CN109842320A - A kind of atmospheric plasma excitation power source - Google Patents

A kind of atmospheric plasma excitation power source Download PDF

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Publication number
CN109842320A
CN109842320A CN201910170755.9A CN201910170755A CN109842320A CN 109842320 A CN109842320 A CN 109842320A CN 201910170755 A CN201910170755 A CN 201910170755A CN 109842320 A CN109842320 A CN 109842320A
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CN
China
Prior art keywords
voltage
current
full
bridge converter
tension transformer
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910170755.9A
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Chinese (zh)
Inventor
姚志毅
林伟群
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen CSL Vacuum Science and Technology Co Ltd
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Shenzhen CSL Vacuum Science and Technology Co Ltd
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Publication date
Application filed by Shenzhen CSL Vacuum Science and Technology Co Ltd filed Critical Shenzhen CSL Vacuum Science and Technology Co Ltd
Priority to CN201910170755.9A priority Critical patent/CN109842320A/en
Publication of CN109842320A publication Critical patent/CN109842320A/en
Pending legal-status Critical Current

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Abstract

The present invention supplies: a kind of atmospheric plasma excitation power source, circuit of power factor correction, full-bridge converter, high-tension transformer;Alternating current becomes direct current by circuit of power factor correction, after full-bridge converter is reverse into alternating current, forms atmospheric plasma excitation voltage by high-tension transformer;The pwm signal control opening and closing that the switch of full-bridge converter is generated by microcontroller, it further include the current detection circuit and voltage detecting circuit detected to the input current and output voltage of high-tension transformer, the output of current detection circuit and voltage detecting circuit connects the microcontroller, and the microcontroller generates each switch of the pwm signal control full-bridge converter of suitable duty ratio according to the voltage and current situation of detection.In the present invention, microcontroller utilizes the switch that the pwm signal control full-bridge converter of suitable duty ratio is generated to current detection circuit and voltage detecting circuit detection high-tension transformer electric current and voltage, adjusts output power, guarantees that plasma atmospheres output is stablized.

Description

A kind of atmospheric plasma excitation power source
Technical field
The present invention relates to field of power supplies, especially a kind of atmospheric plasma excitation power source.
Background technique
Make gaseous conduction, referred to as gas discharge using extra electric field or high-frequency induction electric field.Gas discharge be generate etc. from One of the important means of daughter.The electronics in partial ionized gas and neutral molecule accelerated by extra electric field collides, from electricity The energy that field obtains is transmitted to gas.The elastic collision of electronics and neutral molecule causes molecular kinetic energy to increase, and shows as temperature raising; And inelastic collision then causes to excite (electronics in molecule or atom transits to high level by low-lying level), dissociation (molecule decomposition For atom) or ionization (outer-shell electron of molecule or atom becomes free electron from bound state).High-temperature gas passes through conduction, convection current Energy is transmitted to ambient enviroment with radiation, under Steady, in constant volume input energy and off-energy it is equal.Electronics The rate of energy transmission and collision frequency (number collided in the unit time) are at just between heavy particle (ion, molecule and atom) Than.In dense gas, frequently, the mean kinetic energy (i.e. temperature) of two class particles easily reaches balance, therefore electronics temperature for collision Degree and gas temperature are roughly equal, this be air pressure more than an atmospheric pressure when usual situation, commonly referred to as hot plasma Or equilibrium plasma.Under low air pressure condition, seldom, the energy that electronics is obtained from electric field is not easy to be transmitted to heavy particle for collision, Electron temperature is higher than gas temperature, commonly referred to as cold plasma or nonequilibrium plasma at this time.Two class plasmas respectively have Features and applications (see the industrial application of plasma).Gas discharge is divided into direct-current discharge and alternating current discharge.
Atmospheric plasma excitation at present needs to make air molecule ionization (the outer layer electricity in air molecule using strong electric field Son becomes free electron by bound state), such free electron forms access between two poles for forming electric field, makes between the two poles of the earth Generate electric current.
Currently, atmospheric plasma excitation voltage is more than 15000VAC, and keep voltage that will drop after generating atmospheric plasma As low as 8000VAC or so, there is presently no the power supplys that can satisfy requirement.
Summary of the invention
The present invention provides a kind of atmospheric plasma excitation electricity for power supply needed for atmospheric plasma excites is not able to satisfy at present Source, power supply voltage when gas is excited and ionized are up to 15000VAC, 8000VAC or so are maintained at after gas ionization.
The present invention is that technical solution used by realizing its technical purpose is: a kind of atmospheric plasma excitation power source, power Factor correcting circuit, full-bridge converter, high-tension transformer;Alternating current becomes direct current by circuit of power factor correction, through full-bridge After converter is reverse into alternating current, atmospheric plasma excitation voltage is formed by high-tension transformer;The full-bridge converter The pwm signal control opening and closing and frequency that switch is generated by microcontroller adjust, further include to the input current of high-tension transformer with The current detection circuit and voltage detecting circuit that output voltage is detected, the current detection circuit and voltage detecting circuit Output connect the microcontroller, the microcontroller generates suitable duty ratio according to the voltage and current situation of detection Pwm signal and frequency control full-bridge converter each switch.The output of plasma glow detection circuit connects the microcontroller, Plasma glow is checked, working condition is determined according to aura situation.
In the present invention, microcontroller utilize to current detection circuit and voltage detecting circuit detection high-tension transformer electric current and Voltage generates the pwm signal of suitable duty ratio and the switch of frequency control full-bridge converter, adjusts output power, guarantee etc. The output of gas ions atmosphere is stablized.
Further, in above-mentioned atmospheric plasma excitation power source: the current detection circuit is by being mounted on high pressure Mutual inductor sample electric current on the primary coil of transformer, the voltage coupling by setting on the secondary winding of voltage detecting circuit It attaches together and sets sampled voltage.
Further, in above-mentioned atmospheric plasma excitation power source: the full-bridge converter is using zero voltage switch Full-bridge converter.
Further, in above-mentioned atmospheric plasma excitation power source: the high-tension transformer is using parasitic inductance, posts Raw capacitor realizes the high-tension transformer of capacitor, inductance resonance.
Below with reference to drawings and examples, the present invention is described in detail.
Detailed description of the invention
Fig. 1 is atmospheric plasma excitation power source functional block diagram of the present invention.
Specific embodiment
Embodiment 1, as shown in Figure 1, the present embodiment is a kind of atmospheric plasma excitation power source, it is a kind of to start to export 15000VAC needs to be maintained at the excitation electricity of 8000VAC after the normal work namely after atmosphere plasma excitation Source.
As shown in Figure 1, the atmospheric plasma excitation power source of the present embodiment as general high-voltage ac power, has function Rate factor correcting (PWR) circuit, full-bridge converter, high-tension transformer;Alternating current becomes direct current by circuit of power factor correction, After full-bridge converter is reverse into alternating current, atmospheric plasma excitation voltage is formed by high-tension transformer;With at present it is common Unlike high-voltage ac power, in the present embodiment, full-bridge converter is the full-bridge converter using zero voltage switch, utilizes one A microprocessor generates the pwm signal and frequency of control Sofe Switch folding, and each Sofe Switch is made to realize no-voltage conducting ZVS technology, To guarantee to consume the smallest power consumption, Sofe Switch heating power consumption is reduced, the service life of full-bridge converter can be effectively increased.This implementation In example, the pwm signal and frequency control that the switch of full-bridge converter is generated by microcontroller are opened and closed, and the timing of switch is by micro process ZVS is realized in device control.Further include current detection circuit that the input current and output voltage of high-tension transformer are detected and Voltage detecting circuit, in the present embodiment, current detection circuit passes through the mutual inductor that is mounted on the primary coil of high-tension transformer Sample rate current, and the then voltage coupling devices sampled voltage by setting on the secondary winding of voltage detecting circuit.Electric current inspection The output of slowdown monitoring circuit and voltage detecting circuit connects the microcontroller, and microcontroller is produced according to the voltage and current situation of detection The pwm signal of raw suitable duty ratio and each switch of frequency control full-bridge converter.
In the present embodiment, high-tension transformer is the high voltage variable that capacitor, inductance resonance are realized using parasitic inductance, parasitic capacitance Depressor.By the adjusting to its parasitic capacitance and parasitic inductance, high-tension transformer is made to form the high-tension transformer of inductance resonance.
In the present embodiment, further includes the protective module protected to atmospheric plasma excitation power source, utilize voltage detecting Module detects the voltage of high-tension transformer, if voltage still remains 1500V within 500-600ms after High voltage output When, illustrate that ion nozzle is not installed correctly, need to check, and hence it is also possible to have a warning device, after High voltage output It just needs to alarm when voltage still remains 1500V within 500-600ms, makes staff to check.
Further include the detection module to atmospheric plasma glow in the present embodiment, detects ion nozzle using photosensitive module Whether work normally, if there is no plasma glow after electric power starting, power supply meeting automatic protection after 2 seconds, and alarm is triggered, make work It is checked as personnel.
In the present embodiment, further includes the control circuit to pneumatic system, the pressure of air inlet gas is detected, to gas Control is opened and closed in output, other outputs is made to link with power output.If inputting the insufficient pressure of gas source, power supply Guard mode will be entered, and trigger alarm, make staff to check.
It further include the driving circuit to rotating electric machine in the present embodiment, rotating electric machine will be exported in power to be joined Dynamic, usually rotating electric machine in a dormant state, just start to work when only opening power by rotating electric machine.
It further include display and panel operation in the present embodiment, Display panel can show power, frequency and working condition, respectively The information of kind alarm, the pressure including gas.Panel operation can carry out power adjustment, and power is switched on and off, gas flow The setting of adjustment and pressure alarm threshold values.
It further include remotely controlling in the present embodiment, long-range control can be digital control by RS485 and RS232, can also be with It is remotely controlled by simulating mouth.

Claims (4)

1. a kind of atmospheric plasma excitation power source, circuit of power factor correction, full-bridge converter, high-tension transformer;Alternating current passes through Circuit of power factor correction becomes direct current, after full-bridge converter is reverse into alternating current, forms atmosphere by high-tension transformer Excitation of plasma voltage;It is characterized by: the pwm signal control that the switch of the full-bridge converter is generated by microcontroller is opened It closes and frequency adjusts, further include the current detection circuit and electricity detected to the input current and output voltage of high-tension transformer Detection circuit is pressed, the output of the current detection circuit and voltage detecting circuit connects the microcontroller, the micro-control Device processed generates the pwm signal of suitable duty ratio according to the voltage and current situation of detection and frequency controls each of full-bridge converter Switch.The output of plasma glow detection circuit connects the microcontroller, checks plasma glow, according to aura situation Determine working condition.
2. atmospheric plasma excitation power source according to claim 1, it is characterised in that: the current detection circuit passes through The mutual inductor sample electric current being mounted on the primary coil of high-tension transformer, voltage detecting circuit by be arranged in secondary coil On voltage coupling devices sampled voltage.
3. atmospheric plasma excitation power source according to claim 1, it is characterised in that: the full-bridge converter is to use The full-bridge converter of zero voltage switch.
4. atmospheric plasma excitation power source according to claim 1 or 2 or 3, it is characterised in that: the high-tension transformer For the high-tension transformer for realizing capacitor, inductance resonance using parasitic inductance, parasitic capacitance.
CN201910170755.9A 2019-03-07 2019-03-07 A kind of atmospheric plasma excitation power source Pending CN109842320A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910170755.9A CN109842320A (en) 2019-03-07 2019-03-07 A kind of atmospheric plasma excitation power source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910170755.9A CN109842320A (en) 2019-03-07 2019-03-07 A kind of atmospheric plasma excitation power source

Publications (1)

Publication Number Publication Date
CN109842320A true CN109842320A (en) 2019-06-04

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CN201910170755.9A Pending CN109842320A (en) 2019-03-07 2019-03-07 A kind of atmospheric plasma excitation power source

Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114973899A (en) * 2022-06-02 2022-08-30 中国科学院合肥物质科学研究院 Simulation device for atmospheric radiation excited by electrons
CN115580273A (en) * 2022-12-08 2023-01-06 摩尔线程智能科技(北京)有限责任公司 Signal generating circuit, signal generating method and voltage control method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114973899A (en) * 2022-06-02 2022-08-30 中国科学院合肥物质科学研究院 Simulation device for atmospheric radiation excited by electrons
CN114973899B (en) * 2022-06-02 2023-08-29 中国科学院合肥物质科学研究院 Simulation device for electronic excitation of atmospheric radiation
CN115580273A (en) * 2022-12-08 2023-01-06 摩尔线程智能科技(北京)有限责任公司 Signal generating circuit, signal generating method and voltage control method

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