CN109867441A - A kind of float glass process prepares the device and method of TFT-LCD glass substrate - Google Patents

A kind of float glass process prepares the device and method of TFT-LCD glass substrate Download PDF

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Publication number
CN109867441A
CN109867441A CN201910328174.3A CN201910328174A CN109867441A CN 109867441 A CN109867441 A CN 109867441A CN 201910328174 A CN201910328174 A CN 201910328174A CN 109867441 A CN109867441 A CN 109867441A
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CN
China
Prior art keywords
glass
sulfur dioxide
tft
tin
annealing
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CN201910328174.3A
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Chinese (zh)
Inventor
彭寿
张冲
刘文瑞
李艳
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Bengbu Zhongguangdian Technology Co Ltd
Bengbu Medium Photoelectric Technology Co Ltd
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Bengbu Medium Photoelectric Technology Co Ltd
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Priority to CN201910328174.3A priority Critical patent/CN109867441A/en
Publication of CN109867441A publication Critical patent/CN109867441A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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Abstract

The present invention relates to the device and methods that a kind of float glass process prepares TFT-LCD glass substrate, it is characterised in that: increases sulfur dioxide aeration step between molding and annealing room, comprising the following steps: 1. select the glass batch of following weight fraction ratio: SiO2 58~63%, B2O3 8~11%, Al2O3 14~18%, CaO 3~8%, MgO 0~4%, SnO 0 ~ 1%, ZnO 0~10% carry out glass batch investment kiln to be melting into glass metal, and glass metal subsequently enters tin groove forming into glass tape;2. blowing sulfur dioxide gas to the tin face of glass tape and air surface by one group of sulfur dioxide air-breather, subsequent glass tape enters annealing kiln annealing.The invention has the advantages that 1. equipment are simple, operation easy to produce;2. Na can be effectively removed+、K+Equal alkali metal ions, while the depth of TFT-LCD glass substrate tin-riched layer is effectively reduced again;3. reducing face grinding below to the amount of grinding of tin-riched layer, formation efficiency is improved.

Description

A kind of float glass process prepares the device and method of TFT-LCD glass substrate
Technical field
The invention belongs to glass preparation fields, are related to TFT-LCD glass preparation field, and in particular to a kind of float glass process preparation TFT- The device and method of LCD glass substrate.
Background technique
Various raw material are added in kiln in the technique of float process TFT-LCD glass substrate, by being heated to 1600 DEG C or more carry out being fused into glass metal, and glass metal enters molten tin bath from kiln outflow, through drawing above molten metal tin liquor Side machine travel, tiling spread molding out, and glass metal is molded into glass tape along the lead advance of edge machine.For TFT-LCD glass For glass, the temperature (about 1100 DEG C) that glass metal enters molten tin bath is higher by about 100 DEG C than common soda lime glass, is cooled to and leaves molten tin bath About 700 DEG C of temperature when into annealing kiln;Within the said temperature range, glass is in liquid condition, and inner ion movement is active, Ion exchange and diffusion velocity are fast, sodium, the potash gold being on the one hand mingled with into TFT-LCD glass raw material and in production technology It is more active to belong to ion, is easily collected on the surface of glass, forms free metal ion;On the other hand in high temperature (600-1150 DEG C) under the conditions of, tin is easily oxidized, the micro amount of oxygen contained in molten tin bath, Sn generated2+、Sn4+It penetrates into inside glass, is formed Tin-riched layer, Sn2+、Sn4+Aggregation to can glass refractive index and transmitance etc. have an impact.
TFT-LCD glass substrate is the carrier of liquid crystal display panel, and production liquid crystal display panel needs to lead on TFT-LCD glass substrate It crosses the techniques such as physical vapor deposition, chemical vapor deposition, etching and plates circuit.Liquid crystal display panel, which needs to be powered during display, makes liquid Crystalline substance is rotated, and forming display picture if free metal ion is gone in route will cause electric pole short circuit.So float glass process The requirement of TFT-LCD glass substrate is no alkali borosilicate glass, and is managed to the tin-riched layer of glass substrate.
In actual production, Na is strictly managed in terms of raw material+、K+The addition of equal alkali metal oxides, but in other former materials Some Na can be inevitably mingled in the production of material, process+、K+Equal alkali metal oxides.In order to avoid float glass process TFT-LCD glass Influence of the substrate surface tin-riched layer to glass quality, it is general using atmosphere in control molten tin bath, such as it is passed through reducing gas H2, reduce and seep Tin amount or the method for using face grinding in back segment, the tin-riched layer of glass surface is ground away.
Summary of the invention
The purpose of the invention is to remove the Na in TFT-LCD glass substrate+、K+Equal alkali metal ions are to reduce TFT- The tin-riched layer of LCD glass, the amount of grinding for reducing the grinding of back segment face improve production efficiency, provide a kind of float glass process preparation TFT-LCD The device and method of glass substrate.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of float glass process prepares the device of TFT-LCD glass substrate, including kiln, molten tin bath, edge machine, annealing kiln, it is characterised in that: One group of (at least 4) sulfur dioxide air-breather is installed between molten tin bath and annealing kiln, the sulfur dioxide air-breather by TFT-LCD glass tape air surface (on) metal cap and tin face (under) metal cap and one group of sulfur dioxide blow afloat pipeline composition.
A kind of method that float glass process prepares TFT-LCD glass substrate, including existing float glass process: frit is mixed It closes, be melted, molding, annealing, it is characterised in that: increasing sulfur dioxide aeration step between molding and annealing room, including following Step:
1. selecting the glass batch of following weight fraction ratio: SiO2 58~63%, B2O3 8~11%, Al2O3 14~18%, CaO 3~8%, MgO 0~4%, SnO 0 ~ 1%, ZnO 0~10% carry out glass batch investment kiln to be melting into glass metal, glass Liquid subsequently enters tin groove forming into glass tape;
2. blowing sulfur dioxide gas to the tin face of glass tape and air surface by one group of sulfur dioxide air-breather, (sulfur dioxide is logical Enter amount according to the Na contained in glass tape+、K+Depending on the amount of equal alkali metal ions), subsequent glass tape enters annealing kiln annealing.
Further, the intake of each metal cap sulfur dioxide is 1-1.5m3/h in the sulfur dioxide air-breather.
The mechanism of action: the main component silica of glass is after high temperature melting, oxonium ion polyhedron (triangle body and four sides Body) between apex angle be connected to form the continuous network of three-dimensional space, but its arrangement be it is unordered, in the reticular structure that silicon oxygen bond is formed In, R ion is embedded in centre, usually sodium ion, potassium ion etc..
SO2+1/2O2+ 2(K-O-Si)=- Si-O-Si -+K2SO4
SO2+1/2O2+ 2(Na-O-Si)=- Si-O-Si -+Na2SO4
SO2+ 2Na++2O-2= Na2SO4
SO2+ 2K++2O-2= K2SO4
In the Na that TFT-LCD ribbon surfaces dissociate+、K+It reacts respectively with sulfur dioxide, generates sodium sulphate, potassium sulfate, Sodium sulphate and potassium sulfate film (can wipe) are formed, which is attached to the surface of glass tape, it is possible to reduce glass tape and transmission Friction between idler wheel is reduced and is scratched.It is located at the Na on glass tape surface layer simultaneously+、K+It constantly reduces, the strand on glass tape surface layer The on-link mode (OLM) of "-Si-O-Si-" is formed, and the reticular structure that silicon oxygen bond is formed arranges precision, improves ribbon surfaces Intensity, enhance scratch resistant ability.Due to Na+, K+ Ion transfer in the netted strand of glass, diffusion, glass is caused Form vacancy in glass molecular network, and the tin-riched layer of the surface aggregation in glass tape, wherein containing Sn2+、Sn4+, can fill up Vacancy moves to inside glass, so that the Sn of glass surface2+、Sn4+It reduces, the depth of tin-riched layer can be effectively reduced, reduce Face grinding below improves formation efficiency to the amount of grinding of tin-riched layer.
Advantages of the present invention: 1. equipment are simple, operation easy to produce;2. Na can be effectively removed+、K+Equal alkali metal ions, together When effectively reduce the depth of TFT-LCD glass substrate tin-riched layer again;3. the amount of grinding to tin-riched layer is ground in face below for reduction, Improve formation efficiency.
Detailed description of the invention
Fig. 1 is sulfur dioxide access equipment schematic diagram;
Fig. 2 is the oxygen cycle schematic diagram in molten tin bath;
Fig. 3 is microscopic glass network structure;
Fig. 4 is network of silica structure chart in glass.
Specific embodiment
Embodiment 1
A kind of float glass process prepares the device of TFT-LCD glass substrate, including kiln, molten tin bath, edge machine, one group of sulfur dioxide ventilation dress It sets, annealing kiln, wherein sulfur dioxide air-breather is by TFT-LCD glass tape air surface (on) metal cap (1) He Ximian (under) gold Belong to cover (2) and one group of sulfur dioxide blows afloat pipeline composition.
A kind of method that float glass process prepares TFT-LCD glass substrate, specific implementation step are as follows:
1. selecting the glass batch of following weight fraction ratio: SiO2 60%、B2O3 9%、Al2O3 15%、CaO 5%、MgO 2%、 SnO 0.5%, ZnO 5%, put into kiln for glass batch, carry out being fused into glass metal, glass through 1500-1700 DEG C of high temperature Liquid subsequently enters molten tin bath, and the temperature for having just enter into molten tin bath is about 1000-1200 DEG C, and glass is cooled and shaped into glass tape in molten tin bath, Glass tape leaves about 600-800 DEG C of temperature of molten tin bath;
2. by one group of sulfur dioxide air-breather respectively with the intake of 1.5m3/h, 1.2m3/h to the tin face of glass tape and sky Sulfur dioxide gas is blown in gas face, and subsequent glass tape enters annealing kiln annealing.
To the glass substrate for being passed through sulfur dioxide using electronics microcell probe, the tin-riched layer depth of glass sample is examined It looks into, and glass is ground under the conditions of equal conditions, identical abrasive parameters (grinding pad granularity, mill pressure, revolving speed etc.) Mill, milling time is longer, and amount of grinding is bigger.
The above is only present pre-ferred embodiments, is not intended to limit the present invention in any form, although The present invention is disclosed above in the preferred embodiment, and however, it is not intended to limit the invention, any person skilled in the art, It does not depart within the scope of technical solution of the present invention, when the technology contents using the disclosure above make a little change or are modified to equivalent The equivalent embodiment of variation, but without departing from the technical solutions of the present invention, technology refers to according to the present invention implements to above Any simple modification, equivalent change and modification made by example, belong in the range of technical solution of the present invention.

Claims (3)

1. a kind of float glass process prepares the device of TFT-LCD glass substrate, including kiln, molten tin bath, edge machine, annealing kiln, feature exist In: one group of sulfur dioxide air-breather is installed between molten tin bath and annealing kiln, the sulfur dioxide air-breather is by TFT-LCD glass Glass band air surface metal cap and tin face metal cap and one group of sulfur dioxide blow afloat pipeline composition.
2. a kind of method that float glass process prepares TFT-LCD glass substrate, including existing float glass process: frit mixing, It is melted, molding, annealing, it is characterised in that: increase sulfur dioxide aeration step, including following step between molding and annealing room It is rapid:
1) selects the glass batch of following weight fraction ratio: SiO2 58~63%, B2O3 8~11%, Al2O3 14~18%, CaO 3~8%, MgO 0~4%, SnO 0 ~ 1%, ZnO 0~10% carry out glass batch investment kiln to be melting into glass metal, glass Liquid subsequently enters tin groove forming into glass tape;
2) blows sulfur dioxide gas, subsequent glass to the tin face of glass tape and air surface by one group of sulfur dioxide air-breather Band enters annealing kiln and anneals.
3. a kind of method that float glass process prepares TFT-LCD glass substrate according to claim 2, it is characterised in that: the dioxy The intake for changing each metal cap sulfur dioxide in sulphur air-breather is 1-1.5m3/h.
CN201910328174.3A 2019-04-23 2019-04-23 A kind of float glass process prepares the device and method of TFT-LCD glass substrate Pending CN109867441A (en)

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CN201910328174.3A CN109867441A (en) 2019-04-23 2019-04-23 A kind of float glass process prepares the device and method of TFT-LCD glass substrate

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CN201910328174.3A CN109867441A (en) 2019-04-23 2019-04-23 A kind of float glass process prepares the device and method of TFT-LCD glass substrate

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101357822A (en) * 2008-09-03 2009-02-04 河南安飞电子玻璃有限公司 Aluminium-boron-titan silicate glass with high straining point and high elastic modulus
CN103613273A (en) * 2013-10-24 2014-03-05 芜湖东旭光电科技有限公司 Alkali-free liquid crystal substrate glass
CN107543032A (en) * 2017-10-18 2018-01-05 蚌埠中建材信息显示材料有限公司 A kind of ultra-thin glass scratching resistant device
CN207596733U (en) * 2017-11-30 2018-07-10 宜昌南玻光电玻璃有限公司 A kind of sulfur dioxide piping installation
CN208378713U (en) * 2018-06-22 2019-01-15 吴江南玻玻璃有限公司 A kind of sulfur dioxide feeder in floatation glass production line
CN209797779U (en) * 2019-04-23 2019-12-17 蚌埠中光电科技有限公司 Device for preparing TFT-LCD glass substrate by float process

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101357822A (en) * 2008-09-03 2009-02-04 河南安飞电子玻璃有限公司 Aluminium-boron-titan silicate glass with high straining point and high elastic modulus
CN103613273A (en) * 2013-10-24 2014-03-05 芜湖东旭光电科技有限公司 Alkali-free liquid crystal substrate glass
CN107543032A (en) * 2017-10-18 2018-01-05 蚌埠中建材信息显示材料有限公司 A kind of ultra-thin glass scratching resistant device
CN207596733U (en) * 2017-11-30 2018-07-10 宜昌南玻光电玻璃有限公司 A kind of sulfur dioxide piping installation
CN208378713U (en) * 2018-06-22 2019-01-15 吴江南玻玻璃有限公司 A kind of sulfur dioxide feeder in floatation glass production line
CN209797779U (en) * 2019-04-23 2019-12-17 蚌埠中光电科技有限公司 Device for preparing TFT-LCD glass substrate by float process

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Application publication date: 20190611