CN109855577A - Coupling gap self-adapting regulation method in the non-contact scanning thickness measuring of ultrasound - Google Patents
Coupling gap self-adapting regulation method in the non-contact scanning thickness measuring of ultrasound Download PDFInfo
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Abstract
Coupling gap self-adapting regulation method belongs to ultrasonic detecting technology field in the non-contact scanning thickness measuring of ultrasound of the invention, is related to coupling gap self-adapting regulation method in a kind of non-contact scanning thickness measuring of ultrasound.In this method, one eddy current sensor is respectively installed in ultrasonic sensor two sides along measurement direction, and it is by coordinate conversion that the measurement coordinate system of each sensor is unified to the frame of reference, the measurement data of exploring the way for reaching tested point acquisition in advance by eddy current sensor calculates for subsequent coupling condition discrimination, adjustment amount and adjusts path generation provides data basis.Coupling gap condition discrimination model is established according to the geometrical relationship between coupling gap threshold range, each sensor and its between workpiece, realizes and the coupling gap state during thickness measuring in real time, is effectively differentiated.This method ensure that the non-contact Best Coupling effect for scanning ultrasonic thickness measurement device and workpiece surface in thickness measuring of ultrasound, and then ensure that the precision and stability of thickness measuring result.
Description
Technical field
The invention belongs to ultrasonic detecting technology field, in particular in a kind of non-contact scanning thickness measuring of ultrasound coupling gap from
Adapt to method of adjustment.
Background technique
Large thin-wall element is a kind of typical part on aerospace Grand Equipments, to processing residual wall thickness required precision
Higher, its residual wall thickness distribution of on-machine measurement is to implement the core process link of part editing objective curved surface redesign.It will
Ultrasonic thickness measurement device is integrated to numerically-controlled machine tool, loads ultrasonic thickness measurement device by machine tool chief axis and measures movement, may be implemented
To the ultrasonic in machine automatic measuring thickness of large thin-wall element.Non-contact ultrasonic thickness measuring method is because it is with Non-contact nondestructive detection, suitable
The features such as answering high-velocity scanning campaign has relatively well made up point-by-point contact ultrasonic thickness-measuring method contact force regulation hardly possible, measurement efficiency
Low deficiency, be more applicable for large thin-wall element it is accurate, efficiently in machine thickness measuring.However, since large thin-wall element size is big, rigid
It spends low, it is carried out easily because the stress such as clamping are deformed during machine thickness measuring, this unpredictable deformation causes to surpass
Sound measuring thickness device and the coupling gap on measured workpiece surface are difficult to keep stablizing in threshold range appropriate.Coupling gap mistake
Greatly, echo-signal multi -components couple, and cause thickness measuring result insincere；Coupling gap is too small, may scratching even collision workpiece table
Face, not only injury device and workpiece, also have security risk.Therefore, ultrasonic thickness measurement device root during actual measurement is controlled
It is adaptively adjusted coupling gap according to deformed measured workpiece true geometric face type, is allowed to keep in threshold range appropriate
Stablize, for realizing the Best Coupling effect of ultrasonic thickness measurement device and workpiece surface, and then guarantees the precision of thickness measuring result and steady
It is qualitative most important.The critical issue that the non-contact scanning thickness measuring coupling gap of ultrasound adaptively adjusts is: effectively differentiating between coupling
Gap state, generates smooth adaptive adjusts path at calculating adjusted value appropriate.
2014, Dalian University of Technology disclosed a kind of " jet flow liquid leaching ultrasound in patent of invention CN201410182459
Detection method and bubbler " is efficiently solved during jet flow liquid soaks ultrasound detection by optimization design bubbler structure and is coupled
Agent flow regime and flow velocity coordinated control problem.2016, Co., Ltd, Shenyang institute of computing technology, the Chinese Academy of Sciences existed
" a kind of water soaked ultrasonic detection system and method " is disclosed in patent of invention CN108072698A, and ultrasonic wave is set in industrial personal computer
Detection parameters and movement instruction are simultaneously exported to motion-control module and movement executing mechanism, realize automatically scanning ultrasound detection.
However, foregoing invention, which does not address coupling gap in non-contact ultrasonic detection process, adaptively adjusts problem.
Summary of the invention
Present invention mainly solves technical problem be to overcome existing method insufficient, it is accurate towards large thin-wall element, efficiently exist
Machine thickness measuring needs, ultrasonic thickness measurement device and tested work caused by being deformed in the process due to workpiece for the non-contact scanning thickness measuring of ultrasound
Part surface coupling gap is difficult to keep stablizing problem in threshold range appropriate, has invented a kind of non-contact scanning thickness measuring of ultrasound
Coupling gap self-adapting regulation method.One eddy current sensor is respectively installed in ultrasonic sensor two sides along measurement direction, and is passed through
Coordinate converts the measurement coordinate system unification by each sensor to the frame of reference, reaches tested point in advance by eddy current sensor and obtains
The measurement data of exploring the way taken is subsequent coupling condition discrimination, and adjustment amount calculates and adjusts path generation provides data basis.
According to coupling gap threshold range, the geometrical relationship between each sensor and its between workpiece establishes coupling gap state
Discrimination model is realized and in real time, is effectively differentiated to the coupling gap state during thickness measuring.It is determined based on measured data density estimation
Adjusted value realizes that subsequent adjustment number is as few as possible under the premise of meeting coupling gap adjusted and being in threshold range
And subsequent adjusted value each time is as small as possible；Adaptive adjusts path is generated using Moving Least Squares method, is realized smooth
And accurately adaptive adjustment.
The technical solution adopted by the present invention is that a kind of non-contact scanning thickness measuring coupling gap self-adapting regulation method of ultrasound,
Be characterized in: this method respectively installs a whirlpool in the ultrasonic sensor two sides of non-contact ultrasonic measuring thickness device along measurement direction first
Measuring device is mounted as a whole on machine tool chief axis by flow sensor for measurement of exploring the way；It is converted again by coordinate by each biography
The measured value of sensor is uniformly transformed under the frame of reference to be handled convenient for follow-up data；Then, according to coupling gap threshold range,
Geometrical relationship between each sensor and its between workpiece establishes coupling gap condition discrimination model；Finally, in fixed Y-axis
Coordinate, during edge+X-direction scanning survey, whether the current measuring point of real time discriminating eddy current sensor is " adjustment point ", if it is determined that
Current measuring point is adjustment point Pi, then self-regulated integral point PiEdge-X-direction captures m-1 measuring point and constitutes measuring point collection Pi={ pij,pi,j∈
[1, m-1] }, it is based on its corresponding coordinate set Pi'={ (xij,y,zij),(xi,y,zi), j ∈ [1, m-1] } and ranging collectionCalculate adjustment point PiThe adjusted value Δ Z at placei, and generate and instruct ultrasonic sensor according to change
The local geometric face type of workpiece after shape adaptively moves to adjustment point PiSmooth adjusts path, realize coupling gap exist
Steadily adaptive adjustment within the scope of appropriate threshold value.
Specific step is as follows for the non-contact scanning thickness measuring coupling gap self-adapting regulation method of ultrasound:
The first step assembles non-contact ultrasonic measuring thickness device
Non-contact ultrasonic measuring thickness device 1 is assembled, ultrasonic sensor 1.3 is installed on 1.2 center of lower flange, ultrasonic sensing
1.3 axis of device is overlapped with 1.2 axis of lower flange；Bubbler 1.4 is set in ultrasonic sensor 1.3,1.4 axis of bubbler and ultrasound
1.3 axis of sensor is overlapped and is connected through a screw thread with lower flange 1.2；First eddy current sensor 1.5 and second eddy current sensor
1.6 are respectively arranged in lower flange 1.2, and the axis of the first eddy current sensor 1.5 and the axis of second eddy current sensor 1.6 are along measurement
Direction is equidistantly distributed in the axis two sides of ultrasonic sensor 1.3, and three is reciprocally coplanar in parallel in the face XOZ；Lower flange 1.2 with
Upper flange 1.1 is connected by screw rod 1.7, and 1.2 axis upper flange of lower flange, 1.1 axis is overlapped；1.1 top of upper flange is set along axis
There is clamp column 1.1a, ultrasonic thickness measurement device 1 is mounted as a whole on machine tool chief axis by knife handle；
Second step, coordinate conversion
Lathe coordinate system O-XYZ, sensor measurement coordinate system o are established respectivelys-xsyszs, coordinate system of machine om-xmymzmWith
And frame of reference o-xyz, three change in coordinate axis direction of each coordinate system respectively protect by three movement axis directions corresponding on lathe
It holds consistent；Wherein, lathe coordinate system origin O is located at the grating scale zero-bit on lathe on a certain kinematic axis (such as Y motion axis)；Sensing
Device measures coordinate origin osThe point that measured value is 0 on sensor；Coordinate system of machine origin omShape is returned to zero positioned at numerically-controlled machine tool
The point that measured value is 0 on (each kinematic axis grating scale is in zero-bit) sensor under state；Frame of reference origin o, which is located at, to be set to
Reference block upper surface center on platen；
By formula (1) by the measured value of each sensor successively by sensor measurement coordinate system os-xsyszsIt converts to machine
Coordinate system om-xmymzmReconvert to frame of reference o-xyz,
In formula, (xs,ys,zs)TIt is sensor in os-xsyszsMeasured value in coordinate system, if sensor signal beam center line
In os-xsyszsUnit direction vector in coordinate system is l, m, n, and ranging (sensor instrument distance registration) is d, then (xs,ys,zs)T=
(ld,md,nd)T；R1, T1Respectively sensor measurement coordinate system os-xsyszsOpposite coordinate system of machine om-xmymzmSpin matrix
And translation matrix；R2, T2Respectively coordinate system of machine om-xmymzmThe spin matrix and translation square of relative datum coordinate system o-xyz
Battle array；Due to being parallel to each other between the respective coordinates axis of each coordinate system and direction is consistent, therefore,
Machine coordinates (0,0, the z when registration for recording the first eddy current sensor 1.5 is zero1), it is denoted as coordinate system of machine om-
xmymzmOrigin om, while obtaining the first eddy current sensor 1.5 measurement coordinate system os-xsyszsOpposite coordinate system of machine om-
xmymzmTranslation matrix T1=(0,0, z1)；In coordinate system of machine om-xmymzmIt is lower that reference block upper surface is carried out using sensor
Measurement, and by the measure data fitting of acquisition at plane, it is if acquiring the planar central coordinateThen
Third step, coupling gap condition discrimination
Host computer TT&C system controls machine tool chief axis and loads non-contact ultrasonic measuring thickness device measurement starting point, fixed Y-axis
Coordinate, at the uniform velocity edge+X-direction are moved as scanning survey, during scanning survey, are passed by such as the vortex of drag real-time judge first
Whether the current measuring point of sensor 1.5 is " adjustment point "；
In formula, H is the relative distance of 1.5 bottom center of the first eddy current sensor and 1.4 bottom center of bubbler, [Dumin,
Dumax] it is coupling gap threshold range, DeFor 1.5 bottom center of the first eddy current sensor and 2 surface measuring point of workpiece it is opposite away from
From Δ ZiFor the offset that 1 i-th of ultrasonic thickness measurement device is adjusted along Z axis, Δ Z when being moved up along Z axisiTake positive value, it is on the contrary then
Instead；If formula (3) is set up, current measuring point is " non-adjustment point ", is otherwise " adjustment point ".
4th step calculates adjusted value
If it is determined that current measuring point is adjustment point pi, coordinate (xi,y,zi), ranging Dei, from point piEdge-X-direction captures m-
1 measuring point constitutes measuring point collection Pi={ pij,pi, j ∈ [1, m-1] }, corresponding coordinate set Pi'={ (xij,y,zij),(xi,y,
zi), j ∈ [1, m-1] }, corresponding ranging collectionIt is determined by formula (4) and captures measuring point
Number,
Wherein, L is that the first eddy current sensor 1.5 explores the way measurement apart from (the first eddy current sensor 1.5 and ultrasonic sensor
1.3 axis spacing), Δ t is 1.5 sampling interval of the first eddy current sensor.By ranging collectionMiddle element is obtained from as low as big sequence
Orderly ranging collectionOrderly ranging collection is calculated by formula (5)The packing density of middle each element is estimated
Meter,
Wherein, k is closest number, KNN (dj) it is data djThe data set that constitutes of the closest data of k, djtFor data dj
T-th of closest data, dtkFor data dtK-th of closest data；I-th ranging collectionMiddle packing density estimation is maximum
Ranging is denoted as the i-th packing density estimation maximum measure distance, calculates by formula (6)
I-th packing density estimates maximum measure distanceCorresponding measuring point is denoted as the i-th packing density and estimates maximum measuring point
piUmax, coordinateI-th adjustment point PiThe adjusted value at place is denoted as the i-th adjusted value Δ Zi, based on formula (7)
It calculates,
5th step, adaptive adjusts path generate
To estimate maximum measuring point p from the i-th packing densityiUmaxTo the i-th adjustment point PiThe measuring point collection Ω of compositioni=
{piUmax,...,piCorresponding coordinate set Ωi'={ (xiUmax,y,ziUmax),...,(xi,y,zi) in each z coordinate with
I adjusts point PiThe adjusted value Δ Z at placeiThe coordinate set Ω obtained after additioni"={ (xl,y,zl), l ∈ [1, n] } in coordinate be section
Point instructs ultrasonic sensor 1.3 to estimate maximum measuring point from the i-th packing density by the generation of following Moving Least Squares fitting function
piUmaxTo the i-th adjustment point PiAdaptive adjusts path,
Wherein,
pT(x)=[1, x, x2] (9)
For the secondary basic function of selection,
Wherein, n is to the influence number of nodes in match point x compact schemes domain, xlFor the influence node to match point x, w (x-
xl) it is to influence node xlCompact schemes weight function, choose following cubic spline weight function,
Wherein,
Wherein, r is compact schemes domain radius, if node is uniformly distributed with step-length h, r is taken as 2.5h；
F=[z1,z2,...,zl,...,zn)]T (14)
Wherein, zlTo influence node xlCorresponding z coordinate value.
If i+1 adjusts point pi+1Preceding m-1 measuring point include i-th adjustment point pi, then will be from the i-th adjustment point piTo i+1
Adjust point pi+1The measuring point of composition integrates note the as i+1 measuring point collection Pi+1={ pi,...,pi+1, it seeks take i+1 probability density wherein
Estimate maximum measuring point pi+1Umax, and i+1 adjusted value Δ Z is calculated according to the above methodi+1And it generates and instructs ultrasonic sensor 1.3 certainly
I+1 Multilayer networks maximum measuring point pi+1UmaxPoint p is adjusted to i+1i+1Adaptive adjusts path.If fixed Y-axis is sat
Mark, edge-X-direction carry out the non-contact scanning thickness measuring of ultrasound, then replace the first eddy current sensor with second eddy current sensor 1.6
1.5 carry out measurement of exploring the way.
The beneficial effects of the present invention are: being reached in advance during ultrasonic non-contact scanning thickness measuring based on eddy current sensor
The measurement data of exploring the way that tested point obtains, real time discriminating coupling gap state are realized to the coupling gap state during thickness measuring
In real time, effectively differentiate.Adjusted value is determined based on measured data density estimation, is realized and is in threshold meeting coupling gap adjusted
Under the premise of being worth in range, subsequent adjustment number is as far as possible less and subsequent adjusted value each time is as small as possible.After deformation
Measured workpiece true geometric face type be adaptively adjusted coupling gap, in threshold range appropriate keep stablize, realize
The Best Coupling effect of ultrasonic thickness measurement device and workpiece surface, and then ensure that the precision and stability of thickness measuring result.
Detailed description of the invention
Coupling gap adaptively adjusts schematic diagram in the non-contact scanning thickness measuring of attached drawing 1- ultrasound, and wherein 1- ultrasonic thickness measurement fills
It sets, 1.1- upper flange, 1.1a- clamp column, 1.2- lower flange, 1.3- ultrasonic sensor, 1.4- bubbler, the vortex of 1.5- first passes
Sensor, 1.6- second eddy current sensor, 1.7- screw rod, 2- measured workpiece, 3- ultrasonic sensor 1.3 is from measuring point p1UmaxTo adjustment point
p1Adaptive adjusts path, 4- ultrasonic sensor 1.3 is from measuring point p2UmaxTo adjustment point p2Adaptive adjusts path, L- first
Exploring the way for eddy current sensor 1.5 measures distance, 1.5 bottom surface of the first eddy current sensor of H- and 1.4 bottom surface spacing of bubbler, Δ Z1-
Ultrasonic sensor 1.3 is in adjustment point p1The adjusted value at place, Δ Z2Ultrasonic sensor 1.3 is in adjustment point p2The adjusted value at place ,+X ,+
Y ,+Z- lathe X, Y, Z kinematic axis positive direction.
Coupling gap adaptively adjusts flow chart in the non-contact scanning thickness measuring of attached drawing 2- ultrasound.
Specific embodiment
In conjunction with attached drawing and the technical solution embodiment that the present invention will be described in detail,
Attached drawing 1 is that coupling gap adaptively adjusts schematic diagram in the non-contact scanning thickness measuring of ultrasound, wherein
Measured workpiece 2 is large-scale siding, and size 4950mm × 2500mm, with network feature, the other side is for side
Plane；Use the micro-emulsion cutting fluid of volumetric concentration 10% as couplant, coupled modes are soaked using jet flow liquid；Ultrasonic sensor
1.3 centre frequency 10MHz；Ultrasonic thickness measurement sampling interval 100ms is vortexed ranging sampling interval 50ms, scanning survey speed
600mm/min；Measuring coupling gap threshold range [2mm, 6mm], the first, second eddy current sensor 1.5,1.6 bottom surfaces with
1.4 bottom surface distance 6mm of bubbler, the first, second eddy current sensor 1.5,1.6 eddy current sensors, which are explored the way, measures distance 50mm.
Attached drawing 2 is that coupling gap adaptively adjusts flow chart in the non-contact scanning thickness measuring of ultrasound, and the specific steps of method are such as
Under:
The first step, the non-contact scanning measuring thickness device of assembling ultrasound.
Firstly, ultrasonic sensor 1.3 is installed on 1.2 center of lower flange, pass through signal wire and dedicated ultrasonic signal card phase
Even；Then, the suit ultrasonic sensor 1.3 of bubbler 1.4 is installed on 1.2 center of lower flange, couplant is accessed by conduit and is followed
Loop system；Then, the first, second eddy current sensor 1.5,1.6 is respectively arranged in lower flange 1.2, is connect respectively by signal wire
Enter PLC module；Then, lower flange 1.2 is connect with upper flange 1.1 by screw rod 1.7；Finally, by the clamp column of upper flange 1.1
1.1a is installed on knife handle, and ultrasonic thickness measurement device 1 is mounted as a whole on machine tool chief axis by knife handle.
Second step, coordinate conversion.
By taking the conversion of the coordinate of the first eddy current sensor 1.5 as an example, introduce the measured value of sensor by measurement coordinate system os-
xsyszsIt converts to the process of frame of reference o-xyz: firstly, control lathe returns to zero (each kinematic axis grating scale is in zero-bit),
It is denoted as the origin O of lathe coordinate system O-XYZ；Then, control machine tool chief axis loads in 1 Z-direction axis direction of ultrasonic thickness measurement device
Machine coordinates (0,0, the z when registration of lower movement, the first eddy current sensor 1.5 of record is zero1), it is denoted as coordinate system of machine om-
xmymzmOrigin om, while obtaining the first eddy current sensor 1.5 measurement coordinate system os-xsyszsOpposite coordinate system of machine om-
xmymzmTranslation matrix T1=(0,0, z1)；Then, control machine tool chief axis loads ultrasonic thickness measurement device 1 and uses the first currents sensing
Device 1.5 is in coordinate system of machine om-xmymzmUnder measurement is scanned in the reference block upper surface of platen to accurate tooling,
And by the measure data fitting of acquisition at plane, acquires the planar central coordinate and be denoted as (xm1,ym1,zm1), then obtain coordinate system of machine
om-xmymzmThe translation matrix T of relative datum coordinate system o-xyz2=(- xm1,-ym1,-zm1)T；Finally, by formula (1) by first
Eddy current sensor 1.5 is in measurement coordinate system os-xsyszsMeasured value is converted to frame of reference o-xyz.Ultrasonic sensor 1.3 and
The coordinate transform process of second eddy current sensor 1.6 is same as above.
Third step, measurement are in place.
Firstly, measured workpiece 2 is clamped in platen；Then, control machine tool chief axis loads ultrasonic thickness measurement device 1 and transports
It moves to default measurement starting point, opens couplant circulatory system hydraulic pump, by observing echo-signal status adjustment couplant
Flow is completed to survey to 50mL/s and the coupling gap of 1 bubbler of ultrasonic thickness measurement device, 1.4 bottom surface and 2 surface of workpiece for measurement to 3mm
Amount is in place.
4th step, coupling gap adaptively adjusts in the non-contact scanning thickness measuring of ultrasound.
Host computer TT&C system controls machine tool chief axis and loads 1 measurement starting point of ultrasonic thickness measurement device, fixes Y axis coordinate, along+
During X-direction carries out non-contact scanning thickness measuring to measured workpiece 2, by formula (3) first eddy current sensor of real time discriminating 1.5
Current measuring point whether be " adjustment point ", if differentiating, current measuring point is the 1st adjustment point p1, firstly, self-regulated integral point p1Edge-X-axis side
Measuring point collection P is constituted to 49 measuring points are captured1={ p1j,p1, j ∈ [Isosorbide-5-Nitrae 9] }, corresponding coordinate set P '1={ (x1j,y,z1j),
(x1,y,z1), j ∈ [Isosorbide-5-Nitrae 9] }, corresponding ranging collectionThen, by ranging collectionMiddle member
Element obtains orderly ranging collection from as low as big sequenceOrderly ranging collection is calculated by formula (5)In it is each
The packing density of element is estimated；Then, ranging collection is calculated by formula (6)Middle packing density estimates maximum measure distanceAnd
It seeks and takes its corresponding measuring point piUmaxAnd coordinate (x1Umax,y,z1Umax), the 1st adjustment point p is calculated by formula (7)1The adjusted value at place
ΔZ1；Finally, by measuring point collection Ωi={ p1Umax,...,p1Corresponding coordinate set Ω1'={ (x1Umax,y,z1Umax),...,(x1,
y,z1) in each z coordinate with adjusted value Δ Z1The coordinate set obtained after addition is denoted as P "1={ (xl,y,zl), l ∈ [1, n] },
Ultrasonic sensor 1.3 is generated from measuring point p by formula (8) using the coordinate in this coordinate set as node1UmaxTo adjustment point p1It is adaptive
Answer adjusts path 3.If next adjustment point p2Preceding 49 measuring points include first adjustment point p1, then in measuring point collection P2=
{p1,...,p2The maximum ranging of middle searching packing density estimationCorresponding measuring point p2Umax, and calculate adjust according to the above method
Integral point p2The adjusted value Δ Z at place2And it generates and instructs ultrasonic sensor 1.3 from measuring point p2UmaxTo adjustment point p2Adaptive adjustment road
Diameter 4.
The present invention may be implemented to control ultrasonic thickness measurement device during ultrasonic non-contact scanning thickness measuring, according to deformed
Measured workpiece true geometric face type is adaptively adjusted coupling gap, keeps stablizing in threshold range appropriate, ensure that super
The Best Coupling effect of sound measuring thickness device and workpiece surface, and then ensure that the precision and stability of thickness measuring result.
Claims (1)
1. a kind of non-contact scanning thickness measuring coupling gap self-adapting regulation method of ultrasound, it is characterized in that: this method is first along measurement
An eddy current sensor is respectively installed for measurement of exploring the way in the ultrasonic sensor two sides of non-contact ultrasonic measuring thickness device in direction, and
Measuring device is mounted as a whole on machine tool chief axis；Next, the measured value unification of each sensor is converted by coordinate conversion
It is handled under to the frame of reference convenient for follow-up data；Then, according between coupling gap threshold range, each sensor and its with
Geometrical relationship between workpiece establishes coupling gap condition discrimination model；Finally, in fixed Y axis coordinate, the scanning of edge+X-direction
Whether the current measuring point of real time discriminating eddy current sensor is " adjustment point " in measurement process, if it is determined that current measuring point is adjustment point Pi,
Then self-regulated integral point PiEdge-X-direction captures m-1 measuring point and constitutes measuring point collection Pi={ pij,pi, j ∈ [1, m-1] }, based on its correspondence
Coordinate set Pi'={ (xij,y,zij),(xi,y,zi), j ∈ [1, m-1] } and ranging collection
Calculate adjustment point PiThe adjusted value Δ Z at placei, and generate and instruct ultrasonic sensor according to the local geometric face type of deformed workpiece
Adaptively move to adjustment point PiSmooth adjusts path, realize that coupling gap is steadily adaptive within the scope of appropriate threshold value
Adjustment；Specific step is as follows for the non-contact scanning thickness measuring coupling gap self-adapting regulation method of ultrasound:
The first step, the non-contact scanning measuring thickness device of assembling ultrasound
It assembles non-contact ultrasonic measuring thickness device (1), ultrasonic sensor (1.3) is installed on lower flange (1.2) center, ultrasound passes
Sensor (1.3) axis is overlapped with lower flange (1.2) axis；Bubbler (1.4) is set in ultrasonic sensor (1.3), bubbler
(1.4) axis is overlapped with ultrasonic sensor (1.3) axis and is connected through a screw thread with lower flange (1.2)；First eddy current sensor
(1.5) it is respectively arranged in lower flange (1.2) with second eddy current sensor (1.6), the axis of the first eddy current sensor (1.5) and
The axis of two eddy current sensors (1.6) is equidistantly distributed along measurement direction in the axis two sides of ultrasonic sensor (1.3), and three
It is reciprocally coplanar in parallel in the face XOZ；Lower flange (1.2) is connect with upper flange (1.1) by screw rod (1.7), lower flange (1.2) axis
Upper flange (1.1) axis is overlapped；Clamp column (1.1a) is equipped with along axis above upper flange (1.1), by knife handle by ultrasonic thickness measurement
Device (1) integral installation is on machine tool chief axis；
Second step, coordinate conversion
Lathe coordinate system O-XYZ, sensor measurement coordinate system o are established respectivelys-xsyszs, coordinate system of machine om-xmymzmAnd base
Conventional coordinates o-xyz, three movement axis directions corresponding on lathe keep one to three change in coordinate axis direction of each coordinate system respectively
It causes；Wherein, lathe coordinate system origin O is located at the grating scale zero-bit on lathe on a certain kinematic axis (such as Y motion axis)；Sensor is surveyed
Measure coordinate origin osThe point that measured value is 0 on sensor；Coordinate system of machine origin omState is returned to zero positioned at numerically-controlled machine tool
Under, i.e., each kinematic axis grating scale is in zero-bit, the point that measured value is 0 on sensor；Frame of reference origin o, which is located at, to be set to
Reference block upper surface center on platen；
By formula (1) by the measured value of each sensor successively by sensor measurement coordinate system os-xsyszsIt converts to machine coordinates
It is om-xmymzmReconvert is to frame of reference o-xyz；
In formula, (xs,ys,zs)TIt is sensor in os-xsyszsMeasured value in coordinate system, if sensor signal beam center line exists
os-xsyszsUnit direction vector in coordinate system is l, m, n, and ranging, that is, sensor instrument distance registration is d, then (xs,ys,zs)T=
(ld,md,nd)T；R1, T1Respectively sensor measurement coordinate system os-xsyszsOpposite coordinate system of machine om-xmymzmSpin matrix
And translation matrix；R2, T2Respectively coordinate system of machine om-xmymzmThe spin matrix and translation square of relative datum coordinate system o-xyz
Battle array；Due to being parallel to each other between the respective coordinates axis of each coordinate system and direction is consistent, therefore
Machine coordinates (0,0, the z when registration for recording the first eddy current sensor (1.5) is zero1), it is denoted as coordinate system of machine om-
xmymzmOrigin om, while obtaining the first eddy current sensor (1.5) measurement coordinate system os-xsyszsOpposite coordinate system of machine om-
xmymzmTranslation matrix T1=(0,0, z1)；In coordinate system of machine om-xmymzmIt is lower that reference block upper surface is carried out using sensor
Measurement, and by the measure data fitting of acquisition at plane, it is if acquiring the planar central coordinateThen
Third step differentiates coupling gap state
Host computer TT&C system controls machine tool chief axis and loads non-contact ultrasonic measuring thickness device (1) measurement starting point, and fixed Y-axis is sat
Mark, at the uniform velocity edge+X-direction is moved as scanning survey, during scanning survey, by formula (3) the first currents sensing of real-time judge
Whether the current measuring point of device (1.5) is " adjustment point ",
In formula, H is the relative distance of the first eddy current sensor (1.5) bottom center and bubbler (1.4) bottom center, [Dumin,
Dumax] it is coupling gap threshold range, DeIt is opposite with workpiece (2) surface measuring point for the first eddy current sensor (1.5) bottom center
Distance, Δ ZiFor the offset that ultrasonic thickness measurement device (1) i-th is adjusted along Z axis, Δ Z when being moved up along Z axisiPositive value is taken, instead
It is then anti-；
If formula (3) is set up, current measuring point is " non-adjustment point ", is otherwise " adjustment point "；
4th step calculates adjusted value
If it is determined that current measuring point is adjustment point pi, coordinate (xi,y,zi), ranging Dei, from point piEdge-X-direction captures m-1
Measuring point constitutes measuring point collection Pi={ pij,pi, j ∈ [1, m-1] }, corresponding coordinate set Pi'={ (xij,y,zij),(xi,y,zi),j
∈ [1, m-1] }, corresponding ranging collectionThe number for capturing measuring point is determined by formula (4),
Wherein, L is the first eddy current sensor (1.5) and ultrasonic sensor (1.3) axis spacing, and Δ t is the first eddy current sensor
(1.5) sampling interval；By ranging collectionMiddle element obtains orderly ranging collection from as low as big sequenceIt presses
Formula (5) calculates orderly ranging collectionThe packing density estimation of middle each element,
Wherein, k is closest number, KNN (dj) it is data djThe data set that constitutes of the closest data of k, djtFor data dj?
T closest data, dtkFor data dtK-th of closest data；I-th ranging collectionMiddle packing density estimates maximum measure distance
It is denoted as the i-th packing density estimation maximum measure distance, is calculated by formula (6)
I-th packing density estimates maximum measure distanceCorresponding measuring point is denoted as the i-th packing density and estimates maximum measuring point piUmax,
Coordinate (xiUmax,y,ziUmax), the i-th adjustment point PiThe adjusted value at place is denoted as the i-th adjusted value Δ Zi, it is calculated by formula (7),
5th step, adaptive adjusts path generate
To estimate maximum measuring point p from the i-th packing densityiUmaxTo the i-th adjustment point PiThe measuring point collection Ω of compositioni={ piUmax,...,pi}
Corresponding coordinate set Ωi'={ (xiUmax,y,ziUmax),...,(xi,y,zi) in each z coordinate with i-th adjustment point PiPlace
Adjusted value Δ ZiThe coordinate set Ω obtained after additioni"={ (xl,y,zl), l ∈ [1, n] } in coordinate be node, by such as moving down
Dynamic least square fitting function generation instructs ultrasonic sensor 1.3 to estimate maximum measuring point p from the i-th packing densityiUmaxTo the i-th adjustment
Point PiAdaptive adjusts path,
Wherein,
pT(x)=[1, x, x2] (9)
For the secondary basic function of selection,
Wherein, n is to the influence number of nodes in match point x compact schemes domain, xlFor the influence node to match point x, w (x-xl) be
Influence node xlCompact schemes weight function, choose following cubic spline weight function,
Wherein,
Wherein, r is compact schemes domain radius, if node is uniformly distributed with step-length h, r is taken as 2.5h；
F=[z1,z2,...,zl,...,zn)]T (14)
Wherein, zlTo influence node xlCorresponding z coordinate value；
If i+1 adjusts point pi+1Preceding m-1 measuring point include i-th adjustment point pi, then will be from the i-th adjustment point piIt is adjusted to i+1
Point pi+1The measuring point of composition integrates note the as i+1 measuring point collection Pi+1={ pi,...,pi+1, it seeks take i+1 Multilayer networks wherein
Maximum measuring point pi+1Umax, and i+1 adjusted value Δ Z is calculated according to the above methodi+1And it generates and instructs ultrasonic sensor (1.3) from i-th
+ 1 Multilayer networks maximum measuring point pi+1UmaxPoint p is adjusted to i+1i+1Adaptive adjusts path, if fixed Y axis coordinate,
Edge-X-direction carries out the non-contact scanning thickness measuring of ultrasound, then replaces the first eddy current sensor with second eddy current sensor (1.6)
(1.5) measurement of exploring the way is carried out.
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