CN109840582A - Airborne particle counter redundancy fault-tolerant system and signal processing method - Google Patents
Airborne particle counter redundancy fault-tolerant system and signal processing method Download PDFInfo
- Publication number
- CN109840582A CN109840582A CN201910246223.9A CN201910246223A CN109840582A CN 109840582 A CN109840582 A CN 109840582A CN 201910246223 A CN201910246223 A CN 201910246223A CN 109840582 A CN109840582 A CN 109840582A
- Authority
- CN
- China
- Prior art keywords
- processor
- processing
- unit
- analog
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 34
- 238000003672 processing method Methods 0.000 title claims abstract description 11
- 238000006243 chemical reaction Methods 0.000 claims abstract description 29
- 238000001514 detection method Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 238000004088 simulation Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 4
- 238000004458 analytical method Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012421 spiking Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
The present invention relates to a kind of airborne particle counter redundancy fault-tolerant system and signal processing methods, belong to optical dust particle counter field.The system includes: sensor, primary processor, first from processor, second from processor and display screen；Primary processor has been internally integrated primary processor analog-to-digital conversion module, Main Processor Unit；First has been internally integrated first from processor analog-to-digital conversion module, first from processing unit from processor；Second has been internally integrated second from processor analog-to-digital conversion module, second from processing unit from processor；Sensor is electrically connected from processor, second from processor with primary processor, first respectively by conducting wire；First passes through conducting wire and primary processor electrical connection from processor, second from processor；Primary processor is electrically connected by conducting wire and display screen；It can solve the analog signal that uniprocessor exports sensor to handle, under the conditions of different bad working environments, the more obvious problem of the interference of signal；The failure rate of reduction system.
Description
Technical field
The invention belongs to the fields optical dust particle counter (Optical Particle Counter, OPC), specifically relate to
And a kind of airborne particle counter redundancy fault-tolerant system and signal processing method.
Background technique
Most of micro- pollution (Micro-contamination) industry is all relied on using optical dust particle counter,
Optical dust particle counter is commonly used in the atmospheric particles pollution in detection toilet and clean area, to the big of clean environment
The number of microcosmic particle carries out statistics and analysis in gas, and makes cleaning to clean environment according to international standards such as ISO14644-1
The judgement of grade is widely used in the industries such as pharmacy, chemical industry, microelectronics, semiconductor, inspection and quarantine.
The core component of optical particle counter is sensor, using light scattering principle, using photodetector particle
The optical signal of scattering is converted into electric signal, and particle size is smaller, and signal is fainter.The analog signal of sensor output, mostly
It is that frequency is relatively high and random spiking.These features result in the processing difficulty of the analog signal of sensor output
It is very big, and then the accuracy for resulting in airborne particle counter is not high.
Traditional corpuscular counter is handled using the analog signal that uniprocessor exports sensor, different severe
Under working condition, the interference of signal is more obvious, reduces the accuracy of airborne particle counter, the reliability of instrument.
Summary of the invention
The purpose of the present invention is to provide a kind of structures simply, the airborne particle counter of high reliability, high accuracy is superfluous
Remaining tolerant system and signal processing method.
In order to achieve the above objectives, the invention provides the following technical scheme:
In a first aspect, a kind of airborne particle counter redundancy fault-tolerant system is provided, and the system comprises: sensor, main place
Device, first are managed from processor, second from processor and display screen；
The primary processor has been internally integrated primary processor analog-to-digital conversion module, Main Processor Unit；Described first from processing
Device has been internally integrated first from processor analog-to-digital conversion module, first from processing unit；Described second is internally integrated from processor
Have second from processor analog-to-digital conversion module, second from processing unit；
Sensor is electrically connected from processor, second from processor with primary processor, first respectively by conducting wire；First from
Processor, second pass through conducting wire from processor and primary processor is electrically connected；The primary processor passes through conducting wire and display screen
Electrical connection.
Optionally, the analog signal of output is respectively sent to described first from processor, described second by the sensor
From processor and the primary processor；
Correspondingly, described first from processor, described second from processor and the primary processor respectively to receiving
Analog signal is converted into digital signal, and handles the digital signal.
Optionally, the Main Processor Unit is electrical from processing unit from processing unit and described second with described first respectively
It is connected；
The Main Processor Unit includes logical operation circuit, and the logical operation circuit is defeated from processing unit by described first
Processing result, the described second processing result exported from processing unit and/or the Main Processor Unit out believes the number
Number processing result carry out logical operation, obtain final process result.
Optionally, the display screen is made of touch control display module.
Optionally, the touch control display module includes touching driving chip and screen driving chip, the touch driving chip
For TSC2046 chip, the screen driving chip is SSD1963 chip.
Optionally, the Main Processor Unit, described first use from processing unit and described second from processing unit
Cortex M3 chip.
Second aspect provides the signal processing method in a kind of airborne particle counter redundancy fault-tolerant system, the method
In the airborne particle counter redundancy fault-tolerant system provided applied to first aspect, which comprises
The analog signal that the sensor exports is converted to digital signal by the primary processor analog-to-digital conversion module, and
Signal processing is carried out in Main Processor Unit, obtains the first processing result；
Described first converts digital signal for the analog signal that the sensor exports from processor analog-to-digital conversion module,
And signal processing is carried out from processing unit first, obtain second processing result；And the second processing result is sent to
The Main Processor Unit；
Described second converts digital signal for the analog signal that the sensor exports from processor analog-to-digital conversion module,
And signal processing, third processing result are carried out from processing unit second；And the third processing result is sent to described
Main Processor Unit；
The Main Processor Unit executes logical operation: ((a&b&c)==a) && ((a&b&c)==b) && ((a&b&c)=
=c) it is whether true；It is a&b&c that result is exported if setting up；Logical operation is executed if invalid: ((a&b)==a) &&
Whether ((a&b)==b) be true；, if so, then exporting result is a&b；If not, then execute logical operation: ((b&c)=
Whether=b) && ((b&c)==c) is true；If so, then exporting result is b&c；If not, then execute logical operation:
(whether (a&c)==a) && ((a&c)==c) is true；If so, then exporting result is a&c；If not, then labeled as event
Hinder and show, generates journal file；
Wherein, a is first processing result, and b is the second processing as a result, c is the third processing result.
Optionally, the analog signal that the sensor exports is converted to digital letter by the primary processor analog-to-digital conversion module
Before number, further includes:
The Main Processor Unit sends first state detection code to described first from processing unit；And to described second from
It manages unit and sends the second state-detection code；
Received first state detection code is returned to the Main Processor Unit from processing unit by described first；
Received second state-detection code is returned to the Main Processor Unit from processing unit by described second；
The first state code and the Main Processor Unit that the Main Processor Unit more described first is sent from processing unit
The first state code of transmission it is whether consistent and described second from processing unit send the second status code and the main process task list
Whether the second status code that member is sent is consistent；
It is labeled as failure if inconsistent and shows, generates journal file.
The beneficial effects of the present invention are: by the way that three channels, three processors are arranged in systems simultaneously to sensor
The analog signal of output is acquired and handles, and three signal processing channels are mutually indepedent, and substantially increase signal processing can
By property；It can solve the analog signal that uniprocessor exports sensor to handle, under the conditions of different bad working environments, signal
Interference it is more obvious, the problem of reducing accuracy, the reliability of instrument of airborne particle counter；Even if any one is logical
Interference of the road by bad working environments environment or any one break down from processor, will not influence normally to count, greatly drop
The low failure rate of system.
Airborne particle counter redundancy fault-tolerant signal processing method of the present invention is simple and effective, the requirement to processor
It is lower, and then save the overall cost of instrument.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention and the accompanying drawings.
Detailed description of the invention
Fig. 1 is airborne particle counter redundancy fault-tolerant system composition schematic diagram of the invention.
Fig. 2 is the flow chart of the signal processing method in airborne particle counter redundancy fault-tolerant system of the invention.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
Referring to Fig.1, airborne particle counter redundancy fault-tolerant system in an embodiment of the present invention, the system include: to pass
Sensor 110, primary processor 120, first are from processor 130, second from processor 140 and display screen 150.
Sensor 110 is electric from processor 130, second from processor 140 with primary processor 120, first respectively by conducting wire
Gas connection；First is electrically connected by conducting wire and primary processor 120 from processor 130, second from processor 140；Main process task
Device 120 is electrically connected by conducting wire and display screen 150.
The analog signal of output for that will be respectively sent to first from processor 130, second from processor by sensor 110
140 and primary processor 120；Correspondingly, it first is docked respectively from processor 130, second from processor 140 and primary processor 120
The analog signal received is converted into digital signal, and handles digital signal.
Specifically, primary processor 120 has been internally integrated primary processor analog-to-digital conversion module and Main Processor Unit.Wherein, main
Processor analog-to-digital conversion module is used to the analog signal that primary processor 120 receives being converted into digital signal；Main Processor Unit
For being handled digital signal to obtain processing result.
First has been internally integrated first from processor analog-to-digital conversion module and first from processing unit from processor 130.Its
In, first is used to be converted into digital letter from the analog signal that processor 130 receives for first from processor analog-to-digital conversion module
Number；First is used to be handled digital signal to obtain processing result from processing unit.
Second has been internally integrated second from processor analog-to-digital conversion module and second from processing unit from processor 140.Its
In, second is used to be converted into digital letter from the analog signal that processor 140 receives for second from processor analog-to-digital conversion module
Number；Second is used to be handled digital signal to obtain processing result from processing unit.
This system forms three treatment channels by three processors and carries out simultaneously to the analog signal of sensor output
Acquisition and processing, and three signal processing channels are mutually indepedent, substantially increase the reliability of signal processing.
In the present embodiment, Main Processor Unit is electrical from processing unit from processing unit and described second with described first respectively
It is connected；Main Processor Unit includes logical operation circuit, processing result that logical operation circuit is exported first from processing unit, the
Two processing results exported from processing unit and/or Main Processor Unit carry out logical operation to the processing result of digital signal, obtain
To final process result.It is instructed in this way, Main Processor Unit can be sent to first from processing unit, second from processor unit, the
One can also pass to calculated result Main Processor Unit from processing unit from processing unit, second, so for Main Processor Unit into
Row logical operation.
Primary processor is electrically connected by conducting wire and display screen, is convenient for human-computer interaction and display processing result.
Optionally, display screen 150 is made of touch control display module.The touch control display module includes touching driving chip and screen
Driving chip, touch driving chip are TSC2046 chip, and screen driving chip is SSD1963 chip.
Optionally, Main Processor Unit, first use Cortex M3 chip from processing unit from processing unit and second.
In conclusion airborne particle counter redundancy fault-tolerant system provided by the invention, by the way that three are arranged in systems
Channel, three processors are acquired and handle to the analog signal of sensor output simultaneously, and three signal processing channels are mutual
It is independent, substantially increase the reliability of signal processing；It can solve at the analog signal that uniprocessor exports sensor
Reason, under the conditions of different bad working environments, the interference of signal is more obvious, reduces accuracy, the instrument of airborne particle counter
Reliability the problem of；Even if any one channel by bad working environments environment interference or any one from processor occur
Failure will not influence normally to count, greatly reduce the failure rate of system.
Optionally, it is based on above-mentioned airborne particle counter redundancy fault-tolerant system, referring to Fig. 2, the application one is schematically implemented
Example is also provided with the signal processing method in airborne particle counter redundancy fault-tolerant system, and this method includes at least following step
It is rapid:
Step 201, the analog signal that sensor exports is converted to digital signal by primary processor analog-to-digital conversion module, and
Signal processing is carried out in Main Processor Unit, obtains the first processing result.
Step 202, first digital signal is converted by the analog signal that sensor exports from processor analog-to-digital conversion module,
And signal processing is carried out from processing unit first, obtain second processing result；And second processing result is sent to main place
Manage unit.
Step 203, second digital signal is converted by the analog signal that sensor exports from processor analog-to-digital conversion module,
And signal processing, third processing result are carried out from processing unit second；And third processing result is sent to main process task list
Member.
Step 204, Main Processor Unit executes logical operation: ((a&b&c)==a) && ((a&b&c)==b) && ((a&b&
C)==c) it is whether true；It is a&b&c that result is exported if setting up；Logical operation is executed if invalid: ((a&b)==
A) whether && ((a&b)==b) is true；, if so, then exporting result is a&b；If not, then execute logical operation: ((b&
Whether c)==b) && ((b&c)==c) is true；If so, then exporting result is b&c；If not, then execute logic fortune
Calculate: (whether (a&c)==a) && ((a&c)==c) is true；If so, then exporting result is a&c；If not, then mark
It for failure and shows, generate journal file, a is the first processing result, and b is second processing as a result, c is third processing result.
Optionally, before step 201, primary processor can also be determined first from processing unit and second from processing unit
Whether break down.At this point, Main Processor Unit sends first state detection code to first from processing unit；And to second from processing
Unit sends the second state-detection code；Received first state detection code is returned to Main Processor Unit from processing unit by first；
Received second state-detection code is returned to Main Processor Unit from processing unit by second；Main Processor Unit compares first from processing
Whether the first state code and the first state code that sends of Main Processor Unit that unit is sent are consistent and second from processing unit hair
Whether the second status code sent and the second status code that Main Processor Unit is sent are consistent；It is labeled as failure if inconsistent and shows
Show, generates journal file.
In conclusion the signal processing method in airborne particle counter redundancy fault-tolerant system provided in this embodiment, leads to
Cross primary processor analog-to-digital conversion module and the analog signal that sensor exports be converted into digital signal, and in Main Processor Unit into
Row signal processing obtains the first processing result；First analog signal for exporting sensor from processor analog-to-digital conversion module turns
Digital signal is turned to, and carries out signal processing from processing unit first, obtains second processing result；And by second processing knot
Fruit is sent to Main Processor Unit；Second converts digital letter for the analog signal that sensor exports from processor analog-to-digital conversion module
Number, and signal processing, third processing result are carried out from processing unit second；And third processing result is sent to main process task
Unit；Main Processor Unit executes logical operation according to the first processing result, second processing result and third processing result；It can solve
The analog signal that certainly uniprocessor exports sensor is handled, and under the conditions of different bad working environments, the interference of signal is more
Obviously, the problem of reducing accuracy, the reliability of instrument of airborne particle counter；Even if any one channel is by severe
The interference of work condition environment or any one break down from processor, will not influence normally to count, greatly reduce system
Failure rate.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (8)
1. a kind of airborne particle counter redundancy fault-tolerant system, which is characterized in that the system comprises: sensor, primary processor,
First from processor, second from processor and display screen；
The primary processor has been internally integrated primary processor analog-to-digital conversion module, Main Processor Unit；Described first out of processor
Portion is integrated with first from processor analog-to-digital conversion module, first from processing unit；Described second has been internally integrated from processor
Two from processor analog-to-digital conversion module, second from processing unit；
Sensor is electrically connected from processor, second from processor with primary processor, first respectively by conducting wire；First from processing
Device, second pass through conducting wire from processor and primary processor is electrically connected；The primary processor is electrical by conducting wire and display screen
Connection.
2. system according to claim 1, which is characterized in that the analog signal of output is respectively sent to by the sensor
Described first from processor, described second from processor and the primary processor；
Correspondingly, described first from processor, described second from processor and the primary processor simulation to receiving respectively
Signal is converted into digital signal, and handles the digital signal.
3. system according to claim 2, which is characterized in that the Main Processor Unit is single from processing with described first respectively
It is first and described second is electrically connected from processing unit；
The Main Processor Unit includes logical operation circuit, what the logical operation circuit was exported described first from processing unit
Processing result, the described second processing result exported from processing unit and/or the Main Processor Unit are to the digital signal
Processing result carries out logical operation, obtains final process result.
4. system according to any one of claims 1 to 3, which is characterized in that the display screen is made of touch control display module.
5. system according to claim 4, which is characterized in that the touch control display module includes touching driving chip and screen
Driving chip, the touch driving chip are TSC2046 chip, and the screen driving chip is SSD1963 chip.
6. system according to any one of claims 1 to 3, which is characterized in that the Main Processor Unit, described first are from processing
Unit and described second uses Cortex M3 chip from processing unit.
7. the signal processing method in a kind of airborne particle counter redundancy fault-tolerant system, which is characterized in that the method application
In any airborne particle counter redundancy fault-tolerant system of claim 1 to 6, which comprises
The analog signal that the sensor exports is converted to digital signal by the primary processor analog-to-digital conversion module, and at main place
Signal processing is carried out in reason unit, obtains the first processing result；
Described first converts digital signal for the analog signal that the sensor exports from processor analog-to-digital conversion module, and
First carries out signal processing from processing unit, obtains second processing result；And the second processing result is sent to described
Main Processor Unit；
Described second converts digital signal for the analog signal that the sensor exports from processor analog-to-digital conversion module, and
Second carries out signal processing, third processing result from processing unit；And the third processing result is sent to the main place
Manage unit；
The Main Processor Unit executes logical operation: ((a&b&c)==a) && ((a&b&c)==b) && ((a&b&c)==c)
It is whether true；It is a&b&c that result is exported if setting up；Logical operation is executed if invalid: ((a&b)==a) && ((a&b)
==b) it is whether true；, if so, then exporting result is a&b；If not, then execute logical operation: ((b&c)==b) &&
Whether ((b&c)==c) be true；If so, then exporting result is b&c；If not, then execute logical operation: ((a&c)=
=a) && ((a&c)==c) it is whether true；If so, then exporting result is a&c；If not, it is then labeled as failure and shows
Show, generates journal file；
Wherein, a is first processing result, and b is the second processing as a result, c is the third processing result.
8. the method according to the description of claim 7 is characterized in that the primary processor analog-to-digital conversion module is by the sensor
The analog signal of output is converted to before digital signal, further includes:
The Main Processor Unit sends first state detection code to described first from processing unit；And it is single to described second from processing
Member sends the second state-detection code；
Received first state detection code is returned to the Main Processor Unit from processing unit by described first；
Received second state-detection code is returned to the Main Processor Unit from processing unit by described second；
The first state code and the Main Processor Unit that the Main Processor Unit more described first is sent from processing unit are sent
First state code it is whether consistent and described second from processing unit send the second status code and the Main Processor Unit send out
Whether the second status code sent is consistent；
It is labeled as failure if inconsistent and shows, generates journal file.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910246223.9A CN109840582A (en) | 2019-03-29 | 2019-03-29 | Airborne particle counter redundancy fault-tolerant system and signal processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910246223.9A CN109840582A (en) | 2019-03-29 | 2019-03-29 | Airborne particle counter redundancy fault-tolerant system and signal processing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109840582A true CN109840582A (en) | 2019-06-04 |
Family
ID=66886489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910246223.9A Pending CN109840582A (en) | 2019-03-29 | 2019-03-29 | Airborne particle counter redundancy fault-tolerant system and signal processing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109840582A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101930052A (en) * | 2010-07-21 | 2010-12-29 | 电子科技大学 | Online detection fault-tolerance system of FPGA (Field programmable Gate Array) digital sequential circuit of SRAM (Static Random Access Memory) type and method |
| CN102096401A (en) * | 2010-12-22 | 2011-06-15 | 北京昊图科技有限公司 | Redundant and fault-tolerant safety instrument control system based on fieldbus and ARM (advanced RISC machines) |
| CN104991142A (en) * | 2015-07-09 | 2015-10-21 | 杭州亿恒科技有限公司 | Signal analyzer and device and processing method |
| CN209640917U (en) * | 2019-03-29 | 2019-11-15 | 苏州苏信环境科技有限公司 | Airborne particle counter redundancy fault-tolerant system |
-
2019
- 2019-03-29 CN CN201910246223.9A patent/CN109840582A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101930052A (en) * | 2010-07-21 | 2010-12-29 | 电子科技大学 | Online detection fault-tolerance system of FPGA (Field programmable Gate Array) digital sequential circuit of SRAM (Static Random Access Memory) type and method |
| CN102096401A (en) * | 2010-12-22 | 2011-06-15 | 北京昊图科技有限公司 | Redundant and fault-tolerant safety instrument control system based on fieldbus and ARM (advanced RISC machines) |
| CN104991142A (en) * | 2015-07-09 | 2015-10-21 | 杭州亿恒科技有限公司 | Signal analyzer and device and processing method |
| CN209640917U (en) * | 2019-03-29 | 2019-11-15 | 苏州苏信环境科技有限公司 | Airborne particle counter redundancy fault-tolerant system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209640917U (en) | Airborne particle counter redundancy fault-tolerant system | |
| TWI611327B (en) | Multi-touch touch-sensitive device with multi-frequency capacitive detection comprising means of fault detection | |
| CN111784663A (en) | Method and device for detecting parts, electronic equipment and storage medium | |
| JP2001502417A (en) | Detection of harmful fibers carried in air | |
| CN104062305B (en) | A kind of analysis method of integrated circuit defect | |
| CN109840582A (en) | Airborne particle counter redundancy fault-tolerant system and signal processing method | |
| Pillai et al. | CAN based smart sensor network for indoor air quality monitoring | |
| TW200501304A (en) | Semiconductor manufacturing system | |
| EP0327185A2 (en) | Real time particle fallout monitor | |
| CN104485991A (en) | Optical module fault automatic alarm method and system | |
| CN105911118A (en) | Intelligent detection system and method for smoke components | |
| CN110297457A (en) | A kind of human-computer interaction interface automatic control system for sewage disposal device | |
| Zhao et al. | Design and implementation of portable sensory system for air pollution monitoring monitoring | |
| US7065422B1 (en) | Method and apparatus for system state classification | |
| CN109633091A (en) | Monitoring system is analyzed in AMC gas and the continuous sampling of environmental pollution gas | |
| JP7280843B2 (en) | Mass spectrometer and mass spectrometry method | |
| CN113837983B (en) | Wafer defect analysis method, system, equipment and medium | |
| CN102788943A (en) | Automatic sensing method for online monitored data of partial discharge | |
| CN112087703A (en) | Audio acquisition fault diagnosis method for audio monitor | |
| CN109470626A (en) | A kind of dust free room particulate contamination micro control system | |
| TWI714391B (en) | Sensor applied for x-ray electrostatic eliminator | |
| Sengupta et al. | On system diagnosability in the presence of hybrid faults | |
| US20230004471A1 (en) | Identifying causes of anomalies observed in an integrated circuit chip | |
| JPS6381275A (en) | Abnormality detector for touch sensor | |
| CN108351377A (en) | The Dynamic Response detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |