CN109870130B - Measuring method and device for detecting flatness of object by ultrasonic array - Google Patents

Abstract

The invention discloses a measuring method and device for detecting flatness of an object by using an ultrasonic array, and belongs to the field of measurement. The system comprises an ultrasonic transmitting module, a flatness detecting module, an object moving module to be detected and a system control display module. The flatness detection module can convert the measurement of the flatness of the object into the rotation speed of the polystyrene beads in the disc through the photoelectric sensor, and the counting display is carried out through the system control display module. The flatness detection module is fixed in the left front of the ultrasonic array, and can detect the flatness of the object by slowly moving the object to be detected and comparing the rotation times of the polystyrene beads at different positions. The relative position of the flatness detection module relative to the axis of the ultrasonic array can be adjusted, so that the stress of the polystyrene beads can be changed, and the detection precision can be adjusted.

Description

Measuring method and device for detecting flatness of object by ultrasonic array

Technical Field

The invention relates to the field of plate processing, in particular to a detection device. In particular to a measuring method and a measuring device for detecting the flatness of an object by an ultrasonic array.

Background

In the plate production and processing process, flatness is an important index for measuring the quality of the plate. The accuracy and the efficiency of detecting the flatness of the plate are improved, the follow-up processing and the use are convenient, the delivery quantity of unqualified products can be controlled, the material waste is reduced, and the cost is saved.

The detection modes for detecting the flatness of the object commonly used at present are as follows: pressure sensor detection, laser displacement sensor detection, ultrasonic ranging sensor detection, and the like. For the detection of the pressure sensor, the pressure signal between the sensor and the object to be detected is sensed, and the pressure signal is converted into a usable output electric signal according to a certain rule, so that the pressure sensor needs to be in contact with the detected object, and the object is easily damaged. And for the laser displacement sensor, the laser displacement sensor is relatively complex, has larger volume, high price and limited application field.

The traditional ultrasonic ranging sensor needs the combined action of a transmitting end and a receiving end for detection, and has higher requirements on the ambient temperature. The propagation speed of the ultrasonic wave is influenced by the air density, and the higher the density is, the faster the propagation speed of the ultrasonic wave is, and the air density is closely related to the ambient temperature, so that whether the ambient temperature is stable or not directly determines the accuracy of ultrasonic detection.

Disclosure of Invention

Aiming at the defects existing in the technology, the invention provides a measuring method and a measuring device for detecting the flatness of an object by using an ultrasonic array, which can fill the blank in the aspect, and has the advantages of simple operation, high detection efficiency, strong anti-interference capability, low detection cost and the like.

In order to achieve the above purpose, the present invention provides the following technical solutions:

a measurement device for ultrasonic array detects article roughness, comprising: the device comprises an ultrasonic emission module, a flatness detection module, an object clamping seat and a system control display module;

The flatness detection module includes:

A first disc disposed on a reflective side of the ultrasound transmission module;

a first pellet disposed within the first disc;

The first photoelectric sensor is arranged on the first disc and used for detecting the number of turns of the first small ball rotating along the inner wall of the first disc, and the first photoelectric sensor is in communication connection with the system control display module.

Preferably, the ultrasonic transmitting module includes: a spherical substrate and a plurality of ultrasonic sensors; the ultrasonic sensors are uniformly distributed on the concave surface of the spherical substrate.

Preferably, the first disc is arranged at one side of the central axis of the spherical substrate;

the flatness detection module further includes:

The second disc is arranged on the other side of the central axis of the spherical substrate;

A second pellet disposed within the second disc;

The second photoelectric sensor is arranged on the second disc and used for detecting the number of turns of the second small ball rotating along the inner wall of the second disc, and the second photoelectric sensor is in communication connection with the system control display module.

Preferably, the material of the first pellets and/or the second pellets is polystyrene; the material of the first disc and/or the second disc is polyethylene or polyvinyl chloride or polyethylene terephthalate.

Preferably, the method further comprises:

And the object moving module to be detected is used for driving the object clamping seat to move in a plane perpendicular to the central axis of the spherical substrate.

Preferably, the object moving module to be detected comprises a Y-axis moving platform and an X-axis moving platform; the X-axis moving platform is arranged on the Y-axis moving platform; the object clamping seat is arranged on the X-axis moving platform;

The Y-axis moving platform comprises a Y-axis driving bottom plate, a Y-axis stepping motor and a Y-axis screw rod assembly; the Y-axis stepping motor is connected with the Y-axis screw rod assembly; the Y-axis screw rod assembly is arranged on the Y-axis driving bottom plate;

The X-axis moving platform comprises an X-axis stepping motor, an X-axis screw rod support and an X-axis screw rod assembly; the X-axis stepping motor and the X-axis lead screw support are fixed on the Y-axis driving bottom plate; the X-axis stepping motor is connected with the X-axis screw rod assembly; the X-axis screw rod assembly is arranged on the object clamping seat.

A measuring method for detecting the flatness of an object by an ultrasonic array adopts the measuring device, and comprises the following steps:

s1, an ultrasonic transmitting module transmits sound waves to an object to be detected;

S2, a first photoelectric sensor detects the number of turns of the first ball rotating along the inner wall of the first disc, and sends detected data to a system control display module;

Step S3, controlling an object to be detected moving module to drive the object to be detected to move in the same direction and in the same distance for a plurality of times, and repeating the steps S1 and S2 after each movement;

Step S4, the system control display module obtains the rotation speed of the first small ball according to the measured data of the first photoelectric sensor, and judges whether the absolute value of the difference value of the rotation speeds of the first small ball at two adjacent detection positions is within a first preset flatness error allowable range or not, if so, the flatness is qualified; if not, the flatness is not qualified.

Preferably, the step S4 further includes:

When the system control display module judges that the absolute value of the difference value of the rotation speeds of the first small ball at two adjacent detection positions is within a first preset flatness error allowable range,

The system control display module also calculates the absolute value of the difference value of the rotation speeds of the first small ball at the first detection position and the Nth detection position respectively, and records the absolute value as a first speed difference absolute value; calculating absolute values of difference values of rotation speeds of the first small ball at the first detection position and the (n+1) th detection position respectively, and recording the absolute values as second speed difference absolute values; calculating the absolute value of the difference value between the first speed difference absolute value and the second speed difference absolute value, and recording the absolute value as a third speed difference absolute value; judging whether the absolute value of the third speed difference is within a second preset flatness error allowable range, and if so, judging that the flatness is qualified; if not, the flatness is not qualified.

A measuring method for detecting the flatness of an object by an ultrasonic array adopts the measuring device, and comprises the following steps:

s1, an ultrasonic transmitting module transmits sound waves to an object to be detected;

S2, detecting the number of turns of the first small ball rotating along the inner wall of the first disc by the first photoelectric sensor, detecting the number of turns of the second small ball rotating along the inner wall of the second disc by the second photoelectric sensor, and transmitting detected data to a system control display module;

Step S3, the system control display module respectively and correspondingly obtains the rotation speeds of the first small ball and the second small ball according to the measured data of the first photoelectric sensor and the second photoelectric sensor, and judges whether the absolute value of the difference value of the rotation speeds of the first small ball and the second small ball is within a third preset flatness error allowable range or not, if so, the flatness is qualified; if not, the flatness is not qualified.

Preferably, the method further comprises:

Step S4, controlling an object to be detected moving module to drive the object to be detected to move in the same direction and in the same distance for a plurality of times, repeating the steps S1-S3 after each movement, and if the absolute value of the difference value of the rotating speeds of the first small ball and the second small ball at each detection position is within the third preset flatness error allowable range, determining that the overall flatness is qualified; otherwise, the overall flatness is not qualified.

Preferably, the step S4 further includes: when the absolute values of the differences in the rotational speeds of the first and second pellets at the respective detection positions are within the third preset flatness error allowable range,

The system control display module also calculates the absolute value of the difference value of the rotation speeds of the first small ball or the second small ball at the first detection position and the Nth detection position respectively, and records the absolute value as a first speed difference absolute value; calculating the absolute value of the difference value of the rotation speeds of the first small ball or the second small ball at the first detection position and the (n+1) th detection position respectively, and recording the absolute value as a second speed difference absolute value; calculating the absolute value of the difference value between the first speed difference absolute value and the second speed difference absolute value, and recording the absolute value as a third speed difference absolute value; judging whether the absolute value of the third speed difference is within a second preset flatness error allowable range, if so, the overall flatness is qualified; if not, the overall flatness is not qualified.

According to the technical scheme, the method and the device for measuring the flatness of the ultrasonic array detection object provided by the invention aim at solving the defects of low accuracy, low anti-interference capability and the like of the conventional device for detecting the flatness of the object. And (3) continuously moving the object to be detected by controlling the stepping motor, measuring the rotation speed of the polystyrene beads at each position, and quantifying the stress of the polystyrene beads at the position. After the sound wave emitted by the ultrasonic phased array is focused on the surface of the object to be detected, the force generated by the reflected sound wave acts on the polystyrene ball in the flatness detection module to drive the polystyrene ball to rotate along the disc wall surface with the side wall.

The ultrasonic emission module adopts a spherical structure, which is favorable for gathering ultrasonic energy and enhancing the force reflected to the flatness detection module by the object to be detected, thereby driving the polystyrene beads to rotate along the wall surface of the disc with the side wall. The detection method is not in direct contact with the object to be detected, so that damage to the object is avoided.

The photoelectric sensor in the flatness detection module is embedded into the disc with the side wall, the focused sound wave emitted by the ultrasonic phased array is reflected into the disc with the side wall through the object, and the force generated by the reflected sound wave acts on the polystyrene ball in the flatness detection module, so that the polystyrene ball is driven to rotate around the disc with the side wall, the photoelectric sensor detects the rotation times of the polystyrene ball within a specified time, the stress magnitude of the polystyrene ball is quantized, and when the reflecting force magnitude and the direction change due to the unevenness of the surface of the object to be detected, the stress magnitude of the polystyrene ball also changes, and the rotation speed of the polystyrene ball is influenced. And finally detecting whether the flatness of the object to be detected is qualified. Compared with the traditional ultrasonic transmitting and receiving mode, the method is free from the influence of the ambient temperature in detection and has stronger anti-interference capability. The ultrasonic sensors are combined, the emitted sound wave energy is larger, and the size of the force of the ultrasonic wave acting on the polystyrene ball in the disc with the side wall can be adjusted by adjusting the distance between the flatness detection module and the axis direction of the ultrasonic generating device, so that the aim of adjusting the detection precision is fulfilled.

Further, under the condition that the operation of the moving platform is not regulated, the rotation speed of the polystyrene beads driven by the force generated by the reflected sound waves of the object at different positions is measured, and errors generated in the measuring process are reduced to the greatest extent. According to the method, the distance from the object plane to the transmitting end is not required to be calculated by calculating the time difference between the transmitting end and the reflecting end, and the influence of the ambient temperature on the detection precision is avoided.

Further, a second flatness detection module may be added to the other side of the flatness detection module in the direction of the axis of the ultrasonic array. The two polystyrene beads are driven to rotate in opposite directions, and two measurement results can be compared, so that the detection efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a three-dimensional structure diagram of an ultrasonic array object flatness detection device provided by an embodiment of the invention;

fig. 2 is a schematic structural diagram of an ultrasonic transmitting module according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a moving module of an object to be detected according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a detecting principle of an ultrasonic array device for detecting flatness of an object according to an embodiment of the present invention;

Fig. 5 is a schematic diagram of a detection principle of a dual-flatness detection module according to an embodiment of the present invention;

FIG. 6 is a schematic diagram of another detecting principle of the device for detecting the flatness of an object by using an ultrasonic array according to the embodiment of the present invention;

FIG. 7 is a partial enlarged view of another detection principle provided by an embodiment of the present invention;

Fig. 8 is a detection flow chart of the device for detecting object flatness by using an ultrasonic array according to an embodiment of the present invention.

Wherein 1 is an ultrasonic emission module, 1.1 is an ultrasonic sensor, 1.2 is a spherical substrate, 1.3 is a supporting plate, and 1.4 is a supporting seat;

2 is a flatness detection module, 2.1 is a first disc, 2.2 is a first small ball, 2.3 is a first photoelectric sensor, 2.11 is a second disc, 2.21 is a second small ball, and 2.31 is a second photoelectric sensor;

3 is an object moving module to be detected, 3.1 is a Y-axis stepping motor, 3.2 is a Y-axis lead screw motor coupler, 3.3 is a Y-axis lead screw, 3.4 is a Y-axis ball screw, 3.5 is a Y-axis driving bottom plate, 3.6 is an X-axis stepping motor, 3.7 is an X-axis lead screw motor coupler, 3.8 is an X-axis lead screw, 3.9 is an X-axis ball screw, 3.10 is an X-axis lead screw support, 3.11 is an X-axis guide rod support, 3.12 is an X-axis guide rod, 3.13 is an object clamping seat, 3.14 is an object clamping knob, and 3.15 is an object to be detected;

And 4, a system control display module.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The measuring device for detecting the flatness of the object by the ultrasonic array comprises an ultrasonic transmitting module 1, a flatness detecting module 2, an object clamping seat 3.13 and a system control display module 4, wherein the structure of the measuring device can be shown by referring to FIG. 1;

Wherein, flatness detection module 2 includes:

a first disk 2.1 arranged on the reflective side of the ultrasound emission module 1;

a first pellet 2.2 placed in a first disc 2.1;

the first photoelectric sensor 2.3 is arranged on the first disc 2.1 and used for detecting the number of turns of the first small ball 2.2 rotating along the inner wall of the first disc 2.1, and the first photoelectric sensor 2.3 is in communication connection with the system control display module 4.

According to the measuring device for detecting the flatness of the object by the ultrasonic array, provided by the embodiment of the invention, the ultrasonic emission module emits the sound wave to the surface of the object to be detected, so that the acting force (reflection impact energy) generated by the reflected sound wave drives the first small ball to rotate along the inner wall of the first disc, the first photoelectric sensor is used for detecting the number of circles of the first small ball rotating along the inner wall of the first disc, detected data are sent to the system control display module for processing, the system control display module obtains the rotating speed of the first small ball on the inner wall of the first disc according to the detected data, the stress of the first small ball is the acting force generated by the reflection ultrasonic wave, and the degree of flatness of the surface of the object to be detected determines the acting force, so that the surface flatness of the object to be detected is determined. According to the scheme, the flatness of the object to be detected is detected and converted into the acting force generated by the reflected sound wave on the surface of the object to be detected, and the acting force generated by the reflected sound wave is not influenced by the ambient temperature, so that the anti-interference capability to the ambient temperature is improved, and the detection precision is ensured.

It should be noted that the flatness detection module 2 is substantially configured to detect reflected energy of an acoustic wave passing through a surface of an object to be detected, i.e. a reflected impact force of the acoustic wave. For the detection of force, there are a variety of detection modes, including direct detection and indirect detection. Wherein, the direct detection can be realized by adopting impact force detection equipment; indirect detection may be by detection that converts reflected energy into other energy. For example, a motion detection mechanism is adopted to convert the reflected impact force of sound waves on the surface of an object to be detected into the motion speed of a stressed component in the motion detection mechanism, and the corresponding stressed size is quantized by a data analysis processing mechanism, so that the flatness of the object to be detected is determined. In the scheme provided by the embodiment of the invention, the motion detection mechanism is adopted to realize indirect detection of the flatness, and the method has the characteristics of simplicity in operation, strong anti-interference capability, high precision and the like. Specifically, the motion detection mechanism includes a force receiving member and a detection member. It is easy to see that the first ball 2.2 is a stress component, the first photoelectric sensor 2.3 is a detection component, and the system control display module 4 is a data analysis and processing mechanism. Of course, a limiting member, i.e. the first disc 2.1, is also included for limiting the movement of the force-receiving member.

In the present embodiment, the ultrasound transmission module 1 includes: a spherical substrate 1.2 and a plurality of ultrasonic sensors 1.1, the structure of which can be seen with reference to fig. 2; the plurality of ultrasonic sensors 1.1 are uniformly distributed on the concave surface of the spherical substrate 1.2, so that an array ultrasonic sensor capable of emitting focused sound waves is formed. Specifically, the ultrasonic emission module comprises a plurality of ultrasonic sensors with the frequency of 40kHz, each of which is fixed on the surface of the spherical cap, and the ultrasonic sensors are controlled to emit ultrasonic waves through a circuit. The sound waves emitted by the ultrasonic phased array are mutually overlapped in the air, so that the generated energy is larger, and the detection precision and the anti-interference capability are stronger.

In order to further optimize the technical scheme, the flatness detection module 2 further comprises a second disc 2.11, a second small ball 2.21 and a second photoelectric sensor 2.31; the above-described components are collectively referred to as a second flatness detection mechanism, and the first disc 2.1, the first beads 2.2, and the first photosensor 2.3 in the foregoing embodiments are collectively referred to as a first flatness detection mechanism. Because the ultrasonic sensors 1.1 in the ultrasonic transmitting module 1 are arranged in a spherical array, after the focused sound waves are reflected by the surface of the object 3.15 to be detected, reflection paths are formed on two sides of the axis of the ultrasonic transmitting module 1. The first flatness detecting mechanism is arranged on one side of the normal line of the reflecting surface of the object 3.15 to be detected, namely, the first flatness detecting mechanism is arranged in a reflecting area on one side of the axis of the ultrasonic emission module 1, namely, the first disc 2.1 is arranged on one side of the axis of the spherical substrate 1.2. The second flatness detecting mechanism is arranged on the other side of the normal line of the reflecting surface of the object 3.15 to be detected, namely, the second disc 2.11 is arranged on the other side of the central axis of the spherical substrate 1.2. The second flatness detecting mechanism is additionally arranged on the basis of the embodiment, so that the second flatness detecting mechanism and the first flatness detecting mechanism are symmetrically arranged to realize contrast detection.

Specifically, the flatness detection module 2 further includes: the second disc 2.11 is arranged on the other side of the central axis of the spherical substrate 1.2; a second pellet 2.21 placed in a second disc 2.11; the second photoelectric sensor 2.31 is arranged on the second disc 2.11 and is used for detecting the number of turns of the second small ball 2.21 rotating along the inner wall of the second disc 2.11, and the second photoelectric sensor 2.31 is in communication connection with the system control display module 4, and the structure can be shown by referring to fig. 5. The working principle of the second flatness detecting mechanism is the same as that of the first flatness detecting mechanism, and the description thereof is omitted.

When the surface of the object to be detected 3.15 is flat, the focused sound wave generates two paths of acting forces with the same magnitude after being reflected by the surface of the object to be detected 3.15, so that the stress of the first small ball 2.2 and the stress of the second small ball 2.21 are the same in direction and different in direction, the two balls are driven to rotate in respective discs at the same rotating speed respectively, the difference value of the detected data of the two balls is obtained again, when the absolute value of the difference value is within the error allowable range, the absolute value of the difference value of the rotating speed of the first small ball or the second small ball at the Nth detection position and the first detection position is calculated separately, the absolute value of the difference value of the rotating speed of the first small ball or the second small ball at the N+1th detection position and the first detection position is calculated, and whether the absolute value of the difference value of the absolute value of the two balls is within the second preset flatness error allowable range is judged, and if the absolute value of the difference value of the two balls is within the second preset flatness error allowable range is qualified; if not, the whole flatness is not qualified, so that the surface of the object to be detected is prevented from being leveled but inclined by an angle, and the speed difference generated by the angle is within the allowable error range. Specific detection procedures can be seen in the corresponding method embodiments.

When the surface of the object to be detected 3.15 is uneven, the stress of the first small ball 2.2 and the stress of the second small ball 2.21 are greatly different, so that the rotation speeds of the first small ball 2.2 and the second small ball are also greatly different, and if the rotation speeds exceed the allowable error range of the flatness of the object to be detected 3.15, the object to be detected is judged to be unqualified. In this respect, by analysing the rotational speeds of the first and second beads 2.2, 2.21, the flatness of the object 3.15 to be inspected can be determined more rapidly, thereby improving the efficiency of the inspection.

Preferably, the material of the first small ball 2.2 and/or the second small ball 2.21 is polystyrene, and the material based on the polystyrene has the characteristics of high impact strength and good rigidity, so that the first small ball 2.2 and/or the second small ball 2.21 can resist the reflection impact of sound waves and cannot be damaged, and the service life of the material is prolonged; the first disc 2.1 and/or the second disc 2.11 are made of polyethylene or polyvinyl chloride (PVC) or polyethylene terephthalate (PET), and are based on the characteristics of smooth wall surface, small fluid resistance and high impact resistance of polyethylene or polyvinyl chloride or polyethylene terephthalate, so that the resistance of the first beads 2.2 or the second beads 2.11 rotating along the inner wall of the respective disc 2.1 is reduced, the influence of the resistance on the rotating speed is avoided, and the detection precision is ensured. In addition, the first disc 2.1 and/or the second disc 2.11 are provided with side walls, which prevent the first pellets 2.2 and/or the second pellets 2.21 from falling off during rotation.

In this scheme, still include the article removal module 3 that waits to detect that is used for driving article clamping seat 3.13 to remove in the plane perpendicular to spherical base plate 1.2 axis to realize the detection of ultrasonic emission module 1 wait to detect the arbitrary position on article 3.15 surface, ensure to detect no dead angle, improve the comprehensive of detection, its structure can refer to fig. 1 and 3 and show. Of course, the object to be detected moving module 3 can control the display module 4 through the system control, and then cooperate with the real-time detection of the flatness detecting module 2 to realize the automatic detection of the surface of the object to be detected 3.15 at any position.

Specifically, the object moving module 3 to be detected includes a Y-axis moving platform and an X-axis moving platform, and the structure thereof can be shown with reference to fig. 3; the X-axis moving platform is arranged on the Y-axis moving platform; the object clamping seat 3.13 is arranged on the X-axis moving platform; the XY axis moving platform is driven by a stepping motor, an object to be detected is fixed on the object moving module to be detected, and the XY axis stepping motor is controlled by the system control display module 4 to realize the movement of the object in the XY plane.

The Y-axis moving platform comprises a Y-axis driving bottom plate 3.5, a Y-axis stepping motor 3.1 and a Y-axis screw rod component; the Y-axis stepping motor 3.1 is connected with the Y-axis screw rod assembly to realize that the Y-axis stepping motor 3.1 drives the Y-axis screw rod 3.3 to rotate; the Y-axis screw rod assembly is arranged on the Y-axis driving bottom plate 3.5; the Y-axis screw rod assembly converts the rotary motion of the Y-axis stepping motor 3.1 into the linear motion in the Y-axis screw rod assembly so as to drive the Y-axis driving bottom plate 3.5 to do up-down linear motion.

The X-axis moving platform comprises an X-axis stepping motor 3.6, an X-axis screw rod support 3.10 and an X-axis screw rod assembly; the X-axis stepping motor 3.6 and the X-axis lead screw support 3.10 are both fixed on the Y-axis driving bottom plate 3.5, so that the X-axis moving platform is overlapped on the Y-axis moving platform, and the random movement of the object with detection on the XY plane is realized; the X-axis stepping motor 3.6 is connected with the X-axis screw rod assembly; the X-axis screw rod assembly is arranged on the object clamping seat 3.13. The X-axis screw rod assembly converts the rotary motion of the X-axis stepping motor 3.1 into the linear motion in the X-axis screw rod assembly so as to drive the object clamping seat 3.13 to do left-right linear motion. In this scheme, wait to detect article movement module 3 adopts the cooperation of step motor control lead screw in order to realize removing, has the characteristics of accurate removal.

In addition, the X-axis moving platform further comprises an X-axis guiding rod 3.12 and an X-axis guiding rod support 3.11, and the structure of the X-axis moving platform can be shown with reference to fig. 3. The X-axis guide bar support 3.11 is fixed to the Y-axis drive base plate 3.5. The X-axis guide rod 3.12 is inserted in the object clamping seat 3.13, the two ends of the X-axis guide rod 3.12 are respectively provided with an X-axis guide rod support 3.11, and the arrangement of the structure plays a role in supporting and guiding the object clamping seat 3.15, so that the object clamping seat is ensured to move stably and accurately in the X-axis direction.

In addition, the solution further includes an object clamping knob 3.14 disposed on the object clamping seat 3.13, where the object clamping knob 3.14 is used to fix the object 3.15 to be detected. The object clamping knob 3.14 is in threaded fit with the object clamping seat 3.15, and the object to be detected 3.15 can be ensured to be firmly fixed on the object clamping seat 3.13 by adjusting the object clamping knob 3.14. In addition, the clamping structure of the object clamping seat 3.13 is adjustable so as to adapt to the installation of objects 3.15 to be detected with different sizes.

The present solution is further described below in connection with specific embodiments:

in order to improve the accuracy, efficiency and anti-interference capability of detecting the flatness of an object, the invention provides a measuring device for detecting the flatness of the object by an ultrasonic array, which comprises: the system comprises an ultrasonic transmitting module 1, a flatness detecting module 2, an object moving module 3 to be detected and a system control display module 4. The ultrasonic emission module 1 is fixed in the right front of the object to be detected moving module 3, the flatness detection module 2 is fixed in the left front of the ultrasonic emission module 1, the first photoelectric sensor 2.3 of the flatness detection module 2 is connected with the system control display module, and the first photoelectric sensor 2.3 processes detected data through the PC end of the system control display module 4 and displays the processed data on the PC end display screen in real time.

The ultrasonic transmitting module 1 is composed of a plurality of ultrasonic sensors 1.1, a spherical substrate 1.2, a supporting plate 1.3 and a supporting seat 1.4, and is used for exciting an ultrasonic transducer to transmit high-frequency sound waves through voltage and driving a polystyrene ball to rotate through the surface reflection of an object to be detected 3.15.

The flatness detection module 2 is mainly used for detecting the force reflected by the surface of the object. The first small ball 2.2 restrained in the first disc 2.1 rotates around the cylindrical wall surface after being acted by force, and is detected by the first photoelectric sensor 2.3, and the detected signal is sent to the PC end for processing and displaying: the rotation speed of the first pellet 2.2 is calculated by counting the number of rotations of the first pellet 2.2 within a prescribed time. And then judging whether the flatness of the object is qualified or not by comparing whether the rotation speed is within an allowable error range. The first photoelectric sensor 2.3 is embedded in the first disc 2.1, and when the first photoelectric sensor 2.3 detects that the first ball 2.2 rotates to pass through, a signal is generated and the data is transmitted to the PC end.

The object to be detected moving module 3 is mainly used for moving the object to be detected at any position in the plane. By adjusting the X-axis moving platform and the Y-axis moving platform, the ultrasonic transmitting module 1 can detect any position on the surface of an object.

The system control display module 4 processes the measured data through detection of different positions of the object 3.15 to be detected and displays the data in real time through the PC end.

Specific embodiment 1 of the present solution is described below with reference to fig. 1-4:

fig. 1 is a schematic three-dimensional structure of an ultrasonic array device for detecting flatness of an object according to an embodiment of the present invention, including:

the system comprises an ultrasonic emission module 1, a flatness detection module 2, an object to be detected moving module 3 and a system control display module 4. The flatness detection module 2 can convert the measurement of the flatness of the object into the rotation speed of the first ball 2.2 in the first disc 2.1, and display the rotation speed through the system control display module 4. The flatness detection module 2 is fixed in the left front of the ultrasonic array, and when detecting an object, the flatness of the object is detected by slowly moving the object moving module 3 to be detected and comparing the rotation speeds of the first small balls 2.2 at different positions. The relative position of the flatness detection module 2 relative to the axis of the ultrasonic array can be adjusted, so that the stress of the first small ball 2.2 can be changed, and the detection precision can be adjusted.

In this embodiment, the ultrasonic transmitting module 1 controls each ultrasonic sensor 1.1 to transmit the sound wave with the same frequency, and the transmitted sound wave is reflected by the surface of the object to be detected 3.15 to act on the first small ball 2.2 in the first disc 2.1 to drive the first small ball 2.2 to rotate. The first photoelectric sensor 2.3 is embedded on the wall surface of the first disc 2.1, so that the passing times of the first small ball 2.2 in unit time can be recorded, and the data is processed and converted into the rotation speed of the first small ball 2.2. The flatness detection module 2 can move along the axial direction perpendicular to the ultrasonic emission module 1, and the stress of the first small ball 2.2 is changed by moving the position of the first disc 2.1, so that the detection precision is adjusted.

By adjusting the X-axis moving platform and the Y-axis moving platform, the ultrasonic transmitting module 1 can detect any position on the surface of an object.

In this embodiment, the object 3.15 to be detected is moved by controlling the rotation of the step motor in the XY axis direction, so that the sound wave energy emitted by the ultrasonic emission module 1 acts on each position of the object 3.15 to be detected. In the moving process of the object 3.15 to be detected, the first photoelectric sensor 2.3 records the rotation times of the first small ball 2.2 in real time, processes the data, judges whether the data exceeds the allowable error range, and finally displays the data through the PC end.

Fig. 2 is a schematic structural diagram of an ultrasound transmitting module according to an embodiment of the present invention. The ultrasonic transmitting module 1 is composed of 36 ultrasonic sensors 1.1, a spherical substrate 1.2 and a supporting seat 1.4 of a supporting plate 1.3, and the ultrasonic transducer is excited by voltage to transmit high-frequency sound waves, and the spherical substrate is adopted, so that the sound waves can be better gathered, and the energy loss is reduced. The first disc 2.1 is placed at the front end of the ultrasound transmission module 1. Can be moved in a direction perpendicular to the axis of the ultrasound transmission module 1. The aim of adjusting stress is achieved.

Fig. 3 is a schematic structural diagram of an object moving module to be detected according to an embodiment of the present invention. By adjusting the X-axis moving platform and the Y-axis moving platform, the ultrasonic transmitting module 1 can detect any position on the surface of an object.

The mobile platform is composed of: the device comprises a Y-axis stepping motor 3.1, a Y-axis lead screw motor coupler 3.2, a Y-axis lead screw 3.3, a Y-axis ball screw 3.4, a Y-axis driving bottom plate 3.5, an X-axis stepping motor 3.6, an X-axis lead screw motor coupler 3.7, an X-axis lead screw 3.8, an X-axis ball screw 3.9, an X-axis lead screw support 3.10, an X-axis guide rod support 3.11, an X-axis guide rod 3.12, an object clamping seat 3.13 and an object clamping knob 3.14.

The Y-axis stepping motor 3.1 is driven by adopting double motors at the same time, so that the moving stability in the vertical direction is ensured. The Y-axis stepper motor 3.1 drives the Y-axis screw 3.3 to rotate through the Y-axis screw motor coupler 3.2, and the Y-axis screw 3.3 drives the Y-axis driving base plate 3.5 to move up and down through interaction with the Y-axis ball screw 3.4 fixed on the Y-axis driving base plate 3.5. X-axis stepper motor 3.6, X-axis screw motor coupler 3.7, X-axis screw 3.8, X-axis ball screw 3.9, X-axis screw support 3.10, X-axis guide bar support 3.11, X-axis guide bar 3.12, object clamping seat 3.13, object clamping knob 3.14 are all fixed on Y-axis driving base plate 3.5, X-axis stepper motor 3.6 is connected with X-axis screw 3.8 through X-axis screw motor coupler 3.7, X-axis ball screw 3.9 is fixed on object clamping seat 3.13, and object clamping seat 3.13 is driven to move in X direction through interaction of X-axis screw 3.8 and X-axis ball screw 3.9. The X-axis guide rod 3.12 passes through the object clamping seat 3.13, and the two ends of the X-axis guide rod are supported and fixed by the X-axis guide rod support 3.12. Its function is to ensure smooth and accurate movement of the object clamping seat 3.13 in the X-axis direction. The threads on the surface of the object clamping knob 3.14 and the threads on the object clamping seat 3.13 form a thread pair, and the object to be detected 3.15 can be firmly fixed on the object clamping seat 3.13 by adjusting the object clamping knob 3.14.

Fig. 4 is a schematic diagram of a detection principle of a measuring device for detecting flatness of an object by using an ultrasonic array according to an embodiment of the present invention. The sound wave emitted by the ultrasonic emission module 1 is reflected into the first disc 2.1 of the flatness detection module 2 through the surface of the object 3.15 to be detected, and acts on the first small ball 2.2 to drive the first small ball 2.2 to rotate continuously. The stress of the first small ball 2.2 in the first disc 2.1 can be changed by adjusting the distance between the first disc 2.1 and the axis of the ultrasonic transmitting module 1, so that the detection precision is adjusted.

Fig. 5 is a schematic diagram of a detection principle of a dual-flatness detection module according to an embodiment of the present invention. The sound wave emitted by the ultrasonic emission module 1 is reflected into the first disc 2.1 of the flatness detection module 2 through the surface of the object 3.15 to be detected, and acts on the first small ball 2.2 to drive the first small ball 2.2 to rotate continuously. Because the placement orientation of the ultrasonic sensor 1.1 in the ultrasonic emission module 1 is symmetrical, after the ultrasonic sensor is reflected by the surface of the object 3.15 to be detected, acting forces are generated on two sides of the axis of the ultrasonic emission module 1, when the surface of the object 3.15 to be detected is flat, the driving forces are the same in magnitude and opposite in direction, and therefore the first small ball 2.2 and the second small ball 2.21 in the two discs continuously rotate in opposite directions at the same speed. By analysing the speed at which the first 2.2 and second 2.21 pellets in the two discs are rotated, the flatness of the article is directly judged as unacceptable when the absolute value of the difference between the speeds of the two pellets is outside the allowable range. When the absolute value of the difference between the two pellet speeds is within the allowable range, further determination is continued as to whether the object 3.15 to be inspected is in an inclined setting, and the specific operation process can be seen from the embodiment of the corresponding method. The method can rapidly determine the object to be detected with unqualified flatness, thereby improving the detection efficiency.

The embodiment of the invention also provides a measuring method for detecting the flatness of the object by using the ultrasonic array, which adopts the detecting device as shown in fig. 4 and 8 and comprises the following steps:

s1, an ultrasonic transmitting module 1 transmits sound waves to an object 3.15 to be detected;

s2, the first photoelectric sensor 2.3 detects the number of turns of the first small ball 2.2 rotating along the inner wall of the first disc 2.1, and sends the detected data to the system control display module;

Step S3, controlling the object to be detected moving module 3 to drive the object to be detected 3.15 to move in the same direction and in the same distance for a plurality of times, and repeating the steps S1 and S2 after each movement;

it should be noted that after the number of rotations of the first ball 2.2 at the first detection position is detected, the object 3.15 to be detected is moved, so as to realize detection of the number of rotations of the first ball 2.2 at a plurality of detection positions.

Step S4, the system control display module 4 obtains the rotation speed of the first small ball 2.2 according to the measured data of the first photoelectric sensor 2.3, and judges whether the absolute value of the difference value of the rotation speeds of the first small ball 2.2 at two adjacent detection positions is within a first preset flatness error allowable range, if so, the flatness is qualified; if not, the flatness is not qualified.

It should be noted that, when the difference between the rotational speed of the first ball 2.2 at a certain detection position and the rotational speed of the last detection position is not within the allowable range of the first preset flatness error, the flatness is directly determined to be unqualified, and the detection process is ended, so that the detection of the next position is not needed.

According to the technical scheme, in the measuring method for the flatness of the ultrasonic array detection object, the ultrasonic emission module emits ultrasonic waves to the object to be detected, and the first small ball can rotate along the inner wall of the first disc under the driving of acting force generated by the reflected ultrasonic waves on the surface of the object to be detected. And detecting the number of turns of the first ball in the first disc by adopting a first photoelectric sensor, and sending the detected data to a system control display module to process to obtain the rotation speed of the first ball. Judging whether the absolute value of the difference value of the rotation speeds of the first small ball at two adjacent detection positions is within a first preset flatness error allowable range or not according to the detection data of the first small ball at the different detection positions, and if so, judging that the flatness is qualified; if not, the flatness is not qualified. Because the rotation speed of the first small ball is not influenced by the fluctuation of the ambient temperature, the detection interference of the ambient temperature to the first small ball is effectively avoided, and the ultrasonic detection precision is improved.

In this embodiment, as shown in fig. 6, the step S4 further includes:

when the system control display module 4 determines that the absolute value of the difference in the rotational speeds of the first beads 2.2 at the adjacent two detection positions is within the first preset flatness error allowable range,

The system control display module 4 also calculates the absolute value of the difference value of the rotation speeds of the first small ball 2.2 at the first detection position and the Nth detection position respectively, and records the absolute value as a first speed difference absolute value; calculating absolute values of difference values of the rotation speeds of the first ball 2.2 at the first detection position and the (n+1) th detection position respectively, and recording the absolute values as second speed difference absolute values; calculating the absolute value of the difference value between the first speed difference absolute value and the second speed difference absolute value, and recording the absolute value as a third speed difference absolute value; judging whether the absolute value of the third speed difference is within a second preset flatness error allowable range, and if so, judging that the flatness is qualified; if not, the flatness is not qualified. Wherein N is equal to or greater than 2.

It should be noted that, based on the preliminary judgment that the absolute value of the difference value of the rotational speeds of the first ball 2.2 at the two adjacent detection positions is within the allowable range of the first preset flatness error, further performing further deep judgment, namely, firstly calculating the absolute value of the difference value of the rotational speeds of the first ball 2.2 at the (n+1) -th detection position and the (N) -th detection position respectively with the first detection position, and then judging whether the absolute value of the difference value of the absolute values of the two is within the allowable range of the second preset flatness error, if so, the flatness is qualified; if not, the flatness is not qualified. Through the two judgments, the condition that the surface to be detected is flat but presents a certain inclination angle can be avoided, so that the detection precision is improved.

The embodiment of the invention also provides another measuring method for detecting the flatness of the object by using the ultrasonic array, which adopts the detecting device as shown in fig. 5 and comprises the following steps:

s1, an ultrasonic transmitting module 1 transmits sound waves to an object 3.15 to be detected;

S2, the first photoelectric sensor 2.3 detects the number of turns of the first small ball 2.2 rotating along the inner wall of the first disc 2.1, the second photoelectric sensor 2.31 detects the number of turns of the second small ball 2.21 rotating along the inner wall of the second disc 2.11, and the detected data are sent to the system control display module 4;

Step S3, the system control display module 4 respectively and correspondingly obtains the rotation speeds of the first small ball 2.2 and the second small ball 2.21 according to the measured data of the first photoelectric sensor 2.3 and the second photoelectric sensor 2.31, and judges whether the absolute value of the difference value of the rotation speeds of the first small ball 2.2 and the second small ball 2.21 is within a third preset flatness error allowable range or not, if so, the flatness is qualified; if not, the flatness is not qualified.

According to the technical scheme, in the measuring method for the flatness of the ultrasonic array detection object, the absolute value of the difference value of the rotation speeds of the first small ball and the second small ball at the same detection position is calculated, so that whether the flatness of the object to be detected is qualified can be rapidly judged, and the detection efficiency is improved on the basis of ensuring the detection precision.

In this embodiment, the measurement method further includes:

Step S4, controlling the object to be detected moving module 3 to drive the object to be detected 3.15 to move in the same direction and in the same distance for a plurality of times, repeating the steps S1-S3 after each movement, and if the absolute value of the difference value of the rotating speeds of the first small ball 2.2 and the second small ball 2.21 at each detection position is within the third preset flatness error allowable range, judging the overall flatness to be qualified; otherwise, the overall flatness is not qualified.

It should be noted that, the object to be detected moving module 3 is adopted to drive the object to be detected 3.15 to quantitatively move, so that the first small ball and the second small ball can simultaneously detect the object to be detected at different positions. By judging whether the absolute value of the difference value of the rotation speeds of the first small ball 2.2 and the second small ball 2.21 at each detection position is within the allowable range of the third preset flatness error, the flatness of the first small ball 2.2 and the second small ball 2.21 at different detection positions is detected, and the detection comprehensiveness is improved.

In order to further optimize the above technical solution, the step S4 further includes: when the absolute values of the differences in the rotational speeds of the first 2.2 and second 2.21 pellets at the respective inspection positions are within the third preset flatness error allowable range,

The system control display module 4 also calculates the absolute value of the difference value of the rotation speeds of the first small ball 2.2 or the second small ball 2.21 at the first detection position and the Nth detection position respectively, and records the absolute value as a first speed difference absolute value; and calculating the absolute value of the difference value of the rotation speeds of the first small ball 2.2 or the second small ball 2.21 at the first detection position and the (n+1) th detection position respectively, and recording the absolute value as a second speed difference absolute value; calculating the absolute value of the difference value between the first speed difference absolute value and the second speed difference absolute value, and recording the absolute value as a third speed difference absolute value; judging whether the absolute value of the third speed difference is within a second preset flatness error allowable range, if so, the overall flatness is qualified; if not, the overall flatness is not qualified.

It should be noted that, based on the preliminary judgment, in the case where the absolute values of the difference values of the rotational speeds of the first and second pellets 2.2 and 2.21 at the respective detection positions are all within the third preset flatness error allowable range, the further judgment is further made. Firstly, respectively calculating absolute values of difference values of rotating speeds of the first small ball 2.2 or the second small ball 2.21 at the first detection position and the Nth detection position and absolute values of difference values of rotating speeds of the first small ball 2.2 or the second small ball 2.21 at the first detection position and the (n+1) th detection position, and judging whether the absolute values of the difference values of the absolute values are within a second preset flatness error allowable range or not, if so, the flatness is qualified; if not, the flatness is not qualified. Through the two judgments, the condition that the surface to be detected is flat but presents a certain inclination angle can be avoided, so that the detection precision is improved.

The detection method in the present solution is further described below with reference to specific embodiments:

As shown in fig. 6 and 7, for example, the rotation speed of the first ball at the first detection position (0, 0) is 1; the rotation speed of the first ball at the second detection position (0, 1) is 0.9; the rotational speed of the first pellet at the third inspection position (0, 2) is 0.8. The first preset flatness error allowable range is 0 to 0.15, and the second preset flatness error allowable range is 0 to 0.02 (absolute value of difference of absolute values of differences of speeds of other detection positions and the first detection position, respectively).

The absolute value of the difference value of the rotating speeds of the first small ball at the first detection position (0, 0) and the second detection position (0, 1) is 0.1, and the difference value is within a first preset flatness error allowable range;

The absolute value of the difference between the rotating speeds of the first small ball at the second detection position (0, 1) and the third detection position (0, 2) is 0.1, and the difference is also within the allowable range of the first preset flatness error; and comparing the absolute value of the difference between the rotating speeds of the first small ball at the first detection position (0, 0) and the second detection position (0, 1) with the absolute value of the difference between the rotating speeds of the first small ball at the first detection position (0, 0) and the third detection position (0, 2), calculating the absolute value of the difference between the absolute values to be 0.1, and judging that the flatness of the position exceeds the error allowance range if the absolute value of the difference is larger than the second preset flatness error allowance range, so as to judge that the flatness of the object to be detected is disqualified.

Therefore, from the third detection position, if the flatness of the object to be detected accords with the first preset flatness error allowance range, it is still necessary to determine whether the flatness is within the second preset flatness error allowance range, so as to prevent the surface of the object to be detected from being inclined by an angle while being flat, and the speed difference generated by the angle is within the error allowance range.

The detection method in this scheme is further described below with reference to fig. 8:

Fig. 8 is a detection flow chart of a measurement device for detecting flatness of an object by using an ultrasonic array according to an embodiment of the present invention. The ultrasonic emission module emits sound waves to an object to be detected, the sound waves are reflected by the object to be detected and then act on polystyrene balls in a disc with side walls of the flatness detection module to drive the polystyrene balls to rotate, the photoelectric sensor detects and counts the data and sends the data to the PC end to be analyzed and processed, and then the PC detects and controls the work of an X-axis and Y-axis stepping motor in the platform moving module, so that the object to be detected is driven to move in a plane.

For a better understanding of the present invention, a specific example 2 of the present solution is described below with reference to fig. 5:

after the sound wave emitted by the ultrasonic emission module 1 is emitted by the object 3.15 to be detected, the sound wave is reflected and acts on the first small ball 2.2 in the first disc 2.1 and the second small ball 2.21 in the second disc 2.11 in the two flatness detection modules, and at the moment, two conditions are classified into a flatness condition and an unevenness condition.

The leveling condition can be divided into two conditions:

case one: the surface of the object 3.15 to be detected is flat, the stress of the two pellets is equal, the directions are opposite, the emitted sound waves drive the first pellets 2.2 and the second pellets 2.21 to rotate in opposite directions at the same speed, and the difference value of the two acquired data is processed, so that the result is obtained more efficiently.

And a second case: the surface of the object 3.15 to be detected is flat but has a certain inclination angle and is in an error allowable range, at this time, whether the flatness is qualified or not can not be judged only by comparing the speed difference between the first small ball 2.2 and the second small ball 2.21, whether the absolute value of the speed difference between the current detection position and the first detection position and the absolute value of the difference between the absolute value of the speed difference between the last detection position and the first detection position are in the error allowable range or not needs to be further judged, and if the absolute value of the difference is in the error allowable range, the flatness is qualified; if not, the flatness is not qualified.

In addition, the unevenness is described as follows: the object 3.15 to be inspected has small protrusions or pits on its surface. The protrusions are exemplified here. When the detection point is located at the boundary between the plane of the object 3.15 to be detected and the bulge, the direction of sound wave reflection is greatly changed due to the abrupt interface, and at this time, the stress of the first small ball 2.2 in the first disc 2.1 and the stress of the second small ball 2.21 in the second disc 2.11 are greatly different, so that the rotation speeds of the first small ball 2.2 and the second small ball 2.21 are greatly different, and the allowable error range of the flatness of the object is exceeded, and the inspection is failed.

In summary, the embodiment of the invention discloses a measuring method and a measuring device for detecting the flatness of an object by an ultrasonic array, and belongs to the field of detection. The system comprises an ultrasonic transmitting module, a flatness detecting module, an object moving module to be detected and a system control display module. The flatness detection module can convert the measurement of the flatness of the object into the rotation speed of the small ball in the disc and count and display the rotation speed through the system control display module. The flatness detection module is fixed in the left front of the ultrasonic array, and when detecting an object, the flatness of the object can be detected by slowly moving the object to be detected and comparing the rotation times of the small balls at different positions. The ball stress can be changed by adjusting the relative position of the flatness detection module relative to the axis of the ultrasonic array, so that the detection precision adjustment is realized.

In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. An ultrasonic array measuring device for detecting the flatness of an object, comprising: the device comprises an ultrasonic emission module (1), a flatness detection module (2), an object clamping seat (3.13) and a system control display module (4);

The object clamping seat (3.13) is arranged on the incident side of the ultrasonic transmitting module (1) and is used for installing an object (3.15) to be detected;

the flatness detection module (2) includes:

a first disk (2.1) arranged on the reflecting side of the ultrasonic emission module (1);

-a first pellet (2.2) placed inside said first disc (2.1); the ultrasonic wave emitted by the ultrasonic emission module (1) can be reflected to the first small ball (2.2) through the surface of the object (3.15) to be detected, so that the acting force generated by the reflected acoustic wave drives the first small ball (2.2) to rotate along the inner wall of the first disc (2.1);

The first photoelectric sensor (2.3) is arranged on the first disc (2.1) and is used for detecting the number of turns of the first small ball (2.2) rotating along the inner wall of the first disc (2.1), and the first photoelectric sensor (2.3) is in communication connection with the system control display module (4);

The system control display module (4) can obtain the rotation speed of the first small ball (2.2) on the inner wall of the first disc (2.1) according to the data detected by the first photoelectric sensor (2.3), so as to quantify the stress of the first small ball (2.2), wherein the stress of the first small ball (2.2) is acting force generated by reflected sound waves, and therefore the surface flatness of the object (3.15) to be detected is determined;

The ultrasound transmission module (1) comprises: a spherical substrate (1.2) and a plurality of ultrasonic sensors (1.1); the ultrasonic sensors (1.1) are uniformly distributed on the concave surface of the spherical substrate (1.2);

the measuring device for detecting the flatness of the object by the ultrasonic array further comprises:

And the object moving module (3) is used for driving the object clamping seat (3.13) to move in a plane perpendicular to the central axis of the spherical substrate (1.2).

2. The measuring device according to claim 1, characterized in that the first disk (2.1) is arranged on one side of the central axis of the spherical substrate (1.2);

the flatness detection module (2) further includes:

the second disc (2.11) is arranged on the other side of the central axis of the spherical substrate (1.2);

-a second pellet (2.21) placed inside said second disc (2.11);

The second photoelectric sensor (2.31) is arranged on the second disc (2.11) and is used for detecting the number of turns of the second small ball (2.21) rotating along the inner wall of the second disc (2.11), and the second photoelectric sensor (2.31) is in communication connection with the system control display module (4).

3. The measuring device according to claim 2, characterized in that the material of the first pellets (2.2) and/or the second pellets (2.21) is polystyrene; the material of the first disc (2.1) and/or the second disc (2.11) is polyethylene or polyvinyl chloride or polyethylene terephthalate.

4. The measuring device according to claim 1, characterized in that the object movement module (3) to be detected comprises a Y-axis movement platform and an X-axis movement platform; the X-axis moving platform is arranged on the Y-axis moving platform; the object clamping seat (3.13) is arranged on the X-axis moving platform;

the Y-axis moving platform comprises a Y-axis driving bottom plate (3.5), a Y-axis stepping motor (3.1) and a Y-axis screw rod assembly; the Y-axis stepping motor (3.1) is connected with the Y-axis screw rod assembly; the Y-axis screw rod assembly is arranged on the Y-axis driving bottom plate (3.5);

The X-axis moving platform comprises an X-axis stepping motor (3.6), an X-axis screw rod support (3.10) and an X-axis screw rod assembly; the X-axis stepping motor (3.6) and the X-axis screw rod support (3.10) are both fixed on the Y-axis driving bottom plate (3.5); the X-axis stepping motor (3.6) is connected to the X-axis screw rod assembly; the X-axis screw rod assembly is arranged on the object clamping seat (3.13).

5. A method for measuring flatness of an object by ultrasonic array, comprising the steps of:

s1, an ultrasonic transmitting module (1) transmits sound waves to an object (3.15) to be detected;

s2, a first photoelectric sensor (2.3) detects the number of turns of the first small ball (2.2) rotating along the inner wall of the first disc (2.1), and sends detected data to a system control display module (4);

Step S3, controlling an object to be detected moving module (3) to drive the object to be detected (3.15) to move in the same direction and in the same distance for a plurality of times, and repeating the steps S1 and S2 after each movement;

s4, the system control display module (4) obtains the rotation speed of the first small ball (2.2) according to the measured data of the first photoelectric sensor (2.3), and judges whether the absolute value of the difference value of the rotation speeds of the first small ball (2.2) at two adjacent detection positions is within a first preset flatness error allowable range or not, if so, the flatness is qualified; if not, the flatness is not qualified.

6. The measurement method according to claim 5, wherein the step S4 further comprises:

when the system control display module (4) judges that the absolute value of the difference value of the rotation speeds of the first small ball (2.2) at two adjacent detection positions is within a first preset flatness error allowable range,

The system control display module (4) also calculates the absolute value of the difference value of the rotation speeds of the first small ball (2.2) at the first detection position and the Nth detection position respectively, and records the absolute value as a first speed difference absolute value; and calculating the absolute value of the difference between the rotational speeds of the first ball (2.2) at the first detection position and the (n+1) th detection position respectively, and recording the absolute value as a second speed difference absolute value; calculating the absolute value of the difference value between the first speed difference absolute value and the second speed difference absolute value, and recording the absolute value as a third speed difference absolute value; judging whether the absolute value of the third speed difference is within a second preset flatness error allowable range, and if so, judging that the flatness is qualified; if not, the flatness is not qualified.

7. A method for measuring flatness of an object by ultrasonic array, characterized in that the measuring device according to any one of claims 1-4 is used, and an ultrasonic emission module (1) of the measuring device comprises: a spherical substrate (1.2) and a plurality of ultrasonic sensors (1.1); the ultrasonic sensors (1.1) are uniformly distributed on the concave surface of the spherical substrate (1.2);

the first disc (2.1) is arranged on one side of the central axis of the spherical substrate (1.2);

the flatness detection module (2) further includes:

the second disc (2.11) is arranged on the other side of the central axis of the spherical substrate (1.2);

-a second pellet (2.21) placed inside said second disc (2.11);

The second photoelectric sensor (2.31) is arranged on the second disc (2.11) and is used for detecting the number of turns of the second small ball (2.21) rotating along the inner wall of the second disc (2.11), and the second photoelectric sensor (2.31) is in communication connection with the system control display module (4);

The measuring method comprises the following steps:

s1, an ultrasonic transmitting module (1) transmits sound waves to an object (3.15) to be detected;

s2, a first photoelectric sensor (2.3) detects the number of turns of the first small ball (2.2) rotating along the inner wall of the first disc (2.1), and a second photoelectric sensor (2.31) detects the number of turns of the second small ball (2.21) rotating along the inner wall of the second disc (2.11) and sends detected data to a system control display module (4);

Step S3, the system control display module (4) is used for controlling the first photoelectric sensor (2.3)

And the measured data of the second photoelectric sensor (2.31) are respectively corresponding to the rotation speeds of the first small ball (2.2) and the second small ball (2.21), whether the absolute value of the difference value of the rotation speeds of the first small ball (2.2) and the second small ball (2.21) is within a third preset flatness error allowable range or not is judged, and if so, the flatness is qualified; if not, the flatness is not qualified.

8. The measurement method according to claim 7, further comprising:

Step S4, controlling an object to be detected moving module (3) to drive the object to be detected (3.15) to move in the same direction and in the same distance for a plurality of times, repeating the steps S1-S3 after each movement, and if absolute values of difference values of the rotating speeds of the first small ball (2.2) and the second small ball (2.21) at all detection positions are within the third preset flatness error allowable range, determining that the overall flatness is qualified; otherwise, the overall flatness is not qualified.

9. The measurement method according to claim 8, wherein the step S4 further comprises: when the absolute values of the differences in the rotational speeds of the first and second pellets (2.2, 21) at the respective detection positions are within the third preset flatness error allowable range,

The system control display module (4) also calculates the absolute value of the difference value of the rotation speeds of the first small ball (2.2) or the second small ball (2.21) at the first detection position and the Nth detection position respectively, and records the absolute value as a first speed difference absolute value; and calculating the absolute value of the difference between the rotational speeds of the first small ball (2.2) or the second small ball (2.21) at the first detection position and the (n+1) th detection position respectively, and recording the absolute value as a second speed difference absolute value; calculating the absolute value of the difference value between the first speed difference absolute value and the second speed difference absolute value, and recording the absolute value as a third speed difference absolute value; judging whether the absolute value of the third speed difference is within a second preset flatness error allowable range, if so, the overall flatness is qualified; if not, the overall flatness is not qualified.