CN109839191A - A kind of polarization imaging method and device thereof, polarized imaging system - Google Patents
A kind of polarization imaging method and device thereof, polarized imaging system Download PDFInfo
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- CN109839191A CN109839191A CN201910253142.1A CN201910253142A CN109839191A CN 109839191 A CN109839191 A CN 109839191A CN 201910253142 A CN201910253142 A CN 201910253142A CN 109839191 A CN109839191 A CN 109839191A
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- 230000010287 polarization Effects 0.000 title claims abstract description 429
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- 230000005540 biological transmission Effects 0.000 claims abstract description 91
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
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Abstract
The embodiment of the invention discloses a kind of polarization imaging method and device thereof, polarized imaging system, the position that the polarization imaging method passes through variation diaphragm light hole, so that the polarization transmission light beam of different angle range and/or different directions after collecting lens penetrates the diaphragm light hole of diaphragm, to obtain multiple first polarization properties of standard sample and multiple second polarization properties of sample to be tested, and multiple polarization properties errors are obtained by multiple first polarization properties of standard sample and the standard attribute of standard sample, so as to after obtaining multiple second polarization properties of different angle of sample to be tested, it is calibrated by multiple second polarization properties of the polarization properties error to different angle, under the premise of reducing the polarization properties error of multiple second polarization properties obtained, improve the resolution ratio of sample to be tested polarization image, it obtains to be measured The anisotropy information of sample, and polarization imaging method is simple, it is at low cost.
Description
Technical field
The present embodiments relate to polarization imaging technical field more particularly to a kind of polarization imaging method and device thereof, partially
Vibration imaging system.
Background technique
Polarization imaging technology is a kind of advanced characterization method, the basic principle is that the polarization point different by measurement light
Amount, and then some or all of tested light polarization state information is obtained, and analysis and calculating to these polarization information images,
It can obtain polarization parameter image, such as degree of polarization, the angle of polarization, ellipticity angle, polarization transfer characteristics, go inclined characteristic, to be used for
Analyze the various features information such as the shape, roughness, dielectric property even biochemistry of measured object.
Traditional polarization imaging method focuses the polarised light through sample to be tested scattering by collecting lens, after focusing
Polarised light is received by detection device；Detection device by being analyzed and processed to the received polarised light of institute, with needed for obtaining to
The characteristic information of sample.It would generally assume that the incident light of collecting lens object side is flat in the analysis treatment process of detection device
Row light, and the direction of the directional light is parallel with the optical axis of polarized imaging system lens.But during actual polarization imaging, receive
Integrate the incident light of lens object side not all as directional light, the optical axis that there are also some with collecting lens at an angle non-parallel
The presence of light, the non-parallel light can introduce detection error；And when improving the resolution ratio of polarization imaging, it is saturating to need to increase collection
The diameter of mirror reduces collecting lens focal length, to increase the numerical aperture of collecting lens, will so further increase polarization
The error of imaging.
Summary of the invention
For above-mentioned there are problem, the embodiment of the present invention provides a kind of polarization imaging method and device thereof, polarization imaging system
System, can improve the resolution ratio and collection efficiency of polarization imaging under the premise of not increasing polarization imaging error.
In a first aspect, the embodiment of the invention provides a kind of polarization imaging methods, comprising:
The diaphragm light hole that the polarization transmission light beam after standard sample and collecting lens passes through change in location is controlled, to obtain
Take multiple first polarization properties of standard sample；
The standard sample is obtained according to the multiple first polarization properties and the standard polarization properties of the standard sample
Multiple polarization properties errors of product；
The diaphragm light hole that the polarization transmission light beam after sample to be tested and collecting lens passes through change in location is controlled, to obtain
Take multiple second polarization properties of sample to be tested；
The inclined of the sample to be tested is obtained according to the multiple second polarization properties and the multiple polarization properties error
Shake image.
Optionally, it is described according to the multiple second polarization properties and the multiple polarization properties error obtain it is described to
The polarization image of sample includes:
The multiple second polarization properties are calibrated according to the multiple polarization properties error is corresponding, obtain multiple calibration polarizations
Attribute；
According to the multiple calibration polarization properties, multiple calibration polarization images are obtained；
Merge the multiple calibration polarization image, to obtain the polarization image of the sample to be tested.
Optionally, first polarization properties, second polarization properties include Muller matrix.
Second aspect, the embodiment of the invention also provides a kind of polarization imaging devices, comprising:
First polarization properties acquiring unit passes through for controlling the polarization transmission light beam after standard sample and collecting lens
The diaphragm light hole of change in location, to obtain multiple first polarization properties of standard sample；
Polarization properties error acquiring unit, for the mark according to the multiple first polarization properties and the standard sample
Quasi- polarization properties obtain multiple polarization properties errors of the standard sample；
Second polarization properties acquiring unit passes through for controlling the polarization transmission light beam after sample to be tested and collecting lens
The diaphragm light hole of change in location, to obtain multiple second polarization properties of sample to be tested；
Polarization image acquiring unit, for according to the multiple second polarization properties and the multiple polarization properties error
Obtain the polarization image of the sample to be tested.
The third aspect, the embodiment of the invention also provides a kind of polarized imaging systems, comprising: focal plane filter and upper
State polarization imaging device；
The focal plane filter includes beam exit unit, collecting lens, diaphragm and the light set gradually along optical path
Beam receiving unit；Sample to be tested or standard sample are placed between the beam exit unit and the collecting lens；
The beam exit unit is projected on sample to be tested or standard sample for providing polarized incident light beam；
The collecting lens are used to will transmit through the sample to be tested or the polarization transmission light beam of the standard sample converges at
On the focal plane of the collecting lens；
The diaphragm is located on the focal plane of the collecting lens, and the diaphragm converges at the focal plane for controlling
Predetermined angle the polarization transmission light beam penetrate the focal plane；The diaphragm includes diaphragm light hole；
The beam reception unit is used to receive the polarization transmission light beam through the focal plane
Optionally, the focal plane filter further include: analyzing unit；
The analyzing unit is in the optical path between the beam exit unit and the beam reception unit；It is described to
Sample or the standard sample are placed between the beam exit unit and the analyzing unit；The analyzing unit is used for
Modulation is through the sample to be tested or the polarization state of the polarization transmission light beam of the standard sample.
Optionally, the analyzing unit includes the first wave plate and the first polarizing film set gradually along optical path；
First wave plate is oppositely arranged with first polarizing film, through the sample to be tested or the standard sample
Polarization transmission light beam is successively propagated through first wave plate and the first polarizing film.
Optionally, the beam exit unit includes the light source set gradually along the optical path, polarization subelement；
The light source is for providing the directional light of specific wavelength；
The polarization subelement includes the second polarizing film and the second wave plate being oppositely arranged；The directional light of the specific wavelength
Polarized incident light beam successively is converted to by second polarizing film and the second wave plate, is projected to the sample to be tested or the mark
Quasi- sample.
Optionally, first wave plate and second wave plate are quarter wave plate.
Optionally, the center of the diaphragm light hole is not overlapped with the focus of the collecting lens.
Polarization imaging method and device thereof provided in an embodiment of the present invention, polarized imaging system, pass through the more of standard sample
The standard polarization properties of a first polarization properties and standard sample can obtain corresponding multiple polarization properties errors；By multiple
Multiple second polarization properties of polarization properties error and sample to be tested, obtain the polarization properties of sample.The embodiment of the present invention passes through
The position for changing diaphragm light hole, so that the polarization transmission light of different angle range and/or different directions after collecting lens
Beam penetrate diaphragm diaphragm light hole, with obtain standard sample multiple first polarization properties and sample to be tested multiple second partially
Shake attribute, and obtains multiple polarization properties by multiple first polarization properties of standard sample and the standard attribute of standard sample and miss
Difference, so as to obtain sample to be tested different angle multiple second polarization properties after, by polarization properties error to difference
Multiple second polarization properties of angle are calibrated, in the polarization properties error for reducing multiple second polarization properties obtained
Under the premise of, the resolution ratio of sample to be tested polarization image is improved, the anisotropy information of sample to be tested, and polarization imaging are obtained
Method is simple, at low cost.
Detailed description of the invention
Fig. 1 is a kind of flow chart of polarization imaging method provided in an embodiment of the present invention；
Fig. 2 is that a kind of diaphragm light hole provided in an embodiment of the present invention shows along the plan structure that the radial direction of diaphragm changes
It is intended to；
Fig. 3 is that a kind of diaphragm light hole provided in an embodiment of the present invention shows along the side view structure that the radial direction of diaphragm changes
It is intended to；
Fig. 4 is the plan structure that a kind of diaphragm light hole provided in an embodiment of the present invention is not overlapped with the focus of collecting lens
Schematic diagram；
Fig. 5 is the side view structure that a kind of diaphragm light hole provided in an embodiment of the present invention is not overlapped with the focus of collecting lens
Schematic diagram；
Fig. 6 is the flow chart of polarization image synthetic method provided in an embodiment of the present invention；
Fig. 7 is a kind of structural block diagram of polarization imaging device provided in an embodiment of the present invention；
Fig. 8 is a kind of structural schematic diagram of polarized imaging system provided in an embodiment of the present invention；
Fig. 9 is a kind of structural schematic diagram of focal plane filter provided in an embodiment of the present invention；
Figure 10 is the structural schematic diagram of another focal plane filter provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Since optical means non-contactly can carry out high-resolution non-destructive testing to sample to be tested, optical detecting method is being surveyed
There is very extensive application in amount field.And on the basis of traditional optical detection method, by adding polarization module, obtain inclined
Shake strength information and polarization properties of the light beam after sample, to obtain sample microstructure information.
In the prior art, when carrying out the detection of polarization characteristic to sample, it can all assume that polarised light detected vertically leads to
The optical element of polarization measurement system is crossed, but light beam can scatter, this makes portion through after sample to all directions
Divide the polarised light through sample and the optical element non-perpendicular to polarization measurement system, will so introduce measurement error, and thick
The additional information being likely to be present in different scattering direction polarised lights slightly is given up.Meanwhile improving polarization measurement system
When the resolution ratio of polarization imaging, polarization measurement system the received polarised light non-perpendicular to optical element ratio increase, it is more
The error of introducing will become apparent from.
In this way, can introduce biggish polarimetry error when improving the resolution ratio of polarization imaging in the prior art, cause
Metrical information inaccuracy.
Based on above-mentioned technical problem, the embodiment of the present invention provides a kind of polarization imaging method, which can
Polarised light through sample is imaged.Polarization imaging device provided in an embodiment of the present invention can be used in the polarization imaging method
It executes, which can be realized by software and/or hardware.Fig. 1 is a kind of polarization imaging method provided in an embodiment of the present invention
Flow chart.Such as Fig. 1, polarization imaging method provided in an embodiment of the present invention includes:
The polarization transmission light beam of S110, control after standard sample and collecting lens passes through the diaphragm light passing of change in location
Hole, to obtain multiple first polarization properties of standard sample.
Specifically, polarized incident light beam is scattered through the polarization transmission light beam of standard sample to all directions, and not
The microstructure information of standard sample entrained by equidirectional polarization transmission light beam is different.Through the polarization transmission light beam of sample
Through collecting lens post-concentration in the focal plane of collecting lens, and the coke for converging at collecting lens is put down by the diaphragm on the focal plane
The polarization transmission light beam in face carries out space filtering.Since the position of the diaphragm light hole of the diaphragm is adjustable, the diaphragm light passing
The position regulative mode in hole can be to change in the radial direction around the optical axis rotation of diaphragm or along diaphragm, and at different location
Diaphragm light hole can carry out space filtering, therefore the light to the polarization transmission light beam of different angle range and/or different directions
When the diaphragm light passing hole site of door screen constantly changes, so that it may to the different angle range and/or different directions for penetrating standard sample
Polarization transmission light beam carries out space filtering, so that the polarization transmission light beam of multiple and different angular ranges and/or different directions is obtained,
By detecting the polarization properties of the polarization transmission light beam of multiple different angle range and/or different directions, standard can be obtained
Multiple first polarization properties of sample.Wherein, multiple first polarization properties of the standard sample for example may include multiple and different
The corresponding Muller matrix of polarization transmission light beam in direction.
When the polarization state of incident polarization light beam is indicated with stocks vector, i.e., the stocks of incident polarization light beam is sweared
Measure S are as follows:
S=[I, Q, U, V]T
Through the polarization state stocks vector S of the polarization transmission light beam of standard sample1It indicates, M indicates to penetrate standard sample
The Muller matrix of light beam before and after product, as follows:
Illustratively, the diaphragm on the focal plane of collecting lens has diaphragm light hole, in the diaphragm light hole
The heart can be overlapped with the focus of collecting lens or not be overlapped.When the structure of diaphragm is round, the position of adjustable diaphragm light hole
Set the radial direction variation along diaphragm, at this time diaphragm can polarization transmission light beam to different angle range carry out space filtering.
Fig. 2 is the overlooking structure diagram that a kind of diaphragm light hole provided in an embodiment of the present invention changes along the radial direction of diaphragm, Fig. 3
It is the side structure schematic view that a kind of diaphragm light hole provided in an embodiment of the present invention changes along the radial direction of diaphragm.In conjunction with figure
2 and Fig. 3, the position of diaphragm light hole can be any one of first position 111, the second position 112 and the third place 113
At position.Wherein, when diaphragm light hole is located at first position 111, diaphragm light hole is that radius is r1Circular hole, which can be right
The polarization transmission light beam of first angle range carries out space filtering, to obtain pair of the polarization transmission light beam of first angle range
The first polarization properties answered；When diaphragm light hole is located at the second position 112, diaphragm light hole is r2-r1Annulus, which can
Space filtering is carried out to the polarization transmission light beam of second angle range, thus obtain the polarization transmission light beam of second angle range
Corresponding first polarization properties；When diaphragm light hole is located at the third place 113, diaphragm light hole is r3-r2Annulus, the annulus
Can polarization transmission light beam to third angle range carry out space filtering, to obtain the polarization transmission light beam of third angle range
Corresponding first polarization properties.Wherein, r1、r2-r1And r3-r2Numerical value can be identical or not identical.
In addition, the position of diaphragm light hole can also change around diaphragm optical axis.Fig. 4 is provided in an embodiment of the present invention one
The overlooking structure diagram that kind diaphragm light hole is not overlapped with the focus of collecting lens, Fig. 5 is provided in an embodiment of the present invention one
The side structure schematic view that kind diaphragm light hole is not overlapped with the focus of collecting lens.In conjunction with Fig. 4 and Fig. 5, diaphragm light hole 11
Center O' be not overlapped with the focus O of collecting lens, diaphragm light hole 11 around diaphragm optical axis X1 rotate, different directions can be made
Polarization transmission light beam passes through diaphragm light hole 11.When the aperture of the diaphragm light hole 11 of diaphragm 10 is limited to r2-r1When with Ф,
Range through the polarization transmission light beam of diaphragm light hole 11 is | α2-α1|.When diaphragm light hole 11 is located at initial position, thoroughly
The direction for crossing the polarization transmission light beam of diaphragm light hole 11 is α2~α1；Diaphragm light hole 11 is rotated into the angle Ф around diaphragm optical axis X1
Degree, becomes α through the direction of the polarization transmission light beam of diaphragm light hole 113~α4.In this way, can another diaphragm light hole 11 around diaphragm
The multiple of optical axis X1 rotation Ф angle, so that it may obtain the polarization transmission light beam of different directions.Wherein, | α2-α1|=| α4-α3|.Such as
This, the position by changing diaphragm light hole can get the polarization transmission light beam in different angle range and/or different polarization direction
Corresponding multiple first polarization properties.
S120, the mark is obtained according to the multiple first polarization properties and the standard polarization properties of the standard sample
Multiple polarization properties errors of quasi- sample.
Specifically, standard sample is also known as material standard, standard value is collectively formed with Teletext Standard.The standard of standard sample
Polarization properties are able to reflect the microstructure information of standard sample, by by multiple and different angle models of measured standard sample
Enclose and/or corresponding multiple first polarization properties of the polarization transmission light beam of different directions and the standard polarization properties of standard sample into
Row compares, and can get bias of measured multiple first polarization properties relative to standard polarization properties, the as standard sample
The polarization properties error of product.When each first polarization properties difference, the corresponding polarization properties error of each first polarization properties is different,
The polarization of the standard sample can be belonged to error as calibration error when polarization imaging.Wherein, standard polarization properties can be mark
The standard Muller matrix of quasi- sample, the first polarization properties may include measured Muller matrix, then polarization properties obtained
Error is bias of the Muller matrix of the first polarization properties relative to standard Muller matrix.
The polarization transmission light beam of S130, control after sample to be tested and collecting lens passes through the diaphragm around diaphragm optical axis rotation
Light hole, to obtain multiple second polarization properties of sample to be tested.
Specifically, polarized incident light beam is scattered through the polarization transmission light beam of sample to be tested to all directions, and not
The microstructure information of sample to be tested entrained by equidirectional polarization transmission light beam is different.Through the polarization transmission of sample to be tested
Light beam through collecting lens post-concentration in the focal plane of collecting lens, and by the diaphragm on the focal plane to converging at collecting lens
The polarization transmission light beam of focal plane carries out space filtering.Since the position of the diaphragm light hole of the diaphragm is adjustable, the diaphragm
The position regulative mode of light hole can be to change in the radial direction around the optical axis rotation of diaphragm or along diaphragm, and different positions
The diaphragm light hole for setting place can be to different angle range and/or different directions, therefore the diaphragm light passing hole site of the diaphragm is not
When disconnected variation, so that it may carry out space to the polarization transmission light beam of different angle range and/or different directions through sample to be tested
Filtering, so that the polarization transmission light beam of multiple and different angular ranges and/or different directions is obtained, by detecting multiple different angles
The polarization properties for spending the polarization transmission light beam of range and/or different directions, multiple first polarizations that can be obtained sample to be tested belong to
Property.Wherein, multiple second polarization properties of the sample to be tested for example may include the polarization transmission light beam pair in multiple and different directions
The Muller matrix answered.Through the polarization state stocks vector S of the polarization transmission light beam of sample to be tested2It indicates, M' indicates to penetrate
The Muller matrix of the polarised light of sample to be tested, as follows:
Wherein, multiple first polarization properties of the acquisition modes of multiple second polarization properties of sample to be tested and standard sample
Acquisition modes it is identical.
It should be noted that Fig. 2, Fig. 3, Fig. 4 and Fig. 5 are only the illustrative mechanism of diaphragm schematic diagram of the embodiment of the present invention,
Before it can control diaphragm light hole and carry out space filtering to the polarization transmission light beam of different angle range and/or different directions
It puts, the change in location form of structure and diaphragm light hole to diaphragm and diaphragm light hole is not specifically limited.Wherein,
By taking Fig. 2 and Fig. 3 as an example, when diaphragm light hole is located at first position 11, the center of diaphragm light hole 111 and the coke of collecting lens
Point O is overlapped, should be positioned at the size r of the diaphragm light hole of first position 1111The range of a very little can be limited to, it is believed that thoroughly
The polarization transmission light beam of the diaphragm light hole 11 of diaphragm 10 is crossed as the polarization transmission light beam of the focal plane S perpendicular to collecting lens；
Alternatively, according to actual conditions to the size r of the diaphragm light hole of first position 1111It is defined, and corresponding acquisition standard sample
The first polarization properties and sample to be tested the second polarization properties.
S140, the sample to be tested is obtained according to the multiple second polarization properties and the multiple polarization properties error
Polarization image.
Specifically, the resolution ratio due to polarized imaging system is higher, the clarity and contrast of polarization imaging are higher, distinguish
Knowledge and magnanimity are higher, therefore the resolution ratio of raising polarized imaging system is most important in polarization imaging.In general, in polarized imaging system
Collecting lens are provided with, pass through the polarization transmission light beam after sample to be tested, the number of the collecting lens to collect polarized incident light beam
Value aperture NA is bigger, and the absorbing ability of collecting lens is stronger, and the resolution ratio after collected polarization transmission light beam imaging is higher.Root
According to definition, the numerical apertures of collecting lens by medium between collecting lens and sample to be tested 2 α of refractive index n and angular aperture half
Number decision, i.e. numerical aperture NA are as follows:
Wherein, D is the diameter of collecting lens, and f is the focal length of collecting lens.Do not consider collecting lens and sample to be tested it
Between medium refraction index n in the case where, improve collecting lens receipts light ability when, need to increase collecting lens diameter D or
Reduce the focal length f of collecting lens.When the medium between collecting lens and sample to be tested is air, according to resolution ratio d in air
In definition:
Wherein, λ is the wavelength of light beam.In the case where not considering wavelength X, the resolution of polarized imaging system is improved
Rate then just needs to increase the numerical aperture NA of collecting lens.And when the numerical aperture for increasing collecting lens increases, using increase
The mode of the focal length f of the diameter D or reduction collecting lens of collecting lens, must make more non-perpendicular to polarized imaging system
The polarization transmission light beam of optical element.In this way, the error of polarization imaging will be further increased, the accurate of metrical information is reduced
Degree.By calling multiple first polarization properties of according to standard sample after multiple second polarization properties of measurement sample to be tested
The multiple polarization properties errors obtained with standard polarization properties, and by multiple polarization properties errors and multiple second polarization properties,
Obtain the polarization image of sample to be tested.Wherein, when the polarization transmission light beam that polarization properties error is different angle range is corresponding
When error, can corresponding second polarization properties of polarization transmission light beam to different angle range calibrate, thus passing through
When multiple second polarization properties after calibration obtain the polarization image of sample to be tested, the numerical aperture for increasing collecting lens can be equivalent to
Diameter NA, and error introduced after numerical aperture NA increase is offset by polarization properties error, so as to improve
Under the premise of polarization imaging resolution ratio, polarization imaging error is reduced；When the polarization transmission light that polarization properties error is different directions
When the corresponding error of beam, can corresponding second polarization properties of polarization transmission light beam to different directions calibrate, thus
When obtaining the polarization image of sample to be tested by multiple second polarization properties after calibration, the anisotropy of sample to be tested can get
Information further increases the accurate of the polarization imaging of sample to be tested so as to enrich the structural information of obtained sample to be tested
Degree.
The embodiment of the present invention passes through the position of variation diaphragm light hole, so that the different angle range after collecting lens
And/or the polarization transmission light beam of different directions penetrates the diaphragm light hole of diaphragm, to obtain multiple first polarizations of standard sample
Multiple second polarization properties of attribute and sample to be tested, and the mark of multiple first polarization properties and standard sample by standard sample
Quasi- attribute obtains multiple polarization properties errors, so as in multiple second polarization properties for the different angle for obtaining sample to be tested
Afterwards, it is calibrated by multiple second polarization properties of the polarization properties error to different angle, to reduce obtained multiple the
Under the premise of the polarization properties error of two polarization properties, the resolution ratio of sample to be tested polarization image is improved, sample to be tested is obtained
Anisotropy information, and polarization imaging method is simple, it is at low cost.
Optionally, on the basis of the above embodiments, according to the multiple second polarization properties and the multiple polarization
The method that attribute error obtains the polarization image of the sample to be tested specifically includes: corresponding according to the multiple polarization properties error
The multiple second polarization properties are calibrated, multiple calibration polarization properties are obtained；According to the multiple calibration polarization properties, obtain more
A calibration polarization image；Merge the multiple calibration polarization image, to obtain the polarization image of the sample to be tested.Fig. 6 is this
The flow chart for the polarization image synthetic method that inventive embodiments provide.Such as Fig. 6, this method comprises:
S141, the multiple second polarization properties are calibrated according to the multiple polarization properties error is corresponding, obtains multiple schools
Quasi- polarization properties；
S142, according to the multiple calibration polarization properties, obtain multiple calibration polarization images；
S143, merge the multiple calibration polarization image, to obtain the polarization image of the sample to be tested.
Specifically, it is to be measured that acquisition can be corresponded to by the polarization transmission light beam in the multiple and different directions for receiving sample to be tested
Multiple second polarization properties of sample.Due to the angle of the corresponding polarization transmission light beam of multiple second polarization properties of sample to be tested
Range and/or direction and the angular range of the corresponding polarization transmission light beam of multiple first polarization properties of standard sample and/or
Direction is identical, therefore can multiple first polarization properties of according to standard sample and multiple polarizations of the corresponding acquisition of standard polarization properties
Attribute error is corresponding to calibrate multiple second polarization properties, multiple after obtaining multiple second polarization properties calibration of the sample to be tested
Calibrate polarization properties.Each calibration polarization properties all can get the polarization image of a sample to be tested, i.e. calibration polarization image.It is logical
It crosses and multiple calibration polarization images that multiple calibration polarization properties obtain is merged into a polarization image, combined polarization image
The as polarization image of sample to be tested.
In this way, in a first aspect, being belonged to by multiple second polarizations that the polarization transmission light beam of multiple and different angular ranges obtains
Property, it can get high-resolution polarization image；Second aspect, it is obtained by being calibrated to multiple second polarization properties
High-resolution polarization image has lesser error, higher accuracy；The third aspect passes through the polarization in multiple and different directions
Multiple second polarization properties that transmitted light beam obtains can get the anisotropy information of sample to be tested.
The embodiment of the invention also provides a kind of polarization imaging device, which can be performed the embodiment of the present invention
The polarization imaging method of offer, the device can be realized by software and/or hardware.Fig. 7 is one kind provided in an embodiment of the present invention
The structural block diagram of polarization imaging device.Such as Fig. 7, the polarization imaging device of the embodiment of the present invention includes: that the first polarization properties obtain
Unit 101, polarization properties error acquiring unit 102, the second polarization properties acquiring unit 103 and polarization image acquiring unit 104.
The first polarization properties acquiring unit 101, for controlling the polarization transmission after standard sample and collecting lens
Light beam passes through the diaphragm light hole of change in location, to obtain multiple first polarization properties of standard sample；
The polarization properties error acquiring unit 102, for according to the multiple first polarization properties and the standard
The standard polarization properties of sample obtain multiple polarization properties errors of the standard sample；
The second polarization properties acquiring unit 103, for controlling the polarization transmission after sample to be tested and collecting lens
Light beam passes through the diaphragm light hole of change in location, to obtain multiple second polarization properties of sample to be tested；
The polarization image acquiring unit 104, for according to the multiple second polarization properties and the multiple polarization
Attribute error obtains the polarization image of the sample to be tested.
The embodiment of the present invention passes through the position of variation diaphragm light hole, so that the different angle range after collecting lens
And/or the polarization transmission light beam of different directions penetrates the diaphragm light hole of diaphragm, to obtain multiple first polarizations of standard sample
Multiple second polarization properties of attribute and sample to be tested, and the mark of multiple first polarization properties and standard sample by standard sample
Quasi- attribute obtains multiple polarization properties errors, so as in multiple second polarization properties for the different angle for obtaining sample to be tested
Afterwards, it is calibrated by multiple second polarization properties of the polarization properties error to different angle, to reduce obtained multiple the
Under the premise of the polarization properties error of two polarization properties, the resolution ratio of sample to be tested polarization image is improved, sample to be tested is obtained
Anisotropy information, and polarization imaging method is simple, it is at low cost.
Polarization imaging provided by any embodiment of the invention can be performed in polarization imaging device provided in an embodiment of the present invention
Method has and executes the corresponding functional module of this method and beneficial effect.The technology of detailed description is not thin in the above-described embodiments
Section, reference can be made to polarization imaging method provided by any embodiment of the invention.
The embodiment of the invention also provides a kind of polarized imaging systems, can be realized provided in an embodiment of the present invention polarize
Image space method.Fig. 8 is a kind of structural schematic diagram of polarized imaging system provided in an embodiment of the present invention.Such as Fig. 8, the polarization imaging system
System includes focal plane filter 100 and polarization imaging device provided in an embodiment of the present invention 200；Wherein, focal plane filtering dress
Setting 100 includes the beam exit unit 20 set gradually along optical path, collecting lens 30, diaphragm 10 and beam reception unit 40；To
Sample 50 or standard sample 60 are placed between beam exit unit 20 and collecting lens 30；Beam exit unit 20 is for mentioning
For polarized incident light beam, and it is projected on sample to be tested 50 or standard sample 60；Collecting lens 30 are for will transmit through sample to be tested
50 or the polarization transmission light of the standard sample 60 converge on the focal plane S of collecting lens 30；Diaphragm 10 is located at collecting lens
On 30 focal plane S, diaphragm 10 is used to control the polarization transmission light of the predetermined angle converged on the S of focal plane through focal plane S；
Diaphragm 10 includes diaphragm light hole；Beam reception unit 40 is used to receive the polarization transmission light through focal plane S.
Specifically, the polarized incident light beam that beam exit unit 20 provides is through the inclined of sample to be tested 50 or standard sample 60
Vibration transmitted light beam converges at the focal plane S of collecting lens 30 through collecting lens 30；10 pairs of diaphragm be set on the S of the focal plane can
The polarization transmission light beam gathered in the focal plane S of collecting lens 30 carries out space filtering, so that the polarization transmission light of predetermined angle is saturating
Cross focal plane S；Beam reception unit 40 receives the polarization transmission light beam of the predetermined angle through focal plane S, and by the preset angle
The polarization transmission light beam of degree is sent in polarization imaging device 200, which can be according to the inclined of predetermined angle
Vibration transmitted light beam obtains the second polarization properties of corresponding sample to be tested 50 or the first polarization properties of standard sample 60.Meanwhile
By adjusting the position of the diaphragm light hole of diaphragm 10, the position regulative mode of the diaphragm light hole of the diaphragm 10 can be for around light
The optical axis rotation of door screen 10 or changing in the radial direction along diaphragm 10, and the diaphragm light hole at different location can be to difference
The polarization transmission light beam of the predetermined angle of angular range and/or different directions carries out space filtering, to obtain different angle model
It encloses and/or the polarization transmission light beam of different directions.It is saturating by the polarization for detecting multiple different angle range and/or different directions
The polarization properties of irradiating light beam, can be obtained sample to be tested 50 multiple second polarization properties or standard sample 60 multiple first partially
Shake attribute.
Wherein, the center of the diaphragm light hole of optional diaphragm 10 is not overlapped with the focus O of collecting lens 30.In this way, energy
When enough diaphragm light holes in control diaphragm 10 are around the optical axis rotation of diaphragm 10, the polarization transmission light in multiple and different directions is obtained
Beam.Multiple second polarization properties, multiple first polarization properties for example may each comprise multiple and different angular ranges and/or difference
The corresponding Muller matrix of polarization transmission light beam in direction.
By multiple first polarization properties and standard polarization properties of standard sample 60, it can be obtained polarized imaging system and exist
Multiple polarization properties errors when polarization imaging carry out phase by multiple second polarization properties to sample to be tested 50 obtained
The calibration for the polarization properties error answered can be obtained accurate multiple calibration polarization properties, by multiple calibration polarization properties
It can get multiple calibration polarization images, by each calibration polarization image of merging, can be obtained the polarization image of sample to be tested 50, from
And obtain the microstructure of sample to be tested 50.
The present embodiment is by being arranged diaphragm in the focal plane of collecting lens, so that through the inclined of sample to be tested or standard sample
The polarization transmission light of predetermined angle penetrates the focal plane of collecting lens in transmitted light of shaking, to pass through the diaphragm light passing for changing diaphragm
The position in hole can be obtained the corresponding polarization properties of polarization transmission light of multiple and different angular ranges and/or different directions.One side
Face calibrates the polarization properties of sample to be tested by the polarization properties error of standard sample, can make the inclined of sample to be tested
Vibration image accuracy with higher；On the other hand, the polarization by multiple and different angular ranges and/or different polarization direction is saturating
The polarization image rate respectively with higher of the synthesized sample to be tested of light is penetrated, and each to different of sample to be tested can be obtained
Property information.
Optionally, Fig. 9 is a kind of structural schematic diagram of focal plane filter provided in an embodiment of the present invention.Such as Fig. 9,
On the basis of above-described embodiment, focal plane filter 100 further include: analyzing unit 70；Analyzing unit 70 is located at beam exit
In optical path between unit 20 and beam reception unit 40；Sample to be tested 50 or standard sample 60 are placed in beam exit unit 20
Between analyzing unit 70；Analyzing unit 70 is used to adjust through the polarization transmission light beam of sample to be tested 50 or standard sample 60
Polarization state.
Wherein, analyzing unit 70 includes optionally the first wave plate 71 and the first polarizing film 72 set gradually along optical path；The
One wave plate 71 is oppositely arranged with the first polarizing film 72, is successively passed through through the polarization transmission light beam of sample to be tested 50 or standard sample 60
First wave plate 71 and the first polarizing film 72 are propagated.
It should be noted that optical path of the analyzing unit 70 between beam exit unit 20 and beam reception unit 40
In, which can be in the optical path between beam exit unit 20 and collecting lens 30；Alternatively, the analyzing unit
70 may be located in the optical path between collecting lens 30 and diaphragm 10；Alternatively, the analyzing unit 70 may be located on diaphragm 10
In optical path between receiving unit.The illustrative light with analyzing unit 70 between collecting lens 30 and diaphragm 10 of Fig. 9
It is illustrated in road.Technical principle when analyzing unit 70 is located elsewhere is similar with technical principle shown in Fig. 9,
Details are not described herein.
Specifically, the polarized incident light beam that beam exit unit 20 provides penetrates sample to be tested 50 or standard sample 60, it should
It will do it the adjustment of polarization state when through analyzing unit 70 through the polarization transmission light of sample to be tested 50 or standard sample 60.
By rotating the first wave plate 71 of analyzing unit 70, i.e., the polarization shape of the changeable polarization transmission light through the analyzing unit 70
State.Wherein, the first wave plate 71 is chosen as quarter wave plate.
Optionally, Figure 10 is the structural schematic diagram of another focal plane filter provided in an embodiment of the present invention.Such as figure
10, the beam exit unit 20 of focal plane filter 100 includes the light source 21 set gradually along optical path and polarization subelement 22；
Light source 21 is for providing the directional light of specific wavelength；Polarization subelement 22 includes the second polarizing film 221 and second being oppositely arranged
Wave plate 222；The directional light of specific wavelength successively passes through the second polarizing film 221 and the second wave plate 222 is converted to polarized incident light beam,
It is projected to sample to be tested 50 or standard sample 60.
Specifically, the polarized incident light beam that beam exit unit 20 provides has certain polarization direction, light passing control the
Polarization direction of two wave plates 222 relative to the second polarizing film 221, can be obtained the polarized incident light beam in different polarization direction.Its
In, the second wave plate 222 is chosen as quarter wave plate.Second wave plate 222 can be combined with the first wave plate 71, can be measured respectively different inclined
The polarization transmission light in vibration direction.
Polarization imaging method and device thereof provided in an embodiment of the present invention, polarized imaging system pass through variation diaphragm light passing
Position so that the polarization transmission light beam of different angle range and/or different directions after collecting lens penetrate diaphragm light
Late light hole, to obtain multiple first polarization properties of standard sample and multiple second polarization properties of sample to be tested, and by marking
Multiple first polarization properties of quasi- sample and the standard attribute of standard sample obtain multiple polarization properties errors, so as to obtain
After multiple second polarization properties of the different angle of sample to be tested, by polarization properties error to multiple the second of different angle partially
Vibration attribute is calibrated, under the premise of reducing the polarization properties error of multiple second polarization properties obtained, improve to
The resolution ratio of sample polarization image obtains the anisotropy information of sample to be tested, and polarization imaging method is simple, cost
It is low.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts, be combined with each other and substitutes without departing from protection scope of the present invention.Therefore, although by above embodiments to this
Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept
In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. a kind of polarization imaging method characterized by comprising
The diaphragm light hole that the polarization transmission light beam after standard sample and collecting lens passes through change in location is controlled, to obtain mark
Multiple first polarization properties of quasi- sample；
The standard sample is obtained according to the standard polarization properties of the multiple first polarization properties and the standard sample
Multiple polarization properties errors；
Control the diaphragm light hole that polarization transmission light beam after sample to be tested and collecting lens passes through change in location, with obtain to
Multiple second polarization properties of sample；
The polarization figure of the sample to be tested is obtained according to the multiple second polarization properties and the multiple polarization properties error
Picture.
2. the method according to claim 1, wherein described according to the multiple second polarization properties and described
The polarization image that multiple polarization properties errors obtain the sample to be tested includes:
The multiple second polarization properties are calibrated according to the multiple polarization properties error is corresponding, multiple calibration polarizations is obtained and belongs to
Property；
According to the multiple calibration polarization properties, multiple calibration polarization images are obtained；
Merge the multiple calibration polarization image, to obtain the polarization image of the sample to be tested.
3. any one the method according to claim 1~2, which is characterized in that first polarization properties, second polarization
Attribute includes Muller matrix.
4. a kind of polarization imaging device characterized by comprising
First polarization properties acquiring unit passes through position for controlling the polarization transmission light beam after standard sample and collecting lens
The diaphragm light hole of variation, to obtain multiple first polarization properties of standard sample；
Polarization properties error acquiring unit, for the standard deviation according to the multiple first polarization properties and the standard sample
Vibration attribute obtains multiple polarization properties errors of the standard sample；
Second polarization properties acquiring unit passes through position for controlling the polarization transmission light beam after sample to be tested and collecting lens
The diaphragm light hole of variation, to obtain multiple second polarization properties of sample to be tested；
Polarization image acquiring unit, for being obtained according to the multiple second polarization properties and the multiple polarization properties error
The polarization image of the sample to be tested.
5. a kind of polarized imaging system characterized by comprising focal plane filter and as claimed in claim 4 polarize
As device；
The focal plane filter includes that beam exit unit, collecting lens, diaphragm and the light beam set gradually along optical path connects
Receive unit；Sample to be tested or standard sample are placed between the beam exit unit and the collecting lens；
The beam exit unit is projected on sample to be tested or standard sample for providing polarized incident light beam；
The polarization transmission light beam that the collecting lens are used to will transmit through the sample to be tested or the standard sample converges at described
On the focal plane of collecting lens；
The diaphragm is located on the focal plane of the collecting lens, the diaphragm for control converge at it is pre- on the focal plane
If the polarization transmission light beam of angle penetrates the focal plane；The diaphragm includes diaphragm light hole；
The beam reception unit is used to receive the polarization transmission light beam through the focal plane.
6. system according to claim 5, which is characterized in that the focal plane filter further include: analyzing unit；
The analyzing unit is in the optical path between the beam exit unit and the beam reception unit；It is described to test sample
Product or the standard sample are placed between the beam exit unit and the analyzing unit；The analyzing unit is for modulating
Through the sample to be tested or the polarization state of the polarization transmission light beam of the standard sample.
7. system according to claim 6, which is characterized in that the analyzing unit includes first set gradually along optical path
Wave plate and the first polarizing film；
First wave plate is oppositely arranged with first polarizing film, through the sample to be tested or the polarization of the standard sample
Transmitted light beam is successively propagated through first wave plate and the first polarizing film.
8. system according to claim 7, which is characterized in that the beam exit unit includes successively setting along the optical path
Light source, the polarization subelement set；
The light source is for providing the directional light of specific wavelength；
The polarization subelement includes the second polarizing film and the second wave plate being oppositely arranged；The directional light of the specific wavelength is successively
Polarized incident light beam is converted to by second polarizing film and the second wave plate, is projected to the sample to be tested or the standard sample
Product.
9. system according to claim 8, which is characterized in that first wave plate and second wave plate are 1/4 wave
Piece.
10. according to the described in any item systems of claim 5~9, which is characterized in that the center of the diaphragm light hole with it is described
The focus of collecting lens is not overlapped.
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| CN201910253142.1A CN109839191A (en) | 2019-03-29 | 2019-03-29 | A kind of polarization imaging method and device thereof, polarized imaging system |
| PCT/CN2020/093460 WO2020200330A2 (en) | 2019-03-29 | 2020-05-29 | Polarization imaging method, device thereof, and polarization imaging system |
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| WO2020200330A3 (en) * | 2019-03-29 | 2020-11-19 | 清华-伯克利深圳学院筹备办公室 | Polarization imaging method, device thereof, and polarization imaging system |
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