CN109876297A - A kind of implanted photoelectricity pacemaker and preparation method thereof - Google Patents
A kind of implanted photoelectricity pacemaker and preparation method thereof Download PDFInfo
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Abstract
The present invention relates to a kind of implanted photoelectricity pacemakers and preparation method thereof, the radial joint solar cell grown by gas-liquid-solid (VLS) growth mechanism is directly fabricated to photoelectricity pacemaker patch or pace-making line by the preparation method, or sour processing is used to it, the methods of ultrasound, the nanometer of acquisition injectable or micron-sized photoelectricity pacemaker, pass through patch, minimally invasive injection implant surgery, the photoelectricity pacemaker is applied in epicardial surface or is injected into myocardium surface layer, it can generate big open-circuit voltage or charge when receiving illumination in vivo, realize the stimulation to cardiac muscle, in no battery, make cardiac pacing under conditions of no conducting wire.The invention can reduce patient and replace the surgery cost of the somatic damage of power supply unit bring and great number, while reduce bring inflammatory reaction when conducting wire passes through vein；And the manufacture craft of semiconductor industry maturation is relied on, the solar battery structure of the photoelectricity pacemaker can be produced in batches, and low in cost.
Description
Technical field
The present invention relates to biological and medicinal implant material technical field, specifically a kind of implanted photoelectricity pacemaker
And preparation method thereof.
Background technique
Artificial cardiac pacemaker is a kind of a kind of clinically widely used implanted electronic equipment, can be by issuing rule
Electric pulse stimulation myocardial contraction.It is usually used in the treatment of the relevant sick sinus syndrome of heart or atrioventricular block, with
Restore patient's rhythm of the heart, improve patients ' life quality and extends patient vitals' period.
In general, pacemaker, by its internal battery powers, the service life of battery determines the service life of pacemaker, although
The progress of battery technology increased its memory capacity, but service life is still limited.Therefore, every 7 to 10 years, it is necessary to adopt
Battery is exhausted under embedment skin of chest with operation to change.Therefore, the pain and financial burden of patient are increased, and makes to fall ill
Rate increases or even there are potential mortality risks.
Due to a small amount of light, especially near infrared light, human skin can be penetrated, therefore researchs and proposes and can pass through photovoltaic
Effect, using solar battery, the sunlight that will transmit through skin is converted to electric energy, powers for pacemaker, to realize nothing
The pace-making of battery.Haeberlin etc. construct one can obtain energy from the sunlight of surrounding be subcutaneously implanted solar energy mould
Block, and by this solar energy module be successfully pacemaker power supply (A.Haeberlin, et al, Europace, 2014,16
(10):1534-1539.).Song etc. has made a kind of ultra-thin photovoltaic cell, by subcutaneously capture through skin histology light simultaneously
Then for pacemaker power, thus obtain in vivo higher levels of energy (K.Song, et al, AdvHealthc Mater,
2016,5(13):1572-1580.)。
However, the above method is similar to common business pacemaker, generally require these huge solar energy
Battery is implanted into the skin near clavicle, or is implanted subcutaneously, and need through intravenous delivery electro photoluminescence.This implantation may
Cause a series of side reaction disease, such as cause with through the relevant complication of vein, conducting wire displacement, vein obstruction, tricuspid valve pass
Close incomplete and endocarditis etc.；Cause infection relevant with subcutaneous pouch and hemotoncus etc.；In addition, skin erosion and septicemia are also
Inevitably.
Therefore, how a kind of photoelectricity pacemaker of miniaturization is provided, can be with self-powered, and formed well with human heart
Contact, or injection cardiac muscle, directly and continuously drive heartbeat without external power supply and connecting line, be current this field
Technical staff's technical problem urgently to be resolved.
Summary of the invention
In view of this, the application's is designed to provide a kind of implanted photoelectricity pacemaker and preparation method thereof, with
Realize self-powered, and with human heart formed it is good contact, or injection cardiac muscle, directly and continuously drive heartbeat and
Without external power supply and connecting line.
In order to achieve the above object, the application provides the following technical solutions.
A kind of preparation method of implanted photoelectricity pacemaker, S1, substrate material is cleaned up, be placed in plasma
It is low by gas-liquid-solid (VLS) growth mechanism using the Sn of low melting point as catalyst in the gas-phase deposition system for enhancing chemistry
Temperature is lower to grow radial joint solar cell；
S2, radial direction joint solar cell obtained in step S1 acquisition flexible optoelectronic pace-making patch or pace-making are not handled into
Line, or be placed in acid solution and be dissolved into monodispersed radial junction nanoscale photoelectricity pacemaker, or first cover the thin of layer of transparent
It is dissolved after membrane material to obtain the assembly of micron order radial junction photoelectricity pacemaker.
Preferably, the thin-film material of layer of transparent is first covered in the step S2, then with transparent flexible macromolecule thin layer
Cover, then through peracid treatment, while being initially separated, full wafer flexible macromolecule thin layer torn with tweezers again, go from
After sub- water cleaning, flexible optoelectronic pacemaker patch is obtained.
Preferably, radial joint solar cell is PIN radial direction junction nanowire in the step S1, and basic structure is in
Axial core-shell structure centered on heart P-type silicon nano wire, is followed successively by p-type nano wire from the inside to surface, I layers of amorphous silicon (intrinsic layer) and
N layers of amorphous silicon.
Preferably, the diameter of the PIN radial direction junction nanowire is 150~300nm.
Preferably, the diameter of the p-type nano wire is 40~80nm, I layers of amorphous silicon with a thickness of 80~150nm, N layers are non-
Crystal silicon with a thickness of 5~10nm；The doping concentration of the p-type nano wire is 1015~1016cm-3, the doping of the N layers of amorphous silicon
Concentration is 1016~1017cm-3。
Preferably, substrate material is aluminium foil, metal tungsten wire, oxidized silicon chip and surface deposition silicon oxide film in the step S1
At least one of nitridation silicon wafer.
Preferably, the aluminium foil with a thickness of 20~25 μm, the diameter of the metal tungsten wire is 0.1~0.6mm, the oxygen
SiClx piece with a thickness of 500 ± 10 μm, oxidated layer thickness is 200~600nm.
Preferably, in the step S2 thin-film material be SU8, AZ5214, silicon nitride film, polymethyl methacrylate,
At least one of dimethyl silicone polymer and polyurethane.
Preferably, in the step S2 flexible macromolecule thin layer be PDMS, polyurethane, dimethyl silicone polymer and poly- cream
At least one of acid-co-glycolic acid.
A kind of implanted photoelectricity pacemaker of above-mentioned preparation method preparation, has self-powered function, and with people's
Heart forms good contact, or injection cardiac muscle, directly and continuously drives heartbeat without external power supply and connecting line.
Present invention advantageous effects obtained:
1) present invention solved existing pacemaker and is battery powered, every 7 to 10 years, it is necessary to use operation to change
Battery is exhausted under embedment skin of chest, increases the pain and financial burden of patient, and increases disease incidence even in the presence of latent
In the defect of mortality risk；Compared to conventional cardiac pacing electrode, the present invention has self-powered function, and is formed with human heart
Good contact, or injection cardiac muscle, directly and continuously drive heartbeat without external power supply and connecting line；
2) present invention uses nanometer scale solar battery structure, is made of conventional semiconductors silicon materials, has good
Bioaffinity has no toxic side effect to body, and convenient for combining minimally invasive surgery technology, can efficiently, it is accurate and safely will
Nano photoelectric pacemaker is sent to heart surface, significantly reduces operation wound caused by patient；Rely on semiconductor industry at
Ripe manufacture craft, solar battery structure can be produced in batches, and low in cost；
3) present invention makes pacemaker surface generate voltage or charge by photovoltaic effect, directly contact cardiac stimulation, is not required to
Additional power supply unit is wanted, and does not need conducting wire, patient is reduced and replaces the somatic damage of power supply unit bring and the operation of great number
Expense, while reducing bring inflammatory reaction when conducting wire passes through vein；
4) present invention has excellent electric property, and under the conditions of low intensity light is shone, biggish electro photoluminescence can be realized；Only
Need a nano solar battery unit that can cause the pace-making of heart, i.e. the pacemaker the space occupied is minimum, and it is high-efficient,
It is more expected to obtain nanoscale pacemaker.
Above description is only the general introduction of technical scheme, in order to better understand the technological means of the application,
So as to be implemented in accordance with the contents of the specification, and in order to allow the above and other objects, features and advantages energy of the application
It is enough clearer and more comprehensible, with the preferred embodiment of the application and cooperates attached drawing below detailed description is as follows.
According to the accompanying drawings to the detailed description of the application specific embodiment, those skilled in the art will be brighter
The above-mentioned and other purposes of the application, advantages and features.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the application
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.In all the appended drawings, similar element or part are generally identified by similar appended drawing reference.
In attached drawing, each element or part might not be drawn according to actual ratio.
Fig. 1 is PIN radial direction junction nanowire patch SEM figure；
Fig. 2 is the photo that photoelectricity pacemaker patch is placed in heart surface in embodiment 1；
Fig. 3 is that photoelectricity pacemaker patch is placed in the electrocardiogram before and after heart surface illumination in embodiment 1.
Specific embodiment
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application
In attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is
Some embodiments of the present application, instead of all the embodiments.In the following description, such as specific configuration and component are provided
Specific detail just for the sake of help comprehensive understanding embodiments herein.It therefore, it will be apparent to those skilled in the art that can
To make various changes and modifications the embodiments described herein without departing from the scope and spirit of the present application.In addition, in order to clear
Except with it is succinct, the description to known function and construction is omitted in embodiment.
The terms "and/or", only a kind of incidence relation for describing affiliated partner, indicates that there may be three kinds of passes
System, for example, A and/or B, can indicate: individualism A, individualism B exist simultaneously tri- kinds of situations of A and B, the terms
"/and " it is to describe another affiliated partner relationship, indicate may exist two kinds of relationships, for example, A/ and B, can indicate: individually depositing
In A, two kinds of situations of individualism A and B, in addition, character "/" herein, typicallying represent forward-backward correlation object is a kind of "or" pass
System.
The terms "at least one", only a kind of incidence relation for describing affiliated partner, indicates may exist three
Kind relationship, for example, at least one of A and B, can indicate: individualism A exists simultaneously A and B, these three feelings of individualism B
Condition.
Embodiment 1
A kind of preparation method of implanted photoelectricity pacemaker, comprising the following steps:
S1, aluminium foil is cleaned up, aluminium foil with a thickness of 20 μm, the Sn of 2nm thickness is deposited in surface, is placed in plasma enhancing
In the gas-phase deposition system of chemistry, using the Sn of low melting point as catalyst, by gas-liquid-solid (VLS) growth mechanism, under low temperature
Grow radial joint solar cell.
Wherein, radial joint solar cell is PIN radial direction junction nanowire, and basic structure is with center P-type silicon nano wire
Centered on axial core-shell structure, be followed successively by p-type nano wire, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon from the inside to surface.
The diameter of the p-type nano wire is 40nm, I layers of amorphous silicon with a thickness of 80nm, N layers of amorphous silicon with a thickness of
10nm；The doping concentration of the p-type nano wire is 1016cm-3, the doping concentration of the N layers of amorphous silicon is 1017cm-3。
As shown in Fig. 1, the scanning electron microscope of the surface topography of PIN radial direction junction nanowire, the results showed that, photoelectricity pacemaker patch
The single diameter of piece surface radial direction junction nanowire is 300nm.
S2, radial direction joint solar cell obtained in step S1 is not handled, i.e. acquisition flexible optoelectronic paces patch.
The implanted photoelectricity pacemaker of above-mentioned preparation method preparation, application method:
After patient's anesthesia, chest is opened in center, exposes heart, opens pericardium, exposes the external membrane of heart, will obtain in the step S2
The epicardial surface that flexible optoelectronic pacemaker patch is placed directly against heart is obtained, nothing directly fixed using surface body fluid adhesive effect
Additional seams are needed to fix.
It is irradiated by 650 nanometers of light, the radial junction solar cell surface in flexible optoelectronic pacemaker patch can be made to produce
Raw charge realizes cardiac pacing stimulation.It is when the frequency of stimulation to cardiac muscle that stimulation generates is greater than normal sinus rhythm, i.e., desirable
For the control of sinoatrial node, new pacemaker is obtained.
As shown in Fig. 2, above-mentioned implanted photoelectricity pacemaker patch is placed in the photo of heart surface, is covered with thereon
PIN radial direction junction nanowire as shown in Figure 1；It, can be in heart surface after implanted photoelectricity pacemaker is implanted into animal hearts surface
It fits closely.
As shown in Fig. 3, above-mentioned implanted photoelectricity pacemaker patch is placed in the electrocardiogram before and after heart surface illumination, by scheming
It is found that experiment is dynamic after by applying frequency slightly larger than the illumination of experimental animal itself heartbeat frequency to patch as shown in Figure 2
Acute variation occurred at 3 seconds for object electrocardiogram, and former sinus rhythm disappears, and the peak opposite with current potential when former heartbeat occurred,
And experimental animal heartbeat frequency gradually increases, heartbeat frequency moves closer to illumination frequency, has reached cardiac pacing
Effect experiment animal normal heartbeat be 103 under/min, and when light stimulation, electrocardiogram occur it is apparent change, heart is jumped
Move be 141 under/min, former sinus rhythm disappears, produces new EGC pattern, show that pacemaker paces successfully.
Advantage: aluminum substrates have certain flexibility in the present embodiment, can repeatedly bend, and be folded over rear battery performance
Do not change, nano wire is facilitated closely to be attached to heart surface.
Embodiment 2
A kind of preparation method of implanted photoelectricity pacemaker, comprising the following steps:
S1, aluminium foil is cleaned up, aluminium foil with a thickness of 25 μm, the Sn of 3nm thickness is deposited in surface, is placed in plasma enhancing
In the gas-phase deposition system of chemistry, using the Sn of low melting point as catalyst, by gas-liquid-solid (VLS) growth mechanism, under low temperature
Grow radial joint solar cell.
Wherein, radial joint solar cell is PIN radial direction junction nanowire, and the single diameter of PIN radial direction junction nanowire is
150nm, basic structure are the axial core-shell structures centered on the P-type silicon nano wire of center, are followed successively by p-type nanometer from the inside to surface
Line, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon.
The diameter of the p-type nano wire is 80nm, I layers of amorphous silicon with a thickness of 150nm, N layers of amorphous silicon with a thickness of
5nm；The doping concentration of the p-type nano wire is 1015cm-3, the doping concentration of the N layers of amorphous silicon is 1016cm-3。
S2, radial direction joint solar cell obtained in step S1 is not handled, i.e. acquisition flexible optoelectronic paces patch.
The implanted photoelectricity pacemaker of above-mentioned preparation method preparation, application method:
After patient's anesthesia, chest is opened in center, exposes heart, opens pericardium, exposes the external membrane of heart, will obtain in the step S2
The epicardial surface that flexible optoelectronic pacemaker patch is placed directly against heart is obtained, nothing directly fixed using surface body fluid adhesive effect
Additional seams are needed to fix.
It is irradiated by 650 nanometers of light, the radial junction solar cell surface in flexible optoelectronic pacemaker patch can be made to produce
Raw charge realizes cardiac pacing stimulation.It is when the frequency of stimulation to cardiac muscle that stimulation generates is greater than normal sinus rhythm, i.e., desirable
For the control of sinoatrial node, new pacemaker is obtained.
Advantage: aluminum substrates have certain flexibility in the present embodiment, can repeatedly bend, and be folded over rear battery performance
Do not change, nano wire is facilitated closely to be attached to heart surface.
Embodiment 3
A kind of preparation method of implanted photoelectricity pacemaker, comprising the following steps:
S1, oxidized silicon chip is cleaned up, oxidized silicon chip with a thickness of 500 ± 10 μm, oxidated layer thickness is 200~
600nm, surface are deposited the Sn of 1~3nm thickness, are placed in the gas-phase deposition system of plasma enhanced chemical, with the Sn of low melting point
As catalyst, pass through gas-liquid-solid (VLS) growth mechanism, grown at low temperature radial direction joint solar cell；
Wherein, radial joint solar cell is PIN radial direction junction nanowire, the diameter of PIN radial direction junction nanowire is 150~
250nm, basic structure are the axial core-shell structures centered on the P-type silicon nano wire of center, are followed successively by p-type nanometer from the inside to surface
Line, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon.
The diameter of the p-type nano wire is 40~80nm, I layers of amorphous silicon with a thickness of 80~150nm, N layers of amorphous silicon
With a thickness of 5~10nm；The doping concentration of the p-type nano wire is 1015~1016cm-3, the doping concentration of the N layers of amorphous silicon is
1016~1017cm-3。
S2, by step S1 it is obtained radial direction joint solar cell pass through certain density hydrofluoric acid treatment, hydrofluoric acid with
SiO2It reacts, erodes the SiO among silicon wafer and radial junction battery2Layer, staticly settles, acquired solution solvent is replaced into
Liquid after displacement is packed into centrifuge tube high speed centrifugation (revolving speed is 4000rpm~12000rpm), added again after centrifugation by PBS solution
Enter a small amount of PBS solution, is put into ultrasonic washing instrument and increases power ultrasonication, can be obtained monodispersed radial junction nanoscale
Photoelectricity pacemaker.
The implanted photoelectricity pacemaker of above-mentioned preparation method preparation, application method:
After patient's anesthesia, using chest openheart surgery is not opened, spile on the wall of the chest, and medical micro- camera is goed deep into patient
In vivo, by thoracoscope video, cardia is navigated to, using Minimally Invasive Surgery instrument by monodispersed radial junction nanoscale photoelectricity
Pacemaker implantation cardiac muscle is internal.By near infrared light, the radial joint solar cell in photoelectricity pacemaker is made to generate photovoltaic
Effect stimulates cardiac muscle to realize cardiac pacing stimulation.
Advantage: implanted photoelectricity pacemaker does not need to do open chest surgery in the present embodiment, it is only necessary to do Minimally Invasive Surgery
, patient is damaged small.In addition, each radial junction solar battery cell can provide sufficiently high voltage, institute
Only to need micro injection to can reach pace-making effect in principle.
Embodiment 4
A kind of preparation method of implanted photoelectricity pacemaker, comprising the following steps:
S1, metal tungsten wire or line being cleaned up, the diameter of metal tungsten wire or line is 0.1~0.6mm, surface vapor deposition 1~
The Sn of 3nm thickness, is placed in the gas-phase deposition system of plasma enhanced chemical, using the Sn of low melting point as catalyst, passes through gas-
Liquid-solid (VLS) growth mechanism can grow radial joint solar cell in tungsten filament；
Wherein, radial joint solar cell is PIN radial direction junction nanowire, the diameter of PIN radial direction junction nanowire is 150~
250nm, basic structure are the axial core-shell structures centered on the P-type silicon nano wire of center, are followed successively by p-type nanometer from the inside to surface
Line, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon.
The diameter of the p-type nano wire is 40~80nm, I layers of amorphous silicon with a thickness of 80~150nm, N layers of amorphous silicon
With a thickness of 5~10nm；The doping concentration of the p-type nano wire is 1015~1016cm-3, the doping concentration of the N layers of amorphous silicon is
1016~1017cm-3。
S2, radial direction joint solar cell obtained in step S1 is not handled, that is, obtains flexible needle-shaped photoelectricity pacemaker.
The implanted photoelectricity pacemaker of above-mentioned preparation method preparation, application method:
After patient's anesthesia, chest is opened in center, exposes heart, opens pericardium, the external membrane of heart is exposed, by the flexible metal of acquisition
Silk light electric artificial pacemaker with sewing needle draws one end and is formed directly into behind myocardium surface layer to be pierced by from another position again, makes flexible needle-shaped light
Electric artificial pacemaker both ends are exposed on the outside of cardiac muscle, and fixation can be realized inside myocardium surface layer in middle section.It is shone by near infrared light
It penetrates, the radial junction solar cell surface in flexible needle-shaped photoelectricity pacemaker can be made to generate electric signal, to stimulate cardiac muscle, realize
Cardiac pacing.
Advantage: implanted photoelectricity pacemaker does not need radial junction battery being made into solution or patch in the present embodiment,
It only needs by radial junction nanowire growth on tungsten wire, its p-type core is naturally connected with tungsten wire when due to nanowire growth, institute
It is used with the pole that tungsten wire can be used as pacing electrode, has certain flexibility additionally, due to tungsten wire, can directly be sewn to the heart
On dirty, operate very convenient quick.
Embodiment 5
A kind of preparation method of implanted photoelectricity pacemaker, comprising the following steps:
S1, the nitridation silicon wafer surface cleaning for being deposited with silicon oxide film is clean, the Sn of 1~3nm thickness is deposited in surface, is placed in
In the gas-phase deposition system of gas ions enhancing chemistry, using the Sn of low melting point as catalyst, pass through gas-liquid-solid (VLS) growth machine
System can obtain radial joint solar cell on its surface；
Wherein, radial joint solar cell is PIN radial direction junction nanowire, the diameter of PIN radial direction junction nanowire is 150~
250nm, basic structure are the axial core-shell structures centered on the P-type silicon nano wire of center, are followed successively by p-type nanometer from the inside to surface
Line, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon.
The diameter of the p-type nano wire is 40~80nm, I layers of amorphous silicon with a thickness of 80~150nm, N layers of amorphous silicon
With a thickness of 5~10nm；The doping concentration of the p-type nano wire is 1015~1016cm-3, the doping concentration of the N layers of amorphous silicon is
1016~1017cm-3。
S2, after radial direction joint solar cell obtained in step S1 is first covered the thin-film material of layer of transparent, wherein it is thin
Membrane material is SU8, thin-film material with a thickness of 4~6 μm, then covered again with transparent flexible macromolecule thin layer, wherein flexible
Polymer electrolyte thin layer is PDMS, then passes through hydrofluoric acid treatment, the SiO among corrosion of silicon and radial junction battery2Layer is starting point
From while, full wafer flexible macromolecule thin layer is torn with tweezers, deionized water cleaning after, can be obtained flexible optoelectronic pacemaker
Patch.
Preferably, the thin-film material is AZ5214, polymethyl methacrylate, dimethyl silicone polymer or polyurethane.
Preferably, the flexible macromolecule thin layer is polyurethane, dimethyl silicone polymer or poly lactic-co-glycolic acid copolymerization
Object.
The implanted photoelectricity pacemaker of above-mentioned preparation method preparation, application method:
After patient's anesthesia, chest is opened in center, exposes heart, opens pericardium, exposes the external membrane of heart.Flexible optoelectronic will be obtained to rise
Device patch of fighting is placed directly against the epicardial surface of heart, directly fixed using surface body fluid adhesive effect.Pass through 650 nanometers of illumination
It penetrates, the radial junction solar cell surface in flexible optoelectronic pacemaker patch can be made to generate charge and realize cardiac pacing stimulation.
Advantage: in the present embodiment PDMS used in implanted photoelectricity pacemaker have the characteristics that insulation, it is transparent, no
It is only capable of impinging upon light on nano wire through it, moreover it is possible to keep apart the positive and negative anodes of radial junction battery, prevent in animal body pendular ring
Radial junction battery plus-negative plate is directly connected under border.
Embodiment 6
A kind of preparation method of implanted photoelectricity pacemaker, comprising the following steps:
S1, the nitridation silicon wafer surface cleaning for being deposited with silicon oxide film is clean, the Sn of 1~3nm thickness is deposited in surface, is placed in
In the gas-phase deposition system of gas ions enhancing chemistry, using the Sn of low melting point as catalyst, pass through gas-liquid-solid (VLS) growth machine
System can obtain radial joint solar cell on its surface；
Wherein, radial joint solar cell is PIN radial direction junction nanowire, the diameter of PIN radial direction junction nanowire is 150~
250nm, basic structure are the axial core-shell structures centered on the P-type silicon nano wire of center, are followed successively by p-type nanometer from the inside to surface
Line, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon.
The diameter of the p-type nano wire is 40~80nm, I layers of amorphous silicon with a thickness of 80~150nm, N layers of amorphous silicon
With a thickness of 5~10nm；The doping concentration of the p-type nano wire is 1015~1016cm-3, the doping concentration of the N layers of amorphous silicon is
1016~1017cm-3。
S2, the thin-film material that radial junction solar cell surface obtained in step S1 is deposited to layer of transparent, wherein thin
Membrane material is silicon nitride film, the SiO using hydrofluoric acid treatment, among corrosion of silicon and radial junction battery2Layer, after separation from
The heart is transferred in deionized water and is ultrasonically treated, and can be obtained the assembly of micron order radial junction photoelectricity pacemaker.
Preferably, the thin-film material is SU8, AZ5214, polymethyl methacrylate, dimethyl silicone polymer or poly- ammonia
Ester.
The implanted photoelectricity pacemaker of above-mentioned preparation method preparation, application method:
After patient's anesthesia, using chest openheart surgery is not opened, spile on the wall of the chest, and medical micro- camera is goed deep into patient
In vivo, by thoracoscope video, cardia is navigated to, using Minimally Invasive Surgery instrument by micron order radial junction photoelectricity pacemaker
Group and body implantation cardiac muscle are internal.By near infrared light, the radial joint solar cell in photoelectricity pacemaker is made to generate photovoltaic
Effect stimulates cardiac muscle to realize cardiac pacing stimulation.
Advantage: implanted photoelectricity pacemaker can both be made into monodispersed radial junction nanowire sun electricity in the present embodiment
Pond without doing open chest surgery when implantation, and can keep apart the positive and negative anodes of the battery, direct to prevent positive and negative anodes in the solution
Conducting.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit protection scope of the present invention, right
For those skilled in the art, the invention may be variously modified and varied.All within the spirits and principles of the present invention,
By conventional substitution or it can be realized identical function without departing from the principles and spirit of the present invention to these
Embodiment is changed, modifies, replacing, integrating and parameter modification is fallen within the protection scope of the present invention.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit protection scope of the present invention, right
For those skilled in the art, the invention may be variously modified and varied.All within the spirits and principles of the present invention,
By conventional substitution or it can be realized identical function without departing from the principles and spirit of the present invention to these
Embodiment is changed, modifies, replacing, integrating and parameter modification is fallen within the protection scope of the present invention.
Claims (10)
1. a kind of preparation method of implanted photoelectricity pacemaker, which comprises the following steps:
S1, substrate material is cleaned up, is placed in the gas-phase deposition system of plasma enhanced chemical, made with the Sn of low melting point
For catalyst, pass through gas-liquid-solid (VLS) growth mechanism, grown at low temperature radial direction joint solar cell；
S2, radial direction joint solar cell obtained in step S1 is not handled into acquisition flexible optoelectronic pace-making patch or pace-making line, or
It is placed in acid solution and is dissolved into monodispersed radial junction nanoscale photoelectricity pacemaker, or first cover the thin-film material of layer of transparent
Acid dissolution is afterwards to obtain the assembly of micron order radial junction photoelectricity pacemaker.
2. the preparation method of implanted photoelectricity pacemaker according to claim 1, which is characterized in that the step S2
In, the thin-film material of layer of transparent is first covered, then is covered again with transparent flexible macromolecule thin layer, then through peracid treatment,
While being initially separated, full wafer flexible macromolecule thin layer is torn with tweezers, after deionized water cleaning, obtains flexible optoelectronic and rise
It fights device patch.
3. the preparation method of implanted photoelectricity pacemaker according to claim 1 or 2, which is characterized in that the step
Radial joint solar cell is PIN radial direction junction nanowire in rapid S1, and basic structure is centered on the P-type silicon nano wire of center
Axial core-shell structure is followed successively by p-type nano wire, I layers of amorphous silicon (intrinsic layer) and N layers of amorphous silicon from the inside to surface.
4. the preparation method of implanted photoelectricity pacemaker according to claim 3, which is characterized in that the PIN diameter
It is 150~300nm to the diameter of junction nanowire.
5. the preparation method of implanted photoelectricity pacemaker according to claim 3, which is characterized in that the p-type is received
The diameter of rice noodles is 40~80nm, I layers of amorphous silicon with a thickness of 80~150nm, N layers of amorphous silicon with a thickness of 5~10nm；It is described
The doping concentration of p-type nano wire is 1015~1016cm-3, the doping concentration of the N layers of amorphous silicon is 1016~1017cm-3。
6. the preparation method of implanted photoelectricity pacemaker according to claim 1 or 2, which is characterized in that the step
Substrate material is at least one in the nitridation silicon wafer of aluminium foil, metal tungsten wire, oxidized silicon chip and surface deposition silicon oxide film in rapid S1
Kind.
7. the preparation method of implanted photoelectricity pacemaker according to claim 6, which is characterized in that the aluminium foil
With a thickness of 20~25 μm, the diameter of the metal tungsten wire is 0.1~0.6mm, the oxidized silicon chip with a thickness of 500 ± 10 μm,
Its oxidated layer thickness is 200~600nm.
8. the preparation method of implanted photoelectricity pacemaker according to claim 1 or 2, which is characterized in that step S2
Described in thin-film material be SU8, AZ5214, silicon nitride film, polymethyl methacrylate, dimethyl silicone polymer and polyurethane
At least one of.
9. the preparation method of implanted photoelectricity pacemaker according to claim 1 or 2, which is characterized in that step S2
Described in flexible macromolecule thin layer be PDMS, polyurethane, dimethyl silicone polymer and poly lactide-glycolide acid in extremely
Few one kind.
10. a kind of implanted photoelectricity pacemaker of any one of -9 preparation method preparations according to claim 1.
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