CN109852948A - A kind of MO source supply device - Google Patents
A kind of MO source supply device Download PDFInfo
- Publication number
- CN109852948A CN109852948A CN201910097515.0A CN201910097515A CN109852948A CN 109852948 A CN109852948 A CN 109852948A CN 201910097515 A CN201910097515 A CN 201910097515A CN 109852948 A CN109852948 A CN 109852948A
- Authority
- CN
- China
- Prior art keywords
- source
- holding vessel
- solid
- organic solvent
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007787 solid Substances 0.000 claims abstract description 44
- 239000007788 liquid Substances 0.000 claims abstract description 41
- 239000003960 organic solvent Substances 0.000 claims abstract description 37
- 239000012159 carrier gas Substances 0.000 claims abstract description 23
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 21
- 238000001179 sorption measurement Methods 0.000 claims abstract description 21
- 239000010959 steel Substances 0.000 claims abstract description 21
- 238000009835 boiling Methods 0.000 claims description 4
- 239000013589 supplement Substances 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001741 metal-organic molecular beam epitaxy Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The invention discloses a kind of MO source supply devices, including the source liquid MO holding vessel, solid MO source holding vessel and organic solvent adsorption column, a high-purity carrier gas air inlet pipe is connected at the air inlet of the source solid MO holding vessel, a high-purity carrier gas escape pipe is connected at the gas outlet of the source solid MO holding vessel, the outlet side of high-purity carrier gas escape pipe is inserted into the bottom of the source liquid MO holding vessel on the left of the holding vessel of the source liquid MO, the right-side outlet of the source liquid MO holding vessel is connected with the source a MO supply pipe, the outlet of the source the MO supply pipe is connect with an organic solvent adsorption column, the outlet of organic solvent adsorption column connects the source MO steel cylinder, the source solid MO is stored in the holding vessel of the source the solid MO, the source MO for being dissolved in organic solvent is stored in the holding vessel of the source the liquid MO.The present invention combines liquid MO source holding vessel and solid MO source holding vessel, guarantees the source the MO concentration being filled in the steel cylinder of the source MO, and can effectively remove the organic solvent in the source MO.
Description
Technical field
The present invention relates to a kind of MO source supply devices.
Background technique
The source MO, that is, high-purity metal organic compound is advanced Metallo-Organic Chemical Vapor deposition (abbreviation MOCVD), metal
The backing material of the technology growths Semiconductor Microstructure Materials such as organic molecular beam epitaxy (abbreviation MOMBE).Since MO product-derived is wanted
Very high purity is sought, and overwhelming majority MO source compound is extremely sensitive to oxygen, steam, meeting air may occur from firing, and meeting water can send out
Raw explosion, and toxicity is big, thus the development in the source MO be being synthetically prepared under the conditions of collector terminal, it is Ultrapure purification, ultrapure analysis, ultrapure
The filling equal new and high technology in one.
The source MO needs to be stored in a container tank to cleanliness, leakproofness with the inert gas shielding of high requirement
In (i.e. the source MO container filling).Currently, the packaging in the source MO generally uses steel cylinder to contain.When in use, it is supplied by the source MO steel cylinder
To equipment such as MOCVD.Shadow of the source the MO concentration by many factors when supplying the source MO for the source MO cylinder filling, in the steel cylinder of the source MO
It rings.For example, the factors such as crystal form size, stacking degree and the height of materials of the source solid MO in holding vessel will affect the final source MO steel
The source MO concentration in bottle.If after prolonged use, the source MO concentration also will receive influence only with the source liquid MO.
Summary of the invention
In order to solve the above technical problems, the source liquid MO is stored up the purpose of the present invention is to provide a kind of MO source supply device
It deposits tank and solid MO source holding vessel combines, guarantee the source the MO concentration being filled in the steel cylinder of the source MO, and effectively remove having in the source MO
Solvent.
To realize above-mentioned technical purpose and the technique effect, the invention is realized by the following technical scheme: a kind of MO
Source supply device, including the source liquid MO holding vessel, solid MO source holding vessel and organic solvent adsorption column, the storage of the source the solid MO
It is connected with a high-purity carrier gas air inlet pipe at the air inlet of tank, is connected with a high-purity carrier gas at the gas outlet of the source solid MO holding vessel and goes out
Tracheae, the outlet side of high-purity carrier gas escape pipe are inserted into the bottom of the source liquid MO holding vessel on the left of the holding vessel of the source liquid MO
Portion, the right-side outlet of the source liquid MO holding vessel are connected with the source a MO supply pipe, the outlet of the source the MO supply pipe and an organic solvent
Adsorption column connection, the outlet of organic solvent adsorption column pass through the source piping connection MO steel cylinder, store in the holding vessel of the source the solid MO
There is the source solid MO, the source MO for being dissolved in organic solvent is stored in the holding vessel of the source the liquid MO, solid MO source holding vessel is liquid
Body MO source holding vessel supplements the source MO, and the filler for absorbing organic solvent is equipped in organic solvent adsorption column.
Further, control valve is equipped in high-purity carrier gas air inlet pipe, high-purity carrier gas escape pipe and the source MO supply pipe.
Further, control valve also is provided on the pipeline in organic solvent adsorption column exit.
Further, the outlet side of high-purity carrier gas air inlet pipe is located at the top of the source solid MO holding vessel.
Further, the quantity of the source MO steel cylinder is multiple, and multiple source MO steel cylinder is to be connected in series.
Further, the boiling point of the organic solvent is 1300 DEG C.
The beneficial effects of the present invention are: the MO of storage dissolution in organic solvent in the source liquid MO holding vessel in the present invention
Source, the source store solids MO in the holding vessel of the source solid MO combine liquid MO source holding vessel and solid MO source holding vessel, using liquid
The source MO as directly supply the source MO steel cylinder source, can to avoid the source solid MO as directly supply source due to crystal form size,
Concentration brought by the factors such as stacking degree and height of materials influences, and using solid MO source holding vessel as the source liquid MO holding vessel
Source is supplemented, the source solid MO is filled into time, is dissolved in the source solid MO in the organic solvent in the holding vessel of the source liquid MO, guarantees liquid
The source MO concentration in the holding vessel of the source body MO, to guarantee the source the MO concentration of the source MO steel cylinder.Organic solvent adsorption column can adsorb confession
The organic solvent in the source MO answered guarantees the degree of purity in the source MO.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of MO source supply device of the present invention.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention energy
It is easier to be readily appreciated by one skilled in the art, so as to make a clearer definition of the protection scope of the present invention.
As shown in Figure 1, a kind of MO source supply device, including the source liquid MO holding vessel 1, the source solid MO holding vessel 2 and organic
Solvent adsorption column 3.A high-purity carrier gas air inlet pipe 4, high-purity carrier gas air inlet pipe 4 are connected at the air inlet of the source solid MO holding vessel 1
Outlet side be located at the top in the source solid MO holding vessel 2.A high-purity carrier gas is connected at the gas outlet of the source solid MO holding vessel 2
The outlet side of escape pipe 5, high-purity carrier gas escape pipe 5 is inserted into the source liquid MO holding vessel 1 from the left side of the source liquid MO holding vessel 1
Bottom.The right-side outlet of the source liquid MO holding vessel 1 is connected with the source a MO supply pipe 6, and the outlet of the source the MO supply pipe 6 has with one
Solvent adsorption column 3 connects, and the outlet of organic solvent adsorption column 3 passes through the source piping connection MO steel cylinder.In the source solid MO holding vessel 2
The source solid MO is stored, the source MO for being dissolved in organic solvent is stored in the source liquid MO holding vessel 1, the source solid MO holding vessel 2 is
The source liquid MO holding vessel 1 supplements the source MO, and the filler for absorbing organic solvent is equipped in organic solvent adsorption column 3.Solid MO
The bottom of source holding vessel 2 and the source liquid MO holding vessel 1 is provided with constant temperature water bath.
Control valve 7 is equipped in high-purity carrier gas air inlet pipe 4, high-purity carrier gas escape pipe 5 and the source MO supply pipe 6.Organic solvent
Control valve 7 also is provided on the pipeline in 3 exit of adsorption column.
Furtherly, the quantity of the source MO steel cylinder is multiple, and multiple source MO steel cylinder is to be connected in series.
Furtherly, the boiling point of the organic solvent is 1300 DEG C.
When work, all control valves 7 are opened, are filled with high pure nitrogen from high-purity carrier gas air inlet pipe 4, high pure nitrogen enters solid
The source body MO holding vessel 2, under the action of water bath with thermostatic control, the source solid MO is as high pure nitrogen is by the entrance of high-purity carrier gas escape pipe 5
In the source liquid MO holding vessel 1, it is dissolved in the organic solvent of the source liquid MO holding vessel 1.Under the action of water bath with thermostatic control, liquid MO
Source vaporization, is converted into the source MO steam, and organic solvent boiling point is high, will not be vaporized, thus the source MO steam with high pure nitrogen into
Enter the source MO supply pipe 6, eventually enter into organic solvent adsorption column 3, organic solvent adsorption column 3 can adsorb lacking of carrying in the source MO
Organic solvent is measured, is eventually entered into the steel cylinder of the source MO by the purified source MO.Using the present invention, by 1 He of the source liquid MO holding vessel
The source solid MO holding vessel 2 combines, and using the source liquid MO as the source for directly supplying the source MO steel cylinder, can make to avoid the source solid MO
It is influenced directly to supply source concentration as brought by the factors such as crystal form size, stacking degree and height of materials, and by solid MO
Supplement source of the source holding vessel 1 as the source liquid MO holding vessel 1, fills into the source solid MO in time, the source solid MO is made to be dissolved in liquid
In organic solvent in the source MO holding vessel 1, after long-time use, the source the MO concentration in the source liquid MO holding vessel 1 is still ensured that, from
And guarantee the source the MO concentration of the source MO steel cylinder.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (6)
1. a kind of MO source supply device, it is characterised in that: including the source liquid MO holding vessel, solid MO source holding vessel and organic solvent
Adsorption column, a high-purity carrier gas air inlet pipe is connected at the air inlet of the source solid MO holding vessel, and the source solid MO holding vessel goes out
A high-purity carrier gas escape pipe is connected at port, the outlet side of high-purity carrier gas escape pipe is inserted from the left side of the source liquid MO holding vessel
Enter to the bottom of the source liquid MO holding vessel, the right-side outlet of the source liquid MO holding vessel is connected with the source a MO supply pipe, which supplies
It is connect to the outlet of pipe with an organic solvent adsorption column, the outlet of organic solvent adsorption column passes through the source piping connection MO steel cylinder, institute
It states and stores the source solid MO in the holding vessel of the source solid MO, store the MO for being dissolved in organic solvent in the holding vessel of the source the liquid MO
Source, solid MO source holding vessel are that liquid MO source holding vessel supplements the source MO, are equipped in organic solvent adsorption column organic molten for adsorbing
The filler of agent.
2. a kind of MO source supply device according to claim 1, it is characterised in that: high-purity carrier gas air inlet pipe, high-purity
Control valve is equipped in carrier gas escape pipe and the source MO supply pipe.
3. a kind of MO source supply device according to claim 1, it is characterised in that: the pipe in organic solvent adsorption column exit
Road also is provided with control valve.
4. a kind of MO source supply device according to claim 1, it is characterised in that: the outlet of high-purity carrier gas air inlet pipe
End is located at the top in the holding vessel of the source solid MO.
5. a kind of MO source supply device according to claim 1, it is characterised in that: the quantity of the source MO steel cylinder is more
It is a, and multiple source MO steel cylinder is to be connected in series.
6. a kind of MO source supply device according to claim 1, it is characterised in that: the boiling point of the organic solvent is 1300
℃。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910097515.0A CN109852948B (en) | 2019-01-31 | 2019-01-31 | MO source supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910097515.0A CN109852948B (en) | 2019-01-31 | 2019-01-31 | MO source supply device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109852948A true CN109852948A (en) | 2019-06-07 |
| CN109852948B CN109852948B (en) | 2024-04-12 |
Family
ID=66897157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910097515.0A Active CN109852948B (en) | 2019-01-31 | 2019-01-31 | MO source supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109852948B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110953476A (en) * | 2019-12-23 | 2020-04-03 | 常熟制药机械厂有限公司 | MO source quadruple steel cylinder |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102732956A (en) * | 2012-06-18 | 2012-10-17 | 中国电子科技集团公司第四十八研究所 | MO source supply system for GaN epitaxy of MOCVD equipment |
| TWM481323U (en) * | 2014-03-17 | 2014-07-01 | Jiangsu Nata Opto Electronic Material Co Ltd | Package container cascade system for solid metal organic compound |
| CN103924218A (en) * | 2014-04-25 | 2014-07-16 | 安徽亚格盛电子新材料有限公司 | Device for sustainably supplying MO source |
| CN209702860U (en) * | 2019-01-31 | 2019-11-29 | 苏州普耀光电材料有限公司 | A kind of MO source supply device |
-
2019
- 2019-01-31 CN CN201910097515.0A patent/CN109852948B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102732956A (en) * | 2012-06-18 | 2012-10-17 | 中国电子科技集团公司第四十八研究所 | MO source supply system for GaN epitaxy of MOCVD equipment |
| TWM481323U (en) * | 2014-03-17 | 2014-07-01 | Jiangsu Nata Opto Electronic Material Co Ltd | Package container cascade system for solid metal organic compound |
| CN103924218A (en) * | 2014-04-25 | 2014-07-16 | 安徽亚格盛电子新材料有限公司 | Device for sustainably supplying MO source |
| CN209702860U (en) * | 2019-01-31 | 2019-11-29 | 苏州普耀光电材料有限公司 | A kind of MO source supply device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110953476A (en) * | 2019-12-23 | 2020-04-03 | 常熟制药机械厂有限公司 | MO source quadruple steel cylinder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109852948B (en) | 2024-04-12 |
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