电陶瓷驱动的二维并联微动平台 | |
Polit et al. | Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing | |
CN106920578B (zh) | 二维恒力机构及具有该机构的定位平台 | |
US7218032B2 (en) | Micro position-control system | |
CN102962683B (zh) | 二自由度平动并联高带宽微动平台 | |
CN113464780B (zh) | 一种空间三平移自由度柔顺定位平台 | |
Gao et al. | Development of a novel flexure-based XY platform using single bending hybrid piezoelectric actuator | |
CN107834895B (zh) | 压电-电磁混合驱动的XYθz三自由度柔性作动器及方法 | |
CN110010190B (zh) | 三维恒力并联柔性微定位平台 | |
CN109879243B (zh) | 两平动一转动大行程无耦合大中空并联压电微动平台 | |
CN109650329B (zh) | 两转动一平动大行程无耦合并联压电微动平台 | |
CN111488000B (zh) | 内嵌偏角传感单元的级联放大二维指向调节装置及方法 | |
CN109879245B (zh) | 两平动一转动大行程无耦合并联压电微动平台 | |
CN109879244B (zh) | 两转动一平动大行程无耦合大中空并联压电微动平台 | |
CN109702500B (zh) | 两转动一平动大行程低厚度大中空并联压电微动平台 | |
CN109949856B (zh) | 一种基于柔性铰链的模块化六自由度精密微动机构 | |
Wang et al. | Development of a compact XYZ nanopositioner supporting optical scanning | |
CN116381892B (zh) | 一种基于直驱式气浮平台的二级宏微相机镜头调焦装置 | |
CN113880045A (zh) | 一平动两转动大行程无耦合大中空并联压电微动平台 | |
Kenton | Design, characterization, and control of a high-bandwidth serial-kinematic nanopositioning stage for scanning probe microscopy applications | |
CN115224975B (zh) | 一种倒置负载应用的正交解耦三轴纳米微动平台 | |
CN104385261B (zh) | 具有空间三自由度的平动装置及方法 | |
CN116155136B (zh) | 二自由度解耦大行程柔性结构微动平台 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20190614 Assignee: Zhejiang Yangji Technology Development Co.,Ltd. Assignor: Ningbo University Contract record no.: X2022980025282 Denomination of invention: Two translation and one rotation large stroke uncoupled large hollow parallel piezoelectric micro motion platform Granted publication date: 20201208 License type: Common License Record date: 20221207 |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20190614 Assignee: Ningbo Science and Technology Innovation Association Assignor: Ningbo University Contract record no.: X2023980033633 Denomination of invention: Two translational and one rotational large stroke uncoupled large hollow parallel piezoelectric micromotion platform Granted publication date: 20201208 License type: Common License Record date: 20230317 |